1287504 九、發明說明： 【發明所屬之技術領域】 本發明係有關一種微透鏡部之製造方法，其兼具配合離心 力於曲面上製作立體式微透鏡部、可製作大面積之立體式微透 鏡部、可製作立體式微凸/微凹透鏡部、製程敎，以及生產 設備成本低等功效。 【先前技術】 ，不論是液晶顯示器（英文為Liquid Crystal，簡 無LCD)、行動電話之螢幕、個人數位助理（英文為 Digital ASsistant，簡稱PDA)，均需要更亮、更均勾、更省 電之面光縣強倾碰果，設計良好之透辦列（導光板） 可提昇顯示效果。舰透鏡_(導缺)之製造方法如下： -、触_法。將厚膜光随過曝光歸後職柱狀之 微結構，再經過高溫整形，光阻柱狀微結構溶化，利用内聚力 與表面張力之作用’這些微凸_即逐漸自動變形成具有半 狀表面之轉，_料微透舰_之結構。 糾二：δ成形法。此法是將類似X光深刻精密電鑄模㈤ /冉，續鱗触，德文為Lith卿aphie Ga WOTmun 板上T〔，UGA)雜娜，嘯餘聚合蝴 何/::㈣壓，非接觸壓模成形微透鏡陣列’透鏡曲率斗 么可藉由_溫度及勤控制。 手号 商嘴出法。㈣出微液滴方t其细類似喷墨 1287504 (ink-jet)印刷之技術，噴出複數個微液滴至該光阻層上，進 而形成反射式之微透鏡陣列。 四、準分子雷射加工法。準分子雷射微細加工技術製作微 小之3D微結構。將高分子材料基材例如··光學級聚甲基丙烯 酸甲酯（俗稱壓克力，英文為p〇lymethy mathacrylate，簡稱 PMMA)、聚碳酸酯（英文為p〇iyCarb〇nate，簡稱ρ〇或聚苯乙 烯（英文為P〇lyStyrene，簡稱PS)在χ軸及γ軸上移動，並利 用一可程式控制雷射光強度之裝置，在預定之位置發射出預定 之強度，如此，即可加工出一具有複數半圓球狀之外表面。 五、灰階光罩法。灰階光罩與一般之光罩最大不同處為灰 阳匕光罩曝光壹次即可產生多種不同之侧深度。可應用於連續 曲面形狀之多階繞射微光學元件與高填充率（fill factor)之 微透鏡陣列之製作。 而上述各種方式分別具有下述缺失·· [1] 無法以離心力於曲面上製作立體式微透鏡陣列。習用 不雨何種絵’均無法以離^力於曲面上製作立體式微透鏡陣 列，僅限於平面製作。 [2] 無法製作大面積之微透鏡陣列。習用不論何種製法， 均受限於平面設備佔用之面積限制，無法製作大面積之立體式 微透鏡陣列。 [3] 無法製作立體式微凹透鏡陣列。習用設備多以製作微 1287504 凸透鏡陣列為主，即使以灰階光罩法可以製作微凹透鏡陣列， 卻有製造費用昂貴的問題，且一個灰階光罩只能做一種微結構 形狀，成品形狀受限無變化。 [4] 製程不穩定。光阻熱熔法之半球狀表面不易精確控 制。而熱壓成形法在溫度過低時塑膝薄板無法形成透鏡，而壓 力過高時塑膠薄板將直接接觸模具頂部，半球狀表面不易精確 控制。液滴喷出法之微透鏡直徑與喷嘴喷口直徑大小相關，同 樣難以控制外表面之精確外形（包括大小、高度、焦距等）。準 刀子雷射加工法之表面的粗糙度較差。 [5] 生產設備成本高。準分子雷射加卫法触階光罩法同 樣存在著設備複雜又昂貴之缺點。 因此，有必要研發出可解決上述習用缺點之製法。 【發明内容】 本發明之主要目的，在於提供—種以離心力控制表面曲率 之立體微親_之製法’射配合離㈣㈣面上製作 式微透鏡部。 Μ 本發明之次要目的’在於提供—種以細力控制表面曲率 t體微透鏡_之製法，射製作大面積之域式微透鏡 科明之又—㈣，在於提供—種轉表面曲3 之立體微透鏡_之製法，丨 本發明之再一目的，* 透鏡部 、’在於提供-種鱗^力控制表面曲2 1287504 之立體微透鏡陣列之製法，其具備製程穩定之優點。 本發明之其他目的，在於提供一種以離心力控制表面曲率 之立體微透鏡陣列之製法，其具備生產設備成本低之市場競爭 力。 本發明係提供一種以離心力控制表面曲率之立體微透鏡 陣列之製法，其包括下列步驟： 一·預備步驟：準備一基板及一光阻； 二·微影成形步驟··將光阻均勻塗佈於該基板上；再將該 基板與该光阻同時置於一加熱元件上軟烤；接著將一光罩覆設 於該光阻上，並以一紫外線曝光裝置透過該光罩上之模孔，對 該光阻發料光進㈣光，曝絲再予鱗，於該光阻上 顯影成形孔洞部； —離心力成形步驟：於光阻之孔洞部上塗佈一紫外光固 化膠，將基板、細與紫外細化膠—併置人—真空腔體中， 將孔洞部内之空氣抽出，使紫外光固化膠能順利填入每—孔洞 中；將該基板連同該光阻包裹於一低轉速機構之轉轴上；控制 該轉轴之轉速以產生離心力，藉此離心力控繼紫外光固化膠 於孔洞勒赵歡之曲率伟，再辭料歧料光固化 膠於孔洞部内慢慢固化成形； 四·成品步驟：完成立體式微透鏡部。 本發明之上述目的紐點，*難從下述所選用實施例之詳 1287504 • 細說明與附圖中，獲得深入暸解。 t 茲以下列實施例並配合圖式詳細說明本發明於後： 【實施方式】 本發明係為一種『以離心力控制表面曲率之立體微透鏡陣 列之製法』，其包括下列步驟： 一 ·預備步驟11 :先準備一基板21及一光阻22 (參閱第 一及第二圖）； φ 二·微影成形步驟12 :將該基板21置於一旋轉塗佈機91 上，啟動該旋轉塗佈機91帶動該基板21轉動，使該光阻22 可以均勻塗佈於該基板21上；再將該基板21與該光阻22同 時置於一加熱元件92 (參閱第三圖，例如為熱墊板，英文為 Hot Plate)上軟烤；接著將一光罩93覆設於該光阻22上； 以一紫外線曝光裝置94(英文為Aligner)透過該光罩93上之 模孔931，對該光阻22發出一紫外光941進行曝光(參閱第四 • 圖），曝光後再予烘烤，最後在該光阻22上顯影（類似X光深 刻精密電鑄模造成形，簡稱深刻電鑄模造，德文為[Description of the Invention] [Technical Field] The present invention relates to a method for manufacturing a microlens portion, which is capable of producing a three-dimensional microlens portion on a curved surface by combining centrifugal force, and can manufacture a large-area three-dimensional microlens portion. The three-dimensional micro-convex/micro-concave lens part, the process 敎, and the low cost of production equipment are produced. [Prior Art], whether it is liquid crystal display (Liquid Crystal in English), mobile phone screen, personal digital assistant (digital ASsistant, PDA for short), all need brighter, more uniform, more power-saving The face of the county is strongly inclined to touch the fruit, and the well-designed transparent column (light guide plate) can enhance the display effect. The manufacturing method of the ship lens _ (defective) is as follows: -, touch _ method. The thick film light is exposed to the microstructure of the post-column after exposure, and then subjected to high temperature shaping, the columnar microstructure of the photoresist is dissolved, and the cohesive force and the surface tension are utilized. These micro-convex gradual changes automatically form a semi-surface. Turn, _ material micro-transmission ship _ structure. Correction two: δ forming method. This method is similar to X-ray deep precision electroforming mold (5) / 冉, continuous scale touch, German for Lith Qing aphie Ga WOTmun board T [, UGA) 娜 Na, Xiao Yu polymerization butterfly /:: (four) pressure, non-contact The compression molding microlens array 'lens curvature bucket can be controlled by _temperature and diligence. Hand No. (4) The micro-droplet side is similar to the inkjet 1287504 (ink-jet) printing technique, and a plurality of micro-droplets are ejected onto the photoresist layer to form a reflective microlens array. Fourth, excimer laser processing. Excimer laser micromachining technology produces tiny 3D microstructures. The polymer material substrate is, for example, optical grade polymethyl methacrylate (commonly known as acrylic, p英文lymethy mathacrylate, PMMA for short), and polycarbonate (p〇iyCarb〇nate, abbreviated as ρ〇 or Polystyrene (P〇lyStyrene in English, PS for short) moves on the x-axis and the γ-axis, and uses a device that can control the intensity of the laser light to emit a predetermined intensity at a predetermined position, so that it can be processed. A multi-spherical spherical outer surface. 5. Gray-scale mask method. The biggest difference between the gray-scale mask and the general mask is that the gray-yang mask can be exposed to a plurality of different side depths. The fabrication of a multi-step diffractive micro-optical element with a continuous curved surface shape and a high fill factor microlens array. The above various methods have the following drawbacks. [1] It is impossible to create a stereoscopic microscopic shape on a curved surface by centrifugal force. Lens arrays. It is not possible to make stereoscopic microlens arrays on the curved surface. It is limited to planar fabrication. [2] It is impossible to make large-area microlens arrays. The method is limited by the area limitation of the planar device, and it is impossible to make a large-area three-dimensional microlens array. [3] It is impossible to make a three-dimensional micro concave lens array. The conventional equipment is mainly made of micro 1287504 convex lens array, even with gray scale light. The mask method can produce a micro-concave lens array, but it has the problem of expensive manufacturing, and a gray-scale mask can only be made into a microstructure shape, and the shape of the finished product is limited without change. [4] Process instability. Photoresistive hot melt method The hemispherical surface is not easy to precisely control. However, when the temperature is too low, the plastic knee sheet cannot form a lens, and when the pressure is too high, the plastic sheet will directly contact the top of the mold, and the hemispherical surface is not easy to precisely control. The diameter of the microlens is related to the diameter of the nozzle nozzle, and it is also difficult to control the