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TW202249144A - Systems and methods for workpiece processing - Google Patents

Systems and methods for workpiece processing Download PDF

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TW202249144A
TW202249144A TW111107740A TW111107740A TW202249144A TW 202249144 A TW202249144 A TW 202249144A TW 111107740 A TW111107740 A TW 111107740A TW 111107740 A TW111107740 A TW 111107740A TW 202249144 A TW202249144 A TW 202249144A
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processing
chamber
workpiece
transfer
processing chamber
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TW111107740A
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Chinese (zh)
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麥克 楊
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大陸商北京屹唐半導體科技股份有限公司
美商得昇科技股份有限公司
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Priority claimed from US17/191,295 external-priority patent/US11482434B2/en
Application filed by 大陸商北京屹唐半導體科技股份有限公司, 美商得昇科技股份有限公司 filed Critical 大陸商北京屹唐半導體科技股份有限公司
Publication of TW202249144A publication Critical patent/TW202249144A/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67155Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67161Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67155Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67155Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67196Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the transfer chamber
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67155Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67201Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the load-lock chamber
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67259Position monitoring, e.g. misposition detection or presence detection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742Mechanical parts of transfer devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67754Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A processing system for processing a plurality of workpieces includes a transfer chamber in process flow communication with a first processing chamber and a second processing chamber, the transfer chamber having a first straight side, wherein the first process chamber includes at least one first processing station, and wherein the first processing chamber is disposed along the first straight side, wherein the second process chamber includes at least two second processing stations, wherein the second processing chamber is disposed along the first straight side, and wherein the second process chamber disposed in linear arrangement with the first process chamber along the first straight side, and wherein the transfer chamber includes at least one workpiece handling robot configured to transfer at least one workpiece to the at least one first processing station and the at least two second processing stations.

Description

用於工件加工的系統和方法Systems and methods for workpiece machining

本公開主要涉及加工工件,更具體地涉及用於加工工件(諸如半導體工件)的系統。The present disclosure relates generally to machining workpieces, and more particularly to systems for machining workpieces, such as semiconductor workpieces.

將諸如半導體晶片或其他合適基板之類的工件暴露於用於形成半導體器件或其他器件的整體處理方案的加工系統可以執行多個處理步驟,諸如電漿加工(例如,剝離、刻蝕等)、熱處理(例如,退火)、沉積(例如,化學氣相沉積)等。為了執行這些處理步驟,系統可以包括一個或多個機器人以將工件移動若干不同的次數,例如,移入系統、在各種加工室之間移動,以及移出系統。任何半導體加工系統中的重要考慮因素是系統的占地面積大小。增大的占地面積大小可能佔用加工設施中的更多空間,導致生產量降低和成本增加。A processing system that exposes a workpiece, such as a semiconductor wafer or other suitable substrate, to an overall processing scheme for forming semiconductor or other devices may perform multiple processing steps, such as plasma processing (e.g., lift-off, etch, etc.), Thermal treatment (eg, annealing), deposition (eg, chemical vapor deposition), etc. To perform these processing steps, the system may include one or more robots to move the workpiece a number of different times, for example, into the system, between various process chambers, and out of the system. An important consideration in any semiconductor processing system is the system's footprint size. The increased footprint size can take up more space in the processing facility, resulting in reduced throughput and increased costs.

用於半導體工件的加工系統的示例配置可以包括叢集式工具、轉盤式工具等。在叢集式工具中,可以圍繞中央機器人佈置多個半導體加工模組以在多個加工室之間移動工件。叢集式工具可能具有大的占地面積(例如,佔用大量空間)並且只能支持有限數量的加工室。在轉盤式工具中,工件可以在多個加工站之間旋轉。轉盤式工具可能受制於加工集成靈活性降低,並且可能難以與叢集配置一起實施。Example configurations of processing systems for semiconductor workpieces may include cluster tools, carousel tools, and the like. In a cluster tool, multiple semiconductor processing modules may be arranged around a central robot to move workpieces between multiple process chambers. Cluster tools may have a large footprint (eg, take up a lot of space) and can only support a limited number of process chambers. In a rotary tool, the workpiece can be rotated between multiple processing stations. Carousel tools may suffer from reduced process integration flexibility and may be difficult to implement with cluster configurations.

本發明實施例的多個實施態樣和優點將在下面的描述中部分闡述,或者可以從描述中得知,或者可以通過實施例的實踐而得知。Multiple implementation aspects and advantages of the embodiments of the present invention will be partially set forth in the following description, or can be known from the description, or can be known through the practice of the embodiments.

本公開的一個示例實施態樣涉及一種用於加工多個工件的加工系統。加工系統包括傳送室,與第一加工室和第二加工室處於製程連通中,且傳送室具有第一直線側,其中,第一加工室包括至少一個第一加工站,並且其中,第一加工室沿第一直線側設置,其中,第二加工室包括至少兩個第二加工站,其中,第二加工室沿第一直線側設置,並且其中,第二加工室設置成沿第一直線側與第一加工室呈線性佈置,並且其中,傳送室包括至少一個工件處理機器人,被配置為將至少一個工件傳送到該至少一個第一加工站和該至少兩個第二加工站。An example implementation aspect of the present disclosure relates to a machining system for machining a plurality of workpieces. The processing system includes a transfer chamber in process communication with a first processing chamber and a second processing chamber, and the transfer chamber has a first linear side, wherein the first processing chamber includes at least one first processing station, and wherein the first processing chamber Arranged along the first linear side, wherein the second processing chamber includes at least two second processing stations, wherein the second processing chamber is arranged along the first linear side, and wherein the second processing chamber is arranged to be connected to the first processing station along the first linear side The chambers are arranged linearly, and wherein the transfer chamber includes at least one workpiece handling robot configured to transfer at least one workpiece to the at least one first processing station and the at least two second processing stations.

本公開的另一示例實施態樣涉及一種用於加工多個工件的加工系統。加工系統包括:第一加工室,具有兩個加工站;第二加工室,具有兩個加工站;第三加工室,具有一個加工站;以及,傳送室,與第一加工室、第二加工室以及第三加工室處於製程連通中,其中,第一加工室設置在傳送室的第一側上,其中,第二加工室設置在傳送室的第二側上,傳送室的第二側與傳送室的第一側相對,並且其中,第三加工室設置在傳送室的第三側上,傳送室的第三側垂直於傳送室的第一側和第二側。Another example implementation aspect of the present disclosure relates to a machining system for machining a plurality of workpieces. The processing system includes: a first processing chamber with two processing stations; a second processing chamber with two processing stations; a third processing chamber with one processing station; and a transfer chamber with the first processing chamber, the second processing chamber and a third process chamber are in process communication, wherein the first process chamber is disposed on a first side of the transfer chamber, wherein the second process chamber is disposed on a second side of the transfer chamber, and the second side of the transfer chamber is connected to the The first sides of the transfer chambers are opposite, and wherein the third processing chamber is disposed on a third side of the transfer chamber, the third side of the transfer chamber being perpendicular to the first and second sides of the transfer chamber.

本公開的另一示例實施態樣涉及一種用於加工多個工件的加工系統。加工系統包括:第一加工室,具有至少一個加工站;第二加工室,具有至少兩個加工站;以及,前端部,與第一加工室和第二加工室處於製程連通中,其中,第一加工室和第二加工室設置在前端部的第一直線側上。Another example implementation aspect of the present disclosure relates to a machining system for machining a plurality of workpieces. The processing system includes: a first processing chamber having at least one processing station; a second processing chamber having at least two processing stations; and a front end in process communication with the first processing chamber and the second processing chamber, wherein the first A processing chamber and a second processing chamber are provided on the first linear side of the front end portion.

本公開的其他示例實施態樣涉及用於加工半導體工件的系統、方法和設備。Other example implementation aspects of the present disclosure relate to systems, methods, and apparatus for processing semiconductor workpieces.

參考以下描述和所附請求項將更好地理解各種實施例的這些和其他特徵、實施態樣和優點。包含在本說明書中並構成本說明書一部分的附圖示出了本公開的實施例,並且與描述一起用於解釋相關原理。These and other features, implementation aspects, and advantages of various embodiments will be better understood with reference to the following description and appended claims. The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments of the disclosure and together with the description serve to explain related principles.

現在將詳細地參考在附圖中示出了其一個或多個示例的實施例。每個示例都是作為對實施例的解釋而提供的,不是對本發明的限制。事實上,對於本領域技術人員而言顯而易見的是,在不脫離本公開的範圍或精神的情況下,可以對實施例進行各種修改和變化。例如,作為一個實施例的一部分示出或描述的特徵可以與另一實施例一起使用以產生更進一步實施例。因而,本公開的各實施態樣旨在涵蓋這樣的修改和變化。Reference will now be made in detail to the embodiments, one or more examples of which are illustrated in the accompanying drawings. Each example is provided by way of explanation of the embodiment, not limitation of the invention. In fact, it will be apparent to those skilled in the art that various modifications and changes can be made in the embodiments without departing from the scope or spirit of the present disclosure. For example, features illustrated or described as part of one embodiment can be used with another embodiment to yield a still further embodiment. Accordingly, aspects of the present disclosure are intended to cover such modifications and variations.

本公開的示例實施態樣涉及用於加工工件的系統,諸如半導體工件、光電工件、平板顯示器或其他合適的工件。工件材料可以包括例如矽、矽鍺、玻璃、塑膠或其他合適的材料。在一些實施例中,工件可以是半導體晶片。系統可以用於實施各種工件製造製程,包括但不限於真空退火製程、表面處理製程、乾式去膠製程、乾式刻蝕製程、沉積製程以及其他製程。Example implementation aspects of the present disclosure relate to systems for processing workpieces, such as semiconductor workpieces, optoelectronic workpieces, flat panel displays, or other suitable workpieces. The workpiece material may include, for example, silicon, silicon germanium, glass, plastic, or other suitable materials. In some embodiments, the workpiece may be a semiconductor wafer. The system can be used to implement various workpiece manufacturing processes, including but not limited to vacuum annealing process, surface treatment process, dry stripping process, dry etching process, deposition process, and other processes.

更具體地,系統可以包括用於加工工件的多個加工室。每個加工室可以包括被配置成接收和/或支撐工件的一個或多個加工站,諸如使用共同製程壓力(例如,真空)環境的多個加工站(例如,雙架構中的兩個加工站)。在一些實施例中,一個或多個加工室可以是具有基於電漿的加工源的電漿加工室,諸如電感耦合電漿源、微波源、表面波電漿源、ECR電漿源、電容耦合(例如,平行板)電漿源等。More specifically, the system may include a plurality of processing chambers for processing workpieces. Each processing chamber may include one or more processing stations configured to receive and/or support workpieces, such as multiple processing stations (e.g., two processing stations in a dual architecture) using a common process pressure (e.g., vacuum) environment ). In some embodiments, one or more processing chambers may be plasma processing chambers having plasma-based processing sources, such as inductively coupled plasma sources, microwave sources, surface wave plasma sources, ECR plasma sources, capacitively coupled plasma sources, (e.g. parallel plate) plasma source, etc.

在示例實施例中,加工系統可以包括負載鎖定室。負載鎖定室可以被配置成在將工件傳送到加工室之前使工件經受製程壓力(例如,真空壓力)。負載鎖定室可以包括具有多個擱板以將工件保持呈堆疊佈置的工件柱。系統可以進一步包括用於將工件從負載鎖定室傳送到加工室和/或用於在不同加工室之間傳送工件的傳送室。在一些實施例中,傳送室可以保持在真空壓力或其他合適的製程壓力下。傳送室可以被設置與負載鎖定室和至少一個加工室之間處於製程連通中。In example embodiments, a processing system may include a load lock chamber. The load lock chamber may be configured to subject the workpiece to process pressure (eg, vacuum pressure) prior to transferring the workpiece to the processing chamber. The load lock chamber may include a workpiece column with a plurality of shelves to hold the workpieces in a stacked arrangement. The system may further include a transfer chamber for transferring the workpiece from the load lock chamber to the processing chamber and/or for transferring the workpiece between different processing chambers. In some embodiments, the transfer chamber may be maintained at vacuum pressure or other suitable process pressure. A transfer chamber may be disposed in process communication between the load lock chamber and the at least one process chamber.

傳送室可以包括工件處理機器人。工件處理機器人可以包括主要被配置成通過在固定點或區域處繞軸旋轉來傳送工件的機器人。工件處理機器人可以被配置成將多個工件(例如,兩個工件)從負載鎖定室中的工件柱傳送到加工室中的兩個或多個加工站。每個加工站可以包括用於在加工期間支撐工件的工件支撐件。在一些實施例中,工件處理機器人可以傳送多個工件,例如,使用同時將工件遞送到加工室中的兩個或多個加工站的剪刀運動。本文中使用的剪刀運動是指類似於剪刀的打開或閉合的兩個或多個機器人臂的移動。例如,在一個示例剪刀運動中,機器人臂的第一端比機器人臂的相對的第二端彼此分離得更快。在另一示例剪刀運動中,機器人臂的第一端彼此分離,而機器人臂的第二端或其他部分保持在固定位置。The transfer chamber may include workpiece handling robots. Workpiece handling robots may include robots that are primarily configured to transfer workpieces by rotating about an axis at a fixed point or area. A workpiece handling robot may be configured to transfer multiple workpieces (eg, two workpieces) from a workpiece column in the load lock chamber to two or more processing stations in the processing chamber. Each machining station may include a workpiece support for supporting the workpiece during machining. In some embodiments, a workpiece handling robot may transfer multiple workpieces, for example, using a scissor motion that simultaneously delivers workpieces to two or more processing stations in a processing chamber. Scissor motion as used herein refers to the movement of two or more robotic arms that open or close similar to scissors. For example, in one example scissors motion, a first end of the robotic arm moves away from each other faster than an opposing second end of the robotic arm. In another example scissors motion, the first ends of the robotic arms are separated from each other while the second end or other portion of the robotic arm remains in a fixed position.

在一個示例實施方式中,工件處理機器人可以包括被配置成圍繞固定的樞軸點旋轉的多個機器人臂。每個機器人臂可以與一個或多個工件刀片相關聯。每個工件刀片可以具有被配置成支撐工件的末端執行器。工件處理機器人可以被配置成控制多個機器人臂,從而使用剪刀運動將工件從工件柱傳送到加工室中的至少兩個加工站,其中,多個機器人臂彼此分離以將工件刀片傳送到加工站。In one example embodiment, a workpiece handling robot may include a plurality of robotic arms configured to rotate about a fixed pivot point. Each robotic arm can be associated with one or more workpiece inserts. Each workpiece blade may have an end effector configured to support a workpiece. The workpiece handling robot may be configured to control a plurality of robotic arms to transfer the workpiece from the workpiece column to at least two processing stations in the processing chamber using a scissor motion, wherein the plurality of robotic arms are separated from each other to transfer the workpiece blades to the processing stations .

在另一示例實施方式中,工件處理機器人可以包括圍繞樞軸點或樞軸區域旋轉的單個主臂。單個主臂可以聯接到多個輔助臂。輔助臂可以各自聯接到至少一個工件刀片。每個工件刀片可以包括用於支撐工件的末端執行器。在一些實施例中,工件處理機器人可以被配置成使用剪刀運動,將至少兩個工件從負載鎖定室中的工件柱傳送到加工室中的兩個加工站。在剪刀運動期間,輔助臂可以剪式方式分離,使得與輔助臂中的一個相關聯的工件刀片將工件傳送到第一加工站,並且使得與輔助臂中的另一個相關聯的工件刀片將工件傳送到第二加工站。In another example embodiment, a workpiece handling robot may include a single main arm that rotates about a pivot point or region. A single main arm can be coupled to multiple auxiliary arms. The auxiliary arms may each be coupled to at least one workpiece blade. Each workpiece blade may include an end effector for supporting the workpiece. In some embodiments, the workpiece handling robot may be configured to transfer at least two workpieces from a workpiece column in the load lock chamber to two processing stations in the processing chamber using a scissor motion. During the scissors movement, the auxiliary arms may be separated in a scissor-like manner such that the workpiece blade associated with one of the auxiliary arms transfers the workpiece to the first machining station and such that the workpiece blade associated with the other of the auxiliary arms transfers the workpiece Transfer to the second processing station.

在一些實施例中,可以使用單個馬達操作單個主臂和輔助臂的剪刀運動。在一些實施例中,工件處理機器人可以具有聯接到多個輔助臂的第二主臂。出於例如工件交換的目的,第二主臂可以以與另一主臂類似的方式操作。在一些實施例中,主臂可以不同時操作,以便可以使用單個馬達來控制兩個主臂的操作。In some embodiments, a single motor may be used to operate the scissor motion of a single primary and secondary arm. In some embodiments, a workpiece handling robot may have a second main arm coupled to a plurality of auxiliary arms. The second main arm can be operated in a similar manner to the other main arm for purposes such as workpiece exchange. In some embodiments, the primary arms may not be operated simultaneously so that a single motor may be used to control the operation of both primary arms.

在一些實施例中,加工系統可以包括多個加工室。每個加工室可以包括至少一個加工站,諸如兩個或多個加工站。傳送室中的工件處理機器人可以在多個加工室和負載鎖定室之間傳送工件。In some embodiments, a processing system may include multiple processing chambers. Each processing chamber may comprise at least one processing station, such as two or more processing stations. Workpiece handling robots in transfer chambers can transfer workpieces between multiple processing chambers and load locks.

在示例實施例中,多個加工室中的至少兩個可以在直線側上對齊。例如,傳送室可以包括直線側。直線側可以由至少兩個加工室共用。例如,在一些實施例中,直線側可以是或可以包括至少兩個加工室中的每一個的前壁。例如,加工室的前壁可以包括用於接收工件的開口或其他機構,諸如狹縫門。In example embodiments, at least two of the plurality of process chambers may be aligned on a straight side. For example, the transfer chamber may include straight sides. The straight side can be shared by at least two processing chambers. For example, in some embodiments, the straight side may be or may include the front wall of each of the at least two process chambers. For example, the front wall of the processing chamber may include an opening or other mechanism, such as a slot door, for receiving a workpiece.

在直線側上對齊的至少兩個加工室可以被設置呈線性佈置。作為一個示例,如果負載鎖定室沿其最長側限定第一方向,則可以設置至少兩個加工室,使得加工室沿垂直於第一方向的第二方向對齊。例如,在一些實施例中,負載鎖定室可以被設置在垂直於直線側的傳送室的一側上。作為另一示例,與至少兩個加工室中的第二加工室相比,至少兩個加工室中的第一加工室與具有進口的傳送室的一側間隔隔開更遠,並且與第二加工室的方向相同。例如,第一加工室和第二加工室可以沿著傳送室和加工室的連續側對齊。At least two processing chambers aligned on the straight side may be provided in a linear arrangement. As an example, if a load lock chamber defines a first direction along its longest side, at least two process chambers may be arranged such that the process chambers are aligned along a second direction perpendicular to the first direction. For example, in some embodiments, a load lock chamber may be positioned on a side of the transfer chamber that is perpendicular to the straight side. As another example, a first of the at least two processing chambers is spaced farther from one side of the transfer chamber having the inlet than a second of the at least two processing chambers and is spaced further from the second of the at least two processing chambers. The direction of the processing chamber is the same. For example, the first process chamber and the second process chamber may be aligned along consecutive sides of the transfer chamber and process chamber.

另外和/或可替選地,在一些實施方式中,加工系統可以包括兩個加工室,包括第一加工室和第二加工室,它們被設置在傳送室的相對側上。例如,第一加工室可以與附加加工室在直線側上對齊,並且第二加工室可以被設置在與直線側相對的相對側上。在一些實施例中,相對側可以另外為直線側。Additionally and/or alternatively, in some embodiments, the processing system may include two processing chambers, including a first processing chamber and a second processing chamber, disposed on opposite sides of the transfer chamber. For example, a first processing chamber may be aligned with an additional processing chamber on a straight side, and a second processing chamber may be disposed on an opposite side from the straight side. In some embodiments, the opposite side may alternatively be a straight side.

工件處理機器人可以被配置成將多個工件從負載鎖定室中的工件柱傳送到第一加工室的一個或多個加工站和/或第二加工室的一個或多個加工站(例如,使用剪刀運動)。另外,工件處理機器人可以被配置成將多個工件從第一加工室的一個或多個加工站傳送到第二加工室的一個或多個加工站。The workpiece handling robot may be configured to transfer a plurality of workpieces from the workpiece column in the load lock chamber to one or more processing stations of the first processing chamber and/or to one or more processing stations of the second processing chamber (e.g., using scissors movement). Additionally, the workpiece handling robot may be configured to transfer a plurality of workpieces from one or more processing stations of the first processing chamber to one or more processing stations of the second processing chamber.

在另一實施方式中,加工系統可以包括四個加工室,包括第一加工室、第二加工室、第三加工室和第四加工室。第一加工室和第二加工室可以被設置在傳送室的相對側上。第三加工室可以與第一加工室呈線性佈置。第四加工室可以與第二加工室呈線性佈置,使得第三加工室和第四加工室被設置在傳送室的相對側上。In another embodiment, the processing system may include four processing chambers, including a first processing chamber, a second processing chamber, a third processing chamber, and a fourth processing chamber. The first processing chamber and the second processing chamber may be disposed on opposite sides of the transfer chamber. The third processing chamber may be arranged linearly with the first processing chamber. The fourth processing chamber may be arranged in-line with the second processing chamber such that the third processing chamber and the fourth processing chamber are disposed on opposite sides of the transfer chamber.

此外,在一些實施方式中,系統可以包括傳送室中的兩個工件處理機器人,包括第一工件處理機器人和第二工件處理機器人。系統可以進一步包括第一工件處理機器人和第二工件處理機器人之間的傳送位置。傳送位置可以允許第一工件處理機器人(例如,可以觸及負載鎖定室的工件處理機器人)將工件傳送到第二工件處理機器人。傳送位置可以包括被配置成以支撐多個工件的工件柱,多個工件呈堆疊佈置(例如,在多個擱板上)。Additionally, in some embodiments, the system may include two workpiece handling robots in the transfer chamber, including a first workpiece handling robot and a second workpiece handling robot. The system may further include a transfer location between the first workpiece handling robot and the second workpiece handling robot. The transfer location may allow a first workpiece handling robot (eg, a workpiece handling robot with access to a load lock chamber) to transfer a workpiece to a second workpiece handling robot. The transfer location may include a workpiece column configured to support a plurality of workpieces arranged in a stack (eg, on a plurality of shelves).

第一工件處理機器人可以被配置成將多個工件從負載鎖定室中的工件柱傳送到第一加工室的兩個或多個加工站和/或第二加工室的兩個或多個加工站和/或傳送位置中的工件柱。另外,第一工件處理機器人可以被配置成在第一加工室的兩個或多個加工站、第二加工室的兩個或多個加工站以及傳送位置的工件柱之間傳送多個工件。The first workpiece handling robot may be configured to transfer a plurality of workpieces from the workpiece column in the load lock chamber to two or more processing stations of the first processing chamber and/or to two or more processing stations of the second processing chamber and/or the workpiece column in the transfer position. Additionally, the first workpiece handling robot may be configured to transfer a plurality of workpieces between the two or more processing stations of the first processing chamber, the two or more processing stations of the second processing chamber, and the workpiece column at the transfer location.

第二工件處理機器人可以被配置成將多個工件從傳送室中的工件柱傳送到第三加工室的兩個或多個加工站和/或第四加工室的兩個或多個加工站。另外,第二工件處理機器人可以被配置成在第三加工室的兩個或多個加工站、第四加工室的兩個或多個加工站以及傳送位置的工件柱之間傳送多個工件。The second workpiece handling robot may be configured to transfer the plurality of workpieces from the workpiece column in the transfer chamber to the two or more processing stations of the third processing chamber and/or the two or more processing stations of the fourth processing chamber. Additionally, the second workpiece handling robot may be configured to transfer the plurality of workpieces between the two or more processing stations of the third processing chamber, the two or more processing stations of the fourth processing chamber, and the workpiece column at the transfer location.

作為另一示例,在一些實施例中,系統可以包括相對於負載鎖定室和/或多個加工室沿至少一個方向移動的工件處理機器人。例如,在一些實施例中,工件處理機器人可以在由直線側限定的方向上移動,諸如從傳送室的前部到傳送室的後部。例如,在具有在直線側上對齊的至少兩個加工室的實施例中,工件處理機器人可以移動到至少第一位置和第二位置,第一位置用於將工件傳送到和/或傳送出至少兩個加工室中的第一加工室,第二位置用於將工件傳送到和/或傳送出至少兩個加工室中的第二加工室。As another example, in some embodiments, a system may include a workpiece handling robot that moves in at least one direction relative to the load lock chamber and/or the plurality of process chambers. For example, in some embodiments, a workpiece handling robot may move in a direction defined by a straight side, such as from the front of the transfer chamber to the rear of the transfer chamber. For example, in embodiments having at least two processing chambers aligned on linear sides, the workpiece handling robot can move to at least a first position and a second position, the first position being used to transfer workpieces to and/or out of at least A first of the two processing chambers, a second location for transferring workpieces to and/or out of a second of the at least two processing chambers.

通過添加傳送位置可以進一步擴展加工系統以包括更多加工室,工件處理機器人和/或加工室以線性方式以提供用於執行工件處理的任何數量的加工室。通過這種方式,多個加工模組可以集成在所提出的系統上,而不會出現真空或製程壓力中斷,從而實現多種製程集成方案,包括乾式刻蝕和乾式去膠製程、表面預清潔/處理後的薄膜沉積製程,以及連續膜沉積製程等的組合。此外,在所提出的系統架構中,工件可以在被配置在每個旋轉真空機器人的相對側的兩種類型的加工室之間來回交換,從而實現獨特的迴圈加工能力(例如,諸如原子層刻蝕製程)。The machining system can be further expanded to include more machining chambers by adding transfer locations, the workpiece handling robots and/or machining chambers in a linear fashion to provide any number of machining chambers for performing workpiece processing. In this way, multiple processing modules can be integrated on the proposed system without interruption of vacuum or process pressure, enabling multiple process integration scenarios, including dry etching and dry stripping processes, surface pre-cleaning/ A combination of post-treatment thin film deposition processes and continuous film deposition processes. Furthermore, in the proposed system architecture, workpieces can be exchanged back and forth between the two types of processing chambers configured on opposite sides of each rotary vacuum robot, enabling unique loop processing capabilities (e.g., such as atomic layer etching process).

根據本公開的示例實施態樣,一個或多個加工室中的每一個可以包括狹縫門。狹縫門可以被配置成提供工件在工件處理機器人和加工室(諸如加工站)之間的傳送。例如,在一些實施例中,加工室可以包括與一個或多個加工站對應(例如,對齊)的一個或多個狹縫門。例如,具有兩個加工站的加工室可以具有兩個狹縫門,其中一個狹縫門與每個加工站對齊。在一些實施例中,狹縫門的中心可以在方向上與加工站的中心對齊。方向可以與加工室的幾何形狀對應。例如,方向可以沿著加工室的深度。另外和/或可替選地,方向可以與工件處理機器人的幾何形狀對應。作為一個示例,狹縫門的中心可以從加工站的中心稍微偏移(例如,稍微靠得更近),以便於同時從工件處理機器人的中心線性延伸到每個加工站(例如,通過每個臂)。在一些實施例中,狹縫門可以是可密封的,以將加工室的加工條件與加工室外部的條件(例如,傳送室中的條件)隔離開。例如,在一些實施例中,狹縫門可以是或可以包括可以被門或其他密封件密封的孔口(例如,狹縫孔口)。在一些實施例中,諸如其中加工室的條件和加工室外部的條件(例如,緊鄰狹縫門)相同或適當地相同的實施例中,狹縫門可以是或可以包括不可密封的孔口。According to example embodiments of the present disclosure, each of the one or more process chambers may include a slot door. The slot gate may be configured to provide transfer of workpieces between the workpiece handling robot and a processing chamber, such as a processing station. For example, in some embodiments, a processing chamber may include one or more slot doors corresponding to (eg, aligned with) one or more processing stations. For example, a process chamber with two process stations may have two slit doors, with one slit door aligned with each process station. In some embodiments, the center of the slot door may be aligned directionally with the center of the processing station. The orientation may correspond to the geometry of the processing chamber. For example, the direction may be along the depth of the processing chamber. Additionally and/or alternatively, the orientation may correspond to the geometry of the workpiece handling robot. As an example, the center of the slot gate can be slightly offset from the center of the processing station (e.g., slightly closer together) so as to extend linearly from the center of the workpiece handling robot to each processing station at the same time (e.g., through each arm). In some embodiments, the slot door may be sealable to isolate the processing conditions of the processing chamber from conditions outside the processing chamber (eg, conditions in the transfer chamber). For example, in some embodiments, a slot door can be or include an aperture (eg, a slot aperture) that can be sealed by a door or other seal. In some embodiments, such as embodiments where the conditions of the process chamber and conditions outside the process chamber (eg, immediately adjacent the slit door) are the same or suitably the same, the slit door may be or may include a non-sealable aperture.

根據本公開的示例實施態樣,沿直線邊緣對齊的多個加工室上的狹縫門可以沿著直線邊緣對齊。例如,每個狹縫門可以被設置在加工室的前側上。前側和/或狹縫門可以對齊,使得前側和/或狹縫門彼此齊平。例如,單個平面可以包含加工系統單側上的每個狹縫門的橫向中心。According to example embodiments of the present disclosure, slot doors on a plurality of processing chambers aligned along straight edges may be aligned along straight edges. For example, each slot door may be provided on the front side of the process chamber. The front sides and/or slot doors may be aligned such that the front sides and/or slot doors are flush with each other. For example, a single plane may contain the lateral center of each slot door on a single side of the processing system.

另外和/或可替選地,狹縫門可以沿著加工室的高度在共同點處對齊。例如,在一些實施例中,狹縫門與加工系統的頂表面和/或底表面之間的縱向偏移對於每個狹縫門而言可以是大致相等的。作為另一示例,每個狹縫門的縱向中心之間的縱向偏移可以大約為零(例如,小於大約5公分)。Additionally and/or alternatively, the slot doors may be aligned at a common point along the height of the process chamber. For example, in some embodiments, the longitudinal offset between the slot doors and the top and/or bottom surfaces of the processing system may be approximately equal for each slot door. As another example, the longitudinal offset between the longitudinal centers of each slot door may be approximately zero (eg, less than approximately 5 centimeters).

根據本公開的示例實施例的加工系統可以提供具有小占地面積的高生產率系統。相對於與叢集式工具相關聯的占地面積,占地面積可以更小。另外,加工系統可以加工多個工件(例如,4個工件、8個工件或更多),在加工系統效率指標(諸如占地面積/吞吐量、成本/吞吐量和其他指標)實施態樣有顯著提高。A machining system according to example embodiments of the present disclosure may provide a high productivity system with a small footprint. The footprint may be smaller relative to that associated with cluster tools. In addition, the processing system can process multiple workpieces (for example, 4 workpieces, 8 workpieces or more), and the implementation of the processing system efficiency indicators (such as floor area/throughput, cost/throughput, and other indicators) has different aspects. Significantly improved.

本公開的一個示例實施例涉及一種用於加工多個工件的加工系統。加工系統包括負載鎖定室。負載鎖定室可以包括被配置成支撐多個工件的工件柱,多個工件呈堆疊佈置。加工系統包括至少兩個加工室。加工室可以沿直線側對齊。加工室可以包括一個或多個狹縫門。至少兩個加工室具有至少一個加工站。每個加工站可以與工件支撐件相關聯,工件支撐件用於在加工室中的加工期間支撐工件。加工系統包括與負載鎖定室和至少兩個加工室處於製程連通中的傳送室。傳送室包括至少一個工件處理機器人。工件處理機器人具有至少一個被配置成圍繞軸旋轉的臂。工件處理機器人被配置成將多個工件從負載鎖定室中的工件柱傳送到至少兩個加工室中的至少兩個加工站(例如,使用剪刀運動)。An example embodiment of the present disclosure relates to a machining system for machining a plurality of workpieces. The processing system includes a load lock chamber. The load lock chamber may include a workpiece column configured to support a plurality of workpieces arranged in a stack. The processing system includes at least two processing chambers. The process chambers can be aligned along straight sides. The process chamber may include one or more slit doors. At least two processing chambers have at least one processing station. Each processing station may be associated with a workpiece support for supporting the workpiece during processing in the processing chamber. The processing system includes a transfer chamber in process communication with a load lock chamber and at least two processing chambers. The transfer chamber includes at least one workpiece handling robot. A workpiece handling robot has at least one arm configured to rotate about an axis. The workpiece handling robot is configured to transfer the plurality of workpieces from the workpiece column in the load lock chamber to at least two processing stations in the at least two processing chambers (eg, using a scissor motion).

在一些實施例中,至少兩個加工室包括第一加工室和第二加工室,第一加工室和第二加工室中的每一個包括至少兩個加工站。第一加工室和第二加工室被設置在傳送室的相對側上,使得工件處理機器人可以在第一加工室和第二加工室之間傳送多個工件。In some embodiments, the at least two processing chambers include a first processing chamber and a second processing chamber, each of the first processing chamber and the second processing chamber including at least two processing stations. The first processing chamber and the second processing chamber are disposed on opposite sides of the transfer chamber such that the workpiece handling robot can transfer a plurality of workpieces between the first processing chamber and the second processing chamber.

在一些實施例中,第一加工室與第二加工室被設置呈線性佈置。系統包括被配置成以堆疊佈置支撐多個工件的傳送位置。工件處理機器人可以被配置成將多個工件從第一加工室中的至少兩個加工站傳送到傳送位置中的堆疊佈置。第二工件處理機器人可以被配置成將多個工件從處於傳送位置的堆疊佈置傳送到第二加工室中的至少兩個加工站。傳送位置可以位於傳送室內。In some embodiments, the first processing chamber and the second processing chamber are arranged in a linear arrangement. The system includes a transfer location configured to support a plurality of workpieces in a stacked arrangement. The workpiece handling robot may be configured to transfer a plurality of workpieces from at least two processing stations in the first processing chamber to a stacked arrangement in the transfer location. The second workpiece handling robot may be configured to transfer the plurality of workpieces from the stack arrangement at the transfer position to at least two processing stations in the second processing chamber. The transfer location may be located within the transfer chamber.

在一些實施例中,至少兩個加工室包括被設置在傳送室的相對側上的第一加工室和第二加工室。至少兩個加工室進一步包括與第一加工室呈線性佈置的第三加工室和與第二加工室呈線性佈置的第四加工室,使得第三加工室和第四加工室被設置在傳送室的相對側上。第一加工室、第二加工室、第三加工室和第四加工室中的每一個可以包括至少兩個加工站。In some embodiments, the at least two processing chambers include a first processing chamber and a second processing chamber disposed on opposite sides of the transfer chamber. The at least two processing chambers further include a third processing chamber arranged linearly with the first processing chamber and a fourth processing chamber arranged linearly with the second processing chamber such that the third processing chamber and the fourth processing chamber are disposed within the transfer chamber on the opposite side of the . Each of the first processing chamber, the second processing chamber, the third processing chamber and the fourth processing chamber may include at least two processing stations.

在一些實施例中,系統進一步包括被配置成支撐多個工件的傳送位置,多個工件呈堆疊佈置。至少一個工件處理機器人包括第一工件處理機器人和第二工件處理機器人,第一工件處理機器人被配置成將多個工件從負載鎖定室中的堆疊佈置傳送到第一加工室中的至少兩個加工站,第二工件處理機器人被配置成將多個工件從傳送位置中的堆疊佈置傳送到第三加工室中的至少兩個加工站。In some embodiments, the system further includes a transfer location configured to support a plurality of workpieces, the plurality of workpieces being arranged in a stack. The at least one workpiece handling robot includes a first workpiece handling robot and a second workpiece handling robot, the first workpiece handling robot being configured to transfer a plurality of workpieces from a stacked arrangement in the load lock chamber to at least two processing robots in the first processing chamber. station, the second workpiece handling robot is configured to transfer a plurality of workpieces from the stacked arrangement in the transfer location to at least two processing stations in the third processing chamber.

