TW202028729A - Image inspection device - Google Patents

Abstract

In the present invention, an illumination camera unit having first to third lamps and a line sensor camera is moved by an articulated robot. An image inspection unit, for example, combines captured images of wavelength ranges A and B, combines captured images of wavelength ranges A to C, and combines captured images of wavelength ranges C to F. Thereafter, the image inspection unit performs image inspections of a plurality of captured images having been generated as described above. On the basis of the captured images of different wavelength ranges, the image inspection unit individually performs image inspections of the respective captured images. When it is determined that there is a defect in one of the captured images, the image inspection unit determines that there is a defect in the inspection target and causes a display unit, for example, to perform display accordingly.

Description

Image inspection device

The present invention relates to an image inspection device for inspecting objects for defects based on images.

In the past, an image inspection device was developed to inspect objects for defects based on image inspection. This type of image inspection apparatus discloses a technique for inspecting a substrate to be inspected by moving a measuring head including a UV irradiator 204a and a camera 204b. (Prior technical literature) (Patent Document)

[Patent Document 1] JP 2016-038346 A

(The problem to be solved by the invention)

It is also considered to use a lamp emitting visible light or the like instead of the UV irradiator 204a described in Patent Document 1 to inspect defects of inspection objects other than the substrate having an organic EL layer, but the inspection accuracy for defects may be poor.

The object of the present invention is to provide an image inspection device with high accuracy for checking whether there are defects. (Means to solve the problem)

In order to achieve the above objective, the image inspection device of the present invention inspects the inspection object for defects, and has: A multi-spectral camera, which photographs the inspection object; and The image inspection section performs image inspections for inspecting the defects of the plurality of images with different wavelength bands obtained by shooting the inspection object by the multispectral camera. (Effects of Invention)

When the present invention is adopted, it is possible to provide an image inspection device with high accuracy for checking whether there are defects.

(Configuration of image inspection apparatus 100 according to an embodiment of the present invention)

The image inspection apparatus 100 according to an embodiment of the present invention has the structure shown in the first figure, and inspects the inspection object S (the second figure, etc.) for defects. The inspection object S here is used for the color filter substrate of the liquid crystal display panel. The image inspection device 100 is used in the manufacturing process of the color filter substrate, and inspects for defects in the manufacturing process.

Here, before describing the image inspection apparatus 100 in detail, the manufacturing process of the color filter substrate and the defects that may occur will be briefly described.

The manufacturing process of the color filter substrate firstly supports the glass substrate from the back side by a plurality of pins erected in the vertical direction, and then forms a black matrix layer on the surface of the glass substrate. Then a color filter layer is formed. Then a protective film is formed. The protective film is formed by coating the protective film material with a dispenser, etc., flattening it with a squeegee, and then drying the stretched material. After the protective film is formed, clean the protective film with a cleaning fluid (water or oil, etc.). After cleaning, use air to blow away the cleaning fluid remaining on the protective film. This completes the color filter substrate.

In the above-mentioned manufacturing process, since the glass substrate is supported by a plurality of stitches, at least one of the portions of the glass substrate supported by the plurality of stitches is bent due to the weight of the glass substrate. Specifically, this part will be bent upward by the stitches. When a protective film is formed on such a curved portion, the film thickness of the protective film provided on the curved portion will be thinner than the surrounding normal portion. Such a thin part is an abnormality in film thickness and is regarded as a defect.

In the above-mentioned manufacturing process, when there are notches or foreign objects at the tip of the squeegee, striped defects (concave portions or convex portions extending in a specified direction) are generated on the protective film due to these. Although the material of the protective film can also be coated by an inkjet printer, streak-like defects will still occur on the protective film due to the clogging of the nozzle opening of the inkjet head.

In the above-mentioned manufacturing process, when the cleaning liquid is blown away with air after cleaning the protective film, a part of it will remain. The remaining cleaning fluid is also regarded as a defect. In addition, foreign matter such as dust may also adhere to and remain on the protective film and cause foreign matter defects.

In the above-mentioned manufacturing process, formation abnormalities may occur in a part of the color filter layer or the black matrix layer. This formation abnormality occurs when the color filter layer or the black matrix layer is not formed into the desired shape, for example, the width of a certain part is narrower than expected, the pattern pitch deviation of a certain part, and the pattern shape of the aforementioned certain part is broken. When a protective film is provided on the abnormal formation, the part of the protective film on the abnormal formation is different from the normal part in the protective film in refractive index, etc., and the appearance is different, so it is regarded as a defect.

The structure of the image inspection device 100 for inspecting the above-mentioned various defects is shown in the first figure: the articulated robot 110, the moving mechanism 120, the lighting camera unit 130, the control unit 140 (controller), the display unit 150, and the input unit 160.

The articulated robot 110 is a 6-axis vertical articulated robot as shown in the second figure, and can move the lighting camera unit 130 in the up-and-down direction, the left-right direction (the direction passing through the paper in the second figure), and the forward and backward directions, and also The lighting camera unit 130 can be rotated. In order to realize such movement or rotation, the articulated robot 110 includes a base 111, a rotating body 112, a first arm (lower arm) 113, a second arm (upper arm) 114, and a third arm (wrist) 115. The articulated robot 110 also has built-in multiple motors (not shown) for performing each rotation described later.

The base 111 is fixed to a sliding member 123 described later on the moving mechanism 120. The rotating body 112 is connected to the base 111, and the base 111 is rotated with the shaft R11 as a rotating shaft. The axis R11 extends in the vertical direction and passes through the center of the rotating body 112 when viewed in plan.

One end of the first arm 113 (the lower end in the second drawing) is connected to the base 111. The first arm 113 is rotatably provided to the rotating body 112 with the shaft R21 as a rotating shaft. The axis R21 penetrates the aforementioned one end of the first arm 113 and is orthogonal to the axis R11.

One end of the second arm 114 (the lower end in the second drawing) is connected to the other end of the first arm 113. The second arm 114 penetrates the aforementioned one end, and the first arm 113 is rotatably provided with an axis R22 parallel to the axis R21 as a rotation axis. The second arm 114 includes: a 2-1th arm 114A; and a 2-2th arm 114B. The 2-1 arm 114A is connected to the first arm 113. The 2-2 arm 114B is rotatably provided to the 2-1 arm 114A with the axis R12 as a rotation axis. The axis R12 extends along the direction in which the second arm 114 extends (the direction orthogonal to the axis R22), and passes through the center of the cross section of the second arm 114 in the direction orthogonal to the aforementioned extending direction.

One end of the third arm 115 (the right end in the second drawing) is connected to the other end of the second arm 114. The third arm 115 penetrates the aforementioned one end portion and uses an axis R23 orthogonal to the axis R12 as a rotation axis, and is rotatably provided to the second arm 114. The third arm 115 includes a 3-1th arm 115A and a 3-2th arm 115B. The 3-1 arm 115A is connected to the second arm 114. The 3-2 arm 115B is rotatably provided to the 3-1 arm 115A with the axis R13 as a rotation axis. The axis R13 extends along the direction in which the third arm 115 extends (the direction orthogonal to the axis R23), and passes through the center of the cross section of the third arm 115 in the direction orthogonal to the aforementioned extending direction. The lighting camera unit 130 is fixed to the 3-2 arm 115B. The lighting camera unit 130 is equipped with a line sensing camera 135 (the third figure and the fourth figure, etc.) as described later, which moves along the surface of the inspection object S supported by the support device D in an upright state, and is used to photograph the surface By.

