Nothing Special   »   [go: up one dir, main page]

TW269737B - - Google Patents

Info

Publication number
TW269737B
TW269737B TW083109101A TW83109101A TW269737B TW 269737 B TW269737 B TW 269737B TW 083109101 A TW083109101 A TW 083109101A TW 83109101 A TW83109101 A TW 83109101A TW 269737 B TW269737 B TW 269737B
Authority
TW
Taiwan
Application number
TW083109101A
Other languages
Chinese (zh)
Original Assignee
Sony Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP5268904A external-priority patent/JPH07122478A/ja
Application filed by Sony Co Ltd filed Critical Sony Co Ltd
Application granted granted Critical
Publication of TW269737B publication Critical patent/TW269737B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70091—Illumination settings, i.e. intensity distribution in the pupil plane or angular distribution in the field plane; On-axis or off-axis settings, e.g. annular, dipole or quadrupole settings; Partial coherence control, i.e. sigma or numerical aperture [NA]

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
TW083109101A 1993-10-27 1994-10-01 TW269737B (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5268904A JPH07122478A (ja) 1993-10-27 1993-10-27 パターン投影方法

Publications (1)

Publication Number Publication Date
TW269737B true TW269737B (ja) 1996-02-01

Family

ID=51396956

Family Applications (1)

Application Number Title Priority Date Filing Date
TW083109101A TW269737B (ja) 1993-10-27 1994-10-01

Country Status (2)

Country Link
KR (1) KR100297910B1 (ja)
TW (1) TW269737B (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2039600A1 (en) * 2007-09-19 2009-03-25 HONDA MOTOR CO., Ltd. Motorcycle

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3102076B2 (ja) * 1991-08-09 2000-10-23 キヤノン株式会社 照明装置及びそれを用いた投影露光装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2039600A1 (en) * 2007-09-19 2009-03-25 HONDA MOTOR CO., Ltd. Motorcycle

Also Published As

Publication number Publication date
KR100297910B1 (ko) 2001-10-24
KR950012573A (ko) 1995-05-16

Similar Documents

Publication Publication Date Title
DK52393D0 (ja)
FR12C0053I1 (ja)
DK0698306T3 (ja)
EP0671575A3 (ja)
FR2707041B1 (ja)
FR2705055B1 (ja)
FR2706814B1 (ja)
DK2193D0 (ja)
FR2706848B3 (ja)
FR2706989B1 (ja)
FR2706845B1 (ja)
FR2707047B1 (ja)
DK41893A (ja)
FR2706974B1 (ja)
FR2706952B1 (ja)
FR2704264B1 (ja)
FR2706740B1 (ja)
FR2706807B1 (ja)
FR2709234B1 (ja)
FR2706902B1 (ja)
FR2707031B1 (ja)
FR2707036B1 (ja)
FR2706927B1 (ja)
FR2706899B1 (ja)
FR2707050B1 (ja)

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees