TW201407698A - Sheet sticking device and sticking method - Google Patents

Abstract

A sheet sticking device (1) comprises: frame receiving means (3A, 3B) for receiving a frame member (RF) integrated with an attaching body (WF) via an adhering sheet; a supporting means (6) for at least supporting the frame member (RF) and the frame member (RF) in the attaching body (WF); a transporting means (7) for transporting the frame member (RF) from the frame receiving means (3A, 3B) to the supporting means (6); and a sticking means (9) for allowing the adhering sheet to abut against and stick on the frame member (RF) supported by the supporting means (6), or the frame member (RF) and the attaching body (WF). The frame receiving means (3A, 3B) include movement means (40A, 40B). The movement means (40A, 40B) can be self-propelled between a predetermined supplying position with respect to the transporting means (7) and a supplementing position (SP) for supplementing the frame member (RF) to the frame receiving means (3A, 3B).

Description

Sheet sticking device and pasting method

The present invention relates to a sheet sticking device and a pasting method for adhering a sheet.

Conventionally, there has been known a sheet sticking device which is a sheet sticking device which adheres a sheet to a semiconductor wafer (hereinafter, referred to simply as a wafer) or a ring frame in a semiconductor manufacturing step ( For example, refer to Document 1: Japanese Patent Laid-Open Publication No. 2005-33119.

The sheet sticking device described in Document 1 is configured to include a mounting means for attaching a sheet for attaching a sheet to a wafer and a ring frame, and a wagon. a plurality of annular frames are housed, and a caster is provided at the bottom; and the transport means transports the annular frame from the trolley to the attaching means; once the annular frame housed in the trolley is used up, The trolley is separated from the sheet sticking device, and after the annular frame is replenished, the cart is again placed in the sheet sticking device.

However, in the conventional sheet sticking apparatus as described in Document 1, since the trolley cannot be self-propelled, when the ring frame accommodated in the trolley has been used up, it is necessary to use the human power to move the trolley, and the new one will be used. The annular frame is replenished to the trolley and the trolley is moved to the device again. Therefore, there is a problem that the operator who is to replenish the ring frame to the trolley must wait all the time, and the operator's work load increases.

The object of the present invention is to provide a sheet stick which can reduce the workload of an operator. Sticking device and pasting method.

A sheet sticking device according to the present invention is characterized by comprising: a frame accommodating means for accommodating a frame member that is integrated with the adherend through the sheet; and a supporting means for supporting at least the frame member and the adherend a frame member; a conveying means for conveying the frame member from the frame housing means to the supporting means; and a bonding means for abutting and adhering the bonding sheet to the frame member or the frame member supported by the supporting means and The frame housing means includes a moving means for self-propelling between a predetermined supply position with respect to the conveying means and a replenishing position for replenishing the frame member to the frame housing means.

In the sheet sticking apparatus of the present invention, it is preferable that the moving means has a positioning means capable of recognizing the position of the frame housing means.

In the sheet sticking apparatus of the present invention, preferably, the frame accommodating means is provided in plurality, and the transport means is provided to selectively transport the frame member from the plurality of frame accommodating means to the support means.

In the sheet sticking apparatus of the present invention, it is preferable that the frame accommodating means includes an excess member accommodating means for accommodating the unnecessary member, and is provided to be movable to a waste position at which the unnecessary member is discarded by the moving means.

A sheet sticking method according to the present invention is characterized in that a frame member that is integrated with a sticker by passing through a sheet is conveyed to a support means from a frame housing means disposed at a predetermined supply position; and the sheet is brought into contact with And adhering to the frame member supported by the supporting means, or the frame member and the adhesive body; when the frame member of the frame receiving means has been used up, the frame receiving means is self-propelled from the supply position to supplement the frame member a position; the frame receiving means that has been supplemented with the frame member is self-propelled from the replenishing position to the supply position.

According to the invention as described above, when the frame member is replenished to the frame housing means, the frame housing means can be self-propelled between the predetermined supply position with respect to the conveying means and the replenishing position of the supplementary frame member, so that it is not necessary to The operator has been waiting for it, or it is not necessary to use manpower to move the frame housing means, etc., which can reduce the operator's work load.

