KR20180043005A - Nozzle for spraying co2 - Google Patents

Abstract

The present invention provides a carbon dioxide spraying nozzle, which can atomize solid particles of carbon dioxide sprayed therefrom while properly adjusting the size of the solid particles of the carbon dioxide. To implement this, the present invention provides the carbon dioxide spraying nozzle, comprising a first block and a second block provided to face each other for forming a connection flow path in which the carbon dioxide flows, a discharge hole having a slit shape to spray the carbon dioxide having passed through the connection flow path to a cleaning target object, and a guide part which is a space formed between the connection flow path and the discharge hole to generate the solid particles of the carbon dioxide, wherein the position of the lower end of the first block or the lower end of the second block is adjusted for adjusting the length or the width of the guide part.

Description

NOZZLE FOR SPRAYING CO2 < RTI ID = 0.0 >

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a carbon dioxide injection nozzle, and more particularly, to a carbon dioxide injection nozzle capable of controlling the particle size of carbon dioxide phase-changed to a solid by controlling the length and width of an induction portion through which carbon dioxide is injected.

Of the display devices, an organic light emitting display device (organic light emitting diode) such as an OLED has a wide viewing angle, an excellent contrast and a fast response speed, and is receiving attention as a next generation display device.

In general, an organic light emitting diode is further inserted with an intermediate layer such as an electron injection layer, an electron transport layer, a hole transport layer, and a hole injection layer between each light emitting layer for high efficiency light emission. Here, the fine pattern of the organic thin film such as the light emitting layer and the intermediate layer can be formed by a vapor deposition process. In order to manufacture an organic light emitting diode by a deposition process, a mask having the same pattern as a pattern of a thin film to be formed is closely adhered to a substrate surface on which an organic thin film or the like is to be formed, and a thin film or the like is deposited to form a thin film of a predetermined pattern .

The organic material deposition apparatus is provided with an evaporation source having a luminous organic material of red (R), green (G) and blue (B), a deposition material container for storing the material and a heating device, The target substrate is located.

A mask of a metal material having a deposition pattern is disposed under the substrate.

Deposition sources store red, green and blue light emitting organic materials. The deposition source is heated to a predetermined temperature during evaporation to evaporate the organic material. The mask serves to deposit an organic material on the substrate in a predetermined pattern. For this purpose, a plurality of holes are formed in the mask in a predetermined pattern. Such holes are selectively passed through the organic material supplied in a vapor state from the deposition source to be deposited on the substrate.

Recently, there has been known a fine metal mask (FMM) deposition method for depositing an organic material by using a metal mask having very fine holes to realize a high resolution.

In the deposition process described above, not only the organic material is deposited on the substrate through the hole of the mask, but a part of the organic material is also deposited on the surface of the mask. Organic matter remaining on the mask surface adversely affects the yield and reliability of the product. Therefore, a process of cleaning the mask after the deposition process is completed to remove the organic material is performed.

As a method of cleaning such a mask, a dry cleaning method, a wet (wet) cleaning method, and a method of cleaning them by mixing them are known.

In the cleaning method using carbon dioxide, which is one of the dry cleaning methods, the liquid carbon dioxide supplied through the nozzles is adiabatically expanded to be phase-changed into dry ice, which is solid carbon dioxide, and the solid carbon dioxide is sprayed onto the surface of the object to be cleaned, And the foreign matter is collided with and the foreign substance is cleaned by the increase of the volume caused by the phase change of the solid carbon dioxide to the gas.

When the mask is cleaned using the above-described dry cleaning apparatus, the carbon dioxide injected from the nozzles collides with the surface of the mask with a phase change to a solid. Thus, there is a problem that a mark is formed on the surface of the mask due to impact caused by injection.

Therefore, it is necessary to make the solid particles of carbon dioxide injected into the mask very fine. It is possible to form a plurality of fine holes in the injection nozzle, atomize carbon dioxide through the fine holes and inject the fine particles. However, if the pitch can not be reduced between the fine holes, a problem may occur in the uniformity, and it is very difficult to process the fine holes.

Further, there is a problem that when the particle size of the phase-changed carbon dioxide to be solid is not proper, there is no means to control it.

Korean Patent Laid-Open No. 10-2003-0037170 entitled "Carbon dioxide nozzle for cleaning" is disclosed as a conventional technique in which the above-described cleaning apparatus is shown.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and it is an object of the present invention to provide a carbon dioxide injection nozzle capable of atomizing solid particles of carbon dioxide injected from an injection nozzle, .

