KR20200011836A - All in one optical device - Google Patents

Abstract

The present invention relates to an integrated optical apparatus which comprises: a light source unit sequentially outputting first and second incident lights having a predefined wavelength and an output range; an incidence unit forming an incidence path through which the first and second incident lights enter a measurement target; a first light receiving unit which receives first measurement light reflected from the measurement target by the first incident light and outputs the light to a shape measurement device; and a second light receiving unit which receives second measurement light output from the measurement target by the second incident light and outputs the second measurement light to a component analysis device.

Description

Integrated optical device {All in one optical device}

The present invention relates to an integrated optical device, and more particularly, to inexpensively construct a system in which a device capable of measuring the shape of a sample and qualitative and quantitative analysis of elements contained in the sample can be manufactured compactly. It relates to an integrated optical device.

In general, since the plasma generated during laser irradiation emits light having a specific wavelength depending on the material, the light may be collected to qualitatively or quantitatively analyze the components of the material.

In this way, a device for performing qualitative or quantitative analysis of a sample by irradiating a laser has been commercialized.

On the other hand, an apparatus for measuring the shape of a sample by imaging a light reflected from a sample by irradiating a laser is also developed and used.

Korean Patent Publication No. 10-1423988 (Patent Document 1) includes a step of generating a plasma by irradiating a laser beam on a sample containing an element to be measured, and obtaining a spectral spectrum generated from the plasma; Obtaining a fitting curve of the remaining region after subtracting the measurement target peak from the spectral spectrum; Subtracting the fitting curve from the spectral spectrum to obtain a curve of a measurement target peak; Comprising the step of calculating the peak intensity from the target peak curve separated from the fitting curve and the step of obtaining the concentration ratio of the element to be measured by the ratio of the specific peak intensity method of quantitative analysis of the element to be measured in the sample Is disclosed.

Patent document 1 can perform a quantitative analysis of the elements contained in the sample, but there is a disadvantage that a separate device is required to measure the shape of the sample.

: Korean Registered Patent Publication No. 10-1423988

SUMMARY OF THE INVENTION The present invention has been made in view of the above, and an object thereof is to provide an integrated optical device in which a device capable of performing a shape measurement of a sample and qualitative and quantitative analysis of elements contained in the sample is integrally manufactured. To provide.

In order to achieve the above object, the integrated optical device according to an embodiment of the present invention, the light source unit for sequentially outputting the first and second incident light having a predetermined wavelength and output range;

An incident part forming an incident path through which the first and second incident light are incident on a measurement object;

A first light receiving unit receiving the first measurement light reflected from the measurement object by the first incident light and outputting the first measurement light to a shape measuring device; And

And a second light receiving unit receiving the second measurement light output from the measurement object by the second incident light and outputting the second measurement light to the component analysis device.

Here, the light source unit,

And an optical modulator for outputting any one of the first and second incident light, and modulating the first incident light into the second incident light or the second incident light into the first incident light.

The integrated optical device is characterized in that the first light receiving path through which the first measurement light is incident on the shape measuring device is configured such that at least a portion of the first light receiving path overlaps the incident path.

The integrated optical device may be configured such that a second light receiving path through which the second measurement light is incident on the component analysis device is formed independently of the first light receiving path.

The integrated optical device may include the integrated optical device.

At least a part of the optical member included in the incident part is configured therein, and further includes a housing in which at least a part of the incident path is formed therein.

In addition, the integrated optical device is configured independently of the housing, the optical fiber for outputting the second measurement light to the component analysis device; And

And a light guide device formed at an end side of the housing and receiving the second measurement light output from the measurement object and guiding it to the optical fiber.

An integrated optical device according to an embodiment of the present invention includes a laser light source for outputting a first laser light having a first power;

A laser light modulator for modulating the first laser light having the first power output from the laser light source and outputting a second laser light having a second power;

Beam splitters that transmit the first and second laser light or reflect light reflected from a sample;

An objective lens for irradiating the sample with the first and second laser light transmitted by the beam splitter;

A camera configured to acquire an image of the sample by capturing the first laser light reflected from the sample through a first path reflected by the beam splitter and reflecting the light from the sample for shape measurement of the sample;

A ring light guide for collecting light emitted from the plasma generated from the sample by the second laser light;

An optical fiber optically coupled to the ring light guide and detecting light condensed on the ring light guide; And

And a spectrometer which receives the light emitted from the plasma generated from the sample as the ring light guide and the second path transmitted to the optical fiber and measures the spectral spectrum.

The integrated optical device may be spaced apart from the first path and the second path.

In the integrated optical device, the ring light guide is made of glass,

The ring light guide is a donut shape,

The ring light guide includes a core air layer having an empty interior; And an annular glass layer surrounding the core air layer.

In addition, in the integrated optical device, optical fiber coupling holes are formed in a glass layer of the ring optical guide region coupled to the optical fiber.

The optical fiber coupling hole has a structure in communication from the outside of the glass layer to the core air layer, the optical fiber is inserted into the optical fiber coupling hole and optically coupled so that the end of the optical fiber is exposed to the core air layer.

According to the present invention, there is an advantage that a low-cost system configuration is possible by integrally manufacturing a device capable of performing the shape measurement of the sample and qualitative and quantitative analysis of the elements included in the sample.

That is, the present invention fuses UV microscopy and laser burst spectroscopy (LIBS) to measure the shape with nanometer resolution, while simultaneously analyzing the components of the sample, and controlling the output of the UV light source in real time. Shape measurement and qualitative and quantitative analysis.

1 is a block diagram of an integrated optical device according to the present invention;
2 is a cross-sectional view of a ring light guide applied to the integrated optical device according to the present invention;
3A and 3B are cross-sectional views illustrating an exemplary method of coupling an optical fiber to a ring light guide applied to an integrated optical device according to the present invention;
4 is a view for explaining a path of a first laser light for shape analysis of a sample in the integrated optical device according to the present invention;
5 is a view for explaining the path of the second laser light for the quantitative and qualitative analysis of the sample in the integrated optical device according to the present invention;
6 is a view for explaining a path of light emitted from a plasma generated from a sample according to the present invention,
7 is a partial perspective view illustrating a path of light emitted from a plasma generated from a sample according to the present invention;
8A and 8B are photographs of samples taken for shape analysis of samples in the integrated optical device according to the present invention;
9 is a graph of quantitative and qualitative analysis results of neodymium contained in a sample in the integrated optical device according to the present invention;
10 is a graph of the results of quantitative and qualitative analysis of samarium contained in a sample in the integrated optical device according to the present invention.

The above objects, other objects, features and advantages of the present invention will be readily understood through the following preferred embodiments associated with the accompanying drawings. However, the present invention is not limited to the embodiments described herein and may be embodied in other forms. Rather, the embodiments introduced herein are provided so that the disclosure may be made thorough and complete, and to fully convey the spirit of the invention to those skilled in the art.

Where terms such as first, second, etc. are used herein to describe components, these components should not be limited by such terms. These terms are only used to distinguish one component from another. The embodiments described and illustrated herein also include complementary embodiments thereof.

In this specification, the singular also includes the plural unless specifically stated otherwise in the phrase. As used herein, the words "comprise" and / or "comprising" do not exclude the presence or addition of one or more other elements.

In the present specification, before describing the embodiments, there may be a number of methods for implementing the configuration of the claims of the present invention. The following embodiments illustrate one example for implementing the configuration of the claims. Identify to show. Therefore, the scope of the present invention is not limited by the following examples.

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. In describing the specific embodiments below, various specific details are set forth in order to explain and understand the invention in more detail. However, one of ordinary skill in the art can understand that the present invention can be used without these various specific details. In some cases, it is mentioned in advance that parts of the invention that are commonly known and do not relate to the invention are not described in order to avoid confusion in describing the invention.

1 is a block diagram of an integrated optical device according to the present invention, Figure 2 is a cross-sectional view of a ring light guide applied to the integrated optical device according to the present invention, Figures 3a and 3b is a ring light guide applied to the integrated optical device according to the present invention It is sectional drawing for demonstrating an example method of coupling an optical fiber to the.

Referring to FIG. 1, the integrated optical device according to the present invention includes a laser light source 100 (light source unit), a laser light modulator 110, a mirror 120, a beam splitter 130, an objective lens 140, and a camera ( 160, a ring light guide 200, an optical fiber 300, and a spectrometer 150.

The laser light source 100 outputs a first laser light having a first output.

The laser light modulator 110 modulates a first laser light having a first output (power) output from the laser light source 100 to output a second laser light having a second output.

Here, the first laser light having the first output is for measuring the shape of the sample 500, and the second laser light having the second output is for quantitative / quantitative component analysis in the sample 500.

At this time, the wavelength of the first and second laser light is 193nm, the first output is less than 0.1mJ, the second output is preferably 10mJ or more.

In addition, the mirror 120 reflects the light at a predetermined angle in order to change the traveling paths of the first and second laser light.

That is, in the present invention, the advancing paths of the first and second laser light emitted from the laser light source 100 and the laser light modulator 110 are vertically changed by the mirror 120 to be incident on the sample 500. As a result, the laser light source 100 and the objective lens 140 are arranged in a '-' shape to manufacture a compact integrated optical device.

The beam splitter 130 transmits the first and second laser light or reflects the light reflected from the sample 500 toward the camera 160.

The objective lens 140 irradiates the sample 500 with the first and second laser light transmitted through the beam splitter 130.

The camera 160 acquires an image of the sample 500 by imaging the light reflected from the sample 500 to measure the shape of the sample 500.

Here, the camera 160 may use a CCD camera, and may capture a real-time high resolution image.

The ring light guide 200 has a donut shape and collects light emitted from the plasma generated on the surface of the sample 500.

The ring light guide 200 is employed to detect light emitted from the plasma generation region in a path different from a path in which the second laser light is incident on the surface of the sample 500.

The ring light guide 200 is preferably made of glass.

As shown in FIG. 2, the ring light guide 200 includes a core air layer 210 having an empty interior, and an annular glass layer 220 surrounding the core air layer 210 is formed.

Therefore, the light incident on the annular glass layer 220 of the ring light guide 200 is refracted and transmitted to the core air layer 210, totally reflected by the core air layer 210, and exits the optical fiber 300 to become a LIBS signal. .

Here, the optical fiber 300 is optically coupled to the ring light guide 200, and thus the optical coupling of the optical fiber 300 and the ring light guide 200 can be performed by various methods and structural fastening methods.

3A and 3B, a method of coupling the optical fiber 300 to the ring light guide 200 applied to the integrated optical device may be applied.

That is, the optical fiber coupling hole 221 is formed in the glass layer 220 of the ring light guide region coupled to the optical fiber 300. The optical fiber coupling hole 221 has a structure that communicates from the glass layer 220 to the core air layer 210 as shown in Figure 3a, and when the optical fiber 300 is inserted into the optical fiber coupling hole 221 and 3b and As described above, the end of the optical fiber 300 is exposed to the core air layer 210 so that the light transmitted to the core air layer 210 exits the optical fiber 300.

Therefore, in the present invention, the first laser light emitted from the laser light source 100 is reflected from the mirror 120 to the beam splitter 130, and the first laser light transmitted through the beam splitter 130 is transmitted to the sample 500. The light reflected from the sample 500 is reflected from the beam splitter 130 to the camera 160, and the camera 160 measures the shape of the sample 500 by imaging the light reflected from the sample 500. It is. Here, a shape measuring unit (not shown) for receiving the captured image of the camera 160 to measure the shape of the sample 500 may be further provided.

In the present invention, the first laser light emitted from the laser light source 100 is modulated by the laser light modulator 110 into the second laser light, and the second laser light is transmitted from the mirror 120 to the beam splitter 130. While reflecting the second laser light transmitted through the beam splitter 130 to the sample 500, a plasma is formed in the sample 500, and the light emitted from the plasma is collected by the ring light guide 200, and the ring light is emitted. The light emitted from the plasma collected by the guide 200 is detected by the optical fiber 300 coupled to the ring light guide 200 and transmitted to the spectrometer 150, and the spectrometer 150 emits light emitted from the plasma. The spectral spectrum of the sample 500 is measured.

Here, the apparatus of the present invention may further include an analysis unit (not shown) that can quantitatively and qualitatively analyze the spectral spectrum measured by the spectrometer 150.

The integrated optical device of the present invention includes a light source unit for sequentially outputting first and second incident light having a predetermined wavelength and an output range; An incident part forming an incident path through which the first and second incident light are incident on a measurement object; A first light receiving unit receiving the first measurement light reflected from the measurement object by the first incident light and outputting the first measurement light to a shape measuring device; And a second light receiving unit receiving the second measurement light output from the measurement object by the second incident light and outputting the second measurement light to the component analysis device.

Here, the light source unit is a laser light modulator 110 that emits a first laser light and a laser light modulator 110 that emits a second laser light by modulating the first laser light, and the incident part is a laser light modulator 110. A plurality of barrels (in other words, housings) connected to the laser beam modulator 110 and mirrors 120 positioned in the plurality of barrels for injecting the first and second laser light into the sample 500 to be measured. And beam splitter 130.

In addition, the first light receiving unit is to transmit the light reflected from the sample 500 to the camera 160 which is a shape measuring device, and the second light receiving unit is a spectrometer wherein the light emitted from the plasma of the sample 500 is a component analysis device. To be delivered to 150.

Therefore, in the present invention, a device capable of performing the shape measurement of the sample 500 and the qualitative and quantitative analysis of the elements included in the sample 500 can be integrally and compactly formed.

4 is a view for explaining the path of the first laser light for the shape analysis of the sample in the integrated optical device according to the present invention, Figure 5 is a second for quantitative and qualitative analysis of the sample in the integrated optical device according to the present invention 6 is a view for explaining the path of the laser light, Figure 6 is a view for explaining the path of the light emitted from the plasma generated in the sample according to the invention, Figure 7 is a view of the light emitted from the plasma generated in the sample according to the present invention Some perspective views for explaining the route.

As described above, the first laser light is irradiated onto the sample or the second laser light is irradiated onto the sample to perform shape measurement of the sample or to perform quantitative / quantitative component analysis.

In this case, as shown in FIG. 4, the first laser light emitted from the laser light source 100 has a first frequency and is irradiated to the sample through the mirror 120 and the beam splitter 130 and reflected from the sample. Is transmitted to the camera 160 by the function of the beam splitter 130 and is imaged by the camera 160, thereby measuring the shape of the sample.

Then, as shown in FIG. 5, the laser light modulator 110 modulates the first laser light emitted from the laser light source 100 into the second laser light, and the second laser light is mirror 120 and the beam splitter 130. The plasma is irradiated onto the sample to generate plasma, and the light emitted from the generated plasma is detected by the ring light guide 200 and the optical fiber 300 to measure the spectral spectrum of the sample by the light emitted from the plasma by the spectrometer 150. do.

Light emitted from the plasma transmitted to the optical fiber 300 may be referred to as a LIBS signal.

That is, since the LIBS signal emits light of a specific wavelength depending on the material of the plasma generated during laser irradiation, the light may be collected qualitatively or quantitatively to analyze the components of the material. Laser-induced collapse (plasma) spectroscopy (hereinafter referred to as LIBS), which is a method of analyzing the composition of materials by using collected light, uses a high-powered laser to generate breakdown, a kind of discharge phenomenon. It is a spectroscopic analysis technique using the generated plasma as an excitation source. The sample vaporizes in the plasma induced by the laser so that atoms and ions may be in an excited state. Atoms and ions in an excited state emit energy after a certain lifetime and return to the ground state, which emits a unique wavelength depending on the type of element and the excited state. Therefore, by analyzing the spectrum of the emitted wavelength, it is possible to qualitatively or quantitatively analyze the components of the material.

6 and 7, the ring light guide 200 has a donut shape having a space formed therein, and the second laser light is irradiated onto the space of the ring light guide 200 to the sample, and the sample is formed on the surface of the sample. The plasma P is generated by the output of the two laser lights.

Plasma P generated in the sample emits light at the same time as the element is emitted from the surface of the sample. The light emitted from the plasma P is incident to the ring light guide 200 and is totally internally reflected by the ring light guide 200 and transmitted to the optical fiber 300 which is optically aligned and connected to the upper side of the ring light guide 200. The light transmitted to 300 is input to the spectrometer 150 to measure the spectral spectrum of the sample.

The spectral spectrum measured by the spectrometer 150 may perform quantitative analysis on the elements included in the sample, and the wavelength of the light may indicate the type of elements included in the sample. Can perform qualitative analysis.

That is, it is possible to obtain the spectral spectrum in the spectrometer 150 from the light (LIBS signal) emitted from the plasma P generated in the sample, and to obtain the concentrations of the peak signal, the wavelength, and the element shown in the obtained spectral spectrum. .

8A and 8B are photographs of samples taken for shape analysis of the sample in the integrated optical device according to the present invention, and FIG. 9 is a quantitative and qualitative analysis result of neodymium contained in the sample in the integrated optical device according to the present invention. 10 is a graph showing the results of quantitative and qualitative analysis of samarium contained in a sample in the integrated optical device according to the present invention.

Since the spatial resolution of the shape analysis of the sample applied in the present invention is 470 nm as shown in FIG. 8A and 390 nm as shown in FIG. 8B, the shape analysis of the sample can be performed with the image taken by the camera.

Table 1 shows the signals, calibration curves and curvatures (R ² ) of the spectral spectrum for the elements for quantitative and qualitative analysis in the integrated optical device. Here, the calibration curve for the element and the curvature of the graph of the element concentration and the signal are stored in a database in advance, and the sample is a 'SUS 300 series' in the spectral spectrum obtained from the light emitted from the plasma (LIBS signal) generated from the sample. If the signal of 425.4nm contains chromium (Cr), the sample contains copper (Cu) if the signal of the 'Cu alloy' is 510.6nm, and contains nickel (Ni) if it is 503.5nm. Qualitative analysis.

