TWI273237B - Coulomb blockade device operated under room temperature - Google Patents

Abstract

A coulomb blockade device operated under room temperature. The device comprises a substrate with an oxide layer formed thereon, a source and a drain installed on the oxide layer, a first gold nanoparticle immobilized on the oxide layer and between the source and drain, and a second gold nanoparticle above the first gold nanoparticle, wherein the first and second gold nanoparticles are connected by a hybrid DNA. A method of fabricating the coulomb blockade device is also provided.

Description

1273237

V. INSTRUCTION DESCRIPTION OF THE INVENTION (1) Technical Field of the Invention A The present invention relates to a semiconductor device, and more particularly to an apparatus having a Coulomb blocking effect at a temperature and a method of manufacturing the same. [Prior Art] In recent years, the technology for manufacturing molecular devices using the tantalum process has been gradually observed. However, although the industry has invested heavily in process improvement and molecular assembly technology, it has to be matched with bows due to the rapid shrinkage of the device to the nanometer size. With less advanced materials or the development of new manufacturing technologies, there are still many systems that are not mature enough to stay in the development stage. At present, similar single-electron transistors are still placed because of their advantages of being able to operate a small amount of electrons under low-power conditions, and the already-imported technology for manufacturing high-density integrated circuits, in order to make these devices practical, must be allowed It can be operated normally at room temperature, and in order to achieve this, the size of the island structure in the device needs to be less than 丨0 nm, which matches the overall capacitance and reduces the effect of thermal disturbance. It is known that the device constructed by biomolecules has the advantages of automatic assembly, rice size and low cost. In addition, the current biotechnology (such as DNA sensing device) utilizes probe DNA hybridization target DNa to analyze the technique. However, the probe DNA here needs to be labeled at the 3, or 5, end, but due to the potential danger of the semi-life elements such as radioisotope or 32P, other marking methods have been developed, such as chemistry. Luminous mark, 鸯 light: field mark, etc., but the above method still needs to cooperate with expensive probes and optical inspection color, and the sample DN A should be fixed on the film to make it fit with the probe. Not only is it time consuming and often causes inconvenience to the user. ”

1273237 V. SUMMARY OF THE INVENTION (2) In view of the above, the object of the present invention is to disclose a library stealing device which can operate at up to /jnL, and the DNA template can quickly and sensitively identify the target DNA sequence. . In order to achieve the above object, the present invention provides a room temperature operated Coulomb blocking device comprising: a substrate; an oxide layer formed on the substrate; a source and a drain disposed on the oxide layer; a first gold nanoparticle fixed on the oxide layer between the source and the drain; and a second gold nanoparticle located above the first gold nanoparticle, and the first and the first The two gold nanoparticles are linked by a hybrid DNA, wherein the hybrid DNA is captured by a capture DNA, a probe DNA (pr 〇be DN/) and a target DNA, one end of the grab DNA is ligated to one end of the probe DNA to form a strand consisting of the capture DNa and the probe DNA. Oxyribonucleic acid, which is a DNA consisting of DNA and probe DNA, and complementary to the target, to form a pair of heterogeneous denuclear nucleic acids. In order to achieve the above object, the present invention further provides a method for manufacturing a Coulomb blocking device operating at room temperature, comprising the steps of: providing a substrate on which an oxide layer is formed; and providing a source and a drain for the oxidation. Fixing a first gold nanoparticle on the oxide layer and positioning it between the anode and the drain; forming a hybrid deoxyribonucleic acid linked to the first gold nanoparticle; Forming a second above the first gold nanoparticle

