200918882 九、發明說明 【發明所屬之技術領域】 本發明係關於適用於檢測例如液晶玻璃的邊緣之缺損 或裂痕的邊緣感測器及使用此邊緣感測器之缺陷檢查裝置 【先前技術】 本發明者最先著眼於物體的邊緣之單色平行光的夫瑞 奈繞射（Fresnel diffraction)，提出了藉由對使用以預定 的間隔排列有複數個受光晶胞之線型感測器所檢測的光量 分佈圖案進行解析，能利用前述線型感測器之受光晶胞的 排列間隔以上的精度，來高精度地檢測前述物體的邊緣位 置（參照日本特許第3 85 8994號公報）。 又，針對液晶玻璃等的透明體或半透明體，也著眼於 前述夫瑞奈繞射，提出了高精度地檢測該邊緣位置之方法 (參照日本特開2007-6473 3號公報）。 【發明內容】 [發明所欲解決之課題] 但，當在玻璃體的邊緣，存在有缺損或裂痕時，在玻 璃體的內部之因前述缺損或裂痕所引起的缺陷部位，受到 所反射之光的影響。因此’從根據前述的夫瑞奈繞射之光 量分佈圖案，正確地檢測該邊緣一事極爲困難。並且’即 使將在邊緣存在有缺損或裂痕之玻璃體的邊緣位置，沿著 -4- 200918882 該邊緣一邊使線型感測器移動一邊進行檢測，也不容易正 確地檢測出邊緣位置的變化。因此，界定玻璃體中產生缺 損或裂痕之缺陷部位一事也極爲困難。 本發明是爲了解決上述情事而開發完成的發明，其目 的在於提供，針對從依據物體的邊緣之夫瑞奈繞射所產生 的光量分佈圖案，檢測前述物體的邊緣位置之邊緣感測器 ，能夠確實地檢測出例如液晶玻璃這種的在透明或半透明 的物體所產生的缺損或裂痕等的缺陷之邊緣感測器。 又，本發明之另一目的在於提供，使用前述邊緣感測 器，能夠精度良好地檢測例如液晶玻璃這種的在透明或半 透明的物體所產生的缺損或裂痕等的缺陷部位之缺陷檢查 裝置。 [用以解決課題之手段] 爲了達到前述目的，本發明之邊緣感測器係具備有： 以預定的間隔排列有複數個受光晶胞之線型感測器；朝此 線型感測器投射單色平行光之光源；及對前述線型感測器 的輸出進行解析，檢測定位於前述單色平行光的光路之物 體的特定位置（邊緣）的運算部的邊緣感測器， 前述運算部係由自由空間側搜尋例如前述線型感測器 的輸出，對在前述線型感測器上之光量分佈圖案進行解析 ，特別是具備有：BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an edge sensor suitable for detecting a defect or a crack of an edge of, for example, a liquid crystal glass, and a defect inspection device using the edge sensor. [Prior Art] The present invention The first is to focus on the Fresnel diffraction of the monochromatic parallel light at the edge of the object, and proposes the amount of light detected by using a line type sensor in which a plurality of light-receiving cells are arranged at predetermined intervals. The distribution pattern is analyzed, and the edge position of the object can be detected with high precision by the accuracy of the arrangement interval of the light-receiving unit cells of the line sensor (refer to Japanese Patent No. 3 85 8994). In addition, a transparent body or a translucent body such as a liquid crystal glass is also proposed in which the edge position is detected with high precision, and a method of detecting the edge position with high precision is proposed (refer to Japanese Laid-Open Patent Publication No. 2007-6473-3). [Problem to be Solved by the Invention] However, when there is a defect or a crack at the edge of the glass body, the defect portion due to the defect or crack in the inside of the glass body is affected by the reflected light. . Therefore, it is extremely difficult to correctly detect the edge from the light distribution pattern according to the aforementioned freonai diffraction. Further, even if the edge position of the vitreous body having the defect or the crack at the edge is detected along the edge of -4-200918882, the linear sensor is moved while detecting, and the change in the edge position is not easily detected. Therefore, it is extremely difficult to define defects in the vitreous that cause defects or cracks. The present invention has been made in order to solve the above-described circumstances, and an object of the invention is to provide an edge sensor for detecting an edge position of an object from a light amount distribution pattern generated by a franena diffraction of an edge of an object. An edge sensor such as a liquid crystal glass that defects such as defects or cracks generated by a transparent or translucent object is reliably detected. Moreover, another object of the present invention is to provide a defect inspection apparatus capable of accurately detecting a defect portion such as a liquid crystal glass such as a defect or a crack generated by a transparent or translucent object by using the edge sensor described above. . [Means for Solving the Problem] In order to achieve the above object, the edge sensor of the present invention is provided with: a line type sensor in which a plurality of light receiving unit cells are arranged at predetermined intervals; and a monochrome is projected toward the line type sensor a light source of parallel light; and an edge sensor for analyzing an output of the line sensor to detect a specific position (edge) of an object positioned in an optical path of the monochromatic parallel light, wherein the operation unit is free The space side searches for, for example, the output of the aforementioned line sensor, and analyzes the light quantity distribution pattern on the line sensor, in particular, having:
<A> 將從其一端部朝另一端部搜尋在透明或半透明 的物體的邊緣所產生的光量分佈圖案時的光量降低至第I -5- 200918882 光量閾値的位置作爲前述物體的第1檢測位置加以求取的 第1位置檢測手段，前述第1光量閾値是以在自由空間的 光量爲基準予以訂定的； <B> 將在所檢測的第1檢測位置起光亮進一步降低 後、再增加至以在前述自由空間的光量爲基準予以訂定的 第2光量閾値之位置作爲前述物體的第2檢測位置予以求 取的第2位置檢測手段。 再者，針對前述第1及第2光量閾値，亦可個別地進 行設定，但亦可賦予相同値。 又，本發明之缺陷檢查裝置係具備有前述結構的邊緣 感測器所構成之裝置，其特徵爲具備有： <a> 掃瞄手段，其是使前述邊緣感測器之前述線型 感測器沿著前述透明或半透明的物體的邊緣移動、或使透 明或半透明的物體沿著與前述邊緣感測器之線型感測器交 叉的方向移動； <b> 缺陷檢測手段，其是伴隨前述線型感測器或前 述物體的掃瞄，監視以前述邊緣感測器的前述第1及第2 位置檢測手段分別所檢測到的第1及第2檢測位置的變化 ，當第1或第2檢測位置的變化量超過預先所設定的閾値 時，執行發出警告類的預定的處理。 又，本發明之其他缺陷檢查裝置係具備前述結構的邊 緣感測器所構成者’其特徵爲：具備有： <〇 遮光寬度檢測手段，其是將以前述邊緣感測器 的前述第1及第2位置檢測手段分別所檢測到的第1及第 -6 - 200918882 2檢測位置的差作爲遮光寬度加以求取； <a> 掃猫手段，其是使前述邊緣感測器之前述 感測器沿著前述透明或半透明的物體的邊緣移動、或 明或半透明的物體沿著與前述邊緣感測器之線型感測 叉的方向移動；及 <d> 缺陷檢測手段，其是伴隨前述線型感測器 述物體的掃瞄，監視藉由前述遮光寬度檢測手段所求 遮光寬度，當該遮光寬度超過預先設定的閾値時，發 告。 順便一提，前述透明或半透明的物體爲玻璃板， 缺陷檢測手段之結構爲檢測前述玻璃板的邊緣之缺損 痕、及凹陷（使邊緣線變形之大的缺損），發出顯示 存在之警告。 [發明效果] 若根據前述結構的邊緣感測器的話，因從在物體 緣所產生之光量分佈圖案，將該光量降低至以在自由 的光量爲基準予以訂定的第1光量閾値之位置（光量 變化部位）作爲前述物體的第1檢測位置（例如邊緣 )進行檢測，並且因前述物體爲透明或半透明，如前 ，將在較所檢測到的第1檢測位置更靠近物體側所產 光量大的變化部位’作爲光量由前述第1檢測位置近 降低後、再增加至以在自由空間的光量爲基準予以訂 第2光量閾値之第2檢測位置進行檢測，所以，從這 線型 使透 器交 或前 取的 出警 前述 或裂 缺陷 的邊 空間 大的 位置 述般 生的 一步 定的 兩個 200918882 檢測位置的關係，能夠判別前述物體的邊緣有無缺陷。 即，當在物體的邊緣存在有缺損或裂痕等的缺陷之情 況，因這些缺陷造成透明或半透明的物體的內部之光的透 過作用產生變化，形成與在無缺陷的正常邊緣所產生之光 量分佈圖案不同的光量分佈圖案，所以，從前述2個檢測 位置容易判別此光量分佈圖案的變化。其結果，從前述2 個檢測位置的關係，容易判別物體的邊緣有無缺陷。 又，若根據本發明之缺陷檢查裝置的話’一邊使邊緣 感測器之前述線型感測器沿著前述透明或半透明的物體的 邊緣移動或一邊使透明或半透明的物體潮與前述邊緣感測 器之線型感測器交叉的方向移動，一邊分別求取前述第1 及第2檢測位置，再求取這些所檢測之檢測位置的傾向’ 所以，前述2個檢測位置的變化’能夠檢測到缺損或裂痕 之缺陷，並且可從檢測到缺陷時的前述檢測位置檢測部位 之資訊（掃瞄位置資訊）’容易藉定該缺陷的存在位置。 因此，既可著眼於在透明或半透明的物體的邊緣之光 量分佈圖案的變化，尙可簡單且容易地檢測前述物體的邊 緣之缺損或裂痕等的缺陷的存在，因此在實用性上具有極 大優點。 【實施方式】 以下，參照圖面，說明關於本發明的一實施形態之邊 緣感測器、使用此邊緣感測器之缺陷檢查裝置。<A> The amount of light when the light amount distribution pattern generated at the edge of the transparent or translucent object is searched from the one end portion toward the other end portion is lowered to the position of the first -5 - 200918882 light amount threshold 作为 as the first object The first position detecting means for determining the position, wherein the first light amount threshold 订 is defined based on the amount of light in the free space; <B> after the detected first detection position is further lowered, Further, the second position detecting means is obtained as the second detection position of the object by the position of the second light amount threshold 订 which is defined based on the amount of light in the free space. Further, the first and second light amount thresholds may be individually set, but the same 値 may be given. Further, the defect inspection device of the present invention includes the device comprising the edge sensor having the above configuration, and is characterized in that: <a> a scanning means for causing the line sensor of the edge sensor Moving along the edge of the aforementioned transparent or translucent object, or moving the transparent or translucent object in a direction crossing the line sensor of the edge sensor; <b> defect detecting means, which is Monitoring the change of the first and second detection positions detected by the first and second position detecting means of the edge sensor described above, along with the scanning of the line sensor or the object, when the first or the second (2) When the amount of change in the detected position exceeds the threshold set in advance, a predetermined process of issuing a warning is executed. Further, the other defect inspection apparatus of the present invention includes the edge sensor of the above configuration, and is characterized in that: the <〇 shading width detecting means is the first one of the edge sensors; And the difference between the detected position of the first and the -6th - 200918882 2 detected by the second position detecting means is obtained as the light blocking width; <a> the sweeping means is to make the aforementioned feeling of the edge sensor The detector moves along the edge of the aforementioned transparent or translucent object, or the bright or translucent object moves in the direction of the linear sensing fork with the edge sensor; and <d> the defect detecting means, which is With the scanning of the object described by the linear sensor, the light-shielding width is monitored by the light-shielding width detecting means, and when the light-shielding width exceeds a predetermined threshold, it is reported. Incidentally, the transparent or translucent object is a glass plate, and the defect detecting means is configured to detect a defect mark on the edge of the glass plate and a defect (a defect in which the edge line is deformed greatly), and to issue a warning indicating the presence. [Effect of the Invention] According to the edge sensor of the above configuration, the amount of light is reduced from the light amount distribution pattern generated at the edge of the object to the position of the first light amount threshold set on the basis of the free light amount ( The light amount change portion is detected as the first detection position (for example, the edge) of the object, and since the object is transparent or translucent, as before, the amount of light generated closer to the object side than the detected first detection position Since the large amount of change is detected by the first detection position being reduced by the first detection position, and then increased to the second detection position where the second light amount threshold is set based on the amount of light in the free space, the linear type is used. It is possible to discriminate whether or not the edge of the object is defective by the relationship between the two positions of the 200918882 detection position in which the front or the front of the crack is large. That is, when there are defects such as defects or cracks at the edge of the object, the transmission of light inside the transparent or translucent object is changed by these defects, and the amount of light generated at the normal edge without defects is formed. Since the light amount distribution patterns having different patterns are distributed, it is easy to discriminate the change in the light amount distribution pattern from the above two detection positions. As a result, it is easy to determine whether or not the edge of the object is defective from the relationship between the two detection positions. Further, according to the defect inspection apparatus of the present invention, the side line sensor of the edge sensor is moved along the edge of the transparent or translucent object or the side of the transparent or translucent object is wetted with the edge feeling. When the linear sensor of the measuring device moves in the direction of intersection, the first and second detection positions are respectively obtained, and the tendency of the detected detection positions is determined. Therefore, the change of the two detection positions can be detected. A defect of a defect or a crack, and the information of the detection position (scanning position information) of the aforementioned detection position at the time of detecting the defect is easy to deny the existence position of the defect. Therefore, it is possible to focus on the change in the light amount distribution pattern at the edge of the transparent or translucent object, and it is possible to easily and easily detect the presence of a defect such as a defect or a crack of the edge of the object, and thus it is extremely practical. advantage. [Embodiment] Hereinafter, an edge sensor according to an embodiment of the present invention and a defect inspection device using the edge sensor will be described with reference to the drawings.
圖1是檢測例如液晶玻璃等的透明或半透明的物體A -8- 200918882 的特定位置（例如邊緣位置）之邊緣感測器1 〇，及一邊 對利用此邊緣感測器1 0所檢測之前述物體A的位置檢測 對象部位進行掃瞄，一邊監視前述邊緣感測器1 〇的輸出 ，前述物體A之有無缺陷的缺陷檢查裝置之槪略構成圖 〇 此邊緣感測器1 0的結構爲具備有：將複數個受光晶 胞以預定間距排列於直線上之線型感測器1 1 ;朝此線型 感測器1 1投射單色平行光之光源1 2 ;將線型感測器與光 源隔著預定的距離予以對向配置之光學頭1 3 ;及對前述 線型感測器1 1的輸出進行解析，檢測被放置於前述單色 平行光的光路中之物體A的特定位置（例如邊緣位置） 之運算器14。 再者，關於光學頭13的基本構造（結構），如前述 的日本專利第3 8 5 8994號公報、日本特開2007-64733號 公報等所記載。又，利用前述邊緣感測器1 0之前述物體 A的位置檢測對象部位之掃瞄是藉由使前述邊緣感測器 1 〇之前述線型感測器1 1 (光學頭1 3 )沿著前述透明或半 透明的物體A的邊緣移動來進行的。或相反地藉由使前 述透明或半透明的物體A朝與前述邊緣感測器1 0之線型 感測器1 1交叉的方向，具體而言，與複數個受光晶胞的 排列方向交叉的方向移動，來進行該掃瞄。 又，前述運算器14爲藉由例如CPU來實現者，對在 前述的物體A的邊緣所產生之於前述線型感測器1 1上的 光量分佈圖案，從該線型感測器1 1的輸出進行解析，來 -9- 200918882 算出前述物體A的特定位置（包含例如邊緣位置之後述 的第1及第2檢測位置）之功能15 ’ 1 6。在此，前述光 量分佈圖案，一般爲在前述單色平行光所產生之夫瑞奈繞 射的圖案。 順便一提，前述運算器1 4之結構，基本上是當將未 受到前述物體A所遮蔽之自由空間的前述線型感測器1 1 之受光量標準化成爲〔1〕時，在前述光量分佈圖案的豎 立部分，以該受光量成爲〔0.25〕之位置作爲前述物體A 的檢測位置（邊緣位置）進行檢測者。換言之，前述運算 器14係在因前述夫瑞奈繞射之光量分佈圖案上，將該光 量成爲以在自由空間的光量〔1〕作爲基準所訂定之預定 的光量閾値〔〇 · 2 5〕之位置作爲物體A的特定位置（邊緣 位置）進行檢測者。 本發明係著眼於，作爲檢測對象之物體A爲透明或 半透明，前述線型感測器1 1的輸出例如圖2所示，不僅 在物體A未被定位的自由空間的受光量多，即使在前述 物體A已被定位的部分，透過該物體A之單色平行光也 到達線型感測器1 1 ’所以，其受光量多。又，在物體A 爲遮光體之情況，著眼於：在邊緣部分，受光量不會大幅 降低，但在物體A爲透明或半透明之情況，僅在物體A 的邊緣部分’受到夫瑞奈繞射的影響，該受光量會某種程 度降低。並且’當在前述物體A的邊緣存在有缺損或裂 痕等的缺陷之情況，著眼於：會受到該缺陷部分之前述單 色平行光的無規之繞射、折射、散亂反射等的影響。在此 -10- 200918882 情況，比起在直線狀的邊緣（刀狀邊緣）產生夫瑞奈繞射 之情況，前述受光量降低（低落）部位之寬度變廣。 即’將使用光學頭1 3檢測作爲透明物體之液晶玻璃 的檢測位置時的線型感測器1 1的輸出’分別如圖3 ( a ) 〜（d )所示，依據在前述液晶玻璃的邊緣是否存在有缺 陷，會使得在其受光量的分佈圖案產生差異。再者’圖3 (a) 爲未存在有缺陷的邊緣部分之受光分佈圖案’圖3 (b) 爲在邊緣部分存在有微小的缺損時的受光分佈圖案 ，圖3(c)爲在邊緣部分存在有裂痕時的分佈圖案’圖3 (d )爲在邊緣部分存在有因缺損所引起之凹陷時的分佈 圖案。 如圖3 ( a )〜（d )分別所示的受光量的分佈圖案所 顯示，比起在物體A的邊緣未存在有缺陷之情況，在缺 損或裂痕等的缺陷存在之情況時，在邊緣部分之光量的低 落變大，且光量的低落之寬度變廣。但，在自由空間側所 檢測到的光量的低落位置，不受有無缺陷影響，幾乎不會 產生變化。又，在物體側所檢測到的光量的低落位置，會 因缺陷的種類、程度而產生大幅度變化，且其低落型態（ 光量變化的圖案）也會產生各種變化。又，在檢測位置存 在有缺陷之情況，在本來光會大致一樣透過之物體A側 的受光量上會產生大的分佈。 因此，在本發明之邊緣感測器1 〇，具備有第1位置 檢測手段1 5並且具備有第2位置檢測手段1 6。該第1位 置檢測手段1 5係當從未定位有前述物體A之自由空間側 -11 - 200918882 搜尋前述線型感測器11的輸出時’從因在前述物體A的 邊緣所產生的夫瑞奈繞射造成光量急遽地降低的部分’求 取前述物體A的第1檢測位置α。而第2位置檢測手段 16係求取前述物體Α的第2檢測位置/3 ’該第2檢測位 置/3爲當從利用該第1位置檢測手段1 5所求出的第1檢 測位置α，受光量進一步降低後，受光量再次增加的位置 〇 順便一提，在此實施形態，例如受光量由在自由空間 側之標準化光量〔1.0〕降低至〔0.825〕爲止的位置，即 ，降低至預先所設定的第1及第2光量閾値的位置作爲前 述第1及第2檢測位置α，/3，分別進行檢測者。再者， 在此，關於第1及第2光量閾値，設定成相同値〔0.825 〕，但亦可設定成爲相互不同的値。又，在此實施形態， 特別是藉由從自由空間側捜尋前述線型感測器1 1的輸出 ，不會受到因缺陷造成在物體Α側所產生之受光量的不 規則之變化所影響，可分別確實地檢測出界定對應於物體 A的檢測位置（邊緣位置）之受光量的低落部分所必要之 第1及第2檢測位置α0。但，亦可從物體a側捜尋 前述線型感測器1 1的輸出。又，亦可在進行受光量的標 準化之際，預先在未設置物體A之狀態下，測定並記憶 在自由空間的光量，在進行檢測之際，亦可根據該所測定 並記憶在自由空間的光量進行標準化，亦可從檢測結果， 將受光量的降低小之區域作爲自由空間。 使用以這樣的邊緣感測器1 〇所檢測到的物體A的檢 -12- 200918882 測位置（第1及第2檢測位置α，/3 )之資訊進行前述物 體A的缺陷檢查之缺陷檢查裝置，係具備有：將利用前 述光學頭1 3之物體A的檢測位置的檢測對象部位’沿著 該物體A的邊緣移動之掃瞄手段（掃瞄機構）21。此掃 瞄手段2 1，亦可爲具有使物體A沿著其邊緣平行移動的 功能之物體支持機構（未圖示），相反地亦可爲，使前述 的光學頭1 3沿著前述物體A的邊緣平行移動之頭移動機 構（未圖不）。即，掃猫手段21，亦可爲使物體A朝與 線型感測器 U交叉的方向平行移動者，相反地亦可爲， 使線型感測器1 1沿著物體A的邊緣平行移動者。 除了這樣的掃瞄手段21，前述缺陷檢查裝置尙具有 缺陷檢測手段（傾向判別手段）22，該缺陷檢測手段係伴 隨前述位置檢測對象部位之掃瞄，依次執行利用前述運算 器（CPU ) 1 4之前述的第1及第2檢測位置α ，/3的檢測 處理，監視該輸出（第1及第2檢測位置α，0 )之變化 ，藉此檢測物體Α的邊緣有無缺損或裂痕等的缺陷。再 者，在此實施形態，將藉由前述邊緣感測器1 0所檢測到 的第1及第2檢測位置α ，yS的資訊暫時記憶到記憶體 23後，將第1及第2檢測位置的變化圖案（變化的傾向 )讀出於前述缺陷檢測手段22，提供進行缺陷檢查。 然後，在前述缺陷檢測手段（傾向判別手段）22，當 例如前述的第1檢測位置α或第2檢測位置/3的變化寬度 超過預先所設定的容許寬度時，將此狀態判別「有缺陷」 。同時將判別爲「有缺陷」時的前述物體Α的缺陷檢查 -13- 200918882 部位（掃瞄位置）作爲缺陷存在部位進行檢測。再者，對 第1檢測位置〇：或第2檢測位置/3的變化寬度之容許寬度 是因應物體A的邊緣所要求之直線性的程度來進行設定 的。 又’前述缺陷檢測手段（趨勢判別手段）22亦可將 例如前述第1檢測位置α與前述第2檢測位置/3之差作爲 前述的光量分佈圖案之光量的低落寬度（遮光寬度）進行 檢測，監視當對前述物體Α的邊緣進行掃瞄時的前述檢 測位置α ，/3的差（光量的低落寬度）之變化。然後，當 檢測位置的差（光量的低落寬度）超過預先所設定的容許 値時，將其狀態判別爲「有缺陷」。即使在此情況，也將 判別爲「有缺陷」時的前述物體Α的缺陷檢查部位（掃 瞄位置）作爲缺陷存在部位進行檢測。再者，對前述檢測 位置的差（光量的低落寬度）之容許値是因應在物體 A 的邊緣所要求之直線性的程度加以設定。 在這樣的本缺陷檢查裝置，藉由前述的邊緣感測器 1 〇，對將透明或半透明的物體A的檢測位置作爲前述的 第1及第2檢測位置α，/3分別進行檢測，並且，一邊使 該位置檢測對象部位沿著該邊緣移動，一邊監視前述第1 及第2檢測位置α，0的變化狀況（變化的傾向）。因此 ，若根據本裝置的話，當檢測到超過預先所設定的容許値 之第1或第2檢測位置〇:，万的變化時，或第1檢測位置 α與第2檢測位置/3之差超過容許寬度時，能夠將此狀況 作爲物體Α的邊緣存在有缺損或裂痕等的缺陷予以確實 -14- 200918882 地檢測。又’同時若根據本裝置的話，能夠檢測在物體A 的邊緣中的哪一部位是否存在有缺損或裂痕等的缺陷。 圖4 ( a )是顯示以具有缺損的液晶玻璃爲例進行邊 緣檢測時之第1及第2檢測位置〇；，/3的變化的狀況。在 這個例子’關於第1檢測位置〇；，幾乎未看到有任何變化 ’但關於第2檢測位置点，在相當於缺損的部分之寬度範 圍上可看到大變化。又，圖4(b)是顯示以具有裂痕的 液晶玻璃爲例進行邊緣檢測時之第1及第2檢測位置α， 的變化的狀況。在這個例子，關於第1檢測位置α，也 幾乎未看到有任何變化，但關於第2檢測位置/3，也在相 當於裂痕的部分之寬度範圍上可看到大變化。 又，圖4 ( c )是顯示以因缺損所引起之凹陷的液晶 玻璃爲例進行邊緣檢測時之第1及第2檢測位置α，沒的 變化的狀況。在這個例子，關於第1檢測位置α，在凹陷 部分可看到若干變化，但，關於第2檢測位置万，相當於 凹陷部分之寬度範圍上可看到大變化。再者，圖5(a) 〜（c )分別爲對應於圖4 ( a )〜（c )者之圖，以邊緣 感測器1〇或半透明體A的移動量作爲横軸，顯示第1及 第2檢測位置α，/3的變化的狀況。即使如此顯示邊緣檢 測結果，也可看到與前述圖4 ( a )〜（c )所示的變化狀 況相同之傾向。 因此，前述般，若依據使用加上在一般的邊緣感測器 所檢測之第1檢測位置α ’並檢測第2檢測位置々之本發 明之邊緣感測器1 0 ’監視對物體Α的邊緣進行掃瞄時的 -15- 200918882 前述第1及第2檢測位置α ，0的變化的狀況之本發明之 缺陷檢查裝置的話，能夠確實地檢測出在液晶玻璃等的物 體Α的邊緣所產生之缺損或裂痕等的微小缺陷。並且， 因針對前述缺陷的存在部位也能進行檢測，所以，在管理 例如液晶玻璃的品質’其實用性極爲優良。 又’在檢測缺陷之情況，期望執行因應該情況之預定 的動作。作爲預定的動作，進行發出例如警告、警報這樣 的動作指示，或另外設置由製程除去不良物體A之除去 裝置，相對於此，採取進行執行該除去處理的主旨之指示 等的手段即可。藉此，可容易地進行向存在有缺陷之製品 的對應。 又，當物體A的邊緣存在有缺損或裂痕等的缺陷時 ，如參照圖3 ( a )〜（d )進行過的說明般，即使在物體 A側，會產生受光量的變化。因此，在保證透明或半透明 的物體A不會產生髒污，又，在該物體A部分（物體內 部）之光量穩定的這種情況時，亦可預先求取例如正常物 體A的內部側之如圖3 ( a )所示的光量分佈，將作爲檢 查對象之物體A的內部側的光量分佈與前述光量分佈進 行比較，來進行缺陷檢查。又，亦可如圖3 ( b )〜（d ) 分別所示地加以求取作爲檢查對象之物體A的內部側的 光量分佈，當與圖3(a)所示之正常物體A的光量分佈 不同時，將此狀況判別爲缺損或裂痕等的缺陷存在。又’ 若將此方法與判別前述的第2檢測位置的變化之方法並用 的話，能夠更進一步進行物體A的邊緣之微小缺陷的檢 -16- 200918882 測。 再者，本發明不限於前述實施形態。例如在檢測第1 及第2檢測位置a，yS時之第1及第2光量閾値’不限於 前述的〔0.825〕，因應檢測在邊緣無缺陷的透明或半透 明的物體A的檢測位置時的邊緣部分之光量的低落程度 予以設定即可。又，關於利用線型感測器1 1之檢測寬度 ，因應線型感測器11與物體A之距離（工作距離）等加 以定定即可。另外，在不超出本發明之技術思想的範圍內 可進行各種變更並予以實施。 【圖式簡單說明】 圖1是顯示本發明的一實施形態之邊緣感測器及缺陷 檢測裝置之槪略構成圖。 圖2是顯示利用線型感測器之光量分佈圖案與在前述 邊緣感測器進行檢測的檢測位置之關係的圖。 圖3是對比顯示邊緣有無缺陷與其種類所變化之光量 分佈圖案的變化之圖。 圖4是顯不半隨檢查部位之掃猫，第1及第2檢測位 置的變化的狀況之圖。 圖5是顯示第1及第2檢測位置對邊緣感測器或半透 明體的移動量之變化的狀況之圖。 【主要元件符號說明】 1 〇 :邊緣感測器 -17- 200918882 1 1 :線型感測器 1 2 :光源 1 3 :光學頭 14 :運算器（CPU ) 1 5 :第1位置檢測手段 1 6 :第2位置檢測手段 2 1 :掃瞄手段（掃瞄機構） 22 =缺陷檢測手段（趨勢判別手段） 2 3 :記憶體 -18-1 is an edge sensor 1 检测 for detecting a specific position (for example, an edge position) of a transparent or translucent object A -8- 200918882 such as liquid crystal glass, and one side is detected by the edge sensor 10 The position detecting target portion of the object A is scanned, and the output of the edge sensor 1 监视 is monitored, and the outline of the defect detecting device for the object A is formed. The structure of the edge sensor 10 is A linear sensor 1 1 for arranging a plurality of light-receiving cells at a predetermined pitch on a straight line; a light source 1 2 of monochromatic parallel light is projected toward the line sensor 1 1; and the line sensor is separated from the light source An optical head 13 disposed oppositely at a predetermined distance; and an output of the line sensor 11 is detected to detect a specific position (for example, an edge position) of the object A placed in the optical path of the monochromatic parallel light The operator 14. In addition, the basic structure (structure) of the optical head 13 is described in the above-mentioned Japanese Patent No. 3,859,994, and JP-A-2007-64733. Further, the scanning of the position detecting target portion of the object A by the edge sensor 10 is performed by causing the line sensor 1 1 (optical head 13) of the edge sensor 1 to be along the foregoing The edge of the transparent or translucent object A is moved. Or conversely, by causing the transparent or translucent object A to cross the direction of the line sensor 11 of the edge sensor 10, specifically, the direction intersecting the arrangement direction of the plurality of light receiving cells Move to perform the scan. Further, the arithmetic unit 14 is realized by, for example, a CPU, and outputs the light amount distribution pattern generated on the line sensor 1 at the edge of the object A as described above from the line sensor 1 1 . In the analysis, -9-200918882 calculates the function 15' 16 of the specific position of the object A (including, for example, the first and second detection positions described later at the edge position). Here, the light amount distribution pattern is generally a pattern of the franena produced by the monochromatic parallel light. Incidentally, the configuration of the arithmetic unit 14 is basically the light amount distribution pattern when the light receiving amount of the line sensor 1 1 which is not freed by the object A is normalized to [1]. The upright portion is detected by the position at which the received light amount is [0.25] as the detection position (edge position) of the object A. In other words, the arithmetic unit 14 is based on the light amount distribution pattern of the franena diffraction, and the light amount is a predetermined light amount threshold [〇·25] which is defined based on the light amount [1] in the free space. The position is detected as a specific position (edge position) of the object A. The present invention is directed to the fact that the object A to be detected is transparent or translucent, and the output of the line sensor 11 is as shown in Fig. 2, not only in the free space in which the object A is not positioned, but also in the amount of light received, even in The portion of the object A that has been positioned, the monochromatic parallel light that has passed through the object A also reaches the line sensor 1 1 ', so that the amount of light received is large. Further, in the case where the object A is a light-shielding body, attention is paid to the fact that the amount of received light is not greatly reduced at the edge portion, but in the case where the object A is transparent or translucent, only the edge portion of the object A is subjected to the freon. The amount of light received will be somewhat reduced by the effect of the shot. Further, when there is a defect such as a defect or a crack at the edge of the object A, attention is paid to the random diffraction, refraction, scattered reflection, and the like of the monochromatic parallel light of the defect portion. In the case of -10-200918882, the width of the portion where the amount of received light is lowered (lower) becomes wider than when the fringe is generated at the edge of the straight line (the blade edge). That is, 'the output of the line sensor 1 when the detection position of the liquid crystal glass as the transparent object is detected using the optical head 13' is shown in Figs. 3(a) to (d), respectively, depending on the edge of the liquid crystal glass. Whether or not there is a defect causes a difference in the distribution pattern of the amount of received light. Further, 'Fig. 3 (a) is a light-receiving pattern of the edge portion where no defect exists. FIG. 3 (b) is a light-receiving pattern when there is a minute defect in the edge portion, and FIG. 3(c) is at the edge portion. The distribution pattern when there is a crack is shown in Fig. 3 (d) as a distribution pattern when there is a depression due to a defect at the edge portion. As shown in the distribution pattern of the received light amount shown in Fig. 3 (a) to (d), compared with the case where there is no defect at the edge of the object A, in the case where a defect such as a defect or a crack exists, the edge is present. The portion of the amount of light becomes large, and the width of the amount of light becomes wider. However, the position of the light detected on the free space side is not affected by the presence or absence of defects, and there is almost no change. Further, the position of the light detected on the object side is greatly changed depending on the type and degree of the defect, and the low-profile type (pattern in which the amount of light changes) also changes. Further, in the case where there is a defect in the detection position, a large distribution is generated in the amount of received light on the object A side through which the original light is substantially transmitted. Therefore, the edge sensor 1 of the present invention includes the first position detecting means 15 and includes the second position detecting means 16. The first position detecting means 15 is configured to search for the output of the aforementioned line sensor 11 when the free space side -11 - 200918882 of the object A is not positioned is searched for from the edge of the object A. The portion where the amount of light is drastically lowered by the diffraction 'determines the first detection position α of the object A described above. The second position detecting means 16 obtains the second detection position /3' of the object Α. The second detection position /3 is the first detection position α obtained from the first position detecting means 15. When the amount of received light is further lowered, the position at which the amount of received light is increased again is reduced. In this embodiment, for example, the amount of received light is reduced from the normalized amount of light on the free space side [1.0] to [0.825], that is, lowered to the The positions of the first and second light amount thresholds that have been set are detected as the first and second detection positions α and /3, respectively. In addition, although the first and second light amount thresholds are set to be the same 値[0.825], they may be set to be different from each other. Further, in this embodiment, in particular, by detecting the output of the line sensor 11 from the free space side, it is not affected by the irregularity of the amount of received light generated on the side of the object due to the defect. The first and second detection positions α0 necessary for defining the low portion of the received light amount corresponding to the detection position (edge position) of the object A can be surely detected. However, the output of the aforementioned line sensor 11 can also be searched from the object a side. In addition, when the amount of received light is normalized, the amount of light in the free space can be measured and stored in the state where the object A is not provided, and when it is detected, it can be measured and stored in free space. The amount of light is normalized, and from the detection result, the area where the amount of received light is reduced is regarded as a free space. Defect inspection apparatus for performing defect inspection of the object A using the information of the inspection position -12-200918882 (the first and second detection positions α, /3) of the object A detected by the edge sensor 1 这样A scanning means (scanning mechanism) 21 for moving the detection target portion 'the detection position of the object A of the optical head 13 along the edge of the object A is provided. The scanning means 2 1 may also be an object supporting mechanism (not shown) having a function of moving the object A in parallel along its edge, and conversely, the aforementioned optical head 13 may be along the aforementioned object A. The edge moves parallel to the movement of the head (not shown). That is, the sweeping means 21 may be such that the object A moves in parallel to the direction intersecting the line sensor U, and conversely, the line sensor 11 may be moved in parallel along the edge of the object A. In addition to the scanning means 21, the defect inspection apparatus 尙 has a defect detecting means (prone determination means) 22 which sequentially executes the use of the aforementioned arithmetic unit (CPU) 1 4 along with the scanning of the position detecting target portion. The detection processing of the first and second detection positions α and /3 