The articulated robot 110 has the above configuration, especially the configuration of rotating the rotating body 112, the first arm 113 to the third arm 115, the 2-2 arm 114B, and the 3-2 arm 115B, etc., so that the illumination camera unit 130 can be It moves in the up and down direction, left and right direction (the direction passing through the paper in the second figure), and the front and back direction, and can rotate the shaft R13.

The moving mechanism 120 is a mechanism for moving the articulated robot 110 in the left-right direction. The moving mechanism 120 includes a base 121, a rail 122, and a sliding member 123 as shown in the second figure. The base 121 extends in the left-right direction. The rail 122 is disposed on the base 121 and extends in the left-right direction. The sliding member 123 is engaged with the rail 122 and can slide on the rail 122 in the left-right direction.

In addition to the aforementioned members, the moving mechanism 120 includes a moving device (not shown) that moves the sliding member 123 in the left-right direction. The moving device can be a device that uses a motor and a ball screw, or a device that uses a pulley, a belt, and a motor. The base 111 of the articulated robot 110 is fixed to the sliding member 123. By moving the sliding member 123 in the left-right direction, the articulated robot 110 can be moved in the left-right direction. Thereby, the moving range of the illumination camera unit 130 in the left-right direction can be expanded compared to when the position of the articulated robot 110 is not moving. Such a configuration is particularly effective when the inspection object S is elongated in the left-right direction. In addition, when the motion range of the illumination camera unit 130 in the left-right direction is wider than the inspection object S by the articulated robot 110, the moving mechanism 120 is not required.

The lighting camera unit 130 includes a base 131, a first lamp 132, a second lamp 133, a third lamp 134, and a line sensing camera 135 as shown in the first, third, and fourth drawings. In addition, in the lighting camera unit 130, one end of the 3-2th arm 115B of the articulated robot 110 is called the back end, and the opposite end is also called the front end (the third figure, the fourth figure, etc.).

The base 131 includes a fixing portion 131A, a lamp support portion 131B, and a camera support portion 131C. The fixing portion 131A extends in the front-rear direction (front-rear direction), and its rear end is fixed to the 3-2 arm 115B of the articulated robot 110. The central axis of the fixed portion 131A (also the central axis of the lighting camera unit 130) coincides with the axis R13. A lamp support portion 131B is installed at the front end of the fixing portion 131A. The lamp support portion 131B is composed of a pair of plate-shaped members 131BA, 131BB, and three plate-shaped members 131BC to 131BE. The pair of plate-shaped members 131BA and 131BB extend in the front-rear direction. The three plate-shaped members 131BC to 131BE respectively extend in a direction orthogonal to the front-to-rear direction, and are fixed to a pair of plate-shaped members 131BA and 131BB at different positions. The first lamp 132 is fixed to the plate member 131BC, the second lamp 133 is fixed to the plate member 131BD, and the third lamp 134 is fixed to the plate member 131BE. In this way, the first lamp 132 to the third lamp 134 are supported by the lamp supporting portion 131B. A camera support part 131C is fixed at the center of the fixing part 131A. The camera support portion 131C is provided with a pair of plate-shaped members, and is supported by the line-sensing camera 135 by the plate-shaped members. The first lamp 132 to the third lamp 134 and the line sensing camera 135 are firmly fixed and supported in such a way that the lighting camera unit 130 does not move and the direction does not change during the movement.

The first lamp 132, the second lamp 133, the third lamp 134, and the line sensing camera 135 are supported by the lamp support portion 131B or the camera support portion 131C at the position and direction where the optical axes L1 to L4 intersect at one point. . The first lamp 132, the second lamp 133, and the third lamp 134 have strip-shaped light-emitting surfaces 132A, 133A, or 134A, and these surfaces have length directions parallel to each other (directions orthogonal to the front-rear direction, and pass through The direction of the paper in the fourth picture). The first lamp 132, the second lamp 133, and the third lamp 134 respectively include a plurality of LEDs arranged along the aforementioned longitudinal direction, and a fluorescent tube extending along the aforementioned longitudinal direction, and are constituted (in order to ensure the emitted light For uniformity, a diffuser, light guide plate, etc. can also be used appropriately), and a strip of illuminating light extending along the aforementioned length direction is emitted from the light emitting surface 132A, 133A, or 134A to illuminate the same area of the inspection object S ( Banded area).

The first lamp 132 is supported at a position and direction where the optical axis L1 of the first lamp 132 coincides with the axis R13. The optical axis L1 is an axis that passes through the center of the light exit surface 132A of the first lamp 132 and is orthogonal to the light exit surface 132A.

The second lamp 133 is supported at a position and direction where the angle θ1 between the optical axis L2 and the optical axis L1 (axis R13) of the second lamp 133 is 20 degrees. The optical axis L2 is an axis that passes through the center of the light exit surface 133A of the second lamp 133 and is orthogonal to the light exit surface 133A.

The third lamp 134 is supported at a position and direction where the angle θ2 between the optical axis L3 and the optical axis L2 of the third lamp 134 is 50 degrees. The third lamp 134 is arranged on the opposite side of the first lamp 132 where the second lamp 133 is clamped. The optical axis L3 is an axis that passes through the center of the light exit surface 134A of the third lamp 134 and is orthogonal to the light exit surface 134A.

In this embodiment, by turning on any one of the first lamp 132 to the third lamp 134, multiple types of lighting can be implemented (details are described later).

The line-sensing camera 135 photographs the strip-shaped area illuminated by any one of the first lamp 132 to the third lamp 134 in the inspection object S, and produces a line-shaped area extending in the same direction as the extending direction of the strip-shaped area. And output a linear image (a photographed image of a line part) of the linear region of the inspection object S. Here, the linear image is also referred to as a line image. The line sensing camera 135 is supported at a position and direction where the angle θ3 between the optical axis L4 and the optical axis L1 (axis R13) of the line sensing camera 135 is 20 degrees. In addition, the line sensing camera 135 is arranged on the opposite side of the second lamp 133 and the third lamp 134 with the first lamp 132 in the middle.

The line sensing camera 135 is also a multispectral camera (including a hyperspectral camera). A multi-spectral camera is a camera that can obtain line images of a wavelength band (Band) with more colors (for example, more than 10) than RGB 3 colors. In addition, the line sensing camera 135 is preferably a hyperspectral camera that can generate line images in a wavelength band of more than 100. The line sensor camera 135 includes a lens 135A, a slit member 135B, a beam splitter 135C, and an image sensor 135D as shown in the fifth figure.

The lens 135A is a condensing lens, and is emitted from any one of the first lamp 132 to the third lamp 134 and enters the illumination light reflected by the inspection object S. The incident illumination light passes through the lens 135A and reaches the slit member 135B. The slit member 135B includes a linear slit 135BA extending in a direction parallel to the longitudinal direction of the light exit surfaces 132A, 133A, and 134A, and only part of the illumination light passing through the lens 135A passes through the slit 135BA. The illumination light passing through the slit 135BA is a linear light extending along the X direction (a direction parallel to the aforementioned longitudinal direction). This linear light is also light reflected by the linear part of the inspection object S.

