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SG10201401376TA - Film-forming apparatus, carrier and method of manufacturing substrate on which film is formed - Google Patents

Film-forming apparatus, carrier and method of manufacturing substrate on which film is formed

Info

Publication number
SG10201401376TA
SG10201401376TA SG10201401376TA SG10201401376TA SG10201401376TA SG 10201401376T A SG10201401376T A SG 10201401376TA SG 10201401376T A SG10201401376T A SG 10201401376TA SG 10201401376T A SG10201401376T A SG 10201401376TA SG 10201401376T A SG10201401376T A SG 10201401376TA
Authority
SG
Singapore
Prior art keywords
film
carrier
forming apparatus
manufacturing substrate
substrate
Prior art date
Application number
SG10201401376TA
Inventor
Tomoya Utashiro
Original Assignee
Showa Denko Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko Kk filed Critical Showa Denko Kk
Publication of SG10201401376TA publication Critical patent/SG10201401376TA/en

Links

SG10201401376TA 2013-12-27 2014-04-09 Film-forming apparatus, carrier and method of manufacturing substrate on which film is formed SG10201401376TA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013273561 2013-12-27

Publications (1)

Publication Number Publication Date
SG10201401376TA true SG10201401376TA (en) 2015-07-30

Family

ID=51377212

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201401376TA SG10201401376TA (en) 2013-12-27 2014-04-09 Film-forming apparatus, carrier and method of manufacturing substrate on which film is formed

Country Status (3)

Country Link
CN (2) CN203794979U (en)
MY (1) MY155336A (en)
SG (1) SG10201401376TA (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG10201401376TA (en) * 2013-12-27 2015-07-30 Showa Denko Kk Film-forming apparatus, carrier and method of manufacturing substrate on which film is formed

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009277275A (en) * 2008-05-13 2009-11-26 Showa Denko Kk Manufacturing method and apparatus for magnetic recording medium
JP5566669B2 (en) * 2009-11-19 2014-08-06 昭和電工株式会社 In-line film forming apparatus and method for manufacturing magnetic recording medium
SG10201401376TA (en) * 2013-12-27 2015-07-30 Showa Denko Kk Film-forming apparatus, carrier and method of manufacturing substrate on which film is formed

Also Published As

Publication number Publication date
CN104746032A (en) 2015-07-01
CN104746032B (en) 2017-04-12
CN203794979U (en) 2014-08-27
MY155336A (en) 2015-10-01

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