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SG98006A1 - Device for contacting and/or modifying a surface having a cantilever and a method for production said cantilever - Google Patents

Device for contacting and/or modifying a surface having a cantilever and a method for production said cantilever

Info

Publication number
SG98006A1
SG98006A1 SG200007486A SG200007486A SG98006A1 SG 98006 A1 SG98006 A1 SG 98006A1 SG 200007486 A SG200007486 A SG 200007486A SG 200007486 A SG200007486 A SG 200007486A SG 98006 A1 SG98006 A1 SG 98006A1
Authority
SG
Singapore
Prior art keywords
cantilever
modifying
contacting
production
Prior art date
Application number
SG200007486A
Inventor
Despont Michel
Drechsler Ute
I Lutwyche Mark
R Rothuizen Hugo
Vettiger Peter
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of SG98006A1 publication Critical patent/SG98006A1/en

Links

SG200007486A 1999-12-31 2000-12-15 Device for contacting and/or modifying a surface having a cantilever and a method for production said cantilever SG98006A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP99126244 1999-12-31

Publications (1)

Publication Number Publication Date
SG98006A1 true SG98006A1 (en) 2003-08-20

Family

ID=29595095

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200007486A SG98006A1 (en) 1999-12-31 2000-12-15 Device for contacting and/or modifying a surface having a cantilever and a method for production said cantilever

Country Status (1)

Country Link
SG (1) SG98006A1 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5189906A (en) * 1989-11-28 1993-03-02 Digital Instruments, Inc. Compact atomic force microscope
EP0848248A1 (en) * 1996-12-10 1998-06-17 Seiko Instruments Inc. Cantilever and method of manufacturing the same
US5831181A (en) * 1995-09-29 1998-11-03 The Regents Of The University Of California Automated tool for precision machining and imaging

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5189906A (en) * 1989-11-28 1993-03-02 Digital Instruments, Inc. Compact atomic force microscope
US5831181A (en) * 1995-09-29 1998-11-03 The Regents Of The University Of California Automated tool for precision machining and imaging
EP0848248A1 (en) * 1996-12-10 1998-06-17 Seiko Instruments Inc. Cantilever and method of manufacturing the same

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