The illumination light (linear light) passing through the slit 135BA is split in the Y direction by a beam splitter 135C having an optical system such as a grating (diffraction grating) and a lens. After the light is split, the lights are of different wavelength bands. The wavelength distribution of each light quantity after light splitting becomes a mountain-shaped distribution with a certain wavelength as a peak and gradually decreasing up and down.

The split light of each wavelength band is received by the image sensor 135D and converted into an electrical signal. The image sensor 135D can be a CMOS image sensor or a CCD image sensor. The image sensor 135D is provided with a plurality of pixels (photodiodes, etc.) 135DA that convert the received light into brightness data (electrical signals) representing the light measurement. A plurality of pixels 135DA are arranged in a matrix in the X direction and the Y direction. The light-receiving part 135DB of a set of a plurality of pixels 135DA arranged in a row in the X direction respectively receives light of one of the plurality of wavelength bands after the light is split. In other words, the set of brightness data converted by each pixel 135DA (each pixel 135DA possessed by a light-receiving part 135DB) arranged in the X direction at the same position in the Y direction displays the linear light passing through the slit 135BA The brightness distribution of the linear light of one wavelength band in the X direction is also the image data obtained by receiving the light of the one wavelength band representing the linear image of the linear region of the inspection object S. Since this line image is a collection of brightness data, it is also an image showing gray scale. The set of brightness data converted by the pixels 135DA arranged in the same position in the X direction and the Y direction displays the brightness distribution of each wavelength band of the aforementioned illumination light reflected at a certain position in the linear region of the inspection object S . The image sensor 135D outputs the image data of the aforementioned line image to the control unit 140 for each wavelength band.

With the above configuration, the line sensing camera 135 splits the illumination light reflected by the inspection object S into a plurality of wavelength bands, and generates each of the plurality of wavelength bands to capture the plurality of line images (wavelength bands) of the inspection object S Multiple different line images). In addition, the line sensing camera 135 moves along the inspection object S and sequentially photographs the inspection object S (specifically, shooting in each row), and sequentially outputs line images of a line portion generated by each shot. The image data. As mentioned above, it is also referred to as scanning that the line sensing camera 135 moves along the inspection object S and photographs the inspection object S sequentially at the same time. The aforementioned movement and shooting can also be temporarily stopped during shooting. In other words, the line-sensing camera 135 is moving and shooting in sequence at the same time. In addition to the line-sensing camera 135 continuously moving, the line-sensing camera 135 can also be used to move repeatedly → temporarily stop and shoot → Move → temporarily stop and shoot.

Returning to the first figure, the control unit 140 includes a drive control unit 141, a lamp control unit 142, a camera control unit 143, an image inspection unit 144, and a storage unit 145. For example, the drive control unit 141 is constituted by a PLC (programmable logic controller) or the like, and the lamp control unit 142, the camera control unit 143, the image inspection unit 144, and the storage unit 145 are constituted by a computer or the like. For example, the lamp control unit 142, the camera control unit 143, and the image inspection unit 144 are composed of various processors such as the CPU of the aforementioned computer that executes the program stored in the memory unit 145. The hardware configuration of the control section 140 is not limited. For example, the drive control section 141, the lamp control section 142, the camera control section 143, and the image inspection section 144 may be formed by different computers, or may be constituted by a single computer. The memory unit 145 is composed of RAM (Random access memory) and hard disk. In addition to storing the aforementioned programs, it also stores a drive control unit 141, a light control unit 142, a camera control unit 143, and an image inspection unit. 144 used materials, etc.

The drive control unit 141 controls the articulated robot 110 and the moving mechanism 120. The lamp control unit 142 controls the first lamp 132 to the third lamp 134 of the illuminating camera unit 130. The camera control unit 143 controls the line sensing camera 135 of the lighting camera unit 130.

The drive control unit 141 drives the articulated robot 110, for example, to rotate the rotating body 112, the first arm 113 to the third arm 115, the 2-2 arm 114B, and the 3-2 arm 115B, respectively, and cause the illumination camera unit 130 to rotate along Move along the surface of the inspection object S. At this time, the drive control unit 141 also appropriately controls the moving mechanism 120 to move the lighting camera unit 130. When the lighting camera unit 130 moves, the light control unit 142 performs control to turn on any one of the first light 132 to the third light 134. The camera control section 143 causes the line sensing camera 135 moved by the drive control section 141 to sequentially photograph (scan) the inspection object S, so that the line image generated by the line sensing camera 135 (the image of the first line part) during each shooting ) Image data is output to the image inspection section 144. The image data is individually output in a plurality of wavelength bands.

The image inspection unit 144 sequentially receives image data of a plurality of line images sequentially output from the line sensor camera 135, and combines the sequentially received image data to generate a frame of camera image. The one frame of camera image is generated by combining multiple line images of the same wavelength band. Then, the image inspection unit 144 combines the respective captured images of different wavelength bands to generate the captured images of the desired wavelength band. The image inspection unit 144 can also generate the aforementioned one-frame camera image by combining various line images of different wavelength bands, and then combine the combined line images to generate the aforementioned one-frame camera image, thereby generating the aforementioned camera image of the desired wavelength band.

The image inspection unit 144 performs a defect inspection (image inspection) based on one frame of the generated image (also including the image of the desired wavelength band). This inspection is performed separately for multiple frames of captured images in different wavelength bands (in other words, multiple frames of captured images are performed individually). When the image inspection unit 144 detects a defect in at least one of the plurality of frames of the captured image, the inspection result determines that the inspection object is defective. Appropriate methods can be used for image inspection.

The display unit 150 includes a liquid crystal display or the like, and displays the inspection result of the image inspection unit 144 and the like under the control of the control unit 140. The display unit 150 also displays a designated input screen (the input screen of the wavelength band described later) and the like.

The input unit 160 is composed of a mouse, a keyboard, or a touch panel. For example, when the image inspection unit 144 combines captured images (linear or one frame of images) of different wavelength bands, it accepts the user to specify the desired wavelength Band operation. (Operation of image inspection device 100) (Scanning by line sensor camera 135)

The image inspection device 100 scans the inspection object S with the line sensor camera 135 in a plurality of modes. Specifically, the image inspection device 100 performs scanning under regular reflection illumination (figure 6), scanning under reflective dark-field illumination (figure 7), and scanning under dark-field illumination in the same direction (figure 8). Further scan the first path to the fourth path for the above three scans (Figure 9 to Figure 12). In addition, in each of the above-mentioned scans, the drive control unit 141 controls the articulated robot 110 and the moving mechanism 120 so that the intersection of the optical axes L1 to L4 of the illumination camera unit 130 is located on the surface of the inspection object S to make the illumination camera unit 130 moves. In addition, each of the above-mentioned scans illuminates the inspection object S with only the illumination light from any one of the first lamp 132 to the third lamp 134, and any one of the first lamp 132 to the third lamp 134 lights up, and illuminates the camera unit The area around 130 is blocked from light. (Scanning under regular reflection illumination)