在一些實施例中,工件處理機器人具有至少一個主臂,主臂被配置成圍繞樞軸點旋轉。主臂可以連接到多個輔助臂。每個輔助臂可以與至少一個工件刀片相關聯,工件刀片被配置成支撐多個工件中的一個。In some embodiments, the workpiece handling robot has at least one main arm configured to rotate about a pivot point. The main arm can be connected to multiple auxiliary arms. Each auxiliary arm may be associated with at least one workpiece blade configured to support one of the plurality of workpieces.

在一些實施例中,工件處理機器人可以被配置成使臂延伸並剪開多個工件刀片以將多個工件傳送到加工室中的至少兩個加工站。在一些實施例中,工件處理機器人可以被配置成使臂延伸並使用單個馬達剪開多個工件刀片。In some embodiments, the workpiece handling robot may be configured to extend the arm and shear the plurality of workpiece blades to transfer the plurality of workpieces to at least two processing stations in the processing chamber. In some embodiments, a workpiece handling robot may be configured to extend an arm and shear multiple workpiece blades using a single motor.

在一些實施例中,工件處理機器人包括具有一個或多個工件刀片的第一臂和包括一個或多個工件刀片的第二臂。第一臂可以被配置成將多個工件中的一個從負載鎖定室中的柱傳送到加工室中的第一加工站,並且第二臂可以被配置成將多個工件中的一個從負載鎖定室中的柱傳送到加工室中的第二加工站。In some embodiments, a workpiece handling robot includes a first arm including one or more workpiece blades and a second arm including one or more workpiece blades. The first arm may be configured to transfer one of the plurality of workpieces from the column in the load lock chamber to the first processing station in the process chamber, and the second arm may be configured to transfer one of the plurality of workpieces from the load lock The columns in the chamber are transferred to a second processing station in the processing chamber.

本公開的另一示例實施態樣涉及一種用於在半導體加工系統中加工工件的方法。方法包括將多個工件傳送到負載鎖定室中的工件柱。工件柱被配置成支撐多個工件,多個工件呈堆疊佈置。方法包括利用位於傳送室中的工件處理機器人將多個工件從工件柱傳送到第一加工室中的至少兩個加工站(例如,使用剪刀運動)。方法包括在第一加工室中對多個工件執行第一處理製程。方法包括利用工件處理機器人將多個工件傳送到第二加工室中的至少兩個加工站。方法包括在第二加工室中對多個工件執行第二處理製程。在一些實施例中,第二處理製程不同於第一處理製程。Another example implementation aspect of the present disclosure relates to a method for processing a workpiece in a semiconductor processing system. The method includes transferring a plurality of workpieces to a workpiece column in a load lock chamber. The workpiece column is configured to support a plurality of workpieces arranged in a stack. The method includes transferring a plurality of workpieces from a workpiece column to at least two processing stations in a first processing chamber (eg, using a scissor motion) using a workpiece handling robot located in the transfer chamber. The method includes performing a first processing procedure on a plurality of workpieces in a first processing chamber. The method includes using a workpiece handling robot to transfer a plurality of workpieces to at least two processing stations in a second processing chamber. The method includes performing a second treatment process on a plurality of workpieces in a second processing chamber. In some embodiments, the second treatment recipe is different than the first treatment recipe.

在一些實施例中,方法可以包括利用工件處理機器人將多個工件傳送到傳送位置。方法可以包括利用被設置在傳送室中的第二工件處理機器人將多個工件從傳送位置傳送到第三加工室中的至少兩個加工站。第三加工室可以被設置成與第一加工室呈線性佈置。方法可以包括在第三加工室中對多個工件執行第三處理製程。方法可以包括利用第二工件處理機器人將多個工件傳送到第四加工室中的至少兩個加工站。第四加工室可以被設置成與第二加工室呈線性佈置。方法可以包括在第四加工室中對多個工件執行第四處理製程。In some embodiments, a method may include transferring a plurality of workpieces to a transfer location using a workpiece handling robot. The method may include transferring the plurality of workpieces from the transfer location to at least two processing stations in the third processing chamber with a second workpiece handling robot disposed in the transfer chamber. The third processing chamber may be arranged in a linear arrangement with the first processing chamber. The method may include performing a third processing procedure on the plurality of workpieces in a third processing chamber. The method may include transferring the plurality of workpieces to at least two processing stations in the fourth processing chamber with the second workpiece handling robot. The fourth processing chamber may be arranged in a linear arrangement with the second processing chamber. The method may include performing a fourth treatment process on the plurality of workpieces in a fourth processing chamber.

本公開的又另一示例實施態樣涉及一種用於加工工件的加工系統。系統包括工件柱。系統包括第一工件處理機器人。系統包括第二工件處理機器人。系統包括第一加工室。系統包括第二加工室。第二加工室被設置成與第一加工室呈線性佈置。系統包括傳送站。系統包括第一工件處理機器人,第一工件處理機器人被配置成將工件從工件柱傳送到第一加工室中的至少兩個加工站。第一工件處理機器人可以被配置成將工件從第一加工室傳送到傳送位置。系統包括第二工件處理機器人,第二工件處理機器人被配置成將工件從傳送位置傳送到第二加工室。Yet another example implementation aspect of the present disclosure relates to a machining system for machining a workpiece. The system includes a workpiece column. The system includes a first workpiece handling robot. The system includes a second workpiece handling robot. The system includes a first processing chamber. The system includes a second processing chamber. The second processing chamber is arranged in a linear arrangement with the first processing chamber. The system includes a transfer station. The system includes a first workpiece handling robot configured to transfer the workpiece from the workpiece column to at least two processing stations in the first processing chamber. The first workpiece handling robot may be configured to transfer the workpiece from the first process chamber to the transfer location. The system includes a second workpiece handling robot configured to transfer the workpiece from the transfer location to the second processing chamber.

本公開的又另一示例實施態樣涉及一種用於加工多個工件的加工系統。系統包括前端部。系統包括與前端部處於製程連通中的負載鎖。系統包括與負載鎖處於製程連通中的傳送室。傳送室包括第一直線側、第二直線側和第三直線側,其中,第二直線側連接到負載鎖,並且第三直線側為第一直線側的相對側。傳送室進一步包括至少兩個工件處理機器人以及兩個工件處理機器人之間的晶片傳送位置,其中,傳送位置包括至少一個工件柱。系統包括與傳送室處於製程連通中的第一加工室和第二加工室,其中,第一加工室和第二加工室連接到傳送室的第一直線側,第一加工室包括至少一個加工站,第二加工室包括至少兩個加工站。系統包括與傳送室處於製程連通中的第三加工室和第四加工室,其中,第三加工室和第四加工室連接到傳送室的第三直線側,第三加工室包括至少一個加工站,第四加工室包括至少兩個加工站。Yet another example implementation aspect of the present disclosure relates to a machining system for machining a plurality of workpieces. The system includes a front end. The system includes a loadlock in process communication with the front end. The system includes a transfer chamber in process communication with the load lock. The transfer chamber includes a first straight side, a second straight side, and a third straight side, wherein the second straight side is connected to the loadlock and the third straight side is the opposite side of the first straight side. The transfer chamber further includes at least two workpiece handling robots and a wafer transfer location between the two workpiece handling robots, wherein the transfer location includes at least one workpiece column. The system includes a first processing chamber and a second processing chamber in process communication with the transfer chamber, wherein the first processing chamber and the second processing chamber are connected to a first linear side of the transfer chamber, the first processing chamber includes at least one processing station, The second processing chamber includes at least two processing stations. The system includes a third processing chamber and a fourth processing chamber in process communication with the transfer chamber, wherein the third processing chamber and the fourth processing chamber are connected to a third linear side of the transfer chamber, the third processing chamber including at least one processing station , the fourth processing chamber includes at least two processing stations.

本公開的又另一示例實施態樣涉及一種用於在半導體加工系統中加工工件的方法。方法包括利用位於前端部的第一工件處理機器人將多個工件傳送到負載鎖定室中的工件柱,工件柱被配置成支撐多個工件,多個工件呈堆疊佈置。方法包括利用位於傳送室中的第二工件處理機器人將兩個工件從工件柱通過一個或多個第一狹縫門傳送到第一加工室中的至少兩個加工站。方法包括在第一加工室中對兩個工件執行第一處理製程。方法包括利用傳送室中的工件處理機器人將兩個工件中的一個通過一個或多個第二狹縫門傳送到第二加工室中的一個第二站,並且將兩個工件中的另一個通過一個或多個第三狹縫門傳送到第三加工室中的一個第三站。方法包括在第二加工室和第三加工室中對兩個工件執行第二處理製程,其中,第二處理製程不同於第一處理製程。Yet another example implementation aspect of the present disclosure relates to a method for processing a workpiece in a semiconductor processing system. The method includes using a first workpiece handling robot at the front end to transfer a plurality of workpieces to a workpiece column in the load lock chamber, the workpiece column configured to support the plurality of workpieces, the plurality of workpieces being arranged in a stack. The method includes transferring two workpieces from the workpiece column through the one or more first slot doors to at least two processing stations in the first processing chamber with a second workpiece handling robot located in the transfer chamber. The method includes performing a first processing procedure on two workpieces in a first processing chamber. The method includes using a workpiece handling robot in the transfer chamber to transfer one of the two workpieces through one or more second slot doors to a second station in a second process chamber, and passing the other of the two workpieces through The one or more third slot gates are transferred to a third station in the third processing chamber. The method includes performing a second processing recipe on the two workpieces in the second processing chamber and the third processing chamber, wherein the second processing recipe is different from the first processing recipe.

可以對本公開的這些示例實施例進行變化和修改。在說明書中使用的單數形式“一個”、“和”和“該”包括複數指示物,除非上下文另有明確規定。“第一”、“第二”、“第三”和“第四”的使用被用作識別字並針對加工順序。出於說明和討論的目的,可能參考“基板”、“晶片”或“工件”來討論示例實施態樣。但是本領域普通技術人員使用本文提供的公開內容應理解,本公開的示例實施態樣可以與任何合適的工件一起使用。與數值一起使用的術語“約”是指在規定數值的20%以內。Variations and modifications may be made to these example embodiments of the present disclosure. As used in the specification, the singular forms "a", "and" and "the" include plural referents unless the context clearly dictates otherwise. The use of "first", "second", "third" and "fourth" are used as identifiers and for processing order. For purposes of illustration and discussion, example implementations may be discussed with reference to a "substrate," "wafer," or "workpiece." However, those of ordinary skill in the art, using the disclosure provided herein, should appreciate that the example implementation aspects of the present disclosure may be used with any suitable artifact. The term "about" used with numerical values means within 20% of the stated numerical value.

現在參考附圖,現在將詳細地討論本公開的示例實施例。圖1示出了根據本公開的示例實施例的加工系統100。加工系統100可以包括前端部112、負載鎖定室114、傳送室115以及多個加工室,多個加工室包括第一加工室120和第二加工室130。如圖所示,加工系統100可以限定寬度102和長度104。例如,加工系統100的寬度102可以對應加工室120和130的深度。Referring now to the accompanying drawings, example embodiments of the present disclosure will now be discussed in detail. FIG. 1 illustrates a machining system 100 according to an example embodiment of the present disclosure. The processing system 100 may include a front end 112 , a load lock chamber 114 , a transfer chamber 115 , and a plurality of processing chambers including a first processing chamber 120 and a second processing chamber 130 . As shown, machining system 100 may define a width 102 and a length 104 . For example, the width 102 of the processing system 100 may correspond to the depth of the processing chambers 120 and 130 .

前端部112可以被配置成保持在大氣壓下並且可以被配置成與工件輸入設備118接合。工件輸入設備118可以包括例如盒、前開口聯合艙或用於支撐多個工件的其他設備。工件輸入設備118可以用於向加工系統100提供預加工工件或從加工系統100接收後加工工件。Front end 112 may be configured to be maintained at atmospheric pressure and may be configured to engage workpiece input device 118 . The workpiece input device 118 may include, for example, a cassette, a front opening union bay, or other device for supporting multiple workpieces. The workpiece input device 118 may be used to provide pre-machined workpieces to the machining system 100 or to receive post-machined workpieces from the machining system 100 .

前端部112可以包括一個或多個機器人(未示出),以將工件從工件輸入設備118傳送到例如負載鎖定室114,諸如往返於位於負載鎖定室114中的工件柱110。在一個示例中,前端部112中的機器人可以將預加工工件傳送到負載鎖定室114,並且可以將後加工工件從負載鎖定室114傳送到一個或多個工件輸入設備118。在不偏離本公開的範圍的情況下,可以在前端部112中使用用於傳送工件的任何合適的機器人。工件可以通過合適的狹縫、開口或孔口被傳送到負載鎖定室114和/或從負載鎖定室114傳送。Front end 112 may include one or more robots (not shown) to transfer workpieces from workpiece input device 118 to, for example, load lock chamber 114 , such as to and from workpiece column 110 located in load lock chamber 114 . In one example, a robot in front end 112 may transfer pre-machined workpieces to load lock chamber 114 and may transfer post-machined workpieces from load lock chamber 114 to one or more workpiece input devices 118 . Any suitable robot for transferring workpieces may be used in front end 112 without departing from the scope of the present disclosure. Workpieces may be transferred to and/or from the load lock chamber 114 through suitable slots, openings or orifices.

負載鎖定室114可以包括工件柱110,工件柱被配置成支撐多個工件,多個工件呈堆疊佈置。工件柱110可以包括例如多個擱板。每個擱板可以被配置成支撐一個或多個工件。在一個示例實施方式中,工件柱110可以包括用於支撐預加工工件的一個或多個擱板和用於支撐後加工工件的一個或多個擱板。The load lock chamber 114 may include a workpiece column 110 configured to support a plurality of workpieces arranged in a stack. The workpiece column 110 may include, for example, a plurality of shelves. Each shelf can be configured to support one or more workpieces. In one example embodiment, the workpiece column 110 may include one or more shelves for supporting pre-machined workpieces and one or more shelves for supporting post-machined workpieces.

加工室120可以包括狹縫門123和125。例如,狹縫門123可以與加工站122對齊。類似地,狹縫門125可以與加工站124對齊。如圖1中所示,狹縫門123可以與狹縫門125橫向對齊。例如,狹縫門123和狹縫門125可以各自沿著由加工室120和/或傳送室115的前壁限定的平面對齊。The process chamber 120 may include slit doors 123 and 125 . For example, slot door 123 may be aligned with processing station 122 . Similarly, slot door 125 may be aligned with processing station 124 . As shown in FIG. 1 , slot door 123 may be laterally aligned with slot door 125 . For example, slot door 123 and slot door 125 may each be aligned along a plane defined by the front walls of process chamber 120 and/or transfer chamber 115 .

此外,加工室130可以包括狹縫門133和135。例如,狹縫門133可以與加工站132對齊。類似地,狹縫門135可以與加工站134對齊。如圖1中所示,狹縫門133可以與狹縫門135橫向對齊。例如,狹縫門133和狹縫門135可以各自沿著由加工室130和/或傳送室115的前壁限定的平面對齊。In addition, the process chamber 130 may include slit doors 133 and 135 . For example, slot door 133 may be aligned with processing station 132 . Similarly, slot door 135 may be aligned with processing station 134 . As shown in FIG. 1 , slot door 133 may be laterally aligned with slot door 135 . For example, slot door 133 and slot door 135 may each be aligned along a plane defined by the front walls of process chamber 130 and/or transfer chamber 115 .

圖2示出了根據本公開的示例實施例的示例工件柱110的側視圖。如圖所示,工件柱可以包括多個擱板111。每個擱板111可以被配置成支撐工件113,使得多個工件113可以以垂直/堆疊佈置被佈置在工件柱110上。FIG. 2 illustrates a side view of an example workpiece column 110 according to an example embodiment of the present disclosure. As shown, the workpiece column may include a plurality of shelves 111 . Each shelf 111 may be configured to support a workpiece 113 such that a plurality of workpieces 113 may be arranged on the workpiece column 110 in a vertical/stacked arrangement.

參考圖1,負載鎖定室114可以用於將工件周圍的壓力從與前端部112相關聯的壓力調節到製程壓力,諸如真空或其他製程壓力,將工件傳送到加工室之前,諸如第一加工室120和/或第二加工室130。在一些實施例中,可以結合負載鎖定室114和其他室提供適當的閥,以適當地調節用於加工工件的製程壓力。在一些實施例中,負載鎖定室114和傳送室115可以保持在相同的壓力下。在該實施例中,無需從傳送室115密封負載鎖定室114。實際上,在一些實施例中,負載鎖定室114和傳送室115可以是同一室的一部分。Referring to FIG. 1, the load lock chamber 114 may be used to regulate the pressure around the workpiece from the pressure associated with the front end 112 to a process pressure, such as a vacuum or other process pressure, prior to transferring the workpiece to a process chamber, such as the first process chamber 120 and/or the second processing chamber 130. In some embodiments, appropriate valves may be provided in conjunction with the load lock chamber 114 and other chambers to properly regulate the process pressure used to process the workpiece. In some embodiments, load lock chamber 114 and transfer chamber 115 may be maintained at the same pressure. In this embodiment, there is no need to seal the load lock chamber 114 from the transfer chamber 115 . Indeed, in some embodiments, load lock chamber 114 and transfer chamber 115 may be part of the same chamber.

第一加工室120和第二加工室130可以用於對工件執行多種工件加工中的任一種,諸如真空退火製程、表面處理製程、乾式去膠製程、乾式刻蝕製程、沉積製程,以及其他製程。在一些實施例中,第一加工室120和第二加工室130中的一個或多個可以包括基於電漿的加工源,諸如,例如電感耦合電漿(ICP)源、微波源、表面波電漿源、ECR電漿源以及電容耦合(平行板)電漿源。The first processing chamber 120 and the second processing chamber 130 may be used to perform any of a variety of workpiece processing on the workpiece, such as a vacuum annealing process, a surface treatment process, a dry stripping process, a dry etching process, a deposition process, and other processes . In some embodiments, one or more of first processing chamber 120 and second processing chamber 130 may include a plasma-based processing source such as, for example, an inductively coupled plasma (ICP) source, a microwave source, a surface wave electrode Plasma sources, ECR plasma sources, and capacitively coupled (parallel plate) plasma sources.

