200914831 九、發明說明： 【發明所屬之技術領域】 本發明是有關於一種多功能非穩態微流體裝置，且特別 是有關於一種具有微型幫浦（micropump)、微混合器 (micromixer)、粒子分離器(particle separator)之多功能裝 置’其適於輸送二種以上的流體加以混合，並將流體内的懸 浮粒子予以分離’其中這些流體為液體，此裝置可完成生醫 〇 流體中混合試劑與分離微粒子的前置處理，結合生醫感測器成 為一完整之生醫檢測系統。 【先前技術】 近年來微機電製程技術被廣泛應用於各領域，而隨著微 機電製程技術的蓬勃發展，使得許多研究領域均有往微、奈米 空間尺度(scale)探討其特性之趨勢《目前世界各國均積極投入 研究生醫檢測領域’致力於結合微機電系統與生物醫學，期許 能夠將檢測系統微小化，研發出實驗室晶片（Lab-on-a-chip)或 微型全分析系統(micro-Total-Analysis-System，μ-TAS)，將整個 ϋ 生物檢測反應整合至單一晶片上。檢測晶片包括微流通道、反 應槽、感測電極)與資料輸出電路等部分，檢測程序則可分為 流體的前處理、混合、傳輸、分離和偵測等等。 在微型全分析系統中，微流體的前置處理是決定分析系 統效能的關鍵，然而以目前關於微流體系統的研究來說，大多 數還是著重在單一功能的探討，由於各種元件都有其操作條件 與需求，因此不容易整合在一起，例如，以微幫浦的功能來說， 當然是希望能提供的流量越大越好；對於微混合器來說，在適 200914831200914831 IX. Description of the Invention: [Technical Field] The present invention relates to a multifunctional non-steady-state microfluidic device, and more particularly to a micropump, a micromixer, and a particle A multi-function device of a particle separator that is adapted to transport two or more fluids to mix and separate suspended particles in a fluid, wherein the fluids are liquids, and the device can complete mixing reagents in the raw medical fluid Combined with the pre-treatment of the separated microparticles, the biomedical sensor becomes a complete biomedical detection system. [Prior Art] In recent years, microelectromechanical process technology has been widely used in various fields. With the vigorous development of microelectromechanical process technology, many research fields have their tendency to explore their characteristics in micro and nano scales. At present, all countries in the world are actively investing in the field of postgraduate medical research. "Committed to the integration of MEMS and biomedicine, it is expected to be able to miniaturize the detection system and develop a laboratory-on-a-chip or micro-analysis system (micro) -Total-Analysis-System, μ-TAS), which integrates the entire sputum bioassay reaction onto a single wafer. The detection chip includes a microfluidic channel, a reaction channel, a sensing electrode, and a data output circuit, and the detection process can be divided into pre-processing, mixing, transmission, separation, and detection of the fluid. In micro-full analysis systems, the pre-processing of microfluidics is the key to determining the performance of the system. However, most of the current research on microfluidic systems focuses on the discussion of single functions, because various components have their operations. Conditions and requirements, so it is not easy to integrate together. For example, in terms of the function of the micro-pull, of course, the larger the flow that you want to provide, the better. For the micro-mixer, it is suitable for 200914831.
當的流速之下且流場的擾動越大越好，才能夠有較好的混合效 果；但在生醫感測器方面，如微懸臂樑感測器等，則希望流速 及流場的擾動越小越好，以避免感測器因受到太多的干擾而失 去靈敏度，由此可見各個元件之_整合需要有良好的配合， 絕非只是料-功能的元件組合起來就能完成。此外，大多數 的兀件在開發時’為了追求其效能，往㈣擇最有利之製程技 術’但部造成各70件之間的製程技術往往不相容，舉例來說， 微粒子分離n的製作常會制聚二甲切姐(pDMs)來製作 微流道’但是PDMS卻不能通過微幫浦超過4〇〇〇c的陽極接合 製程，因此這二者的製程不容易整合。 由於微型全分析純的體積極何攜帶，且具有成本便 宜、精確度高及反應時間非常短可達快速檢驗等優點，因此不 管在電子、機械、化學分析或生物醫學等領域皆有相當重大的 價值。要成功製作出具有多魏的晶#，除了將各種不同功能 的兀件整合在—起之外，更魏及轉各元狀效能為前提。 „内容為開發可符合微型全分析系統流體前置處理需 求之多功能非穩態微流體裝置。 【發明内容】 離效果 法，其H再―、目的是提供—種流體前置處理的方 片上進行微料i述之多功能非穩態微流體裝置，在單一晶 刀析系統之流體前置處理，此處理方法包 200914831 括流體混合與粒子分離。 基於上述目的及其他目的，本發明提出一種多功能非 穩癌微流體裝置’其適於輸送二種以上的流體加以混合，並將 流體内賴浮粒子抑分離，此裝置可完成生醫紐帽合試 劑與分離微粒子的前置處理，並結合生醫感測器成為一完整之 生醫檢測系統。此多功能非穩態微流體裝置包括一本體以及一 振動元件，振動元件配置於本體之表面上。此本體具有多條 C 輸入流道、多個輸入腔室、一混合區、一混合流道、多個 二角形凸塊結構、一振動腔室、一擴散段、一輸送流道、一 分離區、多條輸出流道與多個輸出腔室。 本體之多個輸入腔室適合容納二相懸浮流體，此流體 可為液體。本體之多條輸入流道之一端與這些輸入腔室連 接’另一端與本體之混合區連接。本體之混合流道之一端 ^接混合區’另一端連接於本體之振動腔室。本體之這些 二角形凸塊結構交錯地配置於混合流道之相對的兩内壁 上。本體之漸縮塊配置於混合流道之内壁，其中漸縮塊之 ί. ，，振動腔的截面積小於遠離振動腔的截面積。本體之擴 散段之一端與振動腔室連接，另一端與輸送流道連接。本體 之^送流道之一端連接於擴散段，另一端連接於本體之分 離區。本體之多條輪出流道之一端與分離區連接，另一端 ，本體之這些輸出腔室連接。本體之分離區有—個入口端與 一=出口端，入口端為輸送流道，出口端則分別連接一中央輸 =机道與二侧雜出流道，其中侧邊輸出流道分列於中央輸出 机道兩側。輸出流道之一端與出口腔室連接，另一端與分 200914831 離區連接，其中側邊出口腔室分列於中央出σ腔室兩側， 出口腔室適於容納這些流體及粒子。 振動元件配置於本體之表面上，其中振動元件的位置 是對應於振動腔室。振動元件適於接收一電子訊號而產生 振動，並且經由此振動而改變振動腔室的容積，以將這些 流體自這些入口腔室泵吸至本體之出口腔室。 一 土本裝置乃是利用微型幫浦推動流體所具有之非穩態往復 流流場特性，再配合漸縮塊與分離區幾何外形設計，所發展 的一多功能微流體機制，此機制分為三部份，首先本裝置於 混合流道巾央配置-非對稱擋體，糊趙非_流流場特性 達到推動流_目的，其纽置了三個輸人流道，配合混合流 道中央之_繼軸三肖形凸塊結構，使得流體在流經非對 ，擋體前断以進行混合。最後是粒子分離部份，在非穩態流 場狀況下’流體在輸送流道流動時，微粒子會往流道二侧靠近。 治其次，當流體移動至分離區域時，會因截面積擴大而降 低流速，並在二側產生迴流區，此迴流區會將微粒子往分離區 ，側帶動’最後在中央輸出流道入口端會產生一對稱之渦旋流 場’在上述三種現象的配合下，可以有效達到分離微粒子的效 ，。結合上述三種設計，本多功能非穩態微流體裝置，能推動 伽·體，且混合二種以上的不同流體，並成功分離出流體内所含 之懸浮粒子。 在本發明之一實施例中，上述之本體包括一上基板以 及一下基板，其中上基板是配置於該下基板之一接合表面 上0 200914831 在本發明之一實施例中，上述之上基板具有一第一凹 案。第一凹陷圖案在上基板與下基板之間形成多條輸 入"《•道、多個輸入腔室、一混合區、一混合流道、多個三 角，凸塊結構、一振動腔室、一擴散段、一輸送流道、一分 離區、多條輸出流道與多個輸出腔室。 在本發明之一實施例中，上述之上基板具有一第一凹 =圖案，並且下基板具有一第二凹陷圖案。第一凹陷圖案 μ第^凹陷圖案在上基板與下基板之間形成多條輸入流 k、多個輸入腔室、一混合區、一混合流道、多個三角形 f塊結構、一振動腔室、一擴散段、一輸送流道、一分離區、 多條輪出流道與多個輸出腔室。 在本發明之一實施例中，上述之振動元件為一壓電薄 膜0 ，本购之__實施射，上狀多功能非穩態微流體 裝置更包括多個以上輸人腔室，配置於本體之入口端。 裝署之—實關巾，上述之多魏麵態微流體 裝置更^括夕個侧邊輸人流道，配置於本體之入口端。 本發明因將振動元件配置於本體之表面上，並且 段分別配置於振動腔室二側，因此當振 動可:使流體朝-固定方向流動， 朝固定之流動方向流動。:發有而之流體 一此合以’因此本發明__微萄浦所推動之= 200914831 ίϋίίίΓτ觀往錢料的魏，料流道在流經 非對柄擋體崎行混合，此料 體可以㈣赫鱗Μ最輪，衫發揮非 ===舰，_良好的齡效果，纽驗混合所需的 此外’本發明因具有一流體輸送流道、一中 形成一粒子分離區，因此本發明能:Under the flow rate and the greater the disturbance of the flow field, the better the mixing effect can be achieved; but in the case of biomedical sensors, such as microcantilever sensors, it is desirable that the flow rate and the disturbance of the flow field are more The smaller the better, to avoid the sensor losing sensitivity due to too much interference, it can be seen that the integration of each component requires a good fit, not just the combination of material-function components. In addition, most of the components are developed in order to pursue their performance, and (four) choose the most advantageous process technology'. However, the process technology between the 70 parts is often incompatible. For example, the fabrication of microparticle separation n It is often used to make micro-channels (pDMs) to make micro-channels, but PDMS can't pass the anodic bonding process of micro-pulls over 4〇〇〇c, so the process of the two is not easy to integrate. No matter in the fields of electronics, machinery, chemical analysis or biomedicine, it is very important because of the advantages of mini-analytically pure body and low cost, high precision and very short reaction time. value. To successfully produce a crystal with multiple Wei, in addition to the integration of various functional parts, it is premised on the performance of Wei and turn. „The content is to develop a multi-functional unsteady microfluidic device that can meet the fluid pre-processing requirements of the micro-analysis system. [Invention] The effect method, the H--, the purpose is to provide a fluid pre-processing on the square Carrying out a multi-functional unsteady microfluidic device described in the micro-material, in a fluid pre-treatment of a single crystal knife-discharging system, the processing method package 200914831 includes fluid mixing and particle separation. Based on the above and other objects, the present invention provides a The multifunctional unsteady cancer microfluidic device is adapted to transport two or more kinds of fluids to mix and separate the floating particles in the fluid, and the device can complete the pretreatment of the biomedical capping reagent and the separated microparticles, and The biomedical sensor is combined with the biomedical sensor to form a complete biomedical detection system. The multi-functional non-stationary microfluidic device comprises a body and a vibrating element, and the vibrating element is disposed on the surface of the body. The body has a plurality of C input channels a plurality of input chambers, a mixing zone, a mixing channel, a plurality of polygonal bump structures, a vibration chamber, a diffusion section, a conveying flow path, a separation zone, a plurality of output flow channels and a plurality of output chambers. The plurality of input chambers of the body are adapted to accommodate a two-phase suspension fluid, which may be a liquid. One of the plurality of input flow channels of the body is connected to the input chambers 'The other end is connected to the mixing zone of the body. One end of the mixed flow channel of the body is connected to the mixing zone, and the other end is connected to the vibration chamber of the body. The two-sided bump structures of the body are alternately arranged in the opposite phase of the mixed flow channel. On the inner wall of the two sides, the tapered block of the body is disposed on the inner wall of the mixing flow channel, wherein the cross-sectional area of the vibration cavity is smaller than the cross-sectional area away from the vibration cavity. One end of the diffusion section of the body is connected with the vibration chamber The other end is connected to the conveying flow channel. One end of the body is connected to the diffusion section, and the other end is connected to the separation zone of the body. One end of the plurality of wheel outlet channels of the body is connected with the separation zone, and the other end is the body. The output chambers are connected. The separation zone of the body has an inlet end and an = outlet end, the inlet end is a conveying flow channel, and the outlet end is respectively connected with a central transmission channel and two side mixed flow channels. The side output flow channels are arranged on both sides of the central output channel. One end of the output flow channel is connected to the outlet chamber, and the other end is connected to the sub-200914831, wherein the side outlet chamber is separated from the central σ chamber. On both sides, the outlet chamber is adapted to accommodate these fluids and particles. The vibrating element is disposed on the surface of the body, wherein the position of the vibrating element corresponds to the vibrating chamber. The vibrating element is adapted to receive an electronic signal to generate vibration, and via Vibrating to change the volume of the vibrating chamber to pump these fluids from the inlet chambers to the outlet chamber of the body. A soil-based device is a non-stationary reciprocating flow field characteristic of a fluid driven by a micro-pump. In combination with the geometric design of the tapered block and the separation zone, a multi-functional microfluidic mechanism is developed. This mechanism is divided into three parts. Firstly, the device is configured in a mixed flow channel, and the asymmetric block is asymmetrical. _ The characteristics of the flow field reach the driving flow _ purpose, which has three input flow channels, which cooperate with the three-axis convex block structure in the center of the mixed flow channel, so that the fluid flows through the non-pair To mix before breaking. Finally, the particle separation part, in the case of an unsteady flow field, when the fluid flows in the transport channel, the particles will approach the flow side. Secondly, when the fluid moves to the separation zone, the flow velocity is reduced due to the expansion of the cross-sectional area, and a recirculation zone is generated on both sides. The recirculation zone will drive the microparticles to the separation zone, and the side will be driven. Finally, at the entrance end of the central output flow channel. Producing a symmetrical vortex flow field', with the cooperation of the above three phenomena, can effectively achieve the effect of separating the microparticles. In combination with the above three designs, the multifunctional non-steady-state microfluidic device can push the gamma body and mix two or more different fluids, and successfully separate the suspended particles contained in the fluid. In an embodiment of the invention, the body includes an upper substrate and a lower substrate, wherein the upper substrate is disposed on a bonding surface of the lower substrate. 0 200914831 In an embodiment of the invention, the upper substrate has A first inconsistency. The first recess pattern forms a plurality of inputs between the upper substrate and the lower substrate, a plurality of input chambers, a mixing region, a mixed flow channel, a plurality of triangles, a bump structure, a vibration chamber, a diffusion section, a delivery flow path, a separation zone, a plurality of output flow channels and a plurality of output chambers. In an embodiment of the invention, the upper substrate has a first recess=pattern, and the lower substrate has a second recess pattern. The first recess pattern μ recess pattern forms a plurality of input streams k, a plurality of input chambers, a mixing region, a mixed flow channel, a plurality of triangular f-block structures, and a vibration chamber between the upper substrate and the lower substrate. a diffusion section, a delivery flow path, a separation zone, a plurality of wheel outlet channels and a plurality of output chambers. In an embodiment of the present invention, the vibrating element is a piezoelectric film 0, and the purchased multi-function unsteady microfluidic device further includes a plurality of input chambers, and is disposed on the piezoelectric film 0. The entrance end of the body. The installation of the real-purpose towel, the above-mentioned multi-wei surface microfluidic device is further integrated into the side of the input channel of the body. In the present invention, the vibrating element is disposed on the surface of the body, and the segments are respectively disposed on both sides of the vibrating chamber, so that the vibration can flow in the direction of the stationary direction and flow in the direction of the fixed flow. : The fluid that has been made is combined with this. Therefore, the invention is promoted by the __ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ It can be (4) the most round of the scales, the shirts play non-== ship, _ good age effect, and the required mixing of the mixture. In addition, the invention has a fluid transporting channel, and a particle separation zone is formed in one. The invention can:
==:，之流體本身所具有之非穩態往復流流 坊的^性’聽合粒子分離區之幾何設計，使得流體内所 含之粒子被分離至兩侧邊輸出流道。 Λ為讓本發明之上述和其他目的、特徵和優點能更明顯 易懂’下文特舉較佳實關，並g&合所關式，作詳細說 明如下。 、β 【實施方式】==:, the fluid itself has an unsteady reciprocating flow. The geometric design of the acoustic particle separation zone allows the particles contained in the fluid to be separated into the output channels on both sides. The above and other objects, features, and advantages of the present invention will become more apparent and <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; , β [embodiment]
圖1Α繪示為本發明之一實施例之多功能非穩態微流 體裝置的上視示意圖。圖1Β.示為圖1Ai剖面線Α_Α， 的剖面線示意圖。圖1C繪示為圖1Α之剖面線Β_Β，的剖 面線示意圖。圖1D為多功能非穩態微流體裝置實體圖。 請共同參照圖1A、IB、1C與1D， 多功能非穩態微流體裝置1〇〇適於將多種流體予以混 合，並將二相懸浮流體内之粒子予以分離，其中這些流體 可以為液體。多功能非穩態微流體裝置10〇主要包括一本 體200以及一振動元件3〇〇。本體2〇〇主要包括一上基板 2〇〇a以及一下基板2〇〇b，其中上基板200a配置於下基板 12 200914831 200b之接合表面202上，並且上基板2〇〇a與下基板2〇〇b 之材質例如為玻璃、矽晶片、壓克力、聚曱基丙烯酸曱酯 (PMMA)、聚二甲基矽氧烷(PDMS)或是其它類似的材質。 下基板200b具有一凹陷圖案，其位於下基板2〇〇b之 一接合表面202上，是以此凹陷圖案在上基板2〇〇a與下基 板200b之間會形成一個中央入口腔室21〇、二侧邊入口腔 室211、一中央輸入流道28〇、二側邊輸入流道28卜一混 合區240、一混合流道250、一漸縮塊251、多個三角形凸 塊結構252、一振動腔室220、一擴散段271、一輸送流道 270、一分離區260、一中央輸出流道282、二側邊輸出流 道283、一中央出口腔室230與二侧邊出口腔室231。 值得注意的是’本實施例並非用以限定本發明，在本 發明之其他實施例中，凹陷圖案更可以配置在上基板2〇〇a 上。另外，在本發明之其他實施例中，上基板2〇〇a與下基 板200b亦可以同時具有凹陷圖案。 中央入口腔室21〇與侧邊入口腔室211適於容納二相 懸浮流體’其中這些流體可以為液體。混合流道250之一 端與混合區240連接，而其另一端與振動腔室220連接。 擴散段271之一端與振動腔室22〇連接，而其另一端與輸 送流道270連接。 此外’雖然在本實施例中本體2〇〇内僅配置二侧邊入 口腔室211與二側邊輸入流道281，然而本實施例並非用 以限定本發明’在本發明之其他實施例中本體2〇〇更可以 具有多個相同數目側邊入口腔室211與側邊輸入流道281。 13 200914831 振動元件300配置於下基板200b之表面上，其中振 動疋件300的位置是對應於振動腔室220。振動元件3〇〇 例如是一壓電薄膜’其中振動元件300適於接受一電子訊 號以在震動方向D上產錄復的劾，而此電子訊號的波 开/例如疋方波或是其它可以使振動元件3〇〇在震動方向 D上產生往復震動的訊號波形。此外，雖然在本實施例中， 下基板200b之表面上僅配置一振動元件3〇〇，然而本實施 例並非用以限定本發明，在本發明之其他實施例中，上基 板200a表面上也可以具有振動元件。 在本實施例中，多功能非穩態微流體裝置更包括一個 中央注入管件290、二側邊注入管件29卜一中央輸出管件 292以及一個側邊輸出管件293，其中中央注入管件290 =貝穿上基板200a以與中央入口腔室21〇連通，侧邊注入 管件291是貫穿上基板200a與側邊入口腔室211連通，中 央輸出管件292是貫穿上基板2〇〇a以與中央出口腔室230 連，’側邊輸出管件293是貫穿上基板200a以與侧邊出口 腔至231連通。如此一來，當振動元件3〇〇接受到一電子 訊號而產生振動時，前述之不同的二相懸浮流體便可以分 另J筵由主入管件290與291而流入中央入口腔體210與侧 ，入口腔室211内，所有注入的二相懸浮流體可以在混合 區240與混合流道25〇内充份混合。此外，流體可以經由 中央輸出管件292排除至多功能非穩態微流體裝置1〇〇之 外’而粒子則可以經由側邊輸出管件293而被排除至多功 忐非穩態微流體裝置1〇〇之外，其中此多功能非穩態微流 14 200914831 體裝置之作動機制，將於下述段落中詳細的說明。 本裝置乃是利用微型幫浦推動流體所具有之非穩態往復 流流場特性’再配合漸縮塊、混合區與分離區之幾何外形設 計，所發展的-多功能微流體機制，此機制的功能可分為三 部份，首先本裝置於混合流道中央配置一非對稱播體，利用 流體非穩態流流場特性達到推動流體的目的，其次設置了三個 輸入流道，配合混合流道中央之非對稱擋體，並於^合流&二 f - 齡別設置三個交錯排列的凸塊’再配合非穩態流場，使得流 體在流經非_觀前就可先進行混合，此設計的優點是 二種待混合紐可關時流經鱗+的最钱，充分發揮非對 稱擋體後方流場迴流區的魏，達到良好的混合效果，有效縮 短混合所需的長度與時間。 、 最後是粒子分離部份，在麵驗場狀況下，流體流經 分離區時會有三個現象促使微粒子往二側輸出流道移動，首先 流體在輸送流道流動時，微粒子會往流道二側靠近。其次，當 流體移動至分離區域時’會因截面積擴大而降低流速，並在二 G 側產生迴流區，此迴流區會將微粒子往分離 在中央輸出流道入口端會產生一對稱之顯流場，^旋= 為-阻擋錄子前進之龍，造成巾央輸出流道喊面積縮減 與流阻提昇，且由於渦_旋轉方向是由巾央輸出流道往二側 輸出流道旋轉，因此可帶動微粒子往侧邊輸出流道前進，在上 述現象的配合下’可以有效達到分離微粒子的效果。結合 上述三種設計，本裝置能達成輸送流體，且混合二種以上的不 同流體，並成功分_二姆浮流_所含粒子之功能。 15 200914831 為了證明本發明確實可行，以下係對上述之多功能非 穩態微流體裝置進行試驗’並透過流場視察（fl〇w visualization)技術拍攝流道中流體運動與粒子移動之情 形’本多功能非穩態微流體裝置之流場特性將被可視化， 以解釋流體混合與微粒子分離的原因，工作流體為去離子 水。1 is a top plan view of a multi-functional non-stationary microfluidic device according to an embodiment of the present invention. Figure 1A is a cross-sectional view showing the section line Α_Α of Figure 1Ai. 1C is a cross-sectional view showing the section line Β_Β of FIG. Figure 1D is a solid view of a multifunctional non-stationary microfluidic device. Referring collectively to Figures 1A, IB, 1C and 1D, the multifunctional non-stable microfluidic device 1 is adapted to mix a plurality of fluids and to separate particles within the two-phase suspension fluid, wherein the fluids may be liquid. The multifunctional non-stationary microfluidic device 10A includes a body 200 and a vibrating element 3A. The main body 2〇〇 mainly includes an upper substrate 2〇〇a and a lower substrate 2〇〇b, wherein the upper substrate 200a is disposed on the bonding surface 202 of the lower substrate 12 200914831 200b, and the upper substrate 2〇〇a and the lower substrate 2〇 The material of 〇b is, for example, glass, ruthenium wafer, acrylic, phthalic acid acrylate (PMMA), polydimethyl siloxane (PDMS) or the like. The lower substrate 200b has a recessed pattern on one of the bonding surfaces 202 of the lower substrate 2b, such that a central inlet chamber 21 is formed between the upper substrate 2a and the lower substrate 200b in this recessed pattern. Two side inlet chambers 211, a central input flow channel 28, two side input channels 28, a mixing zone 240, a mixing channel 250, a tapered block 251, and a plurality of triangular bump structures 252, a vibration chamber 220, a diffusion section 271, a delivery flow channel 270, a separation zone 260, a central output flow channel 282, two side output flow channels 283, a central outlet chamber 230 and two side outlet chambers 231. It is to be noted that the present embodiment is not intended to limit the present invention. In other embodiments of the present invention, the recess pattern may be disposed on the upper substrate 2〇〇a. In addition, in other embodiments of the present invention, the upper substrate 2A and the lower substrate 200b may have a recess pattern at the same time. The central inlet chamber 21A and the side inlet chamber 211 are adapted to contain a two-phase suspension fluid' wherein the fluids may be liquid. One end of the mixing channel 250 is connected to the mixing zone 240, and the other end is connected to the vibration chamber 220. One end of the diffusion section 271 is connected to the vibration chamber 22A, and the other end thereof is connected to the delivery flow path 270. In addition, although in the present embodiment, only the two side inlet chambers 211 and the two side input channels 281 are disposed in the body 2, the present embodiment is not intended to limit the present invention' in other embodiments of the present invention. The body 2 can further have a plurality of identical number of side inlet chambers 211 and side input channels 281. 13 200914831 The vibrating member 300 is disposed on the surface of the lower substrate 200b, wherein the position of the vibrating element 300 corresponds to the vibrating chamber 220. The vibrating element 3 is, for example, a piezoelectric film 'where the vibrating element 300 is adapted to receive an electronic signal to produce a chirp in the direction of vibration D, and the wave of the electronic signal is, for example, a square wave or the like. The vibration element 3 is caused to generate a signal waveform of the reciprocating vibration in the vibration direction D. In addition, although only one vibrating element 3 is disposed on the surface of the lower substrate 200b in this embodiment, the present embodiment is not intended to limit the present invention. In other embodiments of the present invention, the upper substrate 200a is also on the surface. It may have a vibrating element. In the present embodiment, the multifunctional non-steady-state microfluidic device further includes a central injection tube member 290, two side injection tube members 29, a central output tube member 292, and a side output tube member 293, wherein the central injection tube member 290 = shell-through The upper substrate 200a is in communication with the central inlet chamber 21, and the side injection tube 291 is connected to the side inlet chamber 211 through the upper substrate 200a. The central output tube 292 is inserted through the upper substrate 2A to the central outlet chamber. 