When performing scanning under specular illumination, the drive control unit 141 drives the articulated robot 110 and the moving mechanism 120 so that the illumination camera unit 130 maintains the posture shown in FIG. 6 and moves along the inspection object S. Scanning under regular reflection illumination is shown in the sixth figure. The posture of the illumination camera unit 130 is controlled in such a way that the axis R13 (the central axis of the illumination camera unit 130) coincides with the vertical line H of the surface of the inspection object S. In scanning under regular reflection illumination, the lamp control unit 142 turns on the second lamp 133 and turns off the first lamp 132 and the third lamp 134 as shown in FIG. 6. The camera control unit 143 causes the line sensing camera 135 of the illumination camera unit 130 that moves along the inspection object S to perform shooting operations at an appropriate timing (details will be described later), and causes the line sensing camera 135 to scan the inspection object S. The optical axis L2 of the second lamp 133 of the scanning system under regular reflection illumination and the optical axis L4 of the line sensing camera 135 are inclined 20 degrees in opposite directions to the vertical line H, respectively. The line sensing camera 135 receives the illuminating light emitted from the second lamp 133 and regular reflection from the surface of the inspection object S. In other words, the line sensing camera 135 photographs (scans) the inspection object S illuminated by regular reflection. (Scanning under reflected dark field illumination)

When scanning under reflected dark-field illumination, the drive control unit 141 drives the articulated robot 110 and the moving mechanism 120 so that the illumination camera unit 130 maintains the posture shown in FIG. 7 and moves along the inspection object S. Scanning under reflected dark-field illumination is as shown in the seventh figure. The posture of the illumination camera unit 130 is controlled such that the axis R13 (the central axis of the illumination camera unit 130) is inclined 10 degrees to the vertical line H of the surface of the inspection object S. During scanning under the reflected dark-field illumination, the lamp control unit 142 turns on the third lamp 134, and turns off the first lamp 132 and the second lamp 133. The camera control unit 143 causes the line sensing camera 135 of the illumination camera unit 130 moving along the inspection object S to perform a shooting operation, and causes the line sensing camera 135 to scan the inspection object S. Scanning under reflective dark-field illumination is when the optical axis L3 of the third lamp 134 is turned on and is inclined 60 degrees to the vertical H, and the optical axis L4 of the line sensing camera 135 is inclined 30 degrees to the vertical H in the opposite direction to the optical axis L3 . The line sensing camera 135 receives the illumination light emitted from the third lamp 134 and reflected from the surface of the inspection object S. In other words, the line sensing camera 135 photographs (scans) the inspection object S in a reflective dark field. (Scanning under dark field illumination in the same direction)

When scanning under dark-field illumination in the same direction, the drive control unit 141 drives the articulated robot 110 and the moving mechanism 120, and causes the illumination camera unit 130 to maintain the posture shown in FIG. 8 and move along the inspection object S. Scanning under dark field illumination in the same direction is shown in Figure 8. The posture of the illumination camera unit 130 is controlled in such a way that the axis R13 (the central axis of the illumination camera unit 130) is inclined 40 degrees to the perpendicular H of the surface of the inspection object S. In scanning under dark field illumination in the same direction, the lamp control unit 142 turns on the first lamp 132 and turns off the second lamp 133 and the third lamp 134. The camera control unit 143 causes the line sensing camera 135 of the illumination camera unit 130 moving along the inspection object S to perform a shooting operation, and causes the line sensing camera 135 to scan the inspection object S. The optical axis L1 of the first lamp 132 of the scanning system under dark-field illumination in the same direction is inclined 40° from the vertical H, and the optical axis L4 of the line sensing camera 135 is inclined in the same direction as the optical axis L1 from the vertical H 60°. The line sensing camera 135 receives the illumination light emitted from the first lamp 132 and reflected from the surface of the inspection object S. In other words, the line sensing camera 135 photographs (scans) the inspection object S in the dark field of the same direction. The so-called same-direction dark-field illumination and reflective dark-field illumination are different in the positional relationship between the line sensing camera 135 and the lamp (first lamp 132 or third lamp 134) that illuminates the inspection object. Specifically, the difference is that the optical axis L4 of the line sensing camera 135 and the optical axis L1 of the first lamp 132 are inclined in the same direction with respect to the vertical H. In addition, the optical axis L4 of the line sensing camera 135 and the third lamp 132 are inclined in the same direction. The optical axis L3 of 134 is inclined in the direction opposite to the vertical line H. (Scanning from the first path to the fourth path)

After the image inspection device 100 scans each path from the first path to the fourth path with regular reflection illumination, scans each path from the first path to the fourth path with reflective dark-field illumination, and then darkens in the same direction. The field of view illumination scans each path from the first path to the fourth path. (First path)

The ninth figure shows the first path K1. The first path K1 is to move the lighting camera unit 130 on the left side above the inspection object S from top to bottom (refer to the solid line), then slide to the right (refer to the dotted line), and then move from bottom to top (refer to the solid line), Then slide to the right (refer to the dotted line), and then repeatedly move in the up and down direction (refer to the solid line) and slide to the right (refer to the dotted line) path. The drive control unit 141 controls the articulated robot 110 and the moving mechanism 120 so that the length direction of the first lamp 132 to the third lamp 134 of the lighting camera unit 130 is orthogonal to the vertical direction (the traveling direction during scanning), and the line sensing camera 135 is located in a direction below the first lamp 132 to the third lamp 134 and moves along the first path K1. The drive control unit 141 notifies the camera control unit 143 of the period (start time and end time) during which the lighting camera unit 130 is moved from top to bottom and from bottom to top. The camera control unit 143 controls the line-sensing camera 135 according to the aforementioned notification, and makes the line-sensing camera 135 perform a shooting operation during the movement of the lighting camera unit 130 from top to bottom and from bottom to top, thereby using the line sensing The camera 135 scans the surface of the inspection object S illuminated by any one of the first lamp 132 to the third lamp 134. When the camera control unit 143 slides the lighting camera unit 130 to the right, the control line sensing camera 135 does not perform scanning. In other words, the line sensing camera 135 scans the solid line part of the first path K1, but does not scan the dotted line part. The same applies to the second path K2 to the fourth path K4 to be described later. Scanning is performed in the solid line part and not in the broken line part. When the line sensor camera 135 scans, each wavelength band individually and sequentially outputs image data of a line part of the line image. (Second Path)

The tenth figure shows the second path K2. The second path K2 is a path that moves the lighting camera unit 130 located below the inspection object S and on the right side in the opposite direction to the first path K1. The drive control unit 141 makes the illuminating camera unit 130 orthogonal to the vertical direction (the traveling direction during scanning) in the length direction of the first lamp 132 to the third lamp 134, and the line sensing camera 135 is positioned higher than the first lamp 132 to the third lamp 134 The direction above the lamp 134 (in other words, the positional relationship between the lamps and the line sensor camera 135 in the designated direction (here, for example, the up and down direction) on the surface of the inspection object S is opposite to the first path K1) along The second path K2 moves. In addition, the second path K2 can also be the same path as the first path K1 (however, the positional relationship between the lights and the line sensing camera 135 in the aforementioned specified direction is opposite to the first path K1). (Third Path)