described above monitors the change in the output (the first and second detection positions α, 0), thereby detecting defects such as defects or cracks at the edge of the object flaw. . Furthermore, in this embodiment, the first and second detection positions are temporarily stored in the memory 23 by the information of the first and second detection positions α and yS detected by the edge sensor 10. The change pattern (the tendency to change) is read out from the defect detecting means 22 described above to provide a defect check. Then, when the change width of the first detection position α or the second detection position/3 described above exceeds the allowable width set in advance, for example, the defect detection means (prone determination means) 22 discriminates the state as "defective". . At the same time, the defect inspection of the object 时 when it is judged as "defective" -13- 200918882 The position (scanning position) is detected as the defect existing portion. Further, the allowable width of the change width of the first detection position 〇: or the second detection position /3 is set in accordance with the degree of linearity required for the edge of the object A. Further, the defect detecting means (trend determining means) 22 may detect, for example, a difference between the first detecting position α and the second detecting position /3 as a low width (light blocking width) of the light amount of the light amount distribution pattern. The change in the aforementioned detection position α, /3 (the drop width of the light amount) when scanning the edge of the aforementioned object 。 is monitored. Then, when the difference in the detected position (the low width of the light amount) exceeds the allowable 値 set in advance, the state is judged as "defective". In this case, the defect inspection portion (scanning position) of the object Α when the "defective" is determined as "defective" is detected as the defect existing portion. Further, the allowable 値 of the difference in the detected position (the low width of the light amount) is set in accordance with the degree of linearity required at the edge of the object A. In the above-described defect inspection apparatus, the detection position of the transparent or translucent object A is detected as the first and second detection positions α, /3, respectively, by the edge sensor 1 ,, and The positional detection target portion is moved along the edge, and the change state (the tendency of change) of the first and second detection positions α, 0 is monitored. Therefore, according to the present apparatus, when the first or second detection position 超过: 10,000 is exceeded, or the difference between the first detection position α and the second detection position/3 is exceeded, When the width is allowed, this condition can be detected as a defect such as a defect or a crack at the edge of the object 确实. Further, according to the present device, it is possible to detect at any of the edges of the object A whether or not there is a defect such as a defect or a crack. Fig. 4 (a) shows a state in which the first and second detection positions 〇; /3 are changed when the edge detection is performed using the liquid crystal glass having a defect as an example. In this example 'about the first detection position 〇; almost no change is seen', but with regard to the second detection position point, a large change can be seen in the width range of the portion corresponding to the defect. Further, Fig. 4(b) shows a state in which the first and second detection positions α at the time of edge detection are taken as an example of the liquid crystal glass having cracks. In this example, almost no change is observed with respect to the first detection position α, but with respect to the second detection position /3, a large change is also seen in the width range of the portion corresponding to the crack. In addition, Fig. 4 (c) shows a state in which the first and second detection positions α at the time of edge detection by the liquid crystal glass which is recessed due to the defect are not changed. In this example, with respect to the first detection position α, a number of changes can be seen in the concave portion, but as for the second detection position, a large change is seen in the width range corresponding to the concave portion. 