TW201537310A - Light-source device, discharge lamp and manufacturing method therefor, and exposure device - Google Patents

Abstract

A light-source device (30) for making a discharge lamp (1) emit light, the discharge lamp having a glass tube in which an anode and a cathode are provided and a base part (28, 26) provided, for a light-emitting part of the discharge lamp (1), to each of the anode side and cathode side, wherein the light source device is provided with: a storage part (54) for storing the discharge lamp (1); a support member (33) for removably supporting the base parts (26) of the discharge lamp (1); a clamp mechanism (52) for removably coupling power cables (24) to the base parts (28) of the discharge lamp (1) that are supported by the support member (33); and a lamp conveyance system (56) for conveying the discharge lamp (1), by holding the base parts (28), between the storage part (54) and the support member (33) while the support of the base parts (26) by the support member (33) and the coupling of the power cables (24) to the base parts (28) by the clamp mechanism (52) are released. The discharge lamp (1) can be efficiently replaced.

Description

Light source device, discharge lamp and manufacturing method thereof, and exposure device

The present invention relates to a discharge lamp, a method of manufacturing a discharge lamp, a method of replacing a discharge lamp, a lighting method, a light source device including the discharge lamp, an exposure apparatus including the light source device, and a device manufacturing method using the exposure device.

In the lithography process for manufacturing various components (liquid crystal display elements, semiconductor elements, etc.), it is used to transfer a pattern formed on a photomask to a substrate (glass plate or semiconductor wafer, etc.) coated with a photosensitive material. Among the exposure apparatuses such as the one-exposure type projection exposure apparatus and the scanning exposure type projection exposure apparatus, there is an exposure apparatus equipped with an exposure light source apparatus including a discharge lamp such as an ultrahigh pressure mercury lamp and a condensing mirror.

In a conventional light source device, a flange portion and a step portion are provided on a lamp socket of one of the discharge lamps, and the surface of the base portion having the opening is placed in the flange portion, and the opening is The step portion is biased downward by a lever member or the like, and the discharge lamp is fixed (for example, refer to Patent Document 1). Further, when the discharge time for the discharge lamp for the exposure device exceeds a predetermined allowable time, there is a possibility that the exposure performance (resolution, etc.) is deteriorated due to a decrease in illuminance. Therefore, in the past, when the accumulated use time of the discharge lamp exceeded the allowable time, the operator replaced the discharge lamp with an unused discharge lamp by manual operation.

Advanced technical literature

[Patent Document 1] International Publication No. 2007/066947

Since the discharge lamp used in the exposure apparatus is high in temperature, when the operator wants to replace the discharge lamp by manual operation, after the discharge lamp is turned off, for example, it takes 30 minutes or more to perform the operation. Therefore, the downtime of the exposure apparatus is long, and the throughput (productivity) of the exposure process is low.

Further, in recent scanning exposure type exposure apparatuses, in order to improve productivity, it is required to illuminate a wider area of the illuminating area of the reticle with exposure light and to scan the reticle at a higher speed. Therefore, it is necessary to supply light of higher illuminance from the light source apparatus. For this purpose, for example, it is considered to equip a plurality of discharge lamps, and the light from the plurality of discharge lamps is combined and used. However, in the case where the light source device has a plurality of discharge lamps, since the frequency of replacement of the discharge lamps is increased, there is a possibility that the down time of the exposure device becomes longer, and the productivity is suppressed.

According to a first aspect of the present invention, a light source device is provided, wherein a glass member having a first electrode and a second electrode for forming a light-emitting portion is provided, and the glass member is provided on the light-emitting portion The discharge lamp of the first electrode member and the second nozzle member on the first electrode side and the second electrode member emits light, and is characterized in that: a storage unit for storing the discharge lamp; and the second discharge lamp a socket portion detachably supported by the socket member; and a member for transmitting electric power detachably coupled to the coupling portion of the first socket member of the discharge lamp supported by the support portion; The support portion holds the first cap member in a state in which the second cap member is supported by the support portion and the connection between the member for transmitting electric power to the first cap member is removed by the connection portion. A transport unit that transports between the storage unit and the support unit.

The second aspect provides a method for replacing a discharge lamp, which is replaced by a light. a glass member of the portion, and a discharge lamp of the first cap member and the second cap member that are provided to sandwich the glass member, the method comprising: contacting the surface of the first cap member with the discharge lamp An operation of disconnecting a member that transmits electric power from the connected portion; an operation of disengaging the second cap member of the discharge lamp from the support member; and holding the first cap member including the discharge lamp The holding portion of the flat portion or the inclined portion transports the discharge lamp to the storage portion.

The third aspect provides a method for lighting a discharge lamp, which is lit to form a light The glass member of the portion and the discharge lamp of the first cap member and the second cap member that are provided to sandwich the glass member, the surface of the member that transmits electric power is in contact with the first lamp of the discharge lamp An operation of the connected portion of the port member; an operation of supporting the second cap member of the discharge lamp with a support member capable of supplying electric power; and a member for transmitting electric power and the support member supplying electric power to the discharge lamp to illuminate The action of the discharge lamp.

The fourth aspect provides a discharge lamp having a first electrode for forming a light-emitting portion And a glass member in which the second electrode is provided, and a first cap member and a second cap member which are provided on the first electrode side and the second electrode side of the glass member, respectively, in the light emitting portion, and are characterized in that The first socket member has a connected portion that can be in contact with a member that transmits electric power, can be in contact with the member to reduce electrical contact with the member, and includes a non-planar portion that can be held by the transport portion or The held portion of the inclined portion.

The fifth aspect provides a method of manufacturing a discharge lamp of the present invention, which comprises The operation of manufacturing the glass member to which the conductive member is connected at one end, the operation of manufacturing the covering member having the connected portion and the held portion, and the manner of covering the conductive member on one end side of the glass member Fix the action of the covering member. .

The sixth aspect provides a method of manufacturing a discharge lamp of the present invention, which comprises And an operation of preparing the glass member provided at one end of the first conductive member electrically connected to the first electrode or the second electrode; and preparing a second conductive member in which the connected portion and the held portion are formed And an operation of connecting the second conductive member to the first conductive member on one end side of the glass member.

The seventh aspect provides an exposure apparatus having the light source of the aspect of the invention An illumination system for illuminating the reticle with light emitted from the discharge lamp of the light source device, and a projection optical system for projecting an image of the pattern of the reticle onto the substrate.

The eighth aspect provides a component manufacturing method comprising: using the aspect of the invention The operation of the exposure device to form a pattern of the photosensitive layer on the substrate, and the operation of processing the substrate on which the pattern is formed.

1, 1A, 1B‧‧‧ discharge lamps

1N‧‧‧Unused discharge lamps

2‧‧‧Elliptical mirror

2a‧‧‧ openings

3‧‧‧Bending mirror

4‧‧‧Window components

5‧‧‧Interference filter

6‧‧‧Future eye lens

7‧‧‧Variable aperture stop

8‧‧‧1st relay lens

9‧‧‧Photomask blinds

10‧‧‧2nd relay lens

11‧‧‧Mirror

12‧‧‧ Concentrating lens

13‧‧‧Lighting Optics

14‧‧‧Main Control System

17R, 17W‧‧‧ moving mirror

18R, 18W‧‧‧ laser interferometer

19R, 19W‧‧‧ drive system

20‧‧‧Power Department

21‧‧‧Alignment

22‧‧‧Space Image Measurement Department

23, 24‧‧‧ cable

25, 25A‧‧‧ glass tube

25a, 25Aa‧‧ ‧ bulb department

25b, 25c, 25Ab, 25Ac‧‧‧ rods

26, 126‧‧‧ cathode side lamp mouth

26a‧‧‧Flange

26b‧‧‧Axis

26d‧‧‧ slot department

26e, 26i‧‧‧ corner

26f‧‧‧ recess (section)

26g‧‧‧ pressed face

26h‧‧‧Fixed Department

26k‧‧‧Little Trails Department

26p‧‧‧Link Department

26q‧‧‧ openings

27A, 27B‧‧‧ openings (positioning department)

28, 128, 128A‧‧‧Anode side lamp mouth

28A, 28D‧‧‧ lamp mouth

28a, 28Aa, 28Ba, 28Ca, 28Da‧‧‧ Terminals

28b, 28c, 28Ab, 28Ac, 28Bb, 28Bc, 28Cb, 28Cc‧‧‧ Planar

28d, 28Ad, 28Bd, 28Cd‧‧‧ recess

28e‧‧‧The Ministry of Control

28f, 28g, 28h, 28Cf, 28Cg, 28Ch‧‧‧ flat

28i, 128i, 128Ai‧‧ ‧ heat dissipation department

28j, 128j, 128Aj‧‧ ‧ heat sink

29A, 29B, 29C‧‧‧1st to 3rd light boxes

30, 30A, 30B, 30D‧‧‧ light source devices

31‧‧‧Lightbox

31A, 31B‧‧‧ shell

31Aa‧‧‧ Opening

31Ab‧‧‧ openings

32‧‧‧Light source control system

33‧‧‧Support members

34‧‧‧ drive unit

34A‧‧‧Clamp mechanism

36‧‧‧ Pull out

36c‧‧‧Connected Department

38, 38A‧‧‧Leverage

38Aa‧‧‧End

39‧‧‧ coil spring

40‧‧‧ Drive Department

41‧‧‧ Guides

42‧‧‧ shading members

43‧‧‧Linking components

45, 45A‧‧‧ lamp replacement door

50, 50C‧‧‧Replacement device

51, 51A~51C‧‧‧Chassis

51a‧‧‧ openings

51b‧‧‧Window Department

52, 52A, 52B‧‧‧ clamp mechanism

54‧‧ ‧ Custody Department

56, 56A, 56B, 56C, 56D‧‧‧ lamp transmission system

60, 60A‧‧‧ Pull out the drive unit

61‧‧‧ Guides

62, 62A‧‧‧Abutment

62a, 62Aa‧‧‧ front end

63‧‧‧ Drive Department

64‧‧‧Relay components

65‧‧‧Support members

66, 66A‧‧‧ power supply block

66a‧‧‧Slots

67‧‧‧ benchmark leverage

68‧‧‧Stretched coil spring

69‧‧‧Drive lever

70‧‧‧Roller

71, 71H, 71V‧‧‧ linear guides

71S‧‧‧Guide

72, 72A, 72B‧‧‧ drive unit of the clamp mechanism

72C‧‧‧Power supply socket replacement drive unit

73‧‧‧ Guides

74‧‧‧Sliding parts

75, 75A‧‧‧ movable table

75Aa‧‧‧ long hole

75B‧‧‧Base member

75C‧‧‧Support table

76‧‧‧ Drive Department

76a, 76b‧‧‧ joint

76L‧‧‧ linear actuator

77‧‧‧ Drive Department

79‧‧‧Rotating table

79a‧‧‧ Opening

79b‧‧‧Rotary axis

80‧‧‧ Drive Department

82‧‧‧Support

83‧‧‧Rotary axis

84, 84A, 84B‧‧‧Z-axis drive mechanism

85, 85A, 85B‧‧‧ Holding claw opening and closing mechanism

85D‧‧‧Hands

86, 86A, 86B‧‧‧ claws

86a‧‧ sales

86D‧‧‧ finger

87‧‧‧ Positioning components

88‧‧‧Spring parts

89A‧‧‧ movable rod

89B‧‧‧Installation components

89C‧‧‧ pulley

89D‧‧‧Steel cable

89E‧‧‧Stretched coil spring

89F‧‧‧Roller

89G‧‧‧ rod

90B‧‧‧X-axis guide

90C‧‧‧Support members

90D‧‧‧Spinning drive

90E‧‧‧Winding

90F‧‧‧support member

90G‧‧‧Winding

90I‧‧‧Y-axis drive unit

90R‧‧‧ Storage Department

90X‧‧‧X-axis drive mechanism

92‧‧‧ chamber

94‧‧‧ Lifting Department

95‧‧‧lift

126a‧‧‧Flange

126b, 128c‧‧‧ shaft

126h‧‧‧ fixed department

126i‧‧‧To the corner

126j, 128d‧‧‧ front end

126k, 128k, 128Ak‧‧‧ connection

128Ae‧‧‧Belt Department

128a‧‧‧Terminal Department

128b‧‧‧Connecting Department

128m, 128Am‧‧‧ middle part

152‧‧‧Power socket

153‧‧‧ Linkage Department

153a‧‧‧Contact surface

153c‧‧‧Deduction Department

154‧‧‧Outer tube

154a‧‧‧Flange

154c‧‧‧Ventinel

155‧‧‧ button switch

155a‧‧‧Departure

155b‧‧‧Cone

156‧‧‧Compressed coil spring

160, 162‧‧‧ Holding Department

164‧‧‧1st link

164a, 164b, 164c‧‧‧ wrist

165‧‧‧Piston Department

166a‧‧‧ openings

167A, 167B, 167C‧‧‧2nd link

168A, 168B, 168C‧‧‧3rd link

169A, 169B, 169C‧‧‧ Arms

172‧‧‧Shell

173a‧‧‧Box components

173b‧‧‧ lower board

173c‧‧‧Small frame members

174‧‧‧Cylinder components

174a‧‧‧Flange

174b‧‧‧ head

175‧‧‧Installation components

176‧‧‧boot block

177‧‧‧Upper board

178‧‧‧ rod members

179‧‧‧Stretched coil spring

180‧‧‧Compressed coil spring

181‧‧‧Guide bars

226, 228‧‧‧ lamp tube

226a‧‧‧End

226b‧‧ ‧Clamping Department

226c‧‧‧ screw hole

228a‧‧‧Small convex

228b‧‧‧ screw hole

E2‧‧‧Decoction

EL1‧‧‧Anode

EL2‧‧‧ cathode

EX‧‧‧Exposure device

H1, h2, h3, h4‧‧‧ hole

IL‧‧‧Exposure light

M‧‧‧Photo Mask

MST‧‧‧Photomask stage

P‧‧‧ plates

PL‧‧‧Projection Optics

PST‧‧‧Substrate stage

RT‧‧‧ roof

Fig. 1 is a view showing a schematic configuration of an exposure apparatus according to a first embodiment.

2(A) is a view showing the discharge lamp of FIG. 1, (B) is an enlarged perspective view showing the anode side opening portion of FIG. 2(A), and (C) is taken along line CC of FIG. 2(A). Sectional view.

Fig. 3(A) is a view of the anode side mouth portion viewed from two directions, and (B), (C), (D), and (E) are observed in the first, second, third, and third directions from two directions, respectively. A view of the anode side mouth portion of the fourth modification.

4(A) is a partially cutaway plan view showing the light source device of FIG. 1, and FIG. 4(B) is a partially cutaway side view showing the light source device of FIG. 4(A).

Fig. 5 is a perspective view showing the anode side mouth portion of the discharge lamp and the clamp mechanism.

Fig. 6(A) is a partially cutaway plan view showing the light source device in the moving sliding portion, (B)

A partially cutaway side view showing the light source device of Fig. 5(A) is shown.

Fig. 7(A) is a view showing a state of the anode side opening portion of the clamp discharge lamp, and Fig. 7(B) is a view showing a state in which the clamp of the cap portion is released.

Fig. 8 is a partially cutaway side view showing the light source device.

Fig. 9(A) is a plan view showing a state in which the anode-side lamp opening portion is sandwiched by the lamp holding claw, and (B) is a side view of Fig. 9(A).

Fig. 10(A) is a partially cutaway plan view showing a light source device in a moving discharge lamp, and Fig. 10(B) is a partially cutaway side view showing the light source device of Fig. 10(A).

Fig. 11 is a view showing a positioning portion of a rotating disk for lamp storage.

Figure 12 is an exploded perspective view showing a portion of the discharge lamp in manufacture.

Fig. 13(A) is a plan view showing a part of a clamp mechanism of an anode side opening portion of a modification, and Fig. 13(B) is a side view of Fig. 13(A).

Fig. 14(A) is a partially cutaway side view showing the caliper mechanism of the anode side lamp opening portion of another modification, and Fig. 14(B) is a partially cutaway view showing the state in which the nipper of the anode side lamp opening portion is removed. Side view.

Fig. 15 is a partially cutaway side view showing the state in which the jaws of the cathode side lamp portion are removed.

Fig. 16 is a partially cutaway side view showing the light source device of the second embodiment.

Fig. 17 is a partially cutaway side view showing a state in which the sliding portion is pulled out.

Fig. 18 is a partially cutaway side view showing a light source device according to a modification of the second embodiment.

Fig. 19(A) is a view showing the discharge lamp of the third embodiment, and Fig. 19(B) is a cross-sectional view showing the state of the anode side opening portion of the clamp Fig. 19(A).

Fig. 20(A) is a partially cutaway plan view showing a light source device according to a third embodiment, and Fig. 20(B) is a partially cutaway side view showing the light source device of Fig. 20(A).

Fig. 21 is a partially cutaway side view showing a state in which the sliding portion is pulled out.

Fig. 22 (A) is a partially enlarged cross-sectional view showing a power supply socket and a socket holding portion that are engaged with the anode side light port portion, and Fig. 22 (B) is a partially enlarged cross-sectional view showing a state in which the power supply socket is held by the socket holding portion.

Fig. 23(A) is a partially enlarged cross-sectional view showing the operation for removing the power supply socket that is engaged with the socket portion, and Fig. 23(B) is a partially enlarged cross-sectional view showing the state immediately before the power supply socket is removed.

Fig. 24 is a partially enlarged cross-sectional view showing a state in which the power supply socket of the lamp socket is removed.

Fig. 25(A) is a partially cutaway plan view showing a light source device according to a third embodiment, and Fig. 25(B) is a partially cutaway side view showing the light source device of Fig. 25(A).

Fig. 26(A) is a plan view showing a main part of the exposure apparatus of the fourth embodiment, and Fig. 26(B) is a plan view showing a main part of a state in which the discharge lamp is replaced.

Fig. 27 is a partially cutaway side view showing the exposure apparatus of the fourth embodiment.

Fig. 28 is a view showing a discharge lamp of a fifth embodiment.

Fig. 29 (A) is a cross-sectional view showing the lamp replacement holding mechanism of the fifth embodiment, and Fig. 29 (B) is a cross-sectional view of the holding mechanism of Fig. 29 (A) viewed from the front.

Fig. 30(A) is a view showing a main portion of the discharge lamp and the lamp replacement hand portion, and Fig. 30(B) is a view showing a main portion in a state immediately before the anode side lamp opening portion is held by the hand.

Fig. 31(A) is a view showing a main part in a state in which the anode side mouth portion is held by the hand, and Fig. 31(B) is a view showing a main part in a state in which the anode side mouth portion is lifted by the hand.

Fig. 32(A) is a flow chart showing an example of a method of replacing a discharge lamp, and Fig. 32(B) is a flow chart showing an example of a method of manufacturing a discharge lamp.

Figure 33 is a flow chart showing a manufacturing example of one of the electronic components.

[First Embodiment]

Hereinafter, a first embodiment of the present invention will be described with reference to Figs. 1 to 12 . Fig. 1 shows a schematic configuration of an exposure apparatus EX including a light source device 30 of the present embodiment. The exposure device EX is, for example, a scanning exposure type projection exposure device. In FIG. 1, the light source device 30 includes a discharge lamp 1 composed of an arc discharge type ultrahigh pressure mercury lamp, a support member 33 that holds the cathode side socket portion 26 of the discharge lamp 1, and a pull-out portion 36 of the movable support member 33 (refer to 4(B)), the drive unit 34 that fixes and releases the support member 33 to the support member 33, and the elliptical mirror 2 (condensing mirror) disposed so as to surround the glass tube 25 (bulb) of the discharge lamp 1. And a box-shaped light box 31 such as the discharge lamp 1 and the elliptical mirror 2 is housed during exposure (when the discharge lamp 1 is used). At the time of exposure, the light-emitting portion in the glass tube 25 of the discharge lamp 1 is disposed, for example, in the vicinity of the first focus of the elliptical mirror 2.

Further, the light source device 30 has a flexible cable 24 that is detachably coupled to the anode-side socket portion 28 of the discharge lamp 1, and is connected to the cathode-side socket portion 26 of the discharge lamp 1 through the support member 33. The flexible cable 23, the power supply unit 20 that supplies electric power (current) to the discharge lamp 1 through the cable lines 23, 24 to cause the discharge lamp 1 to emit light, and the fully automatic replacement device 50 for replacing the used discharge lamp 1 . The replacement device 50 includes a clamp mechanism 52 that attaches and detaches the cable 24 to the anode-side socket portion 28, a storage portion 54 that stores the discharge lamp 1, and a lamp transport that transports the discharge lamp 1 between the support member 33 and the storage portion 54. The box 56 is connected to the box-shaped case 51 of the storage and storage unit 54 and the lamp transport unit 56.

Further, as shown in FIG. 4(B), the support member 33 is actually a substantially cylindrical metal (conductive) member in which an endless belt-shaped flange portion is formed in the upper portion. Support member 33, such as As will be described later, the support member 33 and the pull-out portion 36 are electrically insulated by the flange portion being fixed to the center of the pull-out portion 36 supported by the guide 41 movable along the inner surface of the light box 31. Further, a drive unit 34 for the socket portion 26 is provided on the bottom surface of the pull-out portion 36.

In FIG. 1, a light source device 30 has a power supply unit 20, a driving unit 34, and control The light source control system 32 that operates the lamp transport system 56 or the like. The light source control system 32 monitors the cumulative use time of the discharge lamp 1, and when the accumulated use time reaches a predetermined allowable time, the replacement device 50 is activated to replace the used discharge lamp 1 with an unused discharge lamp. The detailed configuration and operation of the light source device 30 will be described later.

The exposure device EX is provided with a light beam selected from the light source device 30 The illumination optical system 13 of the exposure light IL illumination mask M projects the image of the pattern of the mask M onto the sheet P (photosensitive substrate) composed of the glass substrate coated with the resist under the irradiation of the exposure light IL. The projection optical system PL on the surface, the mask stage MST of the moving mask M, the substrate stage PST of the moving sheet P, and the main control system 14 composed of a computer that collectively controls the operation of the entire exposure apparatus including the light source unit 30 .

For example, the exposure device EX is an exposure device for manufacturing a liquid crystal display element, and is exposed. The main body portion of the optical device EX (the portion including the photomask stage MST, the projection optical system PL, and the substrate stage PST) is disposed inside a box-shaped chamber (not shown) located in a manufacturing factory, and the light source device 30 is disposed in the cavity The roof of the room is RT. The light source device 30 supplies the information of the intention to the main control system 14 when the accumulated use time of the discharge lamp 1 reaches the allowable time. According to this, the main control system 14 stops the exposure operation of the exposure device EX until the information on the replacement of the discharge lamp 1 is supplied from the light source device 30. Hereinafter, the axis parallel to the optical axis AX of the projection optical system PL is taken as the Z axis, and the plane parallel to the paper surface of FIG. 1 in the plane perpendicular to the Z axis (substantially horizontal in the present embodiment) is taken. The axis and the Y axis perpendicular to the paper surface of Fig. 1 will be described.

The light beam emitted from the discharge lamp 1 converges near the second focus by the elliptical mirror 2 Thereafter, the divergent light is incident on the optical path bending mirror 3 by a shutter (not shown). The mirror 3 is also housed in the light box 31. The light beam reflected by the mirror 3 is incident on the interference filter 5 through the light-transmissive window member 4 of the light box 31, and the interference filter 5 is selected only by a predetermined bright line (for example, an i-line having a wavelength of 365 nm). Exposure light IL. Further, as the exposure light IL, in addition to the i-line, a g-line, an h-line, or a mixed light of the above, or a glow of a lamp other than a mercury lamp or the like may be used. The selected exposure light IL is incident on the fly-eye lens 6 (optical integrator), and is formed in a plurality of times on the variable aperture stop (hereinafter referred to as illumination σ pupil) 7 disposed on the exit surface of the fly-eye lens 6. light source. The exposure light IL after the variable σ diaphragm 7 is incident on the mask curtain (variable field stop) 9 via the first relay lens 8. The arrangement surface of the mask curtain 9 is substantially conjugate with the pattern surface of the mask M, and the opening shape of the mask curtain 9 is set by the driving device 9a to define the illumination area on the mask M. Further, in order to prevent the exposure light from being irradiated to the sheet P during the stepwise movement of the sheet P, the stage control system 15 can open and close the mask curtain 9 through the driving device 9a.

The exposure light IL of the reticle 9 is transmitted through the second relay lens 10 The mirror 11 and the condensing lens 12 that bend the optical path of the exposure light IL illuminate the pattern area of the pattern surface of the mask M. The interference filter 5, the fly-eye lens 6, the variable σ diaphragm 7, the relay lenses 8, 10, the mask curtain 9, the mirror 11, and the collecting lens 12 are included to constitute the illumination optical system 13. The light beam from the light source device 30 is used as the exposure light IL to illuminate the elongated illumination region of the mask M (mask), for example, in the Y direction, via the illumination optical system 13. The pattern in the illumination region of the mask M is transmitted through the projection optical system PL, and is projected onto the exposure region (with the illumination region) of one illumination region of the sheet P at a projection magnification β (β is, for example, equal magnification, magnification, or reduction magnification). Optically conjugated area, domain). Further, as the projection optical system PL, a plurality of projection optical systems may be used, for example, a multi-projection optical system in which two rows are arranged in the Y direction. When such a plurality of projection optical systems are used, the exposure light IL from the illumination optical system 13 is a plurality of illumination regions of the pattern surface of the illumination mask M arranged side by side.

The mask M is held in the X direction on the reticle base (not shown), The yoke stage MST is slightly moved in the Y direction and the direction of rotation about the Z axis. The position of the mask stage MST is measured with high precision by a laser interferometer 18R that illuminates the measuring laser beam 17R fixed thereto, and the measured value is supplied to the stage control system 15 and the main Control system 14. Based on the measured value and the control information from the main control system 14, the stage control system 15 controls the position of the mask stage MST via a drive train 19R including a linear motor or the like.

On the other hand, the sheet P is held on the substrate through a sheet holder (not shown). On the upper surface of the stage PST, the substrate stage PST is mounted on a base member (not shown) so as to be movable in the X direction and the Y direction. The position of the substrate stage PST is measured with high precision by a laser interferometer 18W that illuminates the measuring laser beam 17W, and the measured value is supplied to the stage control system 15 and the main control. Department 14. Based on the measured value and the control information from the main control system 14, the stage control system 15 controls the position of the substrate stage PST (plate piece P) via the drive train 19W including a linear motor or the like.

Repeated in step & scan mode during exposure of the sheet P The substrate stage PST moves the respective irradiation regions of the sheet P to the front of the exposure region of the projection optical system PL (step movement), and uses the light beam from the light source device 30 to illuminate the mask M through the illumination optical system 13 And moving the mask M and the sheet P in the X direction (scanning direction) simultaneously with respect to the projection optical system PL to expose the image of the pattern of the mask M to an irradiation area of the sheet P Domain full action (scanning exposure). Accordingly, the image of the pattern of the mask M is transferred to the respective irradiation regions of the sheet P.

Moreover, in this exposure, alignment is performed in advance, for example, on the substrate stage PST. A space image measuring portion 22 for detecting the position of the alignment mark formed on the mask M is provided inside, and a side surface of the projection optical system PL is provided for detecting the position of the alignment mark attached to each of the illumination regions of the sheet P. Align the system 21. The detection signals of the spatial image measuring unit 22 and the alignment system 21 are supplied to the alignment signal processing system 16, and the alignment signal processing system 16 processes, for example, the detection signals to determine the alignment information and the mask of the mask M. The information of the respective irradiation regions of the sheet P is supplied to the main control system 14 by the obtained information. The main control system 14 performs the position control of the sheet P at the time of alignment and exposure of the mask M based on the information. In this way, high overlap accuracy can be obtained in overlapping exposures.

Next, the configuration and use light of the light source device 30 of the present embodiment will be described in detail. The replacement operation of the discharge lamp 1 of the source device 30, and the like. Fig. 2(A) shows the discharge lamp 1 of the light source unit 30 of Fig. 1. In Fig. 2(A), the discharge lamp 1 includes a glass tube 25 composed of a bulb portion 25a and two rod-shaped portions 25b and 25c fixed in a substantially symmetrical cylindrical shape, and is coupled to a rod portion 25b. The cathode side bulb portion 26 at the end portion and the anode side bulb portion 28 that is connected to the other end side of the rod portion 25c having a gradually decreasing diameter are connected to the other side. The anode EL1 and the cathode EL2, which are used to form a light-emitting portion, are fixed in the bulb portion 25a, and the cathode EL2 and the anode EL1 are electrically connected to the socket portions 26 and 28, respectively. The mouth portions 26 and 28 are formed of a metal (for example, brass or the like) having good electrical conductivity and thermal conductivity. The cap portion 26, the glass tube 25, and the cap portion 28 are arranged linearly along the central axis of the rod-like portions 25b and 25c of the connecting glass tube 25 through one of the centers of the light-emitting portions. The direction parallel to the line connecting the central axes of the rod-like portions 25b and 25c is the longitudinal direction L of the discharge lamp 1.

The lamp mouth portions 26 and 28 are basically used for the cathode EL2 and the anode EL1. The power receiving terminal that supplies power from the power supply unit 20 of FIG. 1 through the cable lines 23 and 24 is used. In addition to this, the socket portion 26 also serves as a supported portion for supporting the glass tube 25 (discharge lamp 1) with the support member 33 (see FIG. 4(B)). Further, the base portions 26 and 28 are formed with concave and convex portions (portions for increasing the surface area) which are effective for radiating heat from the glass tubes 25.

Further, the lamp opening portion 26 on the cathode side is sequentially aligned from the rod portion 25b toward the open end side. The annular band-shaped flange portion 26a (the predetermined portion at the position of the abutting portion and the longitudinal direction L) having an outer diameter which is twice the outer diameter of the rod portion 25b, and the outer diameter of the outer diameter of the rod portion 25b are formed. The slightly larger cylindrical shaft portion 26b (the fitting portion or the predetermined portion of the position), the cylindrical small-diameter portion 26k whose outer diameter is smaller than the outer diameter of the shaft portion 26b, and the outer diameter smaller than the shaft portion 26b or the outer shape and the shaft The portion 26b is slightly identical to the cylindrical fixing portion 26h. A corner portion 26e is formed at a boundary portion between the shaft portion 26b and the small diameter portion 26k, and a chamfer portion 26i is also formed on the open end side of the fixing portion 26h. Further, the outer shape of the cylindrical shaft portion 26b may be substantially the same as the outer shape of the rod portion 25b. The small diameter portion 26k is formed by providing a concave portion (segment portion) 26f between the shaft portion 26b and the fixed portion 26h in a direction crossing the longitudinal direction L of the discharge lamp 1. When the discharge lamp 1 is placed on the support member 33 of FIG. 4(B), the flange portion 26a abuts on the step portion surrounding the central opening of the support member 33, and becomes the longitudinal direction L of the light-emitting portion of the glass tube 25. In the positioning reference of the (first direction), the shaft portion 26b is fitted to the opening, and is a positioning reference in a plane orthogonal to the longitudinal direction L of the light-emitting portion.

Further, in the fixing portion 26h, the pressed surface 26g is formed by the concave portion 26f. Be The pressing surface 26g is a plane perpendicular to the longitudinal direction L. The drive unit 34 of FIG. 4(B) has a lever 38 that biases the fixed portion 26h (the pressed surface 26g) of the socket portion 26 downward (in the -Z direction) when the discharge lamp 1 is supported by the support member 33. The tension coil spring 39 that biases the direction of the fixing portion 26h to rotate the lever 38 in the counterclockwise direction, and the fixing of the lever 38 to the socket portion 26 The driving portion 40 such as a cylinder or an electromagnetic cylinder that rotates the lever 38 in the clockwise direction. When the discharge lamp 1 is fixed to the support member 33 and supported, the rotation of the lever 38 by the drive unit 40 in the clockwise direction is released, and when the discharge lamp 1 is taken out from the support member 33, the lever is driven by the drive unit 40. 38 can be rotated clockwise. Further, as the drive unit 34, the mechanism described in the pamphlet of International Publication No. 2007/066947 may be used.

In Fig. 2(A), for example, on the surface of the shaft portion 26b of the socket portion 26, from the flange portion 26a to the corner portion 26e, a spiral groove portion 26d is formed. By supplying the cooling gas, for example, to the groove portion 26d from the outside, the cooling effect of the discharge lamp 1 can be improved. Of course, the groove portion 26d is not necessarily provided. In this case, the heat generated in the discharge lamp 1 flows through the lamp opening portion 26 to the support member 33 having a large surface area and a large heat capacity, so that the temperature rise of the discharge lamp 1 can be suppressed. Further, in order to improve the cooling effect of the discharge lamp 1, the cooled gas may be sent from the air blowing means (not shown) into the opening of the fixing portion 26h of the socket portion 26 of the supporting member 33 of Fig. 4(B). .

Figure 2 (C) is a cross-sectional view taken along line CC of the discharge lamp 1 of Figure 2 (A), As shown in FIG. 2(C), at the flange portion 26a of the socket portion 26, for example, two openings 27A and 27B (positioning portions) are formed at intervals of 90 degrees. In response to this, two pins (not shown) are provided on the surface of the support member 33 on which the flange portion 26a is placed in FIG. 4(B). When the discharge lamp 1 is placed on the support member 33, the two pins are inserted into the openings 27A and 27B of the flange portion 26a, whereby positioning about the axis along the longitudinal direction L of the discharge lamp 1 is performed. The relative angle between the openings 27A and 27B and the anode-side socket portion 28 is set to an angle (a predetermined angle) at which the socket portion 28 and the cable wire 24 are easily coupled. Further, the shape of the cathode side mouth portion 26 may be arbitrary. As the socket portion 26, for example, only the flange portion 26a and the shaft portion 26b may be provided, and a member into which the recess portion of the tip end portion of the lever 38 of the drive unit 34 can be inserted into the shaft portion 26b may be formed.

Fig. 2(B) shows the anode side lamp opening portion 28 of Fig. 2(A). Figure 2 (A) In (B), the anode-side lamp opening portion 28 is formed to have substantially the same outer diameter as the maximum diameter of the rod-shaped portion 25c from the side of the rod-shaped portion 25c of the glass tube 25 of the discharge lamp 1 to the open end side. The heat radiating portion 28i of the plurality of endless belt fins 28j and the flat portions 28f, 28g, and 28h formed at three substantially equal angular intervals around the straight line passing through the center of the glass tube 25 are formed in a portion where the plurality of fins 28j are formed. The grip portion 28e (the held portion) and the substantially triangular column-shaped terminal portion 28a (connected portion) in which the V-shaped two flat portions 28b and 28c are formed. In the approximate center of the flat portions 28f, 28g, and 28h of the grip portion 28e, a pin 86a for inserting the discharge lamp 1 with the lamp transport unit 56 is inserted (see FIG. 9(B)). Small hole portions h1, h2, h3.

Further, the socket portion 28 of the present embodiment is provided at the end of the grip portion 28e. A bolt (not shown) in a plurality of openings 28k in the plane of the portion is connected to a metal rod portion (not shown) provided at an end of the rod portion 25c of the glass tube 25 and electrically connected to the anode EL1. Therefore, the cap portion 28 can be removed after the discharge lamp 1 is used, and the removed cap portion 28 can be reused when the new discharge lamp 1 is manufactured. Further, the socket portion 28 can be integrated by being adhered or welded to the glass tube 25.

FIG. 5 shows a state in which the cable wire 24 is connected to the anode side lamp opening portion 28. Figure 5 A metal (conductive) member in which a V-shaped groove portion 66a having the same angle as the flat portions 28b and 28c of the terminal portion 28a of the socket portion 28 is formed at the end of the cable wire 24 (hereinafter, referred to as power supply) Block) 66. Further, the power supply block 66 is fixed to the lower end portion of the L-shaped reference lever 67, and the L-shaped drive lever 69 is rotatably coupled to the reference lever 67 via the coupling pin P51, and the lower end of the drive lever 69 is transmitted through the coupling pin. The P52 is rotatably fixed with a roller 70. A concave portion 28d (see FIG. 2(B)) that can accommodate the size of the roller 70 is formed on the flat portions 28b and 28c of the terminal portion 28a of the socket portion 28 and the surface (back surface) on the opposite side.

Here, the recess 28d (concave) is provided on the back surface of the triangular columnar terminal portion 28a. In order to condense the light emitted from the discharge lamp 1 by the elliptical mirror 2, the roller 70 does not shield the collected light as much as possible. Therefore, for example, when the roller 70 is miniaturized, it is not necessary to provide the recess 28d. Further, when the power supply block 66 is coupled to the terminal portion 28a as will be described later, the stress acting on the discharge lamp 1 is reduced as much as possible (to increase the flexibility of the reference lever 67 and the drive lever 69), and further The amount of shading of the light condensed by the elliptical mirror 2 is reduced as much as possible, and the reference lever 67 and the driving lever 69 are formed as thin as possible. In addition, in FIG. 5, although the reference lever 67 couples the both ends of the two L-shaped members (the other end is not shown), the reference lever 67 may be formed by one L-shaped member, or It may not be L-shaped.

The power supply block 66, the reference lever 67 and the drive lever 69 constitute a clamping mechanism 52. The other end sides of the reference lever 67 and the drive lever 69 are formed to be elongated as shown in Fig. 4(B). In a state in which the groove portion 66a of the power supply block 66 is pressed against the flat portions 28b and 28c of the terminal portion 28a of the socket portion 28, the roller 70 of the front end portion of the drive lever 69 is inserted into the recess portion 28d of the terminal portion 28a, and The driving lever 69 is rotated in the counterclockwise direction about the coupling pin P51 (the fulcrum), that is, the terminal portion 28a can be stably held between the roller 70 and the power supply block 66 by the principle of the lever. In this state, since the electric power (current) of the cable wire 24 can be supplied to the lamp port portion 28 through the power supply block 66 with a small resistance, power loss can be reduced. Further, when the cable wire 24 (the power supply block 66) is removed from the socket portion 28 (terminal portion 28a), the drive lever 69 may be rotated in the clockwise direction.

In Fig. 2(B), the terminal portion 28a of the socket portion 28 can reduce the electric resistance (contact resistance) between the power supply block 66 by the V-shaped flat portions 28b, 28c, and is provided with a clamping mechanism. The recess 28d of the roller 70 of 52 can be stably connected to the power supply block 66. Moreover, the roller 70 may not be provided at the front end of the driving lever 69, and the shape of the front end portion may be made. The arc shape is attached to the concave portion 28d.

Further, the shape of the terminal portion 28a of the anode side mouth portion 28 is not limited to FIG. 2(B). The shape may be various shapes as shown in Figs. 3(B), (C), (D), and (E). Further, in Fig. 3(A), the terminal portion 28a of the socket portion 28 of Fig. 2(B) is simply shown. Further, in FIGS. 3(A) to (E), A1 to E1 are plan views of the terminal portions, and A2 to E2 are side views of the terminal portions, respectively. First, as shown in the socket portion 28A of Fig. 3(B), the terminal portion 28Aa may have a trapezoidal cross-sectional shape. In this case, the two flat portions 28Ab and 28Ac which are symmetrically inclined with respect to the terminal portion 28Aa are in contact with the groove portion 66a of the power supply block 66 of the clamp mechanism 52 of Fig. 5, and the back surface portion 28Ad of the trapezoidal cross section is provided for housing. The recess of the roller 70. The same applies to the front end of the drive lever 69 of the clamp mechanism 52 (or the roller 70. The same applies hereinafter).

Further, as shown in the base portion 28B of Fig. 3(C), the cross-sectional shape of the terminal portion 28Ba The shape may be a polygonal shape of a square or more. In the example of Fig. 3(C), the cross-sectional shape of the terminal portion 28Ba is substantially a regular pentagon shape, and the planar portions 28Bb and 28Bc which are symmetrically inclined with respect to the terminal portion 28Ba are in contact with the groove portion 66a of the power supply block 66, and the pair The rear end portion 28Bd is in close contact with the front end portion of the drive lever 69.

Further, as shown in the base portion 28C of Fig. 3(D), the cross-sectional shape of the terminal portion 28Ca The shape may be a substantially regular hexagonal shape. In this case, the flat portions 28Cb and 28Cc which are symmetrically inclined with respect to the terminal portion 28Ca are in contact with the groove portion 66a of the power supply block 66, and the opposite rear end portion 28Cd is in close contact with the front end portion of the drive lever 69. In this case, a pin 86a (see FIG. 9(B)) for inserting the lamp transporting system 56 is provided in a central portion of the three surfaces 28Cf, 28Cg, and 28Ch which are disposed on the other surface of the terminal portion 28Ca. Small hole portions h1, h2, h3. Accordingly, the terminal portion 28Ca can also serve as the grip portion.

Further, as shown in the socket portion 28D of Fig. 3(E), the cross-sectional shape of the terminal portion 28Da The shape can be substantially circular. In this case, the groove corresponding to the power supply block 66A has a shape of a substantially cylindrical side surface. The groove portion 66a of the power supply block 66A is brought into contact with one half of the terminal portion 28Da, and the front end portion of the drive lever 69 is brought into close contact with a concave portion (not shown) provided on the other half surface side of the terminal portion 28Da. As described above, the shape of the terminal portion 28a of the anode side bulb portion 28 may be arbitrary.

Further, in the following FIGS. 4(A) and (B) and the like, for convenience of explanation, discharge The shape of the lamp mouth portions 26, 28 of the lamp 1 is simplified. 4(A) is a plan view showing the inside of the light box 31 and the casing 51 of the light source device 30 of FIG. 1, and FIG. 4(B) is a side view showing the light source device 30 of FIG. 4(A). In addition, in FIGS. 4(A) and 4(B) and FIG. 6(A) and FIG. 6(B), the support member 33 and the pull-out portion that support the light box 31, the chassis 51, the discharge lamp 1, and the like are shown in cross section. 36 and so on.

In FIGS. 4(A) and (B), the light box 31 is divided into the lower casing of the discharge lamp 1. 31A, and the housing mirror 31 is housed on the side surface of the window member 4. An opening 31Ab for passing light from the discharge lamp 1 is provided on the adjacent surface of the casing 31A, 31B, and is provided on the side surface of the lower casing 31A in the +X direction for passing the discharge lamp 1 and the like when the discharge lamp 1 is replaced. Opening portion 31Aa. The casing 51 of the replacing device 50 is provided on the side surface of the lower casing 31A in the +X direction, and the opening 51a for passing the discharge lamp 1 or the like is provided on the side surface of the casing 51 opposed to the opening 31Aa.

The discharge lamp 1 is carried out and moved in the +X direction side of the chassis 51. The window portion 51b and the window portion 51b are opened and closed by a door (hereinafter referred to as a lamp replacement door) 45. The case 51 and the lower case 31A of the replacing device 50 are connected by a connecting member (not shown) or the like in order to avoid a positional shift. A storage unit 54 for the discharge lamp 1 is disposed in the vicinity of the window portion 51b at the +X direction end portion of the casing 51, and a lamp transport system 56 is disposed above the chassis 51. Also, in the chassis 51, although not shown The filter is provided with an external air extraction port and dust removal from the extraction air.

Further, it is opposed to the two sides of the lower casing 31A in the Y direction. A pair of guides 41 are provided in parallel with each other, and a pull-out portion 36 that is movable in the X direction along the guide 41 is disposed, and the discharge lamp 1 is supported by the support member 33 at the central portion of the pull-out portion 36. Further, as the guide 41, for example, a guide mechanism of a telescopic type (multi-stage type) can be used. Further, an elliptical mirror 2 having a circular opening 2a (refer to FIG. 4(A)) is disposed in the drawing portion 36 so as to surround the discharge lamp 1, and an upper portion of the lower casing 31A is covered to cover the socket of the discharge lamp 1. In the manner of the tong mechanism 52 of the portion 28, a light blocking member 42 having a shape such as a side surface of a truncated cone is disposed. An opening (not shown) for passing the discharge lamp 1 and the clamp mechanism 52 when the discharge lamp 1 is replaced is provided on the side surface of the light shielding member 42 in the +X direction.

Further, the replacing device 50 includes a driving unit 34 for the cathode side lamp portion 26, The caliper mechanism 52, the storage unit 54, and the lamp transporting system 56 for the anode side bulb portion 28 also have a pull-out portion 36 that is pulled out from the lower casing 31A through the openings 31Aa and 51a to the side of the casing 51. The drive unit 60 and the drive unit 72 that performs the clamping of the lamp holder 28 by the clamp mechanism 52 and the release thereof. As shown in FIG. 4(A), the pull-out driving unit 60 has a guide 61 disposed in the chassis 51 and a guide 61 disposed in the X direction on the Y-axis side from the center of the lower case 31A and the X-axis parallel line. a base 62 that is movable in the X direction along the guide 61, a drive unit 63 that drives the base 62 in the X direction along the guide 61, a belt drive system, a linear motor system, and the like, and a coupling member 43. The connecting member 43 is connected to the distal end portion 62a of the base 62 where the end portion in the -X direction protrudes in the +Y direction and protrudes in the Z direction, and the end portion in the +X direction of the drawing portion 36 is provided at the central portion in the Y direction. The convex connected portion 36c.

Pulling the base 62 to the +X along the guide 61 by pulling out the driving portion 63 of the driving unit 60 The direction is moved, that is, the pull-out portion 36 in the lower case 31A can be moved (pushed out) to be supported and pulled out. The discharge lamp 1 of the portion 36 enters the position inside the casing 51. Further, since the pull-out portion 36 is supported by the guide 41 and the pull-out portion 36 can smoothly move in the X direction along the guide 41, the load of the pull-out portion 36 hardly acts on the base 62. Therefore, as the pull-out drive unit 60, instead of the mechanism using the guide 61, a mechanism that moves the pull-out portion 36 in the X direction by, for example, a cylinder or the like can be used.

Further, a driving unit of the caliper mechanism 52 that drives the socket portion 28 of the discharge lamp 1 72, having a fixed upper surface of the base 62 inclined in a clockwise direction (for example, about 15 degrees) relative to the X axis (hereinafter, referred to as a retracting direction D of the clamp mechanism 52) (refer to FIG. 4(A)) The guide member 73 is placed on the flat movable table 75 of the guide 73 so as to be movable in the retracting direction D through the two sliders 74, and the cylinder or electromagnetic unit for driving the movable table 75 to the retracting direction D with respect to the base 62. A drive unit 77 such as a cylinder and a support member 65 that is fixed to the upper surface of the movable table 75 and elongated in the Z direction. Further, the end portion in the -X direction on the upper surface of the movable table 75 is fixed to the elongated relay member 64 in the Z direction, and the other end of the cable member 24 is connected to the upper portion of the relay member 64 at the center portion of the relay member 64 in the Z direction. The other end of the cable 23 connected to the support member 33 is connected to the opening provided in the drawing portion 36. The cable wires 23, 24 are further connected to the power supply unit 20 of Fig. 1 via a flexible extension cable (not shown).

FIG. 7(A) shows the detailed configuration of the clamp mechanism 52 and the drive unit 72. In Fig. 7(A), the +X direction end of the reference lever 67 of the clamp mechanism 52 is transmitted through the short linear guide 71H so as to be movable in the movable direction D1 (one axis) parallel to the retracting direction D of Fig. 4(A). The direction is slightly supported by the upper end of the support member 65. Further, the driving unit 72 has a tension coil spring 68 whose one end is fixed to the bottom of the reference lever 67 in the vicinity of the +X direction end portion, and the +X direction end portion of the driving lever 69 is pulled upward, and one end is fixed to the movable table 75. The drive unit 76 such as a cylinder or an electromagnetic cylinder that can displace the end portion of the drive lever 69 in the +X direction downward (-Z direction). One end of the drive unit 76 is coupled to the movable table 75 via a rotatable joint 76a. The front end of the movable portion of the drive portion 76 and the end portion of the drive lever 69 are coupled via a rotatable joint 76b. For example, the joint 76a can use a so-called joint joint using a so-called U-joint or joint 76b.

In the state of FIG. 7(A), since the driving portion 76 does not apply a force to the driving bar At the end of the rod 69, a force in the counterclockwise direction is exerted on the drive lever 69 relative to the reference lever 67 by the tension coil spring 68. Accordingly, the roller 70 provided at the end in the -X direction of the drive lever 69 biases the terminal portion 28a of the socket portion 28 toward the power supply block 66 side, so that the terminal portion 28a is held by the power supply block 66 and the roller 70 in a stable manner. At this time, even if the interval between the movable table 75 and the discharge lamp 1 deviates from the target value, the amount of deviation is canceled by the movement of the reference lever 67 through the linear guide 71H in the movable direction D1. Further, if the movable table 75 is movable in the entire X direction, the linear guide 71H may not be provided.

Next, when the clamp mechanism 52 is released from the clamp of the terminal portion 28a, As shown in Fig. 7(B), the end portion of the drive lever 69 is pulled downward by the drive portion 76, and the roller 70 is moved to a position higher than the terminal portion 28a. At this time, the position of the end portion of the drive lever 69 is in the vicinity of the discharge lamp 1, and accordingly, the drive portion 76 is slightly rotated by the joint 76a, so that the stress which deforms the drive lever 69 is not exerted. In this state, the movable mechanism 75 is moved in the direction indicated by the arrow A2 in the retracting direction D by the driving portion 77 of FIG. 4(B), whereby the clamp mechanism 52 and the cable wire 24 can be separated from the socket portion 28. .

Further, the lamp transport system 56 is provided with an anode side lamp holder for holding the discharge lamp 1 from above. The three claw portions 86 of the grip portion 28e of the portion 28, the grip claw opening and closing mechanism 85 that opens and closes the claw portions 86, the Z-axis drive mechanism 84 that moves the discharge lamp 1 up and down (Z direction), and the Z-axis drive The mechanism 84 is wound around the axis 83 parallel to the Z axis and the winding shaft 83 is supported by A support portion 82 at the top of the chassis 51.

Fig. 9(A) shows the grip portion of the cap portion 28 held by the three claw portions 86. The top view of the state of 28e and the side view of FIG. 9(B) are the side view of FIG. 9(A). As shown in FIG. 9(A), the small claws 86a are provided on the faces of the grip portions 28e facing the three claw portions 86, respectively. When the discharge lamp 1 is held by the lamp transport system 56, the pins 86a of the three claw portions 86 are positioned opposite to the hole portions h1, h2, and h3 of the flat portions 28f, 28g, and 28h of the grip portion 28e. The claw opening and closing mechanism 85 is held. In this state, as shown in FIG. 9(B), the three claw portions 86 are moved in the center direction by the grip claw opening and closing mechanism 85 (closed), and the three pins 86a are inserted into the corresponding hole portions h1, h2, h3, and further. The three claw portions 86 are closed until the flat portions of the three claw portions 86 are in contact with the corresponding flat portions 28f, 28g, and 28h. Further, since the three claw portions 86 are respectively coupled to the grip claw opening and closing mechanism 85 by a spring mechanism (not shown) that is displaceable in the radial direction, there is no stress acting to deform the cap portion 28.

In FIGS. 4(A) and 4(B), the storage unit 54 is provided with a discharge that is used up and down. The lamp 1 and the unused discharge lamp 1 (hereinafter referred to as the discharge lamp 1N) are plural (four in Fig. 4(A)) openings 79a (see Fig. 11) which are arranged in a concentric circular rotatable disk 79. And the drive unit 80 that rotates the rotary disk 79. The number of the openings 79a is the number of the discharge lamps 1 and 1N that can be stored in the rotary disk 79, and the number of the dischargeable lamps 1 and 1N that can be stored is arbitrary. The opening 79a is inserted into the front end of the cathode side lamp opening portion 26 of the discharge lamp 1 or 1N, and the discharge lamp 1 or 1N is placed on the flange portion 26a of the lamp opening portion 26 (see Fig. 1(A)) by its own weight. On the rotating disk 79.

As shown in FIG. 11, a plurality of openings 79a are provided on the side of the rotating disk 79. Each of the positioning members 87 having a concave portion in the center and a semicircular cross section is provided with a convex portion that can be engaged with the concave portion of the positioning member 87 in the lateral direction of the rotary disk 79, and is disposed in the radial direction of the rotary disk 79. Deformed leaf spring portion 88. The rotary disk 79 is rotated about the rotary shaft 79b, and the positioning member 87 When the plate spring portion 88 (the elastic member) is engaged, the rotation of the rotary disk 79 is stopped, that is, the position of the opening 79a can be accurately positioned at a position where the discharge lamp 1 or 1N is received between the lamp transfer system 56. Further, although not shown, a pin fitted to the holes 27A and 27B of Fig. 2(C) is provided in the vicinity of the opening 79a in the direction in which the lamp can be positioned (around the Z axis).

Hereinafter, in the light source device 30 of the present embodiment, the replacing device 50 is used. An example of the operation when the discharge lamp 1 is replaced will be described. This replacement action is controlled by the light source control system 32. First, as shown in FIG. 4(A), the operator (not shown) opens the lamp replacement door 45 of the casing 51 of the replacement device 50, and inserts the lamp opening portion 26 of the unused discharge lamp 1N into the rotating disk of the storage unit 54. The opening 79a of the 79 is attached to the rotary disk 79 (supplement of the discharge lamp) through the flange portion 26a of the socket portion 26 of the discharge lamp 1N. The rotary disk 79 can be manually rotated in a state where the power is turned off. As described with reference to Fig. 11, the rotary rotary disk 79 causes the predetermined positioning member 87 to be engaged with the leaf spring portion 88, that is, can be rotated manually by the correct setting. The angle of rotation of the disk 79. Further, the lamp is set so that the rotary disk 79 can be electrically rotated.

Moreover, the discharge lamp is supplemented to stop the power supply from the power supply unit 20 of FIG. It should be preferable that the discharge lamp 1 in the lower casing 31A in the lower portion of Fig. 4(B) is extinguished. However, it is also possible to take measures to prevent the light of the discharge lamp 1 in the casing 31A from leaking to the outside, and to form the rotating disk 79 with an insulating material, so that it can be in the lighting of the discharge lamp 1 with the rotating disk 79. Perform lamp replacement. For example, in FIG. 4(A), six discharge lamps 1, 1N can be provided (supplemented) on the rotary disk 79, and a vacancy is left in the rotary disk 79 for recycling the used lamp. 4(A) and (B) show the case where the discharge lamp 1 is placed in the light box 31. Therefore, five discharge lamps 1N are provided on the rotary disk 79. After that, the lamp replacement door 45 is turned off.

After that, it can be at any time (for example, when the board P is replaced or the device is During maintenance, replace discharge lamp 1 with discharge lamp 1N. Alternatively, when the accumulated use time of the discharge lamp 1 reaches the allowable time, the light source control system 32 sends the information to the main control system 14, and the main control system 14 may stop the exposure operation of the exposure device EX. When the power supply control unit 32 stops the supply of electric power to the discharge lamp 1 from the power supply unit 20 and turns off the discharge lamp 1, the replacement device 50 is activated to discharge the discharge lamp 1 to the discharge lamp 1N stored in the storage unit 54.

That is, first, in FIG. 4(B), the discharge is integrally supported in the light box 31. The lamp 1 and the pull-out portion 36 of the elliptical mirror 2 are pulled out to the predetermined position in the +X direction by the pull-out drive unit 60 as indicated by an arrow A1. As a result, the pull-out portion 36 is pulled out to the position shown in Fig. 6(B). At this time, together with the pull-out portion 36, the clamp mechanism 52, the relay member 64, and the drive unit 72 are also integrally pulled out to the inside of the chassis 51 in the +X direction. 6(A) is a plan view showing a partial cross section of the pull-out portion 36 and the replacing device 50 of FIG. 6(B). In addition, in FIG. 8, FIG. 10(B) and the like which will be referred to below, in order to avoid the intricacies of the drawings, a part of a plurality of discharge lamps 1N is omitted.

Next, as described with reference to FIG. 7(B), driven by the driving unit 72 The portion 76 pulls the drive lever 69 of the clamp mechanism 52 downward, and rotates the roller 70, which is strongly pressed against the terminal portion 28a of the socket portion 28 of the discharge lamp 1 to the power supply block 66, by the joint pin P51 (pivot). The roller 70 is separated from the terminal portion 28a and located at a position higher than the terminal portion 28a. Thereafter, the drive unit 77 (see FIG. 4(B)) causes the movable table 75 that supports the clamp mechanism 52 and the drive unit 76 to retreat in the direction indicated by the arrow A2 in the retracting direction D. At this time, the roller 70 passes over the lamp mouth portion 28.

Thereafter, as shown in FIG. 8, the lever is driven by the drive unit 40 of the drive unit 34. 38 is rotated in the clockwise direction to release the clamp of the fixing portion 26h of the cathode side lamp opening portion 26. Accordingly, the socket portion 26 can be pulled out from the support member 33. Also, in order to avoid the intricacies of the drawings, Referring to Fig. 10(B) and the like, the illustration of the driving unit 34 for the cap portion 26 is omitted. Further, the clamp of the cathode side lamp portion 26 can be released before the clamp of the anode side lamp portion 28 is released.

Next, the winding shaft 83 of the lamp transporting system 56 is wound to open the closing mechanism of the gripping claw 85 moves to the top of the lamp mouth portion 28 of the discharge lamp 1. As shown by the arrow A3, the Z-axis drive mechanism 84 of the lamp transport mechanism 56 lowers the grip claw opening and closing mechanism 85, and the grip claw opening and closing mechanism 85 holds the base portion by the closing of the three claw portions 86 on the bottom surface thereof. The grip portion 28e of 28 (see Fig. 9(B)). Thereafter, as shown by an arrow A5 in FIG. 10(B), the claw portion 86 holding the discharge lamp 1 is raised by the Z-axis drive mechanism 84. At this time, the discharge lamp 1 is raised to the lower end of the cathode side lamp opening portion 26 of the discharge lamp 1 at a position higher than the upper surface of the drawing portion 36 (that is, a position higher than the upper surface of the elliptical mirror 2).

Thereafter, as shown by an arrow A6 of FIG. 10(A), the grip is held by the winding shaft 83. The grip claw opening and closing mechanism 85 of the discharge lamp 1 is wound about 180 degrees to move the discharge lamp 1 above the rotary disk 79. At this time, the rotary disk 79 is rotated by the drive unit 80 of the storage unit 54, and the empty opening 79a of the rotary disk 79 is moved below the grip claw opening/closing mechanism 85 (discharge lamp 1). In this state, the grip claw opening and closing mechanism 85 is lowered, and the end portion of the bulb portion 26 of the discharge lamp 1 is placed in the opening 79a, and then the claw portion 86 is released, and the used discharge lamp 1 is placed on the rotary disc. 79 position A7.

Thereafter, the grip claw opening and closing mechanism 85 of the lamp transport system 56 is raised, as an arrow As shown in A8, the rotary disk 79 is rotated by about 60 degrees, and the unused discharge lamp 1N at the position A9 is moved below the grip claw opening and closing mechanism 85. After that, the grip claw opening and closing mechanism 85 is lowered again, and the grip portion 28e of the socket portion 28 of the unused discharge lamp 1N is gripped by the claw portion 86, and then the grip claw opening and closing mechanism 85 is raised. And by the action opposite to when the discharge lamp 1 is carried out, as shown by the arrow B1 of the broken line, the gripping claw opening and closing mechanism 85 is rotated by about 180 degrees by the winding shaft 83, as shown in Fig. 10(B). As shown by the broken line arrow B2, the grip claw opening/closing mechanism 85 that holds the discharge lamp 1N is lowered, and the cathode side cap portion 26 of the discharge lamp 1N is placed on the support member 33. Thereafter, as shown by a broken line arrow B3 in FIG. 8, the grip claw opening and closing mechanism 85 is raised, and as shown in FIG. 6(B), the cathode side mouth portion 26 is clamped to the support member 33 by the drive unit 34.

Further, by the driving unit 77 of FIG. 8, as shown in FIG. 7(B), the branch is made. The movable table 75 of the nipper mechanism 52 moves in the direction indicated by the arrow B4 (in the direction of the discharge lamp 1N) in the retracting direction D, and the power supply block 66 abuts against the terminal portion 28a of the socket portion 28 of the discharge lamp 1N. Thereafter, the movable portion is pushed out by the driving portion 76 (if the cylinder is in the case, the suction force is gradually weakened), the lever 69 is driven to rotate around the coupling pin P51 by the force of the tension coil spring 68, and the roller 70 contacts the terminal portion 28a. The terminal portion 28a is pressed against the power supply block 66. As a result, the power supply to the anode side bulb portion 28 can be performed without power loss. Further, the clamp of the cathode side bulb portion 26 can be performed after the clamp of the anode side bulb portion 28.

At this time, the cathode side lamp portion 26 of the discharge lamp 1N is driven by the drive unit 34 (see 6(B)) is fixed to the support member 33, and therefore, assuming that the position of the power supply block 66 of the anode-side socket portion 28 is shifted in a state where the position of the retracting direction D of the power supply block 66 is fixed, The discharge lamp 1N is strongly applied and the discharge lamp 1N is broken. In order to prevent this from occurring, in the present embodiment, as shown in FIG. 7(A), the reference lever 67 to which the power supply block 66 is attached can be moved in the direction D1 (in the radial direction of the discharge lamp 1N) by the linear guide 71H. The positioning error of the power supply block 66 can be corrected (absorbed). Further, instead of the linear guide 71H, the movable table 75 may be moved in the forward direction D1.

Moreover, the nip mechanism 52 of the lamp mouth portion 28 is in the direction of rotation of the drive lever 69. And the winding direction (rotation direction about the axis parallel to the Z axis) is low in rigidity, and can be used by the reference lever 67 And/or the deflection of the drive lever 69 absorbs the positioning error of the direction of rotation and the direction of the winding. Further, since the contact surface groove portion 66a (see FIG. 5) of the power supply block 66 and the socket portion 28 is fixed in a V shape in which the cross-sectional shape is not affected by the Z-direction position, even between the socket portion 28 and the power supply block 66 The Z-direction positional shift is also not a problem.

As shown in FIG. 6(B), a clamp mechanism is used for the socket portion 28 of the discharge lamp 1N. When the clamp of the power supply block 66 of 52 is completed, by pulling out the drive unit 60, as shown by the dotted arrow B5 in FIG. 4(B), the base 62 is moved in the -X direction, so that the pull-out portion 36 is returned. Go to the original position in the lower casing 31A. Accordingly, the used discharge lamp 1 completes the replacement of the unused discharge lamp 1N.

Next, an example of a method of manufacturing the discharge lamp 1 of the present embodiment will be described. A flowchart of Fig. 32(B) will be described. First, in step 220 of FIG. 32(B), as shown in FIG. 12, the rod-shaped portion 25b side of the glass tube 25 in which the anode EL1 and the cathode EL2 (see FIG. 2(A)) are provided is prepared (prepared). A metal rod-shaped base tube 226 (small cap member) is provided, and a glass member (lamp body) of a metal rod-shaped cap tube 228 (small cap member) is provided on the rod-like portion 25c side. The lamp tubes 228 and 226 are electrically connected to the anode EL1 and the cathode EL2, respectively. The lamp tube 228 and 226 are integrally fixed to the sealing portion of the glass tube 25 by welding or the like.

In the next step 222, the discharge lamp 1 of FIG. 2 (A) is used. The lower cathode side bulb portion 26 and the anode side bulb portion 28. Further, the shape of the socket portions 26 and 28 of Fig. 12 is shown to be simplified compared with the lamp mouth portions 26 and 28 of Fig. 2(A). In this case, for example, a small convex portion 228a for positioning is provided at the center of the end portion of the socket tube 228, and a plurality of screw holes 228b are provided around the convex portion 228a. Further, a hole portion h4 for accommodating the convex portion 228a is formed at the center of the upper surface of the inner surface of the cylindrical socket portion 28, and a plurality of openings for the bolt are formed at positions corresponding to the screw holes 228b. 28k. A recess (not through hole) that can receive the head of the bolt BA1 is formed in the upper portion of the opening 28k.

Moreover, a small-diameter fitting portion 226b is provided at the end portion 226a of the lamp mouth tube 226, A plurality of screw holes 226c are formed in the end surface of the fitting portion 226b. Further, a short cylindrical connecting portion 26p that can be fitted to the fitting portion 226b is provided on the upper portion of the flange portion 26a of the socket portion 26, and a bolt is formed on the bottom surface of the flange portion 26a at a position corresponding to the screw hole 226c. A plurality of openings 26q are used. A recess that can receive the head of the bolt BA2 is formed at an end of the opening 26q.

Then, in step 224, multiple passes are passed through the lamp tube 228. The bolt BA1 is connected to the lamp mouth portion 28, and the lamp mouth portion 226 is connected to the lamp mouth portion 26 through a plurality of bolts BA2, that is, the discharge lamp 1 is completed. Further, in step 222, in order to remove the socket portions 28 and 26 from the used discharge lamp 1, it is only necessary to loosen the bolts BA1 and BA2, respectively.

According to the manufacturing method of the discharge lamp 1, since the discharge can be reused from the use Since the lamp holders 26 and 28 are removed from the lamp 1, the number of the lamp terminals 26 and 28 having a complicated shape can be reduced, and the manufacturing cost of the discharge lamp 1 can be suppressed. Further, in place of the reuse of the lamp mouth portions 26 and 28 (in other words, the lamp mouth portions 26 and 28 are removed from the used discharge lamp 1), at least one of the lamp socket portions 26 and 28 which are separately manufactured may be prepared, for example. This is attached to the lamp body (the lamp tube 226, 228) to constitute the discharge lamp 1. Further, when at least one of the lamp mouth portions 26 and 28 is reused, instead of reuse of the entire lamp mouth portions 26 and 28, only at least a part of the lamp mouth portions 26 and 28 may be reused (for example, the terminal portion 28a, At least one of the grip portion 28e and the heat radiating portion 28i).

Moreover, in the example of Fig. 12, the side surface of the lamp mouth tube 228 and the inner surface of the lamp mouth portion 28 A space is provided between them, for example, a flexible tube (tube, not shown) disposed in parallel with the cable 24 is injected with high-pressure air into the space, for example, the discharge lamp 1 can be efficiently illuminated. Cooling (light cooling). Moreover, when the lamp mouth tubes 228, 226 are combined with the lamp mouth portions 28, 26, To prevent the bolt from slacking, it can be bolted together with the injection of heat resistant adhesive.

Moreover, the combination of the lamp mouth tubes 228, 226 and the lamp mouth portions 28, 26 may not be a screw. The bolts are locked, but the lamp mouth tubes 228, 226 are integrally formed with the lamp mouth portions 28, 26 by welding or the like. Further, in the example of Fig. 12, although both of the socket portions 26 and 28 can be removed, for example, the cathode-side socket portion 26 may be integrally formed with the base tube 226. Further, when the socket portions 26 and 28 of the used discharge lamp 1 are not used, the cathode side bulb portion 26 and the anode side bulb portion 28 can be integrally formed with the lamp mouth tubes 226 and 228, respectively.

As described above, the exposure apparatus EX of the present embodiment includes the light source device 30. In the light source device 30, a glass tube 25 (glass member) having an anode EL1 (first electrode) and a cathode EL2 (second electrode) for forming a light-emitting portion is provided, and a light-emitting portion is provided in the glass tube. A light source device in which the discharge lamp 1 of the base portion EL1 side and the cathode EL2 side of the lamp portion 28 (the first cap member) and the lamp port portion 26 (the second cap member) emit light. Further, the light source device 30 includes a storage unit 54 that stores the discharge lamp 1, a support member 33 (support portion) that supports the socket portion 26 of the discharge lamp 1, and a discharge lamp 1 that is supported by the support member 33. The socket portion 28 is connected to a clamp mechanism 52 (connecting portion) to which the power supply block 66 (member for transmitting power) of the cable 24 is detachably connected, and support and use of the support member 33 to the socket portion 26 In the state in which the connection of the power supply block 66 of the cap portion 28 of the nipper mechanism 28 is released, the lamp port portion 28 is held by the lamp port portion 28 to transport the discharge lamp 1 between the storage portion 54 and the support member 33 (transport portion) .

According to the light source device 30 of the present embodiment, since the power supply block 66 is provided (electrical The end portion of the cable 24 is detachably coupled to the clamp mechanism 52 of the socket portion 28 of the discharge lamp 1, so that when the used discharge lamp 1 is taken out from the support member 33, the clamp mechanism 52 is used. The lamp mouth portion 28 removes the power supply block 66, and when the unused discharge lamp 1 is attached to the support member 33, The clamp mechanism 52 connects the power supply block 66 to the socket portion 28, that is, the replacement of the discharge lamp 1 can be performed efficiently.

Moreover, when the temperature of the used discharge lamp 1 is high, since there is no need to wait for the release When the temperature of the lamp 1 is lowered, the discharge lamp 1 can be replaced, so that the lamp replacement time can be shortened. Further, the damper mechanism 52 and the lamp transporting mechanism 56 (replacement device 50) of the light source device 30 can be attached to a conventional light source device (a device that supports the lamp port portion on the cathode side of the discharge lamp with a predetermined support member). ). In the light source device modified as described above, the discharge lamp 1 of the present embodiment is used, that is, the discharge lamp can be automatically replaced efficiently.

Further, in the clamp mechanism 52 of the present embodiment, a tension pin is provided in the vicinity of the action point of the terminal portion 28a of the cap portion 28 contacting the end portion (roller 70) of the drive lever 69. The position of the spring 68 and the position (force point) at which the driving portion 76 is pulled into the driving lever 69 are disposed outside the light box 31 (elliptical mirror 2), so that the large force of the clamping socket portion 28 can be easily obtained using a large space. . In addition, since the driving unit 72 of the clamping mechanism 52 is disposed outside the light box 31, the clamping mechanism 52 can be operated from a position away from the light box 31, so that the clamping mechanism 52 and the driving unit 72 can be installed in a small modification. Know the light source device.

Further, the discharge lamp 1 of the present embodiment includes a glass tube 25 (glass member) in which the anode EL1 and the cathode EL2 for forming the light-emitting portion are provided, and the light-emitting portion is provided on the anode EL1 side of the glass tube 25, respectively. The lamp mouth portion 28 and the lamp mouth portion 26 on the cathode EL2 side. The lamp mouth portion 28 is adapted to be in contact with the power supply block 66 (member for transmitting power) to which the cable 24 is connected, and has a flat portion which is in surface contact with the power supply block 66 in order to reduce the contact resistance with the power supply block 66. The terminal portion 28a (connected portion) of 28b and 28c and the grip portion 28e (held portion) including the non-planar portions (hole portions h1, h2, h3) that can be held by the lamp transport system 56 (transport portion).

According to the discharge lamp 1, when used in the light source device 30 of the present embodiment, The power supply block 66 connected to the cable 24 is easily brought into contact with the terminal portion 28a by the clamp mechanism 52 (connecting portion), and the discharge lamp 1 is efficiently held by the lamp transport system 56. Further, since the grip portion 28e is provided with a non-planar portion including the hole portions h1, h2, and h3 of the pin 86a of the insertion claw portion 86, the discharge lamp 1 can be transported safely. Further, instead of providing the non-planar portion, the grip portion 28e may be provided with, for example, an inclined portion whose cross-sectional area is smaller as it goes downward. The discharge lamp 1 can be safely conveyed by gripping the inclined portion with the claw portion 86.

Further, the exposure apparatus EX of the present embodiment includes the light source device 30 and The light emitted from the discharge lamp 1 of the light source device 30 (exposure light IL) illuminates the illumination optical system 13 (illumination system) of the mask M, and the image of the pattern of the mask M is projected by the exposure light IL. The projection optical system PL of the sheet P (substrate). According to the exposure apparatus EX, since the replacement time of the discharge lamp 1 can be shortened, the productivity of the exposure process can be improved.

Moreover, the method of replacing the discharge lamp of the present embodiment is as shown in the flow of FIG. 32(A). As shown in the figure, the terminal portion 28a (connected portion) which is in contact with the anode-side socket portion 28 of the discharge lamp 1 by the clamp mechanism 52 and the power supply block 66 to which the cable 24 is connected is detached from the terminal portion 28a. Step 202, the driving unit 34 causes the cathode side socket portion 26 of the discharge lamp 1 to be detached from the support member 33 (the tongs of the lamp mouth portion 26 is removed), and the discharge lamp 1 is held by the lamp transport system 56. The step 206 of the lamp mouth portion 28 including the non-planar portion of the grip portion 28e (the held portion) transporting the discharge lamp 1 to the storage portion 54 is performed.

According to this replacement method, the discharge lamp 1 can be efficiently carried out. Again, the The replacement method includes the lamp holder portion 26 that holds the discharge lamp 1N in the lamp holder portion 28 of the unused discharge lamp 1N held by the lamp transport unit 56, and can transport the discharge lamp 1N to the lamp mouth portion 26 of the discharge lamp 1N. The step 208 of supporting the support member 33, the step 210 of clamping the socket portion 26 of the discharge lamp 210 to the support member 33 by the drive unit 34, and the power supply to which the cable 24 is connected by the clamp mechanism 52 The block 66 is in surface contact (using the power supply block 66 to clamp the lamp mouth portion 28) to step 212 of the terminal portion 28a of the socket portion 28 of the discharge lamp 1N. According to this, the arrangement of the unused discharge lamp 1N to the support member 33 can be efficiently performed.