The eleventh figure shows the third path K3. The third path K3 is to move the lighting camera unit 130 located on the left and above the inspection object S from left to right (refer to the solid line), then slide down (refer to the broken line), and then move from right to left (refer to the solid line) , And then slide down, and then repeatedly move to the left and right directions (refer to the solid line) and slide downward (refer to the dashed line) path. The drive control unit 141 makes the illumination camera unit 130 orthogonal to the left-right direction (the traveling direction during scanning) in the length direction of the first lamp 132 to the third lamp 134, and the line sensing camera 135 is positioned higher than the first lamp 132 to the third lamp 134 The lamp 134 moves further to the right along the third path K3. (Fourth Path)

The twelfth figure shows the fourth path K4. The fourth path K4 is a path that causes the illumination camera unit 130 located on the right and below the inspection object S to move in the opposite direction to the third path K3. The drive control unit 141 makes the illumination camera unit 130 orthogonal to the left-right direction (the traveling direction during scanning) in the length direction of the first lamp 132 to the third lamp 134, and the line sensing camera 135 is positioned higher than the first lamp 132 to the third lamp 134 The left side of the lamp 134 (in other words, the positional relationship between the lamps and the line-sensing camera 135 on the surface of the inspection object S in the designated direction (here, for example, up and down. It can also be left and right) is opposite to the third path K3 Aspect) Move along the fourth path K4. In addition, the fourth path K4 may also be the same path as the third path K3 (however, the positional relationship between each of the first lamp 132 to the third lamp 134 and the line sensor camera 135 in the aforementioned specified direction and the third path K3 in contrast). (Image generation)

The image inspection unit 144 sequentially receives the image data of the line images sequentially output during scanning from the line sensor camera 135 and stores the image data in the memory unit 145. The image inspection unit 144 combines the image data stored in the memory unit 145 at a specified timing (for example, the time when the scanning of a solid line portion in the path K1 to K4 ends. It is notified from the drive control unit 141 and the camera control unit 143) (combination A solid line part is scanned to obtain a complex line image), and a camera image is generated. The line sensing camera 135 is the one that outputs each line image in the narrowest possible wavelength band by the line sensing camera 135 (in addition, it can also output line images of all wavelength bands, or output line images of some of the wavelength bands). The line sensing camera 135 here is preferably a hyperspectral camera that can output a line image of a wavelength band (Band) above 100 (especially any number between 100 and 600). The image inspection unit 144 combines the image data of the same wavelength band (multiple line images obtained by scanning a solid line portion) to generate a frame of camera image (a frame of camera image captured by scanning by the line sensor camera 135) . For example, when the image inspection unit 144 scans through the first path K1 and scans from the top to the bottom of the line sensor camera 135, the drawing area of the RAM etc. provided in the memory unit 145 is arranged sequentially from the top to the bottom. Line images of the same wavelength band, and generate a camera image (this generation is performed in each wavelength band). For example, when the image inspection unit 144 scans the first path K1 from bottom to top by the line sensor camera 135, the drawing area of the RAM etc. provided in the memory unit 145 is sequentially from bottom to top. Configure line images of the same wavelength band (this generation is performed in each wavelength band). Thereby, when the positional relationship of each lamp and the line sensing camera 135 to the aforementioned specified direction is the same, the same captured image can be obtained regardless of the scanning direction of the line sensing camera 135. In addition, when the aforementioned positional relationship is different, even if the scanning direction of the line sensing camera 135 is the same, because the illumination directions of the first lamp 132 to the third lamp 134 are different, different camera images are obtained (especially under dark-field illumination). In other words, the first path K1 and the second path K2 obtain different camera images, and the third path K3 and the fourth path K4 also obtain different camera images. The image inspection unit 144 generates captured images for each of the above-mentioned 3 illumination patterns (regular reflection illumination, reflected dark-field illumination, and same-direction dark-field illumination) and the first path to the fourth path (even if the path is the same, it still obtains each The camera images with different lighting patterns).

The image inspection unit 144 combines the image data from the line sensor camera 135 for each wavelength band such as wavelength band A, wavelength band B, etc., and generates a plurality of frames of camera images with different wavelength bands for one scan. By this, as shown in Figure 13, the captured images of wavelength band A, the captured images of wavelength band B, the captured images of wavelength band C, etc. are obtained. Then, as shown in FIG. 13, the image inspection unit 144 synthesizes the captured images of different wavelength bands to generate the captured images of the desired wavelength band. For example, it is synthesized by averaging the brightness of pixels at the same position. The aforementioned desired wavelength band is preset or set by the user via the input unit 160. In the case of user setting, the user specifies the desired wavelength band. The image inspection unit 144, for example, as shown in FIG. 13, synthesizes the captured images in the wavelength bands A and B, synthesizes the captured images in the wavelength bands A to C, and synthesizes the captured images in the wavelength bands C to F. By this, as shown in Figure 13, three camera images of the wavelength band A~B, the wavelength band A~C, and the wavelength band C~F are obtained. Therefore, the image inspection unit 144 can generate a captured image with a wider wavelength band than the captured image based on the image data output by the line sensing camera 135 or a partially repeated captured image. In addition, the image inspection unit 144 compares the image data of the generated captured images (the captured images before synthesis (the captured images in the wavelength band A, etc.) and the synthesized captured images (the captured images in the wavelength bands A to B, etc.)). Stored in the memory unit 145. The aforesaid image data are respectively stored when the camera image is generated, for example. The image inspection unit 144 reads the captured images before synthesis from the storage unit 145 when the captured images are synthesized, and performs synthesis. (Image inspection)

The image inspection unit 144 separately generates a plurality of captured images (may be only the captured images after synthesis, or an appropriate combination of the captured images before synthesis and the synthesized captured images. It may also be only the captured images before synthesis). Camera images. In addition, it can also be a part of multiple camera images of all the camera images of the camera images before or after synthesis.) Perform image inspection (see also Figure 13). For example, the image inspection unit 144 performs image processing such as edge emphasis on a captured image stored in the memory unit 145, and then performs a binarization process. In the above-mentioned regular reflection lighting, the defective part will produce light interference different from other normal parts (for example, the illuminating light reflected on the transparent protective film, and the illuminating light reflected by the boundary between the protective film and the color filter. Light interference), etc., or the defective part does not reflect the illumination light, and for example, the shooting of the defective part in the captured image becomes dark. Therefore, the threshold of binarization is a value used to prepare the defective part to blacken (pre-set by experiment etc.). In the above-mentioned reflective dark-field illumination and the same-direction dark-field illumination, because the defect-producing part irregularly reflects the illumination light and the like and is reflected toward the line sensing camera 135, the shooting of the part where the defect occurs in the captured image becomes brighter. Therefore, the threshold of binarization is a value used to prepare the defective part to become white (pre-set by experiment, etc.). The image inspection unit 144 performs labeling processing on the black (during specular reflection lighting) or white (during reflected dark field lighting and dark field lighting in the same direction) in the image after binarization. The set of black or white pixels is greater than When the area is specified, it is judged to be defective. In addition, the image inspection method may adopt, for example, pattern matching in which a template image showing the shape of the defect is prepared in advance.

The image inspection unit 144 is based on the illumination mode (regular reflection illumination, or reflective dark-field illumination, or dark-field illumination in the same direction), the path of the illumination camera unit 130 (the first path K1 to the fourth path K4), and the plurality of different wavelength bands For each of the captured images, the aforementioned image inspection is performed on the plurality of captured images individually. When the image inspection unit 144 determines that any of the aforementioned captured images is defective, for example, it is displayed on the control unit 140 to indicate that the inspection object S (the inspection object S scanned by the line sensor camera 135) is defect. In addition, the image inspection unit 144 preferably stores the captured images determined to be defective (defects detected) in the memory unit 145 as future samples or the like. The video inspection unit 144 may output a sound (warning sound, etc.) determined to be defective via a speaker or the like. (Effects in implementation form)

Since the present embodiment uses the articulated robot 110 to move the lighting camera unit 130 having the first lamp 132 to the third lamp 134 and the line sensing camera 135, the mechanism for moving the lighting camera unit 130 is reduced.

In addition, since the image inspection device 100 scans the same area of the inspection object S by the illumination camera unit 130 in a plurality of patterns (first path K1 to fourth path K4) through the line sensing camera, the inspection accuracy for defects ( The detection accuracy of defects) is high. Depending on the incident direction of the illumination light from the first lamp 132 to the third lamp 134 to the inspection object S, sometimes the defect is not obvious and cannot be detected. This is especially for dark-field lighting and reflective dark-field lighting in the same direction. For example, because of the incident angle and incident direction of the bright light to the surface of the inspection object S, the defect may cause the illumination light to be reflected or not reflected toward the line sensing camera 135. With the illumination and scanning of the plural patterns, the possibility of detecting defects in any one of the plural patterns is high. Therefore, the accuracy of the image inspection apparatus 100 for inspecting whether there are defects is improved.

In addition, since the image inspection apparatus 100 illuminates the inspection object S with a plurality of illumination patterns (regular reflection illumination, reflective dark-field illumination, and same-direction dark-field illumination), and scans by the line sensing camera in each illumination pattern, The inspection accuracy of defects (defect inspection accuracy) is high. Depending on the types of defects mentioned above, sometimes the lighting patterns suitable for defect inspection are different. For example, the above-mentioned stitches causing defects in film thickness and line-shaped defects are easy to detect by regular reflection illumination. For this reason, these defects are likely to cause the aforementioned light interference because the film thickness is different from the surroundings. In addition, it is also because these defects do not reflect the illumination light. Defects of remaining cleaning fluid or foreign matter, defects caused by abnormal formation of a part of the above-mentioned color filter layer or black matrix layer, etc., are easily detected by reflective dark-field illumination and dark-field illumination in the same direction. The former defect is caused by irregular reflection of illuminating light, etc. The defect caused by the aforementioned abnormality is caused by the difference in refractive index of the defect part (the part formed on the formation of the abnormality) and the non-defect part in the protective film. The light is reflected to the direction of the line sensing camera 135. By preparing the lighting patterns of a plurality of lighting inspection objects S, it is possible to inspect for various defects, thereby improving the inspection accuracy for defects (defect detection accuracy).

In addition, since the lighting pattern can be changed only by changing the directions of the first lamp 132 to the third lamp 134 to turn on, not turn on, and illuminate the camera unit 130, the change becomes easy. In addition, for example, when there is only one illuminating inspection object S, it is necessary to move the lamp every time the lighting pattern is changed, and at this time, each time the lamp is moved, an error will occur in its position. Since the first lamp 132 to the third lamp 134 and the line sensor camera 135 are fixed to the base 131 as described above, and the positional relationship between these is not moved, such errors will not occur, and image inspection with high accuracy can be performed. In addition, the lighting camera unit 130 can also be applied to other image inspection devices.

Since the image inspection apparatus 100 inspects the color filter substrate as the inspection target S, the inspection of the color filter substrate by visual inspection in the past can be automated.

In addition, the above-mentioned line sensing camera 135 adopts a multi-spectral camera, and performs image inspection with each different wavelength band, so that the inspection accuracy for defects (defect detection accuracy) is improved. For example, in regular reflection lighting, the interference of light is used to detect defects, but sometimes it will not cause interference of light due to wavelength (especially the illumination light reflected on the transparent protective film, and the boundary between the protective film and the color filter). The reflected illumination light cancels out the interference). Therefore, by performing image inspection for a plurality of wavelength bands, it is easy to detect defects, and the inspection accuracy for defects (defect detection accuracy) is improved.

In addition, the line sensing camera 135 outputs a line image with the narrowest wavelength band that the line sensing camera 135 can output, and the image inspection unit 144 combines the captured images based on the line image to generate a plurality of desired captured images with different wavelength bands . Since the aforementioned wavelength band can be specified by the user through the input unit 160, a photographic image of a wavelength band suitable for defect inspection can be obtained (for example, the user can grasp the wavelength band suitable for defect inspection through experiments, etc., and specify its wavelength band). In addition, a plurality of desired camera images can be obtained with a wavelength band suitable for defect inspection by including a part of the wavelength band that overlaps.

In addition, the image inspection unit 144 individually performs image processing on each of the captured images of different illumination patterns, different paths, and different wavelength bands, and inspects for defects, because even if one is judged to be defective, it is judged that the inspection object S is defective , So the handling of defects becomes simple. In addition, since the same image processing is implemented for each captured image, and the presence or absence of defects is checked based on the captured image, the processing for presence or absence of defects becomes simple. (Modification)

The present invention is not limited to the above-mentioned embodiment. Various changes can also be made to the above-mentioned embodiment. (Modification 1)

The inspection object S may be panel-shaped (square, elliptical, circular, or polygonal). For example, it may also be a substrate with transparent electrodes on a glass substrate constituting a liquid crystal display device. . In addition, the inspection object S may be one that forms a protective film by providing various circuits on a glass substrate constituting a liquid crystal display device or the like. In addition, when the aforementioned various circuits have abnormal formation (for example, when the width of a certain part is narrower than desired, etc.), the defect of the protective film will also occur due to the abnormal formation of the color filter layer or the black matrix layer. . In addition, the inspection object S may also be one that forms a specified film (such as a transparent film) on the silicon wafer. (Modification 2)

The multi-joint robot can also be a horizontal multi-joint robot. In addition, the number of axes of the articulated robot is not limited, but it should be 6 or more. With 6 or more axes, the lighting camera unit 130 can be moved precisely. (Modification 3)

The lighting style is not limited to the above, and other lighting styles may also be used. In addition, in the above-mentioned lighting patterns, the inclination (angle) of the optical axis L4 of the line sensing camera 135 to the perpendicular H of the surface of the inspection object S, and the pair of optical axes L1 to L3 of the first lamp 132 to the third lamp 134 The inclination of the perpendicular H on the surface of the inspection object S can also be changed appropriately. In addition, the configuration of the line sensing camera 135 used for regular reflection illumination only needs to be the angle of the inclination of the optical axis L4 of the line sensing camera 135 to the perpendicular H of the surface of the inspection object S and the optical axis L2 of the second lamp 133 The angle of the inclination is the same, and the line sensing camera 135 and the second lamp 133 are arranged in opposite positions with the vertical line H clamped. For the configuration of the line sensing camera 135 for reflective dark-field illumination, as long as the angle of the inclination of the optical axis L4 of the line sensing camera 135 to the perpendicular H of the surface of the inspection object S and the inclination of the optical axis L3 of the third lamp 134 The angles of degrees are different, and the arrangement where the line sensing camera 135 and the second lamp 133 are clamped at the opposite positions of the vertical line H is sufficient. The configuration of the line sensing camera 135 for dark field illumination in the same direction, as long as the angle of the inclination of the optical axis L4 of the line sensing camera 135 to the perpendicular H of the surface of the inspection object S and the optical axis L2 of the first lamp 132 The angle of the inclination of the line sensor 135 and the second lamp 133 are in the same direction to the vertical line H. (Modification 4)

