201102757 六、發明說明： 【發明所屬之技術領域】 本發明是有關於-種位置調整裝置及具有綠置調整 裝置的曝光機’特別是指-種用以供光罩安裝並能微調光罩 位置的位置調整裝置及具有該位置調整裝置的曝光機。 【先前技術】201102757 VI. Description of the Invention: [Technical Field] The present invention relates to a position adjusting device and an exposure machine having a green setting device, particularly for mounting a light cover and finely adjusting the position of the mask Position adjusting device and exposure machine having the position adjusting device. [Prior Art]
如圖1及圖2所示，一般曝光機丨包含一 設置於機台1丨上_川2、，㈣=置^ 端的第-承載座u、-鎖固於機台u上且位於第—承載座 13上方的第二承載座14，及一設置於機台u上且位於第二 承載座Μ上方的曝光頭15，第一承載座13用以承載一： 曝光工件!6，而中空狀的第二承載座14則用以承載—光罩 17。在進行曝光作業時，首先，待曝光卫件16會透過移载 裝置(圖未示)的輸送而被置放在第一承載座Η上，伸縮裝 置12會將第-承载座13往上推移，使得第一承載座13: 的待曝光件16與第二承載座14上的鮮17貼平，接著， 藉由曝光頭15所產生的光線通過鮮17對待曝光 曝光’使得光罩17上的預設圖案能轉印到待曝it工件16 -哪兀磓程,，街々、1甲縮裒置12都會將待曝 工^ 16往上推移使其貼平光罩17，因此，光罩η 气：力量的影響而導致位置有所偏移’ 1因第二承栽座 1罩：在機台11上，故無法透過第二承載座U來進行 立置的調整，造成光罩17無法準確地與待曝光工件 201102757 16進行對位的動作，使得待曝光工件16曝光後的品質受到 影響，因此，如何構思一種可供光罩17安裝並能微調光罩 17位置的位置調整裝置，遂成為本發明要進—步改進的主 題。 【發明内容】 本發明之主要目的，在於提供一種用以供光罩安裝並能 多方向地快速調整光罩位置的位置調整裝置。 本發明之另一目的，在於提供一種具有位置調整裝置的 曝光機，其位置調整裝置用以供光罩安裝並能多方向地快速 調整光罩位置，使光罩能準確地與待曝光工件進行對位。 本發明的目的及解決先前技術問題是採用以下技術手 段來實現的，依據本發明所揭露的位置調整裝置，適於供一 光罩安裝並可調整光罩位置，位置調整裝置包含一基座、一 第一調整機構、一第二調整機構，及一第三調整機構。 第一調整機構包括一滑接於基座上的第一調整板，及一 a又置於基座上用以驅使第一調整板沿一第一方向相對於基 座位移的第一調整件。第二調整機構包括一滑接於第一調整 板上的第二調整板’及—設置於第一調整板上用以驅使第二 調整板沿一第二方向相對於第一調整板位移的第二調整 件，第一方向與第二方向分別為水平方向且實質上相互垂 直，第二調整板並定義有一實質上與第二方向相互垂直的旋 轉轴。第二調整機構包括一樞接於第二調整板上用以供光罩 安裝的第三調整板，及—設置於第二調整板上用以驅使第三 調整板繞旋轉軸相對於第二調整板旋轉的第三調整件。 201102757 前述之位置調整裝置，第一方向為基座的χ方向或γ 方向，第二方向為第一調整板的γ方向或X方向，旋轉轴 是沿第二調整板的ζ方向延伸。 前述之位置調整裝置，第三調整機構還包括一設置於第 一調整板上且位於第二調整件相反側的第四調整件，第三調 整件用以驅使第三調整板繞旋轉軸沿一第三方向相對於第 二調整板旋轉，第四調整件用以驅使第三調整板繞旋轉軸沿 一相反於第三方向的第四方向相對於第二調整板旋轉。 前述之位置調整裝置，第一調整機構還包括一設置於基 座與第一調整板之間且沿第一方向延伸的第一滑接件，第二 調整機構還包括一設置於第一、第二調整板之間且沿第二方 向延伸的第二滑接件，第一、第二滑接件分別為一交叉滾柱 導軌或滾珠導軌。 前述之位置調整裝置，基座包括一具有一螺孔的板件， 第一調整件包含一螺接於螺孔用以推移第—調整板的螺 桿、一螺接於螺桿上且抵接於板件一側的旋轉部，及一螺接 於螺桿上且抵接於板件另一側的限位部。第一調整板包含一 具有一螺孔的板件，第二調整件包含一螺接於螺孔用以推移 第二調整板的螺桿、一螺接於螺桿上且抵接於板件一側的旋 轉部’及一螺接於螺杯上且抵接於板件另一侧的限位部。 前述之位置調整裝置，第二調整板包含一凸設於頂面且 界定出旋轉軸的圓柱形凸部，第三調整板包含一設於底面用 以供圓柱形凸部樞接的圓形卡槽。 前述之位置調整裝置，第三調整板包含—位於第三、第 201102757 四調整件之間用以供第三、第四調整件推移的凸臂，第二調 整板包含二設於相反侧的板件，各板件具有一螺孔，第三、 第四調整件分別包含一螺接於各板件的螺孔用以推移凸臂 的螺桿、一螺接於螺桿上且抵接於板件一側的旋轉部，及— 螺接於螺桿上且抵接於板件另一侧的限位部。 前述之位置調整裝置，第三調整機構還包括複數個設於 第二、第三調整板之間用以提供第三調整板復位彈力的復位 彈簧。第二調整板包含複數個第一安裝孔，第三調整板包含 複數個與所述第一安裝孔相對應的第二安裝孔，各第一、第 -安裝孔分別包括-貫穿孔部’及—與貫穿孔部連通的卡接 孔部，第三調整機構還包括複數個分別卡接於所述第一安裝 孔的卡接孔部的第一桿件，及複數個分別卡接於所述第二安 裝孔的卡接孔部的第二桿件，各復位彈簧為一穿設於各第 第一女裝孔的貫穿孔部且兩端分別連接於各第一、第二 桿件的拉伸彈簀。 依據本發明所揭露的具有位置調整裝置的曝光機，包括 —機台、—伸縮裝置、-曝光頭，及-位置調整裝置。 伸縮裝置設置於機台上且其頂端用以承載一待曝光工 件’曝光頭設置於機台上且位於伸縮裝置上方，位置調整裝 置適於供一光罩安裝並可調整光罩位置，位置調整裝置包含 基座、一第一調整機構、一第二調整機構，及一第三調整 第-調整機構包括-滑接於基座上的第—調整:，及 一設置於基座上用以驅使第一調整板沿一第一方向相對於 基座位移的第-調整件。第二調整機構包括-滑接於第一調 201102757 整板上的第二調整板，及—設置於第-調整板上用以驅使第 二調整板沿—第二方向相對於第-調整板位移的第二調整 件第一方向與第—方向分別為水平方向且實質上相互垂 直’第二調整板並定義有一實質上與第二方向相互垂直的旋 轉轴。第三調整機構包括—樞接於第二調整板上用以供光罩 安裝的第三調整板，及—設置於第二調整板上用以驅使第三 調整板繞旋轉軸相對於第二調整板旋轉的第三調整件。 本發明之位置調整裝置，藉由位置調整裝置的第一、第 二、第三調整機構的設計，使得光罩能具有在第一方向位 移、第二方向位移，以及繞旋轉軸旋轉的三種自由度，藉此， 在曝光作業進行前，能將光罩準確地與伸縮裝置頂端的待曝 光工件進行對位的動作，使得光罩上的預設圖案能準確地轉 印到待曝光工件上。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效，在以 下配合參考圖式之一個較佳實施例的詳細說明中，將可清楚 的呈現。透過具體實施方式的說明，當可對本發明為達成預 定目的所採取的技術手段及功效得以更加深入且具體的了 解’然而所附圖式只是提供參考與說明之用，並非用來對本 發明加以限制。 在本發明被詳細描述之前，要注意的是，在以下的說明 内容中，類似的元件是以相同的編號來表示。 如圖3所示’是本發明具有位置調整裝置的曝光機的一 較佳實施例，該曝光機200包括一機台2、一設置於機台2 201102757 上的伸縮裝置3、一 §史置於機台2上且間隔位於伸縮裝置3 上方的曝光頭4,及一設置於機台2上且位於伸縮裝置3與 曝光頭4之間的位置調整裝置5,伸縮裝置3頂端用以承載 一待曝光工件6,而位置調整裝置5用以供一光罩7安裝並 可調整光罩7位置，使光罩7能與待曝光工件6進行對位動 作’其中’待曝光工件6可為一基板或一晶圓。 如圖4、圖5及圖6所示，位置調整裝置5包含—設置 於機台2上的基座50、一第一調整機構51、一第二調整機 構53，及一第三調整機構55。基座5〇包括一座本體5〇1， 及一鎖固在座本體501的一侧邊且呈[形的板件5〇2，座本 體501中心處設有一穿孔5〇3,而板件5〇2具有一螺孔5〇4。 第一調整機構51包括一第一調整板51〇，及二第一滑 接件511，第一調整板510包含一形狀與基座5〇的座本體 501形狀相當的板體512,及一鎖固在板體512的一側邊且 與基座50的板件502位於同一側的塊體5丨3，板體5丨2中 心處設有一與座本體501的穿孔5〇3位置相對應的穿孔 514，板體512透過二相間隔的第一滑接件511與基座5〇 的座本體501相滑接。在本實施中，各第一滑接件5ιι為一 沿一第一方向延伸的交又滾柱導軌，第一方向定義為基座 50的X方向，各第一滑接件511包含一鎖固在基座％的座 本體501頂面的第一導執515，及一鎖固在第一調整板51〇 的板體512底面的第二導軌516，第二導軌516平行地設置 於第一導軌515 —侧且透過複數個滾柱（圖未示）與第一導軌 515滑接，藉此，使得第一調整板51〇能沿著第一方向相對 201102757 於基座S0的座本體501滑動。 第調整機構51還包括一用以驅使第一調整板510沿 第方向相對於基座50位移的第一調整件517，第一調整 牛17包含一螺接於板件5〇2的螺孔5〇4的螺桿518、一螺 ;螺扣518上且抵接於板件5〇2 一側的旋轉部5丨9，及一 累接於螺捽5丨8上且抵接於板件另一側的限位部， 藉由％轉旋轉部519能使螺桿518朝第一調整板51〇的塊體 3方向移動並推動塊體513，使得第一調整板51〇能透過 第β接件511沿第一方向相對於基座5〇的座本體5〇1滑 動，以進行第一調整板510位置的微調。 第二調整機構53包括一第二調整板531，及二第二滑 接件532’第二調整板531包含一形狀與第一調整板51〇的 板體512形狀相當的板體533，及一鎖固在板體533 一側邊 的塊體534，板體533頂面凸設有一圓柱形凸部535，且板 體533中心處設有一與第一調整板51〇的穿扎514位置相對 應的穿孔536，板體533透過二相間隔的第二滑接件532與 第一調整板510的板體512相滑接.在本實施中，各第二滑 接件532為一結構與第一滑接件511結構相同的交又滾柱導 軌，各第一滑接件53 2沿一第二方向延伸，第二方向定義為 第一調整板51〇的Υ方向，第二方向與第一方向分別為水 平方向且實質上相互垂直。各第二滑接件532包含一鎖固在 第一調整板510的板體512頂面的第—導軌537，及一鎖固 在第二調整板531的板體533底面的第二導軌538，第-導 軌538平行地設置於第一導軌537 —側且透過複數個滚柱 201102757 圖未示）與第一導軌537滑接，藉此，使得第二調整板531 能沿著第二方向相對於第一調整板51〇的板體512滑動。需 說明的是，藉由第-、第二滑接件511、532分別為交又滾 柱導軌的設計，使得第一調整板51〇相對於基座5〇的座本 體501滑動的過程以及第二調整板531相對於第一調整板 510的板體512滑動的過程摩擦較小，使得滑動的過程能保 持平滑平順的狀態。再者，在設計時’各第一滑接件511 及各第二滑接件532也可分別為一滾珠導軌。 第二調整機構53還包括一用以驅使第二調整板531沿鲁 第二方向相對於第一調整板51〇位移的第二調整件89，第 一調整板510的板體512另一側邊鎖固有一供第二調整件 539安裝的板件52卜第二調整件539結構與第—調整件η? 結構相同，第二調整件539包含一螺接於板件521的螺孔 522的螺桿540、一螺接於螺桿54〇上且抵接於板件521 一 側的旋轉部541，及一螺接於螺桿54〇上且抵接於板件521 另一側的限位部542,藉由旋轉旋轉部541能使螺桿54〇朝 第一調整板531的塊體534方向移動並推動塊體534，使得 馨 第二調整板531能透過第二滑接件532沿第二方向相對於第 一調整板510的板體512滑移，以進行第二調整板531位置 的微調。 第二調整機構55包括一第三調整板551、二安裝架 552、二擋止件553，及一承載板554,二安裝架552間隔設 置於第三調整板551頂面，用以供承載板554安裝，而二擋 止件553鎖固在第三調整板551的一側邊，用以供承載板 10 201102757 554抵接。承載板554呈中空狀用以供光罩7安裝，承載板 554的二相反側分別卡接在二安裝架552的卡槽555内，同 時，擋止件553抵接在承載板554的一側邊，藉此，使得承 載板554能定位在第三調整板551上，且光罩7位置可與第 三調整板551中心處的一穿孔556位置相對應。第三調整板 551還包含一設於底面用以供第二調整板531的圓柱形凸部 535樞接的圓形卡槽557，藉此，第三調整板551能帶動承 載板554繞圓柱形凸部535所界定出的一旋轉軸A相對於 第二調整板531旋轉，在本實施例中，該旋轉軸A是沿第 二調整板531的Z方向延伸且實質上與第二方向相互垂直。 