如圖所示,第一加工室120和第二加工室130中的每一個包括並排佈置的一對加工站,使得一對工件可以同時暴露於相同的加工。更具體地,第一加工室120可以包括並排佈置的第一加工站122和第二加工站124。第二加工室130可以包括並排佈置的第一加工站132和第二加工站134。每個加工站可以包括用於在加工期間支撐工件的工件支撐件(例如,基座)。在一些實施例中,每個加工站可以與用於支撐工件的兩個部分共用共同基座。第一加工室120和/或第二加工室130可以選擇性地與傳送室115密封以進行加工。As shown, each of the first processing chamber 120 and the second processing chamber 130 includes a pair of processing stations arranged side-by-side so that a pair of workpieces can be simultaneously exposed to the same processing. More specifically, the first processing chamber 120 may include a first processing station 122 and a second processing station 124 arranged side by side. The second processing chamber 130 may include a first processing station 132 and a second processing station 134 arranged side by side. Each machining station may include a workpiece support (eg, a base) for supporting the workpiece during machining. In some embodiments, each machining station may share a common base with the two sections for supporting the workpiece. The first processing chamber 120 and/or the second processing chamber 130 may be selectively sealed from the transfer chamber 115 for processing.

根據本公開的特定實施態樣,傳送室115可以包括工件處理機器人150。工件處理機器人150可以被配置成將工件從負載鎖定室114中的工件柱110傳送到第一加工室120和/或第二加工室130中的加工站。工件處理機器人150也可以在第一加工室120和第二加工室130之間傳送工件。例如,工件處理機器人150可以使用例如剪刀運動,同時將工件從負載鎖定室114中的工件柱傳送到第一加工室120中的兩個並排加工站122和124。類似地,工件處理機器人150可以使用例如剪刀運動,同時將工件從負載鎖定室114中的工件柱110傳送到第二加工室130中的兩個並排加工站132和134。將參考圖7A至7D以及圖8A和圖8B討論關於示例工件處理機器人150的操作的細節。According to certain implementation aspects of the present disclosure, the transfer chamber 115 may include a workpiece handling robot 150 . The workpiece handling robot 150 may be configured to transfer the workpiece from the workpiece column 110 in the load lock chamber 114 to a processing station in the first processing chamber 120 and/or the second processing chamber 130 . The workpiece handling robot 150 may also transfer workpieces between the first processing chamber 120 and the second processing chamber 130 . For example, the workpiece handling robot 150 may simultaneously transfer the workpiece from the workpiece column in the load lock chamber 114 to the two side-by-side processing stations 122 and 124 in the first processing chamber 120 using, for example, a scissors motion. Similarly, the workpiece handling robot 150 may simultaneously transfer workpieces from the workpiece column 110 in the load lock chamber 114 to the two side-by-side processing stations 132 and 134 in the second processing chamber 130 using, for example, a scissors motion. Details regarding the operation of the example workpiece handling robot 150 will be discussed with reference to FIGS. 7A through 7D and FIGS. 8A and 8B .

根據本公開的示例實施例,工件處理機器人150可以具有多種配置以支持工件的傳送。在一個實施例中,工件處理機器人150可以包括一對被配置成圍繞樞軸點旋轉的臂。每個機器人臂可以與一對工件刀片相關聯。每個工件刀片可以具有被配置成支撐工件的末端執行器。與每個臂相關聯的一對工件刀片可以用於在加工室的加工站完成工件交換。該對臂可以被配置成使用剪刀運動將工件傳送到每個加工室的兩個加工站。在一些實施例中,狹縫門123、125和/或133、135可以垂直地對齊,以便於使用工件處理機器人150傳送工件。According to example embodiments of the present disclosure, the workpiece handling robot 150 may have various configurations to support the transfer of workpieces. In one embodiment, workpiece handling robot 150 may include a pair of arms configured to rotate about a pivot point. Each robot arm can be associated with a pair of workpiece blades. Each workpiece blade may have an end effector configured to support a workpiece. A pair of workpiece blades associated with each arm can be used to accomplish workpiece exchange at the machining stations of the machining chamber. The pair of arms can be configured to transfer workpieces to the two processing stations in each processing chamber using a scissor motion. In some embodiments, slot doors 123 , 125 and/or 133 , 135 may be vertically aligned to facilitate transfer of workpieces using workpiece handling robot 150 .

在另一示例實施方式中,工件處理機器人150可以包括至少一個主臂,主臂圍繞樞軸點或樞軸區域旋轉。主臂可以聯接到多個輔助臂。輔助臂可以各自聯接到至少一個工件刀片。每個工件刀片可以包括用於支撐工件的末端執行器。在一些實施例中,工件處理機器人150可以被配置成使用剪刀運動,將至少兩個工件從負載鎖定室114中的工件柱110傳送到例如第一加工室120中的兩個並排加工站122和124。在一些實施例中,剪刀運動可以使用單個馬達來實現。In another example embodiment, the workpiece handling robot 150 may include at least one main arm that rotates about a pivot point or region. The main arm can be coupled to multiple auxiliary arms. The auxiliary arms may each be coupled to at least one workpiece blade. Each workpiece blade may include an end effector for supporting the workpiece. In some embodiments, workpiece handling robot 150 may be configured to transfer at least two workpieces from workpiece column 110 in load lock chamber 114 to, for example, two side-by-side processing stations 122 and 12 in first processing chamber 120 using a scissor motion. 124. In some embodiments, scissor motion can be achieved using a single motor.

圖3示出了用於在加工系統中加工工件的示例方法(300)的流程圖。可以使用圖1的加工系統100實現方法(300)。為了說明和討論的目的,圖3描繪了以特定順序執行的步驟。本領域普通技術人員使用本文提供的公開內容應理解,在不偏離本公開的範圍的情況下,本文提供的任何方法的各個步驟可以以各種方式調整、重新佈置、同時執行、省略和/或修改。FIG. 3 shows a flowchart of an example method ( 300 ) for machining a workpiece in a machining system. Method ( 300 ) may be implemented using machining system 100 of FIG. 1 . For purposes of illustration and discussion, FIG. 3 depicts steps performed in a particular order. Those of ordinary skill in the art using the disclosure provided herein will understand that the individual steps of any method provided herein may be adjusted, rearranged, performed concurrently, omitted and/or modified in various ways without departing from the scope of the present disclosure .

在(302),方法包括將多個工件傳送到負載鎖定室中的工件柱。例如,可以將多個工件從加工室100的前端部傳送到負載鎖定室114中的工件柱110。例如,可以使用與加工室100的前端部相關聯的一個或多個機器人將工件傳送到工件柱110。At (302), the method includes transferring a plurality of workpieces to a workpiece column in a load lock chamber. For example, a plurality of workpieces may be transferred from the front end of the process chamber 100 to the workpiece column 110 in the load lock chamber 114 . For example, one or more robots associated with the front end of process chamber 100 may be used to transfer workpieces to workpiece column 110 .

在(304),方法包括利用位於傳送室中的工件處理機器人將多個工件從工件柱傳送到第一加工室中的至少兩個加工站。例如,工件處理機器人150可以將兩個工件分別傳送到加工室120中的加工站122和加工站124。在一些實施例中,工件處理機器人150可以使用剪刀運動,將工件傳送到加工室120中的加工站122和加工站124。工件處理機器人150可以通過使工件穿過至少一個狹縫門而將多個工件傳送到至少兩個加工站。至少一個狹縫門可以與至少兩個加工站對齊。另外和/或可替選地,至少一個狹縫門可以與加工系統中的其他狹縫門垂直地和/或橫向地對齊。At (304), the method includes transferring a plurality of workpieces from the workpiece column to at least two processing stations in the first processing chamber with a workpiece handling robot located in the transfer chamber. For example, workpiece handling robot 150 may transfer two workpieces to processing station 122 and processing station 124 in processing chamber 120 , respectively. In some embodiments, workpiece handling robot 150 may transfer workpieces to processing stations 122 and 124 in processing chamber 120 using a scissor motion. The workpiece handling robot 150 may transfer a plurality of workpieces to at least two processing stations by passing the workpieces through at least one slit door. At least one slot door can be aligned with at least two processing stations. Additionally and/or alternatively, at least one slot door may be vertically and/or laterally aligned with other slot doors in the processing system.

在(306),方法包括在第一加工室中對多個工件執行第一處理製程。第一處理製程可以包括例如退火製程、熱處理製程、表面處理製程、乾式去膠製程、乾式刻蝕製程、沉積製程或其他製程。At (306), the method includes performing a first processing procedure on a plurality of workpieces in a first processing chamber. The first treatment process may include, for example, an annealing process, a heat treatment process, a surface treatment process, a dry stripping process, a dry etching process, a deposition process, or other processes.

在(308),方法包括利用工件處理機器人將多個工件傳送到第二加工室中的至少兩個加工站。第二加工室可以與第一加工室沿直線側對齊。例如,工件處理機器人150可以將兩個工件分別傳送到加工室130中的加工站132和加工站134。在一些實施例中,工件處理機器人150可以使用剪刀運動,將工件傳送到加工室130中的加工站132和加工站134。工件處理機器人可以通過與一個或多個第一狹縫門垂直對齊的一個或多個第二狹縫門傳送工件。At (308), the method includes transferring the plurality of workpieces to at least two processing stations in the second processing chamber with the workpiece handling robot. The second processing chamber may be aligned side-by-side with the first processing chamber. For example, workpiece handling robot 150 may transfer two workpieces to processing station 132 and processing station 134 in processing chamber 130 , respectively. In some embodiments, workpiece handling robot 150 may transfer workpieces to processing stations 132 and 134 in processing chamber 130 using a scissor motion. The workpiece handling robot may transfer the workpiece through one or more second slot doors that are vertically aligned with the one or more first slot doors.

在一些實施例中,工件處理機器人可以將多個工件從第一加工室傳送到第二加工室中的至少兩個加工站。在一些實施例中,工件處理機器人可以將多個工件從例如下文詳細討論的傳送位置(例如,從處於傳送位置的工件柱)傳送到第二加工室中的至少兩個加工站。In some embodiments, the workpiece handling robot may transfer a plurality of workpieces from the first processing chamber to at least two processing stations in the second processing chamber. In some embodiments, the workpiece handling robot may transfer the plurality of workpieces from a transfer location such as discussed in detail below (eg, from a workpiece column at the transfer location) to at least two processing stations in the second processing chamber.

在(310),方法包括在第二加工室中對多個工件執行第二處理製程。第二處理製程可以包括例如退火製程、熱處理製程、表面處理製程、乾式去膠製程、乾式刻蝕製程、沉積製程或其他製程。在一些實施例中,第二處理製程可以與第一處理製程相同或不同。At (310), the method includes performing a second processing procedure on the plurality of workpieces in a second processing chamber. The second treatment process may include, for example, an annealing process, a heat treatment process, a surface treatment process, a dry stripping process, a dry etching process, a deposition process, or other processes. In some embodiments, the second treatment recipe may be the same as or different from the first treatment recipe.

在(312),方法可以包括將加工過的工件傳送回負載鎖定室中的工件柱。例如,工件處理機器人150可以從第一加工室120和/或第二加工室130傳送兩個工件。然後,位於加工系統前端的一個或多個機器人可以將加工過的工件傳送到例如盒。At ( 312 ), the method may include transferring the machined workpiece back to the workpiece column in the load lock chamber. For example, the workpiece handling robot 150 may transfer two workpieces from the first processing chamber 120 and/or the second processing chamber 130 . One or more robots at the front end of the machining system can then transfer the machined workpieces to, for example, a cassette.

根據本公開的特定實施態樣,附加加工室可以以線性方式添加到加工系統,以提供加工附加工件的能力。例如,圖4示出了根據本公開的示例實施例的具有四個加工室的示例加工系統200。According to certain implementation aspects of the present disclosure, additional processing chambers may be added to the processing system in a linear fashion to provide the ability to process additional workpieces. For example, FIG. 4 illustrates an example processing system 200 having four processing chambers, according to an example embodiment of the present disclosure.

與圖1的加工系統類似,圖4的加工系統200可以包括前端部112、負載鎖定室114、傳送室115和多個加工室,包括第一加工室120和第二加工室130。系統可以包括第一工件處理機器人150,用於將工件傳送進出負載鎖定室中的工件柱110以及第一加工室120和第二加工室130,和/或在第一加工室120和第二加工室130之間傳送。Similar to the processing system of FIG. 1 , the processing system 200 of FIG. 4 may include a front end 112 , a load lock chamber 114 , a transfer chamber 115 , and a plurality of processing chambers, including a first processing chamber 120 and a second processing chamber 130 . The system may include a first workpiece handling robot 150 for transferring workpieces into and out of the workpiece column 110 in the load lock chamber and the first process chamber 120 and the second process chamber 130, and/or between the first process chamber 120 and the second process chamber. transfer between chambers 130.

另外,加工系統200可以包括附加加工室,包括第三加工室170和第四加工室180。第三加工室170被設置成與第一加工室120呈線性佈置,並且第四加工室180被設置成與第二加工室130呈線性佈置,使得第三加工室170和第四加工室180被設置在傳送室115的相對側上。例如,如圖4中所示,第三加工室170可以沿著直線側171與第一加工室120對齊。直線側171可以是連續的或可以不是連續的。例如,在一些實施例中,傳送位置162可以被設置在加工室120與加工室170之間,中斷直線側171。然而,直線側171緊鄰和/或包括加工室170的部分可以與直線側171緊鄰和/或包括加工室120的部分齊平。另外和/或可替選地,第四加工室180可以沿著直線側181與第二加工室130對齊。直線側181可以是連續的或可以不是連續的。例如,在一些實施例中,傳送位置162可以被設置在加工室130與加工室180之間,中斷直線側181。然而,直線側181緊鄰和/或包括加工室180的部分可以與直線側181緊鄰和/或包括加工室130的部分齊平。Additionally, the processing system 200 may include additional processing chambers, including a third processing chamber 170 and a fourth processing chamber 180 . The third processing chamber 170 is arranged linearly with the first processing chamber 120, and the fourth processing chamber 180 is arranged linearly with the second processing chamber 130, so that the third processing chamber 170 and the fourth processing chamber 180 are arranged linearly. Located on the opposite side of the transfer chamber 115 . For example, as shown in FIG. 4 , third processing chamber 170 may be aligned with first processing chamber 120 along linear side 171 . Straight side 171 may or may not be continuous. For example, in some embodiments, transfer location 162 may be positioned between process chamber 120 and process chamber 170 , interrupting straight side 171 . However, the portion of straight side 171 immediately adjacent to and/or including process chamber 170 may be flush with the portion of straight side 171 immediately adjacent to and/or including process chamber 120 . Additionally and/or alternatively, fourth processing chamber 180 may be aligned with second processing chamber 130 along linear side 181 . Straight side 181 may or may not be continuous. For example, in some embodiments, transfer location 162 may be positioned between process chamber 130 and process chamber 180 , interrupting straight side 181 . However, the portion of straight side 181 immediately adjacent to and/or including process chamber 180 may be flush with the portion of straight side 181 immediately adjacent to and/or including process chamber 130 .

第三加工室170和第四加工室180可以用於對工件執行多種工件加工中的任一種,諸如真空退火製程、熱處理製程、表面處理製程、乾式去膠製程、乾式刻蝕製程、沉積製程以及其他製程。在一些實施例中,第三加工室170和第四加工室180中的一個或多個可以包括基於電漿的加工源,諸如,例如電感耦合電漿(ICP)源、微波源、表面波電漿源、ECR電漿源以及電容耦合(平行板)電漿源。The third processing chamber 170 and the fourth processing chamber 180 may be used to perform any one of various workpiece processing on the workpiece, such as vacuum annealing process, heat treatment process, surface treatment process, dry stripping process, dry etching process, deposition process and other processes. In some embodiments, one or more of the third processing chamber 170 and the fourth processing chamber 180 may include a plasma-based processing source such as, for example, an inductively coupled plasma (ICP) source, a microwave source, a surface wave electrode, etc. Plasma sources, ECR plasma sources, and capacitively coupled (parallel plate) plasma sources.

如圖所示,第三加工室170和第四加工室180中的每一個包括並排佈置的一對加工站,使得一對工件可以同時暴露於相同加工。更具體地,第三加工室170可以包括並排佈置的第一加工站172和第二加工站174。第四加工室180可以包括並排佈置的第一加工站182和第二加工站184。每個加工站可以包括用於在加工期間支撐工件的工件支撐件(例如,基座)。在一些實施例中,第三加工室170和/或第四加工室180可以選擇性地與傳送室115密封(sealed off)以進行加工。As shown, each of the third processing chamber 170 and the fourth processing chamber 180 includes a pair of processing stations arranged side-by-side so that a pair of workpieces can be simultaneously exposed to the same processing. More specifically, the third processing chamber 170 may include a first processing station 172 and a second processing station 174 arranged side by side. The fourth processing chamber 180 may include a first processing station 182 and a second processing station 184 arranged side by side. Each machining station may include a workpiece support (eg, a base) for supporting the workpiece during machining. In some embodiments, the third processing chamber 170 and/or the fourth processing chamber 180 may be selectively sealed off from the transfer chamber 115 for processing.

為了將工件傳送到第三加工室170和第四加工室180,系統200可以進一步包括傳送位置162和第二工件處理機器人190。傳送位置162可以是傳送室115的一部分或可以是單獨的室。傳送位置162可以包括用於支撐多個工件的工件柱160,多個工件呈堆疊佈置。例如,工件柱160可以包括多個擱板,擱板被配置成以堆疊的垂直佈置支撐工件。第一工件處理機器人150可以被配置成將工件從工件柱110、第一加工室120或第二加工室130傳送到傳送位置162中的工件柱160。To transfer workpieces to the third processing chamber 170 and the fourth processing chamber 180 , the system 200 may further include a transfer location 162 and a second workpiece handling robot 190 . The transfer location 162 may be part of the transfer chamber 115 or may be a separate chamber. The transfer location 162 may include a workpiece column 160 for supporting a plurality of workpieces arranged in a stack. For example, workpiece column 160 may include a plurality of shelves configured to support workpieces in a stacked vertical arrangement. First workpiece handling robot 150 may be configured to transfer workpieces from workpiece column 110 , first process chamber 120 , or second process chamber 130 to workpiece column 160 in transfer location 162 .

