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SG11201901407SA - Rail-guided trolley system, and rail-guided trolley - Google Patents

Rail-guided trolley system, and rail-guided trolley

Info

Publication number
SG11201901407SA
SG11201901407SA SG11201901407SA SG11201901407SA SG11201901407SA SG 11201901407S A SG11201901407S A SG 11201901407SA SG 11201901407S A SG11201901407S A SG 11201901407SA SG 11201901407S A SG11201901407S A SG 11201901407SA SG 11201901407S A SG11201901407S A SG 11201901407SA
Authority
SG
Singapore
Prior art keywords
rail
guided trolley
traveling
rails
traveling wheels
Prior art date
Application number
SG11201901407SA
Inventor
Yasuhisa Ito
Original Assignee
Murata Machinery Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Machinery Ltd filed Critical Murata Machinery Ltd
Publication of SG11201901407SA publication Critical patent/SG11201901407SA/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B61—RAILWAYS
    • B61B—RAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B3/00—Elevated railway systems with suspended vehicles
    • B61B3/02—Elevated railway systems with suspended vehicles with self-propelled vehicles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • B65G1/0457—Storage devices mechanical with suspended load carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0297—Wafer cassette

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Transportation (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Platform Screen Doors And Railroad Systems (AREA)
  • Toys (AREA)

Abstract

[Problem] To restrict traveling wheels from falling into a rail gap, suppress vibration being given to an article, and easily change the orientation of the traveling wheels. [Means to Solve Problem] A rail-guided trolley system SYS that includes a main body 10 that, along rails R including a part thereof arranged in a grid pattern, holds and transports a transportation container M on a lower side of the rails R, the rail-guided trolley system SYS comprising: traveling wheels 21 that are each provided at each of four corners 10a of the main body 10 and that travel on the rails R; a controller 40 that controls pivot drivers 34 that change the orientation of the traveling wheels 21; and auxiliary wheels 22 that are each arranged at least in either front or rear in a traveling direction of the traveling wheel 21.
SG11201901407SA 2016-08-26 2017-07-14 Rail-guided trolley system, and rail-guided trolley SG11201901407SA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016165607 2016-08-26
PCT/JP2017/025739 WO2018037762A1 (en) 2016-08-26 2017-07-14 Rail-guided trolley system, and rail-guided trolley

Publications (1)

Publication Number Publication Date
SG11201901407SA true SG11201901407SA (en) 2019-03-28

Family

ID=61246537

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201901407SA SG11201901407SA (en) 2016-08-26 2017-07-14 Rail-guided trolley system, and rail-guided trolley

Country Status (9)

Country Link
US (1) US11476141B2 (en)
EP (1) EP3505416B1 (en)
JP (1) JP6665938B2 (en)
KR (1) KR102165190B1 (en)
CN (1) CN109641595B (en)
IL (1) IL264836B (en)
SG (1) SG11201901407SA (en)
TW (1) TWI708726B (en)
WO (1) WO2018037762A1 (en)

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KR102557691B1 (en) * 2018-08-09 2023-07-20 무라다기카이가부시끼가이샤 ceiling drive system
WO2020090253A1 (en) * 2018-10-29 2020-05-07 村田機械株式会社 Traveling vehicle system
SG11202104305YA (en) 2018-10-29 2021-05-28 Murata Machinery Ltd Ceiling conveyance vehicle and ceiling conveyance vehicle system
SG11202105601SA (en) * 2018-11-28 2021-06-29 Murata Machinery Ltd Traveling vehicle system
WO2020235196A1 (en) * 2019-05-22 2020-11-26 村田機械株式会社 Traveling vehicle system and method for controlling traveling vehicles
JP7226537B2 (en) * 2019-05-22 2023-02-21 村田機械株式会社 Driving vehicle system and driving vehicle control method
JP7036089B2 (en) * 2019-07-03 2022-03-15 村田機械株式会社 Transport system
CN114423692A (en) 2019-09-18 2022-04-29 村田机械株式会社 Traveling vehicle system
US20220332500A1 (en) 2019-09-18 2022-10-20 Murata Machinery, Ltd. Transport system and storage
EP3812304A1 (en) * 2019-10-24 2021-04-28 LTW Intralogistics GmbH Device for measuring and / or determining the position of a vehicle used in a logistics system and channel vehicles
DE102020103303B3 (en) * 2020-02-10 2021-06-24 Deutsches Zentrum für Luft- und Raumfahrt e.V. Robotic system
EP4134289A4 (en) * 2020-04-27 2024-05-08 Murata Machinery, Ltd. Overhead carrier and overhead carrying system
WO2021220621A1 (en) * 2020-04-30 2021-11-04 村田機械株式会社 Carrier vehicle system
EP4155156A4 (en) * 2020-05-19 2024-06-26 Murata Machinery, Ltd. Overhead conveyance system
US20240059488A1 (en) 2021-01-05 2024-02-22 Murata Machinery, Ltd. Ceiling depository system
US20240051747A1 (en) 2021-01-05 2024-02-15 Murata Machinery, Ltd. Overhead storage system
US20220406638A1 (en) * 2021-06-17 2022-12-22 Taiwan Semiconductor Manufacturing Company, Ltd. Hash overhead hoist transport rail system and methods of operating the same

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JPH08324772A (en) * 1995-06-05 1996-12-10 Shin Meiwa Ind Co Ltd Work carrier device
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JP2001334930A (en) * 2000-05-29 2001-12-04 Sumitomo Heavy Ind Ltd Floor surface traveling truck
TWI233913B (en) * 2002-06-06 2005-06-11 Murata Machinery Ltd Automated guided vehicle system
JP2007246215A (en) * 2006-03-15 2007-09-27 Murata Mach Ltd Conveying vehicle
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Also Published As

Publication number Publication date
IL264836B (en) 2022-01-01
CN109641595B (en) 2021-09-21
JP6665938B2 (en) 2020-03-13
EP3505416A1 (en) 2019-07-03
JPWO2018037762A1 (en) 2019-06-20
TWI708726B (en) 2020-11-01
US11476141B2 (en) 2022-10-18
WO2018037762A1 (en) 2018-03-01
EP3505416B1 (en) 2021-09-29
EP3505416A4 (en) 2020-04-15
US20190189488A1 (en) 2019-06-20
CN109641595A (en) 2019-04-16
KR102165190B1 (en) 2020-10-12
KR20190032493A (en) 2019-03-27
TW201806835A (en) 2018-03-01

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