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SG11202111631SA - Apparatus for producing semiconductor device, and method for producing semiconductor device - Google Patents

Apparatus for producing semiconductor device, and method for producing semiconductor device

Info

Publication number
SG11202111631SA
SG11202111631SA SG11202111631SA SG11202111631SA SG11202111631SA SG 11202111631S A SG11202111631S A SG 11202111631SA SG 11202111631S A SG11202111631S A SG 11202111631SA SG 11202111631S A SG11202111631S A SG 11202111631SA SG 11202111631S A SG11202111631S A SG 11202111631SA
Authority
SG
Singapore
Prior art keywords
semiconductor device
producing semiconductor
producing
semiconductor
Prior art date
Application number
SG11202111631SA
Inventor
Kohei Seyama
Makoto Takahashi
Original Assignee
Shinkawa Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Kk filed Critical Shinkawa Kk
Publication of SG11202111631SA publication Critical patent/SG11202111631SA/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67144Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/52Mounting semiconductor bodies in containers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67126Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67259Position monitoring, e.g. misposition detection or presence detection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Die Bonding (AREA)
  • Wire Bonding (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Polarising Elements (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
SG11202111631SA 2019-12-17 2020-11-10 Apparatus for producing semiconductor device, and method for producing semiconductor device SG11202111631SA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019227360 2019-12-17
PCT/JP2020/041939 WO2021124732A1 (en) 2019-12-17 2020-11-10 Apparatus for producing semiconductor device, and method for producing semiconductor device

Publications (1)

Publication Number Publication Date
SG11202111631SA true SG11202111631SA (en) 2021-11-29

Family

ID=76477519

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202111631SA SG11202111631SA (en) 2019-12-17 2020-11-10 Apparatus for producing semiconductor device, and method for producing semiconductor device

Country Status (7)

Country Link
US (1) US20220223450A1 (en)
JP (1) JP7224695B2 (en)
KR (1) KR102680413B1 (en)
CN (1) CN113767465B (en)
SG (1) SG11202111631SA (en)
TW (1) TWI775198B (en)
WO (1) WO2021124732A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114388418B (en) * 2021-12-28 2022-12-13 凌波微步半导体设备(常熟)有限公司 Closed loop position compensation method and system of semiconductor wire bonding machine
CN114758969B (en) * 2022-04-18 2023-09-12 无锡九霄科技有限公司 Wafer back vision detection structure, detection method and related equipment
CN116313859B (en) * 2023-05-26 2023-09-15 青岛泰睿思微电子有限公司 Wire bonding method for cantilever product

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2982000B1 (en) * 1998-07-03 1999-11-22 株式会社新川 Bonding method and apparatus
JP2000100858A (en) * 1998-09-18 2000-04-07 Shibaura Mechatronics Corp Component mounting device and calibrating method of imaging offset in device thereof
JP3555488B2 (en) * 1999-03-24 2004-08-18 松下電器産業株式会社 Electronic component mounting apparatus and mounting method
JP2004146776A (en) * 2002-08-29 2004-05-20 Shinko Electric Ind Co Ltd Machine and method for mounting flip-chip
JP4232511B2 (en) * 2003-04-03 2009-03-04 日本電気株式会社 Semiconductor manufacturing equipment
JP4264403B2 (en) * 2004-10-18 2009-05-20 株式会社新川 Bonding equipment
JP2007115851A (en) * 2005-10-19 2007-05-10 Toshiba Corp Method and device for inspecting position of semiconductor component, and manufacturing method of semiconductor device
JP4712766B2 (en) * 2007-06-28 2011-06-29 ヤマハ発動機株式会社 Parts transfer device
JP5277266B2 (en) * 2011-02-18 2013-08-28 株式会社日立ハイテクインスツルメンツ Die bonder and semiconductor manufacturing method
JP5996979B2 (en) * 2012-09-07 2016-09-21 ヤマハ発動機株式会社 Electronic component mounting apparatus and mounting position correction data creation method
JP2015032613A (en) * 2013-07-31 2015-02-16 凸版印刷株式会社 Irradiation position correction device for charged beam lithography apparatus, method of correcting charged beam irradiation position, method of manufacturing photomask, and semiconductor device
TWI567859B (en) * 2014-02-10 2017-01-21 新川股份有限公司 Monuting apparatus and offset correction method thereof
TWI545663B (en) * 2014-05-07 2016-08-11 新川股份有限公司 Bonding apparatus and bonding method
KR102238649B1 (en) * 2014-09-16 2021-04-09 삼성전자주식회사 Bonding apparatus of semiconductor chip
CH711570B1 (en) 2015-09-28 2019-02-15 Besi Switzerland Ag Device for mounting components on a substrate.
JP6307730B1 (en) * 2016-09-29 2018-04-11 株式会社新川 Semiconductor device manufacturing method and mounting apparatus

Also Published As

Publication number Publication date
TWI775198B (en) 2022-08-21
US20220223450A1 (en) 2022-07-14
KR20210148350A (en) 2021-12-07
CN113767465A (en) 2021-12-07
JPWO2021124732A1 (en) 2021-06-24
TW202139319A (en) 2021-10-16
CN113767465B (en) 2023-11-10
JP7224695B2 (en) 2023-02-20
KR102680413B1 (en) 2024-07-02
WO2021124732A1 (en) 2021-06-24

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