Another object of the present invention is to provide a carbon dioxide spray nozzle capable of minimizing damage to the object to be cleaned by atomizing solid particles of carbon dioxide.

Another object of the present invention is to provide a carbon dioxide injection nozzle capable of minimizing a distance between a flow path of liquid carbon dioxide and a flow path inside the injection nozzle, thereby maximizing the pressure difference during carbon dioxide injection.

It is another object of the present invention to provide a carbon dioxide injection nozzle capable of minimizing a deviation according to a position where carbon dioxide is injected from an injection nozzle, thereby improving the injection uniformity of carbon dioxide.

According to an aspect of the present invention, there is provided a carbon dioxide injection nozzle including a connection channel through which carbon dioxide flows, a discharge port formed in a slit shape for injecting carbon dioxide passing through the connection channel onto a object to be cleaned, A first block and a second block provided between the connection channel and the discharge port and facing each other to form an induction portion, which is a space in which solid particles of carbon dioxide are generated; The length or width of the guide portion is adjusted by adjusting the position of the lower end of the first block or the lower end of the second block.

The first block includes a first upper block provided at one side of the connection passage and a first lower block positioned below the first upper block to form the guide portion and the discharge port; The second block includes a second upper block provided on the other side of the connection passage and a second lower block positioned below the second upper block to form the guide portion and the discharge port; The length or width of the guide portion may be adjusted by adjusting the positions of the first and second lower blocks.

A first adjusting block and a second adjusting block for adjusting the length of the guide portion may be interposed between the first upper block and the first lower block and between the second upper block and the second lower block, respectively.

The length of the guide portion may be adjusted by changing the number or thickness of the first adjustment block and the second adjustment block.

The width of the guide portion may be adjusted by moving the first and second lower blocks in the width direction of the guide portion.

The lower end of the first block may include a first adjusting block having a through hole penetrating from the outside to the inside of the first block, an adjusting gap between the first adjusting block and the first adjusting block, And a second adjusting block portion provided on the discharge port side so that one side is connected to the second adjusting block portion; And an adjusting screw threadably engaged with the second adjusting block portion through the through hole of the first adjusting block portion. When the adjusting screw is rotated, the first adjusting block portion is elastically deformed to adjust the adjusting gap have.

The connection channel may be a tube having a micro tube shape, and the plurality of tubes may be spaced apart from each other by a predetermined distance.

Wherein the connection passage is formed of a flow passage hole formed in a flow path block provided between the first block and the second block, the flow passage hole is a plurality of microtubular shapes spaced vertically through the flow passage block, The carbon dioxide that has passed through the flow hole of the flow path is collected and changed into snow carbon dioxide and is sprayed to the object to be cleaned through the discharge port.

The inner diameter of the connection passage may be 100 to 300 mu m.

The particle size of the carbon dioxide phase-changed into solid after spraying from the discharge port may be 0.1 to 100 탆.

And a cavity having a larger cross-sectional area than the discharge space portion connected to the carbon dioxide inlet may be formed between the carbon dioxide inlet through which the carbon dioxide flows and the connection passage.

According to the present invention, the solid particle size of the carbon dioxide injected by the injection nozzle can be adjusted to a size suitable for cleaning the object to be cleaned, thereby preventing the substrate from being damaged by the impact force on the surface of the object to be cleaned, The efficiency can be improved.

Further, by using a slit type injection nozzle, the uniformity of injection of carbon dioxide can be improved.

In addition, it is possible to improve the cleaning efficiency by providing a connection flow path made up of a plurality of tubes at the front end of the discharge port, minimizing the distance between the plurality of tubes, and increasing the pressure difference between before and after discharge to atomize a large amount of carbon dioxide solid particles have.

In addition, by providing a flow path block having a plurality of fine-tube-shaped flow path holes formed at the front end of the discharge port, the distance between the plurality of flow path holes is minimized and the pressure difference between before and after discharge is increased to atomize a large amount of carbon dioxide solid particles, The efficiency can be improved. Further, by forming a plurality of fine-tube-shaped flow path holes in a through-hole shape in the flow path block, the connection structure can be simplified.

In addition, by performing hydrophobic surface treatment on the outer surface of the discharge port of the spray nozzle, frozen particles can be prevented from icing on the surface of the discharge port when carbon dioxide is discharged from the discharge port of the spray nozzle.