precise shape of the outer surface (including size, height, focal length, etc.). The surface roughness of the pro-knives laser processing method is poor. [5] The cost of production equipment is high. The molecular laser-assisted method of the reticle method also has the disadvantages of complicated and expensive equipment. Therefore, it is necessary to develop SUMMARY OF THE INVENTION The main object of the present invention is to provide a three-dimensional micro-proximity method for controlling the curvature of a surface by centrifugal force, and to produce a microlens portion on the (four) (fourth) surface. The purpose of 'providing' is to provide a method for controlling the surface curvature of a t-body microlens with a fine force, and to produce a large-area domain-type microlens, and then to provide a three-dimensional microlens with a surface curvature. Further, another object of the present invention is to provide a method for manufacturing a stereo microlens array of a surface control curve 2 1287504, which has the advantage of stable process. It is another object of the present invention to provide a lens. The method for manufacturing a three-dimensional microlens array that controls the curvature of a surface by centrifugal force has a market competitiveness with low production equipment cost. The invention provides a method for manufacturing a stereo microlens array for controlling surface curvature by centrifugal force, which comprises the following steps: 1. preliminary step: preparing a substrate and a photoresist; 2. microlithography forming step · uniformly coating the photoresist On the substrate; the substrate and the photoresist are simultaneously placed on a heating element for soft baking; then a reticle is coated on the photoresist and passed through a die hole on the reticle by an ultraviolet exposure device. The photoresist is irradiated with light (four) light, the wire is exposed to a scale, and the hole is formed on the photoresist; the centrifugal force forming step: coating an ultraviolet curing glue on the hole portion of the photoresist, and the substrate, Fine and ultraviolet refining glue - juxtaposed in the human - vacuum chamber, the air in the hole is extracted, so that the ultraviolet curing glue can be smoothly filled into each hole; the substrate and the photoresist are wrapped in a low-speed mechanism On the rotating shaft; controlling the rotation speed of the rotating shaft to generate centrifugal force, whereby the centrifugal force is controlled to follow the curvature of the ultraviolet curing glue in the hole Le Zhaohuan, and then the disintegrating light curing glue is slowly solidified in the hole portion; Step: Complete the stereoscopic microlens section. The above-mentioned object of the present invention is difficult to obtain from the detailed description of the selected embodiment 1287504. The present invention will be described in detail below with reference to the following embodiments: [Embodiment] The present invention relates to a "manufacturing method of a stereo microlens array for controlling surface curvature by centrifugal force", which comprises the following steps: 11: Prepare a substrate 21 and a photoresist 22 (refer to the first and second figures); φ2· lithography forming step 