TW201331580A - Ultrasonic sensor, inspection method and inspection apparatus using the same - Google Patents

Abstract

The present invention relates to an ultrasonic sensor, an inspection method and an inspection apparatus using the same. The object is to provide an ultrasonic sensor, an inspection method and an inspection apparatus using the same that are applied in a parallel configured dual-probe method to maintain the decomposing capability and oscillation intensity while remaining highly sensitive in detecting defects. The solution is an ultrasonic sensor that is provided with plural elements (10A, 10B) respectively for transmitting/receiving signals, and boots (20) and (40) for retaining the components so as to enable the ultrasound to propagate in an inclination direction. For the shape of the element, the element range located in the vicinity of the center of the boot body is used to adjust the opening range(A) of the unchanged sensor. In addition, for the shape of the boot, the elements are kept to have two or more surfaces of the boots, and the surfaces of the boots is tilted to be mirror symmetrical to each other. Moreover, for the configuration of the elements on the surface of the boots, elements are symmetrically arranged to be non-parallel with respect to the mirror.

Description

Ultrasonic sensor, inspection method and inspection device therewith

The present invention relates to an ultrasonic sensor, an inspection method and an inspection apparatus therefor, and more particularly to an ultrasonic sensor for use in a double probe method suitable for ultrasonic inspection in a surface layer or a shallow portion, using the same Inspection method and inspection device.

Ultrasonic inspection is used for one of the representative non-destructive inspection methods in the industrial field. Ultrasonic inspection is performed by applying a voltage to a piezoelectric element having an electrical mechanical conversion efficiency, and transmitting ultrasonic waves generated from the sensor to the object to be inspected, and using ultrasonic waves to reflect on the boundary surface of the substance. The vibration of the reflected wave passing through a part thereof is converted into a voltage again via the piezoelectric element, and is recorded as a method of recording, graphing, or imaging.

At present, the ultrasonic inspection is applied to a structure having a thickness of about 200 mm to a thin structure of several mm, in order to prove the soundness of various structures. For example, in the ultrasonic inspection of a structure such as a power generation field, a bevel inspection method in which ultrasonic waves are transmitted obliquely to an inspection object and is inspected is generally used. In order to perform the oblique angle inspection, there is a method of using a shoe body, water, and other contact mediators to refract the transmission of ultrasonic waves by using the difference in acoustic impedance between the inspection object and the shoe body, or by making an electrical signal or by Each component of the array sensor consisting of a plurality of components causes an electrical signal to be transmitted only by a specific time delay, and the ultrasonic waves generated from the components are In the subject, a focus is formed at an arbitrary position, and further, when the pattern (delay pattern) of the electrical signal of each element is changed at a high speed, the ultrasonic wave in the object to be inspected can be controlled. Transmission ‧ Receive signal angle (refraction angle), focus position, etc., called the phase array method, or a combination of these methods.

The application of the oblique angle detection method to a thin structure or a relatively shallow range inspection mainly involves the problem of detecting a signal from a defect through the noise of the non-inductive band and the multiple reflection. The non-inductive band transmits ultrasonic waves from the same component. When receiving a signal, when the ultrasonic wave oscillates, the residual vibration between the components themselves cannot receive the ultrasonic waves reflected by the component itself, resulting in undetectable The time band of the reflected signal, or the phenomenon of the range of the distance. The multiple reflection system receives ultrasonic waves that are reflected by the supersonic waves in the contact media or under the thin material, which becomes a phenomenon of noise. Therefore, for flaw detection of SN, it is necessary to judge the presence or absence of defects by the non-inductive band and the propagation distance (distance) outside the range in which multiple reflections occur. In the prior art which can solve this problem, it is known that a component called a transmission signal (transmission signal component) and a component (receiving signal component) used for receiving a signal are separately called a two-probe method. (For example, refer to Patent Document 1).

The two-probe method for evaluating the presence or absence of a defect by obtaining a reflected wave from the defect corner portion can be distinguished by the positional relationship between the transmission signal element and the received signal element defect. Knowing that there is a method of arranging elements in a parallel direction for the predicted direction of progress of the defect, and a method of arranging the elements in a vertical direction and not across the defects for the predicted direction of progress of the defect Other methods of arranging components across defects are methods of arranging single components directly above the defects.

[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 11-14608

In the double-probe method of the plural, the method of arranging the elements in parallel in the direction of the predicted defect progression (hereinafter referred to as "parallel arrangement type double probe method") is, for example, described In Patent Document 1, it is important to consider the intersection of the center of the element and the sound line from the center of the element as the reference for the arrangement of the elements, and the angle of the intersection of the lines from the center of the element.

In order to increase the sensitivity of the defect detection, it is necessary to reduce the opening angle of the sound line in order to expand the range of the transmission of the sound and the range of the received signal, and to make the element centers close to each other as much as possible. However, if the opening angle is reduced, of course, the components have a certain size, and must be used as the components do not interfere with each other. Therefore, in order to make the center of the elements as close as possible to each other, it is necessary to reduce the size of the elements and make them as close as possible to each other. However, if the component is reduced, of course, the oscillation strength of the directivity or the ultrasonic wave is lowered, and as a result, the decomposition ability or sensitivity of the defect detection is lowered. In addition, conversely, if the component is enlarged, the directivity or the oscillation strength of the component is improved, but the components are not sufficiently close to each other and the opening angle becomes large, and there is still a problem that the decomposition ability or the sensitivity is lowered.

The object of the present invention is to provide the ability to maintain decomposition and oscillation intensity simultaneously. Ultrasonic sensor for high-sensitivity defect detection, using its inspection method and inspection device.

In order to achieve the above object, the present invention has an element for transmitting a plurality of signals ‧ received signals, and a holding portion for holding the aforementioned elements in order to propagate ultrasonic waves in an oblique direction, and a sound-absorbing material, a transmission of the divided ultrasonic waves, and reception In the ultrasonic sensor of the signal, the surface of the shoe body holding the element is two or more as the shape of the shoe body of the holding portion, and the inclination of the surface of the shoe body is mirror-symmetrical to each other as the shoe body. The arrangement of the aforementioned elements on the surface is such that the elements are symmetrically arranged non-parallel to the mirror surface, and as the shape of the element, the element positioned near the center of the shoe body is adjusted to adjust the opening of the sensor. Range.

Through the related structure, while maintaining the decomposition ability and the oscillation intensity, it becomes a highly sensitive defect detection.

According to the present invention, in the ultrasonic sensor used in the parallel configuration type double probe method, while maintaining the decomposition ability and the oscillation intensity, it becomes a highly sensitive defect detection.

Hereinafter, the configuration of the ultrasonic sensor according to the first embodiment of the present invention will be described with reference to Figs. 1 to 7 .

First, the configuration of the ultrasonic sensor in the case of oblique angle flaw detection by the single probe method will be described with reference to Figs. 1 and 2 .

Fig. 1 is a configuration diagram of an ultrasonic sensor which is subjected to oblique angle detection by a single probe method. Fig. 1(A) shows the state of the XZ plane, and Fig. 1(B) shows the state of the XY plane. 2 is an explanatory view of a pointing angle of an ultrasonic sensor.

A shoe body 20 is disposed above the subject (test body) 30, and an ultrasonic sensor 10 is disposed above the shoe body 20. This case is a single probe method. Further, the upper surface of the shoe body 20, that is, the installation surface of the ultrasonic sensor 10, and the lower surface of the shoe body 20, that is, the contact surface with the subject 30 are not parallel, and the angles of the faces are Angle α . The angle α is an incident angle at which the ultrasonic wave of the signal transmitted from the ultrasonic sensor 10 is incident on the subject 30.

The component width of the ultrasonic sensor 10 (referred to as "effective sensor opening") in the appearance of the XZ plane viewed from the test body 30 is treated as and after refraction by the oblique probe detection by the single probe method. The direction in which the sound lines intersect perpendicularly to the width of the long axis of the projection element. The original sensor opening is referred to as A, and the effective sensor opening is referred to as Aeff. When the incident angle is α and the refraction angle is θ , it can be expressed by the following formula (1).

Further, for the expansion of the beam emitted from the ultrasonic sensor 10, the effective sensor opening Aeff and the wavelength λ in the test body can be expressed by the following formula (2). Here, ω _1/2 is called a pointing angle.

Here, the pointing angle and the half-height width will be described using FIG. 2.

The pointing angle refers to the angular distribution (main pole) of the space of the main sound wave released from a component (an ultrasonic sensor), compared with the direction in which the sound pressure is strongest (the center sound line), and the sound pressure becomes Half of the angle. Further, the ultrasonic wave having the pointing angle ω _1/2 is advanced by the distance D, and the interval Fw at which the sound pressure is half is referred to as the half-height width of the beam. These pointing angles ω _1/2 or half-height widths Fw are used for the evaluation of the decomposition ability (spatial decomposition ability) in the direction perpendicular to the propagation direction, and the smaller the value, the sharper the beam distribution (high directivity), with It becomes a high spatial decomposition capability.

On the other hand, as shown in Fig. 1(B), the sensor opening in the XY plane viewed from the test body is as the same idea as the XZ plane, and there is no change before and after the refraction, but can be regarded as a component. The width (M) of the end shafts is equal.

Accordingly, the pointing angle of the expansion of the sound wave displayed on the XY plane can be expressed by the following formula (3) from the equation (2).

Next, the influence of the opening angle of the parallel arrangement type double probe method via the ultrasonic sensor of the present embodiment will be described with reference to Figs. 3 and 4 .

FIG. 3 and FIG. 4 are explanatory views of the influence of the opening angle of the parallel configuration type double probe method of the ultrasonic sensor according to the first embodiment of the present invention. Fig. 3(A) is a top view, Fig. 3(B) is a side view, and Fig. 3(C) is an explanatory view of a mode of the embodiment.

As shown in Fig. 3, in order to investigate the influence of the opening angle of the parallel-arranged double probe method, the test object 10 to be inspected is used as a flat plate, and on the flat plate, for the sake of simplicity, the direction of the signal is transmitted and the direction of the signal is received. The sensor opening has a rectangular shape of the transmission signal element 10A and the reception signal element 10B, and is considered to be arranged in a octant pattern along the symmetry line. However, the symbol 40 shown in Fig. 3(A) is a sound insulating board.

In fact, the center line from the two elements 10A, 10B configured as eight characters has an intersection of three dimensions. These are referred to as intersection points CP. The length of the long axis of the element of this mode is 2L, the length of the short axis of the element is 2M, the opening angle of the symmetry line from the element is θ , the distance from the center of the element to the intersection is R, and the wavelength in the plate is λ . The distance R is a certain. The length of the short axis of the component is as applicable to the idea of a component, and the effective opening is maintained at 2M without change. The sonic expansion in this mode can be considered as a secondary element.

4 is a configuration for reducing the opening angle. For example, when the opening angle is reduced, it is considered that the range AA of the sound wave propagating from the transmission signal element 10A is equal to the range BB of the receiving signal element 10B, and the opening angle is 45 degrees. In the following, the overlapping range CC can be expanded to extend the range of high sensitivity.

Next, the influence of the directivity angle of the parallel arrangement type double probe method via the ultrasonic sensor of the present embodiment will be described with reference to Figs. 5 and 6 .

FIG. 5 and FIG. 6 are explanatory views of the directivity angle of the parallel configuration type double probe method of the ultrasonic sensor according to the first embodiment of the present invention.

As shown in FIG. 5, the intersection CP is set at the coordinate origin to set the propagation direction of the center line from the transmission signal element 10A as the Y' axis, and the direction perpendicular to the Y' axis as the coordinate of the X' axis. In addition, the intersection point CP is also set to the coordinate origin as the Y-axis at the coordinate origin, and the direction perpendicular to the Y-axis is used as the coordinate system of the X-axis.

It is assumed that, as a configuration of an infinitely long reflection source on the X-axis, ultrasonic waves are propagated from a considerable distance via the transmission signal element 10A, and a reflected wave from the reflection source is received via the reception signal element. The directivity angle indicating the expansion of the sound wave on the X' axis via the transmission signal element 10A can be expressed from the following equation (4) from the equation (2).

In addition, the intersection of the distance R from the center of the element is taken as the origin. When considering the half-height width on the X-axis and the X'-axis, the half-height width Fw( θ ) on the X-axis is projected on the X' axis. The configuration of the upper half-height width Fw' depends on the opening angle θ and can be expressed by the following formula (5).

Then, if the opening angle is small and R is constant, it is better to understand the spatial decomposition ability on the X-axis.

However, as shown in Fig. 6, the opening angle of the element is rather small, and the element is out of the symmetry line, and there is a case where the elements interfere with each other. The opening of the component of Fig. 6(A) is relatively large and has no interference. In this regard, FIG. 6(B) is smaller than the opening angle of FIG. 6(A), and an interference element range JJ is generated.

Here, for the component range beyond the symmetry line, the components are not interfered by each other, and it is necessary to adjust the two components used for transmitting and receiving signals. That is, the transmission signal element 10A adjusts the component range JJ in which interference occurs. Further, for the transmission signal element 10A, it is necessary to adjust the range of the element which causes interference, for the reception signal element which is symmetrically arranged symmetrically.

At this time, when only the component range JJ in which interference occurs is adjusted, the symmetry of the shape of the component is lost, and as shown in FIG. 6(B), the position of the center of the component is from the bit. When C1 is changed to position C2, the opening angle also changes.