第三調整機構55還包括一第三調整件558，及一與第 三調整件558結構相同的第四調整件559，第三、第四調整 件558、M9的結構同樣與第一、第二調整件$17、539結構 相同，第三調整件558設置在第二調整板531的一鎖固在板 體533 —側邊的一板件543上，第四調整件559設置在第二 調整板53丨的一鎖固在板體533另一侧邊的一板件543上。 第四調整件559位於第三調整件558的相對側，且第三、第 四調整件558、559鄰近於第二調整板531之板體533的一 角隅處’第三、第四調整件558、559分別包含—螺接於板 件543的螺孔544的螺桿560、一螺接於螺桿56〇上且抵接 於板件543 -側的旋轉部56卜及一螺接於螺桿56〇上且抵 接於板件543另-側的限位冑562，第三調整板551包含一 凸設於角隅處且位於第三、第四調整件558、奶之間用以 供第三、第四調整件MS、559的螺桿56〇推移的凸臂， 201102757 藉由旋轉第三調整件558的旋轉部561能使螺桿56〇朝凸臂 563方向移動並推動凸臂563的—側，使得第三調整板551 能繞旋轉轴A沿-方向相對於第二調整板53ι的板體印 旋轉。藉由旋轉第四調整件559的旋轉部561能使螺桿56〇 朝凸臂563方向移動並推動凸臂⑹的另一側使得第三調 整板551能繞旋轉軸A沿另-方向相對於第二調整板531 的板體533旋轉，藉此，能進行第三調整板551位置的微調。 如圖5、圖6、圖7及圖8所示，第二調整板531的板 體533包含有複數個環設於圓柱形凸部535外周目的第一安 裝孔545，各第-安裝孔545包括一貫穿孔部5仏，及一形 成於板體533底面且與貫穿孔部546連通的卡接孔部， 第三調整板551包含複數個與所述第—安裝孔⑷位置相對 應的第二安裝孔564,各第二安裝孔564包括一貫穿孔部 565’及-形成於第三調整板551頂面且與貫穿孔部奶連 通的卡接孔部566。第三調整機構55還包括複數個分別卡 接於所述第-安裝孔545的卡接孔部547的第—桿件初、 複數個分別卡接於所述第二安裝孔564的卡接孔部说的第 二桿件568，及複數個復位彈菁州，各復位彈菁州為一 穿設於各第一 '第二安裝孔545、564的貫穿孔部546、565 且兩端分別連接於各第一桿件5 6 7與第二桿件5 6 8的拉伸彈 簧。藉由復位彈簧569的拉力作用，以及搭配複數個鎖固在 第二調整板531的板體533側邊且卡掣於第三調整板551 頂面的卡鉤57〇设计，使得第三調整板州能穩固地極接在 第二調整板531的板體533上。 12 201102757 以下將針對位置調整裝置5的操作方式進行詳細說明： 如圖9及圖10所示，欲調整光罩7沿第—方向位移時， ，時針旋轉第_調整件517的旋轉部519，螺桿518會沿箭 2所示的第一方向推動第一調整板510的塊體513，使得 整：2板51〇會由圖9所示的初始位置帶動第二、第三調 _ ' 、55相對於基座50的座本體5〇1滑移到圖所 不的—調整後的位置，藉此，能將光罩 到所敍细μ 1 兀*早/ /0著第一方向微調 位=調，的位置。另外，欲將第—調整板51〇復位到初始 位部t 旋轉第—調整件517的旋轉部519,使限 5二頭：板件5°2的一側，· 動第往回推移後，即可使第—調整板51〇帶 第二調整機構53、55復位到初始位置。 如圖11及圖12所示，欲調整光罩 時，順時針旋轉第-蜩举# A 第一方向位移 ㈣锝第_調整件539的旋轉部541， 七箭碩Π所示的第二方向推 會 使得第1心 Π㈣第-調整板如的塊體534, 會由圖11所示的初始位置㈣1 整機構55相對於第一調整板51 巧 所示的-調整後的位置，藉此，能將二體5 :公移到圖12 調到所欲調整的位置。另外 者第二方向微 始位置時，以___ 絲531復位到初 限…抵接在板 531沿箭頭II的反向往_移# 8者，再將第二調整板 ^ 口推移後，即可使第二調整 帶動4三調整機構55復位到初始位置。板531 如圖】3及圖14所示’欲調整光單7沿一第三方向位移 13 201102757 =先逆時針旋轉第四調整件559的旋轉部％ 整件559的螺裎ςΑΛ时八… π乐四兩 ψ 561 ^ 4伤縮入旋轉部561内並離開抵接在凸 二：位置，接著，順時針旋轉第三調整件558的旋轉部 561 ’螺;f于560會儿許商m _ 的凸劈w 向推動第三調整板⑸ 置由圖13所示的初始位 ί :轉轴A(如圖5)沿-如箭頭IV所示的第三方向相對於 =調整板，板體533旋轉到圖“所示的一調整後的 & 第三調整板551會同時帶動承載板554旋轉，藉此， 此將先罩7沿著第三方向微調到所欲調整的位置 ==整板551復㈣初純料，先料㈣轉第三調 整件说的旋轉部561，使限位部⑹抵齡板件543的一 側，藉由復位彈簧569(如圖5)的復位彈力，即可驅使第三 凋整板551帶動承載板554復位到初始位置。 如圖13及圖15所示，欲調整光單7沿一第四方向位移 時，先逆時針旋㈣三調整件说的旋轉部561，使第 整件558的螺桿细部份縮入旋轉部561内並離開抵接在凸 臂563的位置，接著，順時針旋轉第四調整件奶的旋轉部 5 61 ’螺桿5 6 0會沿箭頭v所+从士 & 貝所不的方向推動第三調整板551 的凸臂使得第三調整板551會由圖13所示的初始位 置繞旋轉軸A(如圖5)沿-如箭頭％所示的第四方向相對於 第二調整板531的板體533旋轉到圖15所示的一調整後的 位置，且第三調整板551會同時帶動承載板554旋轉，藉此， 能將光罩7沿著第四方向__欲調整的位置。另外，欲 將第三調整板551復位到初始位置時，先逆時針旋轉第四調 14 201102757 整件559的旋轉部561’使限位部562抵接在板件543的一 側’藉由復位彈簧569(如圖5)的復位彈力，即可驅使第三 調整板551帶動承载板554復位到初始位置。 藉由位置調整裝置5的第-、第二、第三調整機構51、 53、55的設計，使得光罩7能具有在第一方向位移第二 方向位移，以及繞旋轉軸A旋轉（第三、第四方向位移）的三 種自由度，藉此，在曝光作業進行前，能將光罩7準確地與 伸縮裝置3 1¾端的待曝光工件6(如目3)進行對位的動作， 使得光罩7上的預設圖案能準確地轉印到待曝光工件6上。 特別說明的是，在本實施例中，第一方向也可定義為基座 的Y方向’而第二方向也可定義為第—調整板51〇的χ 方白再者，可視實際需求而單獨設計第三調整件Mg或第 四調調整件559,並不受限於本實施例同時具有第三、第四 調整件558、559的設計方式為限。又，光罩7也可如圖16 所示地直接安裝固定在第三調整板551的頂面，並不受限於 光罩7是透過承載板554及安裝架552設在第三調整板551 上的設計方式。 歸納上述，本實施例的曝光機2〇〇 ,藉由位置調整裝置 5的第一、第二、第三調整機構si、、55的設計，使得 光罩7旎具有在第一方向位移、第二方向位移以及繞旋轉 軸A旋轉的二種自由度，藉此，在曝光作業進行前，能將 光罩7準確地與伸縮裝置3頂端的待曝光工件6(如圖3)進 行對位的動作，使彳于光罩7上的預設圖案能準確地轉印到待 曝光工件6上，故確實能達到本發明所訴求之目的。 15 201102757 惟以上所述者’僅為本發明之較佳實施例而已，當不能 以此限定本發明實施之範圍，即大凡依本發明申請專利範圍 及發明說明内容所作之簡單的等效變化與修飾，皆仍屬本發 明專利涵蓋之範圍内。 【圖式簡單說明】 圖1是一般曝光機的示意圖； 圖2是類似圖1的示意圖，說明伸縮裝置將待曝光工件 往上推移使其平貼光罩； 圖3是本發明具有位置調整裝置的曝光機的一較佳實 施例的立體分解圖，說明伸縮裝置、待曝光工件、位置調整 裝置、光罩及曝光頭之間的位置關係； 圖4是本發明具有位置調整裝置的曝光機的一較佳實 施例的位置調整裝置的立體圖； 圖5是本發明具有位置調整裝置的曝光機的一較佳實 施例的位置調整裝置的立體分解圖； 圖6是本發明具有位置調整裝置的曝光機的一較佳實 施例的位置調整裝置由另一視角觀看的立體分解圖； 圖7是本發明具有位置調整裝置的曝光機的一較佳實 施例的位置調整裝置的仰視示意圖，說明第一桿件卡接在第 一安裝孔的卡接孔部； 圖8是本發明具有位置調整裝置的曝光機的一較佳實 施例的位置調整裝置的俯視示意圖，說明第二桿件卡接在第 二安裝孔的卡接孔部； 圖9是本發明具有位置調整裝置的曝光機的一較佳實 16 201102757 施例的位置調整裝置的側視圖，說明第一調整板在初始位 置； 圖1 〇是類似圖9的側視圖，說明第一調整件驅使第一 調整板沿第一方向相對於基座滑移； 圖11是本發明具有位置調整裝置的曝光機的一較佳實 施例的位置調整裝置的側視圖，說明第二調整板在初始位 置； 圖12是類似圖n的側視圖，說明第二調整件驅使第二 調整板第一方向相對於第一調整板滑移； 圖13是本發明具有位置調整裝置的曝光機的一較佳實 施例的位Ϊ調整裝置的俯視圖，說明第三調整板在初始位 置； 圖14是類似圖13的俯視圖，說明第三調整件驅使第三 調整板沿第三方向相對於第二調整板旋轉； 圖15是類似圖13的俯視圖，說明第四調整件驅使第三 調整板沿第四方向相對於第二調整板旋轉；及 圖16是本發明具有位置調整裝置的曝光機的一較佳實 施例的位置調整裝置的俯視*意圖，說明光罩也可直接安裝 固定在第三調整板上。 & 17 201102757 532 .......第二滑接件 535 .......圓柱形凸部 536、556.·穿孔 539 .......第二調整件 543 .......板件 【主要元件符號說明】 200 .......曝光機 2 ..........機台 3 ..........伸縮裝置 4 ..........曝光頭 5 ..........位置調整裝置 50··· 基座 501 - 座本 體 502、 521 · •板件 503、 514. •穿孔 504、 522· •螺孔 51 ··· ‘第一 調 整 機 構 510 · .第一 調 整 板 511 · ‘第一 滑接件 512、 533· •板體 513、 534· •塊體 515、 537· •第一 導 軌 516、 538. .第二 導 軌 517 . .第一 調 整 件 518、 540· .螺桿 519、 541 · •旋轉部 520、 542· -限位部 53··· •第二 調 整 機 構 531 . .第二 調 整 板 544 ....... •螺孔 545 ....... >第一安裝孔 546 ' 565· •貫穿孔部 547 ' 566· •卡接孔部 55......... •第三調整機構 551 ....... •第三調整板 552…… •安裝架 553…… •擋止件 554…… •承載板 555…… •卡槽 557…… •圓形卡槽 558…… .第三調整件 559…… •第四調整件 560…… •螺桿 561…… •旋轉部 562…… •限位部 563…… .凸臂 564…… •第二安裝孔 18 201102757 - 567... …·第一桿件 7 ... 568… •…第二桿件 I ' II 569… •…復位彈簣 IV ' 570… -----^鉤 A..· 6 ....... …·待曝光工件 ……光罩 、III··箭頭 V、VI箭頭 .......旋轉軸As shown in FIG. 1 and FIG. 2, the general exposure machine includes a first carrier u disposed on the machine 1 _ 2, (4) = set, and is locked on the machine u and located at the first a second carrier 14 above the carrier 13 and an exposure head 15 disposed on the table u and located above the second carrier. The first carrier 13 is used to carry: an exposed workpiece! The second carrier 14 is used to carry the photomask 17. When performing the exposure operation, first, the to-be-obtained guard 16 is placed on the first carrier 透过 through the transport of the transfer device (not shown), and the telescopic device 12 moves the first carrier 13 upward. So that the to-be-exposure member 16 of the first carrier 13: is flattened with the fresh 17 on the second carrier 14, and then the light generated by the exposure head 15 is exposed to exposure by the fresh 17 to make the photomask 17 The preset pattern can be transferred to the workpiece to be exposed 16 - which