0522-A20466TWF(Ν2); dav i dp td Page 7 1273237 ------ V. Description of the invention (3) The gold nanoparticles 'and the deoxygenated by the hybrid between the first and second gold nanoparticles Nuclear-nucleic acid linkage. The above described objects, features, and advantages of the present invention will be apparent from the following description of the preferred embodiments. Including the following steps: (丨) synthesis of gold nanoparticles, (2) fabrication of gold nanoparticles, (3) fixation of single-layered gold nanoparticles, and (4) DNA hybridization and multi-layered gold nanoparticles Self-assembly. (1) Synthesis of gold nanoparticles: First, tetrachloroauric acid (hauci4) is dissolved in deionized water to prepare a tetrachloroauric acid aqueous solution, followed by trisodium citrate and tannin. The acid (tannic acid) and potassium carbonate are dissolved in another deionized water to prepare an aqueous solution of citric acid. Then, the two solutions are separately heated and then mixed with each other and strongly taxed. Thereafter, it is heated to boiling, that is, a gold nanoparticle solution is formed. The absorption spectrum of the gold nanoparticle solution was measured by a Hitachi U33 10 UV-vis spectrometer, while the size of the gold nanoparticles was measured by a high-resolution transmission electron microscope (HR-TE/" model H-700. Hitachi). The radius of the gold nanoparticles can be controlled by the addition of trisodium citrate, tannic acid and tetrachloroauric acid, such as when adding a larger amount of trisodium. When citrate or tannic acid is used, 金.,, ”" can be used to pay smaller size gold nanoparticles, and vice versa.

1273237 V. DESCRIPTION OF THE INVENTION (4) Using a (Chemical 2) Λ Λ Λ 的 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The thickness of the #jjj is generally between 150 and 250 nm, and then covers a photoresist 2', and the thickness of the photoresist layer is substantially 200 to 600 nm, ^, , /00奈/卡' Next, the photoresist layer is patterned to obtain an electrode pattern of 2 μ 2 and then a metal titanium layer as an adhesive layer is coated on the patterned photoresist to cover the electrode patterns to Increasing the adhesion between the oxide layer and the future, the thickness of the metal titanium layer is generally between 5 nanometers, and I deposit a gold film on the metal titanium layer. The thickness is generally between 40 and 80 nm, preferably 6 nanometers. Finally, the substrate is washed with acetone-liquid to remove the residual photoresist, and thus the fabrication of the nano electrode is completed. The Jinnai electrode is composed of gold, which includes; ', and; and the pole, or includes a source, a drain and a gate, wherein the distance between the pole and the drain is generally between 10 and 6 50 nm, preferably 30 0 Nai, only 'the distance between the idle pole and the source or the bungee is generally between 1 000 and 2000. The best is: i1, 500 nm: the width of the gold nano electrodes Generally, the thickness of the electrodes is the thickness of the gold film, and the thickness of the electrodes is generally 40 to 80 nm, preferably 6 nanometers. (3) Fixation of single-layered gold nanoparticles: This step is fixed on the oxide layer by using a =na. The following is a description of the one of the linking molecules: a hundred first, and a specific amount of the linking molecule is dissolved in the dimethyl group. Yafeng = er; 4yl /: Txide, 诵) solvent, after which, adjust the solution / Chen to the special wave degree, that is, complete the preparation of the molecular solution of the connection, the 苴 linker molecule is 矽 alkyl at one end and Sulfur-based. The following opening into the g 0522-A20466TWF (N2); david.ptd page 9 1273237 V, invention description (5) ^ layer of gold nai particles fixed, first, will be equipped with a gold nano electrode substrate times In a solution of a linking molecule of 100 ° C, the end of the linking molecule containing a decyl group is bonded to the oxide layer to form a decane bond, and then the substrate is taken out and washed with DMSO and blown with nitrogen, and then the substrate is immersed in Chennai. In the rice particle solution, the reaction is overnight, and the other end of the linking molecule containing the sulfur group is connected to the gold nanoparticle, and thus, the step of fixing the gold nanoparticle by the bonding and the fixing on the oxide layer is performed. In the invention, the fixed gold nanoparticle system is located at the source On the oxide layer between the electrode and the bungee. (4) DNA hybridization and self-assembly of the layered gold nanoparticles. First, the capture DNA (cDNA) solution is injected into the N- 2-hydroxyethyl-p-diazepine. A solution of 4-(2-hydroxyethyl)-l-piperazineethanesulfonic acid (HEPES) is formed to form a mixed solution, and the pH of the HEPES solution is adjusted by the EDTA buffer solution. Then, the substrate with the single layer of gold nanoparticles is immersed in the mixed solution to react at room temperature, so that the gold nanoparticles are connected with the cDNA, and then washed with SPSC buffer solution to remove the non-carbonized rice. The particle-bound cDNA molecule is then blown dry with nitrogen to produce a grasping DNA by attaching a sulfur-containing group to the gold nanoparticle, and the joining process is a self-assembly (se 1 f - as semb ly) the ligation process, followed by immersing the substrate in a mixed solution of a target DNA (tDNA) solution and a probe DNA (pDNA) solution, followed by SPSC buffering The substrate is cleaned by a solution to remove residual reagents on the substrate. At this point, the hybridization of D N A is completed to form a hybrid DMA comprising the captured MA, the target DNA and the probe DNA, wherein one of the MAs is captured.

