TW201314261A - Method for fabricating the electrowetting display - Google Patents

Abstract

The invention provides a method for fabricating electrowetting display. The method includes: providing a first substrate and a second substrate oppositely disposed; partially adhering the first substrate and the second substrate to form the adhered substrates, a first opening and a second opening oppositely disposed; filling a non-polar liquid from the first opening into the adhered substrates; dipping the adhered substrates into a polar liquid until it entirely dipped into the polar liquid; removing the adhered substrates from the polar liquid; and entirely adhering the first substrate and the second substrate.

Description

Electrowetting display method

This invention relates to displays, and more particularly to a method of making an electrowetting display.

With the rapid development of optoelectronic technology, various displays have also prospered. The electro-wetting display (EWD) is highly valued due to its high contrast ratio, high response time, low power consumption and high resolution.

The electrowetting display was first developed by Liquavista, which includes a non-polar liquid, a polar aqueous solution, a hydrophobic layer and a hydrophobic retaining wall (rib) in which a non-polar liquid is dropped onto the hydrophobic layer and the non-polar liquid is trapped by a hydrophobic retaining wall. Separated, in addition to a polar aqueous solution above the non-polar liquid. The principle of operation is as follows: When no voltage is applied to the display, the non-polar liquid will lie on top of the hydrophobic layer and thus will exhibit the color of the oil droplets. When a voltage is applied to the display, the charge generated on the hydrophobic layer attracts the aqueous solution, thus causing the non-polar liquid to be squeezed to the corner, at which point the color of the underlying substrate of the non-polar liquid is present.

Since the filling aqueous solution needs to be completed in water, in the method of the prior electrowetting display, the non-polar liquid is filled before the atmosphere, and then the upper and lower substrates are placed in water for assembly, and the aqueous solution is filled into the upper and lower substrates. However, it is difficult to accurately align the water in the assembly, and it is not easy to mass-produce in large areas.

Therefore, it is urgent to propose a new method for producing an electrowetting display.

The invention provides a method for manufacturing an electrowetting display, comprising the steps of: providing a first substrate and a second substrate, wherein the first substrate and the second substrate are opposite to each other, and the first substrate comprises a plurality of a hydrophilic retaining wall; the first substrate and the second substrate are partially bonded by a glue to form a bonded pair of substrates and a first opening and a second opening are left, wherein the first opening An opening is disposed opposite to the second opening; a non-polar liquid is filled between the first substrate and the second substrate from the first opening; and the bonded substrates are immersed in a polar liquid until after bonding The pair of substrates are completely immersed in the polar liquid such that the non-polar liquid is formed on the first substrate and between the first hydrophilic retaining walls; after the bonding is removed from the polar liquid The pair of substrates; and fully bonding the first substrate and the second substrate.

The invention further provides a method for manufacturing an electrowetting display, comprising the steps of: providing a first substrate and a second substrate, wherein the first substrate is opposite to the second substrate, and the first substrate is Included in the plurality of first hydrophilic retaining walls; supporting the first substrate and the second substrate with a supporting structure to form a temporary assembly of the pair of substrates and leaving a first opening and a a second opening, wherein the first opening is opposite to the second opening; filling a non-polar liquid from the first opening between the first substrate and the second substrate; dipping the temporarily assembled pair of substrates into one In the polar liquid, until the temporarily assembled pair of substrates are completely immersed in the polar liquid, so that the non-polar liquid is formed on the first substrate and between the hydrophilic retaining walls; the first substrate and the first substrate Separating the two substrates; providing a third substrate, and bonding the first substrate and the third substrate to form the bonded pair of substrates; and removing the bonded first substrate from the polar liquid A third substrate; and completely bonding the first substrate and the third substrate.

In order to make the above and other features of the present invention more comprehensible, the preferred embodiments are described below, and are described in detail with reference to the accompanying drawings:

1A is a plan view showing an unfilled liquid of the electrowetting display 10 according to the first embodiment of the present invention, and FIG. 1B is a cross-sectional view taken along line AA' in FIG. 1A, and FIG. 1C is a cross-sectional view taken along line 1A. A section of the BB' line.

Please refer to FIG. 1A , which is a top view of the first substrate 100 and the second substrate 200 partially bonded by the adhesive material 150 . It should be noted that, for simplicity of description, only the relative positions of the first substrate 100 and the glue 150 are displayed, and the position of the second substrate 200 is shown in FIG. 1B or FIG. 1C, wherein the glue 150 is used to bond the first substrate. 100 and the second substrate 200, and a plurality of frame lines in the figure represent pixels 50.

Referring to FIG. 1B , the electrowetting display 10 includes a first substrate 100 and a second substrate 200 . The first substrate 100 is disposed opposite to the second substrate 200 and includes a plurality of first hydrophilic barriers 110 on the first substrate 100 . . The glue 150 is used to bond the first substrate 100 and the second substrate 200.

The first substrate 100 and the second substrate 200 may be glass, a polymer substrate, or a metal. In an embodiment, the first substrate 100 and the second substrate 200 are both transparent substrates. In another embodiment, one of the two substrates is a transparent substrate, and the other is a reflective substrate such as a metal substrate. In still another embodiment, the first substrate 100 or the second substrate is a flexible flexible substrate, such as polyethylene terephthalate (PET), polycarbonate (polycarbonate, PC). ), polyethylene naphthalate (PEN), polyethersulphone (PES) or other polymer substrates.

The material of the glue 150 includes a light hardening rubber, a pressure hardening rubber or a water hardening rubber. It should be noted that since the first substrate 100 and the second substrate 200 are bonded in an atmosphere, the adhesive 150 that can bond the two first substrates 100 and the second substrate 200 is in the protection scope of the present invention. Inside.

The first hydrophilic retaining wall 110 acts to separate the non-polar liquid 350 to be formed subsequently (see FIG. 2A) to define the range of pixels 50, so the arrangement of the retaining walls 110 corresponds to the pixel 50 position. The material of the first hydrophilic retaining wall 110 comprises a positive photoresist, a negative photoresist, a photosetting resin or a thermosetting resin, and has a thickness of about 1 to 50 μm, preferably about 5 to 30. Mm.

A method of forming the first hydrophilic retaining wall 110 is, for example, a lithography process, a mold forming, a reverse printing, or a stencil printing.

Referring to FIG. 1C, the glue 150 only partially bonds the first substrate 100 and the second substrate 200, thus leaving the first opening 161 and the second opening 162 disposed opposite each other.

In addition, the first electrode 102 and the first hydrophobic dielectric layer 104 are sequentially formed on the first substrate 100, that is, the first electrode 102 is formed between the first substrate 100 and the hydrophobic dielectric layer 104. The first hydrophobic dielectric layer 104 is formed between the first electrode 102 and the first hydrophilic barrier 110.

The first electrode 102 includes a metal or an oxide such as aluminum, silver, indium tin oxide (ITO), molybdenum tungsten (MoW) or indium zinc oxide (IZO).

The first hydrophobic dielectric layer 104 is generally composed of a dielectric layer and a hydrophobic layer, and the material of the dielectric layer includes tantalum nitride (SiNx), yttrium oxide (SiOx), aluminum oxide (Al ₂ O ₃ ), or other dielectric layers. A polymer layer having an electric coefficient greater than 2. The hydrophobic layer includes a fluorine-containing polymer or a self-polymerizing decane molecule. The fluorine-containing polymer is, for example, Teflon AF-1600 (Dupont), a fluorine-containing polymer (trade name: ASAHI Glass CO., LTD) under the trade name "Cytop", or a fluorine-containing polymer (Cytonix) under the trade name of "Cytonix" (company: Cytonix corporation). The self-polymerizing decane molecules include octadecyl trichlorosilane (OTS), 3,3,3 trifluoro-propylmethyl dichlorosilane (PMDCS), Tridecafluoro-1,1,2,2-tetrahydrooctyl trichlorosilane (FOTS), heptafluoro-, 1,1,2,2- Heptadecafluoro-1,1,2,2-tetrahydrodecyl trichlorosilane (FDTS), dodecyl trichlorosilane (DDTCS), dimethyldichlorosilane (DDMS) , vinylundecyl tirchlorosilane (V11TCS) or aminopropyl trimethoxysilane (APTMS). The first hydrophobic dielectric layer 104 can be a dielectric/insulating layer having a hydrophobic surface, or a hydrophobic layer having a dielectric/insulation, or a composite layer formed by stacking a hydrophobic layer and a dielectric/insulating layer.

Furthermore, an electrode layer 201, such as indium tin oxide (ITO), is included on the second substrate 200. The electrode layer 201 may have a hydrophilic surface to assist the subsequent polar liquid 360 (see FIG. 2B). The formation of the electrode layer 201 is not limited to the electrode layer having a hydrophilic surface.

Next, please refer to FIG. 2A-2E, which is used to show the manufacturing method of the first embodiment of the present invention. In FIG. 2A, the non-polar liquid 350 is filled from the first opening 161 by using the syringe 35 to make the non-polarity. The liquid 350 is formed between the first substrate 100 and the second substrate 200. Since the spacing between the two substrates 100, 200 is greater than about 20 μm, the non-polar liquid 350 may remain between the two substrates 100, 200 due to surface tension. The non-polar liquid 350 includes a silicon oil, a dye or a pigment.

In FIG. 2B, the bonded pair of substrates 100, 200 are immersed in a polar liquid 360, and the arrow 400 represents the running direction of the pair of substrates 100, 200, wherein the second opening 162 first contacts the polar liquid 360. To aid in the immersion of the substrates 100, 200, a layer of non-polar liquid 350 may be formed on the surface of the polar liquid 360. In another embodiment, the non-polar liquid 350 may not be formed first on the surface of the polar liquid 360.

The polar liquid 360 includes water, an aqueous solution of potassium chloride (KCl) or an aqueous solution of sodium chloride (NaCl). In addition, a surfactant may also be added to reduce the surface tension of the polar liquid 360 or to add an antifreeze such as ethylene glycol to lower the melting point of the polar solution.

In FIG. 2C, the first substrate 100 and the second substrate 200 are gradually immersed in the polar liquid 360 in the direction of the arrow 400.

In FIG. 2D , the first substrate 100 and the second substrate 200 are completely immersed in the polar liquid 360 such that the non-polar liquid 350 is formed on the first substrate 100 and located between the first hydrophilic barriers 110 . In other words, since the first hydrophobic dielectric layer 104 is a hydrophobic material, the non-polar liquid 350 is formed thereon.

In FIG. 2E, the bonded pair of substrates 100, 200 are removed from the polar liquid 360, and then the first substrate 100 and the second substrate 200 are completely bonded by the adhesive 150.

The second F-2G diagram shows the state of the non-polar liquid 350 after the voltage is applied by the electrowetting display 10, that is, when the first electrode 102 is connected to a voltage source (not shown), wherein the 2G map is along the 2F map. A section of the CC' line. As can be seen from the figure, the contracted non-polar liquid 350a shrinks to the corner 50a of the pixel 50 (Fig. 2F), that is, the corner of the first hydrophilic retaining wall 110 (Fig. 2G).

It should be noted that in the prior art, the first substrate and the second substrate are assembled in a polar liquid (for example, water), and therefore, it is difficult to precisely align and it is difficult to mass-produce in a large area. In the first embodiment of the present invention, the first substrate 100 and the second substrate 200 are bonded by the adhesive 150 before the liquid is filled. Therefore, the present invention is in an atmospheric environment as compared with the prior art. By assembling the two substrates, the two substrates can be precisely aligned to facilitate a large-area process. Further, the glue 150 is hardened before being immersed in the liquid, and therefore, the glue 150 does not fail due to immersion in the polar liquid 360.

3A is a plan view of the electrowetting display 20 according to the second embodiment of the present invention, and FIG. 3B is a cross-sectional view taken along line DD' in FIG. 3A, and FIG. 3C is a cross-sectional view taken along line 3A in FIG. 3A. A section of the EE' line. It is to be noted that in the second embodiment, the same reference numerals as in the first embodiment denote the same elements. The first substrate 100 in the first embodiment has an electrowetting display structure thereon, so the embodiment belongs to a monochromatic "single layer" structure, and the first substrate 100 and the second substrate 200 of the second embodiment have both The structure is electrowetting, so this embodiment is a monochrome "double layer" structure.

Referring to FIG. 3B, the electrowetting display 20 includes a first substrate 100 and a second substrate 200. The first substrate 100 is disposed opposite to the second substrate 200. The first substrate 100 includes a plurality of first hydrophilic barriers 110 thereon. A plurality of second hydrophilic retaining walls 210 are included on the second substrate 200. The glue 150 is used to bond the first substrate 100 and the second substrate 200.

The material of the second hydrophilic retaining wall 210 comprises a positive photoresist, a negative photoresist, a photosetting resin or a thermosetting resin, and has a thickness of about 1 to 50 μm, preferably about 5 to 30. Mm.

A method of forming the second hydrophilic retaining wall 210 is, for example, a lithography process, a mold forming, a reverse printing, or a stencil printing.

In addition, the second electrode 202 and the second hydrophobic dielectric layer 204 are sequentially formed on the second substrate 200, that is, the second electrode 202 is formed between the first substrate 100 and the second hydrophobic dielectric layer 204. The second hydrophobic dielectric layer 204 is formed between the second electrode 202 and the second hydrophilic retaining wall 210.

The second electrode 202 includes a metal or an oxide such as aluminum, silver, indium tin oxide (ITO), molybdenum tungsten (MoW) or indium zinc oxide (IZO).

The second hydrophobic dielectric layer 204 is generally composed of a dielectric layer and a hydrophobic layer, and the material of the dielectric layer includes tantalum nitride (SiNx), yttrium oxide (SiOx), aluminum oxide (Al ₂ O ₃ ), or other dielectric layers. A polymer layer having an electric coefficient greater than 2. The hydrophobic layer includes a fluorine-containing polymer or a self-polymerizing decane molecule. The fluorine-containing polymer is, for example, Teflon AF-1600 (Dupont), a fluorine-containing polymer (trade name: ASAHI Glass CO., LTD) under the trade name "Cytop", or a fluorine-containing polymer (Cytonix) under the trade name of "Cytonix" (company: Cytonix corporation). The self-polymerizing decane molecules include octadecyl trichlorosilane (OTS), 3,3,3 trifluoro-propylmethyl dichlorosilane (PMDCS), Tridecafluoro-1,1,2,2-tetrahydrooctyl trichlorosilane (FOTS), heptafluoro-, 1,1,2,2- Heptadecafluoro-1,1,2,2-tetrahydrodecyl trichlorosilane (FDTS), dodecyl trichlorosilane (DDTCS), dimethyldichlorosilane (DDMS) , vinylundecyl tirchlorosilane (V11TCS) or aminopropyl trimethoxysilane (APTMS). The second hydrophobic dielectric layer 204 can be a dielectric/insulating layer having a hydrophobic surface, or a hydrophobic layer having a dielectric/insulating layer, or a composite layer formed by stacking a hydrophobic layer and a dielectric/insulating layer.

Referring to FIG. 3C, the glue 150 only partially bonds the first substrate 100 and the second substrate 200, thus leaving the first opening 161 and the second opening 162 disposed opposite each other.

Next, please refer to FIG. 4A-4E, which is used to show the manufacturing method of the second embodiment of the present invention. In FIG. 4A, the non-polar liquid 350 is filled from the first opening 161 by using the syringe 35 to make the non-polarity. The liquid 350 is formed between the first substrate 100 and the second substrate 200. Since the spacing between the first substrate 100 and the second substrate 200 is greater than about 50 μm, the non-polar liquid 350 may remain between the first substrate 100 and the second substrate 200 due to surface tension.

In FIG. 4B, the bonded pair of substrates 100, 200 are immersed in a polar liquid 360, and the arrow 400 represents the running direction of the pair of substrates 100, 200, wherein the second opening 162 first contacts the polar liquid 360.

In FIG. 4C, the substrate 100, 200 is gradually immersed in the polar liquid 360 in the direction of the arrow 400.

In FIG. 4D, the substrate 100, 200 is completely immersed in the polar liquid 360 such that the non-polar liquid 350 is formed over the first substrate 100 and between the first hydrophilic barriers 110, and the non-polar liquid 350 is formed in the second Above the substrate 200 and between the second hydrophilic retaining walls 210.

In FIG. 4E, the bonded pair of substrates 100, 200 are removed from the polar liquid 360. Thereafter, a common electrode 130 is formed between the first substrate 100 and the second substrate 200, that is, the common electrode 130 is connected to the polar liquid 360. Finally, the first substrate 100 and the second substrate 200 are completely bonded by the adhesive 150.

In addition, please refer to FIG. 5A-5D of the present invention, which shows a top view and a cross-sectional view of the electrowetting display 30 according to the third embodiment of the present invention. Fig. 5B is a cross-sectional view taken along line FF' in Fig. 5A, and Fig. 5C is a cross-sectional view taken along line GG' in Fig. 5D. The manufacturing method of the third embodiment is the same as that of the second embodiment, and details are not described herein again.

It should be noted that in the third embodiment, the same reference numerals as in the second embodiment represent the same elements, and the third embodiment also belongs to a monochrome "double layer" structure. In the second embodiment, the position of the first electrode 102 corresponds to the position of the second electrode 202, and the position of the first hydrophilic retaining wall 110 corresponds to the position of the second hydrophilic retaining wall 210. However, in the third embodiment, the position of the first electrode 102 and the position of the second electrode 202 are separated by a distance (both misaligned), and similarly, the first hydrophilic retaining wall 110 and the second hydrophilic retaining wall 210 is also misplaced.

The position of the non-polar liquid 350 before the voltage is applied is shown in Figures 5A-5B, and the position of the non-polar liquid 350 after the voltage is applied is shown in Figure 5C-5D. Before and after the application of the voltage, it can be observed that after the application of the voltage, since the position of the first hydrophilic retaining wall 110 and the second hydrophilic retaining wall 210 are misaligned, the lower contracted non-polar liquid 350a contracts closer to the first hydrophilic right side. The position of the retaining wall 110, while the upper contracted non-polar liquid 350b contracts closer to the position of the second hydrophilic retaining wall 210 on the left side, and therefore, the positions of the contracted non-polar liquids 350a and 350b correspond to each other, as shown in FIG. 5C It can be observed in the top view that the two non-polar liquids 350a, 350b overlap each other, and therefore, the design of the third embodiment can further improve the aspect ratio of the electrowetting display 30.

Furthermore, please refer to FIG. 6A-6D of the present invention, which shows the manufacturing method of the electrowetting display 40 according to the fourth embodiment of the present invention, and the same reference numerals as in the second embodiment denote the same symbols.

In FIG. 6A, the first substrate 100 and the second substrate 200 are first supported by a support structure (not shown) to form a temporary assembly of the pair of substrates 100, 200, and the first opening 161 is left. The second opening 162. Next, the non-polar liquid 350 is filled from the first opening 161 using the syringe 35, and the non-polar liquid 350 is formed between the first substrate 100 and the second substrate 200.

The position of the support structure is the same as that of the glue 150 in FIG. 1A, and the material thereof includes a positive photoresist, a negative photoresist, a photosetting resin or a thermosetting resin, and the thickness thereof is about 10 to 200. Μm, preferably about 20 to 100 μm.

Thereafter, referring to FIG. 6B, the temporarily assembled pair of substrates 100, 200 are immersed in a polar liquid 360, and the second opening 162 first contacts the polar liquid 360 until the temporarily assembled pair of substrates 100, 200 are completely immersed in the polar liquid 360, The non-polar liquid 350 is formed on the first substrate 100 and located between the first hydrophilic retaining walls 110, and the non-polar liquid 350 is formed on the second substrate 200 and located in the second hydrophilic retaining walls. Between 210.