The base 131 may also be provided with an adjustment mechanism for adjusting the positional relationship between the line sensor camera 135 and the first lamp 132 to the third lamp 134 before moving the lighting camera unit 130 for scanning (before image inspection). For example, as shown in Figures 14 and 15, the camera support portion 131C is provided with a slit hole 131CA, and the line sensor camera 135 is installed on the camera support portion by screwing the screw 131D of the line sensor camera 135 through the slit hole 131CA 131C. In this way, by loosening the screw 131D, the direction and position of the line sensing camera 135 can be adjusted, and then tightening the screw 131D, the direction and position of the line sensing camera 135 can be adjusted. The first lamp 132 to the third lamp 134 are also preferably provided with a mechanism that can adjust the direction and position. Thereby, the direction of each optical axis L1 to L4 can be finely adjusted. (Modification 5)

The image inspection unit 144 may also perform image inspection only based on the captured image combining a plurality of line images. In other words, the image inspection unit 144 may not generate captured images in the aforementioned desired wavelength band (it is not necessary to synthesize a plurality of captured images with different wavelength bands). (Modification 6)

In all the three illumination modes, the above system performs image inspection on multiple captured images with different wavelength bands. However, the reflected dark field illumination and/or the same direction dark field illumination can also be based on one of the specified wavelength bands. Camera images are used for image inspection (multi-spectral cameras may not be used). Those who need to scan in multiple paths are only reflective dark-field lighting and/or dark-field lighting in the same direction. Regarding regular reflection, a single path can also be scanned. According to these implementations, efficient defect inspection can be performed.

Even if reflected dark-field illumination and/or same-direction dark-field illumination, depending on the wavelength band, there are still defects that are easy to capture on the camera image. Therefore, even if reflected dark-field illumination and/or same-direction dark-field illumination is different in wavelength band It is still best to perform image inspections for multiple camera images separately. Even in regular reflection lighting, there are still defects that can only be detected by a certain path (defects that darken only when shooting in a certain direction, etc.). Therefore, even in regular reflection lighting, it is still best to use multiple paths. scanning. (Modification 7)

The lighting camera unit 130 can also be driven by a driving device other than the articulated robot 110. At least a part of the plurality of lighting patterns can also fix the direction of the line sensing camera 135 (the angle of the optical axis L4 to the perpendicular H of the surface of the inspection object S), and make the lights (set in different directions and The position of the lamp. The above-mentioned first lamp 132 to third lamp 134) are different. At least a part of the plurality of lighting patterns can also make the lights that light up the same, and the direction of the line sensing camera 135 or the lighting camera unit 130 (the angle of the optical axis L4 to the perpendicular H of the inspection object S surface) is different . (Modification 8)

It is also possible to install a sensor for measuring the distance to the inspection object S in the lighting camera unit 130. When the drive control unit 141 scans the inspection object S, the sensor can also be used to inspect the object S and the illumination The multi-joint robot 110 is controlled by a certain distance between the camera unit 130. (Modification 9)

It is also possible to combine line images on the side of the illumination camera unit 130 to generate a frame of camera image. (The composition disclosed in this manual)

The structures disclosed in this specification are listed below. In addition, each configuration of the following (A) and (B) may be combined with each other.

(A) An image inspection device (for example, the image inspection device 100), which inspects the inspection object (for example, the inspection object S) of the panel shape for defects, and has: A line sensing camera (for example, a line sensing camera 135) that moves along the inspection object and scans the inspection object by photographing the inspection object in sequence; A multi-joint robot (for example, the multi-joint robot 110), which supports the aforementioned line sensing camera; A drive control unit (for example, a drive control unit 141), which drives the aforementioned multi-joint robot and moves the aforementioned line sensing camera along the aforementioned inspection object; and The image inspection part (for example, the image inspection part 144), which is based on the image of the inspection object obtained by scanning by the line sensor camera (for example, the line image, the photographed image of the specified wavelength band of the combined line image, the combined plural The camera image of the image in each wavelength band), the image inspection to check for the aforementioned defects.

The aforementioned multi-joint robot can also be a multi-joint robot with more than six axes.

It may be further equipped with lighting lamps (for example, the first lamp 132 to the third lamp 134), which are supported by the articulated robot and moved together with the line sensor camera by the articulated robot to illuminate the The area of the inspection object captured by the aforementioned line sensor camera, The drive control unit uses the line sensing camera to have a plurality of different positional relationships on the surface of the inspection object along which the line sensing camera and the illumination lamp follow (for example, up and down or left and right) Mode (for example, scanning in the first path K1 to the fourth path K4) to scan the same area of the inspection object to drive the articulated robot, The image inspection unit performs the image inspection on the images of the inspection object obtained by scanning the plurality of patterns respectively.

The aforementioned illuminating lamp can also be arranged in the position and direction for dark-field illumination (for example, the second lamp 133).

The aforementioned plural patterns may also include: the first pattern and the second pattern (for example, scanning on the first path K1 and the second path K2), which are the same direction or opposite direction of the travel direction of the aforementioned line sensing camera Direction, and the aforementioned positional relationship is opposite to each other; and the third pattern and the fourth pattern (for example, scanning in the third path K3 and the fourth path K4), which are the traveling direction of the line sensing camera and the aforementioned first The same state and the aforementioned second state are orthogonal to each other, and the aforementioned positional relationship is opposite to each other.

May further have: A fixing member (for example, the base 131), which is supported by the aforementioned multi-joint robot and fixes the aforementioned line sensing camera; and A plurality of lighting lamps (for example, the first lamp 132 to the third lamp 134), which are fixed to the fixing member, and respectively illuminate the area of the inspection object photographed by the line sensing camera; The plurality of illuminating lamps are fixed to the fixing member at positions and directions at which the optical axes of the plurality of illuminating lamps are inclined at different angles to the optical axis of the line sensing camera, The drive control unit drives the multi-joint robot by scanning the same area of the inspection object by multiple scans of the line sensor camera (for example, scanning by regular reflection illumination, reflective dark field illumination, and dark field illumination in the same direction). , The aforementioned plural scans include two or more scans in which the lights of the plurality of lights are different from each other (for example, any one of the first light 132 to the third light 134 is turned on), The image inspection section performs the image inspection on each image obtained through the multiple scans.

The drive control unit may also scan at two or more times of the plurality of scans in a manner in which the angle of the optical axis of the line sensing camera to the vertical line (for example, the vertical line H) of the inspection object surface is different (for example, , The same direction dark-field illumination, regular reflection illumination, reflective dark-field illumination) drive the aforementioned multi-joint robot.