Then, as shown in FIG. 6(C), it is necessary to adjust the component range JJ in order to eliminate the influence of the disturbance, and to adjust the component range KK which is point-symmetric with the center of the component as the center. The location.

However, as shown in Fig. 3(A), in reality, the sound absorbing panel 40 having a certain thickness (about 0.5 mm) is provided in the symmetrical line portion, and these become the boundary between the elements. However, in the following description, the thickness of the sound insulating plate 40 will be described as an unintended configuration. However, above the actual shape of the component, the thickness of the sound insulating plate is considered.

The relationship between the half-height width and the opening angle in consideration of the interference between the elements is a case where the difference is satisfied (0° < θ < arctan (M/R)), and the following equation (6) is obtained.

On the other hand, the case where (arctan (M/R) < θ < 90°) is satisfied is the following formula (7).

Next, the acoustic output via the transmission signal component is considered. The sound pressure released from the element resonance of the element area S is P, and the material density of the propagation target is ρ , and when the speed is c, the acoustic output W can be expressed by the following formula (8).

Accordingly, the relationship between the acoustic output and the opening angle can be grasped as a change in the area of the element that interferes with each other via the elements. Therefore, when determining the relationship between the component area and the opening angle, The case where (arctan (M/(R-L)) < θ < 90°) is satisfied can be expressed by the following formula (9).

[Number 9] S(θ)=4ML...(9)

The case where interference occurs is a case where the element shape is a hexagonal shape and a case of a square shape is satisfied (arctan(M/(R+L))<θ<arctan(M/(RL))), and the component is In the case of the 6-angle, it becomes the following formula (10).

In addition, when (0°<θ<arctan(M/(R+L)))) and the element is a quadrangular shape, the following formula (11) is satisfied.

[Number 11] S(θ)=4LR tan θ...(11)

Next, the opening angle of the parallel configuration type double probe method according to the ultrasonic sensor of the present embodiment will be described with reference to Fig. 7 .

Fig. 7 is an explanatory view showing an opening angle of a parallel arrangement type double probe method of the ultrasonic sensor according to the first embodiment of the present invention.

From the above, regarding the opening angle dependence of the pointing angle and the element area (Expression (6), (7), (9) to (11)), for example, M, L, R, and λ are set to appropriate values as a graph. When it is changed, it becomes as shown in Fig. 7.

The shape of the open-angle element suitable for the parallel configuration type double probe method does not change the original element width (the length of the long axis and the short axis), and the opening angle becomes It is best when it is minimum. In the example shown in FIG. 7, as the element shape, when the distance between the hexagonal elements and the distance R is set at an opening angle of 14 degrees, the sensor opening (the length of the major axis and the minor axis) of the element is not changed and the element area is The reduction is less, the ability to fully decompose, and the signal strength are transmitted, and the sensor performance becomes higher.

However, as shown in FIG. 3, the shoe body 20 is used, but the shoe body 20 is intended to inspect the ultrasonic sensor 10 (the transmission signal element 10A, the signal receiving element 10B) as a specific oblique angle for the inspection object. Holder. For example, in the case of the water immersion method, as a holding portion for the inspection target to use the ultrasonic sensor as a specific oblique angle, it is a member that supports the ultrasonic sensor in water.

As described above, according to the present embodiment, the shape of the element used in the sensor of the parallel arrangement type double probe method is optimized as the opening angle, and the decomposition ability and the oscillation intensity are maintained at the same time, and the sensitivity can be high. Defect detection improves sensor performance. That is, in the surface layer inspection by the parallel arrangement type double probe method, it is possible to realize a non-destructive examiner having high decomposition ability and high sensitivity.

Next, the other element shapes of the ultrasonic sensor used in the parallel arrangement type double probe method according to the second embodiment of the present invention will be described with reference to Figs. 8 to 11 .

8 to 10 are explanatory views of other element shapes of the ultrasonic sensor used in the parallel configuration type double probe method according to the second embodiment of the present invention. Fig. 11 is an explanatory view showing the arrangement of an ultrasonic sensor used in the parallel arrangement type double probe method according to the second embodiment of the present invention. Figure 11 (A) is oblique View, Figure 11 (B) is a plan view.

In the oblique flaw detection, considering the effective sensor opening, there are many cases in which an elliptical shape element is used for a rectangular element.

As considered in the same manner as the method of reviewing using a rectangular element, it is considered that the shape of the element adjusted along the limit as shown in Fig. 8 is optimal.

However, as shown in FIG. 9, in the form in which the sensor opening is not changed, the change in the shape portion of the element does not affect the flaw detection performance.

Moreover, by increasing the symmetry of the shape of the element, the SN ratio can be improved as a secondary effect. That is, as shown in FIG. 10, when the original element is a rectangular shape or an elliptical shape, the interference range A and the interference range are added to the range A' of the element center point, and the two ranges are adjusted for the center. In terms of sound lines, the shape of the elements of the range B and B' which are line symmetrical (mirror objects) is optimal. A and A' are similar to each other, and the range of B and B' which are separated from the center sound axis is not disturbed, but the sound wave is transmitted in a range away from the intersection, and the sound is sensible, and this is adjusted as a result of the flaw detection. It can reduce the noise.

Fig. 11 shows a state in which the transmission signal element 10A and the reception signal element 10B having the shapes shown in Figs. 8 to 10 are placed on the shoe body 20. Between the transmission signal element 10A and the reception signal element 10B, a sound insulating plate 40 is disposed inside the shoe body 20 below.

In the present embodiment described above, the element shape of the sensor used in the parallel arrangement type double probe method is optimized in consideration of the opening angle, and the decomposition ability and the oscillation intensity are maintained at the same time, and the sensitivity can be high. Defect detection Can improve sensor performance. That is, in the surface layer inspection by the parallel arrangement type double probe method, it is possible to realize a non-destructive examiner having high decomposition ability and high sensitivity.

Next, another element shape of the ultrasonic sensor used in the parallel configuration type double probe method according to the third embodiment of the present invention will be described with reference to Fig. 12 .

Fig. 12 is an explanatory view showing the shape of another element of the ultrasonic sensor used in the parallel arrangement type double probe method according to the third embodiment of the present invention.

In Fig. 12, an ultrasonic sensor used in the parallel configuration type double probe method is used as an array. The shape of the element presented in FIGS. 7 to 10, for example, as shown in FIG. 12, is an array of elements arranged along the center line, and the surface layer portion can be electronically scanned by a phase array method or the like. The element 10-1 of Fig. 12(A) has the same width in the center line direction, and 12 unit elements having different lengths in the direction perpendicular to the center line are arranged in the center line direction as an array. Twelve of the entire shapes arranged in an array form an elliptical shape corresponding to FIG. 10(A). The element 10-2 of Fig. 12(B) has twelve overall shapes arranged in an array as an octagonal shape corresponding to Fig. 10(B). The element 10-2 of Fig. 12(C) has twelve entire shapes arranged in an array as a hexagonal shape.

