TW201634185A - Cutting apparatus - Google Patents

Abstract

To provide a cutting apparatus which can prevent the occurrence of problems such as carelessness of the operator even when the change of a cutting blade is started in an arbitrary step. A cutting apparatus comprises a cutting blade holding portion for holding a cutting blade, a blade assembly/disassembly device for loading and unloading the cutting blade to/from the front end portion of a main axis, an input device for inputting various commands, a control device for controlling the operation of each part, a blade inspection device for detecting the presence or absence of a blade installed on the front end portion of the main axis, and an alarm device for issuing a predetermined alarm. After an installation command of using the blade handling device to install the cutting blade at the front end portion of the main axis is inputted to the input device, the control device performs the installation operation when the blade inspection device detects the absence of a cutting blade, and the installation instruction is executed and the alarm device issues an alarm when the cutting blade is detected by the blade inspection device.

Description

Cutting device Field of invention

The present invention relates to a cutting device for an automatic tool changer having an automatic change of a cutting tool.

Background of the invention

In a small and lightweight electronic device typified by a mobile phone, a device chip having an electronic circuit (device) such as an IC has become a necessary configuration. The device wafer may be formed by dividing a surface of a semiconductor wafer composed of a material such as tantalum by a plurality of predetermined dividing lines called streets, and forming a device in each region, along the cutting path. It is manufactured by dividing a semiconductor wafer.

When a plate-shaped workpiece such as a semiconductor wafer is divided, for example, a cutting device in which a disk-shaped cutting blade is attached to a tip end portion of a main shaft that is a rotating shaft is used. When the cutting blade is rotated at a high speed to cut into the cutting path of the workpiece, and the cutting blade and the workpiece are relatively moved in a direction parallel to the cutting path, the workpiece can be cut and divided into a plurality of pieces. Wafer.

After the above-mentioned cutter is worn to a certain extent, it is replaced. Thereby, the cutting ability of the cutting device can be maintained at a high level. In recent years, In order to shorten the time required for the replacement of the cutting blade, a cutting device including an automatic tool changer that automatically replaces the cutting blade has been put into practical use (see, for example, Patent Document 1).

Further, the following arrangement of the cutter mounting mechanism is proposed: a suction port is formed on the insert seat at the end before the spindle, and the suction port allows the negative pressure to suck and fix the cutter (refer to, for example, a patent) Literature 2). In this mounting mechanism, the cutter can be fixed without using a nut or the like, so that the cutter can be replaced in a shorter period of time.

Prior technical literature Patent literature

Patent Document 1: Japanese Patent Laid-Open No. Hei 6-326186

Patent Document 2: Japanese Patent Laid-Open Publication No. 2002-154054

Summary of invention

In the above-described cutting device having an automatic tool changer, the automatic tool changer sometimes stops due to, for example, an unexpected accident. At this point, the operator must manually operate the automatic tool changer and re-replace the cutter.

However, in the case where the cutting work of the cutting tool can be re-executed from an arbitrary step, it is easy to cause a problem due to carelessness of the operator or the like. For example, when the cutting tool is mounted on the spindle, the cutting tool attached to the spindle and the newly installed cutter interfere with each other after the replacement of the cutting tool is performed. Suspect of damage to the cutting device consider.

Therefore, the replacement of the cutting tool is limited to being performed only in the removing step of removing the cutting tool from the spindle. However, when this limit is set, the spindle and the automatic tool changer must be restored to the state before the replacement work before the replacement of the cutter is resumed, so that it takes a lot of time before the replacement work is resumed. . Also, there are problems that have been implemented before them all become futile.

The present invention has been made in view of such a problem, and an object of the invention is to provide a cutting apparatus capable of preventing occurrence of a problem caused by an operator or the like even if a cutting tool is replaced from an arbitrary step. .

A cutting apparatus according to the present invention is characterized by comprising: a working chuck for holding a workpiece; and a cutting apparatus having a spindle that is rotationally driven and a cutter attached to a front end portion of the spindle, and the cutting is maintained a workpiece on the work chuck; a blade handling device having a blade holding portion for holding the cutter, and loading and unloading the cutter at a front end portion of the spindle; and moving the device so that the cutting device and the blade handling device are The loading and unloading position of the cutting blade is relatively movable between a remote position that is further away from each other than the loading and unloading position; the cartridge corresponds to the blade loading and unloading device positioned at the remote position It is configured and can accommodate a plurality of the cutting knives before or after use; the input device can input various commands; the control device controls the movement of each part; and the blade detecting device detects whether or not the front end portion of the main shaft is installed. The cutting tool; and an alarm device that issues a predetermined alarm, and when the input device inputs an instruction to install the cutter to the front end portion of the spindle with the blade handling device, the control device When the blade detecting device does not detect the cutting blade, the content of the mounting command is executed, and when the blade detecting device detects the cutting blade, the content of the mounting command is not executed, and the alarm device issues an alarm.

Preferably, in the present invention, the cutting apparatus includes a blade holder fixed to a front end portion of the spindle, the blade holder having a disk-shaped flange portion and a boss portion protruding from the flange portion; The cutting blade includes a disk-shaped base and a blade formed on an outer peripheral portion of the base, the base having a contact surface in contact with the flange portion, and the convex portion of the blade holder is formed at a central portion a through hole into which the seat portion is inserted; the blade holder includes a suction device on the contact surface side of the base that sucks the cutting blade, and the suction device includes a support surface of the flange portion on a side of the contact surface supporting the base a suction port on the side forming opening, a suction source for generating a negative pressure, a suction path connecting the suction port and the suction source, and a pressure provided in the suction path and measuring the suction path, and transmitting the measurement result to the control a pressure gauge of the device; the control device includes a memory unit and a determination unit that stores a reference set corresponding to a pressure in the suction path in a state in which the blade holder holds the cutter And a value of the measurement result transmitted from the pressure gauge, the determination unit determining, from the reference value stored in the memory unit, the measurement result whether the cutting blade is attached to the distal end portion of the spindle; the cutting blade The detecting device is composed of the pressure gauge, the memory unit, and the determining unit.

The cutting device of the present invention is configured to include a blade detecting device that detects the presence or absence of a cutting blade attached to a tip end portion of the spindle, and an alarm device that issues an alarm, and inputs the input device to the spindle to mount the cutter to the spindle. After the front end installation command, the control device executes the contents of the installation command when the blade detecting device does not detect the cutting blade, and does not execute the setting instruction when the blade detecting device detects the cutting tool, and the alarm is issued. The device issues an alert.

According to this, even if the mounting command is erroneously input in the state where the cutting tool is attached to the front end portion of the spindle, the cutting device is not damaged. As described above, according to the cutting apparatus of the present invention, even if the cutting tool is replaced from an arbitrary step, it is possible to prevent problems such as carelessness of the operator.

2‧‧‧Processing device

4, 78‧‧‧ abutments

4a‧‧‧ Opening

6‧‧‧X-axis mobile station

8‧‧‧Dust-proof drip shield

10‧‧‧Working table

10a‧‧‧ Keep face

12‧‧‧ fixture

14‧‧‧Cutting unit (cutting equipment)

16‧‧‧Support structure

18‧‧‧Cutting unit moving mechanism (mobile device)

20‧‧‧Y-axis guide

22‧‧‧Y-axis moving board

24‧‧‧Y-axis ball screw

26‧‧‧Z-axis guide

28‧‧‧Z-axis moving board

30‧‧‧Z-axis ball screw

32‧‧‧Z-axis pulse motor

34‧‧‧ spindle housing

34a‧‧‧ Containment space

34b‧‧‧Flow path (attractive flow path)

36‧‧‧ Spindle

36a, 38b‧‧ ‧ flow path (attraction path)

38‧‧‧ Blade holder

38a, 48a‧‧‧through holes

40‧‧‧Flange

40a‧‧‧Support surface

40b‧‧‧ attracting mouth

42‧‧‧seat

44‧‧‧ nuts

46‧‧‧Cutter

48‧‧‧Abutment (hub abutment)

48b‧‧‧Back (contact surface)

50‧‧‧blade

52‧‧‧Pipe (attracting flow path)

54‧‧‧Attraction source

56‧‧‧ Pressure gauge (blade testing equipment)

60‧‧‧Automatic tool changer

62‧‧‧Automatic tool changer moving mechanism (mobile device)

64‧‧‧rails

66‧‧‧moving block

68‧‧‧Ball screw

70‧‧‧ pulse motor

72‧‧‧Shell

74‧‧‧Blade handling unit (blade handling equipment)

76‧‧‧ Arm

78a‧‧‧1st bottom surface

78b‧‧‧2nd bottom surface

80‧‧‧ Blade Holder

80a‧‧‧Pushing pin

80b‧‧‧ claw

80c‧‧‧coil spring

82‧‧‧Bob

84‧‧‧Operator panel (input device)

86‧‧‧Control device (control device)

86a‧‧‧Memory (blade detection equipment)

86b‧‧‧Decision Department (blade testing equipment)

88‧‧‧Alarm device (alarm device)

X, Y, Z‧‧ Direction

Fig. 1 is a view schematically showing a configuration example of a cutting device of the embodiment.

Fig. 2 is an exploded perspective view schematically showing the configuration of the cutting unit.

Fig. 3 is a view mainly showing a cross section of the cutting unit.

Fig. 4 is a perspective view schematically showing the configuration of the periphery of the automatic tool changer.

5(A) is a perspective view schematically showing the configuration of the blade handling unit, FIG. 5(B) is a partial cross-sectional plan view schematically showing the configuration of the blade handling unit, and FIG. 5(C) is a blade seen from the cutting unit side. Side view of the handling unit.

Fig. 6 is a block diagram schematically showing a configuration example and the like of the control device.

Form for implementing the invention

Embodiments of the present invention will be described with reference to the drawings. Fig. 1 is a view schematically showing a configuration example of a cutting device of the embodiment. As shown in Figure 1, the cutting device 2 includes a base 4 that supports each configuration.

The upper surface of the base 4 is formed with a rectangular opening 4a which is long in the X-axis direction (machining direction). In the opening 4a, an X-axis moving table 6, an X-axis moving mechanism (not shown) for moving the X-axis moving table 6 in the X-axis direction, and a dust drip-proof cover 8 covering the X-axis moving mechanism are provided. .

The X-axis moving mechanism includes a pair of X-axis guide rails (not shown) that are parallel in the X-axis direction, and the X-axis moving table 6 is slidable on the X-axis guide rails. A nut portion (not shown) is provided on the lower surface side of the X-axis moving table 6, and an X-axis ball screw (not shown) parallel to the X-axis guide is screwed into the nut portion.

An X-axis pulse motor (not shown) is coupled to one end of the X-axis ball screw. As long as the X-axis ball screw is rotated by the X-axis pulse motor, the X-axis moving table 6 moves in the X-axis direction along the X-axis guide.

The upper surface of the X-axis moving table 6 is provided with a work chuck 10 that sucks and holds a workpiece (not shown) in a plate shape such as a semiconductor wafer, a resin substrate, or a ceramic substrate. The working chuck 10 is coupled to a rotational driving source (not shown) such as a motor, and is rotated about a rotating shaft parallel to the Z-axis direction (vertical direction). Again, work folder The stage 10 is moved in the X-axis direction by the X-axis moving mechanism.

The surface (upper surface) of the work chuck 10 is a holding surface 10a for sucking and holding the workpiece. The holding surface 10a is connected to a suction source (not shown) through a flow path (not shown) formed inside the working chuck 10. A jig 12 for holding and fixing a frame (not shown) that supports the workpiece is provided around the work chuck 10.

A gate-type support structure 16 supporting the cutting unit (cutting device) 14 is disposed on the upper surface of the base 4 so as to span the opening 4a. A cutting unit moving mechanism (mobile device) 18 that moves the cutting unit 14 in the Y-axis direction (index feeding direction) and the Z-axis direction is provided on the surface side of the support structure 16.

The cutting unit moving mechanism 18 includes a pair of Y-axis guide rails 20 that are disposed on the upper surface of the support structure 16 and that are parallel to the Y-axis direction. On the Y-axis guide rail 20, the Y-axis moving plate 22 constituting the cutting unit moving mechanism 18 is set to be slidable.

A nut portion (not shown) is provided on the back side (rear side) of the Y-axis moving plate 22, and a Y-axis ball screw 24 that is parallel to the Y-axis rail 20 is screwed into the nut portion. A Y-axis pulse motor (not shown) is coupled to one end of the Y-axis ball screw 24. As long as the Y-axis ball screw 24 is rotated by the Y-axis pulse motor, the Y-axis moving plate 22 moves in the Y-axis direction along the Y-axis guide 20.

A pair of Z-axis guide rails 26 parallel to the Z-axis direction are provided on the surface of the Y-axis moving plate 22. On the Z-axis guide rail 26, a Z-axis moving plate 28 is slidably provided.

A nut portion (not shown) is provided on the back side of the Z-axis moving plate 28, and a Z-axis ball screw 30 parallel to the Z-axis guide 26 is screwed into the nut portion. A Z-axis pulse motor 32 is coupled to one end of the Z-axis ball screw 30. When the Z-axis ball screw 30 is rotated by the Z-axis pulse motor 32, the Z-axis moving plate 28 moves in the Z-axis direction along the Z-axis guide 26.

A cutting unit 14 that cuts a workpiece to be held by the work chuck 10 is provided at a lower portion of the Z-axis moving plate 28. As described above, as long as the Y-axis moving plate 22 and the Z-axis moving plate 28 are moved, the cutting unit 14 can move in the Y-axis direction and the Z-axis direction.

2 is an exploded perspective view schematically showing the configuration of the cutting unit 14, and FIG. 3 is a view mainly showing a cross section of the cutting unit 14. As shown in FIGS. 2 and 3, the cutting unit 14 is provided with a spindle housing 34 that is fixed to a lower portion of the Z-axis moving plate 28.

A housing space 34a that houses the spindle 36 (FIG. 3) that serves as a rotating shaft is formed inside the spindle housing 34. The main shaft 36 is supported in a floating state by the compressed air supplied to the accommodating space 34a.

The front end portion (one end portion) of the main shaft 36 is formed in a truncated cone shape and exposed to the outside of the main shaft housing 34. A blade holder 38 is attached to the front end portion of the main shaft 36. On the other hand, a motor (not shown) for rotating the main shaft 36 is coupled to the base end portion (the other end side) of the main shaft 36.

The blade holder 38 includes a disk-shaped flange portion 40 that extends radially outward, and a boss portion 42 that protrudes from the surface side of the flange portion 40. A through hole 38a penetrating the flange portion 40 and the boss portion 42 is formed in the center of the insert holder 38, and the tip end portion of the main shaft 36 is fitted into the through hole 38a from the back side.

A thread groove is provided on the outer peripheral surface of the front end of the main shaft 36, and the nut 44 can be locked. The front end portion of the main shaft 36 has been fitted to the blade holder 38. In the state of the through hole 38a, the insert holder 38 can be fixed to the main shaft 36 as long as the nut 44 can be locked to the front end of the main shaft 36.

The outer peripheral side of the surface of the flange portion 40 is a support surface 40a that supports the back side of the cutting blade 46. The support surface 40a is formed in an annular shape as viewed in the Y-axis direction (the axial direction of the main shaft 36), and is in contact with the back side of the cutting blade 46.

The cutting blade 46 is a so-called hub blade, and an annular blade 50 for cutting a workpiece is provided on the outer peripheral portion of the disk-shaped base (hub abutment) 48. The blade 50 is formed by mixing abrasive grains such as diamond or CBN (Cubic Boron Nitride) into a bonding material (bonding material) such as metal or resin to form a predetermined thickness.

A through hole 48a having a diameter substantially equal to that of the boss portion 42 is formed in the center of the base 48. By fitting the boss portion 42 to the through hole 48a and bringing the support surface 40a of the flange portion 40 into contact with the back surface (contact surface) 48b of the base 48, the cutting blade 46 can be attached to the blade holder 38. on.

A flow path (suction path) 38b that transmits a negative pressure is formed inside the blade holder 38. One end side of the flow path 38b forms an opening on the surface side (the side of the support surface 40a) of the flange portion 40, and serves as a suction port 40b for sucking the cutting blade 46. On the other hand, the other end side of the flow path 38b is formed with an opening on the inner circumferential surface of the through hole 38a.

A flow path (suction path) 36a that transmits a negative pressure is also formed inside the main shaft 36. One end side of the flow path 36a is formed with an opening on the outer peripheral surface of the front end portion of the main shaft 38, and is connected to the other end side of the flow path 38b.

On the other hand, the other end side of the flow path 36a is formed on the main axis. The flow path (suction flow path) 34b of the casing 34 and the pipe (suction flow path) 52 connected to the flow path 34b are connected to a suction source 54 that generates a negative pressure. Further, the pipe 52 is provided with a pressure gauge 56 that measures the internal pressure of the flow path 38b, the flow path 36a, the flow path 34b, and the pipe 52.

As described above, the cutting blade 46 is attached to the blade holder 38, and the negative pressure of the suction source 54 is applied to the base 48 through the pipe 52, the flow path 34b, the flow path 36a, the flow path 38b, and the suction port 40b. On the back side 48b side, the cutting blade 46 can be fixed to the seat flange 40.

As shown in FIG. 1, an automatic tool changer 60 that automatically replaces the cutting blade 46 is provided at a position facing the cutting blade 46 mounted on the cutting unit 14. FIG. 4 is a perspective view schematically showing a configuration of a periphery of the automatic tool changer 60.

As shown in FIG. 4, an automatic tool changer moving mechanism (mobile device) 62 that moves the automatic tool changer 60 in the X-axis direction is provided below the automatic tool changer 60.

The automatic tool changer moving mechanism 62 is provided with a pair of guide rails 64 that are parallel in the X-axis direction, and a moving block 66 is slidably provided on the guide rails 64. A nut portion (not shown) is disposed on the lower surface side of the moving block 66, and a ball screw 68 parallel to the guide rail 64 is screwed into the nut portion.

A pulse motor 70 is coupled to one end of the ball screw 68. As long as the ball screw 68 is rotated by the pulse motor 70, the moving block 66 moves in the X-axis direction along the guide rail 64.

A housing 72 of the automatic tool changer 60 is fixed to the upper portion of the moving block 66. The side of the casing 72 (on the side of the cutting unit 14) is provided with a cutter 46 that can be mounted to The blade holder 38 (the front end portion of the main shaft 36) and the blade attaching and detaching unit (blade handling device) 74 for removing the cutting blade 46 are detachable from the front end portion of the main shaft 36.

Fig. 5(A) is a perspective view schematically showing the configuration of the blade attaching and detaching unit 74, Fig. 5(B) is a partial cross-sectional plan view schematically showing the blade attaching and detaching unit 74, and Fig. 5(C) is a view seen from the side of the cutting unit 14 A side view of the blade handling unit 74.

As shown in FIGS. 5(A), 5(B), and 5(C), the blade attaching and detaching unit 74 is provided with an arm 76 extending from the casing 72. The front end portion of the arm 76 is fixed to the first bottom surface 78a side of the base 78 formed in a columnar shape.

The blade holding portion 80 is provided on the second bottom surface 78b side of the base 78. The blade holding portion 80 includes a pressing pin 80a that protrudes from the center of the second bottom surface 78b, three claws 80b that are disposed around the pressing pin 80a and that hold the cutting blade 46, and a coil spring 80c that attaches the pressing pin 80a.

The automatic tool changer 60 (the blade attaching and detaching unit 74) and the cutting unit 14 configured as described above are relatively moved by the automatic tool changer moving mechanism 62 and the cutting unit moving mechanism 18.

Specifically, the automatic tool changer 60 and the cutting unit 14 are moved between a loading and unloading position at which the cutting blade 46 can be attached and detached to the cutting unit 14, and a distant position that is further away from each other than the attaching and detaching position.

As shown in Fig. 1, a cartridge 82 that can accommodate a plurality of cutting blades 46 before or after use is disposed at a position opposed to the automatic tool changer 60 positioned at a distant position.

The cutter 46 accommodated in the cartridge 82 can be carried out by, for example, the automatic tool changer 60 and attached to the insert holder 38. Also installed The cutting blade 46 on the blade holder 38 can be detached from the main shaft by the blade holding portion 80 of the automatic tool changer 60, and can be accommodated in the cartridge 82.

As shown in FIG. 1, the upper surface of the base 4 is provided with an operation panel (input device) 84 into which various instructions (instructions) of the operator can be input. Further, the components of the X-axis moving mechanism, the work chuck 10, the cutting unit 14, the cutting unit moving mechanism 18, the pressure gauge 56, the automatic tool changer 60, the automatic tool changer moving mechanism 62, and the operation panel 84 are all connected to each other. Control device (control device) 86.

FIG. 6 is a block diagram schematically showing an example of the configuration of the control device 86. Further, in FIG. 6, a part of the connection relationship with respect to the control device 86 is also collectively illustrated. In the cutting device 2 of the present embodiment, when an instruction (installation command) for mounting the cutting blade 46 to the blade holder 38 is input to the operation panel 84, the control device 86 is measured by the pressure gauge 56. The internal pressure of the flow path 38b, the flow path 36a, the flow path 34b, and the pipe 52.

The control device 86 is provided with a memory unit 86a that can store various kinds of information, and the measurement value (measurement result) transmitted from the pressure gauge 56 is stored in the memory unit 86a. Further, the control device 86 includes a determination unit 86b that determines whether or not the cutting blade 46 is attached to the blade holder 38 based on the measurement value transmitted from the pressure gauge 56.

The determination unit 86b compares the measured value transmitted from the pressure gauge 56 with a reference value (threshold value) for determination that is previously stored in the memory unit 86a. The reference value for determination is set in accordance with the internal pressure of the flow path 38b, the flow path 36a, the flow path 34b, and the pipe 52 in a state in which the cutting blade 46 is mounted on the insert holder 38.

For example, when the measured value is larger than the reference value for determination, the determination unit 86b determines that the cutting blade 46 is not mounted on the insert holder 38. On the other hand, when the measured value is smaller than the reference value for determination, the determining unit 86b determines that the cutting blade 46 is attached to the insert holder 38.

In this manner, the pressure gauge 56, the memory unit 86a, and the determination unit 86b function as a blade detecting mechanism (blade detecting device) that detects the presence or absence of the cutting blade 46 attached to the blade holder 38.

In the case where it is determined that the cutting blade 46 is not mounted on the blade holder 38, the control device 86 controls the cutting unit moving mechanism 18, the automatic tool changer 60, and the automatic tool changer moving mechanism 62 to cut the cutter 46 is mounted to the blade holder 38.

On the other hand, when it is determined that the cutting blade 46 is mounted on the insert holder 38, the control device 86 does not mount the cutting blade 46 to the insert holder 38, but is issued by an alarm device (alarm device) 88. alarm.