230, the side output tube 293 is inserted through the upper substrate 200a to communicate with the side outlets 231. In this way, when the vibrating element 3 receives an electronic signal to generate vibration, the different two-phase suspension fluids can be separately flown into the central inlet chamber 210 and the side by the main inlet tubes 290 and 291. In the inlet chamber 211, all of the injected two-phase suspension fluid can be thoroughly mixed in the mixing zone 240 and the mixing channel 25A. In addition, fluid can be removed to the multi-functional unsteady microfluidic device via the central output tube 292, and particles can be excluded from the multi-function, non-steady-state microfluidic device via the side output tube 293. In addition, the actuation mechanism of the multi-functional unsteady microflow 14 200914831 body device will be described in detail in the following paragraphs. The device is a micro-fluid mechanism developed by using a micro-pump to push the unsteady reciprocating flow field characteristics of the fluid to match the geometric shape design of the tapered block, the mixing zone and the separation zone. The function can be divided into three parts. Firstly, the device is equipped with an asymmetric broadcast body in the center of the mixed flow channel, and the fluid unsteady flow field characteristic is used to achieve the purpose of pushing the fluid. Secondly, three input flow channels are set, and the mixing is performed. The asymmetric block in the center of the flow channel, and the three staggered bumps are set to match the unsteady flow field, so that the fluid can be flowed before passing through the non-view. Hybrid, the advantage of this design is that the two kinds of money that are to be mixed with the scales when they are mixed can fully exert the Wei in the backflow field of the asymmetric block, achieve a good mixing effect, and effectively shorten the length required for mixing. time. Finally, the particle separation part. Under the surface inspection condition, there are three phenomena when the fluid flows through the separation zone to promote the movement of the particles to the output flow of the two sides. First, when the fluid flows in the conveying channel, the particles will flow to the flow channel. Side close. Secondly, when the fluid moves to the separation zone, the flow velocity will decrease due to the expansion of the cross-sectional area, and a recirculation zone will be generated on the second G side. This recirculation zone will separate the microparticles at the inlet end of the central output flow channel to produce a symmetrical flow. Field, ^ 旋 = for - blocking the advancement of the recorder, causing the area of the output channel of the towel to reduce the shout area and increase the flow resistance, and because the vortex_rotation direction is rotated by the output channel of the towel to the output flow of the two sides, The particles can be driven to the side output flow path, and the effect of separating the particles can be effectively achieved by the cooperation of the above phenomenon. Combined with the above three designs, the device can achieve the transfer of fluid, and mix two or more different fluids, and successfully divide the function of the particles contained in the _ _ _ _ _ _ _ _ _ _ _ 15 200914831 In order to prove that the present invention is indeed feasible, the following is a test of the above-mentioned multifunctional non-steady-state microfluidic device and the phenomenon of fluid movement and particle movement in the flow channel is captured by a flow field inspection (fl〇w visualization) technique. The flow field characteristics of the functionally non-stable microfluidic device will be visualized to account for the reasons for fluid mixing and particle separation, the working fluid being deionized water.
圖2 A是混合區與非對稱擋體在穩態流場(以注射幫浦 注入流體)下之流場視察觀測情形，由圖中的結果可見，在 穩態流場下混合區域内的流體，其邊界相當分明，流體流 經非對稱擋體與二角形凸塊結構時，會依原來在流道内 上、中、下的位置’平順的通過漸縮塊進入混合流道内， 不同流體間的界面依然非常明顯，沒有流體混合的現象產 生。 圖2B是混合區與非對稱擋體在非穩態往復流流場下 之流場視察觀測情形，從圖中的結果可以發現，非穩態往 復流流場會在非對稱擋體前方產生一對稱的渦旋，且渦漩 的面積分佈於佔據了整個流道，流體可以利此渦漩進行混 合。此設計的另一優點是二種待混合流體可以同時流經流 道中的最窄處(非對稱擋體與流道間），充分發揮非對稱擋 體後方流場迴流區的功能，可使得流體在進入三角形凸塊 結構前，就達到良好的混合效果，有效縮短混合所需的長 度與時間。 圖3A是分離區在穩態流場(以注射幫浦注入流體)下 之流場視察量測情形，由圖中結果可見，在穩態流場下， 16 200914831 流體會依原來在輸送流勒上、巾、下的位置，分別平順 的進入中央與侧邊的輸出流道。圖3B是分離區在非穩態 往復流流場下之料視察量測情形，㈣巾可以發現，& 分離區的流道處時會有渦旋流場的產生，促使微粒子往二 侧輸出流道移動。當粒子移動至分離區時，會因截面積擴 大而降低流速’並在二織生迴流區，此迴流區會將微粒Figure 2A shows the observation of the flow field under the steady flow field (injected with the injection pump) by the mixing zone and the asymmetric block. The results in the figure show that the fluid in the mixed zone is in the steady flow field. The boundary is quite clear. When the fluid flows through the asymmetric block and the polygonal bump structure, it will smoothly pass through the tapered block into the mixed flow channel at the upper, middle and lower positions in the flow channel. The interface is still very noticeable and there is no fluid mixing. Fig. 2B is a flow field observation observation of the mixing zone and the asymmetric block in the unsteady reciprocating flow field. From the results in the figure, it can be found that the unsteady reciprocating flow field will produce a front in front of the asymmetric block. Symmetrical vortices, and the area of the vortex is distributed over the entire flow path, and the fluid can be vortexed for mixing. Another advantage of this design is that the two fluids to be mixed can flow simultaneously through the narrowest part of the flow path (between the asymmetric block and the flow path), and fully exert the function of the flow field recirculation zone behind the asymmetric block, which can make the fluid Before entering the triangular bump structure, a good mixing effect is achieved, which effectively shortens the length and time required for mixing. Figure 3A shows the flow field observation measurement of the separation zone in the steady flow field (injected with the injection pump). It can be seen from the results of the figure that under the steady flow field, 16 200914831 fluid will be in the delivery flow. The upper, the towel, and the lower position are smoothly entered into the central and side output flow paths, respectively. Fig. 3B shows the material inspection measurement of the separation zone under the unsteady reciprocating flow field. (4) The towel can be found that there is a vortex flow field at the flow path of the separation zone, which causes the microparticles to be output to the two sides. The flow path moves. When the particles move to the separation zone, the flow velocity is reduced due to the expansion of the cross-sectional area and the recirculation zone is in the second weaving zone.
子往$離區二側帶動，最後在中央輸出流道入口端會產生 一對稱之渦漩流場，此渦漩可作為一阻擋微粒子前進之擋 體，造成中央輸出流道的截面積縮減與流阻提昇，且由於 洞漩的旋轉方向是由中央輸出流道往二侧邊輸出流道旋 轉’因此可帶動微粒子往靖輸㈣道前進，在上述現象 的配合下，可財效達到分離出二械浮流體_含粒 的效果。 综上所述，本發明之多功能非穩態微流體裝置，至 具有下列優點： C )由於本發明乃是利用非穩態往復流流場流經非 對稱擔體所產生之舰流場加以混合龍，因此本發明能 夠設計不同數量的輸人錢，以符合多種越的混合需求 且不需任何額外裝置。 ⑺祕本發明乃是_祕態往復驗場流經分 ^區“道截面積改變)所產生之騎流場加以分離粒子， 明能夠設計不同的輸出流道夾角以改變分離區内 .不需任何額 ，道截面積，以符合不同的粒子分離需求且 外裝置。 200914831 (3) 本發明是利用振動元件來改變振動腔室之容積 的大小以推動多功能非穩態微流體裝置内的流體，使以本 發明不需連接至額外的流體推動裝置，如注射繁浦。此外， 本發明也可搭配攜帶式的電源，以使本發明在攜帶上更加 的便利。再者，本發明更可以搭配不同的感測器，以使本 發明具有可即時檢驗的效果。 ΟThe child is driven to the side of the two-zone, and finally a symmetrical vortex flow field is generated at the entrance end of the central output runner. This vortex acts as a blocker for blocking the advancement of the particles, resulting in a reduction in the cross-sectional area of the central output runner. The flow resistance is increased, and since the rotation direction of the hole swirl is rotated from the central output flow path to the output flow path on both sides, the particle can be driven to the Jingshen (four) road. With the cooperation of the above phenomena, the financial effect can be separated. Two mechanical floating fluid _ containing grain effect. In summary, the multi-functional non-steady-state microfluidic device of the present invention has the following advantages: C) Since the present invention utilizes a non-stationary reciprocating flow field to flow through a ship's flow field generated by an asymmetric support. The dragon is mixed, so the present invention is able to design different amounts of input money to meet a variety of mixing needs without any additional equipment. (7) The secret invention is that the quiescent reciprocating field passes through the riding field generated by the "cross-sectional area change" of the sub-zone to separate the particles, and it is possible to design different output channel angles to change the separation zone. Any amount, cross-sectional area to meet different particle separation requirements and external devices. 200914831 (3) The present invention utilizes a vibrating element to vary the volume of the vibrating chamber to propel the fluid in the multifunctional unsteady microfluidic device Therefore, the present invention does not need to be connected to an additional fluid pushing device, such as an injection pump. In addition, the present invention can also be combined with a portable power source to make the present invention more convenient to carry. Further, the present invention can further Different sensors are used to make the invention have a testable effect.
(4) 本發明之結構簡單，是以本發明具有低生產成 本之優點。 雖然本發明已以較佳實施例揭露如上，然其並非用以 限1本發明，任何熟習此技藝者，在不脫離本i明之精神 =範圍内，當可作些許之更動與潤飾，因此本發明之保護 範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 圖1A繪示為本發明之一實施例之多功能非穩態微流 體I置的上視示意圖。 圖1B緣示為圖1A之剖面線A-A’的剖面線示意圖。 圖1C繪示為圖ία之剖面線B-B，的剖面線示意圖。 圖1D為本發明之一實施例之多功能非穩態微流體裝 置實體圖。 圖2A是多功能非穩態微流體裝置之混合區與非對稱 擋體在穩態流場下之流場視察量測情形 圖2B是多功能非穩態微流體裝置之混合區與非對稱 擒體在非穩態往復流流場下之流場視察量測情形 18 200914831 圖3A是多功能非穩態微流體裝置之分離區在穩態流 場下之流場視察量測情形，粒子會分佈於三個流道内。 圖3B為本發明之多功能非穩態微流體裝置實際操作 結果，流體流經分離區時，二相懸浮流體中所含之粒子， 會往二側之流道移動，達成粒子分離效果。 【主要元件符號說明】 1〇〇:多功能非穩態微流體裝置 200 :本體 200a :上基板 200b :下基板 202 :接合表面 210 :中央入口腔室 211 :側邊入口腔室 220 :振動腔室 230 :中央出口腔室 231 ··侧邊出口腔室 240 :混合區 250 :混合流道 251 :漸縮塊 252 :三角形凸塊結構 260 :分離區 27〇 :輸送流道 271 :擴散段 19 200914831 Ο :中央輸入流道 :侧邊輸入流道 :中央輸出流道 :側邊輸出流道 :中央注入管件 :側邊注入管件 :中央輸出管件 :側邊輸出管件 :振動元件 震動方向 20(4) The structure of the present invention is simple, and the present invention has the advantages of low production cost. Although the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the scope of the present invention, and those skilled in the art can make some modifications and refinements without departing from the spirit of the present invention. The scope of the invention is defined by the scope of the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1A is a top plan view showing a multi-functional non-steady state microfluid I according to an embodiment of the present invention. Fig. 1B is a schematic cross-sectional view taken along the line A-A' of Fig. 1A. 1C is a cross-sectional view showing a section line B-B of FIG. Figure 1D is a block diagram of a multi-functional, non-stable microfluidic device in accordance with one embodiment of the present invention. 2A is a flow field observation measurement situation of a mixed region and an asymmetric block of a multi-functional unsteady microfluidic device under a steady flow field. FIG. 2B is a mixed region and an asymmetric 多功能 of a multifunctional non-stationary microfluidic device. Flow field observation measurement of the body under the unsteady reciprocating flow field 18 200914831 Figure 3A is a flow field observation measurement of the separation zone of the multi-functional unsteady microfluidic device under the steady flow field, the particles will be distributed Within three flow paths. Fig. 3B is a practical operation result of the multifunctional non-steady-state microfluidic device of the present invention. When the fluid flows through the separation zone, the particles contained in the two-phase suspension fluid will move to the flow channels on both sides to achieve the particle separation effect. [Main component symbol description] 1〇〇: Multi-functional unsteady microfluidic device 200: body 200a: upper substrate 200b: lower substrate 202: bonding surface 210: central inlet chamber 211: side inlet chamber 220: vibration chamber Room 230: central outlet chamber 231 · side outlet chamber 240: mixing zone 250: mixing channel 251: tapered block 252: triangular bump structure 260: separation zone 27: transport channel 271: diffuser 19 200914831 Ο : Central input flow channel: side input flow channel: central output flow channel: side output flow channel: central injection pipe fitting: side injection pipe fitting: central output pipe fitting: side output pipe fitting: vibrating component vibrating direction 20