SU1456777A1 - Method of checking surface roughness - Google Patents

Abstract

The invention relates to a measurement technique, and more specifically to devices for contactless optical monitoring of the surface roughness of internal cavities. The purpose of the invention is to expand the information content of the control due to the possibility of controlling the roughness of the internal cavities, as well as due to both the integral and local control of the surface roughness. The device contains a radiation source 1, an optical system, a condenser 2 installed in series along the radiation path. a light guide 3, a lens made of at least two components 4 and 5, and a beam splitter 6 with a beam-splitting plane 7, a mirror reflector 8, a lens made of at least two components 9 and 10, a light guide 11, a photodetector 12 for registering a specularly reflected radiation from the surface 16 and the photodetector 13 of the comparison. The lenses are mounted with the possibility of joint movement along the optical axis of the system in the range from one to two of their focal lengths and with the possibility of autonomous movement of the component 6 of each lens closest to the beam splitter along the optical axis of the system in the direction of the beam splitter 6. 3 Il. SB ACTION 1 01 SP) “to (ffue.1

Description

The invention relates to a measurement technique, namely, to devices for contactless optical monitoring of the surface roughness of internal cavities, and is intended for use directly at workplaces in workshops and technical control departments, both in tfi process debugging and in express control of the final product.

The aim of the invention is to expand the information content of the control due to the possibility of controlling the roughness of the internal cavities, as well as due to both the integral and local control of the surface roughness.

FIG. 1 depicts a principal; Nal scheme of the device to control the roughness; 2 and 3 are diagrams of the device with a local measurement of roughness.

The device contains a source of radiation 1, an optical system, including a series-mounted condenser 2, a light guide 3, a lens made of at least two components 4 and 5j and a beam splitter 6 with a beam-distributing plane 7, a specular reflector 8 a lens made of at least two components 9 and 10, a light guide 11, a photodetector 12 for detecting specularly reflected from the test surface, a comparison photo detector 13, a holder 14 and a housing 15.

The device works as follows.

A beam of light sent by the radiation source 1, the condenser 2, is printed on the end of the light guide 3. The light passes through the light guide 3 to the opposite end located at the focus of the lens, consisting of components 4 and 5, and is directed by a parallel beam to the monitored surface 16.

A part of the flux emitted by the radiation source 1, reflected from the housing 15, passes hold 14 and hits the comparison photodetector 13.

 The light mirrored from the monitored surface 16 passes the beam splitter 6 and the mirror reflector 8 is directed onto the lens, consisting of components 9 and 10, which focuses the mirror reflection 10

five

0

five

0

five

0

five

0

five

the radiation at the end of the fiber 11. The fiber 11 transmits radiation to the photodetector 12 to register the specularly reflected radiation. A block (not shown) of processing signals from photodetectors 12 and 13 processes the received signals and outputs results to a reading device (not shown).

With such a position of the circuit elements, an integral measurement of the surface roughness is performed.

Local measurement of surface roughness occurs when the position of the elements shown in figure 2 and 3. The difference is only in the location of the lenses, therefore, in figure 2 and 3 shows a part of the scheme from the input end of the light guide 3 to the input end of the light guide 11.

The local measurement of the roughness of the walls of the base hole occurs in the following way (Fig. 2). The lens of components 4 and 5 is shifted by a double focal distance, counting from the output end of the light guide 3,

The image of the end of the light guide 3 by a lens of components 4 and 5 is projected onto the controlled surface 16. The radiation reflected from the surface 16 passes the beam splitter 6 and the mirror reflector 8 is directed to the lens from components 9 and 10, which focuses the mirror reflected radiation at the fiber end 11 The light guide 11 transmits radiation to the photodetector 12 for detecting specularly reflected radiation.

The signal processing unit processes the received signals from the photodetectors 12 and 13 and outputs the results to the reading device about

The local measurement of the roughness of the surface of the deep cavities and grooves occurs in the following way (Fig. 3).

The components 5 and 9 of the lenses closest to the beam splitter 6 are shifted, increasing the nominal air gap to the depth of the groove. The end of the light guide 3 is in the focus of the first component 4 of the lens. After component 4 there is a parallel beam of light, which component 5 is focused on the surface of the groove. A beam splitter 6 is used to break the beam.

П / 10СКОС / Л mopqa .. light guide d 5

///

Ijtf "h

П / 1Оскос / 7 ь butt sdetobo & & //

Phi.5.2

Compiled by L.Lobzova Editor G.Volkov Tehred M.Hodanich

Order 7494/38

Circulation 683

VNYIPI State Committee for Inventions and Discoveries at the State Committee on Science and Technology of the USSR 113035, Moscow, Zh-35, 4/5 Raushsk nab.

Proofreader L. Pilipenko

Subscription

Claims (1)

The claims ₂ A device for controlling the surface roughness containing a radiation source, an optical system including a condenser 3 in series (a lens and a beam splitter, a photodetector for registering radiation specularly reflected from the controlled surface, a comparison photodetector and a signal processing unit from photodetectors, different the fact that, in order to expand the information content of the control, it is equipped with a light guide installed between the condenser and the lens of the optical system, the second object a fiber and a fiber, similar to the first ones, installed between the beam splitter and the photodetector to register radiation specularly reflected from the surface to be monitored, and a mirror reflector mounted on the optical axis of the system parallel to the beam splitter plane of the beam splitter, the lenses are made of at least two components and are mounted for joint movement along the optical axis of the system in the range from one to two of their focal lengths and with the possibility of autonomous movement of the closest to todelitelyu component of each lens along the optical axis toward the beamsplitter. The end plane „„ of the fiber δ -I ---— • x The plane of the end of the fiber. // Figure 2 Fiber end face plane 3 The fiber end face plane 11 Phage δ