1 is a perspective view showing a cleaning apparatus to which an injection nozzle according to an embodiment of the present invention is applied;
2 is a cross-sectional view showing a cleaning apparatus to which an injection nozzle according to an embodiment of the present invention is applied
3 is a sectional view showing the injection nozzle according to the first embodiment of the present invention
FIG. 4 is a cross-
5 is a sectional view showing the injection nozzle according to the second embodiment of the present invention
6 is a sectional view showing the injection nozzle according to the third embodiment of the present invention
7 is a cross-sectional view showing an injection nozzle according to a fourth embodiment of the present invention

Hereinafter, the carbon dioxide injection nozzle of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a perspective view showing a cleaning apparatus to which an injection nozzle according to an embodiment of the present invention is applied, and FIG. 2 is a sectional view showing a cleaning apparatus to which an injection nozzle according to an embodiment of the present invention is applied.

The object to be cleaned using the injection nozzle of the present invention may be an OLED deposition mask or a large-area substrate.

In the case of a large-area substrate, a process may be completed, and a foreign substance may adhere to the substrate while moving to the next process. In this case, a cleaning process is required before performing the next process.

In the case of an OLED deposition mask or a large-area substrate, the thickness is very thin compared to the area, and when the carbon dioxide is sprayed, the substrate or the mask surface may be damaged. Particularly, the fine metal mask (FMM) of the OLED deposition mask must have a micro-hole corresponding to the sub-pixel for depositing red, green, and blue organic materials on the substrate. In order to realize high resolution, the size of such fine holes becomes small, and the interval between the holes becomes narrow.

Therefore, in order to clean the organic material remaining in the mask having such a fine hole, it is necessary to finely particleize the CO 2 injected to the object to be cleaned.

The cleaning apparatus to which the carbon dioxide spray nozzle according to the present invention is applied includes a spray nozzle 100 for spraying carbon dioxide (CO2) in a snow state including solid particles on a object M to be cleaned, A stage 300 on which the stage 200 is provided and an injection nozzle 100 for controlling the injection of the carbon dioxide through the injection nozzle 100, (Not shown) that cleans foreign matters remaining on the surface of the wafer W.

A discharge port 110 through which carbon dioxide is discharged is formed at a lower end of the injection nozzle 100.

In the case where the object to be cleaned M is an OLED deposition mask, a foreign substance including organic matter remaining around the fine holes for deposition of the organic material is cleaned using snow carbon dioxide containing solid particles.

The size of the fine holes is very small in order to realize a high resolution, so that the carbon dioxide particles injected through the discharge port 110 must be injected in a fine size smaller than the fine holes so that the fine holes can be cleaned.

In the case where the object to be cleaned M is an OLED deposition mask or a large area substrate, it is necessary to prevent a mark caused by a force (a biasing force) sprayed on the surface of the substrate on which carbon dioxide is injected. Therefore, as the particles of carbon dioxide injected through the discharge port 110 become smaller, the damage to the substrate can be reduced.

Since the mask or the large area substrate of the OLED is made of a very thin thin plate, damage may occur depending on the ejection pressure and the particle size of the ejected dry ice in the ejection nozzle 100. As the pattern is miniaturized The thickness of which is continuously thinning.

In order to effectively clean the object M to be cleaned, it is preferable that the discharge port 110 of the spray nozzle 100 is of a slit type which is elongated in the width direction Y of the spray nozzle 100.

That is, a gap is formed between two opposing blocks 101 and 102, and a discharge port 110 formed at a lower end of the gap is formed as a slit formed long along the longitudinal direction Y of the spray nozzle 100, Shape. If the slit type injection nozzle 100 is used as described above, the uniformity of spraying can be improved.

The carbon dioxide is supplied from the carbon dioxide supply unit (not shown) into the injection nozzle 100 in a high-pressure liquid state. The carbon dioxide in the high pressure liquid state is sprayed on the upper surface of the object M to be cleaned in the space inside the chamber 300 which is at atmospheric pressure or vacuum state at the discharge port 110.

When the liquid state carbon dioxide is injected, the temperature is extremely lowered by the thermal expansion to generate dry ice particles, and the dry ice particles collide with the surface of the object to be cleaned M to remove foreign matter. The carbon dioxide which has collided with the surface of the object M and has been removed from the object M is sublimated into gas and does not remain on the surface of the object M to be cleaned.

The cleaning process of the object M to be cleaned may be performed while the injection nozzle 100 is being transferred, or may be cleaned while transferring the object M to be cleaned. FIG. 1 illustrates a case where the object to be cleaned M is fixed while being held on the stage 200 and the injection nozzle 100 is transferred while being cleaned.

A transfer unit 400 may be provided on both sides of the injection nozzle 100 to transfer the injection nozzle 100 in the transfer direction X. [ The conveyance unit 400 may be configured to be conveyed along a guide rail (not shown).

The discharge pressure of the carbon dioxide injected through the discharge port 110 is about 50-60 bar. In addition, it is preferable that the particle size of the carbon dioxide injected from the injection nozzle 100 is made to be 0.1 to 100 탆. In this case, the air tightness of the injection nozzle 100 must be supplied to the discharge port 110. In order to generate a large amount of carbon dioxide solid particles, the pressure difference between before and after discharge must be increased.

In order to increase the pressure difference between the discharge port 110 and the discharge port 110, a path through which carbon dioxide passes through the spray nozzle 100 must be formed very narrowly. However, there is a limit to narrowing the gap between the discharge ports 110 only. In addition, when the particle size of the carbon dioxide is out of the proper size, a means for controlling the particle size is needed.

Therefore, the embodiment shown in Figs. 3 and 4 will be described as an example in which the pressure difference before and after discharge can be increased and the carbon dioxide particle size can be adjusted.

FIG. 3 is a sectional view showing the injection nozzle according to the first embodiment of the present invention, and FIG. 4 is a sectional view taken along the line A-A in FIG.

Referring to FIGS. 3 and 4, a connecting passage 130-1 having a micro-tubular shape is provided between the discharge space 120 and the discharge port 110. As shown in FIG.

The discharge space 120 is formed in the longitudinal direction Y of the injection nozzle 100 as a space in which the liquid carbon dioxide introduced through the carbon dioxide inlet 140 is temporarily stored.

A cavity portion 150 having a cross-sectional area in a direction perpendicular to the discharge space portion 120 (that is, a cross-sectional area shown in FIG. 4) is formed between the discharge space portion 120 and the connection passage 130-1 . The liquid carbon dioxide is collected in the cavity portion 150 and then supplied to the connection passage 130-1. When the cavity portion 150 is formed as described above, pressure uniformity of carbon dioxide injected from the discharge port 110 can be secured.

The connection passage 130-1 is formed in a tube shape having a very small diameter in order to produce fine dry ice particles, and a plurality of the connection passage 130-1 are spaced apart from each other by a predetermined distance. The upper portion of the connection passage 130-1 communicates with the cavity portion 150 and the discharge space portion 120 and the lower portion communicates with the discharge port 110. [

The connection passage 130-1 may be made of a tube made of stainless steel or resin, and the inner diameter of the connection passage 130-1 may be 100-300 mu m. Carbon dioxide having passed through the plurality of connection channels 130-1 is collected and discharged from the discharge port 110. [

When the connection channel 130-1 having the fine tubular shape is provided, a high pressure is formed in the course of the carbon dioxide passing through the connection channel 130-1, and the liquid carbon dioxide in which the high pressure is formed passes through the discharge hole 110 When discharged, a large amount of fine dry ice particles in a snow state is generated due to a large pressure difference.

An induction part 115 is formed between the connection passage 130-1 and the discharge port 110. [ The guide portion 115 is a space between the discharge port 110 and the lower end of the connection passage 130-1. The solid particle size of the carbon dioxide which has passed through the connection passage 130-1 depends on the length of the guide portion 115.

That is, if the length h of the guide portion 115 is too short, solidification of carbon dioxide is difficult and if the length h of the guide portion 115 is too long, the size of the carbon dioxide solid particles becomes too large in the guide portion 115, The length of the guide portion 115 can be set so that the particle size is within a range of 0.1 to 100 mu m.

The position of the lower end of the first block 101 and the position of the lower end of the second block 102 may be adjusted to adjust the length h of the guide portion 115.

The first block 101 includes a first upper block 101a provided at one side of the connection passage 130-1 and a second upper block 101b located below the first upper block 101a, And a first lower block 101b for forming the second substrate 110.

