SG11201507088YA - Fluid control apparatus and thermal sensor installation structure with respect to fluid control apparatus - Google Patents
Fluid control apparatus and thermal sensor installation structure with respect to fluid control apparatusInfo
- Publication number
- SG11201507088YA SG11201507088YA SG11201507088YA SG11201507088YA SG11201507088YA SG 11201507088Y A SG11201507088Y A SG 11201507088YA SG 11201507088Y A SG11201507088Y A SG 11201507088YA SG 11201507088Y A SG11201507088Y A SG 11201507088YA SG 11201507088Y A SG11201507088Y A SG 11201507088YA
- Authority
- SG
- Singapore
- Prior art keywords
- control apparatus
- fluid control
- respect
- installation structure
- thermal sensor
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/03—Control of flow with auxiliary non-electric power
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
- F16K37/005—Electrical or magnetic means for measuring fluid parameters
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/003—Housing formed from a plurality of the same valve elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/002—Actuating devices; Operating means; Releasing devices actuated by temperature variation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K37/00—Special means in or on valves or other cut-off apparatus for indicating or recording operation thereof, or for enabling an alarm to be given
- F16K37/0025—Electrical or magnetic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K13/00—Thermometers specially adapted for specific purposes
- G01K13/02—Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/002—Investigating fluid-tightness of structures by using thermal means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
- G05D23/22—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature the sensing element being a thermocouple
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Automation & Control Theory (AREA)
- Power Engineering (AREA)
- Valve Housings (AREA)
- Flow Control (AREA)
- Indication Of The Valve Opening Or Closing Status (AREA)
- Temperature-Responsive Valves (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013046867 | 2013-03-08 | ||
PCT/JP2014/053609 WO2014136557A1 (en) | 2013-03-08 | 2014-02-17 | Fluid control device and structure for installing thermal sensor at fluid control device |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11201507088YA true SG11201507088YA (en) | 2015-10-29 |
Family
ID=51491081
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201507088YA SG11201507088YA (en) | 2013-03-08 | 2014-02-17 | Fluid control apparatus and thermal sensor installation structure with respect to fluid control apparatus |
Country Status (7)
Country | Link |
---|---|
US (1) | US9696727B2 (en) |
JP (1) | JP6240661B2 (en) |
KR (1) | KR101775257B1 (en) |
CN (1) | CN105102868B (en) |
SG (1) | SG11201507088YA (en) |
TW (1) | TWI611128B (en) |
WO (1) | WO2014136557A1 (en) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102014012688B4 (en) * | 2014-09-01 | 2022-04-21 | Acs Air Compressor Systeme Gmbh | multi-way valve |
JP6564213B2 (en) * | 2015-03-25 | 2019-08-21 | 株式会社フジキン | Fluid control device |
JP6630483B2 (en) * | 2015-03-31 | 2020-01-15 | 株式会社フジキン | Sensor holder and fluid control device |
CN105466554B (en) * | 2015-12-25 | 2022-09-09 | 中电投工程研究检测评定中心有限公司 | Vertical structural component vibration detection device |
US11091837B2 (en) * | 2016-10-24 | 2021-08-17 | Fujikin Incorporated | Fluid control system and product manufacturing method using fluid control system |
KR20190120294A (en) * | 2017-03-30 | 2019-10-23 | 가부시키가이샤 후지킨 | Fluid Control Devices and Sensor Retention Members |
US11731153B2 (en) * | 2017-07-24 | 2023-08-22 | Carlisle Fluid Technologies, LLC | Systems and methods for communication and control in fluid delivery systems |
US11906062B2 (en) * | 2018-12-27 | 2024-02-20 | Fujikin Incorporated | Fluid control device, joint block and manufacturing method for fluid control device |
JPWO2020196353A1 (en) * | 2019-03-25 | 2020-10-01 | ||
EP3795971A1 (en) * | 2019-09-17 | 2021-03-24 | TE Connectivity India Private Limited | Fluid leak detector and fluid leak detection method based on heat transfer measurements |
JP7356141B2 (en) * | 2019-12-27 | 2023-10-04 | 株式会社フジキン | Fixed unit and fluid control device |
JP7530629B2 (en) | 2020-08-07 | 2024-08-08 | 株式会社フジキン | Sensor support and fluid control device equipped with same |
JP7488525B2 (en) | 2020-10-28 | 2024-05-22 | 株式会社フジキン | Sensor fixture and fluid control device |
Family Cites Families (37)
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US3857282A (en) * | 1973-04-30 | 1974-12-31 | Trace Inc | Portable tester for hydraulic power circuits |
US4016758A (en) * | 1975-09-09 | 1977-04-12 | Taylor Julian S | Thermal gauge probe |
JPS60102639U (en) | 1983-12-20 | 1985-07-12 | 三菱重工業株式会社 | temperature measuring device |
