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KR970008385A - 폴리싱 패드 조정 - Google Patents

폴리싱 패드 조정 Download PDF

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Publication number
KR970008385A
KR970008385A KR1019960026711A KR19960026711A KR970008385A KR 970008385 A KR970008385 A KR 970008385A KR 1019960026711 A KR1019960026711 A KR 1019960026711A KR 19960026711 A KR19960026711 A KR 19960026711A KR 970008385 A KR970008385 A KR 970008385A
Authority
KR
South Korea
Prior art keywords
polishing pad
cutting means
article
cutting
polishing
Prior art date
Application number
KR1019960026711A
Other languages
English (en)
Inventor
카알스러드 크리스
Original Assignee
제임즈 엔 화알리
스피드화암 코오포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 제임즈 엔 화알리, 스피드화암 코오포레이션 filed Critical 제임즈 엔 화알리
Publication of KR970008385A publication Critical patent/KR970008385A/ko

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/02—Lapping machines or devices; Accessories designed for working surfaces of revolution

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)

Abstract

본 발명은 상부 표면에 고정된 폴리싱 패드를 갖는 회전 연마 휘일 및 폴리싱 패드와 접촉하여 연마되는 제품을 지지하기 위한 또한 제품에 소정의 압력을 작용시키기 위한 수직으로 이동가능한 캐리어 요소를 포함하고 있는 제품을 연마하기 위한 장치에 관한 것이다. 캐리어와 함께 이동가능한 그리고 접촉에 의해 폴리싱 패드를 조정하기 위해 원형 형상으로 배치된 절단 수단을 아래 표면상에 갖는 조정 요소가 캐리어에 작동가능하게 부착되어 있다.

Description

폴리싱 패드 조정
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 본 발명의 패드 조정 수단을 포함하는 연마 장치를 도시한 개략적인 배면도이다.

Claims (10)

  1. 상부 표면에 고정된 폴리싱 패드를 갖는 회전 폴리싱 패드, 폴리싱 패드와 일정한 압력하에 접촉하여 연마되는 제품을 운반하기 위한 수직으로 이동할 수 있는 캐리어 요소, 및 접촉에 의해 폴리싱 패드를 조정하기 위한 원형 형상으로 배치된 절단 수단을 하부 표면상에 가진 캐리어 요소와 함께 이동할 수 있는 조정 요소를 포함하는 것을 특징으로 하는 제품을 연마하기 위한 장치.
  2. 제1항에 있어서, 조정 요소의 하부 표면은 절단 수단을 형성하는 날카로운 점에서 끝난다는 것을 특징으로 하는 제품을 연마하기 위한 장치.
  3. 제1항에 있어서, 조정 요소는 하부 주변을 따라 이격된 절단 부분이 제공된다는 것을 특징으로 하는 제품을 연마하기 위한 장치.
  4. 제1항에 있어서, 절단 수단은 조정 요소의 하부 표면에 고정된 단단한 절단 요소인 것을 특징으로 하는 제품을 연마하기 위한 장치.
  5. 제1항에 있어서, 절단 수단은 다이아몬드 입자인 것을 특징으로 하는 제품을 연마하기 위한 장치.
  6. 제1항에 있어서, 절단 수단은 절단 날을 포함하는 것을 특징으로 하는 제품을 연마하기 위한 장치.
  7. 제1항에 있어서, 절단 수단은 톱니 모양의 날인 것을 특징으로 하는 제품을 연마하기 위한 장치.
  8. 연마되는 제품을 일정 압력하에서 제품을 연마하기 위해 폴리싱 패드와 함께 상부 표면상에 덮여 있는 회전 연마 휘일과 접촉시키는 단계, 및 제품을 연마하면서 패드를 조정하기 위한 절단 수단을 가진 조정 요소와 패드를 접촉시키는 단계를 포함하는 것을 특징으로 하는 제품을 연마하기 위한 방법.
  9. 제8항에 있어서, 연마제 슬러리는 연마시 폴리싱 패드 및 제품사이에 도입되는 것을 특징으로 하는 제품을 연마하기 위한 방법.
  10. 제8항에 있어서, 조정 요소는 패드에 접촉하고 있는 동안 회전하는 것을 특징으로 하는 제품을 연마하기 위한 방법.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960026711A 1995-07-03 1996-07-02 폴리싱 패드 조정 KR970008385A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/497,530 1995-07-03
US08/497,530 US5569062A (en) 1995-07-03 1995-07-03 Polishing pad conditioning

Publications (1)

Publication Number Publication Date
KR970008385A true KR970008385A (ko) 1997-02-24

Family

ID=23977234

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960026711A KR970008385A (ko) 1995-07-03 1996-07-02 폴리싱 패드 조정

Country Status (8)

Country Link
US (1) US5569062A (ko)
JP (1) JPH09103954A (ko)
KR (1) KR970008385A (ko)
DE (1) DE19626048A1 (ko)
GB (1) GB2302830A (ko)
MY (1) MY113867A (ko)
SG (1) SG44959A1 (ko)
TW (1) TW348088B (ko)

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Also Published As

Publication number Publication date
JPH09103954A (ja) 1997-04-22
US5569062A (en) 1996-10-29
GB9613871D0 (en) 1996-09-04
MY113867A (en) 2002-06-29
TW348088B (en) 1998-12-21
GB2302830A (en) 1997-02-05
DE19626048A1 (de) 1997-01-09
SG44959A1 (en) 1997-12-19

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