According to the present invention, since the positioning means is provided, the position of the frame housing means can be recognized. Therefore, the frame housing means can be surely moved between the supply position and the replenishing position.

Further, if the frame member is selectively transported from the plurality of frame accommodating means to the supporting means, the frame member can be continuously received from the other frame even if the frame accommodating means is separated from the sheet sticking means in order to replenish the frame member. Since the means is supplied to the supporting means, it is possible to prevent the processing ability per unit time of the sheet sticking device from being lowered due to the addition of the frame member.

Further, if the frame accommodating means provided with the excess member accommodating means can be moved to the disposal position, the operator does not need to move the excess member accommodating means to the disposal position, and the work load of the operator can be further reduced.

1‧‧‧Sheet Adhesive Device

2‧‧‧ Wafer containment means

3A‧‧‧1st frame containment means

3B‧‧‧2nd frame containment means

5A‧‧‧1st means of detection

5B‧‧‧Second detection means

5C‧‧‧3rd means of detection

6‧‧‧Support means

7‧‧‧Transportation means

8‧‧‧Fixed means

9‧‧‧Adhesive means

10‧‧‧Frame mouth

11‧‧‧Frame

12‧‧‧Positioning holes

13‧‧‧Dissipation means

21‧‧‧ Wafer

31A, 31B‧‧‧Removal components containment means

32A, 32B, 64‧‧‧ linear motors

33A, 63‧‧‧Sliding parts

34A‧‧‧Support components

35A‧‧‧ pole

40A, 40B‧‧‧ mobile means

41A, 41B‧‧‧ casters

42A, 42B‧‧‧Trolley

43A, 43B‧‧‧ wheels

44A, 44B, 95‧‧‧ rotating motor

45A, 45B‧‧‧ steering means

46A, 46B‧‧‧ Keeping Department

47A, 47B‧‧‧ Locating Pin

48A‧‧‧ Positioning means

61‧‧‧Support surface

62‧‧‧Package

71‧‧‧Multi-joint robotic arm

71A‧‧‧ front end

72‧‧‧Retention means

73‧‧‧ recess

74‧‧‧ Keep the frame

74A‧‧‧ face

75‧‧‧XY stage

76‧‧‧Output Department

77‧‧‧Adsorption plate

78‧‧‧Adsorption holes

79‧‧‧Adsorption surface

81, 452A‧‧‧ output shaft

82, 451A, 451B‧‧‧ Direct drive motor

91‧‧‧Support roll

92‧‧‧ Guide roller

93‧‧‧ peeling board

94‧‧‧Press roller

96‧‧‧ drive roller

97‧‧‧Pinch roller

98‧‧‧Recycling roller

411A‧‧‧Axis

471A, 471B‧‧ hole

481A, 481B‧‧‧ Receiving means

AA‧‧ symbol

AD‧‧‧ adhesive layer

AR‧‧‧ arrow

AS‧‧‧Next sheet

BS‧‧‧Substrate sheet

DP‧‧‧Discarded location

OP‧‧‧ means of transmission

PS‧‧‧Protected sheet

RF‧‧‧ ring frame

RF1‧‧‧ openings

RF2‧‧‧ groove

RL‧‧‧ peeling sheet

RS‧‧‧ coil

SP‧‧‧Additional location

WF‧‧‧ wafer

WK‧‧‧ wafer support

X, Y, Z‧‧‧ axes

Fig. 1 is a plan view showing a sheet sticking apparatus according to an embodiment of the present invention.

Fig. 2 is a side view of a frame housing means of the sheet sticking device.

Fig. 3 is a side view showing a bonding means of the sheet sticking device.

Hereinafter, an embodiment of the present invention will be described based on the drawings.

Further, in the present embodiment, the X-axis, the Y-axis, and the Z-axis are orthogonal to each other. Relationship, the X-axis and the Y-axis are axes in the horizontal plane, and the Z-axis is an axis orthogonal to the horizontal plane. Further, in the present embodiment, the observation is made from the direction of the arrow AR parallel to the Y-axis, and when the direction is indicated, "upper" is the direction of the arrow of the Z-axis, and "down" is the "upper". In the opposite direction, "Left" is the direction of the arrow of the X-axis, "Right" is the opposite direction of the "Left", "Front" is the direction of the arrow of the Y-axis, and "Rear" is the opposite direction of the "Front".