The aforementioned plurality of illuminating lamps may also include: a first illuminating lamp (for example, the first lamp 132, etc.), which is arranged on a perpendicular line to the surface of the inspection object and inclined in the same direction as the optical axis of the line sensing camera The position of the optical axis for dark-field lighting (for example, dark-field lighting in the same direction); the second illuminating lamp (for example, the second lamp 133, etc.), which is set at the position for performing regular reflection lighting (for example, regular reflection lighting); And a third illuminating lamp (for example, the third lamp 134, etc.), which is arranged to perform dark-field illumination on the vertical line of the surface of the inspection object and the optical axis inclined in the opposite direction to the optical axis of the line sensing camera (for example , Reflected dark-field lighting).

The fixing member may also have an adjustment mechanism (for example, the slot 131CA and the screw 131D, etc.), which adjusts the positional relationship between the line sensor camera and the plurality of lighting lamps.

The aforementioned inspection object may also be a substrate (for example, a color filter substrate) with a film (for example, a transparent film) formed on the surface of a panel-shaped substrate (for example, a glass substrate).

(B) An image inspection device that inspects the inspected object for defects and has: A multi-spectral camera (for example, the line sensor camera 135), which photographs the inspection object; and The image inspection part (for example, the image inspection part 144), which is a plurality of images with different wavelength bands obtained by shooting the inspection object by the multispectral camera (for example, the photographed images of the wavelength band A to B, the wavelength band A ~C camera image, and wavelength band C~F camera image... etc. It can also be the multiple frames of each camera image of wavelength band A, B, C...F... or a part of them.) Perform image inspections to check for the aforementioned defects.

The image inspection unit may also perform the image inspection by performing the same image processing on the plurality of images respectively.

The aforementioned plural images may also include two or more first images in which a part of the aforementioned wavelength band is repeated (for example, a photographed image of wavelength band A~B, a photographed image of wavelength band A~C, and a photographed image of wavelength band C~F image).

The image inspection unit can also obtain a plurality of second images (for example, each of the captured images in the wavelength bands A, B, C...F...) with a narrower wavelength band than the wavelength band of the first image, by combining the A plurality of second images are generated to generate the aforementioned first image (for example, refer to Figure 13).

The image inspection unit may determine that the inspection object is defective when a defect is detected in any of the plurality of images.

The aforementioned inspection object is a substrate, The aforementioned multi-spectral camera captures the aforementioned inspection object by receiving regular reflection light from the aforementioned inspection object, The image inspection unit inspects the plurality of images obtained by the multispectral camera receiving the regular reflection light for defects.

The present invention can adopt various embodiments and modifications without departing from the broad spirit and scope of the present invention. In addition, the above-mentioned embodiment is for explaining the present inventor, and is not intended to limit the scope of the present invention. That is, the scope of the present invention is not shown by the embodiments, but by the scope of patent applications. Therefore, various modifications implemented within the scope of the patent application and within the scope of the equivalent invention are still deemed to be within the scope of the present invention.

This application is based on its international application PCT/JP2019/002539 in accordance with the Patent Cooperation Treaty filed on January 25, 2019. This specification incorporates all the specification, scope of patent application and drawings of the international application PCT/JP2019/002539 by way of reference.

100: imaging inspection device 110: multi-joint robot 111: base 112: rotating body 113: first arm 114: second arm 114A: 2-1 arm 114B: 2-2 arm 115: third arm 115A: third -1 arm 115B: 3-2 arm 120: moving mechanism 121: base 122: rail 123: sliding member 130: lighting camera unit 131: base 131A: fixed part 131B: lamp support part 131C: camera support part 131BA, 131BB: A pair of plate-shaped members 131BC~131BE: 3 plate-shaped members 132: first lamp 133: second lamp 134: third lamp 132A, 133A, 134A: light exit surface 135: line sensor camera 135A: lens 135B: gap Component 135C: Spectroscope 135D: Image sensor 135BA: Gap 135DA: Pixel 135DB: Light receiving section 140: Control section 141: Drive control section 142: Lamp control section 143: Camera control section 144: Image inspection section 145: Memory section 150: display unit 160: input unit K1: first path K2: second path K3: third path K4: fourth path L1~L4: optical axis R11~R13: axis R21~R23: axis S: inspection object θ 1 ~ θ 3: Angle H: perpendicular

The first figure is a configuration diagram of an image inspection apparatus according to an embodiment of the present invention. The second figure is a schematic diagram showing a multi-joint robot, etc. The third figure is a perspective view of the lighting camera unit. The fourth picture is a picture of the lighting camera unit viewed from the side. The fifth figure is a diagram showing a configuration example of a line sensing camera (multi-spectral camera). The sixth diagram is a diagram of the lighting camera unit when the regular reflection lighting is viewed from the side. The seventh diagram is a diagram of the illumination camera unit when the reflected dark-field illumination is viewed from the side. The eighth diagram is a diagram of the lighting camera unit when the dark field lighting is in the same direction viewed from the side. The ninth figure is a diagram showing the first path of the lighting camera unit. The tenth figure is a figure showing the second path of the lighting camera unit. The eleventh figure is a diagram showing the third path of the lighting camera unit. The twelfth figure is a figure showing the fourth path of the lighting camera unit. The thirteenth figure is a diagram showing an example of the combination of captured images, etc. Figure 14 is a view of the lighting camera unit of the modification example viewed from the side. The fifteenth figure is a view of the illumination camera unit of the modified example viewed from the side.

110: Multi-joint robot

111: Base

112: Rotating body

113: First arm

114: second arm

114A: 2-1 arm

114B: 2-2 arm

115: third arm

115A: 3-1 arm

115B: 3-2 arm

120: mobile mechanism

121: Base

122: Orbit

123: Sliding member

130: Lighting camera unit

R11~R13, R21~R23: axis

S: Check object

D: Support position

Claims (6)

An image inspection device that inspects the inspected object for defects and has: A multi-spectral camera, which photographs the inspection object; and The image inspection section performs image inspections for the multiple images of different wavelength bands obtained by the inspection object captured by the multispectral camera to inspect the defects. For example, the image inspection device in the first item of the scope of patent application, wherein the image inspection unit performs the image inspection by performing the same image processing on the plurality of images respectively. For example, the image inspection device of item 1 or item 2 of the scope of patent application, wherein the plurality of images include two or more first images in which a part of the wavelength band is repeated. For example, the image inspection device of item 3 of the scope of patent application, wherein the image inspection unit obtains a plurality of second images of a wavelength band narrower than the wavelength band of the first image, and generates the foregoing by combining the plurality of second images The first image. For example, the image inspection device of item 1 or item 2 of the scope of patent application, wherein the image inspection unit detects a defect in any one of the plurality of images, and determines that the inspection object is defective. For example, the image inspection device of item 1 or item 2 of the scope of patent application, wherein the inspection object mentioned above is a substrate, The aforementioned multi-spectral camera captures the aforementioned inspection object by receiving regular reflection light from the aforementioned inspection object, The image inspection unit inspects the plurality of images obtained by the multispectral camera receiving the regular reflection light for defects.

Images