US5230366A (en) * | 1992-07-09 | 1993-07-27 | Griswold Controls | Automatic fluid flow control device |
US6044701A (en) * | 1992-10-16 | 2000-04-04 | Unit Instruments, Inc. | Thermal mass flow controller having orthogonal thermal mass flow sensor |
JP2695745B2 (en) | 1993-09-02 | 1998-01-14 | シーケーディ株式会社 | Gas supply device |
JP3605705B2 (en) * | 1995-07-19 | 2004-12-22 | 株式会社フジキン | Fluid controller |
US6019114A (en) * | 1997-02-12 | 2000-02-01 | Icon Dynaamics, Llc | Self-metering reservoir |
JP3292817B2 (en) * | 1997-04-24 | 2002-06-17 | 三菱電機株式会社 | Thermal flow sensor |
DE29717492U1 (en) * | 1997-09-30 | 1997-11-27 | Festo AG & Co, 73734 Esslingen | Fastening device for fastening a sensor |
JP4378553B2 (en) * | 1997-10-13 | 2009-12-09 | 忠弘 大見 | Fluid control device |
WO2000031462A1 (en) | 1998-11-20 | 2000-06-02 | Mykrolis Corporation | System and method for integrating gas components |
US6363958B1 (en) * | 1999-05-10 | 2002-04-02 | Parker-Hannifin Corporation | Flow control of process gas in semiconductor manufacturing |
US6308553B1 (en) * | 1999-06-04 | 2001-10-30 | Honeywell International Inc | Self-normalizing flow sensor and method for the same |
KR100323239B1 (en) | 1999-09-08 | 2002-02-19 | 최성봉 | A 3-way valve having tilt joining structure |
JP2001201414A (en) * | 2000-01-20 | 2001-07-27 | Smc Corp | Combined sensor and flow controller provided with the combined sensor |
ITPN20010003U1 (en) * | 2001-01-25 | 2002-07-25 | Sipa Spa | TEMPERATURE CHANGE DETECTION DEVICE WITH SENSOR HOUSING |
JP4435999B2 (en) | 2001-02-26 | 2010-03-24 | 株式会社堀場エステック | Fluid supply mechanism and replacement board using mass flow controller and adapter |
US6490229B1 (en) * | 2001-11-09 | 2002-12-03 | John T. Caver | Trolling motor transducer mount |
CA2416275A1 (en) * | 2003-01-08 | 2004-07-08 | Hydro Quebec | Motorized band for measuring the thickness of a pipe |
US6907904B2 (en) | 2003-03-03 | 2005-06-21 | Redwood Microsystems, Inc. | Fluid delivery system and mounting panel therefor |
US6843139B2 (en) * | 2003-03-12 | 2005-01-18 | Rosemount Inc. | Flow instrument with multisensors |
JP2004340199A (en) * | 2003-05-14 | 2004-12-02 | Fujikin Inc | Fluid control device with heater |
NL1025631C2 (en) * | 2004-03-03 | 2005-09-08 | Berkin Bv | Sealing assembly. |
JP2006083959A (en) | 2004-09-16 | 2006-03-30 | Fujikin Inc | Joint member with sensor |
JP4753173B2 (en) | 2005-06-17 | 2011-08-24 | 株式会社フジキン | Fluid control device |
US7296465B2 (en) * | 2005-11-22 | 2007-11-20 | Mks Instruments, Inc. | Vertical mount mass flow sensor |
US8079383B2 (en) * | 2006-12-07 | 2011-12-20 | Mks Instruments, Inc. | Controller gain scheduling for mass flow controllers |
US7552643B2 (en) * | 2006-12-08 | 2009-06-30 | Centre For Nuclear Energy Research (CNER) | Device and system for corrosion detection |
US8434522B2 (en) * | 2007-05-31 | 2013-05-07 | Tokyo Electron Limited | Fluid control apparatus |
US20080302426A1 (en) * | 2007-06-06 | 2008-12-11 | Greg Patrick Mulligan | System and method of securing removable components for distribution of fluids |
DE102007042789A1 (en) * | 2007-09-07 | 2009-03-12 | Robert Bosch Gmbh | Plug-in sensor for measuring at least one property of a fluid medium |
DE102010043865A1 (en) * | 2009-11-30 | 2011-07-14 | Horiba Stec Co., Ltd. | Fluid device |
DE102010015813A1 (en) * | 2010-04-20 | 2011-10-20 | Krohne Messtechnik Gmbh | Sensor arrangement for a calorimetric mass flowmeter |
JP5674521B2 (en) * | 2011-03-25 | 2015-02-25 | 株式会社東芝 | Steam valve device and steam turbine plant |
US9188989B1 (en) * | 2011-08-20 | 2015-11-17 | Daniel T. Mudd | Flow node to deliver process gas using a remote pressure measurement device |
US9335768B2 (en) * | 2013-09-12 | 2016-05-10 | Lam Research Corporation | Cluster mass flow devices and multi-line mass flow devices incorporating the same |
-
2014
- 2014-02-17 KR KR1020157022600A patent/KR101775257B1/en active IP Right Grant
- 2014-02-17 US US14/772,828 patent/US9696727B2/en active Active
- 2014-02-17 CN CN201480009481.0A patent/CN105102868B/en not_active Expired - Fee Related
- 2014-02-17 JP JP2015504224A patent/JP6240661B2/en active Active
- 2014-02-17 SG SG11201507088YA patent/SG11201507088YA/en unknown
- 2014-02-17 WO PCT/JP2014/053609 patent/WO2014136557A1/en active Application Filing
- 2014-03-06 TW TW103107621A patent/TWI611128B/en active
Also Published As
Publication number | Publication date |
---|---|
WO2014136557A1 (en) | 2014-09-12 |
KR101775257B1 (en) | 2017-09-05 |
CN105102868B (en) | 2017-05-24 |
US20160018827A1 (en) | 2016-01-21 |
TWI611128B (en) | 2018-01-11 |
JP6240661B2 (en) | 2017-11-29 |
TW201443359A (en) | 2014-11-16 |
US9696727B2 (en) | 2017-07-04 |
JPWO2014136557A1 (en) | 2017-02-09 |
CN105102868A (en) | 2015-11-25 |
KR20150107879A (en) | 2015-09-23 |
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