In FIG. 1, the sheet sticking apparatus 1 includes a wafer accommodating means 2 for accommodating a plurality of wafers WF as an adherend, and a first frame accommodating means 3A and a second frame accommodating means 3B as frame accommodating means. Each of the plurality of annular frames RF as a frame member integrated with the wafer WF through the sheet AS (Fig. 3) can be accommodated; the support means 6 supports at least the annular frame RF and the wafer WF. The ring frame RF; the transport means 7 selectively transports the ring frame RF from the first frame housing means 3A and the second frame housing means 3B to the support means 6; and the fixing means 8 (Fig. 2) is the first And at least one of the second frame housing means 3A, 3B is fixed to the sheet sticking device 1; and the bonding means 9 is such that the sheet AS is abutted and adhered to the ring frame RF supported by the supporting means 6, or The ring frame RF and the wafer WF; the sheet sticking device 1 is supported by a frame 11 on which the frame port 10 is formed, and the frame port 10 is a predetermined supply position with respect to the transport means 7.

The wafer accommodating means 2 is composed of a cassette 21 which is supported to be detachable from the frame 11. The wafer cassette 21 can accommodate the wafer WF in a plurality of stages in the vertical direction. The wafer WF is attached to the surface. There is a protective sheet PS (Fig. 3) as a redundant member.

The first frame housing means 3A includes a moving means 40A configured to be self-propellable, and the excess member housing means 31A is provided in the opening portion RF1 of the annular frame RF accommodated in the first frame housing means 3A. And the housing is formed into a cylindrical shape in which the upper opening is closed at the lower part Protective sheet PS; two linear motors 32A supported by the moving means 40A; a supporting member 34A supported by the slider 33A of the linear motor 32A and supporting the annular frame RF; and a pole 35A, a ring and a ring The four outer portions of the outer edge of the frame frame RF are in contact with each other, and the positioning of the annular frame RF is performed. The first frame housing means 3A is provided to be able to replenish the annular frame RF to the frame receiving means 3A at the frame opening 10. The replenishment position SP of 3B and the discarding position DP of the discarding protective sheet PS move between.

As shown in FIG. 2, the moving means 40A is provided with a bogie 42A, and four swinging casters 41A are provided at four corners below; four rotating motors 44A are supported by the casters 41A, and the driving is performed. The driving device of the wheel 43A of the caster 41A; the four steering means 45A steer each caster 41A; the holding portion 46A is provided in the trolley 42A and can be held by the transport means 7; the positioning pin 47A is protruded from the trolley 42A. The mode setting means and the positioning means 48A recognize the position of the first frame housing means 3A.

The steering device 45A includes a linear motion motor 451A that supports a driving device in which the trolley 42A is swingable, and an output shaft 452A of each linear motion motor 451A rotatably and a shaft 411A that protrudes from each caster 41A. link.

The positioning pin 47A is provided in a shape in which the tip end is tapered, and is inserted into the positioning hole 12 formed in the frame opening 10, whereby the first frame housing means 3A can be positioned and fixed at a predetermined position.

The positioning means 48A receives the predetermined signal such as a radio wave, an acoustic wave, and a magnetic field transmitted by the transmitting means OP by the receiving means 481A provided in the bogie 42A, and the information or offset of the predetermined signal received by the receiving means 481A. The predetermined processing is performed, whereby the receiving means 481A recognizes its current position, and the transmitting means OP is provided at a predetermined plurality of locations (two locations in FIG. 1). As the positioning means 48A, in addition to GPS (Global) The positioning means may be exemplified by the following means: the transmitting means OP receives the predetermined signal transmitted by the receiving means 481A, and the transmitting means OP transmits the signal or the signal based on the signal to the receiving means 481A again. The predetermined signal received by the receiving means 481A is subjected to predetermined processing, whereby the receiving means 481A recognizes its current position.

As shown in FIG. 1, the second frame housing means 3B has the same configuration as the first frame housing means 3A, and can be described by replacing the symbol at the end A of the first frame housing means 3A with B. Its description.

Further, a first detecting means 5A and a second detecting means 5B each composed of an optical sensor, a contact sensor, an imaging means, and the like are provided behind the first and second frame housing means 3A, 3B; The detecting means 5A and the second detecting means 5B detect the upper surface of the uppermost annular frame RF and position the uppermost annular frame RF at a predetermined position.

The support means 6 includes a stage 62 having a support surface 61 capable of adsorbing and holding the wafer WF and the ring frame RF by means of a suction means such as a vacuum pump or an ejector (not shown). And as the linear motor 64 for driving the machine, the stage 62 is supported by the slider 63 (Fig. 3).

The transport means 7 includes a multi-joint robot 71 as a drive device, and a holding means 72 that is detachably provided to the distal end portion 71A of the multi-joint robot 71, and is configured by a multi-joint robot 71. The wafer WF or the ring frame RF held by the holding means 72 is transported. The multi-joint robot 71 is a so-called 6-axis robot arm having a rotatable joint at six locations, and is configured to hold the wafer WF held by the holding means 72 within the working range of the multi-joint robot 71. Or the annular frame RF moves at any position and at any angle. As shown in the diagram seen in the AR direction indicated by the symbol AA in FIG. 1, the holding means 72 has: 74A has a disc-shaped holding frame 74 having a recessed portion 73, an XY stage 75 disposed in the recessed portion 73, and an adsorption plate 77 supported by the output portion 76 of the XY stage 75; the adsorption plate 77 is configured to be along The two axial directions orthogonal to each other in the plane of the face 74A of the holding frame 74 are moved, and the suction plate 77 can be rotated in the plane. The adsorption plate 77 has an adsorption surface 79 provided with a plurality of adsorption holes 78, and is connected to the multi-joint robot 71, thereby being connected to a suction means such as a vacuum pump or a vacuum aspirator (not shown) to be adsorbed. Maintain wafer WF or ring frame RF. Further, the adsorption plate 77 has two systems, that is, a system for adsorbing and holding the wafer WF, and a system for adsorbing and holding the annular frame RF. On the other hand, the holding portions 46A and 46B provided in the respective carts 42A and 42B are detected by a detecting means such as an optical sensor or a photographing means (not shown) or the positioning means 48A, and the joint robot 71 is Instead of the holding means 72, the holding portions 46A, 46B are held by the front end portion 71A.

Further, on the left side of the transport means 7, a third detecting means 5C composed of an optical sensor or an imaging device is provided. The third detecting means 5C can detect the outer edge position of the wafer WF and be formed on the wafer. An outer orientation and an inner edge position of a V-shaped groove (notch) or an orientation plane, such as an unillustrated WF, which is not shown, a circuit pattern, a street, or an annular frame RF, is provided on the outer circumference of the annular frame RF The groove RF2 and the like.

The fixing means 8 includes a linear motion motor 82 (Fig. 2) as a driving device, and is configured to position and fix each of the frame housing means 3A, 3B to the frame 11 by inserting the output shaft 81 into the holes 471A, 471B; The linear motion motor 82 as the drive device is configured such that the output shaft 81 can be protruded or retracted toward the positioning hole 12; and the holes 471A and 471B are respectively provided to the positioning pins 47A and 47B inserted into the positioning holes 12.

As shown in FIG. 3, the pasting means 9 is provided with a support roller 91 and a support coil. RS, the coil RS is temporarily adhered to one side of the strip-shaped release sheet RL by the adhesive sheet AD having the adhesive layer AD on one surface of the base sheet BS, and a plurality of guides The take-up roll 92 guides the web RS; the peeling plate 93 folds the web RS, thereby peeling off the succeeding sheet AS from the release sheet RL; and pressing the roll 94 to peel off via the peeling sheet 93 The sheet AS abuts and adheres to the wafer WF and the annular frame RF; the driving roller 96 is driven by a rotary motor 95 as a driving machine; the pinch roller 97 is inserted between the driving roller 96 and the peeling piece. The material RL and the recovery roller 98 are driven by a driving machine (not shown) to recover the release sheet RL.

In addition, in the case of the present embodiment, a peeling means 13 for peeling off the protective sheet PS adhered to the wafer WF is provided, and for example, a peeling device of Japanese Patent Application No. 2008-285228 or Japanese Patent Application No. 2011-55508 can be exemplified. Recorded.