In the present embodiment described above, the element shape of the sensor used in the parallel arrangement type double probe method is optimized in consideration of the opening angle, and the decomposition ability and the oscillation intensity are maintained at the same time, and the sensitivity can be high. Defect detection improves sensor performance. That is, in the surface inspection by the parallel configuration type double probe method, high decomposition ability and high sensitivity non-destructive inspection can be realized. By.

Next, an ultrasonic sensor used in the parallel arrangement type double probe method according to the fourth embodiment of the present invention will be described with reference to Figs. 13 and 14 .

FIG. 13 and FIG. 14 are explanatory views of an ultrasonic sensor used in the parallel configuration type double probe method according to the fourth embodiment of the present invention.

Heretofore, the double-probe method of the parallel arrangement type of the flat plate has been described, but this is also applicable to an inspection object having a curvature such as a pipe. A sensor for an inspection object having curvature will be described.

The surface layer of the test body 30' such as a pipe was examined for two cases of progress to the circumferential direction defect and the progress to the axial direction via the parallel arrangement type double probe method, and each is shown in Fig. 13 and Fig. 14 .

As shown in FIG. 13, in the sensor configuration in which the defect progressing to the circumferential direction is checked, it is assumed that the insertion portion of the sound insulating plate, that is, the symmetry plane of the transmission signal element and the reception signal element is located in the XZ plane, such as the shape of the element Or the center sound line is projected on the YZ plane, and can be considered in the same manner as in Figs. 1 to 7 .

Further, as shown in FIG. 14, in the sensor structure for inspecting the defect progressing to the axial direction, similarly, the element shape and the center sound line are projected on the YZ plane, and the same as in FIGS. 1 to 7. The landlord. Accordingly, for example, in the case of the direct contact method, as shown in Fig. 13, the inspector can be inspected via a sensor having a shape along the surface of the pipe and an element shape of each of the above embodiments.

So far, the sensor used in the direct contact method and the shoe as an integrated parallel configuration type double probe method has been described, but It is also widely applicable to the direct contact method of the separation sensor to the shoe body, the water immersion method, or the case where the shape of the element has a curvature.

In the present embodiment described above, the element shape of the sensor used in the parallel arrangement type double probe method is optimized in consideration of the opening angle, and the decomposition ability and the oscillation intensity are maintained at the same time, and the sensitivity can be high. Defect detection improves sensor performance. That is, in the surface layer inspection by the parallel arrangement type double probe method, it is possible to realize a non-destructive examiner having high decomposition ability and high sensitivity.

Next, a fifth embodiment in which the surface layer or the shallow portion of the ultrasonic sensor according to each of the above embodiments is used will be described with reference to Figs. 15 to 25 . Here, the configuration shown in FIG. 13 is used as the ultrasonic sensor to be used.

First, an example of an inspection object using an ultrasonic sensor will be described with reference to FIG.

Fig. 15 is an explanatory diagram showing an example of an inspection target according to the inspection method according to the fifth embodiment of the present invention. Fig. 15(A) is a side view, and Fig. 15(B) is a front sectional view.

Here, as the object to which the ultrasonic sensor is applied, the pipe fusion portion 50 in the double pipe structure which is difficult to visually see is provided. The double pipe structure is composed of a cylindrical inner tube Pin arranged in a concentric shape, and an outer tube Pout. The inner tube Pin is configured by fixing two tubes via the welded portion 50. The welded portion 50 is formed in a joint portion of two cylindrical base materials. A weld boundary WB-1, WB-2 is formed between the welded portion 50 and the base material.

The sensing head SH is used for the inspection of the welded portion 50. The sensor head SH is attached to The outer peripheral side of the inner tube Pin, that is, the inner peripheral side of the outer tube Pout, is disposed between the outer tube Pout and the inner tube Pin. However, the configuration of the sensor head SH will be described later using FIG.

Here, the sensing head SH is scanned in the Y-axis direction of the scanner shown in FIG. 15(B). The scanner Y-axis is the central axis direction of the double pipe. Further, the sensor head SH is scanned in the X-axis direction of the scanner shown in Fig. 15(A). The scanner X-axis is the circumferential direction of the double pipe. Therefore, the sensing arm SA and the sensing track SR are provided. The sensing arm SA extends in the Y-axis direction of the scanner, and the sensing head SH is scanned in the Y-axis direction of the scanner. The sensing track SR extends in the X-axis direction of the scanner, and the sensing head SH is scanned in the X-axis direction of the scanner. That is, the sensing track SR is disposed in a ring shape between the inner tube Pin and the outer tube Pout. A sensing head SH is mounted on the front end of the sensing arm SA. The sensing arm SA moves to the circumferential direction of the pipe via the sensing track SR. The sensor SC scans the sensing head SH in the X-axis direction of the scanner and the Y-axis direction of the scanner using the sensing arm SA and the sensing track SR.

Here, the position of the welded portion is set after the welding construction, and the position is somewhat stretched. Therefore, it is difficult to grasp the correct position in the welded portion where the visual difficulty is difficult. For such a visually difficult pipe weld joint and a surface inspection for performing a heat-affected portion for the periphery thereof, the position of the welded portion is predicted based on the design drawing, and the cover is required to be surely covered as a necessary range for inspection. The inspection range necessary for inspection is a wide range and is set as the scanning range of the sensor. Therefore, the inspection time becomes longer. Further, in the case where it is determined that the inspection range cannot be covered, it is again required to set the scanning range, and the ‧ scan sensor is inserted, and the inspection time is still long. For such a problem, the inspection time can be shortened by accurately setting the range necessary for inspection.

It is necessary to accurately determine the surface range necessary for the inspection using the measuring means, and it is necessary to detect the welding boundary (welding line) of the welded portion of the surface of the sensor installation surface. For example, Japanese Laid-Open Patent Publication No. 59-114460 discloses an illuminator or a light-receiver or an electromagnetic characteristic detecting probe. However, if this method is used, it is necessary to have another device portion with the ultrasonic generating device, which not only increases the cost but also complicates the inspection device.

Therefore, in the present embodiment, as described below, the ultrasonic wave generating device which is the same as the ultrasonic sensor used for flaw detection is used as the fusion bonding boundary (welding) for efficiently detecting the welded portion of the surface of the sensor installation surface. Line) and check.

As a detection method using a welding portion of an ultrasonic wave, it is generally known that the welding portion is detected by a vertical flaw detection. Compared with the mother member, the welded portion is a method in which the signal intensity obtained by the reflection on the bottom surface is weakened due to the influence of the anisotropy or the diffusion. However, the shape of the welded portion is various in shape, and the shape of the measurement target does not necessarily limit the signal from the bottom surface, and it is difficult to clearly distinguish the welding boundary.

