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TW202016544A - Vibratory Prothrombin Time measurement system - Google Patents

Vibratory Prothrombin Time measurement system Download PDF

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TW202016544A
TW202016544A TW107137058A TW107137058A TW202016544A TW 202016544 A TW202016544 A TW 202016544A TW 107137058 A TW107137058 A TW 107137058A TW 107137058 A TW107137058 A TW 107137058A TW 202016544 A TW202016544 A TW 202016544A
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vibration
reaction time
sensor
micro
coagulation reaction
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TW107137058A
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TWI662282B (en
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顏毅廣
張育禎
林豪駸
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國立臺北科技大學
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Abstract

This invention provides a vibratory Prothrombin Time (PT) measurement system, including a vibration device and a sensor; the vibration device is capable of vibrating up and down at a preset frequency and vibration amplitude; and the sensor is connected and fixed with the vibration device by a connecting part, wherein the sensor vibrates up and down with the vibration device in a to-be-measured sample to generate the original data. According to the vibratory measurement system of the present invention, the sensor vibrates in a small number of to-be-measured samples, and is combined with an external device with a computational analysis function, in this way, the original data may be subjected to Fast Fourier Transform (FFT) to obtain the Prothrombin Time (PT), so that the total number of the to-be-measured samples is reduced, and precise data can also be provided.

Description

振動式量測凝血反應時間之系統Vibration system for measuring coagulation reaction time

一種測量凝血反應時間的系統,尤其指一種利用微懸臂樑在待測血液中振動以量測凝血反應時間之系統。A system for measuring coagulation reaction time, especially a system using micro-cantilever to vibrate in blood to be measured to measure coagulation reaction time.

人體凝血機制可分為外源途徑 (extrinsic pathway)和內源途徑(intrinsic pathway)。當人體遭受外力而使內臟或皮膚受傷出血時,外源途徑及內源途徑會交織複合作業,讓人體進行復原性的凝血反應程序。無論是外源途徑或室內源途徑,除了血液參與凝血反應之外,血液中的各項凝血因子,例如纖維酶原 (fibrinogen)、纖維蛋白 (fibrin)、血小板等會同樣進行反應,使血液盡快凝固,避免大量出血導致休克甚至危及生命。The coagulation mechanism of the human body can be divided into extrinsic pathway and intrinsic pathway. When the human body is exposed to external forces and causes internal organs or skin injuries to bleed, external and internal pathways will be intertwined in complex operations to allow the body to undergo a restorative coagulation reaction procedure. Regardless of whether it is an exogenous route or an indoor source route, in addition to the blood participating in the coagulation reaction, various blood coagulation factors, such as fibrinogen, fibrin, and platelets, will also react to make the blood as soon as possible Coagulation, to avoid massive bleeding leading to shock or even life-threatening.

一般而言,正常人的血液包含大量功能正常的凝血因子,在出血時能快速凝血,減少出血量,但年長者或是具血液疾病的重病患者,其血液可能缺乏凝血因子,僅存的凝血因子也因功能不全或是老化而無法正常凝血,導致患者出血時無法有效且快速凝血,可能有血液流失過快或過多的問題。In general, the blood of normal people contains a large number of functional coagulation factors, which can quickly coagulate during bleeding and reduce the amount of bleeding. However, the elderly or severely ill patients with blood diseases may lack coagulation factors in their blood, and the only remaining blood coagulation factors Factors are also unable to coagulate normally due to insufficiency or aging, resulting in patients failing to coagulate effectively and quickly when hemorrhaging, and there may be a problem of excessive or excessive blood loss.

另外,部分疾病的病患所服用的藥物可能會抑制凝血因子的功能,使得此類的病患雖無血液疾病,但由於藥物的影響,在出血時無法有效凝血,同樣可能產生大量出血的問題。In addition, the drugs taken by patients with some diseases may inhibit the function of coagulation factors, so that these patients have no blood diseases, but due to the influence of drugs, they cannot effectively coagulate blood during bleeding, and may also cause a lot of bleeding problems. .

因此,檢查人體血液的凝血反應時間,或是進行投藥實驗的凝血反應時間測試,成為人體患病程度的重要數據,以及藥物性能、副作用測試的重要考量因素。Therefore, checking the coagulation reaction time of the human blood, or conducting the coagulation reaction time test of the drug administration experiment, has become an important data of the human disease degree, and an important consideration factor of the drug performance and side effect test.

習知檢測凝血時間的方法係將待測血液盛裝於容器中並持續攪拌待測血液,量測攪拌時的阻值變化得到凝血反應時間,但要完成此種量測方法的機台相當龐大且笨重,不易量測及攜帶,且需要較多的待測血液作為測量樣本才能取得有效的凝血反應時間數據,量測一次大約需要3毫升的血液,對於重病患者而言無疑是體力上的一大負擔。The conventional method for detecting the coagulation time is to hold the blood to be tested in a container and continue to stir the blood to be tested, measuring the change in resistance during stirring to obtain the coagulation reaction time, but the machine to complete this measurement method is quite large and It is bulky, difficult to measure and carry, and requires more blood to be tested as a measurement sample to obtain effective coagulation reaction time data. It takes about 3 milliliters of blood to measure one time, which is undoubtedly a major physical problem for seriously ill patients burden.

為減少測量凝血反應時間的待測血液,本發明提出一種振動式量測凝血反應時間之系統,藉由振動微懸臂樑來測量待測血液的凝血反應時間,能以少量的待測血液測量凝血反應時間。In order to reduce the blood to be tested for measuring the blood coagulation reaction time, the present invention proposes a system for measuring the blood coagulation reaction time by vibrating. By vibrating the micro-cantilever to measure the blood coagulation reaction time, the blood coagulation can be measured with a small amount of blood to be tested Reaction time.

為達成上述目的,本發明一種振動式量測凝血反應時間之系統包含: 一振動裝置,能以預設之一預設頻率及一預設振幅上下振動; 一感測器,以一連接部與該振動裝置連接固定; 其中,該感測器在進行測量時浸入一待測樣本中,且該感測器能跟隨該振動裝置在該待測樣本裡上下振動以產生原始數據。In order to achieve the above object, a system for measuring the coagulation reaction time by vibration according to the present invention includes: a vibration device capable of vibrating up and down at a preset frequency and a preset amplitude; a sensor with a connecting part and The vibration device is connected and fixed; wherein, the sensor is immersed in a sample to be tested during the measurement, and the sensor can follow the vibration device to vibrate up and down in the sample to generate raw data.

由於微懸臂樑約在微米尺度,能在少量的待測血液中振動,而得到微懸臂樑的振幅與時間關係之原始數據,並透過一外部裝置將該原始數據以快速傅立葉轉換成振幅與頻率的關係,以得到該待測血液的凝血反應時間,達到減少待測血液的目的。同時,本發明使用較為小巧靈活的感測器,若前往非洲等落後國家或偏鄉等交通、資源不發達等地帶,在攜帶及使用上能提供更高的便利性,甚至能增加攜帶的數量,以提高量測的效率。Because the micro-cantilever is about the micrometer scale, it can vibrate in a small amount of blood to be measured, and the original data of the amplitude and time relationship of the micro-cantilever is obtained, and the raw data is converted into amplitude and frequency by fast Fourier through an external device To obtain the coagulation reaction time of the blood to be tested, so as to reduce the blood to be tested. At the same time, the present invention uses a relatively small and flexible sensor. If you travel to areas such as Africa and other backward countries or rural areas and have poor transportation and resources, it can provide greater convenience in carrying and using, and even increase the number of carrying. To improve the efficiency of measurement.

請參見圖1,本發明振動式量測凝血反應時間之系統包含:一振動裝置10及一感測器20。Referring to FIG. 1, the system for measuring the coagulation reaction time by vibration according to the present invention includes: a vibration device 10 and a sensor 20.

該振動裝置10能以一預設頻率及一預設振幅進行週期性地振動,其中該振動裝置10能在測試前預先設定該預設頻率及該預設振幅,在本發明的較佳實施例中,該預設頻率為10赫茲(Hz),該預設振幅為40微米(μm),使得該振動裝置10能以一正弦波(Sin wave)上下振動,如箭號A所示;在以下說明中本發明的實際量測流程皆會以上述數據為範例。The vibration device 10 can periodically vibrate at a preset frequency and a preset amplitude, wherein the vibration device 10 can preset the preset frequency and the preset amplitude before the test, in a preferred embodiment of the present invention In this case, the preset frequency is 10 hertz (Hz), and the preset amplitude is 40 micrometers (μm), so that the vibration device 10 can vibrate up and down with a sine wave as shown by arrow A; in the following In the description, the actual measurement process of the present invention will take the above data as an example.