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V. INSTRUCTIONS (6) 1273237 The end system is ligated to one end of the probe DNA, and the two of them are combined with the fDNA to form the final double-stranded hybrid DNA, and then the cleaned = plate Immersed in the mixed a/valley solution prepared by the gold nanoparticle solution and the PBS buffer solution, so that the first layer of the gold nanoparticle is connected with the connection, and the substrate is washed with a PBS buffer solution to remove the The bonded gold nanoparticles are blown dry with nitrogen, and then the substrate is immersed in deionized water, to be taken out, blown dry with nitrogen and further dried under vacuum, thereby completing the multi-layered gold nanoparticle In the assembly, the probe DNA is linked to the gold nanoparticles by a sulfur-containing group contained therein, and the above-mentioned joining process is also a self-assembly joining process. EXAMPLES (1) Synthesis of gold nanoparticles First, 1 g of tetrachloroauric acid (HAuC14, Aldrich Chem Co.) was dissolved in 80 ml of deionized water to prepare a tetrachlorogold. An aqueous acid solution, followed by tri· 〇丨mg of trisodium citrate, 〇·〇 5 mg of tannic acid, and 2.3 mg of carbonate carbonate (Aldrich Chem. Co) ·) Dissolve in another 20 ml of deionized water to prepare a lyophilic acid water bath 'setter' and heat the two solutions to Celsius deg and then mix and strongly mix, until the mixed solution appears dark red After the color, 'heating the Buddha for ten minutes', a gold nanoparticle solution is formed. The absorption spectrum of the gold nanoparticle solution is measured by a Hitachi U3310 UV-vis spectrometer, which has a strong surface-plasma resonance (SPR) at a wavelength of 517 nm. As shown in the figure la,

0522-A20466TWF(N2);david.ptd Page 11 1273237 V. INSTRUCTIONS (7) The size of the gold nanoparticles is nuclei by the resolution of the penetrating electron microscope 4.0 soil 13 nm. Compared with 〇L, HlUchi), the radius is roughly A1 4 η + 9 R ^ to 5 brothers, if the synthesized gold nanoparticle radius is 丄4· ϋ ± 2·6 nanometer 睹, 廿 private u The semi-*Sririch's strong SPR absorption will appear at a position around the wavelength of 22 22, as shown in Figure lb. (2) Fabrication of the gold nano electrode: Please refer to the second drawing. First, the substrate 20 is provided, and then a cerium oxide layer 25 is deposited on the ruthenium substrate 2 by plasma enhanced chemical vapor deposition (PECVD). On the upper surface (31), the thickness of the dioxide layer 2 5 is 2 Å, and then a photoresist layer 30 is coated on the ruthenium dioxide layer 25 by spin coating (S2), and the photoresist layer 3 The thickness of the crucible is 4 〇〇 nano' followed by 'e 1 ectr〇n beam lithography (Leica Weprint model-200 stepper,

