KR20210099418A - Shower head manufacturing method and shower head manufactured by the same - Google Patents

Abstract

The present invention relates to a manufacturing method for a shower head for a semiconductor manufacturing facility and a shower head manufactured by the same. In accordance with the present invention, the manufacturing method for the shower head for the semiconductor manufacturing facility comprises: a raw materials individual preparation step to individually prepare shaft raw materials, upper plate raw materials, and lower plate raw materials, which are raw materials for each of a shaft, upper plate, and lower plate in the shower head comprising the upper plate, the lower plate, and the shaft connected to the upper plate; a first molding materials manufacturing step by rotary friction welding to manufacture a first molding material molded by a middle step by bonding the shaft raw materials and the upper plate raw materials by a rotary friction welding process; a second molding materials processing step to use a certain processing process, and processes the first molding material into a second molding material integrating the upper plate and the shaft; a lower plate processing step to process the lower plate by using the lower plate raw materials through the processing process; and a molding material and lower plate bonding step to integrate and bond the second molding material with the lower plate and manufacture the shower head. The present invention aims to provide a manufacturing method for a shower head for a semiconductor manufacturing facility and a shower head manufactured by the same, which are able to increase productivity.

Description

A method for manufacturing a shower head for a semiconductor manufacturing facility and a shower head manufactured according to the manufacturing method {Shower head manufacturing method and shower head manufactured by the same}

The present invention relates to a method for manufacturing a shower head for a semiconductor manufacturing facility and a shower head manufactured according to the manufacturing method, and more specifically, to a method for manufacturing a shower head for a semiconductor manufacturing facility, and more specifically, to significantly reduce the amount of material used and processing time compared to the prior art, thereby increasing productivity as well as price It relates to a method for manufacturing a shower head for a semiconductor manufacturing facility, which can secure competitiveness, and a shower head manufactured according to the manufacturing method.

The process of manufacturing a semiconductor device includes a chemical vapor deposition process for forming an oxide film, a metal film, or a nitride film on a wafer, a film formation process such as a sputtering process, and the film formation process. A dry etching process of etching and patterning a thin film formed on a wafer is included.

The film forming process and the dry etching process are processes in which the process gas supplied into the process chamber is activated with heat, electric field, magnetic field, etc. to induce the activated process gas and the wafer to react with each other.

In addition, the process gas supplied into the process chamber in which the film formation process and the dry etching process are performed is supplied into the process chamber through a shower head installed on the inner side of the process chamber.

The shower head has various shapes and types, and a manufacturing method thereof will be described by taking the shower head 1 shown in FIG. 1 as an example.

1 is a schematic perspective view of a conventional shower head, and FIGS. 2 to 5 are step-by-step process diagrams for manufacturing the shower head of FIG. 1 .

Referring to these drawings, the conventional shower head 1 has an upper structure 10 in which the shaft 20 and the upper plate 30 are integrally formed, and a lower plate coupled to the upper plate 30 of the upper structure 10 ( 40) is included.

Although the internal structure is not shown, a supply hole through which the process gas is supplied is formed in the shaft 20 , and a diffusion space through which the process gas is diffused is formed on the upper plate 30 , and the lower plate 40 . A plurality of gas injection fine holes (holes) are formed.

On the other hand, the structure of such a shower head 1 is general, such a shower head 1 is manufactured by the method of FIGS. 2 to 5 .

First, in order to make the upper structure 10 in which the shaft 20 and the upper plate 30 are integrally formed, for example, a cylindrical metal raw material 2 as shown in FIG. 2 is prepared.

Then, by processing the raw material (2) as shown in Figure 3 to make the upper structure (10a) before processing. Although the shape of the upper structure 10a before processing is not the same as in FIG. 1 , the shaft 20a before processing and the upper plate 30a before processing are formed.

Next, by properly processing the upper structure 10a before processing of FIG. 3 with a machine tool to make the upper structure 10 after substantial processing as in FIG. The shower head 1 of the same type can be manufactured.

Although it is common to manufacture the shower head 1 in this way, when the shower head 1 is manufactured by applying this classical method, the amount of material used is inevitably increased. Since there are many parts (part A in FIG. 2), material loss is inevitably large, which inevitably takes a long processing time, thereby reducing productivity, and thereby weakening price competitiveness.

Korean Intellectual Property Office Application No. 10-2004-0003869 Korean Intellectual Property Office Application No. 10-2007-0111772 Korean Intellectual Property Office Application No. 10-2010-0015324 Korean Intellectual Property Office Application No. 10-2018-0007191

An object of the present invention is a method for manufacturing a shower head for semiconductor manufacturing equipment and a shower head manufactured according to the manufacturing method, which can increase productivity by remarkably reducing material usage and processing time compared to the existing ones, as well as secure price competitiveness is to provide

The object is, in a shower head having an upper and lower plate and a shaft connected to the upper plate, each raw material for the shaft, the upper plate, and the lower plate, each raw material for the shaft, the raw material for the upper plate, the raw material for the lower plate separately preparing raw materials; A primary molding material manufacturing step by friction welding of manufacturing a primary molding material molded in an intermediate step by integrally joining the shaft raw material and the upper plate raw material by friction welding (Rotary Friction Welding); a secondary molding material processing step of processing the primary molding material into a secondary molding material in which the upper plate and the shaft are integrated using a predetermined processing process; a lower plate processing step of processing the lower plate by processing the lower plate raw material through the processing process; and a molding material and a lower plate bonding step for manufacturing a shower head by integrally bonding the secondary molding material and the lower plate to a shower head manufacturing method for semiconductor manufacturing facilities and a shower head manufactured according to the manufacturing method is achieved by

Prior to the progress of the secondary molding material processing step, it may further include a material heat treatment step of performing heat treatment on the primary molding material.

The raw material for the shaft, the raw material for the upper plate, and the raw material for the lower plate may be an aluminum alloy.

The aluminum alloy may be selected from aluminum/silicon (Al/Si), aluminum/manganese (Al/Mn), aluminum/magnesium (Al/Mg), and an alloy for aluminum die casting.

The material heat treatment step may be a T6 heat treatment step.

According to the present invention, it is possible to increase productivity by remarkably reducing the amount of material used and processing time compared to the prior art, as well as to secure price competitiveness.

1 is a schematic perspective view of a conventional shower head.
2 to 5 are step-by-step process diagrams for manufacturing the shower head of FIG. 1 .
6 is a flowchart of a method of manufacturing a shower head for a semiconductor manufacturing facility according to an embodiment of the present invention.
7 is a perspective view of a shower head manufactured according to the method for manufacturing a shower head for a semiconductor manufacturing facility of FIG. 6 .
8 to 15 are step-by-step process diagrams for manufacturing the shower head of FIG. 7 .

Hereinafter, with reference to the accompanying drawings, the embodiments of the present invention will be described in detail so that those of ordinary skill in the art can easily implement them.

However, since the description of the present invention is merely an embodiment for structural or functional description, the scope of the present invention should not be construed as being limited by the embodiment described in the text.

For example, the embodiment is capable of various changes and may have various forms, so it should be understood that the scope of the present invention includes equivalents capable of realizing the technical idea.

In addition, the object or effect presented in the present invention does not mean that a specific embodiment should include all of them or only such effects, so the scope of the present invention should not be construed as being limited thereby.

In the present specification, the present embodiment is provided to complete the disclosure of the present invention, and to fully inform those of ordinary skill in the art to which the present invention pertains to the scope of the invention. And the invention is only defined by the scope of the claims.

Thus, in some embodiments, well-known components, well-known operations, and well-known techniques have not been specifically described to avoid obscuring the present invention.

Meanwhile, the meaning of the terms described in the present invention is not limited to the dictionary meaning, and should be understood as follows.