After that, referring to FIG. 6C, the first substrate 100 is separated from the second substrate 200. Since the first substrate 100 and the second substrate 200 are fixed only by using the supporting structure, the second step can be easily removed in this step. Substrate 200. Next, a third substrate 300 is provided, and the first substrate 100 and the third substrate 300 are bonded to form the bonded first substrate 100 and third substrate 300.

The third substrate 300 may be glass, a polymer substrate, or a metal.

It should be noted that the third substrate 300 provided in this step may be sequentially formed with the third electrode 302 and the third hydrophobic dielectric on the third substrate 300 as described in the second embodiment or the third embodiment. The layer 304 and the third hydrophilic retaining wall 310 are then filled with the non-polar liquid 350 between the third hydrophilic retaining walls 310, and the third substrate 300 is immersed in the polar liquid 360 to be assembled and bonded with the first substrate 100. .

The material of the third hydrophilic retaining wall 310 includes a positive photoresist, a negative photoresist, a photosetting resin or a thermosetting resin, and has a thickness of about 1 to 50 μm, preferably about 5 to 30. Mm.

A method of forming the third hydrophilic retaining wall 310 is, for example, a lithography process, a mold forming, a reverse printing, or a stencil printing.

The third electrode 302 includes a metal or an oxide such as aluminum, silver, indium tin oxide (ITO), molybdenum tungsten (MoW) or indium zinc oxide (IZO).

The third hydrophobic dielectric layer 304 is generally composed of a dielectric layer and a hydrophobic layer, and the material of the dielectric layer includes tantalum nitride (SiNx), yttrium oxide (SiOx), aluminum oxide (Al ₂ O ₃ ), or other dielectric layers. A polymer layer having an electric coefficient greater than 2. The hydrophobic layer includes a fluorine-containing polymer or a self-polymerizing decane molecule. The fluorine-containing polymer is, for example, Teflon AF-1600 (Dupont), a fluorine-containing polymer (trade name: ASAHI Glass CO., LTD) under the trade name "Cytop", or a fluorine-containing polymer (Cytonix) under the trade name of "Cytonix" (company: Cytonix corporation). The self-polymerizing decane molecules include octadecyl trichlorosilane (OTS), 3,3,3 trifluoro-propylmethyl dichlorosilane (PMDCS), Tridecafluoro-1,1,2,2-tetrahydrooctyl trichlorosilane (FOTS), heptafluoro-, 1,1,2,2- Heptadecafluoro-1,1,2,2-tetrahydrodecyl trichlorosilane (FDTS), dodecyl trichlorosilane (DDTCS), dimethyldichlorosilane (DDMS) , vinylundecyl tirchlorosilane (V11TCS) or aminopropyl trimethoxysilane (APTMS). The second hydrophobic dielectric layer 204 can be a dielectric/insulating layer having a hydrophobic surface, or a hydrophobic layer having a dielectric/insulating layer, or a composite layer formed by stacking a hydrophobic layer and a dielectric/insulating layer.

However, in another embodiment, the third substrate 300 is not limited to the above embodiment, and the third substrate 300 may be as described in the first embodiment. The third substrate 300 has only one electrode layer thereon, and the electrode layer The hydrophilic surface may be provided (but the electrode layer is not limited to the electrode layer having a hydrophilic surface), and the first substrate 100 and the third substrate 300 may be completely bonded in the polar liquid 360.

Referring to FIG. 6D, the bonded first substrate 100 and third substrate 300 are taken out from the polar liquid 360. Thereafter, a common electrode 130 is formed between the first substrate 100 and the third substrate 300, that is, a common electrode 130 is connected to the polar liquid 360, and the first substrate is completely bonded with the adhesive 150. 100 and the third substrate 300. However, a common electrode 130 may be formed between the first substrate 100 and the third substrate 300 in the polar liquid 360, and the first substrate 100 and the third substrate 300 may be completely bonded with the adhesive 150.

In the fourth embodiment, the non-polar liquid 350 and the polar liquid 360 are sequentially filled by the assistance of the second substrate 200, and then the second substrate 200 is removed, and then the third substrate 300 is bonded to the first substrate. 100. The fourth embodiment is characterized in that when the non-polar liquid 350 above the second substrate 200 remains in an incorrect position, the non-polar liquid can be solved by replacing another new substrate (such as the third substrate 300). The problem of 350, therefore, by the process design of the fourth embodiment, the incorrect substrate can be removed and replaced into usable substrates during the assembly process, without having to start a new process again, thereby effectively saving the process. time.