Jena, Germany) patterning the photoresist layer 3 to obtain an electrode pattern 35 (53), and then depositing a metal titanium layer 40 as an adhesive layer on the patterned photoresist layer and covering the electrode patterns 35 (S4) In order to increase the adhesion between the dioxide layer 25 and the gold film to be deposited in the future, the thickness of the metal titanium layer 4 为 is 5 nm, and then a gold film 45 is deposited on the metal titanium layer 40 (S5). The thickness of the gold film 45 is 60 nm. Finally, the crucible substrate 20 (S6) is cleaned with an acetone solution to remove the remaining photoresist, and thus the fabrication of the gold nano electrode 35' is completed. The gold nano electrode 3 5 ' is composed of gold, and includes a source 50 and a drain 5 5 , wherein the source 50 and the drain 55 are 3 nanometers apart. The width of the gold nanoelectrodes (50, 5 5) is 600 nm, and the thickness of the electrodes (50, 55) is the thickness of the gold film 45, which is 60 nm. (3) Fixation of single-layered gold nanoparticles: This step utilizes a connection score

1273237 V. INSTRUCTIONS (8) The gold nanoparticles are fixed on the oxide layer. The following describes the preparation of the linker molecule: First, a specific amount of thiocaptopropy 1 tr imethoxysi lane (MPTMS) linking molecule is dissolved in 103⁄4 liter of dimethyl sulfoxide (DMS0). In the solvent, after the concentration of the solution is adjusted to 5 mM, the preparation of the linking molecule (MpTMS) solution is completed, wherein the linking molecule has a decyl group at one end and a sulfur-containing group at the other end. The following is the beginning of the fixation of the single-layered gold nanoparticles. Please refer to Figure 3 'First' to immerse the substrate with the gold nanoparticles in the solution of the coupling molecule of Celsius (S7) to make the linker (MPTMS). One end of the 65-containing alkyl group forms a bond with the oxide layer 25, and then the substrate is taken out and washed with DMS0 and dried with nitrogen. Then, the substrate is immersed in the gold nanoparticle solution to be reacted overnight (S8). Then, the other end of the linking molecule (MPTMS) 65 containing a sulfur group is linked to the gold nanoparticle 70, and thus, the step of fixing the gold nanoparticle 70 to the oxide layer 25 by the linking molecule 65 is completed. The fixed gold nanoparticle 70 is located on the oxide layer 25 between the source 50 and the drain 55 as shown in Fig. 4. (4) DNA hybridization and self-assembly of multi-layered gold nanoparticles: First, a 0.0 ml mM capture MA (collection MA, cDNA) solution was injected into a ρΗ6·6 concentration of 10 mM N-2- a solution of hydroxyethyl p-diazide, N- 2 -ethanesulfonic acid (4-(2-hydroxyethyl)_l-piperazineethanesulfonic acid, HEPES, JT·Baker Chem Co.) to form a mixed solution, the HEPES solution The pH value is adjusted by a 5 mM concentration of EDTA buffer solution. Next, referring to FIG. 5, the substrate to which the single layer of gold nanoparticles are immobilized is immersed in the mixed solution and reacted at room temperature for 24 hours (S9). Take

0522-A20466TWF(N2);david.ptd Page 13 1273237 V. Description of invention (9) ' ------- Make the connection between the gold nanoparticles and (9), and continue with the evaluation of ρΗ6·5 ☆ The liquid (a sodium phosphate solution having a concentration of 50 mM and a sodium chloride solution having a concentration of 〇·3 :: a mixed solution) is washed to remove the cDNa component which is not bonded to the gold nanoparticles, and then dried by using nitrogen gas. That is, as shown in FIG. 5, the grasping DNA 75 is connected to the gold nanoparticle 7〇 by a sulfur-containing group contained therein, and the above-mentioned joining process is a self-assembly (self-assemMy) joining process. Then, the substrate is immersed in a mixed solution of a target DNA (tDNA) solution having a concentration of 〇· j # M and a probe solution (jrobe DNA, pDNA) having a concentration of 5 ml of 〇·〇 5; The heteroactive reaction is carried out for 2 hours (S10), after which the substrate is removed by SPSC buffer solution to remove the residual reagent on the substrate, thereby completing the hybridization work of the DNA to form a DNA containing the captured DNA 75 and the target DNA 80. Hybrid with probe DNA 85 90 "90, where one end of the grab 〇 "75 is attached to the probe |) 1 ^ 8 5 The DNA consisting of the two is then complementary to the target DNA 80 to form the final double-copy parental DNA 9 0 '. See also Figure 5, and then immersing the washed substrate in a solution of the gold nanoparticles. a concentration of 〇·3M of 1 ^ 8 buffer solution (for ρ Η 7 · 0 from a concentration of 〇 · 3M sodium chloride solution and a concentration of 1 mixture of dihydrogen sodium / disodium hydrogen phosphate solution) In the mixed solution (sii), so that the second layer of gold nanoparticles 95 is connected with (5) "85, and the substrate is washed with a concentration of 0. 3M PBS buffer solution to remove unbonded gold nanoparticles and After drying with nitrogen, the substrate is immersed in helium ion water for 2 to 3 seconds, and after being taken out, it is blown dry with nitrogen and dried under vacuum, thereby completing the assembly of the multi-layered gold nanoparticles. As shown in Figure 5, 'probe DNA 85 is composed of a sulfur-containing group and a gold sulphate particle.

1273237 V. INSTRUCTIONS (10) 95 creates a connection, and the above-mentioned connection assembly) is connected. ° Using Xianyi self-assembly (self-analyzer to carry out the electrical 4 (5) A semiconductor parameter of the device, please refer to Figure 6, Figure 6 is the electricity in the Mongguade from the 4 nanometer gold particle device _ electric μ _ The lower jaw is assembled with a layer of 〇. 5^0. 5 ^ # ^ ^ ^ Add and increase, only when the voltage increase of the voltage of QU i increases, but the current increase does not see the current * ^ ^ ' and this paragraph should In addition, the current is differentiated from the voltage, and the Coulomb blocking effect conductivity change is obtained. From the figure, π ^ ^ is set to the lowest under the condition of the 。. In view of the s, the conductivity of the region of the mi volt is comprehensive. As described above, the Coulomb blocking device of the present invention has a template formed by the combination of grasping DNA and probe DNA, so that the wide range of target D1U is used as an efficient (10) ^: identifiable 雔® all too As soon as you look at the helmet, you can use the layered gold as the conductive film, which can effectively reduce the resistance and measure the sensitivity to the range of fM. (2) The invention can be raised at room temperature. The quantum effect of sensation blockage 'so' uses this technique to operate single-electron transistors at room temperature, It has practical value. The weight of the nano-particles that affects whether the device has a Coulomb blockade effect at room temperature is the size of the gold nanoparticles. Please refer to Figure 7, which is a device for group nano-particles at different temperatures. The voltage _ electric & graph obtained in the next operation, it can be seen that when operating at room temperature (300 κ, curve a), the characteristic of the package = ohmic effect instead of the Coulomb blocking effect, waiting for operation ' ^ When the output is reduced to 15 0K (curve c) or 50K (curve d), the voltage of the device and the electrodeposition ^ ^ 0522-A20466TWF (N2); david.ptd page 15 1273237 V, invention description (11) The stepwise Coulomb blocking effect will be presented, and it is known that the size of the ±1 cm gold particles is too large, and the fabricated device cannot have a Coulomb blocking effect at room temperature. (thermal energy) and gold particle coul〇mb energy level (e2/2C) further illustrate the importance of controlling the size of gold particles, when the gold particles are made small enough size & inch (for example, the present invention 10 Gold particles below the meter), you can get relatively small electricity (C), so that the library steals The energy level is improved. Although the device is operated at room temperature, the carrier will have higher thermal energy, but the Coulomb energy level still exceeds the thermal energy of the carrier, so that the carrier cannot migrate between the source and the drain. The effect of the formation of the fracture. Conversely, if the gold nanoparticles are too large (such as 14 nanometers of gold, such as 50 Å or less, the quantum effect of Coulomb blocking may occur. Although the invention has been disclosed above in the preferred embodiment, The present invention is defined by those skilled in the art, and is intended to be modified and retouched, and is therefore defined by the scope of the appended claims. a