該感測器20通過一連接部21與該振動裝置10連接,其中該連接部21可為一連動桿。該感測器20包含一感測單元22、一微懸臂樑30及一無線傳輸電路,能以無線的方式傳送該微懸臂樑30的量測資訊至一外部裝置50,其中該微懸臂樑30設至於該量測單元22的一接觸面上。該感測單元22可為一壓阻式微懸臂樑感測晶片(Piezoresistive microcantilever sensing chip);該外部裝置50為一具計算分析功能的電腦、儀器或是平板。The sensor 20 is connected to the vibrating device 10 through a connecting portion 21, wherein the connecting portion 21 can be a linkage rod. The sensor 20 includes a sensing unit 22, a micro-cantilever 30 and a wireless transmission circuit, which can wirelessly transmit the measurement information of the micro-cantilever 30 to an external device 50, wherein the micro-cantilever 30 It is set on a contact surface of the measuring unit 22. The sensing unit 22 can be a piezoresistive microcantilever sensing chip; the external device 50 is a computer, instrument or tablet with calculation and analysis functions.

請進一步參見圖2,該微懸臂樑30為一由多項材料結合而成的複合式量測裝置,本實施例中,該微懸臂樑30的結構由頂層到底層依序為一以電漿化學氣相沉積法(PECVD)形成的第一氧化氮薄膜31(Six Ny ),其厚度約250奈米、一以低壓化學氣相沉積法(LPCVD)形成的多晶矽薄膜32(Polysilicon),其厚度約150奈米、一以電漿化學氣相沉積法(PECVD)形成的二氧化矽薄膜33(SiO2 ),其厚度約400奈米、及一以低壓化學氣相沉積法(LPCVD)形成的第二氧化氮薄膜34(Six Ny ),其厚度約215奈米;在該第一氧化氮薄膜31與該二氧化矽薄膜33之間的部分區域填充一利用電子蒸束沉積法(E-beam deposition)沉積的金鉻合金薄膜35(Au/Cr),其中金金屬的厚度約150奈米,鉻金屬的厚度約15奈米。Please further refer to FIG. 2, the micro-cantilever 30 is a composite measuring device formed by combining a plurality of materials. In this embodiment, the structure of the micro-cantilever 30 is a plasma chemistry from the top layer to the bottom layer in order. The first nitrogen oxide film 31 (Si x N y ) formed by vapor deposition (PECVD) has a thickness of about 250 nm, and a polysilicon film 32 (Polysilicon) formed by low pressure chemical vapor deposition (LPCVD), which A thickness of about 150 nm, a silicon dioxide thin film 33 (SiO 2 ) formed by plasma chemical vapor deposition (PECVD), a thickness of about 400 nm, and a low pressure chemical vapor deposition (LPCVD) The second nitrogen oxide film 34 (Si x N y ) has a thickness of about 215 nm; a partial area between the first nitrogen oxide film 31 and the silicon dioxide film 33 is filled with an electron vapor beam deposition method ( The gold-chromium alloy film 35 (Au/Cr) deposited by E-beam deposition, wherein the thickness of the gold metal is about 150 nm, and the thickness of the chromium metal is about 15 nm.

在進行實驗測量時,該感測器20與該微懸臂樑30會放入一盛裝待測樣本61之測試容器60中,並讓該感測器20與該微懸臂樑30完全浸入待測樣本61中,本實驗數據以濃度60%的甘油水溶液作為待測樣本61的樣本,在實際測量患者血液的凝血反應時間時,患者血液作為帶測樣本61的量約為0.06毫升(ml)。請參見圖1,當該振動裝置10進行週期性的振動時,該振動裝置10透過連接部21同步帶動該感測器20及該微懸臂樑30週期振動,使得該微懸臂樑30在待測樣本61中上下振動;該微懸臂樑30在該待測樣本61中振動時因受待測樣本61的阻力而遲滯,讓該微懸臂樑30受到待測樣本61的應力而上下彎折,以產生原始數據(raw data),該原始數據為該微懸臂樑30在待測樣本振動時的振幅與時間關係,該微懸臂樑30上下彎折的程度如圖3A所示,圖3A為在固定時間內該微懸臂樑30受待測樣本的應力後的振幅變化,同時圖3A即為該原始數據,其中縱軸代表振幅,橫軸代表時間,振幅大於零代表該微懸臂樑30向上彎曲,振幅小於零代表該微懸臂樑30向下彎曲。During the experimental measurement, the sensor 20 and the micro-cantilever 30 are placed in a test container 60 containing the sample 61 to be tested, and the sensor 20 and the micro-cantilever 30 are completely immersed in the sample to be tested In 61, in this experimental data, a 60% glycerin aqueous solution is used as the sample of the test sample 61. When actually measuring the coagulation reaction time of the patient's blood, the amount of the patient's blood as the test sample 61 is about 0.06 milliliters (ml). Please refer to FIG. 1, when the vibration device 10 performs periodic vibration, the vibration device 10 synchronously drives the sensor 20 and the micro-cantilever beam 30 to vibrate periodically through the connecting portion 21, so that the micro-cantilever beam 30 is under test The sample 61 vibrates up and down; when the micro-cantilever 30 vibrates in the sample 61 to be tested due to the resistance of the sample 61 to be tested, the micro-cantilever 30 is bent up and down by the stress of the sample 61 to be tested, Raw data is generated, which is the relationship between the amplitude and time of the micro-cantilever beam 30 when the sample to be tested vibrates. The degree of bending of the micro-cantilever beam 30 up and down is shown in FIG. 3A. The amplitude of the micro-cantilever 30 after being stressed by the sample to be measured within the time, and Figure 3A is the original data, where the vertical axis represents the amplitude, the horizontal axis represents the time, and the amplitude greater than zero represents the micro-cantilever 30 bending upward, If the amplitude is less than zero, the micro-cantilever 30 is bent downward.

請進一步參見圖3B,該感測器20接收該微懸臂樑30所量測之該原始數據後,將該原始數據無線傳輸至該外部裝置50,該外部裝置50能接收該原始數據並以快速傅立葉轉換(FFT)換算成振幅與頻率的關係,並持續計算出振幅對時間的平均值,例如若在第一秒的振幅是100Ω,第二秒的振幅是100Ω,則前兩秒振幅的平均值為100Ω;而若在第三秒的振幅是200Ω,則前三秒的振幅平均值為(100+200)/2=150Ω,依序計算。在連續計算的過程中,若某一時間點的振幅大於等於平均值的六倍,則這個時間點即為凝血反應時間,例如前三秒的振幅平均值為150Ω,而第四秒的振幅為900Ω,則凝血反應時間即為四秒。接著並取一採樣頻率下對應之一採樣振幅作為樣本進行比較,本實施例中,該採樣頻率為10赫茲,且對應的該採樣振幅約為0.5Ω。Please further refer to FIG. 3B. After the sensor 20 receives the raw data measured by the micro-cantilever 30, the raw data is wirelessly transmitted to the external device 50. The external device 50 can receive the raw data and quickly The Fourier transform (FFT) is converted into the relationship between amplitude and frequency, and the average value of amplitude versus time is continuously calculated. For example, if the amplitude in the first second is 100Ω and the amplitude in the second second is 100Ω, then the average amplitude of the first two seconds The value is 100Ω; and if the amplitude in the third second is 200Ω, the average value of the amplitude in the first three seconds is (100+200)/2=150Ω, calculated in order. In the continuous calculation process, if the amplitude at a certain time point is greater than or equal to six times the average value, then this time point is the coagulation reaction time, for example, the average amplitude of the first three seconds is 150Ω, and the amplitude of the fourth second is 900 Ω, the coagulation reaction time is four seconds. Next, a sampling amplitude corresponding to a sampling frequency is taken as a sample for comparison. In this embodiment, the sampling frequency is 10 Hz, and the corresponding sampling amplitude is about 0.5Ω.

請參見圖4A及圖4B,為用微懸臂樑30對三種血液樣本的進行振動測試的實驗數據圖,該振動裝置10以預設頻率為10赫茲、預設振幅為40微米的動作條件帶動微懸臂樑30產生振動。三種血液樣本包含量測健康成年人的正常血液LV1、具一般疾病的疾病血液LV2以及具嚴重疾病或年長者之重病血液LV3,三種血液樣本分別得到圖4A中的一第一曲線A1、一第二曲線A2及一第三曲線A3,其中該第一曲線A1對應正常血液LV1,該第二曲線A2對應疾病血液LV2,該第三曲線A3對應重病血液LV3。將該第一曲線A1、該第二曲線A2及該第三曲線A3經快速傅立葉轉換後,能得到如圖4B所示的凝血反應時間(Prothrombin Time,PT),其中凝血反應時間為取前五秒訊號的平均作為一個單位,而達到六個單位所需的時間定義為凝血反應時間。由圖4B可知正常血液LV1的凝血反應時間最短,僅需12.1秒,其次為疾病血液LV2,需要27.1秒,重病血液LV3的凝血反應時間最長,需要38.1秒。Please refer to FIGS. 4A and 4B, which are experimental data graphs of the vibration test of three blood samples using the micro-cantilever 30. The vibration device 10 drives the micro-device with the operating condition of a preset frequency of 10 Hz and a preset amplitude of 40 μm. The cantilever 30 generates vibration. The three blood samples include normal blood LV1 for measuring healthy adults, disease blood LV2 for general diseases, and serious blood LV3 for serious or elderly patients. The three blood samples respectively obtain a first curve A1 and a first curve in FIG. 4A. A second curve A2 and a third curve A3, wherein the first curve A1 corresponds to normal blood LV1, the second curve A2 corresponds to disease blood LV2, and the third curve A3 corresponds to severe disease blood LV3. After fast Fourier transforming the first curve A1, the second curve A2 and the third curve A3, the coagulation reaction time (Prothrombin Time, PT) shown in FIG. 4B can be obtained, wherein the coagulation reaction time is the top five The average of the second signal is a unit, and the time required to reach six units is defined as the coagulation reaction time. It can be seen from FIG. 4B that the normal blood LV1 has the shortest coagulation reaction time, only 12.1 seconds, followed by the disease blood LV2, which requires 27.1 seconds, and the severely ill blood LV3 has the longest coagulation reaction time, which requires 38.1 seconds.

