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TWI256938B - Glass substrate distribute system and method - Google Patents

Glass substrate distribute system and method

Info

Publication number
TWI256938B
TWI256938B TW093122337A TW93122337A TWI256938B TW I256938 B TWI256938 B TW I256938B TW 093122337 A TW093122337 A TW 093122337A TW 93122337 A TW93122337 A TW 93122337A TW I256938 B TWI256938 B TW I256938B
Authority
TW
Taiwan
Prior art keywords
glass substrate
cassette
distribute system
storing
waiting
Prior art date
Application number
TW093122337A
Other languages
Chinese (zh)
Other versions
TW200604077A (en
Inventor
Kai-Yu Liu
Original Assignee
Au Optronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Au Optronics Corp filed Critical Au Optronics Corp
Priority to TW093122337A priority Critical patent/TWI256938B/en
Priority to US11/025,925 priority patent/US7431551B2/en
Publication of TW200604077A publication Critical patent/TW200604077A/en
Application granted granted Critical
Publication of TWI256938B publication Critical patent/TWI256938B/en
Priority to US12/216,842 priority patent/US7815412B2/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/137—Associated with semiconductor wafer handling including means for charging or discharging wafer cassette

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A glass substrate distribute system includes a cassette, a separating structure, a traversing mechanism, and a transmission mechanism. The separating structure is disposed at the cassette, for dividing the substrate receiving area into several storing positions. The traversing mechanism carries the glass substrate among several waiting positions. The transmission mechanism transmits the glass substrate into the cassette from the waiting position to the storing position or transmits the glass substrate out of the cassette from the storing position from the storing position to the waiting position.
TW093122337A 2004-07-26 2004-07-26 Glass substrate distribute system and method TWI256938B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
TW093122337A TWI256938B (en) 2004-07-26 2004-07-26 Glass substrate distribute system and method
US11/025,925 US7431551B2 (en) 2004-07-26 2005-01-03 Substrate distribution system and a method using the same
US12/216,842 US7815412B2 (en) 2004-07-26 2008-07-11 Substrate distribution method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW093122337A TWI256938B (en) 2004-07-26 2004-07-26 Glass substrate distribute system and method

Publications (2)

Publication Number Publication Date
TW200604077A TW200604077A (en) 2006-02-01
TWI256938B true TWI256938B (en) 2006-06-21

Family

ID=35943353

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093122337A TWI256938B (en) 2004-07-26 2004-07-26 Glass substrate distribute system and method

Country Status (2)

Country Link
US (2) US7431551B2 (en)
TW (1) TWI256938B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101003580B1 (en) * 2005-12-29 2010-12-22 엘지디스플레이 주식회사 Apparatus for loading substrate
KR101045555B1 (en) 2008-08-28 2011-06-30 주식회사 신성에프에이 Apparatus for transferring substrates
CN102718090B (en) * 2012-06-20 2015-04-22 贺凌崑 Gantry-type double-arm palletizing robot and corrugated paper palletizing device with gantry-type palletizing robot
JP5842797B2 (en) * 2012-11-26 2016-01-13 コニカミノルタ株式会社 Image forming apparatus and swing control method
CN103112746B (en) * 2013-03-05 2016-04-13 惠武 Cardboard produces clamp forming machine
CN104860041B (en) * 2015-04-28 2018-02-27 江苏通达动力科技股份有限公司 A kind of arrangement of motor ventilation groove tooth pressure bar and conveying device

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4759681A (en) * 1985-01-22 1988-07-26 Nissin Electric Co. Ltd. End station for an ion implantation apparatus
JPS61188331A (en) * 1985-02-15 1986-08-22 Nippon Texas Instr Kk Wafer slice takeout device
FR2697004B1 (en) * 1992-10-16 1994-11-18 Commissariat Energie Atomique Storage and transport system for flat objects such as extra-flat boxes and its portable rack.
DE9313348U1 (en) * 1993-09-04 1993-12-23 Gebhardt Fördertechnik GmbH, 74889 Sinsheim Assembly line with transfer device
KR0135049B1 (en) * 1994-05-31 1998-04-20 양승택 Wafer cassette for semiconductor fabrication
US6005211A (en) * 1996-02-02 1999-12-21 United Parcel Service Of America, Inc. Method and apparatus for sorting articles using a matrix of conveyor cells
KR100245260B1 (en) * 1996-02-16 2000-02-15 엔도 마코토 Wafer heating apparatus of semiconductor manufacture device
KR100247138B1 (en) * 1997-11-20 2000-03-15 구본준, 론 위라하디락사 Cassette for loading glass substrate
JPH11320031A (en) * 1998-05-14 1999-11-24 Sintokogio Ltd Pattern box circulating equipment for making reduced pressure mold
WO2000001995A1 (en) * 1998-07-01 2000-01-13 Intevac, Inc. Substrate transport assembly for rapid thermal processing system
JP4739532B2 (en) * 1999-05-06 2011-08-03 東京エレクトロン株式会社 LCD glass substrate transfer system
JP3915415B2 (en) * 2001-03-02 2007-05-16 株式会社ダイフク Plate-shaped body transfer device
US6749072B2 (en) * 2001-06-12 2004-06-15 Nix, Inc. Frame structure for housing panel plates
US6817821B2 (en) * 2002-10-21 2004-11-16 Robert D. Henderson Wafer handling for a reflow tool
KR20050040008A (en) * 2003-10-27 2005-05-03 삼성전자주식회사 Glass substrate lifter and glass substrate lifting system
US20070020067A1 (en) * 2005-07-22 2007-01-25 Au Optronics Corporation Storage cassette for large panel glass substrates

Also Published As

Publication number Publication date
US20080273960A1 (en) 2008-11-06
US20060045675A1 (en) 2006-03-02
US7431551B2 (en) 2008-10-07
US7815412B2 (en) 2010-10-19
TW200604077A (en) 2006-02-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees