TW201638754A - Conductive film, wiring and touch panel sensor - Google Patents
Conductive film, wiring and touch panel sensor Download PDFInfo
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- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0445—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
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- G—PHYSICS
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- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/13338—Input devices, e.g. touch panels
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/047—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means using sets of wires, e.g. crossed wires
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
- G02F1/3505—Coatings; Housings; Supports
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04112—Electrode mesh in capacitive digitiser: electrode for touch sensing is formed of a mesh of very fine, normally metallic, interconnected lines that are almost invisible to see. This provides a quite large but transparent electrode surface, without need for ITO or similar transparent conductive material
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Abstract
Description
本發明是有關於一種形成有導電性細線的導電性膜、具有導電性膜的配線以及具有導電性膜的觸控面板感測器,尤其是有關於一種視認性優異的導電性膜、配線以及觸控面板感測器。The present invention relates to a conductive film formed with a conductive thin wire, a wiring having a conductive film, and a touch panel sensor having a conductive film, and more particularly to a conductive film and wiring excellent in visibility. Touch panel sensor.
於基板上形成有導電性細線的導電性膜廣泛用於太陽電池,無機電致發光(Inorganic Electro Luminescence,IEL)元件、有機電致發光(Organic Electro Luminescence,OEL)元件等各種電子元件的透明電極,各種顯示裝置的電磁波屏蔽罩,觸控面板及透明面狀發熱體等。尤其,近年來,觸控面板於行動電話或可攜式遊戲機等中的搭載率上昇,可進行多點檢測的靜電電容方式的觸控面板用的導電性膜的需求急速擴大。A conductive film in which a conductive thin wire is formed on a substrate is widely used for a transparent electrode of various electronic components such as a solar cell, an inorganic electroluminescence (IEL) device, and an organic electroluminescence (OEL) device. , electromagnetic shielding shields for various display devices, touch panels, and transparent planar heating elements. In particular, in recent years, the mounting rate of touch panels in mobile phones and portable game machines has increased, and the demand for conductive films for capacitive touch panels capable of multi-point detection has rapidly increased.
作為導電性細線,使用氧化銦錫(Indium Tin Oxide,ITO)等透明導電性氧化物。透明導電性氧化物適合於如視認性低、可致命般地看到電極圖案的用途,例如觸控面板等。但是,透明導電性氧化物的薄片電阻為10 Ω/□~100 Ω/□左右,不適合大面積化及高感度化。 與所述透明導電性氧化物相比,金屬具有容易圖案化、彎曲性優異、電阻更低等優點,因此於觸控面板等中將銅、銀等金屬用於導電性細線。As the conductive thin wire, a transparent conductive oxide such as indium tin oxide (ITO) is used. The transparent conductive oxide is suitable for applications such as a touch panel that can be seen with a low visibility and can be fatally seen. However, the sheet resistance of the transparent conductive oxide is about 10 Ω/□ to 100 Ω/□, which is not suitable for large area and high sensitivity. Compared with the transparent conductive oxide, the metal has an advantage of being easy to pattern, excellent in flexibility, and lower in electrical resistance. Therefore, a metal such as copper or silver is used for a conductive thin wire in a touch panel or the like.
於專利文獻1中記載有一種使用金屬細線的觸控面板。專利文獻1的觸控面板是具備基材、多個Y電極圖案、多個X電極圖案、多個跨接絕緣層、多個跨接配線、及透明絕緣層的靜電電容感測器(觸控感測器、輸入裝置)。 多個Y電極圖案分別具有大致菱形形狀,以其頂點彼此相互對向的方式,沿著X方向及Y方向於基材的表面上排列成矩陣狀。 網眼是使以Y方向為中心並線對稱地傾斜的兩種金屬細線呈格子狀地交叉來形成。多個X電極圖案具有與Y電極圖案相同的大致菱形形狀。 [現有技術文獻] [專利文獻]Patent Document 1 describes a touch panel using metal thin wires. The touch panel of Patent Document 1 is a capacitance sensor including a substrate, a plurality of Y electrode patterns, a plurality of X electrode patterns, a plurality of jumper insulating layers, a plurality of jumper wires, and a transparent insulating layer (touch) Sensor, input device). Each of the plurality of Y electrode patterns has a substantially rhombic shape, and is arranged in a matrix on the surface of the substrate along the X direction and the Y direction so that the apexes thereof face each other. The mesh is formed by intersecting two kinds of metal thin wires which are inclined in a line symmetry with respect to the Y direction in a lattice shape. The plurality of X electrode patterns have substantially the same rhombic shape as the Y electrode pattern. [Prior Art Document] [Patent Literature]
[專利文獻1]日本專利特開2014-115694號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. 2014-115694
[發明所欲解決之課題]於如專利文獻1般使用金屬細線,形成有具有大致菱形形狀的多個Y電極圖案與多個X電極圖案的觸控面板中,當對觸控面板進行視認時,有時因來自周圍的指向性高的光而產生條紋狀的光的反射。該條紋狀的光的反射的產生使視認性下降。期望防止導致視認性的下降的所述條紋狀的光的反射的產生,並進一步提昇視認性。[Problems to be Solved by the Invention] In the touch panel in which a plurality of Y electrode patterns having a substantially rhombic shape and a plurality of X electrode patterns are formed by using a thin metal wire as in Patent Document 1, when the touch panel is visually recognized In some cases, reflection of streaked light is generated by light having high directivity from the surroundings. The generation of the reflection of the stripe-shaped light reduces the visibility. It is desirable to prevent the occurrence of reflection of the stripe-shaped light which causes a decrease in visibility, and to further improve visibility.
本發明的目的在於消除基於所述現有技術的問題點,並提供一種視認性優異的導電性膜、配線以及觸控面板感測器。 [解決課題之手段]An object of the present invention is to eliminate the problems based on the prior art and to provide a conductive film, a wiring, and a touch panel sensor which are excellent in visibility. [Means for solving the problem]
為了達成所述目的,本發明的第1形態提供一種導電性膜,其特徵在於:包括導電性片體,所述導電性片體具備基板;多個第1波狀線,配置於基板上,使半圓的圓弧的方向相互不同地排列而成;以及多個第2波狀線,配置於基板上,使半圓的圓弧的方向相互不同地排列而成,相對於第1波狀線的排列方向對稱;使各第1波狀線的圓弧的排列方向與各第2波狀線的圓弧的排列方向平行,並使各第1波狀線與各第2波狀線相隔事先設定的距離,且相向的各第1波狀線的圓弧與各第2波狀線的圓弧至少接觸;第1波狀線與第2波狀線包含導電性材料。In order to achieve the above object, a first aspect of the present invention provides a conductive film, comprising: a conductive sheet, wherein the conductive sheet includes a substrate; and the plurality of first wavy lines are disposed on the substrate. The directions of the arcs of the semicircles are arranged differently from each other; and the plurality of second wavy lines are arranged on the substrate, and the directions of the arcs of the semicircles are arranged differently from each other, and the first wavy line is formed. The arrangement direction is symmetrical; the arrangement direction of the arcs of the first wavy lines is parallel to the arrangement direction of the arcs of the respective second wavy lines, and each of the first wavy lines is set in advance with each of the second wavy lines. The distance between the opposing first wavy lines and the arc of each of the second wavy lines is at least in contact with each other; the first wavy line and the second wavy line include a conductive material.
各第1波狀線與各第2波狀線亦可設為相向的各第1波狀線的圓弧與各第2波狀線的圓弧重疊的構成。另外,半圓的圓弧包括中心角為170°~190°的圓弧。導電性材料亦可設為包含金屬或合金,且積層有多個導電性片體的構成。當積層有多個導電性片體時,較佳為使導電性片體的排列方向一致。另外,基板較佳為透明的基板。Each of the first wavy lines and each of the second wavy lines may have a configuration in which an arc of each of the first wavy lines facing each other overlaps with an arc of each of the second wavy lines. In addition, the semicircular arc includes an arc having a central angle of 170° to 190°. The conductive material may be formed by including a metal or an alloy and laminating a plurality of conductive sheets. When a plurality of conductive sheets are laminated, it is preferable to make the arrangement direction of the conductive sheets uniform. Further, the substrate is preferably a transparent substrate.
本發明的第2形態提供一種配線,其特徵在於:包括本發明的第1形態的導電性膜。較佳為不僅可相對於導電性膜的排列方向平行或垂直地切斷來形成導通路徑,而且於針對導電性膜,在相對於排列方向的角度γ以絕對值計超過0°、未滿90°的範圍內切斷第1波狀線及第2波狀線的至少一者來形成導電路徑的情況下,當將圓弧的直徑設為Da,將與排列方向正交的方向上的第1波狀線與第2波狀線的間隔設為P時,與由|tanf|=P/Da所規定的排列角度f一致來切斷第1波狀線與第2波狀線。According to a second aspect of the invention, there is provided a wiring comprising the conductive film according to the first aspect of the invention. It is preferable that not only the conductive path can be formed by cutting parallel or perpendicular to the arrangement direction of the conductive film, but also the angle γ with respect to the arrangement direction is more than 0° and less than 90 in absolute value with respect to the conductive film. When at least one of the first wavy line and the second wavy line is cut in the range of ° to form a conductive path, when the diameter of the circular arc is Da, the direction in the direction orthogonal to the arrangement direction is When the interval between the wavy line and the second wavy line is P, the first wavy line and the second wavy line are cut in accordance with the arrangement angle f defined by |tanf|=P/Da.
本發明的第3形態提供一種觸控面板感測器,其特徵在於:包括本發明的第1形態的導電性膜。 導電性膜較佳為用於感測器部及周邊配線部的至少一者。 [發明的效果]According to a third aspect of the invention, there is provided a touch panel sensor comprising the conductive film according to the first aspect of the invention. The conductive film is preferably used for at least one of the sensor portion and the peripheral wiring portion. [Effects of the Invention]
根據本發明的導電性膜,可獲得視認性優異的導電性膜。 根據本發明的配線,可獲得視認性優異的配線。 根據本發明的觸控面板感測器,可獲得視認性優異的觸控面板感測器。According to the conductive film of the present invention, a conductive film excellent in visibility can be obtained. According to the wiring of the present invention, wiring excellent in visibility can be obtained. According to the touch panel sensor of the present invention, a touch panel sensor excellent in visibility can be obtained.
以下,根據隨附的圖式中所示的適宜實施形態,對本發明的導電性膜、配線以及觸控面板感測器進行詳細說明。 再者,以下表示數值範圍的「~」包含兩側所記載的數值。例如,ε為數值α~數值β是指ε的範圍為包含數值α與數值β的範圍,若以數學符號來表示,則α≦ε≦β。 光學透明及僅透明均是指於波長400 nm~800 nm的可見光波長區域中,透光率至少為60%以上,較佳為80%以上,更佳為85%以上,進而更佳為90%以上。 透光率為例如使用JIS K 7375:2008中所規定的「塑膠-全光線透過率及全光線反射率的求法」所測定者。 另外,將「大致」及「同時」設為包含技術領域中通常所容許的誤差範圍者。Hereinafter, the conductive film, the wiring, and the touch panel sensor of the present invention will be described in detail based on a preferred embodiment shown in the accompanying drawings. In addition, "~" which shows the numerical range below contains the numerical value shown on both sides. For example, ε is a numerical value α to a numerical value β, and means that the range of ε is a range including the numerical value α and the numerical value β, and if expressed by a mathematical symbol, α ≦ ε ≦ β. The optically transparent and transparent only means that the light transmittance is at least 60% or more, preferably 80% or more, more preferably 85% or more, and even more preferably 90% in a visible light wavelength region of a wavelength of 400 nm to 800 nm. the above. The light transmittance is measured, for example, by using "plastic-total light transmittance and total light reflectance" prescribed in JIS K 7375:2008. In addition, "substantially" and "simultaneously" are set to include the tolerances normally allowed in the technical field.
圖1是用以說明條紋狀的光的反射的示意圖。 如圖1中所示,當自光源104對在基板100上使用金屬細線而形成有圖案的區域102照射指向性高的光時,有時不論照射方向、視認方向,均可於區域102中視認到條紋狀的反射光108。將條紋狀的反射光108稱為斑點(splash)。條紋狀的反射光108,即斑點為阻礙視認性者,產生該斑點者的視認性差。本發明的導電性膜是抑制斑點的產生,並改善視認性者。 所謂具有指向性的光,例如是指來自發光二極體(Light Emitting Diode)的光,太陽光等自然光、螢光燈的光、白熾電燈泡的光及白熾燈的光不包含於具有指向性的光中。來自發光二極體(Light Emitting Diode)的光包含單色光及白色光。FIG. 1 is a schematic view for explaining reflection of stripe-shaped light. As shown in FIG. 1, when the light-emitting area 104 is irradiated with light having high directivity to the region 102 on which the metal thin wires are formed on the substrate 100, the light may be visually recognized in the region 102 regardless of the irradiation direction and the viewing direction. To the stripe-shaped reflected light 108. The stripe-shaped reflected light 108 is referred to as a splash. The stripe-shaped reflected light 108, that is, the spot is a person who obstructs visibility, and the visibility of the person who produces the spot is poor. The conductive film of the present invention suppresses the generation of spots and improves the visibility. The light having directivity means, for example, light from a light emitting diode, natural light such as sunlight, light of a fluorescent lamp, light of an incandescent light bulb, and light of an incandescent lamp are not included in directivity. Light. Light from a Light Emitting Diode includes monochromatic light and white light.
繼而,對本發明的實施形態的導電性膜進行說明。 圖2是表示本發明的實施形態的導電性膜的示意平面圖。圖3是將本發明的實施形態的導電性膜擴大表示的平面圖。圖4是表示構成本發明的實施形態的導電性膜的圖案的導電性細線的示意圖,圖5是表示構成本發明的實施形態的導電性膜的圖案的導電性細線的示意圖,圖6是用以說明本發明的實施形態的導電性膜的圖案的示意圖,圖7是表示本發明的實施形態的導電性膜的其他例的示意圖。Next, a conductive film according to an embodiment of the present invention will be described. Fig. 2 is a schematic plan view showing a conductive film according to an embodiment of the present invention. Fig. 3 is a plan view showing an enlarged conductive film according to an embodiment of the present invention. 4 is a schematic view showing a conductive thin wire constituting a pattern of a conductive film according to an embodiment of the present invention, and FIG. 5 is a schematic view showing a conductive thin wire constituting a pattern of a conductive film according to an embodiment of the present invention, and FIG. 6 is a view A schematic view showing a pattern of a conductive film according to an embodiment of the present invention, and FIG. 7 is a schematic view showing another example of the conductive film according to the embodiment of the present invention.
圖2中所示的導電性膜10具有導電性片體11,該導電性片體11將多個於H方向上延伸的圖案配線14在V方向上重疊排列而設置於基板12上。基板12例如為透明的基板。 如圖2、圖3中所示,圖案配線14包含在H方向上延伸的第1波狀線14a與在H方向上延伸的第2波狀線14b,且無直線部分。第1波狀線14a與第2波狀線14b由導電性細線15形成。The conductive film 10 shown in FIG. 2 has a conductive sheet 11 which is provided on the substrate 12 by superimposing a plurality of pattern wirings 14 extending in the H direction in the V direction. The substrate 12 is, for example, a transparent substrate. As shown in FIGS. 2 and 3, the pattern wiring 14 includes a first wavy line 14a extending in the H direction and a second wavy line 14b extending in the H direction, and has no straight portion. The first wavy line 14a and the second wavy line 14b are formed of conductive thin wires 15.
第1波狀線14a如圖4中所示,使半圓的圓弧17a與半圓的圓弧17b的方向相互不同地排列。半圓的圓弧17a與半圓的圓弧17b的直徑均為Da。半圓的圓弧17a與半圓的圓弧17b排列於H方向上,於本說明書中,半圓的圓弧的排列方向是指H方向。 第2波狀線14b如圖5中所示,使半圓的圓弧17a與半圓的圓弧17b的方向相互不同地排列。半圓的圓弧17a與半圓的圓弧17b的直徑均為Da。半圓的圓弧17a與半圓的圓弧17b的圓弧的排列方向亦為H方向。即便使第1波狀線14a的相位移動相當於圓弧的直徑Da,亦可獲得第2波狀線14b。As shown in FIG. 4, the first wavy line 14a is arranged such that the semicircular arc 17a and the semicircular arc 17b are different from each other. The diameter of the semicircular arc 17a and the semicircular arc 17b are both Da. The semicircular arc 17a and the semicircular arc 17b are arranged in the H direction. In the present specification, the semicircular arc is arranged in the H direction. As shown in FIG. 5, the second wavy line 14b is arranged such that the semicircular arc 17a and the semicircular arc 17b are different from each other. The diameter of the semicircular arc 17a and the semicircular arc 17b are both Da. The arrangement direction of the arc of the semicircular arc 17a and the semicircular arc 17b is also the H direction. Even if the phase shift of the first wavy line 14a corresponds to the diameter Da of the circular arc, the second wavy line 14b can be obtained.