Further, the lighting method of the discharge lamp 1 of the present embodiment includes connecting a cable The power supply block 66 of the wire 24 is in surface contact with the terminal portion 28a (connected portion) of the anode side lamp port portion 28 of the discharge lamp 1N, and the lamp port portion 26 of the discharge lamp 1N is provided as a support member 33 for supplying electric power. The step 210 of supporting, and the step 214 of supplying the electric discharge lamp 1N to the discharge lamp 1N through the cable 24 and the support member 33. According to this lighting method, since the terminal portion 28a is in surface contact with the power supply block 66, the discharge lamp 1 can be lit with a small power loss. Thereafter, at step 214, light from the discharge lamp 1 is used for exposure by the exposure device EX.

Further, the above embodiment can be modified as follows. First of all, the above embodiment Although the power supply block 66 is supplied with electric power using the cable 24, the method of supplying electric power to the power supply block 66 (discharge lamp 1) may be performed using the reference lever 67 and the power supply block 66 (conduction) without using the cable 24. Further, the power supply block 66 may be not only electric power but also a compressed air for cooling which can supply the discharge lamp unit 28 to the discharge lamp unit 1.

Moreover, the clamping mechanism 52 of the power supply block 66 of the above embodiment is as shown in Fig. 7(A). In order to prevent the force from the caliper mechanism drive unit 72 from acting on the discharge lamp 1, the linear guide 71H in which the reference lever 67 can be slightly moved in the radial direction D1 of the discharge lamp 1 is provided. On the other hand, as shown in the caliper mechanism 52A according to the modification of FIGS. 13(A) and (B), the front end portion of the reference lever 67 may be fixed in parallel with the power supply block 66 in the Z direction, and the lower end portion may be provided. Can support power supply block 66 The L-shaped guide 71S of the projection is provided between the guide 71S and the power supply block 66, and a linear guide 71V for causing the power supply block 66 to be slightly moved in the Z direction as indicated by the arrow A10 is provided.

The clamp mechanism 52A according to this modification is, for example, used in the use of the discharge lamp 1. When the green discharge lamp 1 is thermally expanded, since the lamp opening portion 28 of the discharge lamp 1 can be displaced in the +Z direction with respect to the guide member 71S through the linear guide 71V integrated with the power supply block 66, the stress acting on the discharge lamp 1 can be reduced. Therefore, the output of the light beam supplied from the light source device 30 can be made more stable.

Further, in order to reliably supply the terminal portion 28a of the socket portion 28 of the discharge lamp 1, and the power supply The contact of the block 66 is used to lower the contact resistance. For example, a plurality of concavo-convex patterns (so-called contacts) may be provided on the surface (contact surface) of the V-shaped groove portion 66a (refer to FIG. 5) of the power supply block 66. According to this, by the so-called contact follow-up, even if the surface of the V-shaped groove portion 66a is worn out by replacing the discharge lamp 1, the gap between the socket portion 28 and the power supply block 66 can be surely continued. Electrical contact.

Moreover, the caliper mechanism driving unit 72 of FIG. 7(A) is configured to be a clamp The reference lever 67 and the drive lever 69 of the mechanism 52 are opened and closed in the vertical direction (Z direction), but may be opened and closed on the right and left sides (direction perpendicular to the longitudinal direction of the discharge lamp 1). According to this configuration, when the clamp mechanism 52 moves the clamp mechanism 52 in the X direction by the drive unit 77, it is not necessary to retract the roller 70 at the front end portion of the drive lever 69 to a position higher than the base portion 28. That is, only the opening and closing operation of the clamp mechanism 52, and the constituent members of the clamp mechanism 52 are not provided above the discharge lamp 1, so that the discharge lamp 1 can be conveyed in the Z direction.

Further, in the above embodiment and its modifications, the cathode side mouth portion of the discharge lamp 1 The drive unit 34 of the drive unit 34 of 26 and the clamp mechanism 52A of the base portion 28 shown in Fig. 13(B) each have an independent drive unit. In contrast, as shown in FIG. 14(A) As in the modified example, the drive unit is shared. In Fig. 14(A), one end portion of the cable 89D is fixed to the front end portion of the drive lever 69 of the clamp mechanism 52A in the +X direction instead of the drive portion 76, and the other end portion of the cable 89D is transmitted below the support member 65. The pulley 89C, which is supported to be rotatable about an axis parallel to the Y-axis, extends in the +X direction. The other end of the cable 89D is fixed to the front end of the movable lever 89A of the linear actuator 76 through a cylindrical mounting member 89B. The linear actuator 76 is fixed to the upper surface of the base 62, and the movable rod 89A can be driven in the X direction along the guide 61 (see Fig. 4(B)) of the base 62.

The movable table 75A of the fixed support member 65 passes through the slider 74 so as to be movable in the X direction The moving method is placed on the guide 73. An elongated hole 75Aa long in the X direction is provided at the end portion of the movable table 75A in the +X direction, and a part of the mounting member 89B is inserted into the long hole 75Aa. Further, a rod 89G extending in the -X direction and supported by the cantilever of the roller 89F at the tip end in the -X direction is attached to the end portion of the movable table 75A in the -X direction. Further, in the movable table 75A, the end portion in the -X direction of the base 62 is biased in the -X direction by the tension coil spring 89E, and the movable table 75A is pressed from the -X direction at the position of Fig. 14 (A). It is stationary on the stopper (not shown). The tension coil spring 89E has a tension set to be larger than the tension coil spring 68 for driving the drive lever 69 of the clamp mechanism 52A.

Further, one end 38Aa of the U-shaped lever 38A is in contact with the discharge lamp The fixing portion 26h of the cathode side lamp opening portion 26 of the first end portion 38Aa is biased toward the fixing portion 26h by the tension coil spring 39 whose one end is fixed in the support member 33. A clamping mechanism 34A that includes a lever 38A and a tension coil spring 39 that engages the socket portion 26 is provided. In a state where the discharge lamp 1 is fixed to the support member 33, the roller 89F at the front end of the lever 89G is located between the end portion 38Aa of the lever 38A and the other end portion 38Ab. Includes cable 89D, pulley 89C, linear actuator 76L, movable table 75A, tension coil The spring 89E, the rod 89A, and the like constitute a drive unit 72A that drives the clamp mechanisms 52A and 34A.

Next, the operation of the drive unit 72A will be described. Figure 14 (A), as shown in Figure 6 (B) As shown, the state in which the support member 33 supporting the discharge lamp 1 is pulled out of the light box 31 by the pull-out driving unit 60 is shown. In this state, the mounting member 89B at the front end of the movable lever 89A of the linear actuator 76L is located in the vicinity of the -X direction end portion of the movable range in the long hole 75Aa. Next, when the movable lever 89A of the linear actuator 76L is driven in the +X direction, the cable 89D is pulled downward by the pulley 89C, as shown in Fig. 14(B), the +X of the drive lever 69 of the clamp mechanism 52A The end of the direction is lowered, and the clamp of the power supply block 66 and the roller 70 to the socket portion 28 is released.

Further, when the movable lever 89A of the linear actuator 76L is driven in the +X direction, The mounting member 89B at the distal end of the movable lever 89A contacts the inner surface of the long hole 75Aa on the +X direction side, and the cable 89D is not stretched any more, but the mounting member 89B continues to move in the +X direction while pulling the movable table 75A. . As a result, the entire clamp mechanism 52A and the support member 65 on the movable table 75A move in the +X direction, and the clamp mechanism 52A retreats from above the discharge lamp 1. Further, as shown in Fig. 15, the roller 89F attached to the tip end of the rod 89G of the movable table 75A, that is, the other side of the lever 38A contacting the cathode side clamp mechanism 34A, is shown in Fig. 15 as the retraction of the movable table 75A in the +X direction. The end portion 38Ab rotates the lever 38A to release the clamp of the support member 33 of the cathode side cap portion 26.

Thereafter, as shown in FIG. 10(B), the discharge lamp 1 is performed by the lamp transport system 56. replace. After the discharge lamp 1 is replaced, the cathode side lamp opening portion 26 is clamped by the operation opposite to the above operation, and the power supply block 66 of the clamp mechanism 52A contacts the lamp opening portion of the discharge lamp 1 due to the movement of the movable table 75A in the -X direction. 28, secondly, the end of the drive lever 69 rises and the clamp of the socket portion 28 is again performed by the roller 70 and the power supply block 66.

As described above, by the use of the driving unit 72A, one linear actuation can be performed The device 76L (drive unit) performs the release and retraction of the clamp mechanism 52A, the release of the clamp mechanism 34A, and the operation opposite to these operations. That is, since three actuators are controlled by one actuator, the manufacturing cost can be reduced. Of course, the number of actuators can be, for example, two.

In the above description, the force of the driving lever 69 of the pull clamp mechanism 52A is set. Since the force for sliding the movable table 75A in the +X direction is weak, the movable table 75A does not move in the +X direction until the pull of the drive lever 69 is completed. However, any mechanism can be used as long as it can complete the above-described series of actions.

[Second Embodiment]

Next, a second embodiment will be described with reference to Figs. 16 to 18 . The light source device of the present embodiment is also used to supply illumination light for exposure to the illumination optical system 13 of the exposure device EX of Fig. 1 . In the first embodiment, the drive unit 72 for driving the caliper mechanism for the anode-side socket portion 28 of the discharge lamp 1 is supported by the movable table 75 of the pull-out drive unit 60. However, in the present embodiment, The drive unit is placed in a light box. In addition, in FIGS. 16 to 18, parts corresponding to those in FIGS. 4(A) and (B) are denoted by the same reference numerals, and detailed description thereof will be omitted.

Fig. 16 shows a light source device 30A of this embodiment. Light source device 30A, with A clamp mechanism 52B that clamps the anode side mouth portion 28 of the discharge lamp 1 , a drive unit 72B that drives the clamp mechanism 52B, a storage unit 54 of the discharge lamp 1 , and a lamp transport system 56A are provided. In Fig. 16, a flat base member 75B is fixed to the end portion in the -X direction in the lower casing 31A of the lamp box 31, and a square end of the driving lever 69 is supported by the driving portion 76 on the upper surface of the base member 75B. The upper end portion of the reference lever 67A is supported by the support member 65 on the support base 75C, and the power supply block 66 is fixed to the other end of the reference lever 67A at the other end of the drive lever 69. The end front end mounting roller 70 is provided with a tension coil spring 68 that pulls the -X direction end portion of the drive lever 69 between the bottom of the upper case 31B and the drive lever 69. Further, between the upper surface of the support member 65 and the end portion in the -X direction of the reference lever 67A, a linear guide 71H that supports the reference lever 67A so as to be slightly movable in the -X direction is disposed (not shown in Fig. 16). 7(A)).

In the present embodiment, the discharge lamp 1 is rotated 180 with respect to the case of Fig. 2(A). The angle of the degree is supported by the support member 33. The power supply block 66 contacts the flat portion 28b, 28c on the -X direction side of the terminal portion 28a of the anode side bulb portion 28 of the discharge lamp 1 (see FIG. 2(B)), and relaxes the force of the driving portion 76, thereby driving the lever 69 is rotated in the clockwise direction by the force of the tension coil spring 68, so that the roller 70 at the front end of the driving lever 69 biases the back surface of the terminal portion 28a in the -X direction, thereby clamping the terminal portion 28a to the power supply block 66 and the roller. Between 70. The reference lever 67A, the drive lever 69, and the roller 70 constitute a clamp mechanism 52B, and the drive unit 76, the support member 65, and the tension coil spring 68 constitute a drive unit 72B for the clamp mechanism 52B.

Further, the relay member 64A is fixed to the upper surface of the base member 75B, and one end is connected to the The other end of the cable 24 of the electric block 66 is connected to the upper portion of the relay member 64A, and the other end of the cable (not shown) having one end connected to the support member 33 and having a sufficient length is connected to the lower portion of the relay member 64A. The cable 24 or the like is connected to a power supply unit (not shown) via an extension cable (not shown). Further, the light shielding member 42A positioned above the discharge lamp 1 in the lower casing 31A is provided with an opening (not shown) for passing the discharge lamp 1 at the end in the +X direction, and is disposed at the end in the -X direction. An opening (not shown) of the clamp mechanism 52B. In addition, since the drive unit 34 (see FIG. 4(B)) that clamps the cathode-side socket portion 26 of the discharge lamp 1 to the support member 33 is the same as that of the first embodiment, the drive unit is omitted in FIG. 16 and the like. Graphic of 34.

Further, in the casing 51 of the replacing device 50A, a guide 61, a base 62A, and The connecting member 43 that protrudes from the front end portion 62Aa and the drawing portion 36 of the base 62A in the Z direction and the pull-out driving unit 60A that includes the driving portion 63 are provided. Further, in the casing 51, an elongated support member 90A provided on the bottom surface, an X-axis guide 90B fixed to the upper end of the support member 90A in the X direction, and an X-axis guide 90B supported in the X direction are provided. The X-axis drive mechanism 90X, the Z-axis drive mechanism 84 supported by the X-axis drive mechanism 90X, the grip claw opening and closing mechanism 85 provided at the lower end of the Z-axis drive mechanism 84, and the plurality of claw portions 86 provided in the grip claw opening and closing mechanism 85. The lamp transfer system 56A. A storage unit 54 of the discharge lamp 1 is also provided in the casing 51. The pull-out drive unit 60A, the lamp transport system 56A, and the storage unit 54 constitute a replacement device 50A. The other configuration is the same as that of the light source device of Fig. 4(B).

In the present embodiment, when the discharge lamp 1 is replaced, first, as shown in Fig. 17, the drive unit 76 of the drive unit 72B pulls the end portion of the drive lever 69 of the clamp mechanism 52B in the direction indicated by the arrow A21. The roller 70 at the front end portion of the drive lever 69 is separated from the anode side bulb portion 28. Thereafter, the pull-out drive unit 60A pulls the pull-out portion 36 in the +X direction to a predetermined position in the chassis 51. Next, as indicated by an arrow A23, the grip claw opening and closing mechanism 85 and the claw portion 86 of the lamp transporting mechanism 56A are lowered in the -Z direction to grip the anode side cap portion 28, and the clamp of the cathode side cap portion 26 is driven by the driving unit ( Not shown) Released. Further, the clamp of the cap portion 26 may be released before the claw portion 86 grips the cap portion 28. Thereafter, as indicated by an arrow A24, the grip claw opening and closing mechanism 85 is raised, and the cathode side bulb portion 26 of the discharge lamp 1 is moved to a position higher than the elliptical mirror 2.

Thereafter, the X-axis drive mechanism 90X moves in the +X direction along the X-axis guide 90B as indicated by an arrow A25, and moves the grip claw opening and closing mechanism 85 to a position A27 above the rotary disk 79 of the storage unit 54. Next, as indicated by an arrow A26, the grip claw opening and closing mechanism 85 is lowered, and the discharge lamp 1 is placed on the open opening of the rotary disk 79. Then, the grip claw opening and closing mechanism 85 is temporarily raised, When the rotary disk 79 is rotated to move the unused discharge lamp 1N to the lower side of the grip claw opening and closing mechanism 85, the grip claw opening and closing mechanism 85 is lowered again, and the unused discharge lamp 1N is gripped and raised.

Thereafter, the discharge lamp 1N is placed on the support member 33 by the operation opposite to when the discharge lamp 1 is carried out, and the pull-out portion 36 is returned to the lower casing 31A by the pull-out drive unit 60A. As shown in Fig. 16, the driving unit 72B drives the clamping mechanism 52B to clamp the anode side opening portion 28 of the discharge lamp 1N, that is, the replacement of the discharge lamp 1 is completed.

According to the present embodiment, since the driving unit 72B of the caliper mechanism 52B of the anode-side socket portion 28 does not have the sliding mechanism, the overall configuration of the light source device 30A is simplified, and the manufacturing cost can be reduced. Further, since the cable 24 connected to the power supply block 66 for supplying power to the anode-side socket portion 28 is not pulled out, the configuration of the portion driven by the pull-out driving unit 60A can be simplified.

Further, in the lamp transporting system 56A of the present embodiment, the gripping claw opening and closing mechanism 85 is linearly moved by using the X-axis driving mechanism 90X and the Z-axis driving mechanism 84. Therefore, even if the discharge lamps 1 and 1N are arranged close to the rotating disc 79, they are arranged circumferentially. The positioning between the grip claw opening and closing mechanism 85 and the rotary disk 79 can also be easily performed.

This embodiment can be modified as follows.

First, the lamp transport system 56 of the first embodiment, a multi-axis robot arm, or the like can be used instead of the lamp transport system 56A of the present embodiment.

Further, instead of the lamp transport system 56A, as shown in the light source device 30B according to the modification of FIG. 18, a winding type lamp transport system 56B is provided.

In Fig. 18, the lamp transporting system 56B includes an elongated support member 90C provided on the inner bottom surface of the casing 51, a winding drive portion 90D fixed to the upper end of the support member 90C, and a convoluted winding around the axis parallel to the Z-axis by the winding drive portion 90D. The portion 90E is fixed at both ends of the winding portion 90E Z-axis drive mechanisms 84A and 84B that are movable in the Z direction, grip claw opening and closing mechanisms 85A and 85B provided at the lower end portions of the Z-axis drive mechanisms 84A and 84B, and a plurality of claws that are opened and closed by the grip claw opening and closing mechanisms 85A and 85B. 86A, 86B. When the discharge lamp 1 is transported by the lamp transport system 56B, for example, one of the grip claw opening and closing mechanisms 85A catches the used bulb portion 28 of the discharge lamp 1 through the claw portion 86A, and the other grip claw opening and closing mechanism 85B The lamp mouth portion 28 of the unused discharge lamp 1N of the rotary disk 79 is grasped by the claw portion 86B.

Then, the discharge lamps 1 and 1N are raised by the Z-axis drive mechanisms 84A and 84B. After the winding portion 90E is rotated by 180 degrees by the winding drive portion 90D, the discharge lamps 1 and 1N are lowered by the Z-axis driving mechanisms 84A and 84B, so that the discharge lamp 1 can be replaced at a high speed between the support member 33 and the rotary disk 79. 1N. In the present embodiment, the clamp mechanism 52B is not obliquely above the discharge lamp 1 supported by the support member 33 in the casing 51. Therefore, the claw portion 86A (or the grip claw) of the grip claw opening and closing mechanism 85A is rotated by the rotation of the winding portion 90E. The claw portion 86B) of the opening and closing mechanism 85B rotates in either the clockwise or counterclockwise direction, and does not come into contact with the clamp mechanism 52B.

[Third embodiment]

Hereinafter, a third embodiment will be described with reference to Figs. 19(A) to 25(B). The light source device of the present embodiment is also used to supply illumination light for exposure to the illumination optical system 13 of the exposure device EX of Fig. 1 . In the discharge lamp of the present embodiment, the shape of the anode side opening portion and the configuration of the nip mechanism of the lamp opening portion are different from those of the above embodiment. It is to be noted that the same reference numerals are given to the parts in FIG. 19(A) to FIG. 25(B) that are the same as those in FIG. 2(A) and FIG. 4(A), (B) and FIG.