Therefore, there is a case where there is a slight difference in acoustic impedance between the base material portion and the welded portion, and in the present embodiment, the boundary wave from the base material portion and the welded portion is captured by the surface wave sensor using ultrasonic waves ( Use the reflected signal of the weld line). That is, it can be accurately performed by performing a check in combination with the surface wave sensor and the ultrasonic sensor described in the previous embodiment. A check is made to achieve a high SN ratio with high efficiency as a necessary range for inspection.

Next, an inspection method using the ultrasonic sensor according to the present embodiment will be described with reference to Fig. 16 .

Fig. 16 is an explanatory view showing a sensor arrangement used in an inspection method according to a fifth embodiment of the present invention. Fig. 16(A) is a cross-sectional view, and Fig. 16(B) is a top view.

As shown in FIG. 16(A), the inner tube Pin is provided with a welded portion 50. A sensing head SH is disposed on a peripheral surface of the inner tube Pin. The inner tube Pin has a cylindrical outer circumference, and the shoe body 20' used for the sensing head SH disposed on the outer surface of the inner tube Pin is as shown in Fig. 13, and has an inner tube Pin which is close to the cylindrical shape. The setting of the face. A sensor S is disposed on the upper body 20'.

As shown in FIG. 16(B), the sensor S is an ultrasonic sensor which is a parallel configuration type double probe method which is used for the detection signal element 10A for detecting and the signal element 10B, and a fuse line is used. The surface acoustic wave sensor 12 of the ultrasonic wave for detection is formed. The transmission signal element 10A and the reception signal element 10B are configured as described with reference to Fig. 13, and are further described in detail with reference to Fig. 11.

Here, the reason why the two types of ultrasonic sensors are used in the inspection method of the present embodiment will be described with reference to FIGS. 17 to 19.

Fig. 17 is an explanatory view showing the condition of the ultrasonic sensor using the double probe method for the inspection of the weld line of the welded portion of the double pipe. Fig. 18 is an explanatory view showing the case of the weld line of the welded portion of the double pipe, using the surface wave sensor using ultrasonic waves. Fig. 19 is an explanatory diagram of an ultrasonic signal obtained by the method shown in Fig. 18.

Fig. 17 is a view showing the case where the surface layer portion is inspected by the expansion of the sound wave using the ultrasonic sensor via the two-probe method. Fig. 17 (A) is a cross-sectional view, and Fig. 17 (B) is a top view.

In the sensor position (A) shown in Fig. 17(B), since there is an intersection point CP near the fusion boundary, the component of the wave propagating in the surface layer is in the fusion boundary WB- 1 reflection can be obtained as a signal from the fusion boundary WB-1.

On the other hand, in the sensor position (B), since the fusion boundary WB-1 is located at a position farther than the intersection point CP, the ultrasonic system which oscillates from the transmission signal element 10A is even at the fusion boundary WB-1. A number of reflections are generated, and it is also impossible to receive signals from the signal element 10B. That is, in the ultrasonic sensor according to the dual probe parallel arrangement method of the present embodiment, since the weld line can only be detected in an appropriate sensor position range, a detailed binary scan is performed for detecting the fusion boundary. It also becomes necessary.

In this regard, Fig. 18 shows the case of a signal from a reflected wave passing through a fusion boundary of a surface wave sensor using ultrasonic waves. Fig. 18(A) is a cross-sectional view, and Fig. 18(B) is a top view. In addition, Figure 19 is a signal from the actual resulting fusion boundary.

As shown in FIG. 18, a signal from the fusion boundary WB-1 is received by an ultrasonic sensor (surface wave sensor) 12 that generates a single type surface wave having no intersection. The surface wave sensor is composed of an ultrasonic sensor 12 and a shoe body 20'. The ultrasonic wave emitted from the ultrasonic sensor 12 propagates along the surface of the inner tube Pin, and the incident angle of the ultrasonic wave when the shoe body 20' is incident on the inner tube is taken as θ 1 as it is. The transverse wave refraction angle of the ultrasonic wave of the tube does not exceed the critical value. Here, when the speed of sound of the ultrasonic wave inside the shoe body 20' is taken as v1, and the sound wave speed of the ultrasonic wave of the ultrasonic wave of the inner tube Pin is v2, it is preferable to satisfy the relationship of (sin θ 1/sin90°≧v1/v2). Composition. That is, when sin θ 1 ≧ v1/v2, the ultrasonic wave emitted from the ultrasonic sensor 12 propagates along the surface of the inner tube Pin as a surface wave. In general, θ 1 is set to a high value that is less than the critical value.

The surface wave system is different from the wave propagating obliquely in the mediator. Because of the propagation on the surface, the wave system takes a three-dimensionally perpendicular propagation path for the fusion boundary WB-1. Therefore, the surface wave system has a property of being reflected at the fusion boundary WB-1 and is easily received by the same element 12 again, and a signal as shown in Fig. 19 can be obtained.

Next, an inspection method according to the present embodiment will be described with reference to Figs. 16 and 20 to 23 .

As shown in FIG. 16, the position of the incident point of the surface wave sensor 12 and the position of the incident point of the ultrasonic sensors 10A, 10B via the two-probe method shown in FIG. 13 are shown for the weld line WB-1. The sensor head SH is designed to have the same distance on the Y-axis, and the above-described two types of sensors 12, 10A, and 10B are combined in parallel with the weld line WB-1 to function as the sensor head HS. By using this sensing head SH, it is determined from the signal reflected from the surface (fusion line) of the fusion boundary obtained by the surface wave sensor 12 that the scanning is performed on the ultrasonic sensors 10A, 10B via the two-probe method. range.

Here, the width of the welded portion 50 (the width on the sensor contact surface side of the welded structure) is referred to as Yw, and the heat affected portion via the fusion is present on both sides thereof. When the width of the heat-affected zone is taken as Yt, the surface inspection is necessary The range is (2 × Yt + Yw).

The position of the sensor head SH from the position of the incident point to the weld line is -Yd (positive value of Yd) is used as the initial value (the weld line on the side of the sensor is used as the origin on the Y-axis of the scanner) At the time of checking the high SN ratio and high efficiency in the ultrasonic sensors 10A and 10B via the two-probe method, the scanning start point is set to Yd=Yc+Yt. Here, Yc means that it is also shown in FIG. 17, and is projected to the Y distance from the incident point position of the ultrasonic sensor 10A via the two-probe method to the intersection Y of the scanner. Further, from the position of -Yd, the 2 × Yt + Yw portion is scanned in the Y-axis direction of the scanner. For the inspection of the entire piping surface, the range of the same Y-axis (from -Yd to 2×Yt+Yw-Yd) is repeatedly checked along the scanner X-axis offset sensor system.