In the above-described sheet sticking apparatus 1, the order in which the sheet AS is adhered to the wafer WF and the ring frame RF will be described.

First, the coil RS is set as shown in FIG. 3, and the wafer cassette 21 is placed at the position shown in FIG. Then, at the replenishment position SP, a predetermined number of annular frames RF are replenished to the support member 34A, and the moving means 40A drives the receiving means 481A to receive the predetermined signal transmitted by the transmitting means OP to perform predetermined processing, whereby the receiving means The 481A drives the swing motor 44A and the linear motor 451A while recognizing the current position of the self, and the first frame housing means 3A is positioned at a predetermined position of the frame port 10 shown in FIG. Next, the fixing means 8 drives the linear motor 82, and the positioning pin 47A is locked to the output shaft 81, whereby the first frame housing means 3A is positioned and fixed to the frame 11. Thereafter, in the same manner as described above, the second frame housing means 3B is placed at a predetermined position of the frame opening 10 and positioned and fixed.

In addition, once the first and second frame housing means 3A, 3B are close to the frame In the port 10, the multi-joint robot 71 is driven by the transport means 7, and the holding means 72 is taken out from the front end portion 71A, and the respective carts 42A, 42B are held while holding the holding portions 46A, 46B of the carts 42A, 42B by the front end portion 71A. Pull in to the frame opening 10. Thereby, the first and second frame housing means 3A, 3B can be surely positioned at a predetermined position of the frame opening 10.

Then, each of the frame housing means 3A, 3B drives the linear motors 32A and 32B to raise the laminated ring frame RF, and the first and second detecting means 5A, 5B detect the ring frame RF located at the uppermost position at a predetermined position. The linear motors 32A, 32B stop driving.

When the respective members are installed as described above, the transport means 7 drives the multi-joint robot 71, and the holding means 72 is inserted into the inside of the wafer cassette 21, and the suction surface 79 is brought into contact with the wafer WF, and then the drive is not shown. The attraction means is to adsorb and hold the wafer WF. Next, the transport means 7 drives the multi-joint robot 71 to move the wafer WF to a position detectable by the third detecting means 5C, and drives the XY stage 75 to rotate the wafer WF by a predetermined angle. Thereby, the third detecting means 5C detects the outer edge position of the wafer WF and the V-shaped groove position (not shown), and outputs the respective materials to a control means (not shown). When the data of the wafer WF is input to a control means (not shown), the center position of the wafer WF is calculated, and the transport means 7 drives the XY stage 75 and the multi-joint robot 71 to center the wafer WF. The V-shaped groove position (not shown) is set to a predetermined position, and the wafer WF is placed on the support surface 61 of the stage 62.

Next, the transport means 7 drives the multi-joint robot 71 to move the holding means 72 to the upper side of the first frame housing means 3A, and the suction surface 79 is in contact with the annular frame RF located at the uppermost position at a predetermined position, and then the drive unit 79 is driven. The illustrated attraction means adsorbs and holds the annular frame RF. Next, the transport means 7 drives the multi-joint robot 71 to move the ring frame RF to a position detectable by the third detecting means 5C, and the third detecting means 5C performs detection and detection of the crystal. The same operation is performed in the case of the circular WF, and thereafter, the center position of the opening portion RF1 of the annular frame RF is aligned with the center position of the wafer WF supported on the stage 62, and the V-shape of the annular frame RF is achieved. The groove RF2 is placed in a predetermined direction, and the annular frame RF is placed on the support surface 61 of the stage 62. In addition, the first frame housing means 3A drives the linear motor 32A, and the first detecting means 5A, when the annular frame RF located at the uppermost portion is the uppermost annular frame RF. The uppermost annular frame RF is detected at a predetermined position, and the linear motor 32A stops driving.