When a component is referred to as being “connected” to another component, it may be directly connected to the other component, but it should be understood that other components may exist in between. On the other hand, when it is mentioned that a certain element is "directly connected" to another element, it should be understood that the other element does not exist in the middle. Meanwhile, other expressions describing the relationship between elements, that is, “between” and “immediately between” or “neighboring to” and “directly adjacent to”, etc., should be interpreted similarly.

The singular expression is to be understood as including the plural expression unless the context clearly dictates otherwise, and terms such as "comprises" or "have" refer to the specified feature, number, step, action, component, part or these It is intended to indicate that a combination exists, and it should be understood that it does not preclude the possibility of the existence or addition of one or more other features or numbers, steps, operations, components, parts, or combinations thereof.

All terms used herein have the same meanings as commonly understood by those of ordinary skill in the art to which the present invention belongs, unless otherwise defined.

Terms defined in general used in the dictionary should be interpreted as being consistent with the meaning in the context of the related art, and cannot be interpreted as having an ideal or excessively formal meaning unless explicitly defined in the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the description of the embodiment, the same reference numerals are assigned to the same components, and descriptions of the same reference numerals will be omitted in some cases.

6 is a flowchart of a method for manufacturing a shower head for a semiconductor manufacturing facility according to an embodiment of the present invention, FIG. 7 is a perspective view of a shower head manufactured according to the method for manufacturing a shower head for a semiconductor manufacturing facility of FIG. 6, and FIGS. 8 to 15 is a step-by-step process diagram for manufacturing the shower head of FIG. 7 .

Referring to these drawings, when the shower head 100 is manufactured through the method for manufacturing a shower head for a semiconductor manufacturing facility according to the present embodiment, it is possible to increase productivity by dramatically reducing material usage and processing time compared to the existing ones, as well as to increase the price competitiveness can be secured.

The structure of the shower head 100 will be first looked at with reference to FIGS. 7 and 13 . As described above, the shower head 100 serves to supply into the process chamber during various processes of semiconductor manufacturing, in particular, during a process in which a film formation process and a dry etching process are performed.

The shower head 100 has a structure including upper and lower plates 130 and 140 and a shaft 120 connected to the upper plate 130 .

A supply hole 121 through which the process gas is supplied is formed in the shaft 120 , a diffusion space 131 through which the process gas is diffused is formed in the upper plate 130 , and the lower plate 140 has a plurality of of gas injection micro-holes (141, holes) are formed.

Accordingly, after disposing the shower head 100 of the present embodiment in the process chamber and proceeding with the process, the process gas is diffused into the diffusion space 131 of the upper plate 130 through the supply hole 121 in the shaft 120 . After being formed, the gas may be sprayed toward the wafer through the micro-holes 141 for gas injection of the lower plate 140 .

On the other hand, the shower head manufacturing method for a semiconductor manufacturing facility according to this embodiment for manufacturing such a shower head 100 is a raw material individual preparation step (S11), a primary molding material manufacturing step by friction welding (S12), materials It includes a heat treatment step (S13), a secondary molding material processing step (S14), a lower plate processing step (S15), and a molding material and a lower plate bonding step (S16), and by going through these steps, a shower head 100 different from the conventional one can provide

The raw material individual preparation step (S11) is a shaft 120, an upper plate 130, and a lower plate 140 in the shower head 100 having a shaft 120 connected to the upper and lower plates 130 and 140 and the upper plate 130, as shown in FIG. ) It is a process of individually preparing each raw material, the shaft raw material 111, the upper plate raw material 112, and the lower plate raw material 113.

In this embodiment, the shaft raw material 111 and the upper plate raw material 112 are separately prepared instead of being made in one lump unlike the prior art. Therefore, it is possible to dramatically reduce the amount of material used and processing time compared to the existing one.

In this embodiment, the raw material for the shaft 111 , the raw material for the upper plate 112 , and the raw material for the lower plate 113 are aluminum alloys. That is, it may be selected from aluminum/silicon (Al/Si), aluminum/manganese (Al/Mn), aluminum/magnesium (Al/Mg), and an alloy for aluminum die-casting.