However, when the sensor is inserted, there is a restriction on the insertion of the device or the sensor. Even if the position of the incident point cannot be parallel to the weld line (the same position on the Y-axis of the scanner), it is also considered. The relationship between the positions of the incident points determines the scanning range. In addition, the same can be said in the case where only one of the surface wave sensor 12 and the ultrasonic sensors 10A and 10B via the two-probe method can be inserted.

Next, three examples of the inspection method according to the present embodiment will be described with reference to Figs. 20 to 24 .

20 to 22 are flowcharts showing details of the inspection method according to the fifth embodiment of the present invention. Fig. 23 is an explanatory diagram of a waveform obtained by the inspection method according to the fifth embodiment of the present invention. Fig. 24 is an explanatory diagram of a waveform obtained by the inspection method according to the fifth embodiment of the present invention.

First, the inspection method according to the first example will be described with reference to Fig. 20 . In the example, the width Yw of the welded portion is maintained at a position where the welded portion is known in the design drawing or the like.

In this example, it is determined whether there is a change after the manufacture of the weld line WB-1 from step S001 to step S005, and the scanning range of the sensor of the parallel configuration type double probe is determined from the position of the weld line WB-1 in step S006. From step S007 to step S012, the detailed inspection of the surface layer portion is carried out via the sensor of the parallel arrangement type double probe.

Specifically, in step S001, the input of the value according to the design value is performed as the initial position of the scanner, and in step S002, the sensing head is set at the initial position, and in step S003, the switching is made to easily detect the welding boundary. The mode of the surface wave sensor starts transmitting the received signal of the ultrasonic wave in step S004. Further, in step S005, the distance from the received signal waveform of the surface wave to the weld line WB-1 is measured.

Next, in step S006, the scanning range of the sensor is determined according to the measured value and the design value.

Next, in step S007, the sensor head is moved to the initial position of the setting, and in step S008, the sensor used is switched to the sensor of the parallel configuration type double probe, and in step S009, the mode is started via the parallel configuration type. The ultrasonic wave of the sensor of the probe transmits the received signal. In step S010, among the received signal waveforms of the sensors of the parallel configuration type double probe, for example, the maximum value of the wave height value appearing in the range of the path corresponding to the intersection is shown on the quadratic coordinates. Step S011, the XY scan sensor, in step S012, it is determined whether all scan ranges are scanned, and the scan is not finished. The process returns to step S012. The end of the measurement is the case where all the inspection ranges of the sensor scan end setting are completed.

In step S011, the X-Y scan by the sensor can obtain the result of the flaw detection as shown in FIG. 24 as a defect indicating the defect indication. Here, in the sensor of the parallel configuration type double probe, it is difficult to detect the condition of the weld line. Therefore, the weld line is additionally detected by the sensor 12 for the weld line detection, and the information of the scan range set according to the detection result can be clearly indicated by the position of the weld line WB-1, WB-2. The scope of the inspection is clearly indicated, and it can be more clearly used as the result of inspection of the inspection scope.

Next, an inspection method according to the second example will be described with reference to Fig. 21 . In this case, there is a possibility that a certain change occurs in the position of the welded portion via its own weight or the like. In the example shown in Fig. 15, the axial direction of the double pipe is shown as a horizontal direction. However, there are cases where the axial direction of the two tubes is arranged in the vertical direction. In this case, since the load on the lower portion of the welded portion is added to the welded portion, the position at which the welded portion is generated may be shifted below. That is, there is a case where the position is changed by the self-weight due to the position passing through the design value.

In this example, steps S002 to S004 and steps S007 to S012 shown in FIG. 20 are added as steps S101 and S105 to S110 as detection methods for the weld line WB-1.

First, in step S101, the position and the scanning range via the design value are input as the initial position of the scanner, and then the above-described steps S002 to S004 are executed.

Then, in step S105, a one-dimensional scan is performed on the Y-axis direction perpendicular to the weld line until the position of the signal from the fusion boundary can be received, and if the signal considered to be from the fusion boundary in step S106 is received, In step S107, a single-element scan is performed in the X-axis direction in which the position is parallel to the weld line, and the waveform of the measurement point in each X-axis direction is outputted in step S108.

Since the weld line is continuously present in the circumferential direction along the surface of the inner tube, the waveform of the weld line continuously detected is obtained by performing one-dimensional scanning in the X-axis direction. Assuming that it is not a weld line, and the fault is located on the surface of the inner tube and is recognized as a weld line when performing a primary scan in the circumferential direction, the waveform is different from the weld line because it cannot be continuously obtained.

In case, even if the signal due to the shape or the signal from the defect is mixed into the signal from the weld line, as shown in FIG. 23, the weld line is reflected from the weld boundary on the same path as long as the welded portion continues to be continuous. The signal can also be judged. In FIG. 23, only five points are illustrated as scanning points in the X direction. In order to detect the weld line in detail, the number of measurement points in the X-axis direction is increased, and when the wave height value is changed to the shade, the display is easier to determine. In addition, the single-element scanning in the X-axis direction of step S107 means that, for example, the weld line shown in FIG. 15 extends in the circumferential direction, which corresponds to the direction in which the surface wave propagates in the direction of the pipe axis, and the surface is The wave sensor performs a one-week meta-scan in the circumferential direction. When the measurement is performed while moving to the X-axis direction, the waveform obtained by measuring the measurement points in each X direction is plotted on the quadratic coordinates, and the fusion boundary can be more clearly recognized. By.

Next, in step S109, it is determined whether or not the scanning is completed, and the position of the weld line WB-1 is determined when the data processing is performed in step S110 via the waveform data obtained at the measurement points in the respective X directions. From step S111, it is the same as the step previously started from step S007 explained in Fig. 20.

Next, an inspection method according to the third example will be described with reference to Fig. 22 . In this case, it is the case where the position of the non-welding portion or the width Yw of the welded portion is detailed.

In this example, steps S002 to S004, S007 to S012 shown in FIG. 20, and steps S105 to S109 for detecting the welding line WB-1 shown in FIG. 21 are added to steps S201 and S210 to S214. .

First, in step S201, the initial position and the scanning range of the scanner are input, and then the above-described steps S002 to S004 are executed.

Further, in step S105, the surface wave sensor is scanned in a direction perpendicular to the weld line, and if a signal indicating that it is a reflection signal from the weld line WB-1 in step S106 is detected, the surface wave is irradiated in step S107. Simultaneously, the sensor scans in the X-axis direction, and the received signal waveform is output in step S108, and whether or not the welding wire WB-1 is discriminated is implemented in step S109.