5(a) to (c) are diagrams corresponding to those of Figs. 4(a) to (c), respectively, with the amount of movement of the edge sensor 1〇 or the translucent body A as the horizontal axis, showing the The state of change of 1 and 2nd detection position α, /3. Even if the edge detection result is displayed as described above, the same tendency as the change shown in the above-mentioned Figs. 4 (a) to (c) can be seen. Therefore, as described above, the edge sensor 10' of the present invention monitors the edge of the object 依据 according to the use of the first detection position α' detected by the general edge sensor and detects the second detection position 々 In the case of the defect inspection device of the present invention in which the first and second detection positions α and 0 are changed in the case of scanning, it is possible to reliably detect the occurrence of the edge of the object such as liquid crystal glass. Minor defects such as defects or cracks. Further, since the detection can be performed on the portion where the defect is present, it is extremely excellent in practicality in managing, for example, the quality of the liquid crystal glass. Further, in the case of detecting a defect, it is desirable to perform a predetermined action in response to the situation. In the predetermined operation, an operation instruction such as a warning or an alarm is issued, or a removal device for removing the defective object A by the process is provided, and a means for performing an instruction to perform the removal process may be employed. Thereby, the correspondence to the defective product can be easily performed. Further, when there is a defect such as a defect or a crack at the edge of the object A, as described with reference to Figs. 3(a) to (d), a change in the amount of received light occurs even on the object A side. Therefore, in the case where the transparent or semi-transparent object A is not contaminated, and the amount of light in the object A portion (inside the object) is stabilized, for example, the inner side of the normal object A can be obtained in advance. As shown in Fig. 3 (a), the light amount distribution on the inner side of the object A to be inspected is compared with the light amount distribution described above to perform defect inspection. Further, as shown in Figs. 3(b) to (d), the light amount distribution on the inner side of the object A to be inspected can be obtained, and the light amount distribution of the normal object A shown in Fig. 3(a) can be obtained. At the same time, this condition is judged to be a defect such as a defect or a crack. Further, if this method is used in combination with the method of discriminating the change of the second detection position described above, it is possible to further detect the microscopic defect of the edge of the object A. Furthermore, the present invention is not limited to the above embodiment. For example, when the first and second detection positions a and yS are detected, the first and second light amount thresholds 値' are not limited to the above-mentioned [0.825], and the detection position of the transparent or translucent object A at the edge is detected. The degree of lightness of the edge portion can be set. Further, the detection width by the line sensor 1 1 may be determined in accordance with the distance (working distance) between the line sensor 11 and the object A. Further, various changes and modifications can be made without departing from the spirit and scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic block diagram showing an edge sensor and a defect detecting device according to an embodiment of the present invention. Fig. 2 is a view showing the relationship between the light amount distribution pattern of the line type sensor and the detection position detected by the aforementioned edge sensor. Fig. 3 is a graph showing a change in the light amount distribution pattern in which the edge is defective or not, and the type is changed. Fig. 4 is a view showing a state in which the first and second detection positions are changed in the scanning cat of the inspection site. Fig. 5 is a view showing a state in which the amount of movement of the edge sensor or the translucent body is changed by the first and second detection positions. [Main component symbol description] 1 〇: edge sensor-17- 200918882 1 1 : line sensor 1 2 : light source 1 3 : optical head 14 : arithmetic unit (CPU ) 1 5 : 1st position detecting means 1 6 : 2nd position detecting means 2 1 : Scanning means (scanning mechanism) 22 = Defect detecting means (trending discrimination means) 2 3 : Memory -18-