Of course, it may be used as a material by selecting from aluminum alloys used under a common brand name, that is, a brand name of alcoa.

The primary molding material manufacturing step (S12) by friction welding is 1 formed in an intermediate stage by integrally joining the shaft raw material 111 and the upper plate raw material 112 as shown in FIGS. 9 and 10 by rotary friction welding. It is a process of manufacturing the car molding material (110a).

Rotary Friction Welding will be explained further. As in this embodiment, when the surfaces rub against each other while applying pressure to the two base materials, that is, the raw shaft raw material 111 and the upper plate raw material 112, frictional heat is generated. A method of joining the raw materials 112 is friction welding.

First, the two base materials to be welded, the shaft raw material 111 and the upper plate raw material 112, are bitten by a friction welding machine, one is fixed and the other is rotated at high speed to rotate the two base raw materials, the shaft raw material 111 and the upper plate raw material 112. When friction is applied, frictional heat of around 1,200°C is generated on the friction surface.

Due to this frictional heat, the friction surface is melted. At this time, the shaft raw material 111 and the upper plate raw material 112 can be joined by pressing with a strong mechanical force while the rotation is momentarily stopped.

The biggest advantage of such friction welding is that it is possible to join dissimilar metals with different properties. In particular, bonding of non-ferrous metals, which is not possible in general welding, is possible as in this embodiment.

In addition, the existing melt welding may have a defect in which gas is generated in the welding process, the gas is mixed, and bubbles are generated in the welded part.

The material heat treatment step (S13) is a process of performing heat treatment for the primary molding material 110a as shown in FIG. 11 . In this case, the T6 heat treatment step may be performed.

The T6 heat treatment is one of the aluminum (or its alloys) heat treatments used together with the T4 heat treatment. T4 heat treatment refers to water cooling treatment (W/Q) after solution heat treatment at 500~525℃ for about 40 minutes~7 hours.

On the other hand, the T6 heat treatment indicates that after the T4 heat treatment is finished, artificial aging is performed at 150 to 180° C. for about 3 to 5 hours.

Artificial aging is aging performed at a temperature higher than room temperature, and when artificial aging is performed, the tissue becomes more stable and strength can be increased. That is, durability is remarkably strengthened.

The secondary molding material processing step (S14) is a predetermined processing process, for example, a Machining Center Tooling System (MCT) processing process as shown in FIG. It is a process of processing the integrated secondary molding material (110b). 13 is a plan view and a rear view of the lower plate 140 of FIG. 12 .

For reference, the Machining Center Tooling System (MCT) is a version of CNC milling capable of 3-axis machining of the X-axis, Y-axis, and Z-axis.

A machine to which the automatic changer system of the tool (tool) that processes the material is grafted is also called MCT.

It is excellent not only for simple processing but also for curved surface processing. Therefore, this MCT processing is also applied in this embodiment.

The lower plate processing step (S15) is a process of processing the lower plate 140 by processing the lower plate raw material 113 through MCT processing as shown in FIG. 12 .

In addition, the molding material and the lower plate bonding step (S16) is a process of manufacturing the shower head 100 by integrally bonding the secondary molding material 110b and the lower plate 140 as shown in FIG. 14 . For reference, FIG. 15 is a plan view of FIG. 14 .

At this time, the bonding process may be a predetermined friction stir welding (FSW), but in addition to this, TIG welding, electron beam welding, and brazing may be applied, all of which should be said to be within the scope of the present invention. will be.

Friction stir welding (FSW) will be further described. Friction stir welding (FSW) is a solid-state joint that is welded by reverse flow in the material using frictional heat, so it does not cause blowholes or cracks compared to melting welding such as arc welding, laser welding, and electron beam welding, and deformation due to welding is small. Currently, it is widely applied to railway vehicles, ships, aircraft, automobiles, and the like.

Friction stir welding (FSW) can be applied to the welding of the secondary molding material 110b, which is an aluminum alloy, and the lower plate 140, as in this embodiment. It is an eco-friendly technology that does not occur. Thus, it can provide several beneficial effects for the environment.