1273237 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1a is a SpR spectrum of 4 nanometer gold particles of the present invention. The music 1 b diagram is the g p r spectrum of the 14 nm gold particles. Figure 2a is a flow chart for the fabrication of the gold electrode of the present invention. Figure 2b is a pattern design of the gold electrode of the present invention. Fig. 3 is a schematic flow chart of the fixed single-layered gold nanoparticles of the present invention. Figure 4 is a top view of the apparatus of the present invention. Fig. 5 is a schematic flow chart showing the self-assembled multi-layered gold nanoparticles of the present invention. " Figure 6 is a self-assembled multi-layered gold nanoparticle particle size and voltage-current diagram of the present invention. ^ 1 Figure 7 is a diagram of the voltage-current diagram at different temperatures for the assembly of a stratified 丨4 nm gold particle device. X Bu [main component symbol description] 20 ~ substrate; 2 5 ~ oxide layer; 3 0 ~ photoresist layer; 3 5 ~ electrode pattern; 3 5 '~ gold electrode; 40 ~ metal titanium layer; 4 5 ~ gold film; 50, 5 0 '~ source; 55, 55' ~ bungee;

1273237 Schematic description of 6 0 ~ gate; 6 5 ~ connecting molecules; 70, 95 ~ gold nanoparticles; 7 5 ~ grab DNA; 80 ~ target DNA; 85 ~ probe DNA; Θ 0 ~ hybrid DNA; S1 ~ depositing an oxide layer on the substrate; S2~ covering the photoresist layer on the oxide layer; S3~ patterning the photoresist layer by electron beam lithography; S4~steaming metal layer on the patterned photoresist layer and covering The electrode pattern; S5~ steamed gold film on the metal layer; S6~ cleaning the substrate with an acetone solution; S7~ immersing the substrate in the linking molecule solution; S8~ immersing the substrate in the gold nanoparticle solution; S9~ The substrate is immersed in a mixed solution containing cDNA; S10 0~ the substrate is immersed in a mixed solution containing tDNA and pDNA for hybridization; S1 1~ the substrate is immersed in a mixed solution containing gold nanoparticles.

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Claims (1)