In addition, please refer to the 7A-7C drawings of the present invention, which are top views of the position of the glue material 150 (or the support structure in the fourth embodiment) of the present invention, wherein the glue materials 150a, 15b, 150c are located at different positions. And the first opening 161 and the second opening 162 correspond to each other. However, the position of the rubber material and the two openings is not limited thereto, and those skilled in the art can also design the rubber material 150, the first opening 161 and the second opening 162 at different relative positions according to the requirements of the process.

In summary, the method of manufacturing the electrowetting display of the present invention has the following features:

(1) The first substrate 100 and the second substrate 200 are assembled first in an atmospheric environment, and the two substrates 100, 200 can be precisely aligned to facilitate a large-area process.

(2) The glue 150 is hardened before being immersed in the polar liquid 350, and therefore, the glue 150 does not fail due to immersion in the polar liquid 360.

(3) An electrowetting display with a monochrome "single layer" or a monochrome "double layer" can be obtained.

(4) With the design of the fourth embodiment, the incorrect substrate can be removed and replaced with an usable substrate during the assembly process, thereby effectively saving process time.

While the invention has been described above in terms of several preferred embodiments, it is not intended to limit the scope of the present invention, and any one of ordinary skill in the art can make any changes without departing from the spirit and scope of the invention. And the scope of the present invention is defined by the scope of the appended claims.

10, 20, 30, 40. . . Electrowetting display

50. . . Pixel

50a. . . Corner of picture

35. . . Syringe

100. . . First substrate

102. . . First electrode

104. . . First hydrophobic dielectric layer

110. . . First hydrophilic retaining wall

130. . . Common electrode

150, 150a, 150b, 150c. . . Plastic material

161. . . First opening

162. . . Second opening

200. . . Second substrate

201. . . Electrode layer

202. . . Second electrode

204. . . Second hydrophobic dielectric layer

210. . . Second hydrophilic retaining wall

300. . . Third substrate

302. . . Third electrode

304. . . Third hydrophobic dielectric layer

310. . . Third hydrophilic retaining wall

350, 350a, 350b. . . Non-polar liquid

360. . . Polar liquid

400. . . arrow

Fig. 1A is a plan view showing the structure of an electrowetting display according to a first embodiment of the present invention.

1B-1C is a series of cross-sectional views for explaining the structure of the electrowetting display of the first embodiment of the present invention.

2A-2E is a series of cross-sectional views for explaining the method of manufacturing the electrowetting display of the first embodiment of the present invention.

2F and 2G are respectively a top view and a cross-sectional view for explaining the state after the voltage is applied to the electrowetting display according to the first embodiment of the present invention.

Fig. 3A is a plan view showing the structure of an electrowetting display according to a second embodiment of the present invention.

3B-3C is a series of cross-sectional views for explaining the structure of the electrowetting display of the second embodiment of the present invention.

4A-4E are a series of cross-sectional views for explaining the method of fabricating the electrowetting display of the second embodiment of the present invention.

5A-5B are a plan view and a cross-sectional view for explaining the state of the non-polar liquid before the voltage is applied to the electrowetting display according to the third embodiment of the present invention.

5C-5D is a top view and a cross-sectional view for explaining the state of the non-polar liquid after the voltage is applied to the electrowetting display according to the third embodiment of the present invention.

6A-6D are a series of cross-sectional views for explaining the method of fabricating the electrowetting display of the fourth embodiment of the present invention.

Figures 7A-7C are a series of top views illustrating the design of the glue of the present invention.