As described above, the cutting device 2 of the present embodiment is configured to include a blade detecting mechanism (blade detecting device) that detects the presence or absence of the cutting blade 46 attached to the blade holder 38 (the tip end portion of the spindle 36), and an alarm device that issues an alarm. (alarm device) 88; when an instruction (installation command) for attaching the cutter 46 to the blade holder 38 is input to the operation panel (input device) 84, the control device (control device) 86 is in the blade detecting mechanism When the cutting blade 46 is not detected, the content of the instruction is executed, and when the cutting tool 46 is detected by the blade detecting mechanism, the content of the instruction is not performed, and the alarm device (alarm device) 88 issues an alarm.

Therefore, even if the instruction to mount is mistakenly input in a state where the blade holder 38 has the cutter 46 attached thereto, the cutting device 2 may not be damaged. As described above, according to the cutting device 2 of the present embodiment, even from The replacement of the cutting blade 46 is started in an arbitrary step, and the occurrence of a problem such as carelessness by the operator can be prevented.

In addition, the configuration, the method, and the like of the above-described embodiments can be appropriately modified and implemented without departing from the scope of the invention.

18‧‧‧Cutting unit moving mechanism

56‧‧‧ pressure gauge

60‧‧‧Automatic tool changer

62‧‧‧Automatic tool changer moving mechanism

84‧‧‧Operator panel

86‧‧‧Control device

86a‧‧‧Memory Department

86b‧‧‧Decision Department

88‧‧‧Alarm device

Claims (2)

A cutting device comprising: a working chuck for holding a workpiece; and a cutting device having a spindle that is rotationally driven and a cutter attached to a front end portion of the spindle, and the cutting is held on the working chuck a workpiece handling device having a blade holding portion for holding the cutting blade, and loading and unloading the cutting blade at a front end portion of the spindle; and moving the device to enable the cutting device and the blade handling device to be detachable from the cutting blade a loading and unloading position, and a relative movement between the remote positions that are further away from each other than the loading and unloading position; the cartridge is disposed corresponding to the blade loading and unloading device positioned at the remote position, and can be accommodated before or after use The cutting tool; the input device can input various instructions; the control device controls the movement of each part; the blade detecting device detects whether the cutter is installed at the front end of the spindle; and the alarm device issues a predetermined alarm, When an input instruction is input to the input device to install the cutter to the front end portion of the spindle by the blade handling device, The control device may carry out the content of the instruction is mounted to the blade when the detection device does not detect the cutting blade, in order to detect the cutting insert of the detection device The contents of the installation command are not executed when the knife is issued, and an alarm is issued by the alarm device. The cutting device according to claim 1, wherein the cutting device includes a blade holder fixed to a front end portion of the spindle, the blade holder having a disk-shaped flange portion and a boss portion protruding from the flange portion, The cutting blade includes a disk-shaped base and a blade formed on an outer peripheral portion of the base, the base having a contact surface in contact with the flange portion, and the convex portion of the blade holder is formed at a central portion a through hole into which the seat portion is inserted, the blade holder having a suction device on the contact surface side of the base that sucks the cutting blade, the suction device having a support surface of the flange portion supporting the contact surface side of the base a suction port on the side forming opening, a suction source for generating a negative pressure, a suction path connecting the suction port and the suction source, and a pressure provided in the suction path and measuring the suction path, and transmitting the measurement result to the control a pressure gauge for a device, comprising: a memory unit and a determination unit, wherein the memory unit stores a reference value set corresponding to a pressure in the suction path in a state in which the blade holder holds the cutting blade, and a pressure from the pressure Transfer As a result of the measurement, the determination unit determines whether the cutting tool is attached to the distal end portion of the spindle from the reference value stored in the memory unit and the measurement result, and the cutter detecting device is the pressure gauge and the memory Department and the judgment The constitution of the Ministry.