Next, the support means 6 drives the linear motor 64 to move the stage 62 to the left direction. When the detecting means (not shown) detects that the wafer WF and the ring frame RF have reached a predetermined position, the bonding means 9 and the stage The movement of 62 drives the rotary motor 95 synchronously and feeds the coil RS. Thereby, the succeeding sheet AS is peeled off by the peeling plate 93, and the peeled succeeding sheet AS is adhered to the wafer WF and the ring frame RF by the pressing roller 94, as shown by the two-dot chain line in FIG. Forming a wafer support WK. Once the wafer support WK is formed, it is detected by a detection means not shown, and the support means 6 stops the driving of the linear motor 64. Then, the transport means 7 drives the multi-joint robot 71, lifts the wafer support WK upside down, and delivers it to a delivery means (not shown) having an adsorption support surface facing the support surface 61. The wafer support WK is lowered and placed on the support surface 61 again. Thereby, the wafer support WK is supported by the support surface 61 with the protective sheet PS facing upward.

Next, the support means 6 drives the linear motor 64 to move the stage 62 in the left direction. When the detecting means (not shown) detects that the wafer support WK has reached the predetermined position, the peeling means 13 adheres the peeling tape (not shown) to the protective sheet PS, and pulls the peeling strip from the strip. The wafer WF peels off the protective sheet PS (for details, refer to the peeling device prior literature). Once from the wafer When the WF peels off the protective sheet PS, the transport means 7 drives the multi-joint robot 71, and the adsorption surface 79 comes into contact with the peeled protective sheet PS, and drives a suction means (not shown) to adsorb and hold the protective sheet PS. It is housed in the excess member accommodation means 31A. Then, the wafer support WK from which the protective sheet PS has been peeled off is transported to another step by a transport means (not shown), and the stage 62 is returned to the position shown by the solid line in FIG. 1, and then repeatedly performed as described above. The same action.

When the first detecting means 5A detects that all the annular frames RF of the first frame housing means 3A have been used up, the conveying means 7 starts to support the annular frame RF from the second frame housing means 3B. The action of means 6 transfer. Then, the fixing means 8 drives the linear motion motor 82 to release the engagement between the output shaft 81 that has positioned and fixed the first frame housing means 3A and the positioning pin 47A. Then, similarly to the above, the moving means 40A drives the receiving means 481A, receives the predetermined signal transmitted by the transmitting means OP, and performs predetermined processing, whereby the receiving means 481A drives the rotary motor 44A and the straight while recognizing the current position of itself. The motor 451A moves the first frame housing means 3A to the disposal position DP. Thereby, when the new annular frame RF is replenished to the first frame housing means 3A, even if the first frame housing means 3A is separated from the frame opening 10, the conveying means 7 can continue to receive the annular frame RF from the second frame. The means 3B is supplied to the support means 6, and when the ring frame RF is replenished or the protective sheet PS is discarded, the operation of the sheet sticking apparatus 1 does not need to be stopped, and the processing per unit time of the sheet sticking apparatus 1 can be prevented. Decrease in ability.

Then, the unnecessary means accommodating means 31A in which the protective sheet PS is accommodated is taken out from the first frame accommodating means 3A, and the new excess member accommodating means 31A is placed on the first frame accommodating means 3A. Then, in the same manner as described above, the first frame housing means 3A is placed at the replenishing position SP, the new plurality of annular frames RF are replenished to the first frame housing means 3A, and the first frame housing means 3A is again placed at the frame opening. The established position of 10. In addition, When the second detecting means 5B detects that all the annular frames RF of the second frame housing means 3B have been used up, the conveying means 7 starts the transfer of the annular frame RF from the first frame housing means 3A to the supporting means 6. In the same manner as described above, the new annular frame RF is replenished to the second frame housing means 3B, and is again set at a predetermined position of the frame opening 10.

As described above, each time the ring frame RF is used up, the new ring frame RF is replenished to each of the frame housing means 3A, 3B, and the conveying means 7 can selectively carry out the ring shape from each of the frame housing means 3A, 3B. The frame RF can continue the pasting operation using the sheet AS of the sheet sticking device 1.

According to the embodiment described above, the following effects are obtained.

That is, when the annular frame RF is replenished to each of the frame housing means 3A, 3B, each of the frame housing means 3A, 3B can be self-propelled between the frame opening 10 and the complementary position SP of the supplementary annular frame RF, so that it is not necessary to The operator waits for a long time or does not need to manually move the frame housing means 3A, 3B, thereby reducing the operator's work load.

Further, it is possible to reduce the complication that the operator has to supply the ring frame RF to the sheet sticking device 1 rapidly because of the fear that the processing ability of the sheet sticking device 1 is lowered.