如圖6中所示,半圓的圓弧17a為直徑Da的假想圓19的外周的一半,半圓的圓弧17b是與半圓的圓弧17a左右對稱者,同樣為直徑Da的假想圓19的外周的一半。藉由將半圓的圓弧17a的端部17c與半圓的圓弧17a的端部17c連接,而形成圓弧的方向相互不同的第1波狀線14a、及第2波狀線14b。半圓的圓弧17a及半圓的圓弧17b於將假想圓19的中心設為O,將中心角設為θ時,中心角θ為180°,若以弧度法來表示,則為π(弧度)。半圓的圓弧理想的是中心角θ為180°,但考慮到誤差等,於本發明中,只要中心角θ為170°~190°的範圍,則稱為半圓的圓弧。 若半圓的圓弧17a與半圓的圓弧17b一個一個地相連,則第1波狀線14a及第2波狀線14b均成為一個週期的波形圖案。藉由將波形圖案連接,可形成第1波狀線14a及第2波狀線14b。 於第1波狀線14a及第2波狀線14b中,將半圓的圓弧17a的端部17c連接的線成為中心線C。As shown in Fig. 6, the semicircular arc 17a is half of the outer circumference of the imaginary circle 19 of the diameter Da, and the semicircular arc 17b is symmetrical with the semicircular arc 17a, and is also the outer circumference of the imaginary circle 19 of the diameter Da. Half of it. By connecting the end portion 17c of the semicircular arc 17a to the end portion 17c of the semicircular arc 17a, the first wavy line 14a and the second wavy line 14b having mutually different arc directions are formed. The semicircular arc 17a and the semicircular arc 17b are set to O at the center of the imaginary circle 19, and have a central angle θ of 180° when the central angle is θ, and π (radian) when expressed by the radians method. . The arc of a semicircle is preferably a central angle θ of 180°. However, in consideration of an error or the like, in the present invention, as long as the central angle θ is in the range of 170° to 190°, it is called a semicircular arc. When the semicircular arc 17a and the semicircular arc 17b are connected one by one, the first wavy line 14a and the second wavy line 14b each have a one-period wave pattern. The first wavy line 14a and the second wavy line 14b can be formed by connecting the waveform patterns. In the first wavy line 14a and the second wavy line 14b, a line connecting the end portions 17c of the semicircular arc 17a is the center line C.
第2波狀線14b相對於排列方向,即H方向與第1波狀線14a對稱。如此,第1波狀線14a與第2波狀線14b相對於中心線C為左右對稱,如圖3中所示,半圓的圓弧17b彼此對向。另外,第1波狀線14a與第2波狀線14b是使圓弧17a、圓弧17b的端相對於所設定的線B一致來配置。 使各第1波狀線14a的圓弧17a、圓弧17b的排列方向與第2波狀線14b的圓弧17a、圓弧17b的排列方向平行,即,使中心線C彼此平行,並使第1波狀線14a與第2波狀線14b相隔事先設定的距離。在與排列方向正交的方向,即V方向上,將相向的第1波狀線14a的圓弧17a與第2波狀線14b的圓弧17a例如重疊配置。將相互配置成凸的圓弧17a彼此重疊配置。此時,將第1波狀線14a的中心線C與第2波狀線14b的中心線C在V方向上的間隔稱為間距P。The second wavy line 14b is symmetrical with respect to the arrangement direction, that is, the H direction and the first wavy line 14a. As described above, the first wavy line 14a and the second wavy line 14b are bilaterally symmetrical with respect to the center line C, and as shown in FIG. 3, the semicircular arcs 17b face each other. Further, the first wavy line 14a and the second wavy line 14b are arranged such that the ends of the circular arc 17a and the circular arc 17b coincide with the set line B. The arrangement direction of the circular arc 17a and the circular arc 17b of each of the first wavy lines 14a is parallel to the arrangement direction of the circular arc 17a and the circular arc 17b of the second wavy line 14b, that is, the center line C is parallel to each other, and The first wavy line 14a and the second wavy line 14b are separated by a predetermined distance. The arc 17a of the opposing first wavy line 14a and the arc 17a of the second wavy line 14b are placed, for example, in a direction orthogonal to the arrangement direction, that is, in the V direction. The arcs 17a arranged to be convex to each other are arranged to overlap each other. At this time, the interval between the center line C of the first wavy line 14a and the center line C of the second wavy line 14b in the V direction is referred to as a pitch P.
如圖3中所示,形成由半圓的圓弧17a所圍成的重疊區域22。將相互的半圓的圓弧17a重疊的點稱為交點23。由相互配置成凹的第1波狀線14a的圓弧17b與第2波狀線14b的圓弧17b構成開口部20。於該開口部20中包含重疊區域22。再者。作為產生重疊區域22的條件,根據第1波狀線14a與第2波狀線14b的幾何學的關係,間距P<圓弧的直徑Da,且構成開口部20的條件為P≦Da。此處,當P=Da時,第1波狀線14a與第2波狀線14b如圖7中所示般接觸,因此區域22作為接點而存在,並包含於本發明中。 於圖3中所示的導電性膜10中,在多個各第1波狀線14a與多個第2波狀線14b使中心線C平行的狀態下,以第1波狀線14a、第2波狀線14b、第1波狀線14a、第2波狀線14b的方式交替地於V方向上以間距P對向的第1波狀線14a與第2波狀線14b將相互配置成凸的圓弧彼此例如重疊配置。第1波狀線14a與第2波狀線14b只要如圖7中所示般至少接觸即可,未必需要如圖3中所示般重疊。As shown in FIG. 3, an overlap region 22 surrounded by a semicircular arc 17a is formed. A point at which the mutually semicircular arcs 17a overlap each other is referred to as an intersection point 23. The opening portion 20 is formed by an arc 17b of the first wavy line 14a that is disposed to be concave from each other and an arc 17b of the second wavy line 14b. The opening portion 22 is included in the opening portion 20. Again. As a condition for generating the overlapping region 22, the pitch P<the diameter Da of the circular arc and the condition constituting the opening 20 are P≦Da according to the geometric relationship between the first wavy line 14a and the second wavy line 14b. Here, when P = Da, the first wavy line 14a and the second wavy line 14b are in contact as shown in Fig. 7, and therefore the region 22 exists as a contact and is included in the present invention. In the conductive film 10 shown in FIG. 3, in a state in which the plurality of first wavy lines 14a and the plurality of second wavy lines 14b are parallel to the center line C, the first wavy line 14a and the first wavy line 14a are used. The two wavy lines 14b, the first wavy line 14a, and the second wavy line 14b are alternately arranged such that the first wavy line 14a and the second wavy line 14b which are opposed to each other at a pitch P in the V direction are arranged to each other. The convex arcs are arranged to overlap each other, for example. The first wavy line 14a and the second wavy line 14b may be at least brought into contact as shown in Fig. 7, and do not necessarily need to overlap as shown in Fig. 3.
此處,將重疊區域22的排列角度f設為穿過多個重疊區域22的中心的線C1 與平行於H方向的線,即中心線C所形成的角度。穿過多個重疊區域22的中心的線C2 與中心線C所形成的角度亦成為排列角度f。多個重疊區域22的排列角度f可採用多個方向。因此,以絕對值來規定排列角度f。排列角度f變成|tanf|=(P/Da),亦表示成|f|=tan-1 (P/Da)。因此,藉由改變圓弧的直徑Da、及第1波狀線14a與第2波狀線14b的間距P,可改變重疊區域22的排列角度f。Here, the arrangement angle f of the overlapping region 22 is set to an angle formed by the line C 1 passing through the center of the plurality of overlapping regions 22 and the line parallel to the H direction, that is, the center line C. The angle formed by the line C 2 passing through the center of the plurality of overlapping regions 22 and the center line C also becomes the arrangement angle f. The arrangement angle f of the plurality of overlapping regions 22 may take a plurality of directions. Therefore, the arrangement angle f is defined by an absolute value. The arrangement angle f becomes |tanf|=(P/Da), which is also expressed as |f|=tan -1 (P/Da). Therefore, by changing the diameter Da of the circular arc and the pitch P between the first wavy line 14a and the second wavy line 14b, the arrangement angle f of the overlapping region 22 can be changed.
直徑Da較佳為1 μm~1000 μm。 間距P較佳為1 μm~1000 μm。 若直徑Da超過1000 μm,則不論形狀均可看見斑點,故欠佳。另外,若將第1波狀線14a的圓弧17b與中心線C相交的交點21a、與第2波狀線14b的圓弧17b與中心線C相交的交點21b的距離設為Pc,則只要距離Pc為150 μm以下,便難以視認圖案配線14的第1波狀線14a及第2波狀線14b,故較佳。另一方面,當距離Pc短時,有時開口面積變小、透過率變低,或有時亦產生霧度,因此距離Pc較佳為50 μm以上。 另外,對向的第1波狀線14a與第2波狀線14b使相互配置成凸的圓弧彼此至少接觸來配置,但接觸的條件為P≦Da。The diameter Da is preferably from 1 μm to 1000 μm. The pitch P is preferably from 1 μm to 1000 μm. If the diameter Da exceeds 1000 μm, the spot can be seen regardless of the shape, which is not preferable. In addition, when the distance 21a at which the arc 17b of the first wavy line 14a intersects the center line C and the intersection 21b where the arc 17b of the second wavy line 14b intersects the center line C is Pc, When the distance Pc is 150 μm or less, it is difficult to visually recognize the first wavy line 14a and the second wavy line 14b of the pattern wiring 14, which is preferable. On the other hand, when the distance Pc is short, the opening area may become small, the transmittance may become low, or haze may occur. Therefore, the distance Pc is preferably 50 μm or more. Further, the opposing first wavy line 14a and the second wavy line 14b are disposed such that the arcs that are arranged to be convex at least are placed in contact with each other, but the condition of the contact is P≦Da.
於圖2中所示的導電性膜10中,將圖2中所示的圖案配線14的一部分於V方向上重疊排列來配置,即,如所述般將無直線部分的第1波狀線14a與第2波狀線14b的一部分於V方向上交替地重疊來配置,藉此即便由金屬或合金等導線性材料來構成第1波狀線14a與第2波狀線14b,亦可抑制所述斑點的產生。In the conductive film 10 shown in FIG. 2, a part of the pattern wiring 14 shown in FIG. 2 is arranged in an overlapping manner in the V direction, that is, the first wavy line having no straight portion as described above. 14a and a part of the second wavy line 14b are alternately arranged in the V direction, whereby the first wavy line 14a and the second wavy line 14b can be suppressed even if the first wavy line 14a and the second wavy line 14b are formed of a conductive material such as a metal or an alloy. The production of the spots.
導電性膜10例如為圖8中所示的構成。如圖8中所示,於基板12的表面12a上形成有第1波狀線14a與第2波狀線14b,而設置圖案配線14。於圖案配線14上經由透明的接著層16而設置有保護層18。The conductive film 10 is, for example, a configuration shown in FIG. As shown in FIG. 8, the first wavy line 14a and the second wavy line 14b are formed on the surface 12a of the substrate 12, and the pattern wiring 14 is provided. A protective layer 18 is provided on the pattern wiring 14 via the transparent adhesive layer 16.
基板12是支撐第1波狀線14a及第2波狀線14b者,例如包含電絕緣材料。另外,基板12例如為透明的基板。因此,基板12例如可使用塑膠膜、塑膠板、玻璃板等。塑膠膜及塑膠板例如包含聚對苯二甲酸乙二酯(Polyethylene terephthalate,PET)、聚萘二甲酸乙二酯(Polyethylene naphthalate,PEN)等聚酯類,聚乙烯(Polyethylene,PE)、聚丙烯(Polypropylene,PP)、聚苯乙烯、乙烯-乙酸乙烯酯(Ethylene Vinyl Acetate,EVA)、環烯烴聚合物(Cycloolefin Polymer,COP)、環烯烴共聚物(Cycloolefin Copolymer,COC)等聚烯烴類,乙烯基系樹脂,此外,包含聚碳酸酯(Polycarbonate,PC)、聚醯胺、聚醯亞胺、丙烯酸樹脂、三乙醯纖維素(Triacetyl Cellulose,TAC)等。就透光性、熱收縮性、及加工性等的觀點而言,較佳為包含聚對苯二甲酸乙二酯(PET),環烯烴聚合物(COP)、環烯烴共聚物(COC)等聚烯烴類。就密接性、耐損傷性及操作性的觀點而言,亦可於基板12上積層易接著層,亦可積層易接著層與硬塗層。The substrate 12 is a member that supports the first wavy line 14a and the second wavy line 14b, and includes, for example, an electrically insulating material. Further, the substrate 12 is, for example, a transparent substrate. Therefore, for the substrate 12, for example, a plastic film, a plastic plate, a glass plate, or the like can be used. The plastic film and the plastic plate include, for example, polyethylene terephthalate (PET), polyethylene naphthalate (PEN), polyester, polyethylene (polyethylene, PE), polypropylene. (Polypropylene, PP), Polystyrene, Ethylene Vinyl Acetate (EVA), Cycloolefin Polymer (COP), Cycloolefin Copolymer (COC) and other polyolefins, ethylene The base resin further includes polycarbonate (Polycarbonate, PC), polyamine, polyimide, acrylic resin, triacetyl cellulose (TAC), and the like. From the viewpoints of light transmittance, heat shrinkability, and processability, etc., it is preferable to contain polyethylene terephthalate (PET), cycloolefin polymer (COP), cyclic olefin copolymer (COC), or the like. Polyolefins. From the viewpoint of adhesion, damage resistance, and workability, an easy-to-adhere layer may be laminated on the substrate 12, and an easy-to-attach layer and a hard coat layer may be laminated.
作為基板12,亦可使用實施了大氣壓電漿處理、電暈放電處理、及紫外線照射處理中的至少一種處理的經處理支撐體。藉由實施所述處理,而將OH基等親水性基導入至經處理支撐體表面,第1波狀線14a及第2波狀線14b的密接性進一步提昇。所述處理之中,就第1波狀線14a及第2波狀線14b的密接性進一步提昇的觀點而言,較佳為大氣壓電漿處理。As the substrate 12, a processed support subjected to at least one of atmospheric piezoelectric slurry treatment, corona discharge treatment, and ultraviolet irradiation treatment may be used. By performing the above treatment, a hydrophilic group such as an OH group is introduced onto the surface of the treated support, and the adhesion between the first wavy line 14a and the second wavy line 14b is further improved. Among the above-described processes, from the viewpoint of further improving the adhesion between the first wavy line 14a and the second wavy line 14b, atmospheric piezoelectric slurry treatment is preferred.
導電性細線15是包含導電性材料者,例如包含金屬、合金或化合物。導電性細線15可適宜利用通常用作導體者,其組成並無特別限定。導電性細線15例如由金(Au)、銀(Ag)、銅(Cu)、鎳(Ni)、鈦(Ti)、鈀(Pd)、鉑(Pt)、鋁(Al)、鎢(W)或鉬(Mo)形成。另外,可包含該些的氧化物(O)、氮化物(N)、磷化物(P)或硫化物(S),亦可為該些的合金。導電性細線15可包含在金(Au)、銀(Ag)或銅(Cu)中進而含有黏合劑者,其亦包含於導電性細線15中。導電性細線15藉由含有黏合劑,而容易進行彎曲加工、且耐彎曲性提昇。作為黏合劑,可適宜使用用於導電性膜的配線者,例如可使用日本專利特開2013-149236號公報中所記載者。導電性細線15於包含金屬或合金的情況下為金屬細線。The conductive thin wire 15 is a material containing a conductive material, and includes, for example, a metal, an alloy, or a compound. The conductive thin wire 15 can be suitably used as a conductor, and the composition thereof is not particularly limited. The conductive thin wire 15 is made of, for example, gold (Au), silver (Ag), copper (Cu), nickel (Ni), titanium (Ti), palladium (Pd), platinum (Pt), aluminum (Al), or tungsten (W). Or molybdenum (Mo) is formed. Further, these oxides (O), nitrides (N), phosphides (P) or sulfides (S) may be contained, and these alloys may also be included. The conductive thin wire 15 may be contained in gold (Au), silver (Ag), or copper (Cu) and further contains a binder, and is also contained in the conductive thin wire 15. The conductive thin wire 15 is easily bent and has improved bending resistance by containing a binder. As the binder, a wiring for a conductive film can be suitably used, and for example, those described in Japanese Laid-Open Patent Publication No. 2013-149236 can be used. The conductive thin wire 15 is a thin metal wire in the case of containing a metal or an alloy.
接著層16例如可使用被稱為光學透明膠(Optically Clear Adhesive,OCA)的光學透明的黏著劑、或被稱為光學透明樹脂(Optically Clear Resin,OCR)的紫外線硬化樹脂等光學透明的樹脂。 保護層18是用以保護第1波狀線14a及第2波狀線14b者。保護層18的基材並無特別限定。例如可使用:玻璃、聚碳酸酯(PC)、聚對苯二甲酸乙二酯(PET)、丙烯酸樹脂(聚甲基丙烯酸甲酯(Polymethylmethacrylate,PMMA))等。保護層18可與基板12同樣地在表面積層有易接著層,亦可積層有易接著層與硬塗層。Next, for example, an optically transparent resin called Optical Clear Clear Adhesive (OCA) or an optically transparent resin such as an ultraviolet curable resin called Optically Clear Resin (OCR) can be used. The protective layer 18 is for protecting the first wavy line 14a and the second wavy line 14b. The substrate of the protective layer 18 is not particularly limited. For example, glass, polycarbonate (PC), polyethylene terephthalate (PET), acrylic resin (polymethylmethacrylate (PMMA)), or the like can be used. The protective layer 18 may have an easy-to-adhere layer on the surface layer as in the case of the substrate 12, or may have an easy-adhesion layer and a hard coat layer.
圖2中所示的導電性膜10是具有一個導電性片體11者,但並不限定於此,亦可積層多個導電性片體來作為導電性膜。 圖9是表示本發明的實施形態的導電性膜的構成的示意平面圖,圖10是表示本發明的實施形態的導電性膜的構成的示意平面圖,圖11是表示本發明的實施形態的導電性膜的構成的其他例的示意平面圖。 於此情況下,準備圖9中所示的導電性片體11a與圖10中所示的導電性片體11b。圖9的導電性片體11a與圖10中所示的導電性片體11b的構成與圖2中所示的導電性片體11相同,因此省略其詳細的說明。The conductive film 10 shown in FIG. 2 is one having one conductive sheet 11, but the invention is not limited thereto, and a plurality of conductive sheets may be laminated as a conductive film. FIG. 9 is a schematic plan view showing a configuration of a conductive film according to an embodiment of the present invention, FIG. 10 is a schematic plan view showing a configuration of a conductive film according to an embodiment of the present invention, and FIG. 11 is a view showing conductivity of an embodiment of the present invention. A schematic plan view of another example of the constitution of the film. In this case, the conductive sheet 11a shown in Fig. 9 and the conductive sheet 11b shown in Fig. 10 are prepared. The configuration of the conductive sheet 11a of FIG. 9 and the conductive sheet 11b shown in FIG. 10 is the same as that of the conductive sheet 11 shown in FIG. 2, and thus detailed description thereof will be omitted.
使第1波狀線14a的排列方向,即H方向一致來將圖9中所示的導電性片體11a與圖10中所示的導電性片體11b重疊,而獲得圖11中所示的導電性膜10a。於該導電性膜10a中,亦可與圖2中所示的導電性膜10同樣地抑制所述斑點的產生。 當如圖11中所示的導電性膜10a般,將導電性片體11a與導電性片體11b積層時,第1波狀線14a的中心線C彼此變得平行,因此導電性片體11a、導電性片體11b的第1波狀線14a的中心線C彼此不相交,於此情況下,將積層角度設為0°。The conductive sheet body 11a shown in FIG. 9 is overlapped with the conductive sheet body 11b shown in FIG. 10 by aligning the arrangement direction of the first wavy lines 14a, that is, the H direction, thereby obtaining the one shown in FIG. Conductive film 10a. In the conductive film 10a, the generation of the spots can be suppressed similarly to the conductive film 10 shown in Fig. 2 . When the conductive sheet 11a and the conductive sheet 11b are laminated as in the conductive film 10a as shown in FIG. 11, the center line C of the first wavy line 14a is parallel to each other, and thus the conductive sheet 11a is formed. The center line C of the first wavy line 14a of the conductive sheet 11b does not intersect each other. In this case, the laminated angle is set to 0°.
重疊時的圖9中所示的導電性片體11a與圖10中所示的導電性片體11b的方向就面內的透過率的均勻性的觀點而言,較佳為使圖9中所示的導電性片體11a與圖10中所示的導電性片體11b的第1波狀線14a的排列方向一致,但並無特別限定。例如,如圖12中所示,亦可為使圖9中所示的導電性片體11a的第1波狀線14a的排列方向與圖10中所示的導電性片體11b的第1波狀線14a的排列方向移動而正交後進行積層而成的導電性膜10b。當如圖12中所示般進行積層時,導電性片體11a的第1波狀線14a的中心線C與導電性片體11b的第1波狀線14a的中心線C所形成的角度成為90°,因此將積層角度稱為90°。From the viewpoint of the uniformity of the transmittance in the plane of the conductive sheet 11a shown in FIG. 9 and the direction of the conductive sheet 11b shown in FIG. 10, it is preferable to use FIG. The conductive sheet 11a shown has the same arrangement direction as the first wavy line 14a of the conductive sheet 11b shown in FIG. 10, but is not particularly limited. For example, as shown in FIG. 12, the first wave of the first wavy line 14a of the conductive sheet 11a shown in FIG. 9 and the first wave of the conductive sheet 11b shown in FIG. 10 may be used. The conductive film 10b in which the alignment direction of the line 14a is shifted and orthogonal to each other is performed. When laminating as shown in FIG. 12, the angle formed by the center line C of the first wavy line 14a of the conductive sheet 11a and the center line C of the first wavy line 14a of the conductive sheet 11b becomes 90°, so the laminate angle is called 90°.
另外,如圖13中所示,亦可為使圖9中所示的導電性片體11a的第1波狀線14a的排列方向與圖10中所示的導電性片體11b的第1波狀線14a的排列方向移動而成為45°後進行積層而成的導電性膜10c。當如圖13中所示般進行積層時,導電性片體11a的第1波狀線14a的中心線C與導電性片體11b的第1波狀線14a的中心線C所形成的角度成為45°,因此將積層角度稱為45°。 圖12中所示的導電性膜10b及圖13中所示的導電性膜10c均可與圖2中所示的導電性膜10同樣地抑制所述斑點的產生。 再者,雖然以積層兩層的導電性片體為例進行了說明,但積層數只要是多層即可,因此導電性片體的積層數並不限定於兩層,亦可為三層以上。Further, as shown in FIG. 13, the arrangement direction of the first wavy line 14a of the conductive sheet 11a shown in FIG. 9 and the first wave of the conductive sheet 11b shown in FIG. 10 may be used. The conductive film 10c which is formed by laminating the line 14a in the direction in which the lines 14a are arranged is 45°. When laminating as shown in FIG. 13, the angle formed by the center line C of the first wavy line 14a of the conductive sheet 11a and the center line C of the first wavy line 14a of the conductive sheet 11b becomes 45°, so the laminate angle is called 45°. The conductive film 10b shown in FIG. 12 and the conductive film 10c shown in FIG. 13 can suppress the generation of the spots similarly to the conductive film 10 shown in FIG. In addition, although the conductive sheet of the two layers is described as an example, the number of the layers may be plural. Therefore, the number of layers of the conductive sheet is not limited to two, and may be three or more.
繼而,對導電性膜10的製造方法進行說明。與圖2中所示的導電性膜10相比,圖11中所示的導電性膜10a、圖12中所示的導電性膜10b及圖13中所示的導電性膜10c的不同在於進行積層的方面、及積層方法,但導電性片體11a、導電性片體11b的構成為與導電性片體11相同的構成。因此,以圖2中所示的導電性膜10為例來說明製造方法。Next, a method of manufacturing the conductive film 10 will be described. The difference between the conductive film 10a shown in FIG. 11, the conductive film 10b shown in FIG. 12, and the conductive film 10c shown in FIG. 13 is different from that of the conductive film 10 shown in FIG. The conductive sheet body 11a and the conductive sheet body 11b have the same configuration as that of the conductive sheet body 11 in terms of the laminated layer and the laminated method. Therefore, the manufacturing method will be described by taking the conductive film 10 shown in FIG. 2 as an example.
導電性膜10只要可於基板12上形成圖案配線14,則其製造方法並無特別限定,例如可適宜利用鍍敷法、銀鹽法、蒸鍍法及印刷法等。 對利用鍍敷法的圖案配線14的形成方法進行說明。例如,圖案配線14可包含藉由對無電解鍍敷基底層進行無電解鍍敷而形成於基底層上的金屬鍍敷膜。於此情況下,藉由如下方式來形成:將至少含有金屬微粒子的觸媒油墨於基材上形成為圖案狀後,使基材浸漬於無電解鍍浴中,而形成金屬鍍敷膜。更具體而言,可利用日本專利特開2014-159620號公報中所記載的金屬被膜基材的製造方法。另外,藉由如下方式來形成:將至少具有可與金屬觸媒前驅物進行相互作用的官能基的樹脂組成物於基材上形成為圖案狀後,賦予觸媒或觸媒前驅物,並使基材浸漬於無電解鍍浴中,而形成金屬鍍敷膜。更具體而言,可應用日本專利特開2012-144761號公報中所記載的金屬被膜基材的製造方法。The conductive film 10 is not particularly limited as long as it can form the pattern wiring 14 on the substrate 12, and for example, a plating method, a silver salt method, a vapor deposition method, a printing method, or the like can be suitably used. A method of forming the pattern wiring 14 by the plating method will be described. For example, the pattern wiring 14 may include a metal plating film formed on the underlayer by electroless plating of the electroless plating underlayer. In this case, it is formed by forming a catalyst ink containing at least metal fine particles into a pattern on a substrate, and then immersing the substrate in an electroless plating bath to form a metal plating film. More specifically, a method for producing a metal film substrate described in JP-A-2014-159620 can be used. Further, a resin composition having at least a functional group capable of interacting with a metal catalyst precursor is formed into a pattern on a substrate, and then a catalyst or a catalyst precursor is supplied and The substrate is immersed in an electroless plating bath to form a metal plating film. More specifically, a method for producing a metal film substrate described in JP-A-2012-144761 can be applied.
另外,對利用銀鹽法的圖案配線14的形成方法進行說明。首先,使用成為圖案配線14的曝光圖案對含有鹵化銀的銀鹽乳劑層實施曝光處理,其後進行顯影處理,藉此可形成圖案配線14。更具體而言,可利用日本專利特開2015-22397號公報中所記載的金屬細線的製造方法。 另外,對利用蒸鍍法的圖案配線14的形成方法進行說明。首先,藉由蒸鍍來形成銅箔層,並利用光微影法而自銅箔層形成銅配線,藉此可形成圖案配線14。銅箔層除蒸鍍銅箔以外,亦可利用電解銅箔。更具體而言,可利用日本專利特開2014-29614號公報中所記載的形成銅配線的步驟。 另外,對利用印刷法的圖案配線14的形成方法進行說明。首先,以與圖案配線14相同的圖案將含有導電性粉末的導電性膏塗佈於基板上,其後實施加熱處理,藉此可形成圖案配線14。使用導電性膏的圖案形成例如藉由噴墨法或網版印刷法來進行。作為導電性膏,更具體而言,可利用日本專利特開2011-28985號公報中所記載的導電性膏。Further, a method of forming the pattern wiring 14 by the silver salt method will be described. First, the silver salt emulsion layer containing silver halide is subjected to exposure treatment using an exposure pattern to be the pattern wiring 14, and then development processing is performed, whereby the pattern wiring 14 can be formed. More specifically, a method for producing a metal thin wire described in Japanese Laid-Open Patent Publication No. 2015-22397 can be used. In addition, a method of forming the pattern wiring 14 by the vapor deposition method will be described. First, a copper foil layer is formed by vapor deposition, and a copper wiring is formed from a copper foil layer by photolithography, whereby the pattern wiring 14 can be formed. In addition to the vapor-deposited copper foil, the copper foil layer can also use an electrolytic copper foil. More specifically, the step of forming a copper wiring described in Japanese Laid-Open Patent Publication No. 2014-29614 can be used. In addition, a method of forming the pattern wiring 14 by the printing method will be described. First, a conductive paste containing a conductive powder is applied onto a substrate in the same pattern as the pattern wiring 14, and then heat treatment is performed, whereby the pattern wiring 14 can be formed. Patterning using a conductive paste is performed, for example, by an inkjet method or a screen printing method. More specifically, as the conductive paste, a conductive paste described in Japanese Laid-Open Patent Publication No. 2011-28985 can be used.
繼而,關於導電性細線15的形成,以鍍敷法為例來詳細地說明其製造方法。圖14~圖16是按步驟順序表示導電性膜的製造方法的示意剖面圖。 首先,如圖14中所示,於基板12的表面12a上形成感光性層32。 以圖案配線14的圖案照射曝光光L,而在感光性層32中形成曝光區域32a與非曝光區域32b。曝光光L並無特別限定,可為透過形成有圖案的遮罩的光,亦可為雷射光線。Next, regarding the formation of the conductive thin wires 15, a method of manufacturing the same will be described in detail by taking a plating method as an example. 14 to 16 are schematic cross-sectional views showing a method of manufacturing a conductive film in order of steps. First, as shown in FIG. 14, a photosensitive layer 32 is formed on the surface 12a of the substrate 12. The exposure light L is irradiated with the pattern of the pattern wiring 14, and the exposure region 32a and the non-exposure region 32b are formed in the photosensitive layer 32. The exposure light L is not particularly limited, and may be light that passes through the mask in which the pattern is formed, and may be laser light.
繼而,將感光性層(被鍍敷層形成用層)的非曝光區域去除。 藉由實施本步驟,而將被鍍敷層形成用層中的非曝光區域去除,更具體而言,針對圖14中所示的感光性層32來去除非曝光區域32b,如圖15中所示,可獲得具有第1圖案狀被鍍敷層34的含圖案狀被鍍敷層的積層體36。 所述去除方法並無特別限定,根據被鍍敷層形成用層中所含有的化合物而適宜選擇最佳的方法,通常可列舉使溶解所述化合物的溶劑接觸被鍍敷層形成用層的方法。 更具體而言,可列舉將鹼性溶液用作顯影液的方法。當使用鹼性溶液來去除非曝光區域時,可列舉將鹼性溶液呈噴淋狀地噴霧至實施了照射步驟的積層體上的方法、及使實施了照射步驟的積層體浸漬於鹼性溶液中的方法、以及將鹼性溶液塗佈於該被鍍敷層形成用層上的方法等,但較佳為呈噴淋狀地噴霧的方法。於呈噴淋狀地噴霧的方法的情況下,作為噴霧時間,就生產性·作業性等的觀點而言,較佳為1分鐘~3分鐘左右。Then, the non-exposed area of the photosensitive layer (layer for forming a layer to be plated) is removed. By performing this step, the non-exposed areas in the layer for forming a plating layer are removed, and more specifically, the non-exposed areas 32b are removed for the photosensitive layer 32 shown in FIG. 14, as shown in FIG. A layered body 36 having a patterned plated layer having the first patterned coating layer 34 can be obtained. The removal method is not particularly limited, and a method suitable for selecting a compound contained in the layer for forming a layer to be plated is preferably selected, and a method of contacting a solvent for dissolving the compound with a layer for forming a layer to be plated is generally used. . More specifically, a method of using an alkaline solution as a developing solution can be cited. When an alkali solution is used to remove a non-exposed area, a method of spraying an alkaline solution onto a layered body subjected to an irradiation step and spraying the layered body subjected to the irradiation step in an alkaline solution may be mentioned. The method and the method of applying an alkaline solution to the layer for forming a layer to be plated, etc., are preferably a method of spraying in a shower form. In the case of the spray-spraying method, the spray time is preferably from about 1 minute to about 3 minutes from the viewpoint of productivity, workability, and the like.
藉由所述程序而獲得圖15中所示的所述含圖案狀被鍍敷層的積層體36。 該含圖案狀被鍍敷層的積層體36可適宜地應用於形成金屬膜(導電膜)的用途。即,對含圖案狀被鍍敷層的積層體36中的圖案狀被鍍敷層賦予鍍敷觸媒或其前驅物,進而實施鍍敷處理,藉此可於圖案狀被鍍敷層上形成金屬層38。即,藉由控制圖案狀被鍍敷層的形狀,而可控制金屬層的圖案。另外,藉由使用此種圖案狀被鍍敷層,金屬層對於基板的密接性優異。 以下,對形成所述金屬層的步驟(金屬層形成步驟)進行詳述。The layered body 36 including the patterned plated layer shown in Fig. 15 is obtained by the above procedure. The layered body 36 containing the patterned layer to be plated can be suitably used for the purpose of forming a metal film (conductive film). In other words, a plating catalyst or a precursor thereof is applied to the pattern-shaped layer to be plated in the layered body 36 including the patterned layer to be plated, and further a plating treatment is performed to form a pattern-shaped layer to be plated. Metal layer 38. That is, the pattern of the metal layer can be controlled by controlling the shape of the pattern-shaped layer to be plated. Further, by using such a pattern-like layer to be plated, the metal layer is excellent in adhesion to the substrate. Hereinafter, the step of forming the metal layer (metal layer forming step) will be described in detail.
<金屬層形成步驟> 本步驟是對含圖案狀被鍍敷層的積層體中的圖案狀被鍍敷層賦予鍍敷觸媒或其前驅物,並對賦予有鍍敷觸媒或其前驅物的圖案狀被鍍敷層進行鍍敷處理,而於圖案狀被鍍敷層上形成金屬層的步驟。更具體而言,藉由實施本步驟,如圖16中所示,於第1圖案狀被鍍敷層34上形成金屬層38。再者,於第1圖案狀被鍍敷層34上形成有金屬層38者為導電性細線15。<Metal Layer Forming Step> This step is to apply a plating catalyst or a precursor to the pattern-shaped layer to be plated in the layered body including the patterned layer to be plated, and to provide a plating catalyst or a precursor thereof. The pattern-like layer is subjected to a plating treatment to form a metal layer on the patterned layer to be plated. More specifically, by performing this step, as shown in FIG. 16, the metal layer 38 is formed on the first patterned plated layer 34. Further, the metal thin layer 38 is formed on the first patterned-shaped plated layer 34 as the conductive thin wire 15.
再者,於圖16中,表示在第1圖案狀被鍍敷層34的與基板12的接觸面以外的表面上配置金屬層38的形態。即,以覆蓋圖案狀被鍍敷層的與基板的接觸面以外的表面的方式配置金屬層,但並不限定於該形態,亦可為僅於第1圖案狀被鍍敷層34的上表面配置金屬層38的形態。 亦將在第1圖案狀被鍍敷層34的與基板12的接觸面以外的表面上配置有金屬層38者稱為導電性細線15。In addition, FIG. 16 shows a form in which the metal layer 38 is placed on a surface other than the contact surface of the first pattern-shaped plated layer 34 with the substrate 12. In other words, the metal layer is disposed so as to cover the surface of the patterned plated layer other than the contact surface of the substrate. However, the present invention is not limited to this embodiment, and may be only the upper surface of the first pattern-like plated layer 34. The form of the metal layer 38 is configured. The metal layer 38 is also disposed on the surface of the first patterned-shaped plated layer 34 other than the contact surface with the substrate 12, and is referred to as a conductive thin wire 15.
以下,將對圖案狀被鍍敷層賦予鍍敷觸媒或其前驅物的步驟(步驟X)、及對賦予有鍍敷觸媒或其前驅物的圖案狀被鍍敷層進行鍍敷處理的步驟(步驟Y)分開來進行說明。Hereinafter, the step of applying a plating catalyst or a precursor thereof to the patterned plating layer (step X), and plating the patterned plating layer to which the plating catalyst or its precursor is applied are performed. The steps (step Y) are separated for explanation.
(步驟X:鍍敷觸媒賦予步驟) 於本步驟中,首先對圖案狀被鍍敷層賦予鍍敷觸媒或其前驅物。源自所述化合物的相互作用性基對應於其功能,而附著(吸附)所賦予的鍍敷觸媒或其前驅物。更具體而言,於圖案狀被鍍敷層中及圖案狀被鍍敷層表面上賦予鍍敷觸媒或其前驅物。 鍍敷觸媒或其前驅物是作為鍍敷處理的觸媒或電極而發揮功能者。因此,所使用的鍍敷觸媒或其前驅物的種類可根據鍍敷處理的種類而適宜決定。 再者,所使用的鍍敷觸媒或其前驅物較佳為無電解鍍敷觸媒或其前驅物。以下,主要對無電解鍍敷觸媒或其前驅物等進行詳述。(Step X: Plating Catalyst Giving Step) In this step, first, a plating catalyst or a precursor thereof is applied to the patterned coating layer. The interactive group derived from the compound corresponds to its function, and adheres (adsorbs) the plating catalyst or its precursor imparted thereto. More specifically, a plating catalyst or a precursor thereof is applied to the surface of the pattern-formed layer and the surface of the pattern-coated layer. The plating catalyst or its precursor is a function as a catalyst or electrode for plating treatment. Therefore, the type of the plating catalyst or its precursor to be used can be appropriately determined depending on the type of the plating treatment. Further, the plating catalyst or precursor thereof used is preferably an electroless plating catalyst or a precursor thereof. Hereinafter, the electroless plating catalyst or its precursor will be mainly described in detail.
本步驟中所使用的無電解鍍敷觸媒只要是成為無電解鍍敷時的活性核者,則可使用任何無電解鍍敷觸媒,具體而言,可列舉具有自我觸媒還原反應的觸媒性能的金屬(作為離子化傾向低於Ni的可進行無電解鍍敷的金屬而為人所知者)等。具體而言,可列舉:Pd、Ag、Cu、Ni、Pt、Au、Co等。其中,就觸媒性能高而言,特佳為Ag、Pd、Pt、Cu。 作為該無電解鍍敷觸媒,亦可使用金屬膠體。 本步驟中所使用的無電解鍍敷觸媒前驅物只要是可藉由化學反應而成為無電解鍍敷觸媒者,則可無特別限制地使用。主要可使用作為所述無電解鍍敷觸媒所列舉的金屬的金屬離子。The electroless plating catalyst used in this step may be any electroless plating catalyst as long as it is an active core at the time of electroless plating, and specifically, a touch having a self-catalytic reduction reaction A metal having a dielectric property (known as a metal capable of electroless plating having a lower ionization tendency than Ni) or the like. Specifically, Pd, Ag, Cu, Ni, Pt, Au, Co, etc. are mentioned. Among them, in terms of high catalyst performance, it is particularly preferable to be Ag, Pd, Pt, and Cu. As the electroless plating catalyst, a metal colloid can also be used. The electroless plating catalyst precursor used in this step can be used without any particular limitation as long as it can be an electroless plating catalyst by a chemical reaction. Metal ions which are metals exemplified as the electroless plating catalyst can be mainly used.
作為對圖案狀被鍍敷層賦予鍍敷觸媒或其前驅物的方法,例如只要製備使鍍敷觸媒或其前驅物分散或溶解於適當的溶劑中而成的溶液,並將該溶液塗佈於圖案狀被鍍敷層上、或使形成有圖案狀被鍍敷層的積層體浸漬於該溶液中即可。As a method of providing a plating catalyst or a precursor thereof to a patterned plating layer, for example, a solution obtained by dispersing or dissolving a plating catalyst or a precursor thereof in a suitable solvent is prepared, and the solution is applied. The layered body to be plated on the pattern or the layered body on which the pattern is to be plated may be immersed in the solution.
(步驟Y:鍍敷處理步驟) 繼而,對賦予有鍍敷觸媒或其前驅物的圖案狀被鍍敷層進行鍍敷處理。 鍍敷處理的方法並無特別限定,例如可列舉:無電解鍍敷處理、或電解鍍敷處理(電鍍處理)。於本步驟中,可單獨實施無電解鍍敷處理,亦可於實施無電解鍍敷處理後進而實施電解鍍敷處理。作為無電解鍍敷處理及電解鍍敷處理,可採用公知的方法。 藉由實施所述步驟,可於圖案狀被鍍敷層上形成金屬層(鍍敷層)。(Step Y: Plating Treatment Step) Next, the plating layer to be plated to which the plating catalyst or its precursor is applied is subjected to a plating treatment. The method of the plating treatment is not particularly limited, and examples thereof include electroless plating treatment or electrolytic plating treatment (electroplating treatment). In this step, the electroless plating treatment may be separately performed, or the electroless plating treatment may be performed after the electroless plating treatment. As the electroless plating treatment and the electrolytic plating treatment, a known method can be employed. By performing the above steps, a metal layer (plating layer) can be formed on the patterned layer to be plated.
繼而,對本發明的實施形態的配線進行說明。 本發明的導電性膜可藉由將圖案配線14的圓弧排列適宜切斷而形成配線。可使用所述導電性膜10來形成配線。作為配線形成的圖案的例子,可列舉以下所示的圖17、圖18、圖19、圖20及圖21者。其中,該些並不限定本發明的配線圖案。以下,對配線進行詳細說明。Next, the wiring of the embodiment of the present invention will be described. The conductive film of the present invention can be formed by appropriately cutting the circular arc of the pattern wiring 14 to form a wiring. The conductive film 10 can be used to form wiring. Examples of the pattern formed by the wiring include the following FIGS. 17, 18, 19, 20, and 21. However, these do not limit the wiring pattern of the present invention. Hereinafter, the wiring will be described in detail.
圖17是表示本發明的實施形態的配線的第1例的示意圖,圖18是表示本發明的實施形態的配線的第2例的示意圖。圖19是表示本發明的實施形態的配線的第3例的示意圖,圖20是表示本發明的實施形態的配線的第4例的示意圖。圖21是表示本發明的實施形態的配線的第5例的示意圖。再者,於圖17、圖18、圖19、圖20及圖21中,對與所述圖2及圖3中所示的導電性膜10相同的構成物標註相同的符號,並省略其詳細的說明。再者,圖17、圖18、圖19、圖20及圖21的V方向與H方向對應於圖2的V方向與H方向。另外,於圖17、圖18、圖19、圖20及圖21中,將由粗線所表示的外形線45、外形線47,及圖案配線14的第1波狀線14a與第2波狀線14b中相交的部分切斷。此處,符號42、符號42a、符號42b、符號46、符號46a、符號46b表示活線。由符號44、符號44a、符號44b、符號48所表示的區域並非活線,可削除,亦可不削除。於不削除的情況下可微細地分割。就透過率的觀點而言,較佳為不削除而作為虛擬配線來形成。17 is a schematic view showing a first example of the wiring according to the embodiment of the present invention, and FIG. 18 is a schematic view showing a second example of the wiring according to the embodiment of the present invention. 19 is a schematic view showing a third example of the wiring according to the embodiment of the present invention, and FIG. 20 is a schematic view showing a fourth example of the wiring according to the embodiment of the present invention. Fig. 21 is a schematic view showing a fifth example of the wiring of the embodiment of the present invention. In addition, in FIGS. 17, 18, 19, 20, and 21, the same components as those of the conductive film 10 shown in FIG. 2 and FIG. 3 are denoted by the same reference numerals, and the detailed description thereof is omitted. instruction of. In addition, the V direction and the H direction of FIGS. 17, 18, 19, 20, and 21 correspond to the V direction and the H direction of FIG. In addition, in FIGS. 17, 18, 19, 20, and 21, the outline line 45, the outline line 47, and the first wavy line 14a and the second wavy line of the pattern wiring 14 are shown by thick lines. The intersecting part of 14b is cut off. Here, the symbol 42, the symbol 42a, the symbol 42b, the symbol 46, the symbol 46a, and the symbol 46b indicate a live line. The area indicated by symbol 44, symbol 44a, symbol 44b, and symbol 48 is not a live line and may or may not be removed. It can be divided finely without cutting. From the viewpoint of transmittance, it is preferable to form it as dummy wiring without cutting it.
圖17中所示的配線40a是相對於V方向,即圓弧的排列方向垂直地切斷所述導電性膜10(參照圖2),而形成直線的配線者。利用外形線45將圖案配線14的第1波狀線14a與第2波狀線14b切斷,藉此形成活線42。於配線40a中活線42成為導通路徑,活線42之間的區域44成為虛擬配線。 圖18中所示的配線40b是相對於H方向,即圓弧的排列方向平行地切斷所述導電性膜10(參照圖2),而形成直線的配線者。於此情況下,亦利用外形線45將圖案配線14的第1波狀線14a與第2波狀線14b切斷,藉此形成活線42。於配線40b中活線42成為導通路徑,活線42之間的區域44成為虛擬配線。The wiring 40a shown in FIG. 17 is a wiring line that cuts the conductive film 10 (see FIG. 2) perpendicularly to the V direction, that is, the arrangement direction of the circular arc. The first wavy line 14a of the pattern wiring 14 and the second wavy line 14b are cut by the outline 45 to form the live line 42. In the wiring 40a, the live line 42 serves as a conduction path, and the region 44 between the active lines 42 serves as a dummy wiring. The wiring 40b shown in FIG. 18 is a wiring line that cuts the conductive film 10 (see FIG. 2) in parallel with respect to the H direction, that is, the arrangement direction of the circular arcs. In this case, the first wavy line 14a of the pattern wiring 14 and the second wavy line 14b are also cut by the outline 45 to form the live line 42. In the wiring 40b, the live line 42 serves as a conduction path, and the region 44 between the active lines 42 serves as a dummy wiring.
此處,對傾斜地切斷圖案配線14的第1波狀線14a與第2波狀線14b的情況進行說明。 於傾斜地切斷的情況下,進行切斷的角度由與排列方向所形成的角度γ來規定。 必須使進行切斷的角度γ與重疊區域22的排列角度f一致。即,必須滿足|γ|=|f|=tan-1 (P/Da)的條件。 再者,當在與圓弧的排列方向正交的方向、及與圓弧的排列方向平行的方向上切斷圖案配線14的第1波狀線14a與第2波狀線14b時,不受比P/Da的制約。因此,將進行切斷時的條件應用於角度γ以絕對值計超過0°、未滿90°的範圍內。 再者,可藉由如所述般改變比P/Da來改變重疊區域22的排列角度f,亦可改變進行切斷的角度γ。另外,若事先決定進行切斷的角度γ,則只要結合角度γ來設定比P/Da即可。 此處,切斷部未必需要以角度γ配列成一直線,只要藉由進行切斷而形成的活線以角度γ來切斷即可。就視認性的觀點而言,切斷部較佳為並非一直線,而自一直線偏離。Here, a case where the first wavy line 14a and the second wavy line 14b of the pattern wiring 14 are obliquely cut will be described. In the case of cutting obliquely, the angle at which the cutting is performed is defined by the angle γ formed with the arrangement direction. It is necessary to make the angle γ at which the cutting is performed coincide with the arrangement angle f of the overlapping region 22. That is, the condition of |γ|=|f|=tan -1 (P/Da) must be satisfied. In addition, when the first wavy line 14a and the second wavy line 14b of the pattern wiring 14 are cut in a direction orthogonal to the arrangement direction of the circular arc and a direction parallel to the arrangement direction of the circular arc, the first wavy line 14a and the second wavy line 14b are not More restrictive than P/Da. Therefore, the condition at the time of cutting is applied to the range in which the angle γ exceeds 0° and is less than 90° in absolute value. Further, the angle γ at which the cutting is performed can be changed by changing the arrangement angle f of the overlapping region 22 by changing the ratio P/Da as described above. Further, when the angle γ at which the cutting is performed is determined in advance, the ratio P/Da may be set in accordance with the angle γ. Here, the cut portion does not necessarily need to be arranged in a line at an angle γ, and the live line formed by the cutting may be cut at an angle γ. From the viewpoint of visibility, the cut portion is preferably not in a straight line but deviated from a straight line.
當如所述般在與圓弧的排列方向正交的方向、及與圓弧的排列方向平行的方向上切斷圖案配線14的第1波狀線14a與第2波狀線14b時,不受比P/Da的制約,因此所述圖17中所示的配線40a與圖18中所示的配線40b不受比P/Da的制約。When the first wavy line 14a and the second wavy line 14b of the pattern wiring 14 are cut in a direction orthogonal to the arrangement direction of the circular arc and a direction parallel to the arrangement direction of the circular arc as described above, The wiring 40a shown in FIG. 17 and the wiring 40b shown in FIG. 18 are not restricted by the ratio P/Da, which is restricted by the ratio P/Da.
圖19中所示的配線40c藉由利用兩個外形線45將所述導電性膜10(參照圖2)的圖案配線14的第1波狀線14a與第2波狀線14b切斷,而形成活線42a。於配線40c中活線42a成為導通路徑,活線42a之間的區域44a成為虛擬配線。另外,於配線40c中,外形線45為相對於V方向,即圓弧的排列方向垂直地前進的三角波形狀。於配線40c中,菱形形狀的多邊形的區域在與圓弧的排列方向垂直的方向上相連而形成。 活線42a的斜邊的角度γ根據以上所述,與重疊區域22的排列角度f一致而相對於圓弧的排列方向傾斜地切斷來形成。The wiring 40c shown in FIG. 19 cuts the first wavy line 14a and the second wavy line 14b of the pattern wiring 14 of the conductive film 10 (see FIG. 2) by two outline lines 45. A live line 42a is formed. In the wiring 40c, the live line 42a serves as a conduction path, and the region 44a between the active lines 42a serves as a dummy wiring. Further, in the wiring 40c, the outline 45 is a triangular wave shape that advances perpendicularly to the V direction, that is, the arrangement direction of the circular arc. In the wiring 40c, the polygonal polygonal regions are formed by being connected in a direction perpendicular to the arrangement direction of the circular arcs. The angle γ of the oblique side of the live line 42a is formed by being cut obliquely with respect to the arrangement direction of the circular arc in accordance with the arrangement angle f of the overlap region 22 as described above.
圖20中所示的配線40d藉由利用兩個外形線45將所述導電性膜10(參照圖2)的圖案配線14的第1波狀線14a與第2波狀線14b切斷,而形成活線42a。於配線40d中活線42a成為導通路徑,活線42a之間的區域44a成為虛擬配線。另外,於配線40d中,外形線45為相對於H方向,即圓弧的排列方向平行地前進的三角波形狀。於配線40d中,菱形形狀的多邊形的區域在與圓弧的排列方向平行的方向上相連而形成。 活線42a的斜邊的角度γ根據以上所述,與重疊區域22的排列角度f一致而相對於圓弧的排列方向傾斜地切斷來形成。The wiring 40d shown in FIG. 20 cuts the first wavy line 14a and the second wavy line 14b of the pattern wiring 14 of the conductive film 10 (see FIG. 2) by two outline lines 45. A live line 42a is formed. In the wiring 40d, the live line 42a serves as a conduction path, and the region 44a between the active lines 42a becomes a dummy wiring. Further, in the wiring 40d, the outline 45 is a triangular wave shape that advances in parallel with respect to the H direction, that is, the arrangement direction of the circular arc. In the wiring 40d, the polygonal polygonal regions are formed by being connected in a direction parallel to the arrangement direction of the circular arcs. The angle γ of the oblique side of the live line 42a is formed by being cut obliquely with respect to the arrangement direction of the circular arc in accordance with the arrangement angle f of the overlap region 22 as described above.
圖21中所示的配線40e是將相對於圓弧的排列方向平行的方向、垂直的方向、及傾斜的方向組合並以與圓弧的排列方向平行的方式形成多邊形的配線,進而於多邊形的內部形成有虛擬配線者。 於圖21中所示的配線40e中,利用外形線47將圖案配線14的第1波狀線14a與第2波狀線14b切斷,藉此形成活線46。活線46具有多邊形區域46a與連接多邊形區域46a的直線區域46b。於多邊形區域46a內部,外形線47所圍成的區域48成為虛擬配線。另外,未形成活線46的區域44b亦成為虛擬配線。 於配線40e中,活線46用作導體,而於多邊形區域46a與直線區域46b中通電。再者,多邊形區域46a內部的區域48因利用外形線47將第1波狀線14a與第2波狀線14b切斷而與多邊形區域46a分離,故不通電。 多邊形區域46a的外側的斜邊的角度γ與內側的斜面的角度γ亦根據以上所述,與重疊區域22的排列角度f一致而相對於圓弧的排列方向傾斜地切斷來形成。The wiring 40e shown in FIG. 21 is a wiring in which a polygonal direction is formed by combining a direction parallel to the arrangement direction of the circular arcs, a vertical direction, and a direction of inclination, and parallel to the arrangement direction of the circular arc, and further in a polygonal shape. A virtual router is formed inside. In the wiring 40e shown in FIG. 21, the first wavy line 14a of the pattern wiring 14 and the second wavy line 14b are cut by the outline 47, thereby forming the live line 46. The live line 46 has a polygonal area 46a and a linear area 46b connecting the polygonal areas 46a. Inside the polygonal region 46a, the region 48 surrounded by the outline 47 becomes a dummy wiring. Further, the region 44b where the live line 46 is not formed also becomes a dummy wiring. In the wiring 40e, the live line 46 serves as a conductor, and is energized in the polygonal area 46a and the linear area 46b. Further, the region 48 inside the polygonal region 46a is separated from the polygonal region 46a by cutting the first wavy line 14a and the second wavy line 14b by the outline 47, and thus is not energized. The angle γ of the oblique side of the outer side of the polygonal region 46a and the angle γ of the inner inclined surface are also formed by being cut obliquely with respect to the arrangement direction of the circular arc in accordance with the arrangement angle f of the overlapping region 22 as described above.
如上所述,可使用本發明的導電性膜來形成配線,該配線例如除用於使電流通的導電配線以外,亦可用於天線、及觸控面板感測器。另外,使用本發明的導電性膜的配線可與所述導電性膜10同樣地抑制所述斑點的產生。As described above, the wiring can be formed using the conductive film of the present invention, and the wiring can be used for an antenna and a touch panel sensor, for example, in addition to a conductive wiring for passing a current. Further, the wiring using the conductive film of the present invention can suppress the generation of the spots similarly to the conductive film 10.
繼而,對本發明的實施形態的觸控面板感測器進行說明。 圖22是表示本發明的實施形態的觸控面板感測器的示意圖。圖23~圖25及圖26~圖28是圖22的本發明的實施形態的觸控面板感測器的示意剖面圖。 再者,於圖22以及圖23~圖25及圖26~圖28中所示的觸控面板感測器50中,對與所述圖2、圖3及圖8中所示的導電性膜10相同的構成物標註相同的符號,並省略其詳細的說明。Next, a touch panel sensor according to an embodiment of the present invention will be described. Fig. 22 is a schematic view showing a touch panel sensor according to an embodiment of the present invention. 23 to 25 and 26 to 28 are schematic cross-sectional views of the touch panel sensor of the embodiment of the present invention shown in Fig. 22. Furthermore, in the touch panel sensor 50 shown in FIG. 22 and FIGS. 23 to 25 and FIGS. 26 to 28, the conductive film shown in FIGS. 2, 3, and 8 is applied. The same components are denoted by the same reference numerals, and detailed description thereof will be omitted.
圖22中所示的觸控面板感測器50與液晶顯示裝置等顯示裝置一同使用,並設置於顯示裝置上。因此,為了識別由顯示裝置所顯示的圖像而為透明。顯示裝置只要可於畫面上顯示包含動畫等在內的規定的圖像,則並無特別限定,除所述液晶顯示裝置以外,例如可使用有機EL(Organic Electro Luminescence)顯示裝置及電子紙等。The touch panel sensor 50 shown in FIG. 22 is used together with a display device such as a liquid crystal display device, and is disposed on the display device. Therefore, it is transparent in order to recognize the image displayed by the display device. The display device is not particularly limited as long as a predetermined image including an animation or the like is displayed on the screen, and an organic EL (Organic Electro Luminescence) display device, electronic paper, or the like can be used in addition to the liquid crystal display device.
觸控面板感測器50具有觸控面板部52與控制器54,觸控面板部52與控制器54例如藉由連接配線55來連接。對於觸控面板感測器50的觸控面板部52的接觸是藉由控制器54來檢測於觸控面板感測器50中靜電電容因手指等的接觸而產生變化的位置。控制器54是觸控面板感測器50的外部機器,例如包含用於靜電電容式的觸控面板的位置檢測的公知者。The touch panel sensor 50 has a touch panel portion 52 and a controller 54, and the touch panel portion 52 and the controller 54 are connected by, for example, a connection wiring 55. The contact of the touch panel portion 52 of the touch panel sensor 50 is detected by the controller 54 at a position where the electrostatic capacitance in the touch panel sensor 50 changes due to contact of a finger or the like. The controller 54 is an external device of the touch panel sensor 50, such as a well-known person including position detection for a capacitive touch panel.
圖22中所示的X方向與Y方向正交。於觸控面板感測器50的觸控面板部52中,在Y方向上設置間隔來配置多個在X方向上延伸的第1導電層60。另外,在X方向上設置間隔來配置多個在Y方向上延伸的第2導電層70。 各第1導電層60在其一端與第1端子部62電性連接。進而,各第1端子部62與第1配線64電性連接。各第1配線64匯集於連接器部66中,並藉由連接配線55而連接於控制器54上。 各第2導電層70在其一端與第2端子部72電性連接。各第2端子部72與導電性的第2配線74電性連接。各第2配線74匯集於連接器部76中,並藉由連接配線55而連接於控制器54上。端子部可不僅配置於導電層的一端,而且配置於兩端並與配線電性連接後匯集於個連接器部中。The X direction shown in Fig. 22 is orthogonal to the Y direction. In the touch panel portion 52 of the touch panel sensor 50, a plurality of first conductive layers 60 extending in the X direction are disposed with a space in the Y direction. Further, a plurality of second conductive layers 70 extending in the Y direction are disposed with a space in the X direction. Each of the first conductive layers 60 is electrically connected to the first terminal portion 62 at one end thereof. Further, each of the first terminal portions 62 is electrically connected to the first wiring 64. Each of the first wires 64 is collected in the connector portion 66, and is connected to the controller 54 by the connection wiring 55. Each of the second conductive layers 70 is electrically connected to the second terminal portion 72 at one end thereof. Each of the second terminal portions 72 is electrically connected to the conductive second wiring 74. Each of the second wires 74 is collected in the connector portion 76, and is connected to the controller 54 by the connection wiring 55. The terminal portion may be disposed not only at one end of the conductive layer but also at both ends and electrically connected to the wiring, and then collected in the connector portion.
第1導電層60及第2導電層70均為作為檢測觸控面板感測器50中的接觸的檢測電極而發揮功能者。藉由第1導電層60與第2導電層70來構成檢測接觸的感測器部52a。亦將第1端子部62、第1配線64及連接器部66與第2端子部72、第2配線74及連接器部76總稱為周邊配線部52b。 第1導電層60、第1端子部62、第1配線64及連接器部66與第2導電層70、第2端子部72、第2配線74及連接器部76的構成相同。Each of the first conductive layer 60 and the second conductive layer 70 functions as a detecting electrode for detecting contact in the touch panel sensor 50. The sensor portion 52a for detecting contact is configured by the first conductive layer 60 and the second conductive layer 70. The first terminal portion 62, the first wiring 64, the connector portion 66, the second terminal portion 72, the second wiring 74, and the connector portion 76 are also collectively referred to as a peripheral wiring portion 52b. The first conductive layer 60, the first terminal portion 62, the first wiring 64, and the connector portion 66 have the same configuration as the second conductive layer 70, the second terminal portion 72, the second wiring 74, and the connector portion 76.
如圖23中所示,於觸控面板感測器50中,在基板12的表面12a上形成有第1導電層60,在基板12的背面12b上形成有第2導電層70。於第1導電層60上經由接著層16而設置有保護層18,於第2導電層70上經由接著層16而設置有保護層18。 雖然圖23中未圖示,但於形成有第1導電層60的基板12的表面12a上形成有第1端子部62、第1配線64及連接器部66。第1端子部62、第1配線64及連接器部66亦可與第1導電層60同樣地使用所述導電性膜10來形成。 另外,雖然圖23中未圖示,但於形成有第2導電層70的基板12的背面12b上形成有第2端子部72、第2配線74及連接器部76。第2端子部72、第2配線74及連接器部76亦可與第2導電層70同樣地使用所述導電性膜10來形成。As shown in FIG. 23, in the touch panel sensor 50, a first conductive layer 60 is formed on the surface 12a of the substrate 12, and a second conductive layer 70 is formed on the back surface 12b of the substrate 12. A protective layer 18 is provided on the first conductive layer 60 via the bonding layer 16, and a protective layer 18 is provided on the second conductive layer 70 via the bonding layer 16. Although not shown in FIG. 23, the first terminal portion 62, the first wiring 64, and the connector portion 66 are formed on the surface 12a of the substrate 12 on which the first conductive layer 60 is formed. The first terminal portion 62, the first wiring 64, and the connector portion 66 may be formed using the conductive film 10 in the same manner as the first conductive layer 60. Further, although not shown in FIG. 23, the second terminal portion 72, the second wiring 74, and the connector portion 76 are formed on the back surface 12b of the substrate 12 on which the second conductive layer 70 is formed. The second terminal portion 72, the second wiring 74, and the connector portion 76 may be formed using the conductive film 10 in the same manner as the second conductive layer 70.
於一個基板12的表面12a上形成第1導電層60,於背面12b上形成第2導電層70,藉此即便基板12收縮,亦可減小第1導電層60與第2導電層70的位置關係的偏差。 第1導電層60及第2導電層70均示意性地圖示成棒狀,但其構成例如可設為圖17~圖19中所示的配線40a~配線40c的構成。第1導電層60及第2導電層70均包含所述圖案配線14。保護層18的表面18a成為觸控面板感測器50的表面。 於觸控面板感測器50中,基板12較佳為透明的基板。再者,當將觸控面板感測器50設為具有可撓性者時,例如較佳為包含聚對苯二甲酸乙二酯(PET),環烯烴聚合物(COP)、環烯烴共聚物(COC)等聚烯烴類。The first conductive layer 60 is formed on the surface 12a of one substrate 12, and the second conductive layer 70 is formed on the back surface 12b, whereby the position of the first conductive layer 60 and the second conductive layer 70 can be reduced even if the substrate 12 is shrunk. The deviation of the relationship. Each of the first conductive layer 60 and the second conductive layer 70 is schematically illustrated in a rod shape. However, the configuration may be, for example, the wiring 40a to the wiring 40c shown in FIGS. 17 to 19 . Each of the first conductive layer 60 and the second conductive layer 70 includes the pattern wiring 14 . The surface 18a of the protective layer 18 becomes the surface of the touch panel sensor 50. In the touch panel sensor 50, the substrate 12 is preferably a transparent substrate. Furthermore, when the touch panel sensor 50 is made flexible, for example, it preferably contains polyethylene terephthalate (PET), a cyclic olefin polymer (COP), a cyclic olefin copolymer. Polyolefins such as (COC).
觸控面板感測器50的構成並不限定於圖23中所示的構成,例如,亦可為於一個基板12上設置一個導電層的構成。如圖24與圖25中所示的觸控面板感測器50般,亦可使形成有圖案配線14的基板12的表面12a彼此相向來貼合。另外,如圖26與圖27中所示的觸控面板感測器50般,亦可使形成有圖案配線14的基板12的表面12a的方向一致而於未形成圖案配線14的背面12b上貼合基板12的表面12a。進而,如圖28中所示的觸控面板感測器50般,亦可使未形成圖案配線14的基板12的背面12b彼此相向來貼合。 再者,於貼合時,可如圖24、及圖26中所示的觸控面板感測器50般在兩片基板12之間設置保護層18,亦可如圖25、圖27及圖28中所示的觸控面板感測器50般不在兩片基板12之間設置保護層18。The configuration of the touch panel sensor 50 is not limited to the configuration shown in FIG. 23, and may be, for example, a configuration in which one conductive layer is provided on one substrate 12. As in the touch panel sensor 50 shown in FIG. 24 and FIG. 25, the surfaces 12a of the substrate 12 on which the pattern wirings 14 are formed may be brought into contact with each other. Further, as in the touch panel sensor 50 shown in FIG. 26 and FIG. 27, the direction of the surface 12a of the substrate 12 on which the pattern wiring 14 is formed may be aligned and the back surface 12b of the pattern wiring 14 may be pasted. The surface 12a of the substrate 12 is joined. Further, as in the touch panel sensor 50 shown in FIG. 28, the back surface 12b of the substrate 12 on which the pattern wiring 14 is not formed may be brought into contact with each other. In addition, when the bonding is performed, the protective layer 18 may be disposed between the two substrates 12 as shown in FIG. 24 and FIG. 26, and may also be as shown in FIG. 25, FIG. 27 and FIG. The touch panel sensor 50 shown in FIG. 28 does not provide a protective layer 18 between the two substrates 12.
於觸控面板感測器50中,藉由使用所述導電性膜10,除作為觸控面板感測器而發揮功能以外,亦可抑制所述斑點的產生。 觸控面板感測器50為於一個基板12的表面12a上形成有所述導電性片體11,並於背面12b上形成有所述導電性片體11的構成,且為與將兩個導電性膜10重疊的構成相同的構成。導電性片體11的重疊方法如上所述,較佳為使兩個導電性片體11的排列方向,即H方向與V方向一致來進行配置(參照圖11)。另外,亦可如圖12或圖13中所示般不使H方向與V方向一致,改變角度而將導電性片體11積層來進行配置。於任一種積層方法中,當然均作為觸控面板感測器50而發揮功能,且可抑制所述斑點的產生。In the touch panel sensor 50, by using the conductive film 10, in addition to functioning as a touch panel sensor, generation of the speckle can be suppressed. The touch panel sensor 50 is formed by forming the conductive sheet 11 on the surface 12a of one substrate 12, and forming the conductive sheet 11 on the back surface 12b, and is electrically conductive. The structure in which the film 10 overlaps has the same configuration. As described above, the method of superposing the conductive sheets 11 is preferably such that the arrangement direction of the two conductive sheets 11 , that is, the H direction and the V direction are aligned (see FIG. 11 ). Further, as shown in FIG. 12 or FIG. 13, the H direction may be aligned with the V direction, and the conductive sheet body 11 may be laminated by changing the angle. In any of the lamination methods, of course, both functions as the touch panel sensor 50, and the generation of the spots can be suppressed.
本發明基本上是如以上般構成者。以上,對本發明的導電性膜、配線、及觸控面板感測器進行了詳細說明,但本發明並不限定於所述實施形態,當然可於不脫離本發明的主旨的範圍內,進行各種改良或變更。 [實施例1]The present invention basically constitutes the above. In the above, the conductive film, the wiring, and the touch panel sensor of the present invention have been described in detail. However, the present invention is not limited to the embodiment, and various modifications can be made without departing from the scope of the invention. Improvement or change. [Example 1]
以下,列舉本發明的實施例來更具體地說明本發明。再者,只要不脫離本發明的主旨,則以下的實施例中所示的材料、使用量、比例、處理內容、處理程序等可適宜變更。因此,本發明的範圍不應由以下所示的具體例限定性地進行解釋。Hereinafter, the present invention will be more specifically described by way of examples of the invention. Further, the materials, the amounts used, the ratios, the processing contents, the processing procedures, and the like shown in the following examples can be appropriately changed without departing from the gist of the invention. Therefore, the scope of the invention should not be construed as being limited by the specific examples shown below.
於本實施例中,製作實施例1~實施例6以及比較例1及比較例2的導電性膜,並評價斑點。斑點是以如下方式進行評價。In the present Example, conductive films of Examples 1 to 6 and Comparative Examples 1 and 2 were produced, and spots were evaluated. The spots were evaluated in the following manner.
(斑點的評價) 對實施例1~實施例6以及比較例1及比較例2的導電性膜無限制地照射白色的發光二極體的光,並觀察有無條紋狀的反射光。藉由以下的評價基準的評價點來評價有無條紋狀的反射光。 再者,評價由10位被試驗者來進行,並以10位被試驗者中的可視認條紋狀的反射光的人數進行評價。 評價基準 「A」:可視認條紋狀的反射光(斑點)的人為0人(無人可視認) 「B」:可視認條紋狀的反射光(斑點)的人為1人~4人 「C」:可視認條紋狀的反射光(斑點)的人為5人~9人 「D」:可視認條紋狀的反射光(斑點)的人為10人(全員可視認)(Evaluation of Spots) The conductive films of Examples 1 to 6 and Comparative Examples 1 and 2 were irradiated with light of a white light-emitting diode without any restriction, and the presence or absence of streaky reflected light was observed. The presence or absence of streaked reflected light was evaluated by the evaluation points of the following evaluation criteria. In addition, the evaluation was performed by 10 subjects, and the number of people who recognized the stripe-shaped reflected light among the 10 subjects was evaluated. Evaluation criteria "A": A person who recognizes the stripe-shaped reflected light (spot) is 0 (unknown) "B": A person who recognizes the stripe-shaped reflected light (spot) is 1 to 4 "C": The number of people who can see the streaked light (spots) is 5 to 9 "D": 10 people who can see the streaked light (spot) are visible (all members can see)
以下,對實施例1~實施例6以及比較例1及比較例2進行說明。 (實施例1) <組成物1的製備> 以成為如下組成的方式製液,而獲得組成物1。 異丙醇(Isopropyl Alcohol,IPA) 94.9質量份 聚丙烯酸 3質量份 亞甲基雙丙烯醯胺(Methylenebisacrylamide,MBA) 2質量份 豔佳固(IRGACURE)(註冊商標)127(巴斯夫(BASF)製造) 0.1質量份Hereinafter, Examples 1 to 6 and Comparative Example 1 and Comparative Example 2 will be described. (Example 1) <Preparation of Composition 1> A composition 1 was obtained by preparing a liquid having the following composition. Isopropyl Alcohol (IPA) 94.9 parts by mass of polyacrylic acid 3 parts by mass of Methylenebisacrylamide (MBA) 2 parts by mass of IRGACURE (registered trademark) 127 (manufactured by BASF) 0.1 parts by mass
<積層體的製作> 將100 μm厚的A4300(商品名 東洋紡股份有限公司製造)作為基板,並以成為0.5 μm的乾燥膜厚的方式將組成物1塗佈於基板的表面上。以下,亦將A4300(商品名 東洋紡股份有限公司製造)簡稱為PET膜。 然後,將具有成為圖2中所示的圖案配線14的圖案的遮罩配置於組成物1的乾燥膜上,並隔著遮罩使用紫外光(Ultraviolet,UV)燈深紫外線燈(Deep UV Lamp)(優志旺(Ushio)製造)進行曝光。然後,於40℃的1質量%碳酸鈉水溶液中浸漬5分鐘來進行顯影,而獲得包含圖案狀被鍍敷層的基板。於室溫下,使所獲得的基板在僅將Pd觸媒賦予液MAT-2(上村工業製造)的MAT-2A稀釋至5倍而成者中浸漬5分鐘,並利用純水清洗兩次。繼而,於36℃下在還原劑MAB(上村工業製造)中浸漬5分鐘,並利用純水清洗兩次。其後,於室溫下,在無電解鍍敷液Thru-Cup PEA(上村工業製造)中分別浸漬60分鐘,並利用純水進行清洗,而獲得形成有網狀的配線的利用鍍敷法的實施例1的導電性膜。此處,網狀的配線圖案的配線寬度為4.5 μm,直徑Da(參照圖3)為200 μm,間距P(參照圖3)為140 μm。<Preparation of the laminated body> The composition 1 was applied to the surface of the substrate so that the A4300 (trade name: Toyobo Co., Ltd. product) having a thickness of 100 μm was used as a substrate and the film thickness was 0.5 μm. Hereinafter, A4300 (trade name, manufactured by Toyobo Co., Ltd.) is also simply referred to as a PET film. Then, a mask having a pattern which becomes the pattern wiring 14 shown in FIG. 2 is placed on the dry film of the composition 1, and an ultraviolet light (Ultraviolet, UV) lamp deep ultraviolet lamp (Deep UV Lamp) is used across the mask. ) (made by Ushio) for exposure. Then, development was carried out by immersing in a 1% by mass aqueous sodium carbonate solution at 40 ° C for 5 minutes to obtain a substrate including a patterned plated layer. The obtained substrate was immersed for 5 minutes in a sample obtained by diluting only MAT-2A of Pd catalyst-imparting liquid MAT-2 (manufactured by Uemura Kogyo Co., Ltd.) to 5 times, and washed twice with pure water. Then, it was immersed in a reducing agent MAB (manufactured by Uemura Industrial Co., Ltd.) at 36 ° C for 5 minutes, and washed twice with pure water. Then, it was immersed in an electroless plating solution Thru-Cup PEA (manufactured by Uemura Industrial Co., Ltd.) for 60 minutes at room temperature, and washed with pure water to obtain a plating method in which a mesh-like wiring was formed. The conductive film of Example 1. Here, the mesh wiring pattern has a wiring width of 4.5 μm, a diameter Da (see FIG. 3) of 200 μm, and a pitch P (see FIG. 3) of 140 μm.
(實施例2) 使封閉型聚異氰酸酯(旭化成化學(Asahi Kasei Chemicals)公司製造的多耐德(Duranate)(註冊商標)SBN-70D)0.25 g及異氰酸酯硬化用丙烯酸樹脂(迪愛生(DIC)公司製造的阿庫利迪科(Acrydic)(註冊商標)A-817)1.2 g溶解於甲基乙基酮4.0 g中,而獲得硬化性預聚物溶液。向該溶液中添加使藉由後述的方法所製造的Pd(HPS-NOct3 Cl)0.1 g、3-胺基丙基三甲氧基矽烷(東京化成工業公司製造)0.5 g及作為增黏劑的聚乙烯吡咯啶酮(東京化成工業公司製造的聚乙烯吡咯啶酮K90,黏度平均分子量為630,000)1.5 g溶解於正丙醇1.5 g中而成的溶液。將其攪拌至變得均勻為止,而製備固體成分濃度(溶液中的溶質成分(作為溶媒的甲基乙基酮及正丙醇以外)的比例)為39質量%的觸媒油墨。所獲得的油墨的黏度為3.6×103 mPa·s。 於100 μm厚的A4300(商品名 東洋紡股份有限公司製造)上,使用吸管將該油墨呈成為圖2中所示的圖案配線14的圖案狀地進行印刷。利用80℃的加熱板對該PET膜進行5分鐘乾燥後,進而利用150℃的加熱板進行30分鐘加熱,而獲得具備無電解鍍敷基底層的PET膜。 使所獲得的PET膜於加熱至80℃的如後述般製備的無電解鍍敷液中浸漬180秒。其後,對所取出的膜進行水洗,而獲得形成有金屬鍍敷膜的利用鍍敷法的實施例2的導電性膜。(Example 2) 0.25 g of blocked polyisocyanate (Duranate (registered trademark) SBN-70D, manufactured by Asahi Kasei Chemicals Co., Ltd.) and acrylic resin for isocyanate curing (DIC) 1.2 g of Acrydic (registered trademark) A-817) was dissolved in 4.0 g of methyl ethyl ketone to obtain a hardening prepolymer solution. To the solution, 0.1 g of Pd (HPS-NOct 3 Cl), 3-aminopropyltrimethoxydecane (manufactured by Tokyo Chemical Industry Co., Ltd.), and 0.5 g of a tackifier were produced by a method described later. Polyvinylpyrrolidone (polyvinylpyrrolidone K90 manufactured by Tokyo Chemical Industry Co., Ltd., viscosity average molecular weight: 630,000) 1.5 g of a solution prepared by dissolving 1.5 g of n-propanol. This was stirred until it became uniform, and a catalyst ink having a solid content concentration (the ratio of the solute component (other than methyl ethyl ketone and n-propanol as a solvent) in the solution) was 39% by mass. The viscosity of the obtained ink was 3.6 × 10 3 mPa·s. The ink was printed on the A4300 (trade name: Toyobo Co., Ltd.) having a thickness of 100 μm by using a straw to form the pattern wiring 14 as shown in FIG. The PET film was dried for 5 minutes by a hot plate at 80 ° C, and further heated by a hot plate at 150 ° C for 30 minutes to obtain a PET film having an electroless plating underlayer. The obtained PET film was immersed in an electroless plating solution prepared as described later heated to 80 ° C for 180 seconds. Thereafter, the taken-out film was washed with water to obtain a conductive film of Example 2 by a plating method in which a metal plating film was formed.
<無電解鍍鎳液的製備> 向1升的燒瓶中加入美爾普雷特(Melplate)(註冊商標,以下相同)NI-6522LF1(美錄德(Meltex)公司製造)50 mL、美爾普雷特(Melplate)NI-6522LF2(美錄德公司製造)150 mL及美爾普雷特(Melplate)NI-6522LF Additive(美錄德公司製造)5 mL,進而添加純水來使溶液的總量成為1升。向該溶液中添加10體積%硫酸水溶液來將溶液的pH調整成4.6,而製成無電解鍍敷液。<Preparation of Electroless Nickel Plating Solution> To a 1 liter flask, Melplate (registered trademark, the same below) NI-6522LF1 (manufactured by Meltex) 50 mL, Merpe was added. Melplate NI-6522LF2 (manufactured by Mesquite) 150 mL and Melplate NI-6522LF Additive (manufactured by Meite) 5 mL, and then add pure water to make the total amount of the solution Become 1 liter. To the solution, a 10% by volume aqueous sulfuric acid solution was added to adjust the pH of the solution to 4.6 to prepare an electroless plating solution.
(Pd[HPS-NOct3 Cl]的製造) 向1升的二口燒瓶中加入乙酸鈀(川研精細化學(Kawaken Fine Chemicals)公司製造)4.3 g及氯仿200 g,並攪拌至變得均勻為止。使用滴加漏斗,向該溶液中添加使根據日本專利特開2014-159620號公報中所記載的[合成例2]所製造的HPS-NOct3 Cl 18.0 g溶解於氯仿200 g中而成的溶液。於該滴加漏斗內,使用乙醇100 g來沖洗入所述反應燒瓶中。於60℃下將該混合物攪拌17小時。 將液溫冷卻至30℃為止後,餾去溶媒。使所獲得的殘渣溶解於四氫呋喃300 g中,並冷卻至0℃。將該溶液添加至0℃的異丙醇6,000 g中進行再沈澱精製。對所析出的聚合物進行減壓過濾,並於60℃下進行真空乾燥,而以黑色粉末的形式獲得於分子末端具有銨基的高支鏈聚合物與Pd粒子的複合體(Pd[HPS-NOct3 Cl])19.9 g。 根據高頻感應耦合電漿(Inductively Coupled Plasma,ICP)發光分析的結果,所獲得的Pd[HPS-NOct3Cl]的Pd含量為11質量%。另外,根據穿透式電子顯微鏡(Transmission Electron Microscope,TEM)圖像,其Pd粒徑大概為2 nm~4 nm。(Production of Pd[HPS-NOct 3 Cl]) To a one-liter two-necked flask, 4.3 g of palladium acetate (Kawaken Fine Chemicals Co., Ltd.) and 200 g of chloroform were added, and the mixture was stirred until it became uniform. . A solution obtained by dissolving HPS-NOct 3 Cl 18.0 g produced in [Synthesis Example 2] described in JP-A-2014-159620 in 200 g of chloroform was added to the solution using a dropping funnel. . Into the dropping funnel, 100 g of ethanol was used to rinse into the reaction flask. The mixture was stirred at 60 ° C for 17 hours. After the liquid temperature was cooled to 30 ° C, the solvent was distilled off. The obtained residue was dissolved in 300 g of tetrahydrofuran and cooled to 0 °C. This solution was added to 6,000 g of isopropanol at 0 ° C for reprecipitation purification. The precipitated polymer was subjected to filtration under reduced pressure, and vacuum-dried at 60 ° C to obtain a complex of a highly branched polymer having an ammonium group at the molecular terminal and a Pd particle in the form of a black powder (Pd[HPS-NOct 3] Cl]) 19.9 g. The Pd content of the obtained Pd[HPS-NOct3Cl] was 11% by mass based on the results of luminescence analysis by Inductively Coupled Plasma (ICP). In addition, according to a Transmission Electron Microscope (TEM) image, the Pd particle size is approximately 2 nm to 4 nm.
(實施例3) (鹵化銀乳劑的製備) 一面進行攪拌,一面歷時20分鐘向保持為38℃、pH4.5的下述1液中同時添加下述的2液及3液的相當於各自90%的量,而形成0.16 μm的核粒子。繼而,歷時8分鐘添加下述4液及5液,進而,歷時2分鐘添加下述的2液及3液的剩餘的10%的量,而成長至0.21 μm為止。進而,添加碘化鉀0.15 g,進行5分鐘熟化後結束粒子形成。(Example 3) (Preparation of silver halide emulsion) The following two liquids and three liquids were simultaneously added to the following one liquid which was kept at 38 ° C and pH 4.5 while stirring for 20 minutes. The amount of % forms a nuclear particle of 0.16 μm. Then, the following four liquids and five liquids were added over 8 minutes, and the remaining 10% of the following two liquids and three liquids were added over 2 minutes, and it grew to 0.21 micrometer. Further, 0.15 g of potassium iodide was added, and after aging for 5 minutes, particle formation was completed.
1液: 水 750 ml 明膠 9 g 氯化鈉 3 g 1,3-二甲基咪唑啶-2-硫酮 20 mg 硫代苯磺酸鈉 10 mg 檸檬酸 0.7 g 2液: 水 300 ml 硝酸銀 150 g 3液: 水 300 ml 氯化鈉 38 g 溴化鉀 32 g 六氯銥(III)酸鉀 (0.005%KCl 20%水溶液) 8 ml 六氯銠酸銨 (0.001%NaCl 20%水溶液) 10 ml 4液: 水 100 ml 硝酸銀 50 g 5液: 水 100 ml 氯化鈉 13 g 溴化鉀 11 g 黃血鹽 5 mg1 liquid: water 750 ml gelatin 9 g sodium chloride 3 g 1,3-dimethylimidazolidin-2-thione 20 mg sodium thiobenzenesulfonate 10 mg citric acid 0.7 g 2 solution: water 300 ml silver nitrate 150 g 3 liquid: water 300 ml sodium chloride 38 g potassium bromide 32 g hexachloroantimonate (III) potassium (0.005% KCl 20% aqueous solution) 8 ml ammonium hexachloroantimonate (0.001% NaCl 20% aqueous solution) 10 ml 4 liquid: water 100 ml silver nitrate 50 g 5 liquid: water 100 ml sodium chloride 13 g potassium bromide 11 g Yellow blood salt 5 mg
其後,根據常規方法,藉由絮凝法來進行水洗。具體而言,將溫度降低至35℃,並使用硫酸來將pH降低至鹵化銀沈澱為止(pH3.6±0.2的範圍)。繼而,將約3升的上清液去除(第一次水洗)。進而添加3升的蒸餾水後,添加硫酸至鹵化銀沈澱為止。再次,將約3升的上清液去除(第二次水洗)。進而重覆1次與第二次水洗相同的操作(第三次水洗),然後結束水洗·脫鹽步驟。將水洗·脫鹽後的乳劑調整成pH6.4、pAg7.5,添加明膠3.9 g、硫代苯磺酸鈉10 mg、硫代苯亞磺酸鈉3 mg、硫代硫酸鈉15 mg與氯金酸10 mg,並於55℃下以獲得最佳感度的方式實施化學增感,然後添加作為穩定劑的1,3,3a,7-四氮雜茚100 mg、作為防腐劑的普洛克賽爾(Proxel)(商品名,ICI有限公司(ICI Co.,Ltd.)製造)100 mg。最終所獲得的乳劑是含有碘化銀0.08莫耳%,將氯溴化銀的比率設為氯化銀70莫耳%、溴化銀30莫耳%,平均粒徑為0.22 μm,變動係數為9%的碘氯溴化銀立方體粒子乳劑。Thereafter, water washing is carried out by a flocculation method according to a conventional method. Specifically, the temperature was lowered to 35 ° C, and sulfuric acid was used to lower the pH to a silver halide precipitate (range of pH 3.6 ± 0.2). Then, about 3 liters of the supernatant was removed (first water wash). Further, after adding 3 liters of distilled water, sulfuric acid was added until precipitation of silver halide. Again, about 3 liters of supernatant was removed (second wash). Further, the same operation as the second water washing (the third water washing) was repeated once, and then the water washing and desalting step was ended. The washed and desalted emulsion was adjusted to pH 6.4, pAg7.5, gelatin 3.9 g, sodium thiobenzenesulfonate 10 mg, sodium thiobenzenesulfinate 3 mg, sodium thiosulfate 15 mg and chlorogold Chemically sensitized with 10 mg of acid at 55 ° C for optimal sensitivity, then added 1,3,3a,7-tetraazaindene 100 mg as a stabilizer, and Plockel as a preservative (Proxel) (trade name, manufactured by ICI Co., Ltd.) 100 mg. The emulsion obtained finally contained 0.08 mol% of silver iodide, the ratio of silver chlorobromide was 70 mol% of silver chloride, 30 mol% of silver bromide, the average particle diameter was 0.22 μm, and the coefficient of variation was 9%. Silver iodochlorobromide cube particle emulsion.
(銀鹽乳劑層形成用組成物的製備) 向所述乳劑中添加1,3,3a,7-四氮雜茚1.2×10-4 莫耳/莫耳Ag、對苯二酚1.2×10-2 莫耳/莫耳Ag、檸檬酸3.0×10-4 莫耳/莫耳Ag、2,4-二氯-6-羥基-1,3,5-三嗪鈉鹽0.90 g/莫耳Ag,並使用檸檬酸將塗佈液pH調整成5.6,而獲得銀鹽乳劑層形成用組成物。(Preparation of a composition for forming a silver salt emulsion layer) To the emulsion, 1,3,3a,7-tetraazaindene 1.2 × 10 -4 mol / mol Ag, hydroquinone 1.2 × 10 - was added to the emulsion. 2 mol/mol Ag, citric acid 3.0×10 −4 mol/mol Ag, 2,4-dichloro-6-hydroxy-1,3,5-triazine sodium salt 0.90 g/mol Ag, The pH of the coating liquid was adjusted to 5.6 with citric acid to obtain a composition for forming a silver salt emulsion layer.
(銀鹽乳劑層形成步驟) 對100 μm厚的PET膜實施電暈放電處理後,於所述PET膜的一面上設置作為底塗層的厚度為0.1 μm的明膠層,進而於底塗層上設置含有光學濃度為約1.0且藉由顯影液的鹼而脫色的染料的防光暈層。將所述銀鹽乳劑層形成用組成物塗佈於所述防光暈層上,進而設置厚度為0.15 μm的明膠層,而獲得於一面上形成有銀鹽乳劑層的聚對苯二甲酸乙二酯膜。所形成的銀鹽乳劑層的銀量為6.0 g/m2 ,明膠量為1.0 g/m2 。(Silver salt emulsion layer forming step) After corona discharge treatment was performed on a 100 μm thick PET film, a gelatin layer having a thickness of 0.1 μm as an undercoat layer was provided on one side of the PET film, and then on the undercoat layer. An antihalation layer containing a dye having an optical density of about 1.0 and decolorized by a base of the developer is provided. The composition for forming a silver salt emulsion layer is applied onto the antihalation layer, and further, a gelatin layer having a thickness of 0.15 μm is provided to obtain a polyethylene terephthalate having a silver salt emulsion layer formed on one side thereof. Diester film. The silver salt emulsion layer formed had a silver content of 6.0 g/m 2 and a gelatin amount of 1.0 g/m 2 .
(曝光顯影步驟) 使用將高壓水銀燈作為光源的平行光,隔著具有成為圖2中所示的圖案配線14的圖案的遮罩對所述PET膜的一面進行曝光。曝光後,利用下述的顯影液進行顯影,進而使用定影液(商品名:CN16X用N3X-R,富士軟片公司製造)進行顯影處理。進而,利用純水進行淋洗,並進行乾燥,藉此獲得形成有包含銀細線的圖案配線與明膠層的聚對苯二甲酸乙二酯膜。再者,明膠層形成於銀細線間,根據螢光X射線分析,此時的銀細線中的銀量為5.4 g/m2 。如此獲得利用銀鹽法的實施例3的導電性膜。(Exposure development step) One side of the PET film was exposed by using a mask having a pattern of the pattern wiring 14 shown in FIG. 2 as parallel light using a high-pressure mercury lamp as a light source. After the exposure, development was carried out by the developer described below, and development treatment was carried out using a fixing solution (trade name: N3X-R for CN16X, manufactured by Fujifilm Co., Ltd.). Further, the mixture was rinsed with pure water and dried to obtain a polyethylene terephthalate film in which a pattern wiring containing silver fine wires and a gelatin layer were formed. Further, the gelatin layer was formed between the fine silver wires, and the amount of silver in the silver fine wires at this time was 5.4 g/m 2 according to the fluorescent X-ray analysis. Thus, the conductive film of Example 3 using the silver salt method was obtained.
(實施例4) 繼而,將100 μm厚的A4300(商品名 東洋紡股份有限公司製造)作為基板,並於基板的表面上蒸鍍銅而形成8 μm厚的銅箔。 繼而,使用輥塗機,以6 μm左右的厚度將負型抗蝕劑塗佈於銅箔面上,並於90℃下進行30分鐘乾燥。 隔著具有成為圖2中所示的圖案配線14的圖案的遮罩對負型抗蝕劑照射100 mJ/cm2 的紫外光(UV光)。 繼而,利用3%的碳酸鈉水溶液對負型抗蝕劑實施顯影處理。藉此,在對應於圖案配線的部分形成抗蝕劑圖案,且其以外的部分的抗蝕劑被去除。 繼而,使用比重為1.45的氯化鐵液,對銅箔的露出部進行蝕刻去除,並剝離殘留的抗蝕劑。藉此,獲得利用蒸鍍法的實施例4的導電性膜。(Example 4) Next, a 100 μm-thick A4300 (trade name, manufactured by Toyobo Co., Ltd.) was used as a substrate, and copper was vapor-deposited on the surface of the substrate to form a copper foil having a thickness of 8 μm. Then, a negative resist was applied onto the copper foil surface with a thickness of about 6 μm using a roll coater, and dried at 90 ° C for 30 minutes. The negative resist was irradiated with ultraviolet light (UV light) of 100 mJ/cm 2 through a mask having a pattern of the pattern wiring 14 shown in Fig. 2 . Then, the negative resist was subjected to development treatment using a 3% aqueous sodium carbonate solution. Thereby, a resist pattern is formed in a portion corresponding to the pattern wiring, and a portion other than the resist is removed. Then, the exposed portion of the copper foil was removed by etching using a ferric chloride solution having a specific gravity of 1.45, and the remaining resist was peeled off. Thereby, the conductive film of Example 4 by the vapor deposition method was obtained.
(實施例5) 鍍銀銅粉的製造 (酸清洗) 相對於作為原料銅粉的樹枝狀的電解銅粉(三井金屬礦業公司製造,商品名「MF-D2」,直徑為10 μm)60 g,添加作為清洗水的約5質量%的硫酸水溶液100 ml,於20℃下攪拌10分鐘後,進行過濾並進行酸清洗。其後,重覆清洗至濾液變成中性為止。具體而言,合計使用3 L的清洗水,進行6次酸清洗。 (第1次鍍敷步驟) 繼而,將經酸清洗的原料銅粉移至容積為1升的塑膠容器中,並向其中添加包含碳酸銨31.5 g、乙二胺四乙酸(Ethylene Diamine Tetraacetic Acid,EDTA)63 g、水250 g的水溶液,而製備銅分散液。然後,一面進行攪拌,一面向該銅分散液中添加包含硝酸銀5.25 g與水32.4 g的水溶液,並進行銀置換鍍敷。 繼而,對銀置換鍍敷後的分散液進行過濾、清洗、乾燥,而獲得相對於原料銅粉100質量份鍍敷有5質量份的銀的原料銅粉。 針對如所述般鍍敷有銀的原料銅粉,使用麥奇克(Microtrac)HRA(日機裝公司製造)測定50%粒徑(D50%),結果為8.39 μm。另外,利用下述的方法對其測定敲緊密度(tap density),結果為2.99 g/cm3 。(Example 5) Production of silver-plated copper powder (acid cleaning) 60 g of dendritic electrolytic copper powder (manufactured by Mitsui Mining & Mining Co., Ltd., trade name "MF-D2", diameter: 10 μm) as a raw material copper powder 100 ml of a sulfuric acid aqueous solution of about 5 mass% as washing water was added, and the mixture was stirred at 20 ° C for 10 minutes, and then filtered and acid-washed. Thereafter, the washing was repeated until the filtrate became neutral. Specifically, 3 L of washing water was used in total for 6 times of acid washing. (1st plating step) Then, the acid-cleaned raw material copper powder was transferred to a plastic container having a volume of 1 liter, and 31.5 g of ammonium carbonate, Ethylene Diamine Tetraacetic Acid (Ethylene Diamine Tetraacetic Acid) was added thereto. An aqueous solution of 63 g of EDTA) and 250 g of water was prepared to prepare a copper dispersion. Then, while stirring, an aqueous solution containing 5.25 g of silver nitrate and 32.4 g of water was added to the copper dispersion, and silver displacement plating was performed. Then, the dispersion liquid after the silver replacement plating was filtered, washed, and dried to obtain a raw material copper powder in which 5 parts by mass of silver was plated with respect to 100 parts by mass of the raw material copper powder. For the raw material copper powder plated with silver as described above, a 50% particle diameter (D50%) was measured using Microtrac HRA (manufactured by Nikkiso Co., Ltd.), and as a result, it was 8.39 μm. Further, the tap density was measured by the following method and found to be 2.99 g/cm 3 .
[敲緊密度] (i)利用漏斗將鍍敷有銀的原料銅粉(試樣)100 g慢慢地落下至100 ml的量筒中。 (ii)將量筒載置於敲緊密度測定器上,以落差距離20 mm、60次/分鐘的速度落下600次,而將試樣壓縮。測定壓縮後的試樣的容積。 (iii)藉由壓縮後的容積(cm3 )除試樣的質量(g),而算出敲緊密度(g/cm3 )。[Torch tightness] (i) 100 g of raw copper powder (sample) plated with silver was slowly dropped into a 100 ml measuring cylinder using a funnel. (ii) The measuring cylinder was placed on a knock-tightness measuring device, and the sample was compressed by dropping 600 times at a drop distance of 20 mm and 60 times/min. The volume of the sample after compression was measured. (iii) The knocking degree (g/cm 3 ) was calculated by dividing the mass (g) of the sample by the volume (cm 3 ) after compression.
(粉碎步驟) 繼而,相對於第1次鍍敷步驟中所獲得的經第1次鍍敷的銅粉100質量份,添加作為潤滑劑的硬脂酸0.1質量份,並於球磨機中將其粉碎,而獲得粉碎粉末。粉碎的條件設為20℃、轉速:30轉/分鐘,並進行60分鐘。 另外,針對以所述方式獲得的粉碎粉末,使用麥奇克(Microtrac)HRA(日機裝公司製造)測定50%粒徑(D50%),結果為8.04 μm。另外,利用所述方法對其測定敲緊密度,結果為3.85 g/cm3 。 (第2次鍍敷步驟) 繼而,將粉碎步驟中所獲得的粉碎粉末移至容積為1升的塑膠容器中,以與所述第1次鍍敷步驟相同的方法進行銀置換鍍敷,而獲得鍍銀銅粉。 再者,於第2次鍍敷步驟中,相對於原料銅粉100質量份,鍍敷10質量份的銀。 以所述方式最終所獲得的鍍銀銅粉是相對於原料銅粉100質量份鍍敷有15質量份的銀者。(Pulverization step) Then, 0.1 parts by mass of stearic acid as a lubricant is added to 100 parts by mass of the first-plated copper powder obtained in the first plating step, and pulverized in a ball mill. And obtained a pulverized powder. The pulverization conditions were set to 20 ° C, the number of revolutions: 30 rpm, and carried out for 60 minutes. Further, with respect to the pulverized powder obtained in the manner described above, a 50% particle diameter (D50%) was measured using Microtrac HRA (manufactured by Nikkiso Co., Ltd.), and as a result, it was 8.04 μm. Further, the knocking degree was measured by the method described above, and as a result, it was 3.85 g/cm 3 . (Second plating step) Then, the pulverized powder obtained in the pulverization step is transferred to a plastic container having a volume of 1 liter, and silver displacement plating is performed in the same manner as the first plating step. Obtained silver-plated copper powder. In addition, in the second plating step, 10 parts by mass of silver was plated with respect to 100 parts by mass of the raw material copper powder. The silver-plated copper powder finally obtained in the above manner was plated with 15 parts by mass of silver relative to 100 parts by mass of the raw material copper powder.
(導電性膏的製造(分散步驟)) 添加100質量份的以所述方式製造的鍍銀銅粉、以固體成分計為18質量份的作為黏結樹脂的聚酯樹脂(東洋紡織公司,商品名「拜龍(Vylon)550」)、以固體成分計為4.5質量份的硬化劑(封閉型異氰酸酯(日本聚氨酯工業(Nippon Polyurethane Industry)公司製造,商品名「克羅奈特(Coronate)2516」))、以及47質量份的作為溶劑的丁基溶纖劑乙酸酯(表中表述為BCA(Butyl Cellosolve Acetate)),並以鍍銀銅粉與其他成分溶合的方式進行預混合。其後,利用三輥磨機對該預混合物進行分散,而獲得導電性膏。(Production of the conductive paste (dispersion step)) 100 parts by mass of the silver-plated copper powder produced as described above, and 18 parts by mass of the polyester resin as a binder resin (Toyo Textile Co., Ltd., trade name) "Vylon 550"), a hardening agent of 4.5 parts by mass in terms of solid content (closed isocyanate (manufactured by Nippon Polyurethane Industry, trade name "Coronate 2516") And 47 parts by mass of butyl cellosolve acetate as a solvent (abbreviated as BCA (Butyl Cellosolve Acetate) in the table), and pre-mixed so that the silver-plated copper powder is mixed with other components. Thereafter, the pre-mixture was dispersed by a three-roll mill to obtain a conductive paste.
<積層體的製作> 將100 μm厚的A4300(商品名 東洋紡股份有限公司製造)作為基板,於基板的表面上,利用印刷法將所述導電性膏形成為成為圖2中所示的圖案配線14的圖案狀。然後,將基板於溫度為150℃的恆溫器中保持30分鐘,使導電性膏硬化並加以乾燥。如此,獲得利用印刷法的實施例5的導電性膜。<Preparation of a laminate] A conductive paste having a thickness of 100 μm (manufactured by Toyobo Co., Ltd.) was used as a substrate on the surface of the substrate, and the conductive paste was formed into a pattern wiring as shown in FIG. 2 by a printing method. 14 pattern. Then, the substrate was held in a thermostat at a temperature of 150 ° C for 30 minutes to harden the conductive paste and dry it. Thus, the conductive film of Example 5 by the printing method was obtained.
(實施例6) 實施例6與所述實施例1相比,除如圖7中所示般使第1波狀線14a與第2波狀線14b接觸以外,構成與實施例1相同,因此省略其詳細的說明。於實施例6中,直徑Da(參照圖7)為200 μm,間距P(參照圖7)為200 μm。(Embodiment 6) The sixth embodiment is the same as the first embodiment except that the first wavy line 14a is in contact with the second wavy line 14b as shown in Fig. 7, and therefore the configuration is the same as that of the first embodiment. Detailed descriptions thereof are omitted. In Example 6, the diameter Da (refer to Fig. 7) was 200 μm, and the pitch P (refer to Fig. 7) was 200 μm.
(比較例1) 比較例1與所述實施例1相比,除形成有圖29中所示的圖案配線90a以外,構成與實施例1相同,因此省略其詳細的說明。 如圖30中所示,比較例1的圖案配線90a為菱形的圖案,由寬度為0.9 μm的直線92形成。開口的大小為400 μm×500 μm。(Comparative Example 1) The comparative example 1 is the same as the first embodiment except that the pattern wiring 90a shown in Fig. 29 is formed, and the detailed description thereof will be omitted. As shown in FIG. 30, the pattern wiring 90a of Comparative Example 1 has a rhombic pattern and is formed by a straight line 92 having a width of 0.9 μm. The size of the opening is 400 μm × 500 μm.
(比較例2) 比較例2與所述實施例1相比,除形成有圖31中所示的圖案配線90b以外,構成與實施例1相同,因此省略其詳細的說明。 如圖32及圖33中所示,比較例2的圖案配線90b由寬度為0.9 μm的波狀線94形成。波狀線94是將多個90°的圓弧96連接多個來構成。由四個波狀線94形成開口。開口的大小為400 μm×500 μm。(Comparative Example 2) Comparative Example 2 is the same as that of the first embodiment except that the pattern wiring 90b shown in Fig. 31 is formed, and therefore detailed description thereof will be omitted. As shown in FIGS. 32 and 33, the pattern wiring 90b of Comparative Example 2 is formed of a wavy line 94 having a width of 0.9 μm. The wavy line 94 is formed by connecting a plurality of arcs 96 of a plurality of 90 degrees. An opening is formed by four wavy lines 94. The size of the opening is 400 μm × 500 μm.
[表1]
如表1中所示,於實施例1~實施例6中未產生斑點。另一方面,比較例1為菱形的格子,並產生了斑點。比較例2雖然是使用圓弧的圖案,但圓弧為90°,因此產生了斑點。As shown in Table 1, no spots were produced in Examples 1 to 6. On the other hand, Comparative Example 1 is a diamond-shaped lattice and spots are generated. In Comparative Example 2, although the pattern of the circular arc was used, the arc was 90°, and thus spots were generated.
將實施例1的觀察結果示於圖34中,將比較例1的觀察結果示於圖35中。如圖34中所示,於實施例1中未看見斑點。另一方面,如圖35中所示,於比較例1中,產生了條紋狀的反射光,並產生了斑點。 [實施例2]The observation results of Example 1 are shown in Fig. 34, and the observation results of Comparative Example 1 are shown in Fig. 35. As shown in FIG. 34, no spots were observed in Example 1. On the other hand, as shown in Fig. 35, in Comparative Example 1, streak-like reflected light was generated and spots were generated. [Embodiment 2]
於本實施例中,製作實施例10~實施例17的觸控面板感測器,並評價觸控面板感測器的驅動與斑點。斑點藉由所述評價基準來評價。 觸控面板感測器的驅動藉由利用手指實際接觸觸控面板感測器後是否可檢測出接觸來評價。將可檢測出接觸的情況設為「A」,將無法檢測出接觸的情況設為「B」。In the present embodiment, the touch panel sensors of Embodiments 10 to 17 are fabricated, and the driving and spotting of the touch panel sensor are evaluated. Spots were evaluated by the evaluation criteria. The driving of the touch panel sensor is evaluated by whether the contact can be detected after the finger actually touches the touch panel sensor. The case where the contact can be detected is "A", and the case where the contact cannot be detected is "B".
(實施例10) 實施例10與實施例1相比,除於第1基板的表面上形成圖22中所示的觸控面板感測器50的第1導電層60、第1端子部62、第1配線64及連接器部66的圖案的圖案配線,並於第2基板的背面上形成第2導電層70、第2端子部72、第2配線74及連接器部76的圖案的圖案配線,且如圖11中所示般積層有第1基板與第2基板這一方面不同,以及使用連接配線55來安裝控制器54而形成觸控面板感測器這一方面不同以外,與實施例1同樣地製作。(Embodiment 10) In the tenth embodiment, the first conductive layer 60 and the first terminal portion 62 of the touch panel sensor 50 shown in Fig. 22 are formed on the surface of the first substrate, as compared with the first embodiment. Pattern wiring of the pattern of the first wiring 64 and the connector portion 66, and pattern wiring of the pattern of the second conductive layer 70, the second terminal portion 72, the second wiring 74, and the connector portion 76 on the back surface of the second substrate As shown in FIG. 11 , the first substrate and the second substrate are stacked differently, and the touch panel sensor is mounted by using the connection wiring 55 to form a touch panel sensor. 1 is produced in the same way.
(實施例11) 實施例11與實施例10相比,除如圖12中所示般改變積層角度來積層第1基板與第2基板這一方面不同以外,與實施例10同樣地製作。(Example 11) Example 11 was produced in the same manner as in Example 10 except that the first substrate and the second substrate were laminated in the same manner as in Example 10 except that the laminate angle was changed as shown in Fig. 12 .
(實施例12) 實施例12與實施例10相比,除如圖13中所示般改變積層角度來積層第1基板與第2基板這一方面不同以外,與實施例10同樣地製作。(Example 12) Example 12 was produced in the same manner as in Example 10 except that the first substrate and the second substrate were laminated in the same manner as in Example 10 except that the laminate angle was changed as shown in Fig. 13 .
(實施例13) 實施例13與實施例2相比,除於第1基板的表面上形成圖22中所示的觸控面板感測器50的第1導電層60、第1端子部62、第1配線64及連接器部66的圖案的圖案配線,並於第2基板的背面上形成第2導電層70、第2端子部72、第2配線74及連接器部76的圖案的圖案配線,且如圖11中所示般積層有第1基板與第2基板這一方面不同,以及使用連接配線55來安裝控制器54而形成觸控面板感測器這一方面不同以外,與實施例2同樣地製作。(Embodiment 13) In the third embodiment, the first conductive layer 60 and the first terminal portion 62 of the touch panel sensor 50 shown in Fig. 22 are formed on the surface of the first substrate, as compared with the second embodiment. Pattern wiring of the pattern of the first wiring 64 and the connector portion 66, and pattern wiring of the pattern of the second conductive layer 70, the second terminal portion 72, the second wiring 74, and the connector portion 76 on the back surface of the second substrate As shown in FIG. 11 , the first substrate and the second substrate are stacked differently, and the touch panel sensor is mounted by using the connection wiring 55 to form a touch panel sensor. 2 is produced in the same way.
(實施例14) 實施例14與實施例3相比,除於第1基板的表面上形成圖22中所示的觸控面板感測器50的第1導電層60、第1端子部62、第1配線64及連接器部66的圖案的圖案配線,並於第2基板的背面上形成第2導電層70、第2端子部72、第2配線74及連接器部76的圖案的圖案配線,且如圖11中所示般積層有第1基板與第2基板這一方面不同,以及使用連接配線55來安裝控制器54而形成觸控面板感測器這一方面不同以外,與實施例3同樣地製作。(Embodiment 14) In the fourth embodiment, the first conductive layer 60 and the first terminal portion 62 of the touch panel sensor 50 shown in Fig. 22 are formed on the surface of the first substrate, as compared with the third embodiment. Pattern wiring of the pattern of the first wiring 64 and the connector portion 66, and pattern wiring of the pattern of the second conductive layer 70, the second terminal portion 72, the second wiring 74, and the connector portion 76 on the back surface of the second substrate As shown in FIG. 11 , the first substrate and the second substrate are stacked differently, and the touch panel sensor is mounted by using the connection wiring 55 to form a touch panel sensor. 3 is made in the same way.
(實施例15) 實施例15與實施例4相比,除於第1基板的表面上形成圖22中所示的觸控面板感測器50的第1導電層60、第1端子部62、第1配線64及連接器部66的圖案的圖案配線,並於第2基板的背面上形成第2導電層70、第2端子部72、第2配線74及連接器部76的圖案的圖案配線,且如圖11中所示般積層有第1基板與第2基板這一方面不同,以及使用連接配線55來安裝控制器54而形成觸控面板感測器這一方面不同以外,與實施例4同樣地製作。(Embodiment 15) In the fifteenth embodiment, the first conductive layer 60 and the first terminal portion 62 of the touch panel sensor 50 shown in Fig. 22 are formed on the surface of the first substrate, as compared with the fourth embodiment. Pattern wiring of the pattern of the first wiring 64 and the connector portion 66, and pattern wiring of the pattern of the second conductive layer 70, the second terminal portion 72, the second wiring 74, and the connector portion 76 on the back surface of the second substrate As shown in FIG. 11 , the first substrate and the second substrate are stacked differently, and the touch panel sensor is mounted by using the connection wiring 55 to form a touch panel sensor. 4 is made in the same way.
(實施例16) 實施例16與實施例5相比,除於第1基板的表面上形成圖22中所示的觸控面板感測器50的第1導電層60、第1端子部62、第1配線64及連接器部66的圖案的圖案配線,並於第2基板的背面上形成第2導電層70、第2端子部72、第2配線74及連接器部76的圖案的圖案配線,且如圖11中所示般積層有第1基板與第2基板這一方面不同,以及使用連接配線55來安裝控制器54而形成觸控面板感測器這一方面不同以外,與實施例5同樣地製作。(Embodiment 16) In the sixth embodiment, the first conductive layer 60 and the first terminal portion 62 of the touch panel sensor 50 shown in Fig. 22 are formed on the surface of the first substrate, as compared with the fifth embodiment. Pattern wiring of the pattern of the first wiring 64 and the connector portion 66, and pattern wiring of the pattern of the second conductive layer 70, the second terminal portion 72, the second wiring 74, and the connector portion 76 on the back surface of the second substrate As shown in FIG. 11 , the first substrate and the second substrate are stacked differently, and the touch panel sensor is mounted by using the connection wiring 55 to form a touch panel sensor. 5 is made in the same way.
(實施例17) 實施例17與實施例10相比,除將直徑Da(參照圖7)設為200 μm,將間距P(參照圖7)設為200 μm這一方面不同以外,與實施例10同樣地製作。(Example 17) Example 17 is different from Example 10 except that the diameter Da (see Fig. 7) is 200 μm and the pitch P (see Fig. 7) is 200 μm. 10 is made in the same way.
[表2]
如表2中所示,實施例10~實施例17是均可檢測出接觸,且作為觸控面板感測器發揮功能者。進而,亦未產生斑點。如此,本發明的構成可獲得斑點的產生得到抑制的觸控面板感測器。As shown in Table 2, Examples 10 to 17 are those that can detect contact and function as a touch panel sensor. Further, no spots were generated. As such, the composition of the present invention can obtain a touch panel sensor in which generation of spots is suppressed.
10、10a、10b、10c‧‧‧導電性膜
11、11a、11b‧‧‧導電性片體
12、100‧‧‧基板
12a、18a‧‧‧表面
12b‧‧‧背面
14‧‧‧圖案配線
14a‧‧‧第1波狀線
14b‧‧‧第2波狀線
15‧‧‧導電性細線
16‧‧‧接著層
17a、17b、96‧‧‧圓弧
17c‧‧‧端部
18‧‧‧保護層
19‧‧‧假想圓
20‧‧‧開口部
21a、21b、23‧‧‧交點
22‧‧‧重疊區域
32‧‧‧感光性層
32a‧‧‧曝光區域
32b‧‧‧非曝光區域
34‧‧‧第1圖案狀被鍍敷層
36‧‧‧含圖案狀被鍍敷層的積層體
38‧‧‧金屬層
40a、40b、40c、40d、40e‧‧‧配線
42、42a、46‧‧‧活線
44、44a、44b、48、102‧‧‧區域
45、47‧‧‧外形線
46a‧‧‧多邊形區域
46b‧‧‧直線區域
50‧‧‧觸控面板感測器
52‧‧‧觸控面板部
52a‧‧‧感測器部
52b‧‧‧周邊配線部
54‧‧‧控制器
55‧‧‧連接配線
60‧‧‧第1導電層
62‧‧‧第1端子部
64‧‧‧第1配線
66、76‧‧‧連接器部
70‧‧‧第2導電層
72‧‧‧第2端子部
74‧‧‧第2配線
90a、90b‧‧‧圖案配線
92‧‧‧直線
94‧‧‧波狀線
104‧‧‧光源
108‧‧‧反射光
B‧‧‧線
C‧‧‧中心線
C1、C2‧‧‧線
Da‧‧‧直徑
H、V‧‧‧方向
L‧‧‧曝光光
O‧‧‧中心
P‧‧‧間距
Pc‧‧‧距離
γ‧‧‧角度
θ‧‧‧中心角
f‧‧‧排列角度10, 10a, 10b, 10c‧‧‧ conductive film
11, 11a, 11b‧‧‧ conductive sheet
12, 100‧‧‧ substrate
12a, 18a‧‧‧ surface
12b‧‧‧Back
14‧‧‧ pattern wiring
14a‧‧‧1st wavy line
14b‧‧‧2nd wavy line
15‧‧‧Electrical thin wires
16‧‧‧Next layer
17a, 17b, 96‧‧‧ arc
17c‧‧‧End
18‧‧‧Protective layer
19‧‧‧ imaginary circle
20‧‧‧ openings
21a, 21b, 23‧‧‧ intersection
22‧‧‧Overlapping areas
32‧‧‧Photosensitive layer
32a‧‧‧Exposure area
32b‧‧‧Unexposed areas
34‧‧‧1st patterned coating
36‧‧‧Laminated body with patterned coating
38‧‧‧metal layer
40a, 40b, 40c, 40d, 40e‧‧‧ wiring
42, 42a, 46‧‧‧ live lines
44, 44a, 44b, 48, 102‧‧‧ areas
45, 47‧‧‧ outline
46a‧‧‧Polygonal area
46b‧‧‧Line area
50‧‧‧Touch panel sensor
52‧‧‧Touch panel
52a‧‧‧Sensor Department
52b‧‧‧Circuit wiring department
54‧‧‧ Controller
55‧‧‧Connecting wiring
60‧‧‧1st conductive layer
62‧‧‧1st terminal part
64‧‧‧1st wiring
66, 76‧‧‧ Connector Department
70‧‧‧2nd conductive layer
72‧‧‧2nd terminal section
74‧‧‧2nd wiring
90a, 90b‧‧‧ pattern wiring
92‧‧‧ Straight line
94‧‧‧ wavy line
104‧‧‧Light source
108‧‧‧Reflected light
B‧‧‧ line
C‧‧‧ center line
C 1 , C 2 ‧‧‧ line
Da‧‧‧diameter
H, V‧‧ Direction
L‧‧‧Exposure light
O‧‧ Center
P‧‧‧ spacing
Pc‧‧‧ distance γ‧‧‧ angle θ‧‧‧ central angle
f‧‧‧Arrangement angle
圖1是用以說明條紋狀的光的反射的示意圖。 圖2是表示本發明的實施形態的導電性膜的示意平面圖。 圖3是將本發明的實施形態的導電性膜擴大表示的平面圖。 圖4是表示構成本發明的實施形態的導電性膜的圖案的導電性細線的示意圖。 圖5是表示構成本發明的實施形態的導電性膜的圖案的導電性細線的示意圖。 圖6是用以說明本發明的實施形態的導電性膜的圖案的示意圖。 圖7是表示本發明的實施形態的導電性膜的其他例的示意圖。 圖8是表示本發明的實施形態的導電性膜的構成的示意剖面圖。 圖9是表示本發明的實施形態的導電性膜的構成的示意平面圖。 圖10是表示本發明的實施形態的導電性膜的構成的示意平面圖。 圖11是表示本發明的實施形態的導電性膜的構成的其他例的示意平面圖。 圖12是表示本發明的實施形態的導電性膜的構成的其他例的示意平面圖。 圖13是表示本發明的實施形態的導電性膜的構成的其他例的示意平面圖。 圖14是按步驟順序表示導電性膜的製造方法的示意剖面圖。 圖15是按步驟順序表示導電性膜的製造方法的示意剖面圖。 圖16是按步驟順序表示導電性膜的製造方法的示意剖面圖。 圖17是表示本發明的實施形態的配線的第1例的示意圖。 圖18是表示本發明的實施形態的配線的第2例的示意圖。 圖19是表示本發明的實施形態的配線的第3例的示意圖。 圖20是表示本發明的實施形態的配線的第4例的示意圖。 圖21是表示本發明的實施形態的配線的第5例的示意圖。 圖22是表示本發明的實施形態的觸控面板感測器的示意圖。 圖23是圖22的本發明的實施形態的觸控面板感測器的示意剖面圖。 圖24是圖22的本發明的實施形態的觸控面板感測器的示意剖面圖。 圖25是圖22的本發明的實施形態的觸控面板感測器的示意剖面圖。 圖26是圖22的本發明的實施形態的觸控面板感測器的示意剖面圖。 圖27是圖22的本發明的實施形態的觸控面板感測器的示意剖面圖。 圖28是圖22的本發明的實施形態的觸控面板感測器的示意剖面圖。 圖29是表示比較例1的構成的示意圖。 圖30是將比較例1的構成擴大表示的示意圖。 圖31是表示比較例2的構成的示意圖。 圖32是將比較例2的構成擴大表示的示意圖。 圖33是詳細表示比較例2的配線的示意圖。 圖34是表示實施例1的結果的圖式代用照片。 圖35是表示比較例1的結果的圖式代用照片。FIG. 1 is a schematic view for explaining reflection of stripe-shaped light. Fig. 2 is a schematic plan view showing a conductive film according to an embodiment of the present invention. Fig. 3 is a plan view showing an enlarged conductive film according to an embodiment of the present invention. 4 is a schematic view showing a conductive thin wire constituting a pattern of a conductive film according to an embodiment of the present invention. Fig. 5 is a schematic view showing a conductive thin wire constituting a pattern of a conductive film according to an embodiment of the present invention. Fig. 6 is a schematic view for explaining a pattern of a conductive film according to an embodiment of the present invention. Fig. 7 is a schematic view showing another example of the conductive film according to the embodiment of the present invention. FIG. 8 is a schematic cross-sectional view showing a configuration of a conductive film according to an embodiment of the present invention. FIG. 9 is a schematic plan view showing a configuration of a conductive film according to an embodiment of the present invention. FIG. 10 is a schematic plan view showing a configuration of a conductive film according to an embodiment of the present invention. FIG. 11 is a schematic plan view showing another example of the configuration of the conductive film according to the embodiment of the present invention. FIG. 12 is a schematic plan view showing another example of the configuration of the conductive film according to the embodiment of the present invention. FIG. 13 is a schematic plan view showing another example of the configuration of the conductive film according to the embodiment of the present invention. Fig. 14 is a schematic cross-sectional view showing a method of manufacturing a conductive film in order of steps. Fig. 15 is a schematic cross-sectional view showing a method of manufacturing a conductive film in order of steps. Fig. 16 is a schematic cross-sectional view showing a method of manufacturing a conductive film in order of steps. Fig. 17 is a schematic view showing a first example of the wiring of the embodiment of the present invention. Fig. 18 is a schematic view showing a second example of the wiring of the embodiment of the present invention. Fig. 19 is a schematic view showing a third example of the wiring of the embodiment of the present invention. Fig. 20 is a schematic view showing a fourth example of the wiring of the embodiment of the present invention. Fig. 21 is a schematic view showing a fifth example of the wiring of the embodiment of the present invention. Fig. 22 is a schematic view showing a touch panel sensor according to an embodiment of the present invention. Fig. 23 is a schematic cross-sectional view showing the touch panel sensor of the embodiment of the present invention shown in Fig. 22; Fig. 24 is a schematic cross-sectional view showing the touch panel sensor of the embodiment of the present invention shown in Fig. 22; Figure 25 is a schematic cross-sectional view of the touch panel sensor of the embodiment of the present invention shown in Figure 22 . Figure 26 is a schematic cross-sectional view of the touch panel sensor of the embodiment of the present invention shown in Figure 22 . Figure 27 is a schematic cross-sectional view of the touch panel sensor of the embodiment of the present invention shown in Figure 22 . Figure 28 is a schematic cross-sectional view of the touch panel sensor of the embodiment of the present invention shown in Figure 22 . 29 is a schematic view showing the configuration of Comparative Example 1. FIG. 30 is a schematic view showing an enlarged configuration of Comparative Example 1. FIG. 31 is a schematic view showing the configuration of Comparative Example 2. FIG. 32 is a schematic view showing an enlarged configuration of Comparative Example 2. FIG. Fig. 33 is a schematic view showing the wiring of Comparative Example 2 in detail. Fig. 34 is a drawing substitute photograph showing the result of Example 1. Fig. 35 is a schematic substitute photograph showing the result of Comparative Example 1.
14a‧‧‧第1波狀線 14a‧‧‧1st wavy line
14b‧‧‧第2波狀線 14b‧‧‧2nd wavy line
15‧‧‧導電性細線 15‧‧‧Electrical thin wires
17a、17b‧‧‧圓弧 17a, 17b‧‧‧ arc
20‧‧‧開口部 20‧‧‧ openings
21a、21b、23‧‧‧交點 21a, 21b, 23‧‧‧ intersection
22‧‧‧重疊區域 22‧‧‧Overlapping areas
B‧‧‧線 B‧‧‧ line
C‧‧‧中心線 C‧‧‧ center line
C1、C2‧‧‧線 C 1 , C 2 ‧‧‧ line
Da‧‧‧直徑 Da‧‧‧diameter
H、V‧‧‧方向 H, V‧‧ Direction
P‧‧‧間距 P‧‧‧ spacing
Pc‧‧‧距離 Pc‧‧‧ distance
γ‧‧‧角度 Γ‧‧‧ angle
Φ‧‧‧排列角度 Φ‧‧‧ alignment angle
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2015
- 2015-04-20 JP JP2015085710A patent/JP6377007B2/en active Active
-
2016
- 2016-04-12 WO PCT/JP2016/061778 patent/WO2016171033A1/en active Application Filing
- 2016-04-12 CN CN201680021775.4A patent/CN107533398B/en active Active
- 2016-04-15 TW TW105111732A patent/TWI711950B/en active
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2017
- 2017-10-13 US US15/782,944 patent/US10656772B2/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI690832B (en) * | 2017-10-20 | 2020-04-11 | 日商日本航空電子工業股份有限公司 | Touch panel |
Also Published As
Publication number | Publication date |
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JP6377007B2 (en) | 2018-08-22 |
US20180046288A1 (en) | 2018-02-15 |
WO2016171033A1 (en) | 2016-10-27 |
CN107533398A (en) | 2018-01-02 |
US10656772B2 (en) | 2020-05-19 |
TWI711950B (en) | 2020-12-01 |
JP2016206822A (en) | 2016-12-08 |
CN107533398B (en) | 2021-02-02 |
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