SG11202111631SA - Apparatus for producing semiconductor device, and method for producing semiconductor device - Google Patents
Apparatus for producing semiconductor device, and method for producing semiconductor deviceInfo
- Publication number
- SG11202111631SA SG11202111631SA SG11202111631SA SG11202111631SA SG11202111631SA SG 11202111631S A SG11202111631S A SG 11202111631SA SG 11202111631S A SG11202111631S A SG 11202111631SA SG 11202111631S A SG11202111631S A SG 11202111631SA SG 11202111631S A SG11202111631S A SG 11202111631SA
- Authority
- SG
- Singapore
- Prior art keywords
- semiconductor device
- producing semiconductor
- producing
- semiconductor
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title 2
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/52—Mounting semiconductor bodies in containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Die Bonding (AREA)
- Wire Bonding (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Polarising Elements (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019227360 | 2019-12-17 | ||
PCT/JP2020/041939 WO2021124732A1 (en) | 2019-12-17 | 2020-11-10 | Apparatus for producing semiconductor device, and method for producing semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202111631SA true SG11202111631SA (en) | 2021-11-29 |
Family
ID=76477519
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202111631SA SG11202111631SA (en) | 2019-12-17 | 2020-11-10 | Apparatus for producing semiconductor device, and method for producing semiconductor device |
Country Status (7)
Country | Link |
---|---|
US (1) | US20220223450A1 (en) |
JP (1) | JP7224695B2 (en) |
KR (1) | KR102680413B1 (en) |
CN (1) | CN113767465B (en) |
SG (1) | SG11202111631SA (en) |
TW (1) | TWI775198B (en) |
WO (1) | WO2021124732A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114388418B (en) * | 2021-12-28 | 2022-12-13 | 凌波微步半导体设备(常熟)有限公司 | Closed loop position compensation method and system of semiconductor wire bonding machine |
CN114758969B (en) * | 2022-04-18 | 2023-09-12 | 无锡九霄科技有限公司 | Wafer back vision detection structure, detection method and related equipment |
CN116313859B (en) * | 2023-05-26 | 2023-09-15 | 青岛泰睿思微电子有限公司 | Wire bonding method for cantilever product |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2982000B1 (en) * | 1998-07-03 | 1999-11-22 | 株式会社新川 | Bonding method and apparatus |
JP2000100858A (en) * | 1998-09-18 | 2000-04-07 | Shibaura Mechatronics Corp | Component mounting device and calibrating method of imaging offset in device thereof |
JP3555488B2 (en) * | 1999-03-24 | 2004-08-18 | 松下電器産業株式会社 | Electronic component mounting apparatus and mounting method |
JP2004146776A (en) * | 2002-08-29 | 2004-05-20 | Shinko Electric Ind Co Ltd | Machine and method for mounting flip-chip |
JP4232511B2 (en) * | 2003-04-03 | 2009-03-04 | 日本電気株式会社 | Semiconductor manufacturing equipment |
JP4264403B2 (en) * | 2004-10-18 | 2009-05-20 | 株式会社新川 | Bonding equipment |
JP2007115851A (en) * | 2005-10-19 | 2007-05-10 | Toshiba Corp | Method and device for inspecting position of semiconductor component, and manufacturing method of semiconductor device |
JP4712766B2 (en) * | 2007-06-28 | 2011-06-29 | ヤマハ発動機株式会社 | Parts transfer device |
JP5277266B2 (en) * | 2011-02-18 | 2013-08-28 | 株式会社日立ハイテクインスツルメンツ | Die bonder and semiconductor manufacturing method |
JP5996979B2 (en) * | 2012-09-07 | 2016-09-21 | ヤマハ発動機株式会社 | Electronic component mounting apparatus and mounting position correction data creation method |
JP2015032613A (en) * | 2013-07-31 | 2015-02-16 | 凸版印刷株式会社 | Irradiation position correction device for charged beam lithography apparatus, method of correcting charged beam irradiation position, method of manufacturing photomask, and semiconductor device |
TWI567859B (en) * | 2014-02-10 | 2017-01-21 | 新川股份有限公司 | Monuting apparatus and offset correction method thereof |
TWI545663B (en) * | 2014-05-07 | 2016-08-11 | 新川股份有限公司 | Bonding apparatus and bonding method |
KR102238649B1 (en) * | 2014-09-16 | 2021-04-09 | 삼성전자주식회사 | Bonding apparatus of semiconductor chip |
CH711570B1 (en) | 2015-09-28 | 2019-02-15 | Besi Switzerland Ag | Device for mounting components on a substrate. |
JP6307730B1 (en) * | 2016-09-29 | 2018-04-11 | 株式会社新川 | Semiconductor device manufacturing method and mounting apparatus |
-
2020
- 2020-10-29 TW TW109137694A patent/TWI775198B/en active
- 2020-11-10 KR KR1020217037043A patent/KR102680413B1/en active IP Right Grant
- 2020-11-10 US US17/609,401 patent/US20220223450A1/en active Pending
- 2020-11-10 CN CN202080029800.XA patent/CN113767465B/en active Active
- 2020-11-10 SG SG11202111631SA patent/SG11202111631SA/en unknown
- 2020-11-10 WO PCT/JP2020/041939 patent/WO2021124732A1/en active Application Filing
- 2020-11-10 JP JP2021565367A patent/JP7224695B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
TWI775198B (en) | 2022-08-21 |
US20220223450A1 (en) | 2022-07-14 |
KR20210148350A (en) | 2021-12-07 |
CN113767465A (en) | 2021-12-07 |
JPWO2021124732A1 (en) | 2021-06-24 |
TW202139319A (en) | 2021-10-16 |
CN113767465B (en) | 2023-11-10 |
JP7224695B2 (en) | 2023-02-20 |
KR102680413B1 (en) | 2024-07-02 |
WO2021124732A1 (en) | 2021-06-24 |
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