As described above, the best configuration, method, and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited thereto. In other words, the present invention has been particularly shown and described with respect to the specific embodiments. However, the embodiments described above can be applied to the shapes, materials, and the like by those skilled in the art without departing from the scope of the invention. Various modifications are made to the aspects of the quantity and other details. In addition, the description of the shapes, materials, and the like disclosed above is exemplarily described in order to make the present invention easy to understand, and is not Since the present invention is limited to the above, it is included in the present invention by removing the description of the part or all of the defined member names that are limited by the shape, material, and the like.

For example, only the annular frame RF may be placed on the stage 62, and the subsequent sheet AS may be adhered to the annular frame RF.

Further, instead of the pressing roller 94, a pressing member made of a blade material, a rubber, a resin, a sponge or the like may be used, and a pressing by a jet may be employed.

Further, instead of the peeling plate 93, a peeling member made of a roller or the like may be used.

Further, the swing motors 44A and 44B in the respective moving means 40A and 40B may be configured to drive the two wheels 43A and 43B as two-body or one-body.

Further, the linear motors 451A and 451B of the steering devices 45A and 45B in the respective moving means 40A and 40B may be configured to steer the two casters 41A and 41B as two or one.

Further, as long as each of the frame housing means 3A, 3B can be self-propelled, the number of the casters 41A, 41B can be any.

Further, the transmission means OP may be provided in one part or may be provided in three or more parts as long as the current position of the transmission means OP 481A can be recognized by the receiving means 481A, 481B.

Further, a detecting means for detecting the storage state of the protective sheet PS in the excess member housing means 31A, 31B may be provided, and the frame receiving means 3A, 3B are moved according to the detection result of the detecting means. Go to the abandoned location DP.

Further, it may be configured as follows: at the disposal position DP, from the redundant member Only the protective sheet PS is taken out in the means 31A, 31B.

Further, the excess member accommodation means 31A, 31B may be provided outside the opening portion RF1 of the annular frame RF of the first and second frame accommodation means 3A, 3B.

In addition, the sheet sticking apparatus 1 has a cutting means for cutting a sheet to be bonded to a fixed body into a predetermined shape as in the case of Japanese Patent Application No. Hei 10-231608, and the sheet after cutting may be used. The excess portion is housed in each of the excess member housing means 31A, 31B.

Further, a plurality of wafer accommodating means 2 may be provided, and a plurality of wafer accommodating means 2 may be configured to be separated from the frame 11 by the same configuration as each of the frame accommodating means 3A, 3B.

Further, three or more frame accommodation means may be provided, as long as the frame accommodation means is configured to be self-propellable between the frame opening 10 and the supplementary position SP.

Further, a configuration may be adopted in which one of the first and second frame housing means 3A, 3B is the main side, and the other is the sub side, and the ring frame RF is always driven by the transport means 7 from the main The side is transported to the support means 6, and only the annular frame RF of the main side has been used up until the new annular frame RF is replenished and is again located in the frame opening 10, and the transport means 7 removes the annular frame RF from the sub-side. Transfer to support means 6.

Further, a configuration may be adopted in which the operator drives the linear motor 82 by manual operation to release the locking of the output shaft 81 and the positioning pins 47A and 47B, and the conveying means 7 accommodates the first and second frames that are being taken out. When one of the means 3A and 3B is separated from the frame opening 10, the transport means 7 starts the operation of transporting the annular frame RF from the other of the first and second frame housing means 3A, 3B to the support means 6.

Further, it may be configured as follows: the fixing means 8 can be interlocked (interlock), the operator cannot separate the first and second frame housing means 3A, 3B from the frame opening 10 by manual operation.