process, the street 々, 1 甲 裒 12 12 will push the exposed work ^ 16 up to make it flatten the reticle 17, therefore, the mask η Gas: The position of the gas is shifted due to the influence of the force' 1 because the second bearing seat 1 cover: on the machine table 11, it is impossible to adjust the vertical position through the second carrier U, causing the mask 17 to be inaccurate. The ground is aligned with the workpiece 201102757 16 to be exposed, so that the quality of the workpiece 16 to be exposed after exposure is affected. Therefore, how to design a position adjusting device for the photomask 17 to be mounted and finely adjust the position of the mask 17 becomes The subject matter of the invention is further improved. SUMMARY OF THE INVENTION A primary object of the present invention is to provide a position adjusting device for mounting a photomask and quickly adjusting the position of the mask in multiple directions. Another object of the present invention is to provide an exposure machine having a position adjusting device for positioning a photomask and rapidly adjusting the position of the mask in multiple directions so that the mask can accurately be accurately compared with the workpiece to be exposed. Counterpoint. The object of the present invention and the prior art are solved by the following technical means. The position adjusting device according to the present invention is suitable for installing a reticle and adjusting the position of the reticle. The position adjusting device comprises a pedestal. a first adjustment mechanism, a second adjustment mechanism, and a third adjustment mechanism. The first adjustment mechanism includes a first adjustment plate slidably coupled to the base, and a first adjustment member disposed on the base for driving the first adjustment plate to be displaced relative to the base in a first direction. The second adjusting mechanism includes a second adjusting plate slidably coupled to the first adjusting plate and a first adjusting plate disposed on the first adjusting plate for driving the second adjusting plate to be displaced relative to the first adjusting plate in a second direction In the second adjusting member, the first direction and the second direction are respectively horizontal and substantially perpendicular to each other, and the second adjusting plate defines a rotating shaft substantially perpendicular to the second direction. The second adjusting mechanism includes a third adjusting plate pivotally connected to the second adjusting plate for mounting the light cover, and a second adjusting plate is disposed on the second adjusting plate for driving the third adjusting plate to be adjusted relative to the second axis around the rotating shaft The third adjustment member of the plate rotation. 201102757 In the above position adjusting device, the first direction is the χ direction or the γ direction of the susceptor, the second direction is the γ direction or the X direction of the first adjustment plate, and the rotation axis extends in the ζ direction of the second adjustment plate. In the above position adjustment device, the third adjustment mechanism further includes a fourth adjustment member disposed on the first adjustment plate and located on the opposite side of the second adjustment member, and the third adjustment member is configured to drive the third adjustment plate along the rotation axis The third direction is rotated relative to the second adjustment plate, and the fourth adjustment member is configured to drive the third adjustment plate to rotate relative to the second adjustment plate about the rotation axis in a fourth direction opposite to the third direction. In the above position adjustment device, the first adjustment mechanism further includes a first sliding member disposed between the base and the first adjusting plate and extending in the first direction, and the second adjusting mechanism further comprises a first and a third And a second sliding member extending between the plates and extending in the second direction, the first and second sliding members are respectively a cross roller guide or a ball guide. In the above position adjusting device, the base comprises a plate member having a screw hole, and the first adjusting member comprises a screw screwed to the screw hole for pushing the first adjusting plate, screwed onto the screw and abutting the plate a rotating portion on one side of the piece, and a limiting portion screwed to the screw and abutting on the other side of the plate. The first adjusting plate comprises a plate member having a screw hole, and the second adjusting member comprises a screw screwed to the screw hole for pushing the second adjusting plate, and is screwed to the screw and abuts against one side of the plate member. The rotating portion 'and a screwing portion that is screwed onto the screw cup and abuts against the other side of the plate member. In the above position adjusting device, the second adjusting plate comprises a cylindrical convex portion protruding from the top surface and defining a rotating shaft, and the third adjusting plate comprises a circular card disposed on the bottom surface for pivotally connecting the cylindrical convex portion groove. In the above position adjusting device, the third adjusting plate comprises: a convex arm between the third and the 201102757 four adjusting members for the third and fourth adjusting members to be moved, and the second adjusting plate comprises two plates disposed on the opposite side Each of the plate members has a screw hole, and the third and fourth adjusting members respectively comprise a screw