請參見圖5,將該正常血液LV1、疾病血液LV2、重病血液LV3經該微懸臂樑30測得的最大振幅值取出比較,如圖5所示,可得到該正常洗液LV1的最大振幅值最高,其次為疾病血液LV2,最低是重病血液LV3;另外一項參數為凝血比例,凝血比例為凝血完成後析出的膠體重量百分比,同樣地,該正常血液LV1的凝血比例最高,代表該正常血液LV1中的各項凝血因子(例如血小板、組織促凝血酶原激酶、纖維蛋白原)的功能正常,含量也較多,該重病血液LV3的凝血比例最低,代表該重病血液LV3的凝血因子含量最少,功能也不佳。Please refer to FIG. 5 and compare the maximum amplitude values of the normal blood LV1, disease blood LV2, and severe disease blood LV3 measured by the micro-cantilever 30, as shown in FIG. 5, the maximum amplitude value of the normal lotion LV1 can be obtained The highest, followed by the disease blood LV2, the lowest is the seriously ill blood LV3; another parameter is the coagulation ratio, the coagulation ratio is the weight percentage of colloids precipitated after the coagulation is completed. Similarly, the normal blood LV1 has the highest coagulation ratio, which represents the normal blood The functions of various coagulation factors (such as platelets, tissue thromboplastin, fibrinogen) in LV1 are normal, and the content is also large. The coagulation rate of LV3 in the seriously ill blood is the lowest, which means that the content of coagulation factors in the LV3 in the seriously ill blood is the least. , The function is not good.

本發明透過振動微懸臂樑測量待測血液所得到振幅與時間的關係,能利用少量待測血液樣本測得凝血反應時間,藉此減少待測血液取得的成本,及減少病患的身體負擔。The invention uses the vibration micro-cantilever to measure the relationship between the amplitude of the blood to be tested and the time, and can use a small amount of blood samples to measure the coagulation reaction time, thereby reducing the cost of obtaining the blood to be tested and reducing the patient's physical burden.

10:振動裝置 20:感測器 21:連接部 22:感測單元 30:微懸臂樑 31:第一氧化氮薄膜 32:多晶矽薄膜 33:二氧化矽薄膜 34:第二氧化氮薄膜 35:金鉻合金薄膜 50:外部裝置 60:測試容器 61:待測樣本 LV1:正常血液 LV2:疾病血液 LV3:重病血液 A1:第一曲線 A2:第二曲線 A3:第三曲線 A:箭號 10: Vibration device 20: Sensor 21: Connection 22: Sensing unit 30: micro cantilever 31: First nitrogen oxide film 32: Polycrystalline silicon film 33: Silicon dioxide film 34: Second nitrogen oxide film 35: Gold-chromium alloy film 50: external device 60: Test container 61: sample to be tested LV1: normal blood LV2: disease blood LV3: Severely ill blood A1: First curve A2: Second curve A3: Third curve A: Arrow

圖1:本發明之示意圖。 圖2:本發明之微懸臂樑剖面圖。 圖3A:本發明量測待測樣本之振幅-時間曲線圖。 圖3B:本發明量測待測樣本之振幅-頻率曲線圖。 圖4A:本發明三種血液之振幅-時間曲線圖。 圖4B:本發明三種血液之數據圖。 圖5:本發明三種血液之最大振幅值及凝血比例長條圖。Figure 1: Schematic diagram of the present invention. Figure 2: Cross-sectional view of the micro-cantilever beam of the present invention. Figure 3A: The present invention measures the amplitude-time curve of the sample to be measured. Figure 3B: The present invention measures the amplitude-frequency curve of the sample to be measured. Figure 4A: Amplitude-time curves of three types of blood of the present invention. Figure 4B: Data charts of three types of blood of the present invention. Figure 5: A bar graph of the maximum amplitude value and coagulation ratio of the three types of blood of the present invention.

10:振動裝置 10: Vibration device

20:感測器 20: Sensor

21:連接部 21: Connection

22:感測單元 22: Sensing unit

30:微懸臂樑 30: micro cantilever

50:外部裝置 50: external device

60:測試容器 60: Test container

61:待測樣本 61: sample to be tested

A:箭號 A: Arrow

Claims (6)

一種振動式量測凝血反應時間之系統,包含: 一振動裝置,能以預設之一預設頻率及一預設振幅上下振動; 一感測器,以一連接部與該振動裝置連接固定; 其中,該感測器在進行測量時浸入一待測樣本中,且該感測器能跟隨該振動裝置在該待測樣本裡上下振動以產生原始數據。A vibratory system for measuring coagulation reaction time includes: a vibrating device capable of vibrating up and down at a preset frequency and a preset amplitude; a sensor connected and fixed to the vibrating device by a connecting part; Wherein, the sensor is immersed in a sample to be tested during measurement, and the sensor can follow the vibration device to vibrate up and down in the sample to generate raw data. 如請求項1所述振動式量測凝血反應時間之系統,該感測器具有一微懸臂樑及一感測單元,該微懸臂樑設置於該感測單元的一接觸面,其中該接觸面的法線與該振動裝置的振動方向垂直,該微懸臂樑與該感測單元電性連接。The vibration-type system for measuring coagulation reaction time according to claim 1, the sensor has a micro-cantilever and a sensing unit, the micro-cantilever is disposed on a contact surface of the sensing unit, wherein The normal is perpendicular to the vibration direction of the vibration device, and the micro-cantilever beam is electrically connected to the sensing unit. 如請求項2所述振動式量測凝血反應時間之系統,該感測器包含一無線傳輸電路,該感測器透過該無線傳輸電路傳送該原始數據至一外部裝置,該外部裝置利用快速傅立葉將該原始數據轉換成振幅與頻率的關係,並持續計算出振幅對時間的平均值。The system for measuring the coagulation reaction time by vibration according to claim 2, the sensor includes a wireless transmission circuit, the sensor transmits the raw data to an external device through the wireless transmission circuit, and the external device uses fast Fourier Convert the raw data into the relationship between amplitude and frequency, and continue to calculate the average amplitude over time. 如請求項3所述振動式量測凝血反應時間之系統,若某一時間點的振幅大於等於平均值的六倍,則此時間點即為凝血反應時間。According to the system for measuring the coagulation reaction time by vibration according to claim 3, if the amplitude of a certain time point is greater than or equal to six times the average value, then this time point is the coagulation reaction time. 如請求項4所述振動式量測凝血反應時間之系統,該微懸臂樑為一由多項材料結合而成的複合式量測裝置。According to the system for measuring the coagulation reaction time by vibration according to claim 4, the micro-cantilever beam is a composite measuring device formed by combining multiple materials. 如請求項5所述振動式量測凝血反應時間之系統,該微懸臂樑的結構由頂層到底層依序為一以電漿化學氣相沉積法形成的第一氧化氮薄膜、一以低壓化學氣相沉積法形成的多晶矽薄膜、一以電漿化學氣相沉積法形成的二氧化矽薄膜、及一以低壓化學氣相沉積法形成的第二氧化氮薄膜,在該第一氧化氮薄膜與該二氧化矽薄膜之間的部分區域填充一利用電子蒸束沉積法沉積的金鉻合金薄膜。As described in claim 5, a system for measuring the coagulation reaction time by vibration, the structure of the micro-cantilever from the top layer to the bottom layer is a first nitrogen oxide film formed by plasma chemical vapor deposition method, a low-pressure chemical A polysilicon film formed by vapor deposition, a silicon dioxide film formed by plasma chemical vapor deposition, and a second nitrogen oxide film formed by low-pressure chemical vapor deposition. Part of the area between the silicon dioxide films is filled with a gold-chromium alloy film deposited by electron vapor beam deposition.
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