Fig. 19(A) shows the discharge lamp 1A of the present embodiment. In Figure 19(A), The discharge lamp 1A includes a glass tube 25A composed of a bulb portion 25Aa and two cylindrical rod-shaped portions 25Ab and 25Ac fixed to sandwich the bulb portion 25Aa, and a rod-shaped portion 25Ab connected to one of the rods The cathode side cap portion 126 at the end portion and the anode side cap portion 128 connected to the end portion of the other rod portion 25Ac. The socket portions 128 and 126 are electrically connected to an anode and a cathode (not shown) in the bulb portion 25Aa, respectively. The lamp mouth portions 126 and 128 are made of a metal having good electrical conductivity and thermal conductivity.

Further, in the cathode side bulb portion 126, from the rod portion 25Ab to the open end side, A cylindrical connecting portion 126k having a larger diameter than the rod portion 25Ab, a ring-shaped flange portion 126a having an outer diameter twice as large as an outer diameter of the rod portion 25Ab, and an outer diameter slightly larger than the rod portion 25Ab are formed. The cylindrical shaft portion 126b, the cylindrical small-diameter portion 126f having a smaller outer diameter than the shaft portion 126b, the cylindrical fixing portion 126h having a smaller outer diameter than the shaft portion 126b or substantially the same shape as the shaft portion 126b, and the chamfered portion 126i, And the smaller diameter portion 126f is smaller than the front end portion 126j. When the discharge lamp 1A is placed on the support member 33 of FIG. 20(B) to be described later, the flange portion 126a abuts on the step portion surrounding the opening of the center of the support member 33. Further, the fixing portion 126h can be clamped by the supporting member 33 of Fig. 20(B) by the driving unit 34 of Fig. 4(B). In addition, the illustration of the drive unit 34 is omitted in FIG. 20(B).

Further, the anode side bulb portion 128 is rod-shaped from the glass tube 25A of the discharge lamp 1A. The portion of the portion 25Ac toward the open end side is provided with a cylindrical connecting portion 128k having a diameter larger than that of the rod portion 25Ac, and a cylindrical intermediate portion 128m having an outer diameter substantially equal to the diameter of the rod portion 25Ac. There are a plurality of heat dissipating portions 128i of the endless belt fins 128j and a terminal portion 128a. The terminal portion 128a has a convex portion 128b having a tapered shape having a tapered diameter toward the distal end portion, a cylindrical shaft portion 128c having a smaller diameter than the connecting portion 128k, a concave portion e1 having a smaller diameter and a larger diameter, and a shaft portion 128c is a cylindrical front end portion 128d of substantially the same diameter, and a chamfered portion e2.

As shown in Fig. 19(B), in the present embodiment, for the anode side mouth portion The cable 24 is detachably connected to each other by a member (hereinafter referred to as a power supply socket) 152 which is formed by combining a plurality of cylindrical members. In FIG. 19(B), the power supply socket 152 has a formed and The endless belt-shaped connecting portion 153 of the recessed contact surface 153a having the same shape of the connecting portion 128b of the socket portion 128, the cylindrical outer tubular portion 154 fixed to the upper portion of the connecting portion 153, and the flange portion formed at the front end of the outer tubular portion 154 The button switch portion 155 having a cylindrical lower end between the connection portion 153 and the outer tube portion 154 and a compression coil spring 156 attached between the connection portion 153 and the push button switch portion 155 are disposed between the connection portion 153 and the outer tube portion 154. The connecting portion 153, the outer tubular portion 154, and the inner tubular portion 155 are made of a metal having good electrical conductivity and thermal conductivity.

The connecting portion 153 is fixed to the outer tubular portion 154 by, for example, a bolt (not shown) or the like. On the bottom surface, a concave portion 154b is formed on the outer surface of the outer tubular portion 154, and an end portion of the cable wire 24 is coupled to the outer surface of the outer tubular portion 154. Further, the connecting portion 153 has a loose inner surface 153b fitted to the shaft portion 128c and the front end portion 128d of the socket portion 128, and a plurality of openings h4 each provided with a spherical body (ball bearing) 157 (see FIG. The fastener portion 153c of 24). The concave portion at the lower end of the push button switch portion 155 forms a tapered portion 155b for releasing the spherical body 157 to the outside, and a small concave portion 155d which is engageable with the front end portion 128d of the base portion 128 is formed on the concave portion.

In the state of Fig. 19(B), the fastener portion 153c of the joint portion 153 is held. The plurality of balls 157 are housed in the recess e1 of the terminal portion 128a, and the compression coil spring 156 acts on the side of the connection portion 153 from the button switch portion 155, and the contact surface 153a of the connection portion 153 is crimped to the terminal portion 128a. Connecting portion 128b. At this time, the electric power (current) supplied to the cable wire 24 is supplied to the socket portion 128 through the outer tubular portion 154 and the joint portion 153 with a small resistance (contact resistance).

Further, in the power supply socket 152 of FIG. 19(B), for example, in the outer tubular portion 154 The vent hole 154c is formed, and the cooled air can be supplied to the vent hole 154c from the outside through a blow pipe (not shown) provided in the cable wire 24. This air is supplied to the space between the joint portion 153 and the outer tubular portion 154, and the bulb portion 128 can be efficiently cooled. Also, the machine for supplying cooled air The configuration may be omitted. In this case, it is not necessary to provide the vent hole 154c. The mechanism for removing the power supply socket 152 from the socket portion 128 and attaching the socket portion 128 will be described later.

Fig. 20(A) shows a partially cutaway portion of the light source device 30C of the present embodiment. FIG. 20(B) is a side view, partly broken away, of FIG. 20(A). In Fig. 20(B), the support member 33 of the drawing portion 36 fixed in the lower casing 31A is provided with a flange portion 126a of the cathode side socket portion 126 of the discharge lamp 1A, and the fixing portion 126h is provided by the driving unit 34 ( Referring to Fig. 4(B)), the support member 33 is clamped. Further, a relay member 64 is fixed to the upper end portion of the drawing portion 36 in the +X direction, one end of the cable 24 is connected to the end portion of the relay member 64, and the other end of the cable 24 is connected to the discharge lamp through the power supply socket 152. Anode side lamp mouth portion 128 of 1A. Further, a cable (not shown) connected to the support member 33 is also connected to the relay member 64.

Moreover, the pull-out portion 36 is pulled out to the side of the chassis 51 in the casing 51. The drive unit 60A, the storage unit 1A for storing the discharge lamp 1A and the unused discharge lamp 1A (hereinafter referred to as the discharge lamp 1AN), the lamp transport unit 56C, and the power supply socket 152 for attaching and detaching the socket portion 128 of the discharge lamp 1A. The mechanism (hereinafter referred to as a power supply socket replacement drive unit) 72C. The replacement drive unit 60A, the storage unit 54, the lamp transport system 56C, and the drive unit 72C constitute a replacement device 50C of the light source device 30C. As shown in Figs. 20(A) and (B), the lamp transporting system 56C has an elongated support member 90A provided on the bottom surface of the guide member 61 on the -Y direction side, and an X fixed in the X direction at the upper end of the support member 90A. The shaft guide 90B, the X-axis drive mechanism 90X supported by the X-axis guide 90B so as to be movable in the X direction, the Z-axis drive mechanism 84B supported by the X-axis drive mechanism 90X, and the lower end of the Z-axis drive mechanism 84B are held. The holding portion 162 of the anode side mouth portion 128 of the discharge lamp 1A.

Moreover, the driving unit 72C for replacing the power supply socket has a bottom surface relative guide member The elongated support member 90F provided on the +Y direction side is coupled to the winding portion 90G of the upper end of the support member 90F so as to be wound around the axis parallel to the Z axis in a range of approximately 30 degrees, and is housed at the front end of the winding portion 90G. A Z-axis drive mechanism 84A in the portion 90R and a member (hereinafter referred to as a grip portion) 160 for attaching and detaching the power supply socket 152 to the socket portion 128 of the discharge lamp 1A are provided at the lower end of the Z-axis drive mechanism 84A.

In the present embodiment, when the discharge lamp 1A is replaced, the first embodiment is used. Similarly, as shown by an arrow A31 in Fig. 21, the pull-out driving unit 60A pulls the pull-out portion 36 supporting the discharge lamp 1A to a predetermined position in the casing 51. Next, the grip portion 160 of the drive unit 72C that was originally placed in the discharge lamp 1A that has been pulled out is lowered, and the power supply socket 152 is removed from the socket portion 128 of the discharge lamp 1A, and only the power supply socket 152 is lifted.

Next, as shown by an arrow A38 in Fig. 25(A), the winding portion 90G is wound around At 30 degrees, the grip portion 160 holding the power supply socket 152 is withdrawn from above the discharge lamp 1A. Thereafter, in the lamp transport system 56C, the X-axis drive mechanism 90X is moved above the discharge lamp 1A as indicated by an arrow A36. Next, as shown in FIG. 25(B), the grip portion 162 is lowered by the Z-axis drive mechanism 84B to the socket portion 128 of the discharge lamp 1A, and the grip portion 162 is held, for example, by the front end portion 128d of the socket portion 128 (refer to the figure). 19(A)). Then, as shown by the arrow A37, after the discharge lamp 1A is moved away from the elliptical mirror 2, the discharge lamp 1A is placed in the storage unit 54 by the lamp transport system 56C, and the unused portion is stored from the storage unit 54 as in the case of Fig. 17 . The discharge lamp 1AN is placed on the support member 33. Thereafter, the power supply socket 152 is attached to the socket portion 128 of the discharge lamp 1AN by the driving unit 72C, and the pull-out portion 36 is returned to the lower casing 31A by the pull-out driving unit 60A, that is, the replacement of the discharge lamp 1A is completed.

Next, the grip portion 160 of the driving unit 72C of FIG. 21 of the present embodiment is provided. The configuration and the like will be described with reference to Figs. 22(A) to 24 . As shown in Figure 22 (A), fixed at The grip portion 160 at the lower end of the Z-axis drive mechanism 84A of the drive unit 72C has three wrist portions 164a, 164b, 164c fixed to the Z-axis drive mechanism 84A and arranged at substantially equiangular intervals around the axis parallel to the Z-axis ( a first link portion 164 of 164c (not shown), a piston portion 165 that is fixed to the central bottom surface of the first link portion 164 and has three openings 166a at equal angular intervals in the center, and that can be driven in the Z direction, and one end portion The three second link portions 167A, 167B, and 167C (167C not shown) of the substantially T-shape provided in the opening 166a. Further, the grip portion 160 is connected to the three arm portions 167A, 167B, and 167C via the fulcrum fulcrum E1 or the like and connected to the three arm portions 164a, 164b, and 164c, and transmitted through the rotatable fulcrum E4 or the like. The arm portions 169A, 169B, and 169C (169C are not shown) and the three pivot portions 164a, 164b, and 164c are coupled to the three wrist portions 164a, 164b, and 164c via the rotatable fulcrum E3 or the like, and are connected to the three second links through the rotatable fulcrum E3 or the like. The three third link portions 168A, 168B, and 168C of the portions 167A, 167B, and 167C (168C not shown). In the following description, the three arm portions 169A, 169B, and 169C which are disposed at substantially equal angular intervals around the axis parallel to the Z axis are simply referred to as arm portions 169A and 169B.

Taking the power socket 152 from the socket portion 128 of the discharge lamp 1A with the grip portion 160 When the lower portion is lowered, the grip portion 160 is lowered, and the convex portion at the tip end of the arm portions 169A and 169B faces the recess portion 154b of the outer tube portion 154 of the power supply socket 152 to stop the lowering of the grip portion 160. . Next, as shown by an arrow A32 in FIG. 23(A), when the center piston portion 165 is depressed, the first link portion 164, the second link portions 167A, 167B, and the third link portion 168A, The operation of the link mechanism constituted by 168B causes the front ends of the arm portions 169A and 169B to move inward, and the convex portion of the front end is hung from the concave portion 154b of the outer tubular portion 154.

Next, as shown by an arrow A33 in Fig. 23(B), when the piston portion 165 is to be supplied with power When the button switch portion 155 of the socket 152 is depressed, the ball 157 in the power socket 152 is opened along the button. The tapered portion 155b (see FIG. 24) of the closing portion 155 is moved outward, and the clamping of the terminal portion 128a of the socket portion 128 is released. At this time, since the link mechanism of the grip portion 160 is a so-called toggle mechanism, the position of the arm portions 169A and 169B is substantially constant even if the piston portion 165 is moved downward. Therefore, the power supply socket 152 can be supported by the three arm portions 169A and 169B, and the clamp of the power supply socket 152 to the socket portion 128 can be released. Therefore, the force of pressing down the discharge lamp 1A is not generated.

Thereafter, as shown by an arrow A35 in FIG. 24, the Z axis of the drive unit 72C is driven. The drive mechanism 84A raises the grip portion 160 holding the power supply socket 152, that is, the power supply socket 152 can be removed upward from the socket portion 128 of the discharge lamp 1A. Further, the power supply socket 152 can be attached to the socket portion 128 by the operation opposite to the above operation.

Further, in the present embodiment, the following modifications are possible.

First, in the drive unit 72C for replacing the power supply socket of the present embodiment, the winding portion 90G is provided as shown in Fig. 20(B), but the Z-axis drive mechanism 84A and the grip portion 160 may be provided without providing the winding portion 90G. The X axis moves. In this case, when the pull-out portion 36 (discharge lamp 1A) is pulled out of the lower casing 31A, the pull-out portion 36 is temporarily stopped, and the grip portion 160 is lowered by the Z-axis drive mechanism 84A, so that the grip portion 160 sets the power supply socket 152. The discharge lamp 1A is removed, and the grip portion 160 holding the power supply socket 152 is raised. Thereafter, the pull-out portion 36 is pulled out in the +X direction by the pull-out drive unit 60A, and the discharge lamp 1A is replaced by the lamp transport system 56C. In this case, since it is not necessary to provide the winding portion 90G in the driving unit 72C, the manufacturing cost of the driving unit 72C can be reduced.

Further, in Fig. 20(B), the X-axis guide 90B of the lamp transporting system 56C can be arranged, The Z-axis drive mechanism 84A for holding the grip portion 160 is supported by the Z-axis drive mechanism 84B for the grip portion 162 so as to be movable in the X direction. With this configuration, the discharge lamp 1A can be removed with the grip portion 160. After the power supply socket 152, the grip portion 160 is moved to the end portion in the -X direction along the Z-axis drive mechanism 84B, and then the grip portion 162 is moved above the discharge lamp 1A to replace the discharge lamp 1A. Therefore, it is not necessary to stop the pull-out portion 36 (pull-out drive unit 60A) at two positions as in the above-described modification. Therefore, as the driving portion 63 of the pull-out driving unit 60A, for example, a cylinder or the like can be used.

Moreover, as a manufacturing method of the discharge lamp 1A, the manufacturing method similar to the above-mentioned discharge lamp 1 can be used. That is, the lamp body (glass member) and the lamp mouth portions 126 and 128 are separately prepared, and the discharge lamps 1A can be constructed by connecting these to each other. At this time, the lamp mouth portions 126 and 128 can be reused, for example, from the used discharge lamp 1A. Further, when at least one of the socket portions 126 and 128 is reused, instead of reuse of the entire lamp mouth portions 126 and 128, only at least a part of the socket portions 126 and 128 (for example, the terminal portion 128a and the heat radiating portion) may be reused. At least one part of 128i).

[Fourth embodiment]

Next, a fourth embodiment will be described with reference to Figs. 26(A) to 27 . In the light source device of the present embodiment, the illumination light for exposure is supplied to the illumination optical system of the exposure device. The light source device of the present embodiment includes a plurality of (for example, three) light boxes, and the light emitted from the discharge lamps in the plurality of light boxes is combined and supplied to the illumination optical system of the exposure device. It is noted that the parts corresponding to those in FIGS. 26(A) to 30(s) and FIGS. 1 and 4(A) and (B) are denoted by the same reference numerals, and detailed description thereof will be omitted.

26(A) and (B) show the exposure apparatus EXA of the present embodiment, respectively. The top view and FIG. 27 show a partially cutaway side view of the exposure apparatus EXA. In Fig. 26(A), the illumination optical system and the exposure main portion (portion from which the light source device 30 is removed from the exposure device EX of Fig. 1) of the exposure device EXA are disposed in a box-shaped chamber 92. The exposure device EXA includes a light source device 30D. The light source device 30D is provided to be radially arranged on the roof RT of the chamber 92. The first, second, and third light boxes 29A, 29B, and 29C are combined with the light beams emitted from the light boxes 29A, 29B, and 29C provided on the roof RT, and supplied to the lower lighting unit (not shown). 93. Replace the replacement device 50D of the discharge lamp 1 used in the light boxes 29A to 29C, and the storage unit 54 that stores the discharge lamp 1 and the unused discharge lamp 1N. The storage unit 54 is covered with a protective cover (not shown).

The light boxes 29A-29C respectively have discharge lamps for storing the use of FIG. 4(B) 1 and a lower case 31A of the elliptical mirror 2, and an upper case 31B (see FIG. 27) in which the mirror 3 and the window member 4 are disposed. Further, in Figs. 26(A) and (B), only the lower casing 31A of the light boxes 29A to 29C is shown. The power supply block 66 of the cable 24 is connected to the anode side opening portion 28 of the discharge lamp 1 at the time of use of the light boxes 29A to 29C, respectively, by the clamp mechanism 52 of Fig. 4(B).

Moreover, the replacement device 50D is provided adjacent to the light boxes 29A, 29B, and 29C, respectively. The chassis 51A, 51B, and 51C are disposed in the chassis 51A to 51C to pull the pull-out portion 36 of the discharge lamp 1 in the corresponding light boxes 29A to 29C into the chassis 51A to 51C. Pull out the drive unit 60. The heights of the casings 51A to 51C are substantially the same as the height of the lower casing 31A (see FIG. 27), and an open-close type protective cover (not shown) is provided on the upper surfaces of the casings 51A to 51C. Further, the replacing device 50D includes the driving unit of FIG. 4(B) which is disposed in the casings 51A to 51C to release the clamp of the anode side socket portion 28 of the discharge lamp 1 to be pulled by the clamp mechanism 52. 72C, the driving unit 34 of FIG. 4(B) for disassembling the clamp of the cathode side lamp portion 26 of the discharge lamp 1 in the chassis 51A to 51C, and for being replaced and being pulled out to the chassis The lamp transporting system 56D of the used discharge lamp 1 supported by the pull-out portion 36 (support member 33) of 51A to 51C.