If it is determined as the weld line WB-1, and then moved in the Y-axis direction in step S210, the incident point of the surface wave sensor exceeds the position of the weld line WB-1, and in step S211, the test is considered to be from the weld line WB-2. The signal of the reflected signal is scanned in the X-axis direction while the surface wave sensor is scanned in step S212, and the received signal waveform is outputted in step S213, and the determination of the weld line WB-2 is performed in step S214. The discriminating system for the weld line WB-2 is also shown in Figure 23. Show, if it is determined whether there is continuity.

Further, according to the present embodiment, since the detection of the weld line via the surface wave is performed, as shown in FIG. 24, the position of the weld line is clearly indicated by the result of performing the inspection using the ultrasonic sensor according to the present embodiment. At the time of WB-1 and WB-2, it can be more clearly used as the inspection scope and inspection results.

However, in the above description of FIGS. 15 to 24, the ultrasonic sensor for ultrasonic flaw detection mounted on the sensing head SH is used for the double probe formed by the transmission signal element 10A and the reception signal element 10B. The ultrasonic sensor of the parallel arrangement method is used as a component described in FIG. 13 or FIG. Here, the ultrasonic sensor of the configuration shown in FIG. 13 is effective for those having a circumferential opening on the surface of the cylindrical body. On the other hand, in the case where the defect has an opening in the radial direction with respect to the surface of the cylindrical body, the ultrasonic sensor shown in Fig. 14 is used. Further, the shape of the transmission signal element and the reception signal element is not limited to the hexagonal configuration shown in FIG. 11, but as shown in FIG. 8, a shape of one of the elliptical shapes may be used. Further, as the transmission signal element and the reception signal element, in addition to the configuration of a single element as shown in FIG. 11, an array-like sensor as shown in FIG. 12 can be used. In the case of an array of sensors, the angle of incidence can be easily changed. Further, here, the detection of the defect of the inner tube surface of the cylindrical shape is performed, and the shoe body having the shape of the bottom surface along the cylindrical shape surface as shown in Fig. 13 is used, but for the case of the planar shape of the subject, It is also possible to use a shoe with a flat bottom as shown in FIG.

However, the ultrasonic sensor used in the dual probe parallel arrangement method is effective for detecting flaws on the surface of the object or near the surface. With For example, in the case where the thickness of the inner tube Pin of the subject is not so thick, only the ultrasonic sensor used in the dual probe parallel arrangement method can be used. However, in the case where the inner tube thickness is thick, for example, two types of ultrasonic sensors for flaw detection are exchanged for defect detection. For example, using the ultrasonic sensor used in the two-probe parallel configuration method shown in FIG. 13, after detecting the defect of the surface layer, it is exchanged into a component that transmits and receives a signal by a single probe that can detect a deeper portion. The flaw is detected on the back side (inner peripheral surface) of the deep or inner tube. At this time, the sensor head SH shown in FIG. 16 is provided with the element 12 for the weld line detection, and since the position of the weld line has been detected via the element 12, the sensor head SH shown in FIG. 16 is detached. Instead, a deep sensing test can be performed by installing a sensor that transmits and receives signal components for deep flaw detection and the shoe.

Next, the configuration of the inspection apparatus for carrying out the inspection method according to the present embodiment will be described with reference to Fig. 25 .

Fig. 25 is a block diagram showing the configuration of an inspection apparatus for carrying out an inspection method according to a fifth embodiment of the present invention.

As the ultrasonic sensor for flaw detection, the ultrasonic sensors 10A and 10B having the parallel arrangement type double probes and the sensor heads for the surface wave sensor 12 are used as the sensors for detecting the welded portions.

The position of the sensing head SH is scanned via the scanner SC. The scanner SC is controlled via the drive control device 110 via an instruction from the control device 100. The parallel configuration type dual probe ultrasonic sensors 10A, 10B, and the surface wave sensor 12 are connected to the flaw detecting device 130 by the sensor selecting means 120. The sensor selection device 120 is via a control device The instructions of 100 will be connected to the sensors of the flaw detection device 130, switching the parallel configuration type dual probe ultrasonic sensors 10A, 10B, and the surface wave sensor 12. When the surface wave sensor 12 is selected via the sensor selecting means 120, the surface wave sensor 12 transmits a signal as a surface wave to the subject via a signal transmitted from the flaw detecting device 130 ( On the surface of the inner tube Pin) of Fig. 16, the reflected wave from the weld line of the object is detected via the surface wave sensor 12. The detected waveform signal is stored in the waveform memory 140A. Further, when the ultrasonic sensor 10A, 10B of the parallel configuration type double probe is selected via the sensor selecting means 120, the signal component 10A transmits the signal to the ultrasonic signal via the signal transmitted from the flaw detecting device 130. In the subject, the reflected wave from the subject is detected via the reception signal element 10B. The detected waveform signal is stored in the waveform memory 140B.

The data processing device 150 determines the position of the weld line based on the waveform data stored in the waveform memory 140A, and sets the scan range. According to the setting range, the ultrasonic sensors 10A and 10B of the parallel configuration type double probe are scanned by the control device 100, and the result is obtained. According to the waveform data stored in the waveform memory 140B, the flaw detection is welded. Defects of the Ministry, etc. These results are displayed on the display setting means 160.

However, in the case where the volume inspection is necessary, as the ultrasonic sensor for flaw detection, the inspection method by the means of the present invention can be applied by using a sensor for inspecting the back surface of the contact surface of the other sensor.

10‧‧‧ Ultrasonic Sensor

12‧‧‧Ultrasonic surface wave sensor

20‧‧‧ Boots

30‧‧‧Test body

40‧‧‧Music Board

100‧‧‧Control device

110‧‧‧Drive control unit

120‧‧‧Sensor selection device

130‧‧‧Detection device

140A, 140B‧‧‧ waveform memory

150‧‧‧ data processing device

160‧‧‧Display setting device

Fig. 1 is a configuration diagram of an ultrasonic sensor which is subjected to oblique angle detection by a single probe method.

Figure 2 is an explanatory diagram of the directivity and half-height width of the ultrasonic sensor.

Fig. 3 is an explanatory diagram showing the influence of the opening angle of the parallel arrangement type double probe method of the ultrasonic sensor according to the first embodiment of the present invention.

Fig. 4 is an explanatory view showing the influence of the opening angle of the parallel arrangement type double probe method of the ultrasonic sensor according to the first embodiment of the present invention.

Fig. 5 is an explanatory diagram of a directivity angle and a half-height width of the parallel configuration type double probe method of the ultrasonic sensor according to the first embodiment of the present invention.

Fig. 6 is an explanatory view showing a directivity angle of a parallel arrangement type double probe method of the ultrasonic sensor according to the first embodiment of the present invention.

Fig. 7 is an explanatory view showing an opening angle of a parallel arrangement type double probe method of the ultrasonic sensor according to the first embodiment of the present invention.

Fig. 8 is an explanatory view showing the shape of another element of the ultrasonic sensor used in the parallel arrangement type double probe method according to the second embodiment of the present invention.