The graph curve R ² of the correction curve, element concentration, and signal for the element for quantitative and qualitative analysis in the integrated optical device is stored in a database in advance.

element sample Signal (nm) Correction curve R ² Cr SUS 300 series 425.4 Y = -0.3276 + 0.224X 0.9913 Cu Cu alloy 510.6 Y = -3.2876 + 0.7095X 0.9933 Ni Cu alloy 503.5 Y = -16.8591 + 2.8710X 0.9980

Therefore, it can be seen that the sample contains neodymium (Nd) as the peak signal of the spectral spectrum obtained from the light emitted from the plasma emitted from the sample (LIBS signal), and as shown in FIG. When 'Y = -1.1919 + 0.2246X' and elemental concentration and signal's graph curvature (R ² ) is 0.9913, A1 graph and A2 graph are included to detect concentration by signal intensity. That is, when the signal intensity of neodymium is shown as 'a' in the graph, it can be seen that the sample contains neodymium at a concentration of 30%.

In addition, when the peak signal of the spectral spectrum of the target sample shows that samarium (Sm) is included in the target sample, as shown in FIG. 10, the correction curve B of samarium is' Y = -1.6710 + 1.2818. When X 'and elemental concentration and the signal's graph curvature (R ² ) are 0.9535, the B1 graph and B2 graph are included to detect the concentration by signal intensity, so the signal strength of samarium appears in the form of' a 'in the graph. In this case, it can be seen that the sample contains samarium at a concentration of 14.37%.

Therefore, the present invention enables qualitative / quantitative analysis of rare earth elements with many element emission lines, and improves measurement accuracy to 95% to 99% or more.

While the present invention has been shown and described with reference to certain preferred embodiments, the invention is not limited to the embodiments described above, and the general knowledge in the art to which the invention pertains without departing from the spirit of the invention. Various changes and modifications will be possible by those who have the same.

100: laser light source
110: laser light modulator
120: mirror
130: beam splitter
140: objective lens
150: spectrometer
160: camera
200: ring light guide
300: optical fiber
500: sample

Claims (10)

A light source unit sequentially outputting first and second incident light having a predetermined wavelength and an output range;
An incident part forming an incident path through which the first and second incident light are incident on a measurement object;
A first light receiving unit receiving the first measurement light reflected from the measurement object by the first incident light and outputting the first measurement light to a shape measuring device; And
And a second light receiving unit which receives the second measurement light output from the measurement object by the second incident light and outputs the second measurement light to the component analysis device. The method of claim 1,
The light source unit,
And an optical modulator for outputting any one of the first and second incident light and modulating the first incident light into the second incident light or the second incident light into the first incident light. Device. The method of claim 1,
And a first light receiving path through which the first measuring light is incident on the shape measuring device is configured to overlap at least part of the incident path. The method of claim 3,
And a second light receiving path through which the second measurement light is incident on the component analysis device is configured to be formed independently of the first light receiving path. The method of claim 1,
The integrated optical device,
And at least a part of the optical member included in the incident part is configured therein, and at least a part of the incidence path is formed therein. The method of claim 5, wherein the second light receiving unit,
An optical fiber configured independently of the housing and outputting the second measurement light to the component analysis device; And
And an optical guide device formed at an end side of the housing and receiving the second measurement light output from the measurement object and guiding the second measurement light to the optical fiber. A laser light source for outputting first laser light having a first power;
A laser light modulator for modulating the first laser light having the first power output from the laser light source and outputting a second laser light having a second power;
Beam splitters that transmit the first and second laser light or reflect light reflected from a sample;
An objective lens for irradiating the sample with the first and second laser light transmitted by the beam splitter;
A camera configured to acquire an image of the sample by capturing the first laser light reflected from the sample through a first path reflected by the beam splitter and reflecting the light from the sample for shape measurement of the sample;
A ring light guide for collecting light emitted from the plasma generated from the sample by the second laser light;
An optical fiber optically coupled to the ring light guide and detecting light condensed on the ring light guide; And
And a spectrometer for receiving the light emitted from the plasma generated from the sample through the ring light guide and the second path transmitted to the optical fiber, and measuring a spectral spectrum. The method of claim 7, wherein
And the first path and the second path are spaced apart. The method of claim 7, wherein
The ring light guide is made of glass,
The ring light guide is a donut shape,
The ring light guide includes a core air layer having an empty interior; And an annular glass layer surrounding the core air layer. The method of claim 9,
The optical fiber coupling hole is formed in the glass layer of the ring optical guide region which is coupled to the optical fiber,
The optical fiber coupling hole has a structure in communication from the outside of the glass layer to the core air layer, the optical fiber is inserted into the optical fiber coupling hole and optically coupled so that the end of the optical fiber is exposed to the core air layer Optical devices.

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