It is possible to omit the welding deformation correction work that must be performed after conventional arc welding. In addition, the existing rivet joint method had a drawback that it was difficult to automate, but friction stir welding (FSW) can be automated so that it can achieve epoch-making cost reduction and prevention of welding defects at the same time.

Hereinafter, a process of manufacturing the shower head 100 will be described sequentially.

First, as shown in FIG. 8, the shaft 120, the upper plate 130, and the lower plate 140 of the shower head 100 are each raw shaft raw material 111, the upper plate raw material 112, and the lower plate raw material 113 are individually prepared. do.

Next, as shown in FIGS. 9 and 10 , the raw shaft raw material 111 and the upper plate raw material 112 are joined together by friction welding (Rotary Friction Welding) to prepare a primary molding material 110a molded in an intermediate step.

Next, T6 heat treatment is performed on the primary molding material 110a as shown in FIG. 11 . Then, using the MCT processing as shown in FIG. 12 , the primary molding material 110a is substantially processed into the secondary molding material 110b in which the upper plate 130 and the shaft 120 are integrated.

Next, as shown in FIG. 12 , the lower plate 140 is processed by processing the lower plate raw material 113 through MCT processing.

Then, as shown in FIG. 14 , the secondary molding material 110b and the lower plate 140 are integrally joined by friction stir welding (FSW) to manufacture the shower head 100 of the form shown in FIG. 7 .

According to this embodiment, which operates in the structure as described above, it is possible to increase productivity by remarkably reducing the amount of material used and processing time compared to the prior art, as well as to secure price competitiveness.

As such, the present invention is not limited to the described embodiments, and it is apparent to those skilled in the art that various modifications and variations can be made without departing from the spirit and scope of the present invention. Accordingly, it should be said that such modifications or variations fall within the scope of the claims of the present invention.

100: shower head 110a: primary molding material
110b: secondary molding material 111: shaft raw material
112: upper plate raw material 113: lower plate raw material
120: shaft 121: supply hole
130: upper plate 131: diffusion space part
140: lower plate 141: fine hole for gas injection

Claims (6)

In a shower head having an upper and lower plate and a shaft connected to the upper plate, an individual raw material preparation step of individually preparing the shaft raw material, the upper plate raw material, and the lower plate raw material, which are raw materials of the shaft, the upper plate, and the lower plate;
A primary molding material manufacturing step by friction welding of manufacturing a primary molding material molded in an intermediate step by integrally joining the shaft raw material and the upper plate raw material by friction welding (Rotary Friction Welding);
a secondary molding material processing step of processing the primary molding material into a secondary molding material in which the upper plate and the shaft are integrated using a predetermined processing process;
a lower plate processing step of processing the lower plate by processing the lower plate raw material through the processing process; and
A method for manufacturing a shower head for a semiconductor manufacturing facility, comprising: a molding material for manufacturing a shower head by integrally bonding the secondary molding material and the lower plate; and a lower plate bonding step.
According to claim 1,
Before proceeding with the secondary molding material processing step,
A method for manufacturing a shower head for semiconductor manufacturing equipment, characterized in that it further comprises a material heat treatment step of performing heat treatment on the primary molding material.
3. The method of claim 2,
The method of manufacturing a shower head for a semiconductor manufacturing facility, characterized in that the shaft raw material, the upper plate raw material, and the lower plate raw material are aluminum alloy.
4. The method of claim 3,
The aluminum alloy is aluminum/silicon (Al/Si), aluminum/manganese (Al/Mn), aluminum/magnesium (Al/Mg), and a shower head manufacturing for a semiconductor manufacturing facility, characterized in that it is selected from an alloy for aluminum die-casting method.
4. The method of claim 3,
The method for manufacturing a shower head for a semiconductor manufacturing facility, characterized in that the material heat treatment step is a T6 heat treatment step.
A shower head manufactured according to the manufacturing method of any one of claims 1 to 5.

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