100. . . First substrate

102. . . First electrode

104. . . First hydrophobic dielectric layer

110. . . First hydrophilic retaining wall

150. . . Plastic material

200. . . Second substrate

201. . . Electrode layer

Claims (18)

The invention provides a method for manufacturing an electrowetting display, comprising the steps of: providing a first substrate and a second substrate, wherein the first substrate is disposed opposite to the second substrate, and the first substrate comprises a plurality of first hydrophilic groups Retaining wall; partially bonding the first substrate and the second substrate with a rubber material to form a bonded pair of substrates and leaving a first opening and a second opening, wherein the first opening is The second opening is oppositely disposed; a non-polar liquid is filled between the first substrate and the second substrate from the first opening; and the bonded pair of substrates are immersed in a polar liquid until the pair is bonded The substrate is completely immersed in the polar liquid such that the non-polar liquid is formed on the first substrate and between the first hydrophilic retaining walls; the bonded pair is removed from the polar liquid a substrate; and fully bonding the first substrate and the second substrate. The method of manufacturing an electrowetting display according to claim 1, wherein the arrangement of the first hydrophilic retaining walls corresponds to an arrangement of pixels. The method of claim 1 , wherein the first substrate further comprises a first hydrophobic dielectric layer, wherein the hydrophobic dielectric layer is located in the first hydrophilic retaining wall Between the first substrate and the first substrate. The method of manufacturing an electrowetting display according to claim 3, wherein a first electrode is further included between the first substrate and the hydrophobic dielectric layer. The method of manufacturing an electrowetting display according to claim 1, wherein the second substrate further comprises an electrode layer, wherein the electrode layer can have a hydrophilic surface. The method of manufacturing the electrowetting display of claim 1, wherein the second substrate further comprises a second electrode, a second hydrophobic dielectric layer and a second hydrophilic retaining wall. The method for manufacturing an electrowetting display according to claim 6, further comprising forming a third electrode between the first substrate and the second substrate. The method of producing an electrowetting display according to claim 1, wherein the polar liquid comprises water, an aqueous solution of sodium chloride or an aqueous solution of potassium chloride. The method for producing an electrowetting display according to claim 1, wherein the non-polar liquid comprises a silicon oil, a dye or a pigment. The invention provides a method for manufacturing an electrowetting display, comprising the steps of: providing a first substrate and a second substrate, wherein the first substrate and the second substrate are opposite to each other, and the first substrate comprises a plurality of a first hydrophilic retaining wall; supporting the first substrate and the second substrate with a supporting structure to form a temporary assembly of the pair of substrates and leaving a first opening and a second opening, The first opening is opposite to the second opening; a non-polar liquid is filled between the first substrate and the second substrate from the first opening; and the temporarily assembled pair of substrates are immersed in a polar liquid, Until the temporarily assembled pair of substrates are completely immersed in the polar liquid such that the non-polar liquid is formed on the first substrate and between the hydrophilic retaining walls; separating the first substrate from the second substrate; Providing a third substrate, bonding the first substrate and the third substrate to form the bonded pair of substrates; and removing the bonded first and third substrates from the polar liquid The method of manufacturing the electrowetting display of claim 10, wherein the first substrate further comprises a first hydrophobic dielectric layer, wherein the first hydrophobic dielectric layer is located in the first hydrophilicity The retaining wall is between the first substrate. The method of manufacturing an electrowetting display according to claim 11, wherein a first electrode is further included between the first substrate and the first hydrophobic dielectric layer. The method for manufacturing an electrowetting display according to claim 10, wherein the second substrate comprises a second electrode, a second hydrophobic dielectric layer and a second hydrophilic retaining wall. The method of manufacturing an electrowetting display according to claim 10, wherein the third substrate further comprises an electrode layer, wherein the electrode layer can have a hydrophilic surface. The method for manufacturing an electrowetting display according to claim 10, wherein the third substrate comprises a third electrode, a third hydrophobic dielectric layer and a third hydrophilic retaining wall. The method for manufacturing an electrowetting display according to claim 15, further comprising forming a fourth electrode between the first substrate and the third substrate. The method of producing an electrowetting display according to claim 10, wherein the polar liquid comprises water, an aqueous solution of sodium chloride or an aqueous solution of potassium chloride. The method for producing an electrowetting display according to claim 10, wherein the non-polar liquid comprises a silicon oil, a dye or a pigment.