hole screwed to each plate member for pushing the screw of the convex arm, screwing on the screw and abutting against the plate member The rotating portion on the side, and the screw is connected to the screw and abuts against the limiting portion on the other side of the plate. In the foregoing position adjusting device, the third adjusting mechanism further includes a plurality of return springs disposed between the second and third adjusting plates for providing a reset force of the third adjusting plate. The second adjustment plate includes a plurality of first mounting holes, and the third adjusting plate includes a plurality of second mounting holes corresponding to the first mounting holes, and each of the first and first mounting holes respectively includes a through hole portion a latching hole portion communicating with the through hole portion, the third adjusting mechanism further includes a plurality of first rods respectively engaged with the engaging hole portions of the first mounting hole, and a plurality of latching holes respectively a second rod member of the second hole of the second mounting hole, each of the return springs is a through hole portion of each of the first women's holes, and the two ends are respectively connected to the first and second rods Stretched the magazine. An exposure machine having a position adjusting device according to the present invention includes a machine table, a telescopic device, an exposure head, and a position adjusting device. The telescopic device is disposed on the machine table and has a top end for carrying a workpiece to be exposed. The exposure head is disposed on the machine table and located above the telescopic device. The position adjusting device is adapted to be installed by a photomask and can adjust the position of the photomask, and adjust the position. The device includes a base, a first adjustment mechanism, a second adjustment mechanism, and a third adjustment-adjustment mechanism including: a first adjustment that is slidably coupled to the base: and a first adjustment on the base for driving The first adjusting plate is displaced relative to the base by a first adjusting member in a first direction. The second adjustment mechanism includes: a second adjustment plate that is slidably connected to the first plate of the first adjustment 201102757, and is disposed on the first adjustment plate for driving the second adjustment plate to be displaced relative to the first adjustment plate along the second direction The second adjustment member has a first direction and a first direction which are respectively horizontal and substantially perpendicular to each other. The second adjustment plate defines a rotation axis substantially perpendicular to the second direction. The third adjustment mechanism includes: a third adjustment plate pivotally connected to the second adjustment plate for mounting the photomask, and a second adjustment plate is disposed on the second adjustment plate for driving the third adjustment plate to be adjusted relative to the second rotation axis The third adjustment member of the plate rotation. The position adjusting device of the present invention, by the design of the first, second and third adjusting mechanisms of the position adjusting device, enables the reticle to have three freedoms of displacement in the first direction, displacement in the second direction, and rotation around the rotating shaft Therefore, before the exposure operation, the reticle can be accurately aligned with the workpiece to be exposed at the top of the telescopic device, so that the preset pattern on the reticle can be accurately transferred to the workpiece to be exposed. The above and other technical contents, features and effects of the present invention will be apparent from the following detailed description of the preferred embodiments of the drawings. The technical means and functions of the present invention for achieving the intended purpose can be more deeply and specifically understood by the description of the embodiments. However, the drawings are only for the purpose of illustration and description, and are not intended to limit the invention. . Before the present invention is described in detail, it is noted that in the following description, similar elements are denoted by the same reference numerals. As shown in FIG. 3, which is a preferred embodiment of the exposure machine having the position adjusting device of the present invention, the exposure machine 200 includes a machine table 2, a telescopic device 3 disposed on the machine table 2 201102757, and a history device. The exposure head 4 on the machine table 2 and spaced above the telescopic device 3, and a position adjustment device 5 disposed on the machine table 2 and located between the telescopic device 3 and the exposure head 4, the top end of the telescopic device 3 is used to carry a The workpiece 6 to be exposed, and the position adjusting device 5 is used for mounting a reticle 7 and adjusting the position of the reticle 7 so that the reticle 7 can be aligned with the workpiece 6 to be exposed, wherein the workpiece 6 to be exposed can be one. A substrate or a wafer. As shown in FIG. 4, FIG. 5 and FIG. 6, the position adjusting device 5 includes a base 50 disposed on the machine base 2, a first adjusting mechanism 51, a second adjusting mechanism 53, and a third adjusting mechanism 55. . The base 5 includes a body 5〇1, and a side of the seat body 501 and a [shaped plate member 5〇2, a hole 5〇3 is provided at the center of the seat body 501, and the plate member 5〇 2 has a screw hole 5〇4. The first adjusting mechanism 51 includes