1273237 A room temperature operated coulomb bucking device comprising: a substrate; an oxide layer formed on the substrate; a source and a drain disposed on the oxide layer; Gold nanoparticles, fixed on the oxide layer and located between the source and the drain; and a first gold nanoparticle located above the first gold nanoparticle, and 5 Hai first and first The Jinnai particles are linked by a hybrid DNA. 2) A room temperature operated Coulomb blocking device as described in claim 1 wherein the device has a Coulomb blocking effect at room temperature. 3. A room temperature operated Coulomb blocking device as described in claim 1 wherein the substrate is a stone substrate. 4. The room temperature operated Coulomb blocker as described in claim 1 wherein the thickness of the oxide layer is generally between 15 Å and 250 nm. 5. The room temperature operated Coulomb blocker as described in claim 1 wherein the distance between the source and the drain is substantially between 丨〇~6 5 〇 nanometers. 6. The room temperature operated Coulomb block device of claim 1, further comprising a gate disposed on the oxide layer. 7) The room temperature operated Coulomb block device of claim 6, wherein the gate is substantially at a distance from the source or the wave of between 丨〇 2 2 〜 200 nm. 8 · Coulomb blockade at room temperature operation as described in claim 6 1273237 一 曰 Amendment device, wherein the width of the electrodes is generally between 3 0 0 and 1 0 0 nm. 9. The room temperature operated Coulomb blocker of claim 6 wherein the thickness of the electrodes is substantially between 40 and 80 nm. 1 0. A room temperature operated Coulomb blocking device as described in claim 6 wherein the electrodes pass ± a. % 4 You are made up of gold. 11) A room temperature operated Coulomb blockage as described in claim 0, further comprising a metal titanium layer formed between the oxide layer and the electrodes. 12. The room temperature operated Coulomb block device according to claim 1 wherein the thickness of the titanium metal layer is substantially between 1 and 10 nm. 13. The room temperature operated Coulomb blocking device of claim 1 wherein the first and second gold nanoparticles have a radius of substantially between 2 and 10 nanometers. ^ 14. The coulombic blocking of room temperature operation as described in claim 1 wherein the first gold nanoparticle is immobilized on the oxide layer by a linking molecule. α + 1 5· The room temperature-operated Coulombic blocking device described in claim 14 wherein the two ends of the linking molecule comprise a monoalkyl group and a sulfur-containing group, and the The base is attached to the oxide layer. 1 6 · The room temperature-operated Cullen blocking device as described in the first paragraph of the patent application' wherein the DNA of the parent is taken from a capture DNA, a probe It consists of pr〇be DNA and a target DNA. 1 7 · Coulomb blockade at room temperature as described in item 1 of the patent application Page 20 0522-A20466TWF2 (N2); david.pt 1273237 Case No. 93138578 6. Applying for a patent range, wherein one of the capture DNA ends is linked to one end of the probe pr〇be DNA to form two strands of the captured deoxyribose a nucleic acid composed of a capture DNA and a probe DNA, which is captured by two capture DNAs and the probe DNA. (probe DNA) composed of deoxyribonucleic acid and complementary to the target deoxyribonucleic acid (target DNA) to form a double-stranded hybrid deoxyribonucleic acid 0 乂1 8 · as claimed in paragraph 6 of the patent application The room temperature operation breaking device, wherein the capture DNA (capture M = one of the carbon-containing groups thereof is connected to the first gold nanoparticle. The sputum is broken by 9. 9. / profit range The room temperature-operated Cullen blocking device described in Item 16 is a medium-sized nucleus DNA (one of the sulfur-containing groups contained in probe D is linked to the second gold nanoparticles). 2 0 . — A kind of cheap operation at room temperature 瞎 瞎 1 1 1 夕 夕 生, 生古土七/ The method of coating the device of the rhinoceros blocker, comprising the steps of: providing a substrate on which an oxide layer is formed; setting a source and a drain On the oxide layer; the fixed-first-gold nanoparticle between the oxidation pole and the drain 丨 θ 1 worry is located at 3 / will form a ^ and the brother a halved ☆ ☆ (hybnd DIU); a particle-linked hybrid deoxyribonucleic acid above the first gold nanoparticle 彡# between the first and second golden nanoparticles is a ':::gold nanoparticle' and 4 parent deoxyribonucleic acid II nucleic acid 1273237 Case No. 9313 Milk 7R Year >1 曰 Repair" VI. Application for patent (hybrid DNA) connection. 21. The method of manufacturing a room temperature operation breaking device according to the second aspect of the patent application, wherein the device has a Coulomb blocking effect under the condition of temperature. 22. The method of manufacturing a room temperature operated Coulomb block device according to the second aspect of the invention, wherein the substrate is a tantalum substrate. 2 3 . The method of manufacturing a Coulomb block device operating at room temperature as described in claim 20, wherein the thickness of the oxide layer is substantially between 15 Å and 250 Å. 24. The method of manufacturing a room temperature operated Coulomb block device as described in claim 2, wherein the distance between the source and the drain is substantially between 10 and 65 nm. 2 5 · A method for manufacturing a room temperature operated Coulomb block device as described in the scope of claim 2, wherein a gate is further provided on the oxide layer 0 2 6. As claimed in claim 2 The method for manufacturing a room temperature operated Coulomb blocker according to the invention, wherein the gate is at a distance from the source or the drain substantially between 1000 and 2000 nm. 2 7 · The manufacturing method of the 抡 抡 装置 装置 如 如 如 如 如 如 如 如 如 如 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 2 8 · If the application of the patent scope of the 25th item is described to the manufacturing method of the Coulomb block device of the phoenix operation, the thickness of the electrodes is generally between 4 〇 and 80 nm. 0522-A20466TWF2( Ν2); dav id·ptc Page 22 1273237 ----- Case No. 9313857S__^_3 Day 6, the scope of application for patents '~^ One' -- ^ 2 9 · If the scope of patent application is 25 The room temperature operated Coulomb block I method of manufacturing, wherein the electrodes are composed of gold. A method of manufacturing a room temperature operated Coulomb block device as described in claim 25, further comprising covering the metal oxide layer between the oxide layer and the electrodes. έ 3 1 • A method of manufacturing a room temperature operated library apparatus according to claim 30, wherein the thickness of the metal titanium layer is substantially in the range of Mn. 3 2 . The method of manufacturing a Coulomb block device for room temperature operation as described in claim 2, wherein the radius of the first and second gold nanoparticles is substantially between 2 and 10 nm. The method for manufacturing a room temperature-operated storage device according to the second aspect of the invention, wherein the first gold nanoparticle is fixed to the oxide layer by a connection S on. 34. The method for producing a room temperature-operated Coulombic blocking device according to claim 33, wherein both ends of the linking molecule comprise a monoalkyl group and a sulfur-containing group, and the The oxide layer is connected. The method for producing a room temperature-operated coulombic blocking device according to claim 20, wherein the hybridized deoxyribonucleic acid is deoxygenated by a DNA or a probe. A combination of ribonucleic acid (DMA) and a target target DNA. 3 6 · A method of manufacturing a Coulomb block device operating at room temperature as described in claim 20, wherein the capture of DNA (capture) 0522 - A20466T\VF2( N2); dav i d. pt c Page 23 1273237 --- Case No. 93938878 Month __g_Amendment ___ VI. Apply for patent range ' "" , ^· DNA) Attached to one end of the probe DNA to form a deoxyribose composed of the capture DNA and probe DNA. The nucleic acid 'the strand is formed by capturing the deoxyribonucleic acid composed of the capture DNA and the probe DNA and complementing the target DNA to form A double strand of hybridized deoxyribonucleic acid. 3 7 - A method for producing a room temperature-operated Coulombic blocking device as described in claim 35, wherein the capture DNA is formed by a sulfur-containing group thereof The first golden rice is connected. 3 8 · The method of manufacturing the Coulomb resistance of the room temperature operation as described in claim 37, wherein the connection method is a self-assembly (s e 1 f - assembly) manner. 3. The method for producing a room temperature-operated coulombic blocking device according to claim 37, wherein the probe pr〇be DNA is one of sulfur-containing groups thereof Connected to the second golden nectar. 40. A method of manufacturing a room temperature operated Coulomb block device according to claim 39, wherein the connection is in a self-assembly manner. 0522-A20466TWF2(N2); dav i d.pt c Page 24 1273237 VI. Designated representative figure (1) The representative figure of this case is: ____5____ figure (2), the symbolic symbol of the representative figure of this case is simple description: 20 ~ Substrate; 2 5~ Oxide layer; 65~ Linker molecule; 70, 95~Henna nanoparticle; 75~ grab DNA; 80~ target DNA; 85~ probe DNA; 90~ hybrid MA. 0522-A20466TWF(N2);david.ptd Page 4