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TW200738360A - Substrate transport method and apparatus thereof - Google Patents

Substrate transport method and apparatus thereof

Info

Publication number
TW200738360A
TW200738360A TW095144424A TW95144424A TW200738360A TW 200738360 A TW200738360 A TW 200738360A TW 095144424 A TW095144424 A TW 095144424A TW 95144424 A TW95144424 A TW 95144424A TW 200738360 A TW200738360 A TW 200738360A
Authority
TW
Taiwan
Prior art keywords
substrate
transport
transport path
supporting
round belts
Prior art date
Application number
TW095144424A
Other languages
English (en)
Inventor
Haruhiko Yoshimi
Yoshihisa Konishi
Shigeharu Horiguchi
Original Assignee
Takatori Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takatori Corp filed Critical Takatori Corp
Publication of TW200738360A publication Critical patent/TW200738360A/zh

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Liquid Crystal (AREA)
  • Structure Of Belt Conveyors (AREA)
  • Cleaning In General (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Manufacturing Of Printed Wiring (AREA)
TW095144424A 2006-01-06 2006-11-30 Substrate transport method and apparatus thereof TW200738360A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006001127A JP2007184391A (ja) 2006-01-06 2006-01-06 基板の搬送方法及び装置

Publications (1)

Publication Number Publication Date
TW200738360A true TW200738360A (en) 2007-10-16

Family

ID=38251249

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095144424A TW200738360A (en) 2006-01-06 2006-11-30 Substrate transport method and apparatus thereof

Country Status (4)

Country Link
JP (1) JP2007184391A (zh)
KR (1) KR20070074488A (zh)
CN (1) CN1996116A (zh)
TW (1) TW200738360A (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007084952A2 (en) 2006-01-18 2007-07-26 Akrion Technologies, Inc. Systems and methods for drying a rotating substrate
CN101596531B (zh) * 2009-02-13 2011-09-28 昆山开石精密电子有限公司 手机镜片清洗生产线装置
CN101927463A (zh) * 2010-05-11 2010-12-29 赫得纳米科技(昆山)有限公司 带有光滑接触面传送带的喷砂机传送结构
CN103257469B (zh) * 2013-05-22 2015-09-30 深圳市华星光电技术有限公司 显示器基板质量检测装置及检测方法
WO2017002538A1 (ja) * 2015-06-29 2017-01-05 株式会社村田製作所 噴射加工装置および被加工物の表面加工方法
CN107597775A (zh) * 2017-09-19 2018-01-19 合肥惠科金扬科技有限公司 一种基板清洗设备
CN109668831B (zh) * 2019-01-24 2021-04-02 合肥工业大学 一种液晶显示屏缺陷自动光学检测仪器圆带传输装置
KR20240053465A (ko) * 2022-10-17 2024-04-24 주식회사 엘지에너지솔루션 이차 전지 디가싱 장치

Also Published As

Publication number Publication date
KR20070074488A (ko) 2007-07-12
CN1996116A (zh) 2007-07-11
JP2007184391A (ja) 2007-07-19

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