a first adjusting plate 51〇 and two first sliding members 511. The first adjusting plate 510 includes a plate body 512 having a shape corresponding to the seat body 501 of the base 5〇, and a lock. a block 5丨3 fixed to one side of the plate body 512 and located on the same side of the plate member 502 of the base 50, and a position corresponding to the position of the through hole 5〇3 of the seat body 501 is provided at the center of the plate body 5丨2. The through hole 514, the plate body 512 is slidably coupled to the base body 501 of the base 5 through the two-phase spaced first sliding member 511. In this embodiment, each of the first sliding members 5 ι is a cross roller guide extending in a first direction, the first direction is defined as the X direction of the base 50, and each of the first sliding members 511 includes a locking a first guide 515 on the top surface of the base body 501 of the base, and a second guide rail 516 locked to the bottom surface of the plate body 512 of the first adjustment plate 51A. The second guide rail 516 is disposed in parallel on the first guide rail. The 515 is slidably coupled to the first rail 515 through a plurality of rollers (not shown), whereby the first adjusting plate 51 is slidable relative to the housing 102a of the base S0 in the first direction. The first adjusting mechanism 51 further includes a first adjusting member 517 for driving the first adjusting plate 510 to be displaced relative to the base 50 in the first direction. The first adjusting cow 17 includes a screw hole 5 screwed to the plate member 5〇2. a screw 518 of the 〇4, a screw; a rotating portion 5丨9 on the side of the screw member 518 and abutting on the side of the plate 5〇2, and a squeegee on the screw 5丨8 and abutting against the plate member The side limiting portion can move the screw 518 toward the block 3 of the first adjusting plate 51 并 by the % turning rotating portion 519 and push the block 513 so that the first adjusting plate 51 can pass through the β-th piece 511. The seat body 5〇1 is slid relative to the base 5〇 in the first direction to perform fine adjustment of the position of the first adjustment plate 510. The second adjusting mechanism 53 includes a second adjusting plate 531, and the second second sliding member 532'. The second adjusting plate 531 includes a plate body 533 having a shape corresponding to the shape of the plate body 512 of the first adjusting plate 51A, and a plate. The block body 534 is fixed on one side of the plate body 533. A cylindrical convex portion 535 is protruded from the top surface of the plate body 533, and a center of the plate body 533 is disposed corresponding to the position of the threading 514 of the first adjusting plate 51〇. The plate 533 is slidably coupled to the plate 512 of the first adjustment plate 510 through the second sliding member 532. In this embodiment, each of the second sliding members 532 is a structure and a first The sliding member 511 has the same structure and the roller guide rails. Each of the first sliding members 53 2 extends in a second direction. The second direction is defined as the first direction of the first adjusting plate 51 , and the second direction and the first direction. They are horizontal and substantially perpendicular to each other. Each of the second sliding members 532 includes a first guide rail 537 that is locked on the top surface of the plate body 512 of the first adjustment plate 510, and a second guide rail 538 that is locked to the bottom surface of the plate body 533 of the second adjustment plate 531. The first guide rail 538 is disposed in parallel with the first guide rail 537 and is slidably coupled to the first rail 537 through a plurality of rollers 201102757 (not shown), thereby enabling the second adjustment plate 531 to be opposite to the second direction The plate body 512 of the first adjustment plate 51 is slid. It should be noted that, by the first and second sliding members 511 and 532 respectively, the design of the cross roller guide rail makes the first adjusting plate 51 滑动 slide relative to the seat body 501 of the base 5〇 and the first The process of sliding the two adjustment plates 531 with respect to the plate body 512 of the first adjustment plate 510 is small, so that the sliding process can maintain a smooth and smooth state. Furthermore, in the design, each of the first sliding members 511 and each of the second sliding members 532 may also be a ball guide. The second adjusting mechanism 53 further includes a second adjusting member 89 for driving the second adjusting plate 531 to be displaced relative to the first adjusting plate 51 in the second direction, and the other side of the plate 512 of the first adjusting plate 510 The lock has a plate member 52 for the second adjusting member 539. The second adjusting member 539 has the same structure as the first adjusting member η. The second adjusting member 539 includes a screw screwed to the screw hole 522 of the plate member 521. 540, a rotating portion 541 screwed onto the screw 54A and abutting on the side of the plate member 521, and a limiting portion 542 screwed to the screw 54A and abutting on the other side of the plate member 521, The rotating portion 541 can move the screw 54 toward the block 534 of the first adjusting plate 531 and push the block 534 so that the second adjusting plate 531 can pass through the second sliding member 532 in the second direction. The plate 512 of an adjustment plate 510 is slid to perform fine adjustment of the position of the second adjustment plate 531. The second adjusting mechanism 55 includes a third adjusting plate 551, two mounting brackets 552, two stopping members 553, and a supporting plate 554. The two mounting brackets 552 are spaced apart from the top surface of the third adjusting plate 551 for the supporting plate. The 554 is installed, and the second stop 553 is locked on one side of the third adjusting plate 551 for the receiving plate 10 201102757 554 to abut. The carrier plate 554 is hollow for the photomask 7 to be mounted. The opposite sides of the carrier plate 554 are respectively engaged in the card slots 555 of the two mounting brackets 552. At the same time, the blocking members 553 abut on one side of the carrier plate 554. In this way, the carrier plate 554 can be positioned on the third adjustment plate 551, and the position of the reticle 7 can correspond to a position of a through hole 556 at the center of the third adjustment plate 551. The third adjusting plate 551 further includes a circular card slot 557 disposed on the bottom surface for pivoting the cylindrical convex portion 535 of the second adjusting plate 531. Thereby, the third adjusting plate 551 can drive the carrying plate 554 around the cylindrical shape. A rotation axis A defined by the convex portion 535 is rotated relative to the second adjustment plate 531. In the embodiment, the rotation axis A extends in the Z direction of the second adjustment plate 531 and is substantially perpendicular to the second direction. . The third adjusting mechanism 55 further includes a third adjusting member 558 and a fourth adjusting member 559 having the same structure as the third adjusting member 558. The third and fourth adjusting members 558 and M9 are also configured with the first and second portions. The adjustment members $17 and 539 have the same structure. The third adjustment member 558 is disposed on a plate member 543 of the second adjustment plate 531 that is locked on the side of the plate body 533. The fourth adjustment member 559 is disposed on the second adjustment plate 53. A lock of the cymbal is fixed to a plate member 543 on the other side of the plate body 533. The fourth adjusting member 559 is located on the opposite side of the third adjusting member 558, and the third and fourth adjusting members 558 and 559 are adjacent to a corner of the plate 533 of the second adjusting plate 531. The 559 respectively includes a screw 560 screwed to the screw hole 544 of the plate member 543, a rotating portion 56 screwed to the screw 56A and abutting against the plate member 543 - and a screwed to the screw 56 And abutting on the other side of the plate 543, the third adjusting plate 551 includes a protrusion at the corner and located between the third and fourth adjusting members 558 and the milk for the third and the third The four arms of the adjusting member MS, 559 are turned by the convex arm, and the rotating portion 561 of the third adjusting member 558 can rotate the screw 56 to the direction of the convex arm 563 and push the side of the convex arm 563, so that the first The three adjustment plates 551 are rotatable relative to the plate of the second adjustment plate 531 in the - direction about the rotation axis A. By rotating the rotating portion 561 of the fourth adjusting member 559, the screw 56 can be moved toward the convex arm 563 and the other side of the convex arm (6) can be pushed so that the third adjusting plate 551 can be rotated in the other direction with respect to the rotating axis A. The plate body 533 of the second adjustment plate 531 is rotated, whereby the fine adjustment of the position of the third adjustment plate 551 can be performed. As shown in FIG. 5 , FIG. 6 , FIG. 7 and FIG. 8 , the plate body 533 of the second adjusting plate 531 includes a plurality of first mounting holes 545 disposed on the outer circumference of the cylindrical convex portion 535 , and each of the first mounting holes 545 . The first adjusting plate 551 includes a plurality of engaging holes corresponding to the position of the first mounting hole (4), and includes a matching hole portion 5仏, and a locking hole portion formed on the bottom surface of the plate body 533 and communicating with the through hole portion 546. The mounting holes 564 include second through holes 565' and a locking hole portion 566 formed on the top surface of the third adjusting plate 551 and communicating with the through hole portion. The third adjusting mechanism 55 further includes a plurality of first and second rod members that are respectively engaged with the engaging hole portions 547 of the first mounting hole 545, and a plurality of engaging holes that are respectively engaged with the second mounting holes 564. The second rod member 568 and a plurality of resetting bullets are said to be inserted into the through hole portions 546 and 565 of each of the first 'second mounting holes 545 and 564 and are respectively connected at both ends. A tension spring of each of the first rod member 576 and the second rod member 568. The third adjusting plate is designed by the pulling force of the return spring 569 and with a plurality of hooks 57 锁 locked on the side of the plate body 533 of the second adjusting plate 531 and locked on the top surface of the third adjusting plate 551. The state can be firmly attached to the plate 533 of the second adjustment plate 531. 