圖4的加工系統200可以包括與圖1的加工系統100類似的狹縫門123、125、133和135。此外,加工室170可以包括狹縫門173和175。例如,狹縫門173可以與加工站172對齊。類似地,狹縫門175可以與加工站174對齊。如圖1中所示,狹縫門173可以與狹縫門175橫向對齊。例如,狹縫門173和狹縫門175可以各自沿著由加工室170的前壁和/或傳送室115限定的平面對齊。如圖4中所示,加工室170的狹縫門173和175可以沿著直線側171與加工室120的狹縫門123和125對齊。例如,狹縫門123、125、173和/或175可以在方向104上間隔隔開,並且沿方向102具有約為零的偏移。Processing system 200 of FIG. 4 may include slot doors 123 , 125 , 133 , and 135 similar to processing system 100 of FIG. 1 . In addition, the process chamber 170 may include slit doors 173 and 175 . For example, slot door 173 may be aligned with processing station 172 . Similarly, slot door 175 may be aligned with processing station 174 . As shown in FIG. 1 , slot door 173 may be laterally aligned with slot door 175 . For example, slot door 173 and slot door 175 may each be aligned along a plane defined by the front wall of process chamber 170 and/or transfer chamber 115 . As shown in FIG. 4 , the slit doors 173 and 175 of the process chamber 170 may be aligned with the slit doors 123 and 125 of the process chamber 120 along the straight side 171 . For example, slot doors 123 , 125 , 173 and/or 175 may be spaced apart in direction 104 and have an offset of about zero in direction 102 .

此外,加工室180可以包括狹縫門183和185。例如,狹縫門183可以與加工站182對齊。類似地,狹縫門185可以與加工站184對齊。如圖1中所示,狹縫門183可以與狹縫門185橫向對齊。例如,狹縫門183和狹縫門185可以各自沿著由加工室180的前壁和/或傳送室115限定的平面對齊。如圖4中所示,加工室180的狹縫門183和185可以沿著直線側181與加工室130的狹縫門133和135對齊。例如,狹縫門133、135、183和/或185可以在方向104上間隔隔開,並且沿方向102具有約為零的偏移。In addition, the processing chamber 180 may include slit doors 183 and 185 . For example, slot door 183 may be aligned with processing station 182 . Similarly, slot door 185 may be aligned with processing station 184 . As shown in FIG. 1 , slot door 183 may be laterally aligned with slot door 185 . For example, slot door 183 and slot door 185 may each be aligned along a plane defined by the front wall of process chamber 180 and/or transfer chamber 115 . As shown in FIG. 4 , the slit doors 183 and 185 of the process chamber 180 may be aligned with the slit doors 133 and 135 of the process chamber 130 along the straight side 181 . For example, slot doors 133 , 135 , 183 and/or 185 may be spaced apart in direction 104 and have an offset of about zero in direction 102 .

圖5示出了根據本公開的示例實施例的處於傳送位置162的示例工件柱160的側視圖。如圖所示,工件柱160可以包括多個擱板161。每個擱板161可以被配置成支撐工件163,使得多個工件163可以以垂直/堆疊佈置佈置在工件柱160上。FIG. 5 illustrates a side view of an example workpiece column 160 in a transfer position 162 according to an example embodiment of the present disclosure. As shown, workpiece column 160 may include a plurality of shelves 161 . Each shelf 161 may be configured to support a workpiece 163 such that a plurality of workpieces 163 may be arranged in a vertical/stacked arrangement on the workpiece column 160 .

第二工件處理機器人190可以被配置成將工件從傳送位置162中的工件柱160傳送到第三加工室170和/或第四加工室180中的加工站。工件處理機器人190還可以將工件從第三加工室170傳送到第四加工室180。例如,工件處理機器人190可以使用例如剪刀運動,同時將工件從傳送位置162中的工件柱160傳送到第三加工室170中的兩個並排加工站172和174。類似地,工件處理機器人190可以使用例如剪刀運動,同時將工件從傳送位置162中的工件柱160傳送到第四加工室130中的兩個並排加工站182和184。Second workpiece handling robot 190 may be configured to transfer workpieces from workpiece column 160 in transfer location 162 to processing stations in third processing chamber 170 and/or fourth processing chamber 180 . The workpiece handling robot 190 may also transfer workpieces from the third processing chamber 170 to the fourth processing chamber 180 . For example, workpiece handling robot 190 may simultaneously transfer workpieces from workpiece column 160 in transfer location 162 to two side-by-side processing stations 172 and 174 in third processing chamber 170 using, for example, a scissors motion. Similarly, workpiece handling robot 190 may simultaneously transfer workpieces from workpiece column 160 in transfer location 162 to two side-by-side processing stations 182 and 184 in fourth processing chamber 130 using, for example, a scissors motion.

根據本公開的示例實施例,工件處理機器人190可以具有多種配置以支持工件的傳送。在一個實施例中,工件處理機器人150可以包括一對被配置成圍繞樞軸點旋轉的臂。每個機器人臂可以與一對工件刀片相關聯。每個工件刀片可以具有被配置成支撐工件的末端執行器。與每個臂相關聯的一對工件刀片可以用於在加工室的加工站完成工件交換。該對臂可以被配置成使用剪刀運動將工件傳送到每個加工室的兩個加工站。According to example embodiments of the present disclosure, the workpiece handling robot 190 may have various configurations to support the transfer of workpieces. In one embodiment, workpiece handling robot 150 may include a pair of arms configured to rotate about a pivot point. Each robot arm can be associated with a pair of workpiece blades. Each workpiece blade may have an end effector configured to support a workpiece. A pair of workpiece blades associated with each arm can be used to accomplish workpiece exchange at the machining stations of the machining chamber. The pair of arms can be configured to transfer workpieces to the two processing stations in each processing chamber using a scissor motion.

在另一示例實施方式中,工件處理機器人190可以包括至少一個主臂,主臂圍繞樞軸點或樞軸區域旋轉。主臂可以聯接到多個輔助臂。輔助臂可以各自聯接到至少一個工件刀片。每個工件刀片可以包括用於支撐工件的末端執行器。在一些實施例中,工件處理機器人190可以被配置成使用剪刀運動,將至少兩個工件從傳送位置162中的工件柱160傳送到例如第三加工室170中的兩個並排加工站172和174。在一些實施例中,剪刀運動可以使用單個馬達來實現。In another example embodiment, the workpiece handling robot 190 may include at least one main arm that rotates about a pivot point or region. The main arm can be coupled to multiple auxiliary arms. The auxiliary arms may each be coupled to at least one workpiece blade. Each workpiece blade may include an end effector for supporting the workpiece. In some embodiments, workpiece handling robot 190 may be configured to transfer at least two workpieces from workpiece column 160 in transfer location 162 to two side-by-side processing stations 172 and 174 in third processing chamber 170, for example, using a scissor motion. . In some embodiments, scissor motion can be achieved using a single motor.

加工系統200包括四個加工室120、130、170和180,並且可以被配置成一次同時加工多達八個工件。可以以線性方式添加附加加工站,以提供附加加工能力。例如,第五加工室可以與第三加工室170以線性佈置來添加。第六加工室可以與第四加工室180以線性佈置來添加。另外的傳送位置和工件處理機器人可以用於將工件傳送進出第五和第六加工室。通過以這種方式以線性方式擴展加工系統,可以包括附加加工室。Machining system 200 includes four machining chambers 120, 130, 170, and 180, and can be configured to simultaneously machine up to eight workpieces at a time. Additional machining stations can be added in a linear fashion to provide additional machining capacity. For example, a fifth processing chamber may be added in a linear arrangement with the third processing chamber 170 . A sixth processing chamber may be added in a linear arrangement with the fourth processing chamber 180 . Additional transfer locations and workpiece handling robots may be used to transfer workpieces into and out of the fifth and sixth processing chambers. By extending the processing system in a linear fashion in this way, additional processing chambers can be included.

圖6A和圖6B示出了用於在加工系統中加工工件的示例方法(400)的流程圖。可以使用圖4的加工系統200來實現方法(400)。為了說明和討論的目的,圖6A和圖6B示出了以特定順序執行的步驟。本領域普通技術人員使用本文提供的公開內容應理解,在不偏離本公開的範圍的情況下,本文提供的任何方法的各個步驟可以以各種方式調整、重新佈置、同時執行、省略和/或修改。6A and 6B show a flowchart of an example method ( 400 ) for machining a workpiece in a machining system. Method ( 400 ) may be implemented using machining system 200 of FIG. 4 . For purposes of illustration and discussion, Figures 6A and 6B show steps performed in a particular order. Those of ordinary skill in the art using the disclosure provided herein will understand that the individual steps of any method provided herein may be adjusted, rearranged, performed concurrently, omitted and/or modified in various ways without departing from the scope of the present disclosure .

在(402),方法包括將多個工件傳送到負載鎖定室中的工件柱。例如,可以將多個工件從加工室100的前端部傳送到負載鎖定室114中的工件柱110。例如,可以使用與加工室100的前端部相關聯的一個或多個機器人將工件傳送到工件柱110。At (402), the method includes transferring a plurality of workpieces to a workpiece column in a load lock chamber. For example, a plurality of workpieces may be transferred from the front end of the process chamber 100 to the workpiece column 110 in the load lock chamber 114 . For example, one or more robots associated with the front end of process chamber 100 may be used to transfer workpieces to workpiece column 110 .

在(404),方法包括利用位於傳送室中的工件處理機器人將多個工件從工件柱傳送到第一加工室中的至少兩個加工站。例如,工件處理機器人150可以將兩個工件分別傳送到加工室120中的加工站122和加工站124。在一些實施例中,工件處理機器人150可以使用剪刀運動,將工件傳送到加工室120中的加工站122和加工站124。At (404), the method includes transferring a plurality of workpieces from the workpiece column to at least two processing stations in the first processing chamber with a workpiece handling robot located in the transfer chamber. For example, workpiece handling robot 150 may transfer two workpieces to processing station 122 and processing station 124 in processing chamber 120 , respectively. In some embodiments, workpiece handling robot 150 may transfer workpieces to processing stations 122 and 124 in processing chamber 120 using a scissor motion.

在(406),方法包括在第一加工室中對多個工件執行第一處理製程。第一處理製程可以包括例如退火製程、熱處理製程、表面處理製程、乾式去膠製程、乾式刻蝕製程、沉積製程或其他製程。At (406), the method includes performing a first processing procedure on a plurality of workpieces in a first processing chamber. The first treatment process may include, for example, an annealing process, a heat treatment process, a surface treatment process, a dry stripping process, a dry etching process, a deposition process, or other processes.

在(408),方法包括利用工件處理機器人將多個工件傳送到傳送站。工件處理機器人150可以將兩個工件分別傳送到加工室120中的加工站122和加工站124。在一些實施例中,工件處理機器人150可以將工件傳送到位於傳送位置162的工件柱160。At (408), the method includes transferring the plurality of workpieces to the transfer station with the workpiece handling robot. The workpiece handling robot 150 may transfer the two workpieces to the processing station 122 and the processing station 124 in the processing chamber 120, respectively. In some embodiments, workpiece handling robot 150 may transfer the workpiece to workpiece column 160 at transfer location 162 .

在(410),方法可以包括利用被設置在傳送室中的第二工件處理機器人將多個工件從傳送位置傳送到第三加工室中的至少兩個加工站。第三加工室可以被設置成與第一加工室呈線性佈置。例如,工件處理機器人190可以將兩個工件從傳送位置162中的工件柱160分別傳送到加工室170中的加工站172和加工站174。在一些實施例中,工件處理機器人190可以使用剪刀運動,將工件傳送到加工室170中的加工站172和加工站174。At (410), the method may include transferring the plurality of workpieces from the transfer location to at least two processing stations in the third processing chamber with a second workpiece handling robot disposed in the transfer chamber. The third processing chamber may be arranged in a linear arrangement with the first processing chamber. For example, workpiece handling robot 190 may transfer two workpieces from workpiece column 160 in transfer location 162 to processing station 172 and processing station 174 in processing chamber 170 , respectively. In some embodiments, workpiece handling robot 190 may transfer the workpiece to processing station 172 and processing station 174 in processing chamber 170 using a scissors motion.

在(412),方法包括在第三加工室中對多個工件執行第三處理製程。第三處理製程可以包括例如退火製程、熱處理製程、表面處理製程、乾式去膠製程、乾式刻蝕製程、沉積製程或其他製程。At (412), the method includes performing a third processing procedure on the plurality of workpieces in a third processing chamber. The third treatment process may include, for example, an annealing process, a heat treatment process, a surface treatment process, a dry stripping process, a dry etching process, a deposition process, or other processes.

在(414),方法可以包括利用第二工件處理機器人將多個工件傳送到第四加工室中的至少兩個加工站。第四加工室可以被設置成與第二加工室呈線性佈置。例如,工件處理機器人190可以將兩個工件從傳送位置162中的工件柱160分別傳送到加工室180中的加工站182和加工站184。例如,工件處理機器人190可以使用剪刀運動,將工件傳送到加工室180中的加工站182和加工站184。在一些實施例中,工件處理機器人190可以將兩個工件從加工室170傳送到加工室180中的加工站182和加工站184。例如,工件處理機器人190可以使用剪刀運動,將工件傳送到加工室180中的加工站182和加工站184。At ( 414 ), the method may include transferring the plurality of workpieces to at least two processing stations in a fourth processing chamber with the second workpiece handling robot. The fourth processing chamber may be arranged in a linear arrangement with the second processing chamber. For example, workpiece handling robot 190 may transfer two workpieces from workpiece column 160 in transfer location 162 to processing station 182 and processing station 184 in processing chamber 180 , respectively. For example, workpiece handling robot 190 may transfer the workpiece to processing station 182 and processing station 184 in processing chamber 180 using a scissors motion. In some embodiments, workpiece handling robot 190 may transfer two workpieces from processing chamber 170 to processing station 182 and processing station 184 in processing chamber 180 . For example, workpiece handling robot 190 may transfer the workpiece to processing station 182 and processing station 184 in processing chamber 180 using a scissors motion.

在(416),方法可以包括在第四加工室中對多個工件執行第四處理製程。第四處理製程可以包括例如退火製程、熱處理製程、表面處理製程、乾式去膠製程、乾式刻蝕製程、沉積製程或其他製程。At ( 416 ), the method may include performing a fourth processing procedure on the plurality of workpieces in a fourth processing chamber. The fourth treatment process may include, for example, an annealing process, a heat treatment process, a surface treatment process, a dry stripping process, a dry etching process, a deposition process, or other processes.

在(418),方法可以包括通過第二工件處理機器人將多個工件傳送回傳送位置。例如,工件處理機器人190可以將工件從加工室170和/或加工室180傳送到位於傳送位置162的工件柱160。At ( 418 ), the method may include transferring, by the second workpiece handling robot, the plurality of workpieces back to the transfer location. For example, workpiece handling robot 190 may transfer workpieces from process chamber 170 and/or process chamber 180 to workpiece column 160 at transfer location 162 .

在(422),方法包括利用工件處理機器人將多個工件傳送到第二加工室中的至少兩個加工站。例如,工件處理機器人150可以將兩個工件分別傳送到加工室130中的加工站132和加工站134。在一些實施例中,工件處理機器人150可以使用剪刀運動將工件傳送到加工室130中的加工站132和加工站134。At (422), the method includes transferring the plurality of workpieces to at least two processing stations in the second processing chamber using the workpiece handling robot. For example, workpiece handling robot 150 may transfer two workpieces to processing station 132 and processing station 134 in processing chamber 130 , respectively. In some embodiments, workpiece handling robot 150 may transfer workpieces to processing stations 132 and 134 in processing chamber 130 using a scissor motion.

在一些實施例中,工件處理機器人可以將多個工件從第一加工室120傳送到第二加工室中的至少兩個加工站。在一些實施例中,工件處理機器人可以將多個工件從例如位於傳送位置162的工件柱160傳送到第二加工室120中的至少兩個加工站。In some embodiments, the workpiece handling robot may transfer a plurality of workpieces from the first processing chamber 120 to at least two processing stations in the second processing chamber. In some embodiments, a workpiece handling robot may transfer a plurality of workpieces from, for example, workpiece column 160 at transfer location 162 to at least two processing stations in second processing chamber 120 .

在(424),方法包括在第二加工室中對多個工件執行第二處理製程。第二處理製程可以包括例如退火製程、熱處理製程、表面處理製程、乾式去膠製程、乾式刻蝕製程、沉積製程或其他製程。在一些實施例中,第二處理製程可以與第一處理製程、第三處理製程和/或第四處理製程相同或不同。At (424), the method includes performing a second processing procedure on the plurality of workpieces in the second processing chamber. The second treatment process may include, for example, an annealing process, a heat treatment process, a surface treatment process, a dry stripping process, a dry etching process, a deposition process, or other processes. In some embodiments, the second treatment recipe may be the same as or different from the first treatment recipe, third treatment recipe, and/or fourth treatment recipe.

在(426),方法可以包括將加工過的工件傳送回負載鎖定室中的工件柱。例如,工件處理機器人150可以從第一加工室120和/或第二加工室130傳送兩個工件。然後,位於加工系統前端的一個或多個機器人可以將加工過的工件傳送到例如盒。At (426), the method may include transferring the machined workpiece back to the workpiece column in the load lock chamber. For example, the workpiece handling robot 150 may transfer two workpieces from the first processing chamber 120 and/or the second processing chamber 130 . One or more robots at the front end of the machining system can then transfer the machined workpieces to, for example, a cassette.