Moreover, the lamp transporting system 56D has a branch provided close to the chassis 51C of the roof RT. The column 90H supports the Y-axis driving unit 90I extending in the Y direction and the Y-axis driving unit by the column 90H. The 90I is driven by the winding drive unit 90D in the Y direction, the winding portion 90E wound around the axis parallel to the Z axis by the winding drive unit 90D, the Z-axis drive mechanisms 84A and 84B fixed to the both ends of the winding portion 90E, and the Z-axis drive mechanism. The grip claw opening and closing mechanisms 85A and 85B at the lower ends of the 84A and 84B, and the plurality of claw portions 86A and 86B that are opened and closed by the grip claw opening and closing mechanisms 85A and 85B. The Y-axis drive unit 90I drives the winding drive unit 90D in the Y direction by, for example, a ball screw method or a linear motor method. As described above, since the lamp transporting system 56D includes the two gripping claw opening and closing mechanisms 85A and 85B, it is possible to simultaneously hold the two discharge lamps 1 (or the unused discharge lamps 1N). Further, in order to adjust the rotation angles of the discharge lamps 1 and 1N, a rotation shaft (not shown) may be provided between the Z-axis drive mechanisms 84A and 84B and the grip claw opening and closing mechanisms 85A and 85B.

Moreover, as shown in FIG. 27, the light source device 30D is provided on the side of the chamber 92. The lifter 95 and the lifter 94 that rises and falls between the position P7 that is close to the first floor in the lift 95 and the position P6 that is close to the roof RT. A storage unit 54 (drive unit 80 and rotating disk 79) is provided on the upper surface of the lifting unit 94.

In the present embodiment, for example, when the discharge lamp 1 in the light boxes 29B and 29C is replaced, as shown in Fig. 26(A), the pull-out portion 36 that supports the discharge lamp 1 is pulled into the casings 51B and 51C. Then, the grip claw opening and closing mechanism 85A and the claw portion 86A are held by the unused discharge lamp 1N in the storage unit 54 and the grip claw opening and closing mechanism 85A is raised. Thereafter, as shown by the broken line in Fig. 26(B), the winding portion 90E of the lamp transporting mechanism 56D is moved above the casing 51B, and the other of the gripping claw opening and closing mechanism 85B and the claw portion 86B holds the discharge lamp 1N in the casing 51B. The discharge lamp 1N held by the one of the claw opening and closing mechanism 85A and the claw portion 86A is placed in the drawing portion 36 (support member 33) of the casing 51B. At this time, the operation of the clamp mechanism 52 to release the clamp of the socket portion 28 of the discharge lamp 1 is the same as that of the first embodiment.

Thereafter, as shown by the solid line in FIG. 26(B), the winding portion of the lamp transporting system 56D The 90E is moved to the upper side of the casing 51C, and the holding claw opening and closing mechanism 85A and the claw portion 86A grip the discharge lamp 1 in the casing 51C, and then the grip claw opening and closing mechanisms 85A and 85B are raised, and the winding portion 90E is moved above the storage portion 54. The two used discharge lamps 1 held by the claw portions 86A and 86B are placed on the rotary disk 79 of the storage unit 54. After that, the unused claw discharge mechanism 85A and the claw portion 86A hold the unused discharge lamp 1N of the rotary disk 79, move the winding portion 90E to the upper portion of the casing 51C, and place the discharge lamp 1 on the drawing portion in the casing 51. After 36, the pull-out portion 36 in the chassis 51B, 51C is returned to the lower casing 31A of the light boxes 29B, 29C, that is, the discharge lamp 1 in the light boxes 29B, 29C is replaced with the replacement of the unused discharge lamp 1N. The replacement of the discharge lamp 1 in the light box 29A is also performed in the same manner.

Moreover, the number of the discharge lamps 1 used in the rotary disk 79 located in the storage unit 54 is increased. At the time, as shown in FIG. 27, the storage unit 54 is moved to the position P7 of the first layer by the lift 95. The operator replaces the first lamp replacement door 45A of the lift 95, recovers the used discharge lamp 1 of the rotary disk 79, and replenishes the unused discharge lamp 1N. Thereafter, the storage unit 54 is moved to the position P6 near the roof RT by the elevator 95, that is, the replacement of the plurality of discharge lamps 1 in the light source device 30D can be performed.

According to this embodiment, the operator can only have a plurality of light boxes 29A to 29C The discharge lamp is replenished and recovered at one place, so the efficiency is good. Further, since the pair of grip claw opening and closing mechanisms 85A and 85B and the claw portions 86A and 86B are provided, the discharge lamp can be replaced in a short time even if the running distance of the winding portion 90E along the Y-axis driving portion 90I is long.

Moreover, in the chassis 51A to 51C corresponding to the respective light boxes 29A to 29C, only The driving unit 72C for pulling out the driving unit 60 and the clamping mechanism 52 is installed, thereby reducing the chamber The setting area of the roof RT of 92 makes it possible to easily set the light source device 30D even for a narrow roof RT.

Moreover, in order to further shorten the replacement time of the discharge lamp, it is also possible to increase the storage discharge lamp The number of rotating disks 79 and the number of lamp transporting systems 56D are used to shorten the lamp replacement time. In addition, the rotating disk for replenishing the discharge lamp and the rotating disk for recycling may be separately provided.

Further, the Y-axis driving unit 90I disposed above the plurality of light boxes 29A to 29C is traversed (the traveling axis of the lamp transporting system 56D) can be mounted on the roof RT by a plurality of pillars, or can be from the cavity The chamber 92 is supported in a separate configuration such as the top of the factory. Further, the light boxes 29A to 29C may be provided together at a position separated from the chamber 92.

[Fifth Embodiment]

Next, the fifth embodiment will be described with reference to Figs. 28 to 31(B). In the above-described embodiment, the anode-side socket portions 28 and 128 are positioned as the lamp transporting portions 56 and 56C in a state where the cathode-side bulb portions 26 and 126 of the discharge lamps 1 and 1A are positioned and fixed to the support member 33. When the claws 86 or the grips 160 are held, the shape of the discharge lamps 1 and 1A is low, that is, the grips 28 and 128 cannot be gripped by the claws 86 or the grips 160. When the shape accuracy of the discharge lamps 1 and 1A is low, the manipulator must have a compliance function (compliance) in order to hold the socket portions 28 and 128 with the robot such as the claw portion 86 or the grip portion 160. Therefore, in the present embodiment, there is provided a discharge lamp for a discharge lamp having flexibility in a positional relationship with a discharge lamp, and a discharge lamp having a lamp port adapted to be held by such a holding mechanism. The discharge lamp and the gripping mechanism can be used for, for example, the discharge lamp 1 and the lamp transporting system 56 in the light source device 30 of Fig. 4(B). In addition, in FIGS. 28 to 31 (B), parts corresponding to those in FIGS. 19(A) and (B) are denoted by the same reference numerals, and detailed description thereof will be omitted.

Fig. 28 shows a discharge lamp 1B of this embodiment. In Fig. 28, the discharge lamp 1B, The glass tube 25A, the cathode side socket portion 126 connected to the end of one of the square rod portions 25Ab of the glass tube 25A, and the anode side socket portion 128A connected to the end of the other rod portion 25Ac of the glass tube 25A are provided. The socket portions 128A and 126 are electrically connected to an anode and a cathode (not shown) in the bulb portion 25Aa of the glass tube 25A, respectively. The lamp mouth portions 126 and 128A are made of a metal having excellent electrical conductivity and thermal conductivity.

Further, the anode side port portion 128A is on the side of the rod portion 25Ac of the discharge lamp 1B. On the open end side, a cylindrical connecting portion 128Ak having a diameter slightly larger than the diameter of the rod portion 25Ac and a cylindrical intermediate portion 128Am having an outer diameter substantially the same as the diameter of the rod portion 25Ac are formed in sequence. The heat dissipating portion 128Ai of the plurality of endless belt fins 128Aj, the partial ball portion 128Ae (the held portion or the held portion) having a sphere having a radius slightly larger than the radius of the fins 128Aj, and FIG. 2(A) The terminal portion 128a has the same shape of the terminal portion 128Aa. The ball portion 128Ae has a shape in which the spherical body is cut away from the both ends of the longitudinal direction of the discharge lamp 1B in a direction perpendicular to the longitudinal direction. The height of the ball belt 128Ae (the length of the longitudinal direction of the discharge lamp 1B) is set to about 2/3 of the radius of the sphere. The mouth portion 128A is integrally formed of a metal (for example, brass) having a good thermal conductivity and electrical conductivity. Further, each of the individually manufactured portions (the belt portion 128Ae and the terminal portion 128Aa) may be coupled to each other to form the socket portion 128A.

Fig. 29(A) shows the hand 85D as the holding mechanism of the embodiment. A partially cutaway plan view and a front view of Fig. 29(B) are partially broken away from Fig. 29(A). Further, Fig. 29(A) is also a cross-sectional view taken along line AA of Fig. 29(B). In addition, in FIGS. 29(A) and (B), the Z-axis is taken along the longitudinal direction of the discharge lamp 1B to be supported, and the orthogonal directions in the plane perpendicular to the Z-axis are defined as the X-axis and the Y-axis. Further, the directions of rotation about the axes parallel to the X-axis, the Y-axis, and the Z-axis are also referred to as θx, θy, and θz directions, respectively. Moreover, as shown in FIG. 29(B), this embodiment For example, the hand 85D can be attached to the Z-axis drive mechanism 84 of the lamp transport system 56 of Fig. 4(B) instead of the grip claw opening and closing mechanism 85.

In FIGS. 29(A) and (B), the hand 85D has compliance in the X direction and the Y direction. Institution (a flexible institution). The hand 85D has a box-shaped housing 172 that is fixed to the bottom surface of the Z-axis drive mechanism 84 and is open to the lower side, and has a rectangular frame shape that is fixed to the lower end of the housing 172 and has the same outer shape as the housing 172 and has a low height. Frame member 173a. The thickness of the frame member 173a (the width in the XY plane) is the same throughout the entire circumference (except for the corner portion), and the thickness thereof is thicker than the thickness of the side portion of the casing 172.

Further, on the bottom surface of the frame member 173a, a moment in which a central portion is formed with a circular hole is fixed A flat plate-shaped lower plate 173b. The lower plate 173b is formed of, for example, metal (stainless steel or the like). Further, inside the casing 172 on the upper surface of the frame member 173a, a flat plate-shaped upper plate 177 having a rectangular shape and a thin thickness and a circular hole at the center portion is disposed in a small gap with the inner surface of the casing 172. The upper plate 177 is formed of, for example, a synthetic resin (plastic or the like). The aperture of the upper plate 177 is substantially equal to the aperture of the lower plate 173b.

Between the top of the inside of the casing 172 and the upper surface of the upper plate 177, in a state of being compressed A plurality of compression coil springs 180 are mounted, and the upper plate 177 is crimped to the frame member 173a with a predetermined force from above. Further, a guide bar 181 is provided to the compression coil spring 180. The hand 85D has a plurality of (for example, three) fingers 86D extending in the Z direction at the lower end portion through the disk-shaped mounting member 175, and can be opened and closed by a closing device (not shown) in the mounting member 175. The opening and closing of the plurality of fingers 86D are performed synchronously (same speed and the same distance) in a radial manner.

Mounted on the mounting member 175, extending in the up and down direction (Z direction) Cylinder member 174. The cylindrical member 174 may also be a cylindrical member. On the Z side of the cylindrical member 174 A flange portion 174a having a plan view and a rectangular shape is provided at an intermediate position. The cylindrical member 174 (the flange portion 174a) is formed of, for example, a metal (aluminum alloy or the like). The diameter of the cylindrical portion of the flange portion 174a of the sandwiching cylindrical member 174 is smaller than the diameter of the lower plate 173b and the upper plate 177, and the width of the outer shape of the flange portion 174a is larger than the diameter of the lower plate 173b and the upper plate 177. The cylindrical portion of the cylindrical member 174 is inserted into the hole of the upper plate 177 and the lower plate 173b so that the upper plate 177 and the lower plate 173b sandwich the rectangular flange portion 174a of the cylindrical member 174 from above and below. The lower end portion of the cylindrical member 174 is a head portion 174b and a coupling portion 174c having a larger diameter than the intermediate cylindrical portion.

The thickness of the flange portion 174a (the width in the Z direction) is larger than the thickness of the frame member 173a (Z Direction width is thin. Therefore, between the upper plate 177 and the lower plate 173b, there is a gap in which the flange portion 174a can be displaced in the Z direction. The cylindrical member 174 including the flange portion 174a may be a part of the mounting member 175, or an actuator or the like for opening and closing the finger portion 86D may be attached to the bottom of the cylindrical member 174.

Further, as shown in Fig. 29(A), between the upper plate 177 and the lower plate 173b, A rectangular frame-shaped member having a rectangular shape in plan view and having a thickness in the Z direction smaller than the thickness of the frame member 173a and substantially equal to the thickness of the flange portion 174a (hereinafter referred to as a small frame shape) is disposed. Member) 173c. The length of the small frame-shaped member 173c (the length of the opposite side and the longer one (Y direction)) is set to be slightly shorter than the length between the inner faces of the opposite sides of the frame member 173a (the inner dimension in the Y direction) The width of the small frame-shaped member 173c (the length of the opposite side and the shorter one (the X direction)) is set to be the length between the inner faces of the opposite sides of the other of the frame members 173a (within the X direction) Size) is sufficiently short. Further, the X-direction width (the inner dimension in the X direction) of the rectangular hole of the small frame-shaped member 173c is set to be slightly longer than the X-direction length of the flange portion 174a, and the Y-direction length of the rectangular hole of the small frame-shaped member 173c (Y) The size within the direction) is set It is determined to be sufficiently longer than the length of the flange portion 174a in the Y direction. Therefore, the flange portion 174a (that is, the cylindrical member 174) can move in the X direction together with the small frame-shaped member 173c (the small frame-shaped member 173c is pushed by the flange portion 174a), and the flange portion 174a can be placed along the small frame. The inner wall surface of the member 173c moves in the Y direction. Further, the flange portion 174a is restricted in the θz direction by the X-direction inner wall and the Y-direction outer wall of the small frame-shaped member 173c.

Further, the portion of the cylindrical member 174 above the upper plate 177 is as shown in Fig. 29(B). As shown, one end of the tension coil spring 179 is attached through three or more rod-like members 178 that are radially arranged. The other end of the tension coil spring 179 is radially and slightly stretched, and is attached to the outside of the mounting position of the one end side of the tension coil spring 179 at the top of the housing 172 (in a plan view, the cylindrical member 174) Centered on the outer side of the radius. Therefore, the cylindrical member 174 is given a radial upward pulling force, and stays at the center position by the balance of the force of the tension coil spring 179 which is stretched in the opposite direction. At this time, the finger 86D attached to the cylindrical member 174 through the mounting member 175 overcomes the weight of the mounting member 175 and the finger 86D itself in a state where nothing is held, and is gently contacted with the upper surface of the flange portion 174a. The manner of the plate 177 determines the strength and mounting angle of the tension coil spring 179. Further, at this time, the force of the compression coil spring 180 is set to a force of a plurality of compression coil springs 180, and the upper plate 177 is not pulled upward.

As a result, the cylindrical member 174 is lifted by the tension coil spring 179 (that is, The mounting member 175 and the finger portion 86D) suppress the vibration by the frictional resistance between the flange portion 174a and the synthetic resin upper plate 177, and prevent the horizontal movement from being hindered by the low friction coefficient.

The inner side of the finger 86D follows the light mouth portion 128 of the discharge lamp 1B of FIG. The curvature of the surface of the ball portion 128Ae (which can be fitted) is formed into a concave shape. On the underside of the mounting member 175 A cylindrical guide block 176 is fixed to the center of the root portion of the plurality of fingers 86D. The height of the guide block 176 in the Z direction is adjusted from the front end of the guide block 176 to the center of curvature of the recess provided in the finger 86D. The distance in the Z direction is substantially the same as the distance from the front end of the socket portion 128 of the discharge lamp 1B to the center of the ball portion 128Ae in the Z direction (the longitudinal direction of the discharge lamp 1B). Therefore, when the guide block 176 is in contact with the tip end of the socket portion 128A of the discharge lamp 1B, when the finger portion 86D is closed, the concave portion of the finger portion 86D is fitted to the ball portion 128Ae of the discharge lamp 1B, and can be surely held. Discharge lamp 1B. Of course, the boot block 176 can also be omitted.

Next, the discharge lamp 1B and the hand 85D of the present embodiment will be described in detail. The action of the discharge lamp 1B placed in the six-degree-of-freedom direction (X, Y, Z direction, and θx, θy, and θz directions) is shifted by the relative hand 85D. As shown in Fig. 30(A), the anode-side socket portion 128A of the discharge lamp 1B is inclined in the θy direction from the design transfer position, for example, and is shifted in the +X direction. The hand 85D is moved to a target position in the X direction and the Y direction above the discharge lamp 1B by a driving mechanism (for example, the winding shaft 83 of FIG. 4(B)) which is not shown in the X direction and the Y direction. Next, the mounting member 175 opens the plurality of fingers 86D (open state) to lower the finger 86D to the holding position of the discharge lamp 1B by the Z-axis drive mechanism 84. Before the socket portion 128A of the discharge lamp 1B, the end portion contacts the height of the guide block 176 provided at the central portion of the attachment member 175, and the depression of the hand 85D is stopped, and the finger portion 86D starts to close.

At this time, the length of the discharge lamp 1B in the Z direction is longer than the target length. At this time, the hand 85D continues to descend after the guide block 176 contacts the lamp mouth portion 128A. At this time, in order to prevent the guide block 176 from pressing the discharge lamp 1B downward (in the -Z direction), the flange portion 174a overcomes the force of the plurality of compression coil springs 180 to push the upper plate 177 upward (+Z direction). As a result, no large force is generated to the discharge lamp 1B. On the other hand, the length of the discharge lamp 1B in the Z direction is longer than the target When the degree is short, the center position of the curvature of the concave portion of the finger portion 86D and the center position of the ball portion 128Ae of the lamp mouth portion 128A are shifted in the Z direction. When the finger portion 86D is closed in this state, the edge provided below the concave portion of the finger portion 86D contacts the lower portion of the center of the ball portion 128Ae in the Z direction. Thereafter, when the finger portion 86D is further closed, the flange portion 174a which is originally in contact with the upper plate 177 moves downward and the gap between the lower plate 173b and the lower portion 173b by the force of the tension coil spring 179, so the finger portion 86D is The surface of the ball portion 128Ae having the curvature is guided to move downward, and the concave portion of the finger portion 86D is fitted to the surface of the ball portion 128Ae, and the finger portion 86D is in close contact with the ball portion 128Ae.

This is because the concave portion of the finger portion 86D holds the ball portion 128Ae to generate a centripetal force. The action can be made to move the finger 86D downward by the gap between the flange portion 174a and the lower plate 173b. In addition, in the finger portion 86D, considering the case where the discharge lamp 1B is short, the hand 85D is constantly moved in the -Z direction by the Z-axis drive mechanism 84, and the guide block 176 is in contact with the lamp mouth portion. The closing operation of the finger 86D may be performed after the 128A front end.

When the finger portion 86D performs the closing operation, as shown in FIG. 30(B), the lamp mouth portion 128A The finger 86D on the +X direction side first contacts the lamp mouth portion 128A earlier than the finger portion 86D on the -X direction side, but further closes the finger portion 86D so that the finger portion 86D on the -X direction side is also When the lamp mouth portion 128A is touched, as shown in Fig. 31(A), the finger portion 86D on the +X direction side receives the reaction force from the lamp mouth portion 128A, and the hand portion 85D generates a force that pushes the whole body in the +X direction. . As a result, the cylindrical member 174 which is originally balanced by the force of the tension coil spring 179 and the friction between the flange portion 174a and the upper plate 177 is superior to the balance force with the tension coil spring 179. The flange portion 174a and the upper plate 177 are frictionally moved, and the ball portion 128Ae of the socket portion 128A is surely held by the three fingers 86D while being easily moved in the +X direction. At this time, even if the socket portion 128A is inclined in the directions of θx, θy, and θz, and the spherical surface of the ball portion 128Ae is displaced, the shape thereof is formed. Since the shape does not change, the finger portion 86D can surely hold the socket portion 128A even if it has no flexibility in the direction of rotation.

Next, as shown in FIG. 31(B), when the finger portion 86D holds the lamp of the discharge lamp 1B, The mouth portion 128A drives the Z-axis drive mechanism 84 to lift the discharge lamp 1B with the hand 85D, that is, the force is applied obliquely upward by the tension coil spring 179, and the flange portion 174a originally contacting the upper plate 177 is discharged. The weight of the lamp 1B moves downward, and the flange portion 174a contacts the lower plate 173b. Since the coefficient of friction between the lower plate 173b and the flange portion 174a is large, the centripetal force generated by the balance of the force of the finger 86D over the tension coil spring 179 is maintained while being in the +X direction (no compliance). The state) rises. As a result, by moving the hand 85D in the X direction and/or the Y direction, the discharge lamp 1B can be moved to the target position regardless of the shape error of the discharge lamp 1B (for example, the storage unit 54 of FIG. 4(B). Replace the discharge lamp 1B with an unused discharge lamp.

Further, in the above embodiment, when a large upward force is generated in the finger portion 86D, A function (buffering function) of pressing the compression coil spring 180 toward the lower upper plate 177 to lift the flange portion 174a to release the large force upward. The mechanism for releasing the finger 86D in the Z direction is not limited to such a mechanism, and the mechanism for driving the entire hand 85D to the Z direction can be provided to the Z-axis drive mechanism 84.

Further, in the above embodiment, only the finger portion 86D of the anode side socket portion 128A is used. The portion to be gripped (the belt portion 128Ae) has been described. For example, the power supply block 66 at the end of the cable 24 of Fig. 4(B) is connected to the terminal portion 128Aa of Fig. 28, for example, and the shape of the terminal portion 128Aa is made. The terminal portion 28a of Fig. 2(A) or the terminal portions 28Aa to 28Da of Figs. 3(B) to (E) may have the same shape.

Further, as a method of manufacturing the discharge lamp 1B, the discharge lamp 1 described above can be used. The same manufacturing method as 1A. In other words, the lamp body (glass member) and the lamp mouth portions 126 and 128A are separately prepared, and the discharge lamp 1B can be configured by connecting these to each other. At this time, the socket portions 126 and 128A may be reused, for example, from the used discharge lamp 1B. Further, when at least one of the socket portions 126 and 128A is reused, at least a part of the socket portions 126 and 128A can be reused instead of the entire lamp mouth portions 126 and 128A (for example, the terminal portion 128Aa and the ball belt). At least one of the portion 128Ae and the heat dissipation portion 128Ai).

Moreover, the replacement device 50 of the above-described embodiments is automatically driven. Although the discharge lamps 1, 1A, 1B, and the like are replaced, for example, only the clamp mechanism 52 and the drive unit 72 may be used, and the discharge lamp of the pull-out portion 36 and the discharge lamp 1 using the lamp transfer system 56 may be manually operated. One part of the transfer of 1A, 1B.

Further, in the replacement device of each of the above embodiments, the respective rotating disks 79 are opened. The port 79a performs lamp replacement (i.e., sets (replenishes) the unused lamp and recycles the used lamp), but for example, the rotary disk 79 can be detachably attached to the drive unit 80, and the lamp is disposed in the opening 79a of the rotary disk 79. The state of (inserted) is replaced with the rotating disk 79. In this case, the rotary disk 79 can be used as a carrier for transporting the lamp.

The exposure apparatus of each of the above embodiments may be used or the exposure apparatus may be used. In the exposure method, a predetermined pattern (a circuit pattern, an electrode pattern, or the like) is formed on a substrate (sheet P), and a liquid crystal element such as a liquid crystal display element is produced. Hereinafter, an example of the manufacturing method will be described with reference to steps S401 to S404 of Fig. 33.

Step S401 (pattern forming step) of FIG. 33, first, implemented in exposure Applying a resist on the target substrate to prepare a coating step of the photosensitive substrate (sheet P), using the above exposure An exposure step of exposing and exposing the mask pattern for the liquid crystal display element to the photosensitive substrate, and a developing step of developing the photosensitive substrate. A predetermined photoresist pattern is formed on the substrate by a lithography process including the coating step, the exposure step, and the development step. After the lithography process, a predetermined pattern including a plurality of electrodes or the like is formed on the substrate by using the photoresist pattern as an etching step and a photoresist stripping step of the processing mask. The lithography process or the like is performed plural times on the number of layers on the sheet P.

In the next step S402 (color filter forming step), by corresponding red The group of three fine filters of R, green G, and blue B are mostly arranged in a matrix, or a group of three filters of three stripes of red R, green G, and blue B are arranged in the horizontal scanning line direction. According to the formation of a color filter. In the next step S403 (unit assembly step), liquid crystal is injected between a sheet having, for example, a predetermined pattern obtained in step S401 and the color filter obtained in step S402 to fabricate a liquid crystal panel (liquid crystal cell).

Subsequent step S404 (module assembly step), assembled in the above manner Most liquid crystal panels (liquid crystal cells) are equipped with a circuit for performing a display operation, a backlight, and the like to complete a liquid crystal display element. According to the method for manufacturing a liquid crystal display element described above, since the discharge lamp can be efficiently replaced at the end of the exposure apparatus, high productivity can be obtained.

Moreover, the present invention is not limited to the application of the process of the liquid crystal display element, and can also be widely used. It is widely used in processes such as display devices such as plasma displays, imaging devices (CCDs, etc.), micro devices, MEMS (Microelectromechanical Systems), thin film magnetic heads and semiconductor devices using ceramic wafers and the like as substrates. Process of various components.

Further, in the light source device of the above embodiment, in addition to the scanning of the stepping scanning method described above In addition to the exposure type projection exposure device (scanner, etc.), it can also be applied to step & repeat A light source for exposure of a projection exposure apparatus (stepper, etc.). Further, the light source device of the above-described embodiment can also be applied to a light source device that does not use a proximity mode or a contact type exposure device of a projection optical system, or a light source of a device other than the exposure device.

As described above, the present invention is not limited to the above-described embodiments, and various configurations are possible without departing from the scope of the invention.

Further, the disclosures of the above-mentioned publications, the respective international publication pamphlets, the U.S. patents, or the U.S. Patent Application Publications, which are incorporated herein by reference, are incorporated herein by reference. In addition, all the disclosures of Japanese Patent Application No. 2014-070609, filed on Jan.

1‧‧‧discharge lamp

1N‧‧‧Unused discharge lamps

2‧‧‧Elliptical mirror

2a‧‧‧ openings

3‧‧‧Bending mirror

26‧‧‧ Cathode side lamp mouth

26a‧‧‧Front

26h‧‧‧Fixed Department

28‧‧‧Anode side lamp mouth

28a‧‧‧Terminal Department

30‧‧‧Light source device

31‧‧‧Lightbox

31A, 31B‧‧‧ shell

31Aa‧‧‧ Opening

31Ab‧‧‧ openings

33‧‧‧Support members

34‧‧‧ drive unit

36‧‧‧ Pull out

36c‧‧‧Connected Department

38‧‧‧Leverage

39‧‧‧ coil spring

40‧‧‧ Drive Department

41‧‧‧ Guides

42‧‧‧ shading members

43‧‧‧Linking components

45‧‧‧Light replacement door

50‧‧‧Replacement device

51‧‧‧Chassis

51a‧‧‧ openings

51b‧‧‧Window Department

52‧‧‧Clamp mechanism

54‧‧ ‧ Custody Department

56‧‧‧Lighting Department

60‧‧‧ Pull out the drive unit

61‧‧‧ Guides

62‧‧‧Abutment

62a‧‧‧ front end

63‧‧‧ Drive Department

64‧‧‧Relay components

65‧‧‧Support members

66‧‧‧Power block

67‧‧‧ benchmark leverage

68‧‧‧Stretched coil spring

69‧‧‧Drive lever

70‧‧‧Roller

72‧‧‧ drive unit of clamp mechanism

73‧‧‧ Guides

74‧‧‧Sliding parts

75‧‧‧ movable table

76‧‧‧ Drive Department

77‧‧‧ Drive Department

79‧‧‧Rotating table

79a‧‧‧ Opening

80‧‧‧ Drive Department

82‧‧‧Support

83‧‧‧Rotary axis

84‧‧‧Z-axis drive mechanism

85‧‧‧Claw opening and closing mechanism

86‧‧‧ claws

Claims (31)

A light source device for providing a glass member having a first electrode and a second electrode for forming a light-emitting portion, and a first electrode side of the glass member and the second electrode for the light-emitting portion The discharge lamp of the first cap member and the second cap member on the electrode side emits light, and includes a storage portion for storing the discharge lamp, and a support portion for the second cap member of the discharge lamp The connecting portion supports the first light port member that detachably connects the member that transmits power to the discharge lamp supported by the support portion, and the transport portion that is configured by the support portion The first cap member is held in the storage portion and the support portion while the connection of the member for transmitting electric power to the first cap member is released by the connection portion. Transfer between them. The light source device of claim 1, wherein the storage unit stores an unused discharge lamp; the conveying unit holds the first base member of the unused discharge lamp, and discharges the unused one. The lamp is conveyed to a position where the second cap member of the unused discharge lamp can be supported by the support portion. The discharge lamp of claim 1 or 2, wherein the first socket member of the discharge lamp has a member capable of contacting the power transmission and capable of reducing electrical contact resistance with the member. The connected portion in contact with the member surface includes a held portion that can be held by the transport portion or a non-planar portion or inclined portion. The light source device of claim 3, wherein the connected portion of the first socket member includes two intersecting planar portions; the connecting portion has a member connected to the transmitted power and is provided with The first member of the first socket member that is electrically connected to the V-shaped groove that is in contact with the connecting portion, and the second member that biases the first socket member toward the first member. The light source device of claim 4, wherein the connecting portion has a direction in which the first member is supported so as to be displaceable along a plane perpendicular to two plane portions of the connected portion of the first cap member; The first guide. The light source device according to claim 4, wherein the connecting portion has a second member that supports the first member so as to be displaceable in a direction along the two planar portions of the connected portion of the first socket member. Guide. The light source device of claim 3, wherein the connected portion of the first socket member includes a substantially axisymmetric surface; the connecting portion has a member connected to the transmitted electric power and can be coupled to the first lamp The first member of the annular member that is in contact with the connected portion and that is in contact with the first member, and the second member that can bias the first member to the first member. The light source device of claim 7, wherein the connected portion of the first socket member has a substantially axisymmetric recess; the second member has a cylindrical front end portion, and an inner diameter gradually decreases from the front end portion An axially symmetric tapered portion; the connecting portion having a plurality of spheres mountable between the front end portion of the second member or the recess portion and the recess of the first socket member; When the plurality of spheres are located in the tapered portion of the second member, the coupling portion is detachable from the first socket member. The light source device according to any one of claims 3 to 8, wherein the held portion of the first cap member is formed with a hole portion, and the conveying portion is configured to be engageable with the first lamp The protrusion of the hole portion of the holding portion of the mouth member and the hand held by the first socket member are held together with the held portion of the first socket member held by the hand. The moving part of the hand movement. The light source device according to any one of claims 3 to 8, wherein the held portion of the first socket member has an axisymmetric portion having a spherical surface; the conveying portion has a hand portion Holding the portion of the first socket member held by the clamping; the buffer portion is displaced by an angular displacement between the hand and the first socket member; and the moving portion holding the hand at the hand In the state of the held portion of the first socket member, the hand portion and the buffer portion are moved. The light source device according to any one of claims 1 to 10, comprising: sliding the discharge lamp and the holding portion integrally to a position where the conveying portion can hold the position of the first cap member of the discharge lamp unit. The light source device according to any one of claims 1 to 11, wherein the second cap member has a flange portion and a step portion; the support portion has the flange portion that transmits the second cap member a support member that supports the second socket member and a first lever member that detachably fixes the second socket member to the support member with the stepped portion that passes through the second socket member; The connecting portion has a conductive member that is connected to the member that transmits power and is in contact with the first socket member, and a second lever member that can bias the first socket member toward the conductive member; Further, a drive unit that drives the common use of the first and second lever members is provided. The light source device according to any one of claims 1 to 12, wherein the storage unit is disposed on a second layer below the first layer in which the connection portion, the holding portion, and the transfer portion are disposed; When the discharge lamp is replaced, the storage unit is moved to the elevating portion of the second layer. The light source device according to any one of claims 1 to 13, wherein a plurality of light source units including the discharge lamp, the connecting portion, and the support portion are provided, and the plurality of light source units, the transport unit and the transport unit This storage unit is shared. The light source device according to any one of claims 1 to 14, further comprising: a support member, wherein the second cap member of the discharge lamp is detachably mounted thereon; and a condensing mirror is disposed on the support member The light emitted from the discharge lamp is concentrated. The light source device of claim 15, wherein the condensing mirror comprises a reflecting surface that reflects the light emitted from the discharge lamp and an opening surrounded by the reflecting surface; the supporting portion is partially inserted in the glass member The second base member is supported by the state of the opening. An exposure apparatus comprising: the light source device according to any one of claims 1 to 16; an illumination system for illuminating the reticle with light emitted from the discharge lamp of the light source device; and an image of the reticle A projection optical system projected onto a substrate. A component manufacturing method comprising: Forming a pattern of the photosensitive layer on the substrate using the exposure apparatus of claim 17; and processing the substrate on which the pattern is formed. A method of replacing a discharge lamp is to replace a discharge lamp having a glass member forming a light-emitting portion and a first base member and a second socket member provided to sandwich the glass member, comprising: bringing a surface into contact with An operation of the member of the first light fitting member of the discharge lamp to transmit power from the connected portion; an operation of disengaging the second base member of the discharge lamp from the support member; The non-planar portion of the first cap member of the discharge lamp or the held portion of the inclined portion conveys the discharge lamp to the storage unit. The method of replacing the invention of claim 19, comprising: holding the held portion of the first socket member of the discharge lamp that is not used in the storage portion, and transporting the unused discharge lamp to the unused discharge lamp An operation of the second lamp port member of the lamp at a position supported by the support member; an operation of supporting the second cap member of the unused discharge lamp with the support member; and a member connecting the transmission power The member surface is in contact with the operation of the connected portion of the first cap member of the unused discharge lamp. A method of lighting a discharge lamp is to illuminate a discharge lamp having a glass member forming a light-emitting portion and a first base member and a second socket member provided to sandwich the glass member, comprising: transmitting The component surface of the electric power is in contact with the connected portion of the first cap member of the discharge lamp An operation of supporting the second cap member of the discharge lamp with a support member capable of supplying electric power, and an operation of supplying the electric power to the discharge lamp through the member for transmitting electric power and the support member to illuminate the discharge lamp. The method of lighting a discharge lamp according to claim 21, comprising: holding a non-planar portion or an inclined portion of the first cap member including the discharge lamp, and transporting the discharge lamp from the storage unit to the storage unit The action of the support member. A discharge lamp having a glass member in which a first electrode and a second electrode for forming a light-emitting portion are provided, and a first electrode side and a second electrode side of the glass member provided on the light-emitting portion A socket member and a second socket member, characterized in that the first socket member has a member capable of transmitting electric power and is capable of contacting the member surface in order to reduce electrical contact resistance with the member. The connected portion; and a held portion that includes a non-planar portion or an inclined portion that can be held by the transport portion. The discharge lamp of claim 23, wherein the connected portion of the first socket member includes two planar portions that are arranged in an intersecting manner. The discharge lamp of claim 23, wherein the connected portion of the first base member includes a substantially axisymmetric surface. The discharge lamp according to any one of claims 23 to 25, wherein the held portion of the first cap member is formed with a hole portion at which the projection of the conveying portion is engageable. A discharge lamp according to any one of claims 23 to 25, wherein the first The held portion of the base member has an axisymmetric portion in which the conveying portion can be held and the surface is spherical. The discharge lamp according to any one of claims 23 to 27, wherein a heat sink is provided between the glass member and the connected portion and the held portion in the first socket member. The discharge lamp according to any one of claims 23 to 28, wherein the second base member has a small-diameter portion that can be placed on a flange portion of the support member and has a smaller cross-sectional area than the flange portion And the section with a larger cross-sectional area than the small diameter section. A method of manufacturing a discharge lamp according to any one of claims 23 to 29, comprising: an operation of manufacturing the glass member to which a conductive member is connected at one end; and manufacturing the joined portion and the held portion The operation of the covering member; and the operation of fixing the covering member so as to cover the conductive member on one end side of the glass member. A method of manufacturing a discharge lamp according to any one of claims 23 to 29, further comprising: preparing the glass member provided at one end of the first conductive member electrically connected to the first electrode or the second electrode The operation of preparing the second conductive member in which the connected portion and the held portion are formed, and the operation of connecting the second conductive member to the first conductive member on one end side of the glass member.