12: placing the substrate 21 on a spin coater 91, and starting the spin coating The substrate 91 drives the substrate 21 to rotate, so that the photoresist 22 can be uniformly applied to the substrate 21. The substrate 21 and the photoresist 22 are simultaneously placed on a heating element 92 (see the third figure, for example, a thermal pad). a plate, in English, is hot-baked; then a mask 93 is placed on the photoresist 22; an ultraviolet light exposure device 94 (English Aligner) is passed through the die hole 931 of the mask 93. The photoresist 22 emits an ultraviolet light 941 for exposure (refer to the fourth picture), and then baked after exposure, and finally developed on the photoresist 22 (similar to the X-ray deep precision electroforming mold forming, referred to as deep electroforming molding, German
Lithographie GaVanoformung Abformung，簡稱 LIGA)完成孔 洞部221(參閱第五圖）； 三·離心力成形步驟13 ··於該光阻22之孔洞部221上塗 ’ 佈一紫外光固化膠23(參閱第六圖），將基板21、光阻22與紫 外光固化膠23 —併置入一真空腔體95中，將孔洞部221内之 空氣抽出，使紫外光固化膠23能順利填入每一孔洞中； 1287504 光阻22得到較佳之曝光效果，最後進行3至8分鐘顯影後， 即完成該孔洞部221。 在該離心力成形步驟13中，該紫外光固化膠23可選用之 型號為 Norland Optical Adhesive 63(簡稱 NOA63)，其黏度 為2500cps，而折射率為1.56，並置入真空歷力為-76公分- 水銀柱高之真空腔體95中，可將孔洞部221内之空氣抽出， 使紫外光固化膠23可以初階段液量231、次階段液量232及 末階段液量233(參閱第六圖）之三種液量狀態慢慢順利的填入 孔洞中； 該低轉速機構96之轉轴961為一不鏽鋼圓柱，其直徑 大約為76讓、長大約為300mm，並以精車削以及研磨使其表面 平整光滑達到較佳之表面精度，以供基板1〇包覆。實務上， 該轉軸961之轉速大約以3〇〇rpm至1800rpm為較佳，而在此 一步驟中’該紫外線曝光裝置94係發出波長大約365nm且照 度大約為2300//w/cm2之紫外光941，照射該孔洞部221内之 紫外光固化膠23，使其慢慢固化而完成立體式微透鏡部24。 參閱第七圖，實務上，該低轉速機構96至少包括一機 座962、一基材承載座963、一傳動皮帶輪組964、一馬達965、 至少一減速齒輪組以及變頻器，其中，該馬達965之最高轉速 為1800rpm，經由18 : 1之減速齒輪組將轉速降為i〇〇rpm，而 馬達965轉速則透過該變頻器調整，其控制馬達965轉速範圍 11 1287504 為〇至1800rpm，經減速齒輪組後轉速輸出在0至1〇〇rpm之 間’該傳動皮帶輪組964則是將該馬達965之動力傳到該轉軸 961，使其均勻且精確地轉動該基板21 (以及光阻烈與紫外光 固化膠23)。 參閱第八圖，該轉軸961未轉動時，該紫外光固化膠23 係大約水平容納於該孔洞部221，當控制該轉軸961以較慢速 度轉動，產生之離心力使紫外光固化膠23於孔洞部221内形 成預定之曲率半徑無距’料細化膠23形成凸出孔洞部 221 —第一距離D1之立體式微透鏡部24(如第九圖所示）。 參閱第十圖，控制該轉軸961以較快速度轉動，產生之離 心力改變紫外細化膠23於孔洞部221 _成之曲率半徑與 焦距’紫外光固化膠23形成凸出孔洞部221 一第二距離之 立體式微透鏡部24，亦即，數值孔徑（英文為Μ·—Lithographie GaVanoformung Abformung (LIGA) completes the hole portion 221 (refer to the fifth figure); 3. Centrifugal force forming step 13 · Applying a UV-curable adhesive 23 to the hole portion 221 of the photoresist 22 (refer to the sixth figure) The substrate 21, the photoresist 22 and the ultraviolet curing adhesive 23 are placed in a vacuum chamber 95, and the air in the hole portion 221 is extracted, so that the ultraviolet curing adhesive 23 can be smoothly filled into each hole; 1287504 light The resistor 22 obtains a better exposure effect, and finally, after 3 to 8 minutes of development, the hole portion 221 is completed. In the centrifugal force forming step 13, the UV curable adhesive 23 can be selected as a Norland Optical Adhesive 63 (abbreviated as NOA63) having a viscosity of 2500 cps, a refractive index of 1.56, and a vacuum force of -76 cm. In the vacuum chamber 95 of the mercury column height, the air in the hole portion 221 can be extracted, so that the ultraviolet curing glue 23 can have the initial liquid amount 231, the secondary liquid amount 232, and the final liquid amount 233 (refer to the sixth figure). The three liquid state states are slowly and smoothly filled into the hole; the rotating shaft 961 of the low-speed mechanism 96 is a stainless steel cylinder having a diameter of about 76 and a length of about 300 mm, and the surface is smoothed by fine turning and grinding. A better surface precision is achieved for the substrate 1 to be coated. In practice, the rotation speed of the rotating shaft 961 is preferably about 3 rpm to 1800 rpm, and in this step, the ultraviolet exposure device 94 emits ultraviolet light having a wavelength of about 365 nm and an illuminance of about 2300//w/cm2. 