參考圖7A至圖7D,將闡述根據示例實施例的示例工件處理機器人150的操作。圖7A至圖7D的工件處理機器人150包括兩個主機器人臂152和154,主機器人臂被配置成圍繞固定點旋轉。機器人臂152和154中的每一個可以包括至少一個工件刀片。例如,機器人臂152可以包括工件刀片156。機器人臂154可以包括工件刀片158。每個工件刀片156和158可以被配置成使用例如合適的末端執行器抓取、保持和釋放工件。在一些實施例中,機器人臂152和154中的每一個可以包括一對工件刀片。附加工件刀片可以用於例如工件交換。機器人臂152和154中的每一個可以使用例如馬達獨立地操作。Referring to FIGS. 7A-7D , the operation of an example workpiece handling robot 150 according to an example embodiment will be explained. The workpiece handling robot 150 of FIGS. 7A-7D includes two main robot arms 152 and 154 configured to rotate about a fixed point. Each of robotic arms 152 and 154 may include at least one workpiece blade. For example, robotic arm 152 may include workpiece blade 156 . The robotic arm 154 may include a workpiece blade 158 . Each workpiece blade 156 and 158 may be configured to grasp, hold and release a workpiece using, for example, a suitable end effector. In some embodiments, each of robotic arms 152 and 154 may include a pair of workpiece blades. Additional workpiece inserts can be used, for example, for workpiece exchange. Each of robotic arms 152 and 154 may be independently operated using, for example, motors.

如圖7A中所示,工件處理機器人150的兩個機器人臂152和154都可以延伸以使用工件刀片從負載鎖定室114中的工件柱110抓取工件。例如,機器人臂152可以延伸以使用工件刀片156從工件柱110抓取工件。機器人臂154可以延伸以使用工件刀片158從工件柱110抓取工件。如圖7B中所示,然後可以操作工件處理機器人150以將機器人臂152和154縮回至縮回位置。As shown in FIG. 7A , both robot arms 152 and 154 of the workpiece handling robot 150 can be extended to grab a workpiece from the workpiece column 110 in the load lock chamber 114 using a workpiece blade. For example, robotic arm 152 may be extended to grasp a workpiece from workpiece column 110 using workpiece blade 156 . Robotic arm 154 may be extended to grab a workpiece from workpiece column 110 using workpiece blade 158 . As shown in FIG. 7B , the workpiece handling robot 150 may then be operated to retract the robot arms 152 and 154 to the retracted position.

圖7C示出了根據本公開的示例實施例的將工件傳送到加工室130中的並排加工站132和134。第一機器人臂152可以旋轉和延伸,使得工件刀片可以將工件傳送到第一加工站132。在將工件實際傳送到第一加工站之前,與第一機器人臂152相關聯的第二工件刀片可以抓取已經位於第一加工站132上的工件。可以旋轉和延伸第二機器人臂154,使得工件刀片可以傳送到第二加工站134。在工件實際傳送到第一加工站之前,與第二機器人臂154相關聯的第二工件刀片可以抓取已經位於第二加工站134上的工件。在特定實施例中,第一機器人臂152和第二機器人臂154可以以剪刀運動方式操作,使得第二機器人臂154與第一機器人臂152分離。在一些實施例中,機器人臂152和154可以同時將工件分別傳送到第一加工站132和第二加工站134。FIG. 7C illustrates side-by-side processing stations 132 and 134 transferring workpieces into processing chamber 130 according to an example embodiment of the present disclosure. The first robotic arm 152 can rotate and extend so that the workpiece blade can transfer the workpiece to the first machining station 132 . A second workpiece blade associated with the first robotic arm 152 may grip a workpiece already located on the first processing station 132 prior to actually transferring the workpiece to the first processing station. The second robot arm 154 can be rotated and extended so that the workpiece blade can be transferred to the second machining station 134 . A second workpiece blade associated with the second robot arm 154 may grip a workpiece already located on the second processing station 134 before the workpiece is actually transferred to the first processing station. In certain embodiments, the first robotic arm 152 and the second robotic arm 154 may operate in a scissor motion such that the second robotic arm 154 is separated from the first robotic arm 152 . In some embodiments, robotic arms 152 and 154 may simultaneously transfer workpieces to first processing station 132 and second processing station 134, respectively.

一旦先前位於加工站132和134的工件已經被抓取並且新工件已經被傳送到加工站132和134,則可以操作工件處理機器人150以將機器人臂152和154縮回到縮回位置。然後可以旋轉和操作工件處理機器人150,以將工件遞送到系統的其他部分,諸如負載鎖定室114中的工件柱110、傳送位置162中的工件柱160,或加工室120中的加工站122和124。Once workpieces previously located at processing stations 132 and 134 have been gripped and new workpieces have been transferred to processing stations 132 and 134 , workpiece handling robot 150 may be operated to retract robot arms 152 and 154 to a retracted position. The workpiece handling robot 150 can then be rotated and manipulated to deliver the workpiece to other parts of the system, such as the workpiece column 110 in the load lock chamber 114, the workpiece column 160 in the transfer location 162, or the processing station 122 and 124.

圖8A和圖8B示出了根據本公開的另一示例實施例的示例工件處理機器人150的操作。圖8A和圖8B的工件處理機器人150包括單個主機器人臂252和在主機器人臂252上的樞軸點處附接到主臂252的兩個輔助機器人臂253和254。輔助機器人臂253和254中的每一個可以包括至少一個工件刀片。例如,輔助機器人臂253可以包括工件刀片255。輔助機器人臂254可以包括工件刀片256。每個工件刀片255和256可以被配置成使用例如合適的末端執行器抓取、保持和釋放工件。在一些實施例中,輔助機器人臂253和254中的每一個可以各自包括一對工件刀片。附加的工件刀片可以用於例如工件交換。8A and 8B illustrate the operation of an example workpiece handling robot 150 according to another example embodiment of the present disclosure. The workpiece handling robot 150 of FIGS. 8A and 8B includes a single main robot arm 252 and two auxiliary robot arms 253 and 254 attached to the main robot arm 252 at pivot points on the main robot arm 252 . Each of the auxiliary robotic arms 253 and 254 may include at least one workpiece blade. For example, auxiliary robot arm 253 may include workpiece blade 255 . The auxiliary robotic arm 254 may include a workpiece blade 256 . Each workpiece blade 255 and 256 may be configured to grasp, hold and release a workpiece using, for example, a suitable end effector. In some embodiments, each of auxiliary robotic arms 253 and 254 may each include a pair of workpiece blades. Additional workpiece inserts can be used, for example, for workpiece exchange.

參考圖8A,可以操作工件處理機器人150以延伸主機器人臂和輔助機器人臂,以使用工件刀片從工件柱110抓取工件。每個輔助臂可以使用合適的工件刀片抓取工件。機器人150然後可以將主機器人臂和輔助機器人臂縮回到縮回位置。機器人150然後可以將主機器人臂和輔助機器人臂旋轉到將工件遞送到例如第一加工室120的位置。Referring to FIG. 8A , the workpiece handling robot 150 may be operated to extend the primary and secondary robot arms to grab a workpiece from the workpiece column 110 using the workpiece blade. Each auxiliary arm can grip the workpiece with a suitable workpiece blade. The robot 150 can then retract the primary and secondary robotic arms to the retracted position. The robot 150 may then rotate the primary and secondary robotic arms to a position to deliver the workpiece to, for example, the first process chamber 120 .

如圖8B中所示,工件處理機器人150可以延伸主機器人臂252。可以使輔助機器人臂253和254以剪刀運動260(例如,彼此分離)移動,以同時將工件遞送到加工室120中的第一加工站122和第二加工站124。As shown in FIG. 8B , workpiece handling robot 150 may extend master robot arm 252 . Auxiliary robotic arms 253 and 254 may be moved in a scissor motion 260 (eg, away from each other) to simultaneously deliver workpieces to first processing station 122 and second processing station 124 in processing chamber 120 .

可以使用各種機構來以剪刀運動操作輔助臂253和254。例如,在一個示例中,當工件處理機器人延伸主臂252時,可以定位機構(例如,分隔構件)以將輔助機器人臂253和254以剪刀運動分離。以這種方式,根據示例實施例的主機器人臂252以及輔助機器人臂253和254的延伸可以使用單個馬達來操作。在另一示例中,工件處理機器人150可以包括一個或多個附加馬達,以獨立地以剪刀運動操作輔助機器人臂253和254,與操作主機器人臂252的馬達不同,以將工件遞送到加工站122和124。在一些其他實施例中,可以定位機構以使輔助機器人臂253和254發生通過工件處理機器人150的旋轉角的剪刀運動。如圖4A和圖4B中所示,當工件處理機器人150朝向加工室120旋轉時,可以使輔助臂253和254以剪刀運動260移動,但當工件處理機器人150朝向工件柱110旋轉時則不能。Various mechanisms may be used to operate auxiliary arms 253 and 254 in a scissors motion. For example, in one example, when the workpiece handling robot extends the main arm 252, a mechanism (eg, separation member) may be positioned to separate the auxiliary robot arms 253 and 254 in a scissors motion. In this way, the extension of the main robot arm 252 and the auxiliary robot arms 253 and 254 according to example embodiments may be operated using a single motor. In another example, the workpiece handling robot 150 may include one or more additional motors to operate the auxiliary robotic arms 253 and 254 in a scissors motion independently from the motors operating the main robotic arm 252 to deliver workpieces to processing stations. 122 and 124. In some other embodiments, the mechanism may be positioned so that the auxiliary robot arms 253 and 254 undergo scissor motion through the rotational angle of the workpiece handling robot 150 . As shown in FIGS. 4A and 4B , the auxiliary arms 253 and 254 can be moved in a scissor motion 260 when the workpiece handling robot 150 is rotated toward the machining chamber 120 , but not when the workpiece handling robot 150 is rotated toward the workpiece column 110 .

在另一示例實施方式中,工件處理機器人150可以包括第二主臂(未示出)。第二主臂可以具有兩個輔助機器人臂。每個輔助機器人臂可以包括至少一個工件刀片。可以使附接到第二主機器人臂的輔助機器人臂以剪刀運動(例如,彼此分離)移動,並且工件刀片可以同時抓取已經位於加工室120中的加工站122和124上的工件,通過附接到第一主機器人臂252的輔助機器人臂253和254將新工件實際傳送到加工室120之前。在另一示例中,兩個主臂從不同時延伸,並且可以使用單個馬達操作。In another example embodiment, workpiece handling robot 150 may include a second main arm (not shown). The second main arm can have two auxiliary robot arms. Each auxiliary robotic arm may include at least one workpiece blade. The auxiliary robot arm attached to the second main robot arm can be moved in a scissor motion (eg, separated from each other), and the workpiece blade can simultaneously grasp the workpiece already located on the processing stations 122 and 124 in the processing chamber 120, by attaching Auxiliary robot arms 253 and 254 connected to the first master robot arm 252 physically transfer the new workpiece to the processing chamber 120 . In another example, the two main arms never extend simultaneously and can be operated using a single motor.

圖9示出了根據本公開的示例實施例的示例加工系統900的平面圖。與圖1的加工系統100類似,圖9的加工系統900可以包括前端部112、負載鎖定室114、傳送室115以及多個加工室,包括第一加工室120和第二加工室130。系統可以包括第一工件處理機器人150,用於將工件傳送進出負載鎖定室中的工件柱110以及第一加工室120和第二加工室130,和/或在第一加工室120和第二加工室130之間傳送。FIG. 9 shows a plan view of an example machining system 900 according to an example embodiment of the present disclosure. Similar to processing system 100 of FIG. 1 , processing system 900 of FIG. 9 may include front end 112 , load lock chamber 114 , transfer chamber 115 , and a plurality of processing chambers, including first processing chamber 120 and second processing chamber 130 . The system may include a first workpiece handling robot 150 for transferring workpieces into and out of the workpiece column 110 in the load lock chamber and the first process chamber 120 and the second process chamber 130, and/or between the first process chamber 120 and the second process chamber. transfer between chambers 130.

除了加工室120和130之外,加工系統900可以進一步包括後加工室950。後加工室950可以被設置在加工系統900的後側處。例如,後加工室950可以被設置在與負載鎖定室114相對的傳送室115的一側處。作為一個示例,第一加工室120可以被設置在傳送室115的第一側上,第二加工室130可以被設置在與第一側相對的傳送室115的第二側上。後加工室950可以被設置在垂直於第一側和第二側的第三側(例如,後側)上。因而,負載鎖定室114可以被設置在與第三側相對的第四側(例如,前側)上。在一些實施例中,後加工室950中可以僅包括單個加工站952。另外,後加工室950中可以包括單個狹縫門953,以允許工件處理機器人150將工件傳送到和/或傳送出加工站952。In addition to processing chambers 120 and 130 , processing system 900 may further include a post-processing chamber 950 . A post-processing chamber 950 may be provided at a rear side of the processing system 900 . For example, the post-processing chamber 950 may be disposed at a side of the transfer chamber 115 opposite to the load lock chamber 114 . As one example, the first processing chamber 120 may be disposed on a first side of the transfer chamber 115 and the second processing chamber 130 may be disposed on a second side of the transfer chamber 115 opposite the first side. The post-processing chamber 950 may be disposed on a third side (eg, a rear side) perpendicular to the first side and the second side. Thus, the load lock chamber 114 may be disposed on a fourth side (eg, a front side) opposite to the third side. In some embodiments, only a single processing station 952 may be included in the post processing chamber 950 . Additionally, a single slot door 953 may be included in the post processing chamber 950 to allow the workpiece handling robot 150 to transfer workpieces to and/or out of the processing station 952 .

工件處理機器人150在加工站952處傳送工件的運動可以與用於將工件傳送到和/或傳送出工件柱110的運動相似和/或相同(例如,如圖8A中所示)。例如,工件處理機器人除了被配置成觸及具有兩個加工站的其他加工室之外,還可以被配置成觸及僅具有一個加工站的後加工室。The motion of the workpiece handling robot 150 to transfer the workpiece at the processing station 952 may be similar and/or identical to the motion used to transfer the workpiece to and/or out of the workpiece column 110 (eg, as shown in FIG. 8A ). For example, a workpiece handling robot may be configured to access a post-processing chamber with only one processing station in addition to other processing chambers having two processing stations.

以這種方式,可以減少加工系統900的占地面積,同時實現額外的加工站952。例如,後加工室950可以提供附加加工站952(例如,與例如圖1的加工系統100相比),而不需要增加整個加工系統900的寬度來容納例如加工系統900後部的兩個加工站。In this manner, the footprint of processing system 900 may be reduced while enabling additional processing stations 952 . For example, post processing chamber 950 may provide additional processing stations 952 (eg, compared to processing system 100 such as FIG.

圖10示出了根據本公開的示例實施例的示例加工系統1000的平面圖。與圖1的加工系統100類似,圖10的加工系統1000可以包括前端部112、負載鎖定室114、傳送室115以及多個加工室,包括第一加工室120和第二加工室130。系統可以包括工件處理機器人150,用於將工件傳送進出負載鎖定室中的工件柱110以及第一加工室120和第二加工室130,和/或在第一加工室120和第二加工室130之間傳送。另外,類似於圖4的加工系統400,圖10的加工系統1000可以包括第三加工室170和第四加工室180。FIG. 10 shows a plan view of an example machining system 1000 according to an example embodiment of the present disclosure. Similar to processing system 100 of FIG. 1 , processing system 1000 of FIG. 10 may include a front end 112 , a load lock chamber 114 , a transfer chamber 115 , and a plurality of processing chambers, including a first processing chamber 120 and a second processing chamber 130 . The system may include a workpiece handling robot 150 for transferring workpieces into and out of the workpiece column 110 in the load lock chamber and the first process chamber 120 and the second process chamber 130, and/or between the first process chamber 120 and the second process chamber 130 transfer between. In addition, similar to the processing system 400 of FIG. 4 , the processing system 1000 of FIG. 10 may include a third processing chamber 170 and a fourth processing chamber 180 .

如圖10中所示,第三加工室170和第四加工室180被設置成分別與第一加工室120和第二加工室130呈相鄰的線性佈置,諸如在傳送室115中沒有中斷。例如,在圖10的實施例中,圖4的加工系統400的工件柱160和傳送位置162被移除。這可以減小加工系統1000的占地面積。另外,加工室120、130、170和/或180可以沿直線側對齊。例如,加工室120可以沿直線側與加工室170對齊。另外和/或可替選地,加工室130可以沿直線側與加工室180對齊。As shown in FIG. 10 , third processing chamber 170 and fourth processing chamber 180 are arranged in a linear arrangement adjacent to first processing chamber 120 and second processing chamber 130 , respectively, such as without interruption in transfer chamber 115 . For example, in the embodiment of FIG. 10 , workpiece column 160 and transfer location 162 of machining system 400 of FIG. 4 are removed. This can reduce the footprint of processing system 1000 . Additionally, process chambers 120, 130, 170, and/or 180 may be aligned along linear sides. For example, processing chamber 120 may be aligned with processing chamber 170 along a linear side. Additionally and/or alternatively, processing chamber 130 may be aligned with processing chamber 180 along a linear side.

因而,為了與第三加工室170和/或第四加工室180接合,工件處理機器人150可以在傳送室115內線性移動。例如,工件處理機器人150可以沿著軌道1052重新定位。在一些實施例中,工件處理機器人150可以沿著軌道1052移動到至少第一位置。當工件處理機器人150處於第一位置時,工件處理機器人150可以被配置成觸及第一加工室120和第二加工室130。例如,在一些實施例中,第一位置可以在加工室120和/或130的橫向中心處。另外和/或可替選地,工件處理機器人150可以沿軌道1052移動到至少第二位置。當工件處理機器人150處於第二位置時,工件處理機器人150可以被配置成觸及第三加工室170和第四加工室180。例如,在一些實施例中,第二位置可以在加工室170和/或180的橫向中心處。Thus, the workpiece handling robot 150 may move linearly within the transfer chamber 115 in order to engage the third processing chamber 170 and/or the fourth processing chamber 180 . For example, workpiece handling robot 150 may be repositioned along track 1052 . In some embodiments, workpiece handling robot 150 is movable along track 1052 to at least a first location. The workpiece handling robot 150 may be configured to access the first processing chamber 120 and the second processing chamber 130 when the workpiece handling robot 150 is in the first position. For example, in some embodiments, the first location may be at the lateral center of process chambers 120 and/or 130 . Additionally and/or alternatively, workpiece handling robot 150 may move along track 1052 to at least a second location. The workpiece handling robot 150 may be configured to access the third processing chamber 170 and the fourth processing chamber 180 when the workpiece handling robot 150 is in the second position. For example, in some embodiments, the second location may be at the lateral center of process chambers 170 and/or 180 .

