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KR970018538A - Ring lighting system and ring lighting method using the same - Google Patents

Ring lighting system and ring lighting method using the same Download PDF

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Publication number
KR970018538A
KR970018538A KR1019950031101A KR19950031101A KR970018538A KR 970018538 A KR970018538 A KR 970018538A KR 1019950031101 A KR1019950031101 A KR 1019950031101A KR 19950031101 A KR19950031101 A KR 19950031101A KR 970018538 A KR970018538 A KR 970018538A
Authority
KR
South Korea
Prior art keywords
prism
ring lighting
ring
light
same
Prior art date
Application number
KR1019950031101A
Other languages
Korean (ko)
Inventor
최용석
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950031101A priority Critical patent/KR970018538A/en
Publication of KR970018538A publication Critical patent/KR970018538A/en

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Abstract

고리조명계 및 이를 이용한 고리조명방법에 관하여 기재하고 있다. 본 발명에 따른 고리조명계는, 광원으로부터 입사된 광의 일부를 굴절시키고 일부는 직진시키는 제1프리즘; 상기 제1프리즘에 의해 굴절된 광을 다시 직진시키도록 상기 제1프리즘의 하부에 설치된 제2프리즘; 및 상기 제1프리즘을 통과한 광의 직진성분을 상쇄시키기 위해 상기 제2프리즘의 상부에 설치된 프리즈넬 존 플레이트(Fresnel Zone Plate)를 구비한다. 따라서, 고리조명의 효율을 높을 수 있다.A ring lighting system and a ring lighting method using the same are described. A ring illumination system according to the present invention includes a first prism that refracts and partially straightens a portion of light incident from a light source; A second prism disposed below the first prism to straighten the light refracted by the first prism again; And a Fresnel Zone Plate provided on the upper portion of the second prism to cancel the straight component of the light passing through the first prism. Therefore, the efficiency of ring lighting can be increased.

Description

고리조명계 및 이를 이용한 고리조명방법Ring lighting system and ring lighting method using the same

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제3도는 본 발명의 일실시예에 따른 고리조명방법을 설명하기 위해 도시한 단면도.3 is a cross-sectional view illustrating a ring lighting method according to an embodiment of the present invention.

Claims (2)

광원으로부터 입사된 광의 일부를 굴절시키고 일부는 직진시키는 제1프리즘; 상기 제1프리즘에 의해 굴절된 광을 다시 직진시키도록 상기 제1프리즘의 하부에 설치된 제2프리즘; 및 상기 제1프리즘을 통과한 광의 직진성분을 상쇄시키기 위해 상기 제2프리즘의 상부에 설치된 프리즈넬 존 플레이트(Fresnel Zone Plate)를 구비하는 것을 특징으로 하는 고리조명계.A first prism that refracts and partially straightens a portion of the light incident from the light source; A second prism disposed below the first prism to straighten the light refracted by the first prism again; And a Fresnel Zone plate provided on the upper portion of the second prism to cancel the straight component of the light passing through the first prism. 반도체 소자의 패턴을 형성하기 위한 조명방법에 있어서, 프리즈넬 존 플레이트(Fresnel Zone Plate)를 동시에 이용하는 것을 특징으로 하는 고리조명방법.An illumination method for forming a pattern of a semiconductor device, the ring illumination method characterized by using a Fresnel Zone Plate at the same time.
KR1019950031101A 1995-09-21 1995-09-21 Ring lighting system and ring lighting method using the same KR970018538A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950031101A KR970018538A (en) 1995-09-21 1995-09-21 Ring lighting system and ring lighting method using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950031101A KR970018538A (en) 1995-09-21 1995-09-21 Ring lighting system and ring lighting method using the same

Publications (1)

Publication Number Publication Date
KR970018538A true KR970018538A (en) 1997-04-30

Family

ID=66616179

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950031101A KR970018538A (en) 1995-09-21 1995-09-21 Ring lighting system and ring lighting method using the same

Country Status (1)

Country Link
KR (1) KR970018538A (en)

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Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19950921

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid