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KR940022119A - Optical scanning device - Google Patents

Optical scanning device Download PDF

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Publication number
KR940022119A
KR940022119A KR1019940005965A KR19940005965A KR940022119A KR 940022119 A KR940022119 A KR 940022119A KR 1019940005965 A KR1019940005965 A KR 1019940005965A KR 19940005965 A KR19940005965 A KR 19940005965A KR 940022119 A KR940022119 A KR 940022119A
Authority
KR
South Korea
Prior art keywords
reflecting
optical scanning
mirror
scanning device
reflecting surfaces
Prior art date
Application number
KR1019940005965A
Other languages
Korean (ko)
Inventor
쯔치모토 고조
Original Assignee
히데오 나가오
닛뽄 아비오닉스 캄퍼니 리미티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 히데오 나가오, 닛뽄 아비오닉스 캄퍼니 리미티드 filed Critical 히데오 나가오
Publication of KR940022119A publication Critical patent/KR940022119A/en

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors
    • G02B26/129—Systems in which the scanning light beam is repeatedly reflected from the polygonal mirror

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Telescopes (AREA)

Abstract

본 발명의 광학주사장치는 광학주사미러, 반사미러와 렌즈 시스템을 포함한다.The optical scanning device of the present invention includes an optical scanning mirror, a reflecting mirror and a lens system.

광학주사미러는 입사빔을 반사시켜주기 위한 제 1 반사면과, 입사빔을 반사시켜 방출시며 주기 위한 제 2 반사면을 갖는다.The optical scanning mirror has a first reflecting surface for reflecting the incident beam and a second reflecting surface for reflecting and emitting the incident beam.

광학 주사미러는 제 1 및 제 2 반사면의 각도를 소정방향으로 동시에 변화시켜 준다.The optical scanning mirror simultaneously changes the angles of the first and second reflecting surfaces in a predetermined direction.

반사미러는 제 1 및 제 2 반사면 사이의 광학통로내에 배열되어 이중 반사통로를 형성한다.The reflecting mirror is arranged in the optical path between the first and second reflecting surfaces to form a double reflecting path.

렌즈시스템은 이중 반사통로내에 배열되어 제 1 반사면에 의해 반사된 빔을 소정 각도로 제 2 반사면에 입사시켜 준다.The lens system is arranged in the dual reflection path to cause the beam reflected by the first reflection surface to enter the second reflection surface at an angle.

Description

광학주사장치Optical scanning device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제 1 도는 본 발명의 제 1 실시예에 따른 광학주사장치의 원리를 나타내는 도면,1 is a view showing the principle of an optical scanning device according to a first embodiment of the present invention,

제 2 도는 본 발명의 제 2 실시예에 따른 광학주사장치의 원리를 나타내는 도면,2 is a view showing the principle of an optical scanning device according to a second embodiment of the present invention,

제 3 도는 종래의 광학주사장치에서 다중 반사에 의한 주사각도의 증가 원리를 설명하기 위한 도면.3 is a view for explaining the principle of increasing the scanning angle due to multiple reflections in the conventional optical scanning device.

Claims (8)

입사빔을 반사시키기 위한 제 1 반사면(A)과 입사빔을 반사시켜 방출시키기 위한 제 2 반사면(B)을 갖으며, 동시에 상기 제 1 및 제 2 반사면(A)(B)의 각도를 소정 방향으로 변화시켜 주기 위한 광학주사미러(10)와, 상기 제 1 및 제 2 반사면(A)(B)사이의 광학 통로내에 배열되어 이중 반사 통로를 형성하기 위한 반사미러(20)와, 이중 반사 통로내에 배열되어 상기 제 1 반사면(A)에 의해 반사된 빔을 상기 제 2 반사면(B)에 소정 각도로 입사시켜 쥑 위한 렌즈시스템(31,32)을 포함하는 것을 특징으로 하는 광학주사장치.It has a first reflecting surface A for reflecting the incident beam and a second reflecting surface B for reflecting and emitting the incident beam, and at the same time the angles of the first and second reflecting surfaces A and B. An optical scanning mirror 10 for changing a direction in a predetermined direction, a reflecting mirror 20 arranged in an optical path between the first and second reflecting surfaces A and B to form a double reflecting path, And lens systems 31 and 32 arranged in the dual reflecting passage for injecting the beam reflected by the first reflecting surface A into the second reflecting surface B at a predetermined angle. Optical scanning device. 제 1 항에 있어서, 광학주사미러(10)는 상기 제 1 및 제 2 반사면(A)(B)을 포함하는 복수개의 반사면을 갖으며, 회전에 따라 복수개의 반사면의 각도를 한 방향으로 변화시켜 주기 위한 다면체 회전미러를 포함하는 것을 특징으로 하는 광학주사장치.The optical scanning mirror 10 of claim 1, wherein the optical scanning mirror 10 has a plurality of reflecting surfaces including the first and second reflecting surfaces A and B, and the angles of the plurality of reflecting surfaces are rotated in one direction. Optical scanning device comprising a polyhedral rotating mirror for changing to. 제 2 항에 있어서, 다면체 회전미러는 8개의 반사면을 갖는 정 8면체 미러를 갖으며, 상기 제 1 반사면(A)과 제2 반사면(B)은 상기 정 8 면체 미러의 8개의 반사면중 한 면을 이웃하는 두 반사면 사이에 위치시킬 수 있도록 이웃하는 2개의 반사면에 의해 구성되어지는 것을 특징으로 하는 광학주사장치.3. The polyhedral rotating mirror according to claim 2, wherein the polyhedral rotating mirror has an octahedral mirror having eight reflecting surfaces, and the first reflecting surface A and the second reflecting surface B are eight half of the octahedral mirror. An optical scanning device, characterized by being composed of two neighboring reflecting surfaces so that one side of the slope can be positioned between two neighboring reflecting surfaces. 제 1 항에 있어서, 상기 광학주사미러(10)는 각각 선단면에 상기 제 1 및 제 2 반사면을 갖는 한 쌍의 포크(121a, 121b)를 갖으며, 진동에 따라 상기 제 1 및 제 2 반사면의 각도를 서로 반대방향으로 변화시켜주는 Y자형 튜닝포크를 포함하는 것을 특징으로 하는 광학주사장치.The optical scanning mirror 10 has a pair of forks 121a and 121b having the first and second reflecting surfaces, respectively, on a front end surface thereof, and the first and second beams are vibrated according to vibration. An optical scanning device comprising a Y-shaped tuning fork that changes the angle of the reflecting surface in opposite directions. 제 1 항에 있어서, 상기 렌즈시스템은 적어도 2개의 렌즈에 의해 구성되고 상기 광학주사미러의 상기 제 1 및 제 2 반사면(A)(B)의 각도 변화방향이 동일방향 또는 반대방향인가에 따라 도립 또는 정립 망원경으로 작용하는 망원경을 포함하는 것을 특징으로 하는 광학주사장치.2. The lens system according to claim 1, wherein the lens system is constituted by at least two lenses, and the angle changing direction of the first and second reflecting surfaces A and B of the optical scanning mirror is the same direction or the opposite direction. An optical scanning device comprising a telescope acting as an inverted or upright telescope. 제 1 항에 있어서, 상기 렌즈시스템은 배율이 α인 망원경을 포함하고, 이중 반사통로내의 광학주사각도가 기계적 변화각도 δ에서 하기의 식으로 표현되는 방원경을 포함하는 것을 특징으로 하는 광학주사장치.The optical scanning device of claim 1, wherein the lens system comprises a telescope having a magnification of α, and the optical scanning angle in the dual reflection path includes a telescope represented by the following formula at the mechanical change angle δ. . θ=2αδ+2δ=2δ(α+1)θ = 2αδ + 2δ = 2δ (α + 1) 제 6 항에 있어서, 상기 망원경의 배율은 선택적으로 설정되며, 광학주사각도가 상기 망원경의 배율의 변화에 따라 정확하게 선택되어 지는 것을 특징으로 하는 광학주사장치.The optical scanning device of claim 6, wherein the magnification of the telescope is selectively set, and the optical scanning angle is accurately selected according to the change of the magnification of the telescope. 제 1 항에 있어서, 상기 광학주사미러의 상기 제1 반사면(A)에 입사되는 소정 직경을 갖는 평행빔의 레이저빔을 방출시키는 레이저 광원(40)을 더 포함하며, 상기 반사미러가 이중 반사통로를 형성하는 2개의 직각미러(21,22)를 결합시켜 얻어진 바디에 의해 구성되어 상기 제 1 반사면에 의해 반사된 빔의 광학통로가 상기 제 2 반사면에 입사되는 빔의 광학통로에 평행이 되도록 설정시켜주고, 상기 렌즈 시스템은 상기 반사미러의 입사면(21a)과 반사면(22c)에 위치한 1쌍의 볼록렌즈로 구성되는 것을 특징으로 하는 광학주사장치.The laser beam source of claim 1, further comprising a laser light source (40) for emitting a laser beam of a parallel beam having a predetermined diameter incident on the first reflection surface (A) of the optical scanning mirror, wherein the reflection mirror is a dual reflection The optical path of the beam reflected by the first reflecting surface, composed of a body obtained by combining two right-angle mirrors 21 and 22 forming a passage, is parallel to the optical path of the beam incident on the second reflecting surface. And the lens system comprises a pair of convex lenses positioned on the incident surface (21a) and the reflective surface (22c) of the reflective mirror. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019940005965A 1993-03-24 1994-03-24 Optical scanning device KR940022119A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5089375A JPH06273683A (en) 1993-03-24 1993-03-24 Optical scanner
JP93-089375 1993-03-24