Further, the type and material of the adherend and the sheet AS in the present invention are not particularly limited. For example, the sheet AS may be an intermediate layer between the base sheet BS and the adhesive layer AD. Alternatively, three or more layers of the cover layer or the like may be provided on the upper surface of the base material sheet BS, and further, a so-called double-sided sheet-like sheet which can peel the base sheet BS from the adhesive layer AD may be used. The material, as such a double-sided back sheet, may also be an intermediate layer having a single layer or a plurality of layers, or a single layer or a plurality of layers having no intermediate layer. Further, the system semiconductor wafer is adhered, and then the sheet AS may be a protective sheet, a singulation tape, a die attach film, or the like. In this case, the semiconductor wafer may be exemplified by a semiconductor wafer or a compound semiconductor wafer, and the subsequent sheet AS adhered to such a semiconductor wafer is not limited to the above-described succeeding sheet, and any sheet or film may be applied. , such as strips, and other shapes and shapes of the following sheets. Further, the substrate of the system disc is adhered, and then the sheet AS may be a resin layer constituting the recording layer. As described above, the adhesive body may be not only a glass plate, a steel plate, a ceramics, a wood board, a resin board or the like, but also a member or an article of any form.

Further, in the drive device according to the above-described embodiment, an electric motor such as a rotary motor, a linear motion motor, a linear motor, a single-axis robot arm, or a multi-joint robot arm, and an air cylinder, a hydraulic cylinder, a rodless cylinder, a rotary cylinder, or the like may be used. The actuators and the like may be combined directly or indirectly (also having the same as those exemplified in the embodiment).

1‧‧‧Sheet Adhesive Device

2‧‧‧ Wafer containment means

3A‧‧‧1st frame containment means

3B‧‧‧2nd frame containment means

5A‧‧‧1st means of detection

5B‧‧‧Second detection means

5C‧‧‧3rd means of detection

6‧‧‧Support means

7‧‧‧Transportation means

8‧‧‧Fixed means

9‧‧‧Adhesive means

10‧‧‧Frame mouth

11‧‧‧Frame

12‧‧‧Positioning holes

13‧‧‧Dissipation means

21‧‧‧ Wafer

31A, 31B‧‧‧Removal components containment means

32A, 32B, 64‧‧‧ linear motors

34A‧‧‧Support components

35A‧‧‧ pole

40A, 40B‧‧‧ mobile means

42A, 42B‧‧‧Trolley

46A, 46B‧‧‧ Keeping Department

47A, 47B‧‧‧ Locating Pin

48A‧‧‧ Positioning means

61‧‧‧Support surface

62‧‧‧Package

71‧‧‧Multi-joint robotic arm

71A‧‧‧ front end

72‧‧‧Retention means

73‧‧‧ recess

74‧‧‧ Keep the frame

74A‧‧‧ face

75‧‧‧XY stage

76‧‧‧Output Department

77‧‧‧Adsorption plate

78‧‧‧Adsorption holes

79‧‧‧Adsorption surface

481A, 481B‧‧‧ Receiving means

AA‧‧ symbol

AR‧‧‧ arrow

DP‧‧‧Discarded location

OP‧‧‧ means of transmission

RF‧‧‧ ring frame

RF1‧‧‧ openings

RF2‧‧‧ groove

SP‧‧‧Additional location

WF‧‧‧ wafer

X, Y, Z‧‧‧ axes

Claims (4)

A sheet sticking device comprising: a frame receiving means for accommodating a frame member integrated with the adhesive body through the sheet; and a supporting means for supporting at least the frame member and the frame member in the adhesive body The conveying means transports the frame member from the frame housing means to the supporting means, and the bonding means for abutting and adhering the bonding sheet to the frame member supported by the supporting means, or the frame member and the adhering body The frame housing means includes a moving means for self-propelling between a predetermined supply position with respect to the conveying means and a replenishing position for replenishing the frame member to the frame housing means. The sheet sticking device of claim 1, wherein the moving means has a positioning means for recognizing a position of the frame housing means. The sheet sticking device according to claim 1 or 2, wherein the frame accommodating means includes an excess member accommodating means for accommodating the excess member, and is provided to be movable to a waste position of the waste member by the moving means . A sheet sticking method is characterized in that a frame member that is integrated with an adhesive body through a sheet is conveyed to a support means from a frame housing means disposed at a predetermined supply position; and the sheet is brought into contact with and adhered a frame member supported by the support means, or a frame member and an adhesive body; when the frame member of the frame receiving means has been used up, the frame receiving means is supplied from the supply The position is self-propelled to supplement the complementary position of the frame member; the frame receiving means that has supplemented the frame member is self-propelled from the replenishing position to the supply position.