SG10201709524QA - Chemical sensor package for highly pressured environment - Google Patents
Chemical sensor package for highly pressured environmentInfo
- Publication number
- SG10201709524QA SG10201709524QA SG10201709524QA SG10201709524QA SG10201709524QA SG 10201709524Q A SG10201709524Q A SG 10201709524QA SG 10201709524Q A SG10201709524Q A SG 10201709524QA SG 10201709524Q A SG10201709524Q A SG 10201709524QA SG 10201709524Q A SG10201709524Q A SG 10201709524QA
- Authority
- SG
- Singapore
- Prior art keywords
- sensor package
- chemical sensor
- highly pressured
- pressured environment
- environment
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76895—Local interconnects; Local pads, as exemplified by patent document EP0896365
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3114—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3135—Double encapsulation or coating and encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/315—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the encapsulation having a cavity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/481—Internal lead connections, e.g. via connections, feedthrough structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/01—Manufacture or treatment
- H10D30/021—Manufacture or treatment of FETs having insulated gates [IGFET]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Molecular Biology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SG2013096045 | 2013-12-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201709524QA true SG10201709524QA (en) | 2018-01-30 |
Family
ID=53545461
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201709524QA SG10201709524QA (en) | 2013-12-26 | 2014-12-26 | Chemical sensor package for highly pressured environment |
SG10201408698SA SG10201408698SA (en) | 2013-12-26 | 2014-12-26 | Chemical Sensor Package For Highly Pressured Environment |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201408698SA SG10201408698SA (en) | 2013-12-26 | 2014-12-26 | Chemical Sensor Package For Highly Pressured Environment |
Country Status (2)
Country | Link |
---|---|
US (2) | US9431315B2 (en) |
SG (2) | SG10201709524QA (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9431315B2 (en) | 2013-12-26 | 2016-08-30 | Agency For Science, Technology And Research | Chemical sensor package for highly pressured environment |
KR102497583B1 (en) | 2015-10-27 | 2023-02-10 | 삼성전자주식회사 | Semiconductor devices having flexible interconnection and methods for fabricating the same |
KR102632563B1 (en) | 2016-08-05 | 2024-02-02 | 삼성전자주식회사 | Semiconductor Package |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5632854A (en) * | 1995-08-21 | 1997-05-27 | Motorola, Inc. | Pressure sensor method of fabrication |
US6790599B1 (en) * | 1999-07-15 | 2004-09-14 | Microbionics, Inc. | Microfluidic devices and manufacture thereof |
US6548895B1 (en) * | 2001-02-21 | 2003-04-15 | Sandia Corporation | Packaging of electro-microfluidic devices |
CN100578816C (en) * | 2001-08-24 | 2010-01-06 | 肖特股份公司 | Method for forming contacts and packaged integrated circuit assembly |
AU2002342623A1 (en) * | 2001-08-24 | 2003-03-10 | Schott Glas | Method for producing electronic components |
DE102005052713A1 (en) * | 2005-11-04 | 2007-05-16 | Clondiag Chip Tech Gmbh | Apparatus and method for detecting molecular interactions |
US7538401B2 (en) * | 2005-05-03 | 2009-05-26 | Rosemount Aerospace Inc. | Transducer for use in harsh environments |
US7875942B2 (en) * | 2007-01-04 | 2011-01-25 | Stmicroelectronics, S.R.L. | Electronic device including MEMS devices and holed substrates, in particular of the LGA or BGA type |
ITMI20070099A1 (en) * | 2007-01-24 | 2008-07-25 | St Microelectronics Srl | ELECTRONIC DEVICE INCLUDING DIFFERENTIAL SENSOR DEVICES MEMS AND SUBSTRATES LAUNDRY |
US9039655B2 (en) * | 2009-11-06 | 2015-05-26 | Crisi Medical Systems, Inc. | Medication injection site and data collection system |
US20110192121A1 (en) * | 2010-02-08 | 2011-08-11 | Sealed Air Corporation (Us) | Inflatable Mailer, Apparatus, and Method for Making the Same |
US9389158B2 (en) * | 2010-02-12 | 2016-07-12 | Dan Angelescu | Passive micro-vessel and sensor |
US8981789B2 (en) * | 2012-04-16 | 2015-03-17 | Sharp Kabushiki Kaisha | Active matrix device and method of driving the same |
US9010190B2 (en) * | 2012-04-20 | 2015-04-21 | Rosemount Aerospace Inc. | Stress isolated MEMS structures and methods of manufacture |
US9447895B2 (en) * | 2012-05-25 | 2016-09-20 | The Board Of Trustees Of The University Of Illinois | Microfluidic pressure amplifier circuits and electrostatic gates for pneumatic microsystems |
US9431315B2 (en) | 2013-12-26 | 2016-08-30 | Agency For Science, Technology And Research | Chemical sensor package for highly pressured environment |
-
2014
- 2014-12-26 US US14/583,261 patent/US9431315B2/en not_active Expired - Fee Related
- 2014-12-26 SG SG10201709524QA patent/SG10201709524QA/en unknown
- 2014-12-26 SG SG10201408698SA patent/SG10201408698SA/en unknown
-
2016
- 2016-07-26 US US15/219,986 patent/US9841399B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US9841399B2 (en) | 2017-12-12 |
SG10201408698SA (en) | 2015-07-30 |
US9431315B2 (en) | 2016-08-30 |
US20170003247A1 (en) | 2017-01-05 |
US20150206816A1 (en) | 2015-07-23 |
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