圖11示出了根據本公開的示例實施例的示例加工系統1100的平面圖。與圖1的加工系統100類似,圖11的加工系統1100可以包括前端部112、負載鎖定室114、傳送室115以及多個加工室,包括第一加工室120和第二加工室130。系統可以包括工件處理機器人150,用於將工件傳送進出負載鎖定室中的工件柱110以及第一加工室120和第二加工室130,和/或在第一加工室120和第二加工室130之間傳送。另外,類似於圖4的加工系統400,圖11的加工系統1100可以包括第三加工室170和第四加工室180。加工室170和180可以類似於圖4和/或圖10來佈置。例如,單個工件處理機器人150可以移動以觸及加工室120、130和170、180,如關於圖10所述的。另外和/或可替選地,第二工件處理機器人和/或傳送位置可以用於觸及加工室170、180,如關於圖4所述的。FIG. 11 shows a plan view of an example machining system 1100 according to an example embodiment of the present disclosure. Similar to processing system 100 of FIG. 1 , processing system 1100 of FIG. 11 may include a front end 112 , a load lock chamber 114 , a transfer chamber 115 , and a plurality of processing chambers, including a first processing chamber 120 and a second processing chamber 130 . The system may include a workpiece handling robot 150 for transferring workpieces into and out of the workpiece column 110 in the load lock chamber and the first process chamber 120 and the second process chamber 130, and/or between the first process chamber 120 and the second process chamber 130 transfer between. In addition, similar to the processing system 400 of FIG. 4 , the processing system 1100 of FIG. 11 may include a third processing chamber 170 and a fourth processing chamber 180 . The process chambers 170 and 180 may be arranged similar to FIGS. 4 and/or 10 . For example, a single workpiece handling robot 150 may move to access process chambers 120 , 130 and 170 , 180 as described with respect to FIG. 10 . Additionally and/or alternatively, a second workpiece handling robot and/or transfer location may be used to access the processing chambers 170 , 180 , as described with respect to FIG. 4 .

如圖11中所示,加工室130的深度1110可以不同於加工室1080的深度1120。例如,在一些情況下,加工室的不同類型、容量等可能使得加工室具有不同的深度。可能期望加工室為工件處理機器人150提供一致的介面,使得工件處理機器人150可以在每個加工室處類似和/或相同地操作。因而,根據本公開的示例實施例,加工室130和加工室1080可以沿著直線邊緣181對齊。如圖所示,這使得加工室180的深度比加工室130延伸得更遠。然而,這規定狹縫門133、135和183、185沿著直線側181對齊。因而,工件處理機器人150可以觸及沿著直線側181對齊的狹縫門133、135和183、185。As shown in FIG. 11 , the depth 1110 of the processing chamber 130 may be different than the depth 1120 of the processing chamber 1080 . For example, in some cases, different types, capacities, etc. of process chambers may result in process chambers having different depths. It may be desirable for the process chambers to provide a consistent interface to the workpiece handling robot 150 so that the workpiece handling robot 150 may operate similarly and/or identically at each process chamber. Thus, according to example embodiments of the present disclosure, the processing chamber 130 and the processing chamber 1080 may be aligned along the straight edge 181 . As shown, this allows the processing chamber 180 to extend further in depth than the processing chamber 130 . However, this provides that the slot doors 133 , 135 and 183 , 185 are aligned along the straight side 181 . Thus, the workpiece handling robot 150 can access the slot doors 133 , 135 and 183 , 185 aligned along the straight side 181 .

圖12A和圖12B示出了根據本公開的示例實施例的示例對齊的狹縫門。例如,圖12A示出了第一加工室1210和第二加工室1220的前輪廓圖。圖12A示出了第一加工室1210的狹縫門1212和第二加工室1220的狹縫門1222可以垂直地對齊。為了說明,加工室1210和1220被示出為具有一個狹縫門。應理解,根據本公開的示例實施態樣,本文所述的加工室可以具有任何合適數量的狹縫門,諸如兩個狹縫門。12A and 12B illustrate example aligned slit doors according to example embodiments of the present disclosure. For example, FIG. 12A shows a front profile view of a first processing chamber 1210 and a second processing chamber 1220 . FIG. 12A shows that the slot door 1212 of the first processing chamber 1210 and the slot door 1222 of the second processing chamber 1220 may be vertically aligned. For illustration, process chambers 1210 and 1220 are shown with one slit door. It should be understood that the process chambers described herein may have any suitable number of slit doors, such as two slit doors, according to example embodiments of the present disclosure.

如圖12A中所示,狹縫門1212上的點與加工室1210、1220的底部之間的縱向偏移1215可以與狹縫門1222上的相似點與底部之間的縱向偏移1225相同或約相同(例如,在約10%內)。圖12A將該點示出為狹縫門1212、1222的底部。應理解,任何合適的點都可以用作比較,諸如中心、頂部等。As shown in FIG. 12A , the longitudinal offset 1215 between a point on the slot door 1212 and the bottom of the processing chambers 1210, 1220 may be the same as or the longitudinal offset 1225 between a similar point on the slot door 1222 and the bottom. About the same (eg, within about 10%). FIG. 12A shows this point as the bottom of the slot doors 1212,1222. It should be understood that any suitable point can be used for comparison, such as center, top, etc.

另外,圖12B示出了第一加工室1210和第二加工室1220的頂輪廓圖。圖12B示出了狹縫門1212和1222可以橫向對齊,諸如沿著直線側1235對齊。例如,狹縫門1212和1222之間的橫向偏移可以約為零,使得由直線側1235限定的平面包含狹縫門1212和1222。如圖12B中所示,第一加工室1210具有比第二加工室1220更大的深度。以這種方式,第一加工室1210和第二加工室1220的前側可以對齊為直線側1235,而每個加工室1210、1220的背側可能不對齊。In addition, FIG. 12B shows a top profile view of the first processing chamber 1210 and the second processing chamber 1220 . FIG. 12B shows that slot doors 1212 and 1222 may be aligned laterally, such as along straight side 1235 . For example, the lateral offset between slot doors 1212 and 1222 may be approximately zero such that the plane defined by straight side 1235 contains slot doors 1212 and 1222 . As shown in FIG. 12B , the first processing chamber 1210 has a greater depth than the second processing chamber 1220 . In this manner, the front sides of the first process chamber 1210 and the second process chamber 1220 may be aligned as the straight side 1235, while the back sides of each process chamber 1210, 1220 may not be aligned.

圖13示出了根據本公開的示例實施例的示例加工系統1300的平面圖。與圖1的加工系統100類似,圖13的加工系統1300可以包括前端部112,其被配置成從一個或多個工件輸入設備118接合和/或接收工件。如圖13的加工系統1300中所示,前端部112可以被放置成與工件輸入設備118和一個或多個加工室和/或加工站1306處於直接工件連通中,諸如第一加工室1302和/或第二加工室1304(例如,不需要負載鎖定室和/或傳送室)。例如,工件處理機器人150可以被沿著軌道1305導航,以在加工站1306和/或工件輸入設備118之間傳送工件。FIG. 13 shows a plan view of an example machining system 1300 according to an example embodiment of the present disclosure. Similar to machining system 100 of FIG. 1 , machining system 1300 of FIG. 13 may include a front end 112 configured to engage and/or receive a workpiece from one or more workpiece input devices 118 . As shown in machining system 1300 of FIG. 13 , front end 112 may be placed in direct workpiece communication with workpiece input device 118 and one or more machining chambers and/or machining stations 1306, such as first machining chamber 1302 and/or or second process chamber 1304 (eg, no load lock and/or transfer chamber required). For example, workpiece handling robot 150 may be navigated along track 1305 to transfer workpieces between processing stations 1306 and/or workpiece input device 118 .

如圖13中所示,加工室(例如,1302和/或1304)可以具有任何合適數量的加工站1306。例如,第一加工室1302可以具有兩個加工站1306並且第二加工室1304可以僅具有一個加工站1306。每個加工站1306可以具有相關聯的狹縫門1308。當在加工站1306中加工工件時,可以密封加工室的狹縫門1308以允許加工室和前端部112之間的條件差異。例如,前端部112可以保持在大氣條件(例如,壓力、溫度)下,而執行加工的加工室(例如,1302、1304)內部的壓力可以被從大氣條件(例如,調節到製程壓力和/或溫度)調節。As shown in FIG. 13 , processing chambers (eg, 1302 and/or 1304 ) may have any suitable number of processing stations 1306 . For example, the first processing chamber 1302 may have two processing stations 1306 and the second processing chamber 1304 may have only one processing station 1306 . Each processing station 1306 may have an associated slot door 1308 . When a workpiece is being machined in machining station 1306 , slot door 1308 of the machining chamber may be sealed to allow for differences in conditions between the machining chamber and front end 112 . For example, the front end 112 can be maintained at atmospheric conditions (eg, pressure, temperature), while the pressure inside the process chambers (eg, 1302, 1304) where processing is performed can be adjusted from atmospheric conditions (eg, to process pressure and/or Temperature adjustment.

圖14示出了根據本公開的示例實施例的示例加工系統1400的平面圖。與圖10的加工系統1000類似,圖14的加工系統1400可以包括前端部112、傳送室115以及多個加工室,包括第一加工室120、第二加工室130、第三加工室170以及第四加工室180。如圖14中所示,傳送室115和前端部112可以是相同的室(例如,共用一個或多個壁、共用環境條件等)。(例如,單個)工件傳送機器人150可以被配置成在工件輸入設備118和加工室(例如,120、130、170、180)之間傳送工件。例如,工件傳送機器人150可以被沿著軌道1452導航,以將工件傳送進出加工室(例如,120、130、170、180)和/或從工件輸入設備118傳送。當在加工站(例如,122、124)中加工工件時,加工室(例如,120)的狹縫門(例如,123、125)可以被密封以允許加工室(例如,120)與前端部112和/或傳送室115之間的條件差異。例如,前端部112和/或傳送室115可以保持在大氣條件(例如,壓力、溫度)下,而執行加工的加工室(例如,120)內部的壓力可以從大氣條件(例如,製程壓力和/或溫度)調節。FIG. 14 shows a plan view of an example machining system 1400 according to an example embodiment of the present disclosure. Similar to the processing system 1000 of FIG. 10 , the processing system 1400 of FIG. 14 may include a front end 112, a transfer chamber 115, and a plurality of processing chambers, including a first processing chamber 120, a second processing chamber 130, a third processing chamber 170, and a first processing chamber. Four processing rooms 180. As shown in FIG. 14, the transfer chamber 115 and the front end 112 may be the same chamber (eg, share one or more walls, share environmental conditions, etc.). The (eg, single) workpiece transfer robot 150 may be configured to transfer workpieces between the workpiece input device 118 and the processing chambers (eg, 120 , 130 , 170 , 180 ). For example, workpiece transfer robot 150 may be navigated along track 1452 to transfer workpieces into and out of process chambers (eg, 120 , 130 , 170 , 180 ) and/or from workpiece input device 118 . When machining a workpiece in a machining station (eg, 122, 124), the slit doors (eg, 123, 125) of the machining chamber (eg, 120) may be sealed to allow the machining chamber (eg, 120) to communicate with the front end 112 and/or conditional differences between transfer chambers 115 . For example, the front end 112 and/or the transfer chamber 115 can be maintained at atmospheric conditions (e.g., pressure, temperature), while the pressure inside the process chamber (e.g., 120) where processing is performed can be changed from atmospheric conditions (e.g., process pressure and/or or temperature) regulation.

圖15示出了根據本公開的示例實施例的示例加工系統1500的平面圖。與圖1的加工系統100類似,圖15的加工系統1500可以包括前端部112、負載鎖定室114、傳送室115以及多個加工室,包括第一加工室120和第二加工室130。系統可以包括工件處理機器人150,用於將工件傳送進出負載鎖定室中的工件柱110以及第一加工室120和第二加工室130,和/或在第一加工室120和第二加工室130之間傳送。工件處理機器人150可以是本文所述的任何合適的工件處理機器人,諸如包括一個機器人、兩個機器人、負載鎖定室、無負載鎖定室等的工件處理機器人系統。如圖15中所示,本文所述的加工室可以包括任何合適數量的加工站和/或狹縫門。例如,雖然加工室120和130各自包括兩個加工站和對應的狹縫門,但是加工系統1500可以另外包括加工室1570和加工室1580,每個加工室具有單個加工站1572、1582和相關聯的狹縫門1573、1583。如圖15中所示,加工室1570和1580可以被佈置成橫跨傳送室115彼此橫跨。然而,根據本公開的示例實施態樣,可以採用任何合適的加工室佈置。FIG. 15 shows a plan view of an example machining system 1500 according to an example embodiment of the present disclosure. Similar to processing system 100 of FIG. 1 , processing system 1500 of FIG. 15 may include a front end 112 , a load lock chamber 114 , a transfer chamber 115 , and a plurality of processing chambers, including a first processing chamber 120 and a second processing chamber 130 . The system may include a workpiece handling robot 150 for transferring workpieces into and out of the workpiece column 110 in the load lock chamber and the first process chamber 120 and the second process chamber 130, and/or between the first process chamber 120 and the second process chamber 130 transfer between. Workpiece handling robot 150 may be any suitable workpiece handling robot described herein, such as a workpiece handling robot system including one robot, two robots, load lock chamber, no load lock chamber, or the like. As shown in FIG. 15, the processing chambers described herein may include any suitable number of processing stations and/or slot doors. For example, while processing chambers 120 and 130 each include two processing stations and corresponding slot doors, processing system 1500 may additionally include processing chamber 1570 and processing chamber 1580, each having a single processing station 1572, 1582 and associated The slit doors of 1573, 1583. As shown in FIG. 15 , process chambers 1570 and 1580 may be arranged to straddle each other across transfer chamber 115 . However, any suitable process chamber arrangement may be employed in accordance with example implementation aspects of the present disclosure.

圖16示出了根據本公開的示例實施例的示例加工系統1600的平面圖。與圖1的加工系統100類似,圖16的加工系統1600可以包括前端部112、負載鎖定室114、傳送室115以及多個加工室,包括第一加工室120和第二加工室170。系統可以包括工件處理機器人150,用於將工件傳送進出負載鎖定室中的工件柱110以及第一加工室120和第二加工室170,和/或在第一加工室120和第二加工室170之間傳送。工件處理機器人150可以是本文所述的任何合適的工件處理機器人,諸如包括一個機器人、兩個機器人、負載鎖定室、無負載鎖定室等的工件處理機器人系統。如圖16中所示,本文所述的加工室可以包括任何合適數量的加工站和/或狹縫門。例如,雖然加工室120和130各自包括兩個加工站和對應的狹縫門,但是加工系統1600可以另外包括加工室1670、加工室1680以及加工室1690,每個加工室具有單個加工站1672、1682、1692以及相關聯的狹縫門1673、1683、1693。如圖16中所示,具有單個加工站(例如,1670、1680和1690)的加工室可以被設置在與具有兩個加工站(例如,120、170)的加工室的傳送室115的相對側上。然而,根據本公開的示例實施態樣,可以採用任何合適的加工室佈置。FIG. 16 shows a plan view of an example machining system 1600 according to an example embodiment of the present disclosure. Similar to processing system 100 of FIG. 1 , processing system 1600 of FIG. 16 may include front end 112 , load lock chamber 114 , transfer chamber 115 , and a plurality of processing chambers, including first processing chamber 120 and second processing chamber 170 . The system may include a workpiece handling robot 150 for transferring workpieces into and out of the workpiece column 110 in the load lock chamber and the first process chamber 120 and the second process chamber 170, and/or between the first process chamber 120 and the second process chamber 170 transfer between. Workpiece handling robot 150 may be any suitable workpiece handling robot described herein, such as a workpiece handling robot system including one robot, two robots, load lock chamber, no load lock chamber, or the like. As shown in FIG. 16, the processing chambers described herein may include any suitable number of processing stations and/or slot doors. For example, while processing chambers 120 and 130 each include two processing stations and corresponding slot doors, processing system 1600 may additionally include processing chamber 1670, processing chamber 1680, and processing chamber 1690, each having a single processing station 1672, 1682, 1692 and associated slot doors 1673, 1683, 1693. As shown in FIG. 16 , process chambers with a single process station (eg, 1670 , 1680 , and 1690 ) can be positioned on opposite sides of transfer chamber 115 from process chambers with two process stations (eg, 120 , 170 ). superior. However, any suitable process chamber arrangement may be employed in accordance with example implementation aspects of the present disclosure.

為了說明和討論的目的,提供了用於在加工系統中傳送工件的工件處理機器人的上述操作示例。本領域普通技術人員使用本文提供的公開內容應理解,在不偏離本公開內容的範圍的情況下,可以使用許多不同的操作工件處理機器人的模式。The above-described operational example of a workpiece handling robot for transferring workpieces in a machining system is provided for purposes of illustration and discussion. Those of ordinary skill in the art using the disclosure provided herein will appreciate that many different modes of operating a workpiece handling robot may be used without departing from the scope of the present disclosure.

雖然已經關於其特定示例實施例詳細地描述了本主題,但是應明白,本領域普通技術人員在獲得對前述內容的理解後,可以容易地產生對這些實施例的改變、變化和等效物。因而,本公開的範圍是示例性的而不是限制性的,並且本公開不排除包括對本主題的這些修改、變化和/或添加,這些修改、變化和/或添加對於本領域普通技術人員而言是顯而易見的。 [相關申請的援引加入] While the subject matter has been described in detail with respect to specific example embodiments thereof, it should be appreciated that alterations, variations, and equivalents of these embodiments can readily be produced by those of ordinary skill in the art having gained an understanding of the foregoing. Accordingly, the scope of the present disclosure is illustrative rather than restrictive, and the present disclosure does not exclude the inclusion of such modifications, changes and/or additions to the subject matter as would be apparent to those of ordinary skill in the art It is obvious. [Incorporation by reference of related applications]

本申請是2020年2月5日提交的名稱為“用於工件加工的系統和方法”的第16/782,110號美國專利申請的部分連續申請,後者是2017年10月6日提交的名稱為“用於工件加工的系統和方法”的第15/726,437號美國專利申請的連續申請,後者要求2016年10月18日提交的名稱為“用於工件加工的系統”的第62/409,538號美國臨時申請的權益。申請人要求每個這些申請的優先權和權益,並將所有這些申請通過引用併入本文。This application is a continuation-in-part of U.S. Patent Application Serial No. 16/782,110, filed February 5, 2020, entitled "System and Method for Workpiece Machining," which was filed October 6, 2017, and entitled " Continuation of U.S. Patent Application No. 15/726,437, "System and Method for Workpiece Machining," which claims U.S. Provisional Serial No. 62/409,538, filed October 18, 2016, entitled "System for Workpiece Machining" Apply for benefits. Applicant claims priority and benefit of each of these applications and incorporates all of these applications herein by reference.

100、200、900、1000:加工系統 1100、1300、1400、1500、1600:加工系統 102:寬度、方向 104:長度、方向 110:工件柱 111:擱板 112:前端部 113:工件 114:負載鎖定室 115:傳送室 118:工件輸入設備 120:加工室 122:加工站 123:狹縫門 124:加工站 125:狹縫門 130:加工室 132:加工站 133:狹縫門 134:加工站 135:狹縫門 150:工件處理機器人 152、154:主機器人臂 156、158:工件刀片 160:工件柱 161:擱板 162:傳送位置 163:工件 170:加工室 171:直線側 172:加工站 174:加工站 180:加工室 181:直線側 182:加工站 183:狹縫門 184:加工站 185:狹縫門 190:工件處理機器人 252:主機器人臂 253、254:輔助機器人臂、輔助臂 255、256:工件刀片 260:剪刀運動 302:將工件傳送到負載鎖定室中的工件柱 304:將工件從工件柱傳送到第一加工室 306:在第一加工室內執行第一處理製程 308:將工件傳送到第二加工室 310:在第二加工室內執行第二處理製程 312:將工件傳送到負載鎖定室中的工件柱 402:將工件傳送到負載鎖定室中的工件柱 404:將工件從工件柱傳送到第一加工室 406:在第一加工室內執行第一處理製程 408:將工件傳送到傳送位置 410:將工件傳送到第三加工室 412:在第三加工室內執行第三處理製程 412:將工件傳送到第四加工室 414:在第四加工室內執行第四處理製程 416:將工件傳送到傳送位置 418:將工件傳送到第二加工室 420:在第二加工室內執行第二處理製程 422:將工件傳送到負載鎖定室中的工件柱 950:後加工室 952:加工站 953:狹縫門 1080:加工室 1210:加工室 1212:狹縫門 1215:縱向偏移 1220:加工室 1222:狹縫門 1225:縱向偏移 1235:直線側 1302:加工室 1304:加工室 1305:軌道 1306:加工站 1308:狹縫門 1570:加工室 1580:加工室 1572、1582:加工站 1573、1583:狹縫門 1670:加工室 1680:加工室 1690:加工室 1672、1682、1692:加工站 1673、1683、1693:狹縫門 100, 200, 900, 1000: processing system 1100, 1300, 1400, 1500, 1600: processing system 102: width, direction 104: length, direction 110: workpiece column 111: shelf 112: front end 113: Workpiece 114: Load lock chamber 115: Teleportation Room 118: Workpiece input device 120: processing room 122: Processing station 123: Slit door 124: Processing station 125: Slit door 130: processing room 132: Processing station 133: Slit door 134: processing station 135: Slit door 150:Workpiece handling robot 152, 154: main robot arm 156, 158: workpiece blade 160: workpiece column 161: shelf 162: Teleport location 163: Workpiece 170: processing room 171: straight side 172: Processing station 174: Processing station 180: processing room 181: straight side 182: Processing station 183: Slit door 184: processing station 185: Slit door 190:Workpiece handling robot 252: Main robot arm 253, 254: auxiliary robot arm, auxiliary arm 255, 256: workpiece blade 260: scissors movement 302: Transferring the workpiece to the workpiece column in the load lock chamber 304: Transferring the workpiece from the workpiece column to the first processing chamber 306: Execute the first treatment process in the first processing chamber 308: Transfer the workpiece to the second processing chamber 310: Execute the second treatment process in the second processing chamber 312: Transfer the workpiece to the workpiece column in the load lock chamber 402: Transfer the workpiece to the workpiece column in the load lock chamber 404: Transferring the workpiece from the workpiece column to the first processing chamber 406: Execute the first treatment process in the first processing chamber 408: Send the workpiece to the transfer position 410: Transfer the workpiece to the third processing chamber 412: Execute the third processing process in the third processing chamber 412: Transfer the workpiece to the fourth processing chamber 414: Execute the fourth treatment process in the fourth processing chamber 416: Send the workpiece to the transfer position 418: Transfer the workpiece to the second processing chamber 420: Execute the second treatment process in the second processing chamber 422: Transfer the workpiece to the workpiece column in the load lock chamber 950: post-processing room 952: processing station 953: Slit door 1080: processing room 1210: processing room 1212: Slit door 1215: Longitudinal offset 1220: processing room 1222: Slit door 1225: vertical offset 1235: straight side 1302: processing room 1304: processing room 1305: track 1306: processing station 1308: Slit door 1570: processing room 1580: processing room 1572, 1582: processing station 1573, 1583: Slit doors 1670: processing room 1680: processing room 1690: processing room 1672, 1682, 1692: processing stations 1673, 1683, 1693: Slit doors

在參考附圖的說明書中闡述了針對本領域普通技術人員的實施例的詳細討論,其中:A detailed discussion of embodiments for those of ordinary skill in the art is set forth in the specification with reference to the accompanying drawings, in which:

圖1示出了根據本公開的示例實施例的示例加工系統的平面圖;FIG. 1 illustrates a plan view of an example machining system according to an example embodiment of the present disclosure;

圖2示出了根據本公開的示例實施例的示例工件柱;FIG. 2 illustrates an example workpiece column according to an example embodiment of the present disclosure;

圖3示出了根據本公開的示例實施例的示例加工方法的流程圖;FIG. 3 shows a flowchart of an example processing method according to an example embodiment of the present disclosure;

圖4示出了根據本公開的示例實施例的示例加工系統的平面圖;Figure 4 illustrates a plan view of an example machining system according to an example embodiment of the present disclosure;

圖5示出了根據本公開的示例實施例的示例傳送位置;FIG. 5 illustrates example transfer locations according to an example embodiment of the present disclosure;

圖6A和圖6B示出了根據本公開的示例實施例的示例加工方法的流程圖;6A and 6B show a flowchart of an example processing method according to an example embodiment of the present disclosure;

圖7A、圖7B、圖7C和圖7D示出了根據本公開的示例實施例的加工系統中的示例工件傳送;7A, 7B, 7C, and 7D illustrate example workpiece transfers in a machining system according to example embodiments of the present disclosure;

圖8A和圖8B示出了根據本公開的示例實施例的示例工件處理機器人,其使用剪刀運動將多個工件從工件柱傳送到加工室中的至少兩個加工站;8A and 8B illustrate an example workpiece handling robot that uses a scissor motion to transfer a plurality of workpieces from a workpiece column to at least two processing stations in a processing chamber, according to an example embodiment of the present disclosure;

圖9示出了根據本公開的示例實施例的示例加工系統的平面圖;Figure 9 illustrates a plan view of an example machining system according to an example embodiment of the present disclosure;

圖10示出了根據本公開的示例實施例的示例加工系統的平面圖;Figure 10 shows a plan view of an example machining system according to an example embodiment of the present disclosure;

圖11示出了根據本公開的示例實施例的示例加工系統的平面圖;Figure 11 shows a plan view of an example machining system according to an example embodiment of the present disclosure;

圖12A和圖12B示出了根據本公開的示例實施例的示例對齊的狹縫門;12A and 12B illustrate example aligned slit doors according to example embodiments of the present disclosure;

圖13示出了根據本公開的示例實施例的示例加工系統的平面圖;Figure 13 illustrates a plan view of an example machining system according to an example embodiment of the present disclosure;

圖14示出了根據本公開的示例實施例的示例加工系統的平面圖;Figure 14 shows a plan view of an example machining system according to an example embodiment of the present disclosure;

圖15示出了根據本公開的示例實施例的示例加工系統的平面圖;以及Figure 15 shows a plan view of an example machining system according to an example embodiment of the present disclosure; and

圖16示出了根據本公開的示例實施例的示例加工系統的平面圖。FIG. 16 shows a plan view of an example machining system according to an example embodiment of the present disclosure.

100:加工系統 100: Processing system

102:寬度、方向 102: width, direction

104:長度、方向 104: length, direction

110:工件柱 110: workpiece column

112:前端部 112: front end

114:負載鎖定室 114: Load lock chamber

115:傳送室 115: Teleportation Room

118:工件輸入設備 118: Workpiece input device

120:加工室 120: processing room

122:加工站 122: Processing station

123:狹縫門 123: Slit door

124:加工站 124: Processing station

125:狹縫門 125: Slit door

130:加工室 130: processing room

132:加工站 132: Processing station

133:狹縫門 133: Slit door

134:加工站 134: processing station

135:狹縫門 135: Slit door

150:工件處理機器人 150:Workpiece handling robot

Claims (20)

一種用於加工多個工件的加工系統,所述加工系統包括: 一傳送室,與一第一加工室和一第二加工室處於製程連通中,且所述傳送室具有一第一直線側; 其中,所述第一加工室包括至少一個第一加工站,並且其中,所述第一加工室沿所述第一直線側設置; 其中,所述第二加工室包括至少兩個第二加工站,其中,所述第二加工室沿所述第一直線側設置,並且其中,所述第二加工室設置成沿所述第一直線側與所述第一加工室呈線性佈置;並且 其中,所述傳送室包括至少一個工件處理機器人,所述至少一個工件處理機器人被配置為將至少一個工件傳送到所述至少一個第一加工站和所述至少兩個第二加工站。 A machining system for machining a plurality of workpieces, the machining system comprising: a transfer chamber in process communication with a first process chamber and a second process chamber, and the transfer chamber has a first linear side; wherein said first processing chamber comprises at least one first processing station, and wherein said first processing chamber is arranged along said first straight line side; Wherein, the second processing chamber includes at least two second processing stations, wherein the second processing chamber is arranged along the first straight line side, and wherein the second processing chamber is arranged along the first straight line side arranged linearly with said first processing chamber; and Wherein the transfer chamber comprises at least one workpiece handling robot configured to transfer at least one workpiece to the at least one first processing station and the at least two second processing stations. 根據請求項1所述的加工系統,其中,所述第一加工室包括沿所述第一直線側設置的至少一個第一狹縫門,且所述第二加工室包括沿所述第一直線側設置的至少一個第二狹縫門,並且其中,所述至少一個第一狹縫門沿所述第一直線側與所述至少一個第二狹縫門橫向對齊。The processing system according to claim 1, wherein the first processing chamber includes at least one first slit door arranged along the first straight line side, and the second processing chamber includes at least one first slit door arranged along the first straight line side and wherein the at least one first slit door is laterally aligned with the at least one second slit door along the first linear side. 根據請求項2所述的加工系統,其中,所述至少一個第一狹縫門的縱向中心與所述至少一個第二狹縫門的縱向中心之間的縱向偏移約為零。The processing system of claim 2, wherein the longitudinal offset between the longitudinal center of the at least one first slit door and the longitudinal center of the at least one second slit door is about zero. 根據請求項1所述的加工系統,還包括與所述傳送室處於製程連通中的一負載鎖定室,所述負載鎖定室包括一工件柱。The processing system of claim 1, further comprising a load lock chamber in process communication with the transfer chamber, the load lock chamber including a workpiece column. 根據請求項4所述的加工系統,其中,所述負載鎖定室設置在所述傳送室的垂直於所述第一直線側的一側上。The processing system according to claim 4, wherein the load lock chamber is disposed on a side of the transfer chamber perpendicular to the first straight line side. 根據請求項1所述的加工系統,其中,所述第一加工室包括至少兩個加工站。The processing system of claim 1, wherein the first processing chamber includes at least two processing stations. 根據請求項1所述的加工系統,其中,所述第一加工室、所述第二加工室以及所述傳送室處於無真空中斷的製程連通中。The processing system of claim 1, wherein the first process chamber, the second process chamber, and the transfer chamber are in process communication without vacuum interruption. 根據請求項1所述的加工系統,還包括在所述第一加工室和所述第二加工室之間的一傳送位置,其中,所述傳送位置包括至少一個工件柱,並且其中,所述傳送位置位於所述傳送室內。The machining system of claim 1, further comprising a transfer location between said first processing chamber and said second processing chamber, wherein said transfer location includes at least one workpiece column, and wherein said A transfer location is located within the transfer chamber. 根據請求項1所述的加工系統,還包括具有至少一個加工站的一第三加工室和具有至少一個加工站的一第四加工室,所述第三加工室和所述第四加工室設置在所述傳送室的一第三直線側上,所述第三直線側設置成與所述傳送室的所述第一直線側相對。The processing system according to claim 1, further comprising a third processing chamber having at least one processing station and a fourth processing chamber having at least one processing station, the third processing chamber and the fourth processing chamber are arranged On a third linear side of the transfer chamber, the third linear side is disposed opposite to the first linear side of the transfer chamber. 根據請求項9所述的加工系統,其中,所述第三加工室或所述第四加工室中的至少一個包括至少兩個加工站。The processing system of claim 9, wherein at least one of the third processing chamber or the fourth processing chamber includes at least two processing stations. 根據請求項1所述的加工系統,還包括一前端部,其中,所述前端部與所述傳送室處於製程連通中。The processing system of claim 1, further comprising a front end, wherein the front end is in process communication with the transfer chamber. 一種用於加工多個工件的加工系統,所述加工系統包括: 一第一加工室,具有兩個加工站; 一第二加工室,具有兩個加工站; 一第三加工室,具有一個加工站;以及 一傳送室,與所述第一加工室、所述第二加工室以及所述第三加工室處於製程連通中; 其中,所述第一加工室設置在所述傳送室的一第一側上; 其中,所述第二加工室設置在所述傳送室的一第二側上,所述傳送室的所述第二側與所述傳送室的所述第一側相對; 其中,所述第三加工室設置在所述傳送室的一第三側上,所述傳送室的所述第三側垂直於所述傳送室的所述第一側和所述第二側。 A machining system for machining a plurality of workpieces, the machining system comprising: a first processing room with two processing stations; a second processing room with two processing stations; a third processing chamber having a processing station; and a transfer chamber in process communication with the first process chamber, the second process chamber, and the third process chamber; wherein the first processing chamber is disposed on a first side of the transfer chamber; wherein the second processing chamber is disposed on a second side of the transfer chamber, the second side of the transfer chamber being opposite to the first side of the transfer chamber; Wherein, the third processing chamber is disposed on a third side of the transfer chamber, and the third side of the transfer chamber is perpendicular to the first side and the second side of the transfer chamber. 根據請求項12所述的加工系統,還包括設置在所述傳送室的一第四側上的一負載鎖定室,其中,所述傳送室的所述第四側與所述傳送室的所述第三側相對。The processing system of claim 12, further comprising a load lock chamber disposed on a fourth side of the transfer chamber, wherein the fourth side of the transfer chamber is connected to the The third side is opposite. 根據請求項12所述的加工系統,其中,所述傳送室包括至少一個工件處理機器人,所述至少一個工件處理機器人被配置為將至少一個工件傳送到所述第一加工室、所述第二加工室以及所述第三加工室的所述加工站。The processing system of claim 12, wherein said transfer chamber includes at least one workpiece handling robot configured to transfer at least one workpiece to said first processing chamber, said second processing chamber and said processing station of said third processing chamber. 根據請求項12所述的加工系統,還包括一前端部,其中,所述前端部與所述傳送室處於製程連通中。The processing system of claim 12, further comprising a front end, wherein the front end is in process communication with the transfer chamber. 一種用於加工多個工件的加工系統,所述加工系統包括: 一第一加工室,具有至少一個加工站; 一第二加工室,具有至少兩個加工站;以及 一前端部,與所述第一加工室和所述第二加工室處於製程連通中; 其中,所述第一加工室和所述第二加工室設置在所述前端部的一第一直線側上。 A machining system for machining a plurality of workpieces, the machining system comprising: a first processing chamber having at least one processing station; a second processing chamber having at least two processing stations; and a front end in process communication with the first process chamber and the second process chamber; Wherein, the first processing chamber and the second processing chamber are arranged on a first linear side of the front end. 根據請求項16所述的加工系統,其中,所述前端部包括至少一個工件處理機器人,所述至少一個工件處理機器人被配置為將至少一個工件傳送到所述第一加工室和所述第二加工室的所述加工站。The machining system of claim 16, wherein said front end includes at least one workpiece handling robot configured to transfer at least one workpiece to said first machining chamber and said second machining chamber. The processing station of the processing chamber. 根據請求項17所述的加工系統,其中,所述至少一個工件處理機器人在所述前端部內沿一水平方向線性移動,所述水平方向平行於所述前端部的所述第一直線側。The machining system according to claim 17, wherein said at least one workpiece handling robot moves linearly within said front end in a horizontal direction parallel to said first straight side of said front end. 根據請求項17所述的加工系統,其中,所述至少一個工件處理機器人在所述傳送室內沿一豎直方向線性移動,所述豎直方向垂直於所述前端部的所述第一直線側。The processing system according to claim 17, wherein said at least one workpiece handling robot linearly moves within said transfer chamber along a vertical direction perpendicular to said first linear side of said front end portion. 根據請求項17所述的加工系統,其中,所述前端部被配置為接合一個或多個工件輸入設備,其中,所述一個或多個工件輸入設備沿所述前端部的一第二直線側設置,所述第二直線側平行於所述第一直線側,並且其中,所述至少一個工件處理機器人被配置為在所述一個或多個工件輸入設備與所述第一加工室和所述第二加工室的所述加工站之間傳送所述至少一個工件。The machining system of claim 17, wherein the front end is configured to engage one or more workpiece input devices, wherein the one or more workpiece input devices are along a second linear side of the front end provided that the second linear side is parallel to the first linear side, and wherein the at least one workpiece handling robot is configured to operate between the one or more workpiece input devices and the first processing chamber and the first processing chamber. The at least one workpiece is transferred between the processing stations of the two processing chambers.
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