941, the ultraviolet curable adhesive 23 in the hole portion 221 is irradiated and solidified slowly to complete the three-dimensional microlens portion 24. Referring to the seventh figure, in practice, the low speed mechanism 96 includes at least a base 962, a substrate carrier 963, a drive pulley set 964, a motor 965, at least one reduction gear set, and a frequency converter, wherein the motor The maximum speed of the 965 is 1800 rpm. The speed is reduced to i〇〇rpm through the 18:1 reduction gear set, and the motor 965 speed is adjusted by the inverter. The control motor 965 speed range 11 1287504 is 〇 to 1800 rpm and is decelerated. After the gear set, the rotational speed output is between 0 and 1 rpm. 'The drive pulley set 964 transmits the power of the motor 965 to the rotating shaft 961, so that the substrate 21 is evenly and accurately rotated (and the light resistance is strong) UV curing adhesive 23). Referring to the eighth figure, when the rotating shaft 961 is not rotated, the ultraviolet curing adhesive 23 is horizontally accommodated in the hole portion 221, and when the rotating shaft 961 is controlled to rotate at a slow speed, the centrifugal force is generated to cause the ultraviolet curing glue 23 to be in the hole. The portion 221 has a predetermined radius of curvature without a distance, and the material refining rubber 23 forms a convex hole portion 221 - a three-dimensional microlens portion 24 having a first distance D1 (as shown in FIG. 9). Referring to the tenth figure, the rotating shaft 961 is controlled to rotate at a relatively rapid speed, and the centrifugal force generated changes the radius of curvature and the focal length of the ultraviolet refining adhesive 23 in the hole portion 221. The ultraviolet curing adhesive 23 forms a convex hole portion 221 and a second The three-dimensional microlens portion 24, that is, the numerical aperture (English is Μ·-
Aperature ’簡稱NA)可自由控制，故，可形成不同型離、之立 體式微透鏡部24，糾，光罩93大小亦可改敎體式微透鏡 部24之直徑。 實務上，該立體式微透鏡部24係選自陣列型態、不規則 型態其中之一種。 當然，為使本_之立體式微魏部24可以量產本發 明在該成^麵Η後X包括_再__ 15 :胁該立體式 微透鏡部24(參閱第十一圖）上，利用公知具光學性質之聚二 ⑧ 12 1287504 甲基石圭氧燒(英文為Polydimethylsiloxane， 簡稱PDMS)或公 知電鑄技術成形—模仁25(如第十二圖所示），可進行翻模， 而大量射出（例出射出微凹透鏡部）製造。 本發明之立體式微透鏡部，係將傳統平面製程延伸至三度 二間之曲面’而在非平面（n〇n-planar)之基材上製作該立體 式微透鏡#’故’可以生產大面積之立體式微透鏡部，並可應 用於可撓式顯示裝置、背光模組巾之導光板、近場光學、光學 檢測與通訊元件····等。 而運用於本發明成形之立體式微透鏡部具有聚焦性，可作 衫像與視覺之光學鏡>;，亦可胁光纖元件之光訊號聚焦（減 少光損耗）、或細於光學式對準祕(例如生產精準模具之裝 配）。 當然，亦可以針對生醫器材所需之内視鏡，專門製作微小 鏡片。而顧於有機二極_LED)與無機二極體(_，可提 南其發光效率。 本發明之優點及功效如下所述： [1]配合離心力於曲面上製作立體式微透鏡部。本發明藉 由可撓式軟板將光喊制部内之料錢化膠包覆於^ 速機構之轉軸上’調整轉軸轉速產生預定之離㈣，以控制紫 外光固化雜細勒職觀之曲特彳麟鏡，並雜外 光固化膠針料光，使桃_成立體式微透鏡部。 1287504 ⑵可製作大轉之讀辆透綱。畔㈣之 微透鏡部可在三度空_面讀作，故，即使大面積之2 式微透鏡部，只好峨折，柯突麵積__利製作。 [3]可製作讀式微凸/微凹透鏡部。以本發明之設叶， 只要妥善控制該轉軸之轉速，即可控制立體式微透鏡部之數值 孔控，可製造立體式微凸透鏡部’亦可再翻模射出立體式微凹 透鏡部。 ⑷製程穩定。本發明之立體式微透鏡部採用曝光成形， 非冷卻成形，财舰冷、成之尺核化，可崎定控制立 體式微透鏡列之尺寸，製程穩定。 [5]生產设備成本低。本發明無需複雜又昂貴之可程式控 制裝置或是生產設備’搭配本發明使用聚二甲基娃氧燒或公知 電鑄技術成形之模仁’即可進行翻模，而大量射出製造，生產 设備成本低。 以上僅是藉錄佳實_詳細制本㈣，對於該實施例 所做的任何簡單修改與變化，皆不脫離本發明之精神與範圍。 由以上詳細說明’可使熟知本項技藝者明瞭本發明的破可 達成前述目的’實已符合翻法之規定，級^㈣專利申請。 【圖式簡單說明】 第一圖係本發明之製造方法之流程圖 第二圖係本發明之製造過程之實施例示意圖一 1287504Aperature ‘abbreviated as NA) can be freely controlled, so that the different type of detached, lenticular lens unit 24 can be formed, and the size of the mask 93 can also be changed to the diameter of the gantry lens unit 24. In practice, the three-dimensional microlens portion 24 is selected from one of an array type and an irregular type. Of course, in order to enable the three-dimensional micro-wei part 24 of the present invention to be mass-produced, the present invention is known in the form of a stereoscopic microlens portion 24 (see FIG. 11). Poly 2 8 12 1287504 with optical properties (Polydimethylsiloxane in English, PDMS for short) or known electroforming technology for forming - mold core 25 (as shown in Figure 12), can be overturned, and a large number It is produced by injection (for example, a micro concave lens portion is emitted). The three-dimensional microlens portion of the present invention extends the conventional planar process to a curved surface of three degrees and two while forming the three-dimensional microlens on a non-planar (n〇n-planar) substrate. The three-dimensional microlens portion can be applied to a flexible display device, a light guide plate for a backlight module, a near-field optical, an optical detection and communication component, and the like. The three-dimensional microlens portion used in the forming of the present invention has a focusing property, and can be used as an optical mirror for the shirt image and the vision. It can also focus on the optical signal of the optical fiber component (reducing optical loss) or finer than optical alignment. Secret (such as the production of precision mold assembly). Of course, it is also possible to make tiny lenses for the endoscopes required for biomedical equipment. Considering the organic two-pole (LED) and the inorganic diode (_, can be used to improve the luminous efficiency. The advantages and effects of the present invention are as follows: [1] The three-dimensional microlens portion is fabricated on the curved surface in combination with centrifugal force. The flexible rubber plate is used to cover the rotating shaft of the light-scraping part on the rotating shaft of the speed mechanism. The rotating shaft speed is adjusted to generate a predetermined distance (4) to control the ultraviolet curing of the fine-grained service. Lin mirror, and miscellaneous external light curing glue needle material light, so that peach _ set up the body microlens. 1287504 (2) can make a large turn to read the vehicle through the platform. The side (four) of the microlens can be read in the third degree _ face, Therefore, even if the large-area type 2 microlens portion has to be folded, the Kob area is produced. [3] The read micro-convex/micro-concave lens portion can be produced. With the leaf of the present invention, the shaft can be properly controlled. The rotational speed can control the numerical hole control of the three-dimensional microlens portion, and the three-dimensional micro convex lens portion can be manufactured and the