Publications (1)

Publication Number Publication Date
KR940022119A true KR940022119A (en) 1994-10-20

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Application Number Title Priority Date Filing Date
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EP (1) EP0617307A3 (en)
JP (1) JPH06273683A (en)
KR (1) KR940022119A (en)
CN (1) CN1031671C (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3922382B2 (en) * 1995-11-24 2007-05-30 セイコーエプソン株式会社 Optical scanning device
JP3707508B2 (en) * 1995-11-24 2005-10-19 セイコーエプソン株式会社 Optical scanning device
EP0825468A3 (en) * 1996-08-21 1999-04-21 Seiko Epson Corporation Optical scanner
DE19906874C1 (en) * 1999-02-18 2001-01-11 Zeiss Carl Jena Gmbh Relay optics for a deflection system and a deflection system
JP4701593B2 (en) * 2003-08-21 2011-06-15 セイコーエプソン株式会社 Optical scanning apparatus and image forming apparatus
JP4576816B2 (en) * 2003-09-17 2010-11-10 セイコーエプソン株式会社 Optical scanning apparatus and image forming apparatus
JP7247618B2 (en) * 2019-02-05 2023-03-29 富士電機株式会社 Optical scanning device and optical scanning method
CN118091706B (en) * 2024-04-23 2024-07-12 深圳大舜激光技术有限公司 Multi-telescope array rapid scanning measurement system based on laser radar

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4251125A (en) * 1976-12-28 1981-02-17 Canon Kabushiki Kaisha Scanning optical system including an afocal system
JPS6048732B2 (en) * 1977-02-04 1985-10-29 キヤノン株式会社 Self-amplifying polarized scanning optical system
JPS60107016A (en) * 1983-11-15 1985-06-12 Anritsu Corp Device for obtaining parallel scanning luminous flux from incident luminous flux
JPH0746173B2 (en) * 1986-03-27 1995-05-17 セイコーエプソン株式会社 Light scan
JPH0254212A (en) * 1988-08-19 1990-02-23 Nec Corp Optical scanner

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Publication number Publication date
EP0617307A3 (en) 1995-10-18
CN1031671C (en) 1996-04-24
CN1096589A (en) 1994-12-21
JPH06273683A (en) 1994-09-30
EP0617307A2 (en) 1994-09-28

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