12 201102757 The operation mode of the position adjusting device 5 will be described in detail below. As shown in FIG. 9 and FIG. 10, when the photomask 7 is to be displaced in the first direction, the rotating portion 519 of the first adjusting member 517 is rotated by the hour hand. The screw 518 pushes the block 513 of the first adjustment plate 510 in the first direction indicated by the arrow 2, so that the entire: 2 plate 51〇 will drive the second and third adjustments by the initial position shown in FIG. With respect to the seat body 5〇1 of the base 50, it is slid to the position of the adjustment—the adjusted position, whereby the photomask can be finely adjusted to the first direction μ 1 兀* early//0. Tune, the location. In addition, the first adjustment plate 51 is to be returned to the initial position t to rotate the rotation portion 519 of the first adjustment member 517, so that the limit is 5: the side of the plate 5° 2, and after moving forward, The first adjusting plate 51 can be brought back to the initial position by the second adjusting mechanisms 53, 55. As shown in FIG. 11 and FIG. 12, when the reticle is to be adjusted, the first direction displacement (four) 旋转 the rotation portion 541 of the first adjustment member 539 is rotated clockwise, and the second direction indicated by the seven arrows is as shown in FIG. The push will cause the first core (four) first-adjustment plate such as the block 534 to be adjusted from the initial position (four) of the first mechanism 55 shown in FIG. 11 relative to the first adjustment plate 51, thereby You can move the two body 5: to the position you want to adjust to Figure 12. In the second direction of the micro-start position, the ___ wire 531 is reset to the initial limit... abutting on the plate 531 along the direction of the arrow II to the _ shift #8, and then the second adjustment plate is moved, then The second adjustment drive 4 3 adjustment mechanism 55 is reset to the initial position. The plate 531 is as shown in FIG. 3 and FIG. 14 'to adjust the light sheet 7 to be displaced in a third direction 13 201102757 = firstly rotate the rotating portion of the fourth adjusting member 559 counterclockwise. The whole piece 559 is screwed... π乐四ψ 561 ^ 4 is indented into the rotating portion 561 and leaves the abutment at the convex two: position, then, the clockwise rotation of the third adjusting member 558 is rotated 561 'snail; f at 560 will be quotient m _ The tenon w pushes the third adjustment plate (5) by the initial position ί shown in Fig. 13: the rotation axis A (Fig. 5) is along the third direction as indicated by the arrow IV with respect to the = adjustment plate, the plate body 533 Rotating to an adjusted & third adjustment plate 551 shown in the figure will simultaneously drive the carrier plate 554 to rotate, thereby fine-tuning the first cover 7 along the third direction to the position to be adjusted == whole plate 551 complex (four) primary pure material, first material (four) to the third adjusting member of the rotating portion 561, so that the limiting portion (6) on the side of the plate member 543, by the return spring 569 (as shown in Figure 5) of the reset elastic force, The third slab 551 can be driven to bring the carrier plate 554 back to the initial position. As shown in FIG. 13 and FIG. 15, when the light sheet 7 is to be displaced in a fourth direction, the reverse time is reversed. The rotating portion 561 of the (four) three adjusting member is screwed so that the screw portion of the first piece 558 is retracted into the rotating portion 561 and is separated from the position of the convex arm 563, and then the fourth adjusting piece of milk is rotated clockwise. The rotating portion 5 61 'screw 5 6 0 will push the convex arm of the third adjusting plate 551 in the direction of the arrow v + from the direction of the arrow & the third adjusting plate 551 will be rotated by the initial position shown in FIG. The axis A (as shown in FIG. 5) is rotated relative to the plate body 533 of the second adjustment plate 531 to an adjusted position shown in FIG. 15 along the fourth direction indicated by the arrow %, and the third adjustment plate 551 is simultaneously The carrier plate 554 is rotated, whereby the reticle 7 can be adjusted along the fourth direction __. In addition, when the third adjustment plate 551 is to be reset to the initial position, the fourth adjustment is counterclockwise 14 201102757 The rotating portion 561 ′ of the whole piece 559 abuts the limiting portion 562 on one side of the plate member 543. The third adjusting plate 551 can drive the carrier plate 554 to be reset by the return elastic force of the return spring 569 ( FIG. 5 ). To the initial position. Design of the first, second, and third adjustment mechanisms 51, 53, 55 by the position adjustment device 5. The reticle 7 can have three degrees of freedom of displacing the second direction displacement in the first direction and rotating (the third and fourth direction displacements) about the rotation axis A, whereby the reticle 7 can be used before the exposure operation is performed. Accurately aligning with the workpiece 6 to be exposed (such as mesh 3) at the end of the telescopic device 3, so that the preset pattern on the reticle 7 can be accurately transferred onto the workpiece 6 to be exposed. In particular, In this embodiment, the first direction may also be defined as the Y direction of the pedestal, and the second direction may also be defined as the ninth adjustment plate 51 再, and the third adjustment member Mg may be separately designed according to actual needs. Or the fourth adjustment member 559 is not limited to the design manner in which the third and fourth adjustment members 558 and 559 are provided in the embodiment. Moreover, the photomask 7 can also be directly mounted and fixed on the top surface of the third adjustment plate 551 as shown in FIG. 16, and is not limited to the photomask 7 being the transmission carrier plate 554 and the mounting bracket 552 being disposed on the third adjustment plate 551. The design method. In summary, in the exposure machine 2 of the present embodiment, the first, second, and third adjustment mechanisms si, 55 of the position adjusting device 5 are designed such that the photomask 7 has a displacement in the first direction. The two-direction displacement and the two degrees of freedom of rotation about the rotation axis A, whereby the reticle 7 can be accurately aligned with the workpiece 6 to be exposed at the top of the telescopic device 3 (Fig. 3) before the exposure operation is performed. The action enables the predetermined pattern on the mask 7 to be accurately transferred onto the workpiece 6 to be exposed, so that the object of the present invention can be achieved. 15 201102757 The above description is only a preferred embodiment of the present invention, and the scope of the invention is not limited thereto, that is, the simple equivalent change of the scope of the invention and the description of the invention is Modifications are still within the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a general exposure machine; FIG. 2 is a schematic view similar to FIG. 1 illustrating a telescopic device for moving a workpiece to be exposed upward to flatten the reticle; FIG. 3 is a position adjustment device of the present invention; An exploded perspective view of a preferred embodiment of the exposure machine illustrating the positional relationship between the telescopic device, the workpiece to be exposed, the position adjustment device, the reticle, and the exposure head; FIG. 4 is an exposure machine of the present invention having a position adjustment device FIG. 5 is an exploded perspective view of a position adjusting device of a preferred embodiment of the exposure machine having a position adjusting device of the present invention; FIG. 6 is an exposure of the position adjusting device of the present invention. 3 is an exploded perspective view of a position adjusting device of a preferred embodiment of the machine; FIG. 7 is a bottom view of the position adjusting device of a preferred embodiment of the exposure machine with position adjusting device of the present invention, illustrating the first The rod is engaged with the engaging hole portion of the first mounting hole; FIG. 8 is a position adjustment of a preferred embodiment of the exposure machine with position adjusting device of the present invention; FIG. 9 is a side view of the position adjusting device of the embodiment of the present invention with a position adjusting device. FIG. 9 is a side view of the position adjusting device of the embodiment of the present invention. 1 is a side view similar to that of FIG. 9, illustrating that the first adjustment member urges the first adjustment plate to slide relative to the base in a first direction; FIG. 11 is a position of the present invention; A side view of a position adjusting device of a preferred embodiment of the exposure machine of the adjusting device, illustrating the second adjusting plate in an initial position; FIG. 12 is a side view similar to FIG. n, illustrating that the second adjusting member drives the second adjusting plate first The direction is relative to the first adjustment plate; FIG. 13 is a plan view of the position adjustment device of the preferred embodiment of the exposure machine with position adjustment device of the present invention, illustrating the third adjustment plate in the initial position; FIG. 14 is a similar view. 13 is a top view, illustrating that the third adjustment member drives the third adjustment plate to rotate relative to the second adjustment plate in the third direction; FIG. 15 is a top view similar to FIG. 13 illustrating that the fourth adjustment member drives the third adjustment plate The fourth direction is rotated relative to the second adjustment plate; and FIG. 16 is a plan view of the position adjustment device of the preferred embodiment of the exposure machine having the position adjustment device of the present invention, illustrating that the photomask can also be directly mounted and fixed in the third Adjust the board. & 17 201102757 532 .......the second sliding member 535 .... cylindrical convex portion 536, 556. · perforation 539 .... second adjustment member 543 .. ..... Plate [Main component symbol description] 200 ....... Exposure machine 2 .......... Machine table 3 .......... Telescopic device 4 ..........exposure head 5 .......... position adjustment device 50··· base 501 - seat body 502, 521 · • plate 503, 514. • perforation 504 522· Screw hole 51 ··· 'First adjustment mechanism 510 · First adjustment plate 511 · 'First slide 512, 533 · Plate 513, 534 · Block 515, 537 · • a guide rail 516, 538. a second guide rail 517 . . a first adjustment member 518 , 540 · a screw 519 , 541 · a rotating portion 520 , 542 · a limiting portion 53 · · · a second adjustment mechanism 531 . Second adjustment plate 544 . . . • screw hole 545 . . . > first mounting hole 546 ' 565 · • through hole portion 547 ' 566 · • snap hole portion 55... ... • Third adjustment mechanism 551 . . . • Third adjustment plate 552... • Mounting bracket 553... • Stopper 554... • Carrier plate 555... • Card slot 557... • Round card slot 558.... Third adjustment member 559... • Fourth adjustment member 560... • Screw 561... • Rotating portion 562... • Limiting portion 563.... Protruding arm 564... • Second mounting hole 18 201102757 - 567... ...first rod 7 ... 568... •... Two-bar I' II 569... •...Reset magazine IV ' 570... -----^Hook A..·6 .............·Workpiece to be exposed...Photomask, III··Arrow V, VI arrow....... Rotary axis
1919