three-dimensional micro concave lens portion can be turned over again. (4) The process is stable. The three-dimensional microlens portion of the present invention adopts exposure forming, non-cooling forming. The treasury is cold and the nucleus is formed. Nasaki controls the size of the three-dimensional microlens array, and the process is stable. [5] The production equipment is low in cost. The present invention does not require complicated and expensive programmable control devices or production equipment 'with the present invention using polydimethylsiloxane or It is known that the mold of the electroforming technology can be used for mold turning, and the production of a large number of injections is low, and the production equipment is low in cost. The above is only a matter of borrowing the good _ detailed method (4), any simple modification to this embodiment Changes are not departing from the spirit and scope of the present invention. From the above detailed description, 'the skilled person skilled in the art will be able to understand that the invention can achieve the above-mentioned purpose' has been in accordance with the provisions of the law, level ^ (four) patent application. BRIEF DESCRIPTION OF THE DRAWINGS The first drawing is a flow chart of the manufacturing method of the present invention. The second drawing is a schematic diagram of an embodiment of the manufacturing process of the present invention. 1287504
第三圖係本發明之製造過程之實施例示意圖二 第四圖係本發明之製造過程之實施例示意圖三 第五圖係本發明之製造過程之實施例示意圖四 第六圖係本發明之製造過程之實施例示意圖五 第七圖係本發明之製造過程之實施例示意圖六 第八圖係第七圖之部分結構放大之示意圖一 第九圖係第七圖之部分結構放大之示意圖二 第十圖係第七圖之部分結構放大之示意圖三 第十一圖係本發明之成品之示意圖 第十二圖係本發明之製造過程之實施例示意圖七 【主要元件符號說明】3 is a schematic view of an embodiment of a manufacturing process of the present invention. FIG. 4 is a schematic view of an embodiment of a manufacturing process of the present invention. FIG. 5 is a schematic view of an embodiment of a manufacturing process of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 5 is a schematic view showing an embodiment of a manufacturing process of the present invention. FIG. 8 is a schematic view showing a part of the structure of the seventh figure. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 7 is a schematic view showing a part of the structure of the present invention. FIG. 11 is a schematic view of the finished product of the present invention. FIG. 12 is a schematic view showing an embodiment of the manufacturing process of the present invention.
11預備步驟 13離心力成形步驟 15再翻模步驟 22光阻 23紫外光固化膠 232次階段液量 24立體式微透鏡部 12微影成形步驟 14成品步驟 21基板 221孔洞部 231初階段液量 233末階段液量 25模仁 91旋轉塗佈機 92加熱元件 93光罩 931模孔 94紫外線曝光裝置 941紫外光 95真空腔體 96低轉速機構 15 1287504 961轉軸 963基材承載座 965馬達 D2第二距離 962機座 964傳動皮帶輪組 D1第一距離11 preliminary step 13 centrifugal force forming step 15 re-molding step 22 photoresist 23 ultraviolet curing adhesive 232 times liquid amount 24 stereo microlens portion 12 lithography forming step 14 finished product step 21 substrate 221 hole portion 231 initial stage liquid amount 233 Stage liquid volume 25 mold 91 rotary coating machine 92 heating element 93 light mask 931 mold hole 94 ultraviolet exposure device 941 ultraviolet light 95 vacuum chamber 96 low speed mechanism 15 1287504 961 shaft 963 substrate carrier 965 motor D2 second distance 962 base 964 drive pulley set D1 first distance