Fig. 9 is an explanatory view showing the shape of another element of the ultrasonic sensor used in the parallel arrangement type double probe method according to the second embodiment of the present invention.

Fig. 10 is an explanatory view showing the shape of another element of the ultrasonic sensor used in the parallel arrangement type double probe method according to the second embodiment of the present invention.

Fig. 11 is an explanatory view showing the arrangement of an ultrasonic sensor used in the parallel arrangement type double probe method according to the second embodiment of the present invention.

Fig. 12 is an explanatory view showing the shape of another element of the ultrasonic sensor used in the parallel arrangement type double probe method according to the third embodiment of the present invention.

Figure 13 is a parallel configuration according to a fourth embodiment of the present invention. An illustration of a supersonic sensor of the double probe method.

Fig. 14 is an explanatory diagram of an ultrasonic sensor used in the parallel configuration type double probe method according to the fourth embodiment of the present invention.

Fig. 15 is an explanatory diagram showing an example of an inspection target according to the inspection method according to the fifth embodiment of the present invention.

Fig. 16 is an explanatory view showing a sensor arrangement used in an inspection method according to a fifth embodiment of the present invention.

Fig. 17 is an explanatory view showing the condition of the ultrasonic sensor using the double probe method for the inspection of the weld line of the welded portion of the double pipe.

Fig. 18 is an explanatory view showing the case of the weld line of the welded portion of the double pipe, using the surface wave sensor using ultrasonic waves.

Fig. 19 is an explanatory diagram of an ultrasonic signal obtained by the method shown in Fig. 18.

Fig. 20 is a flowchart showing the details of the inspection method according to the fifth embodiment of the present invention.

Fig. 21 is a flow chart showing the details of the inspection method according to the fifth embodiment of the present invention.

Fig. 22 is a flowchart showing the details of the inspection method according to the fifth embodiment of the present invention.

Fig. 23 is an explanatory diagram of a waveform obtained by the inspection method according to the fifth embodiment of the present invention.

Fig. 24 is an explanatory diagram of a waveform obtained by the inspection method according to the fifth embodiment of the present invention.

Figure 25 is a view showing the fifth embodiment of the present invention. A block diagram of the composition of the inspection apparatus of the inspection method.

10A‧‧‧Transmission signal components

Claims (10)

An ultrasonic sensor having an element for transmitting a plurality of signals, and a holding portion for holding the ultrasonic wave in order to propagate the ultrasonic wave in an oblique direction, and a sound insulating material, a transmission of the divided ultrasonic wave, and receiving The ultrasonic sensor of the signal is characterized in that, as the shape of the shoe body of the holding portion, the surface of the shoe body holding the element is two or more, and the inclination of the surface of the shoe body is mirror-symmetrical to each other as the shoe body The arrangement of the aforementioned elements on the face, the elements are symmetrically arranged non-parallel to the mirror surface, and as the shape of the element, the component positioned near the center of the shoe body is adjusted to change the sensor opening. The scope of the person. The ultrasonic sensor according to claim 1, wherein the element is adjusted for both the range of the adjustment and the range of the point symmetry relationship with respect to the center of the element. The ultrasonic sensor according to claim 2, wherein the element is further adjusted for the center line, and the range of the adjustment of the plural number and the range of the line symmetry are adjusted. The ultrasonic sensor according to claim 1, wherein the plurality of components are arrayed along the center line and are array sensors. An inspection method characterized by having: using a flaw detection The first step of inputting the position of the sensing head mounted on the scanner by the sensing head of the ultrasonic wave sensor and the surface wave sensor for the welding portion, and the detecting of the welding portion among the sensing heads The second step of the surface wave sensor, wherein the third step of transmitting and receiving the ultrasonic wave is performed at the position input in the first step based on the surface wave sensor selected in the second step, and The fourth step of measuring the distance to the weld line based on the signal of the received signal obtained through the third step, and determining the aforementioned sensing based on the measured value of the distance to the weld line obtained through the fourth step The fifth step of the initial position of the head and the scanning range includes: a sixth step of selecting the ultrasonic sensor for flaw detection; and an initial position and a scanning range of the sensing head determined through the fifth step. The sensor head performs scanning, and the seventh step of the inspection is performed via the ultrasonic sensor for flaw detection. The inspection method according to the fifth aspect of the invention, wherein in the first step, the position of the sensor head of the scanner is input by the design value of the structure to be inspected. The inspection method according to claim 5, wherein in the first step, the position of the sensor head attached to the scanner and the scanning range are input instead of the design value of the structure to be inspected, instead of the 4 steps: by performing a single-element scan on the surface wave sensor and the weld line When the direction of the vertical crossing is made, the step 4A of detecting the weld line, and the step of parallelizing the surface wave sensor with the aforementioned weld line by performing a single element scan, discriminate the fourth step of the weld line, In the fifth step, the initial position of the sensing head and the scanning range are determined based on the measured value of the distance to the weld line obtained through the fourth step AA. The inspection method according to claim 5, wherein in the first step, the position of the sensing head attached to the scanner is input and the scanning range is included, and instead of the fourth step, the primary scanning is performed. When the surface wave sensor is perpendicularly intersected with the weld line, the step 4A of detecting the weld line is performed, and the direction of the surface wave sensor is parallel to the fuse line by performing a single element scan. When the step 4B of the weld line is determined, and the measured value of the distance to the weld line located at the initial value of the sensor is moved, the sensor head is moved, and the surface wave is sensed by performing a single element scan. When the detector and the weld line are perpendicularly intersecting, the fourth step of detecting the weld line on the deep side is detected, and when the surface wave sensor is parallel to the weld line by performing a single element scan, the discrimination is made. In the fourth step of the weld line on the deep side, in the fifth step, the measured value of the distance from the weld line located on the deep side obtained through the fourth step DD is measured. Basis for determining the initial position of the sensing head's scanning range. In the inspection method according to the fifth aspect of the invention, the ultrasonic sensor according to the first aspect of the invention is used as the ultrasonic sensor for flaw detection. An inspection apparatus comprising: an ultrasonic sensor for flaw detection; a sensing head having a surface wave sensor as an ultrasonic sensor for detecting a welded portion; and a second dimension of the sensing head a scanning scanner, and a driving control device for controlling a 2-dimensional scan of the sensing head via the scanner, and selecting the ultrasonic sensor for detecting the ultrasonic wave and switching the ultrasonic sensor for detecting the welding portion And a device for detecting a defect via the ultrasonic sensor for flaw detection, and detecting the flaw detecting device of the welded portion via the ultrasonic sensor for detecting the welded portion, and controlling the switching device and the flaw detecting device a control device, and a data processing device for processing waveform data obtained by each of the sensors of the sensing head and the position information of the sensing head, and a display device for displaying the waveform and the image and image processing of the data processing .