The second block 102 includes a second upper block 102a provided on the other side of the connection passage 130-1 and a second upper block 102b located below the second upper block 102a, And a second lower block 102b for forming the second substrate 110.

A first adjusting block 101c for adjusting the length h of the guiding portion 115 is interposed between the first upper block 101a and the first lower block 101b and the second upper block 102a And a second adjustment block 102c for adjusting the length h of the guide part 115 is interposed between the first lower block 102b and the second lower block 102b.

The first adjusting block 101c and the second adjusting block 102c may have the same thickness and the thickness of the first adjusting block 101c and the second adjusting block 102c may be equalized, 115 can be adjusted. That is, when the length h of the guide part 115 is reduced, the first adjustment block 101c and the second adjustment block 102c having a small thickness are used, and the length h of the guide part 115 is The first adjusting block 101c and the second adjusting block 102c, which are made of thick material, are used. In addition, the length of the guide portion 115 may be adjusted by using a plurality of the first adjustment block 101c and the second adjustment block 102c having a predetermined thickness.

The first upper block 101a and the first lower block 101b and the first adjustment block 101c are integrally coupled to each other by using a fastening member (not shown), and the second upper block 102a and the second The lower block 102b and the second adjustment block 102c may be integrally coupled using a fastening member (not shown).

When the length h of the guide part 115 is adjusted using the first adjustment block 101c and the second adjustment block 102c, the first adjustment block 101c, After changing the thickness or number of the second adjustment block 102c, the fastening member is reassembled again.

5 is a cross-sectional view illustrating a spray nozzle according to a second embodiment of the present invention.

In the case of the second embodiment, the flow path block 130-2 in which the flow path hole 131-2 is formed instead of the tube of the first embodiment is used for constituting the connection flow path.

The flow path block 130-2 has a plurality of fine channel-shaped flow path holes 131-2 formed in a very small diameter in order to generate fine dry ice particles along the width direction Y of the injection nozzle 100 Spaced apart from each other. The flow path hole 131-2 has a shape penetrating from the upper portion to the lower portion of the flow path block 130-2.

The flow path block 130-2 is interposed between the first block 101 and the second block 102 and is located at an upper portion of the discharge port 110. [

The upper portion of the flow passage hole 131-2 communicates with the discharge space portion 120 and the lower portion communicates with the discharge port 110. [ The inner diameter of the flow path hole 131-2 may be 100 to 300 mu m. Carbon dioxide which has passed through the plurality of flow holes 131-2 is collected and discharged from the discharge port 110.

The liquid carbon dioxide having a high pressure in the process of passing through the flow path hole 131-2 having the fine tubular shape passes through the flow hole 131-2 and the fine dry ice particles in a snow state A large amount is generated.

The flow path hole 131-2 of the flow path block 130-2 is formed by machining and the flow path block 130-2 in which the flow path hole 131-2 is formed is divided into a first block 101 and a second Assembled to be interposed between the blocks 102, the flow path hole 131-2 through which the carbon dioxide passes can be realized with a very narrow path, and the manufacturing process is simplified.

In the first embodiment, when a tube is used as the connection channel 131-1, a separate connector for connecting both ends of the tube to the discharge space 120 and the discharge port 110 is required, complicating the connection structure . However, if the flow path block 130-2 having the flow path hole 131-2 is used, a separate connection port is not required, so that the connection structure is simplified, and the flow path hole 131-2 is formed separately from the flow path block The space between the plurality of flow holes 131-2 can be narrowed and the flow passage hole 131-2 can be arranged closely to the flow path block 130-2.

With this configuration, a large difference in pressure before and after discharge through the discharge port 110 can be made to atomize a large amount of carbon dioxide solid particles, thereby improving the cleaning efficiency.

At the same time, the particle size of the carbon dioxide can be adjusted by adjusting the length h of the guide portion 115 by using the first control block 101c and the second control block 102c as in the first embodiment.

6 is a cross-sectional view illustrating an injection nozzle according to a third embodiment of the present invention.

In the third embodiment, the width g of the guiding portion 115 can be adjusted by making the first lower block 101b and the second lower block 102b movable in the horizontal direction (the direction of the arrow in Fig. 6) .

The first lower block 101b may be integrally coupled to the first upper block 101a by a fastening member (not shown), and the second lower block 102b may be integrally coupled to the first lower block 101b by a fastening member 2 upper block 102a. And the fastening position of the fastening member may be changed in order to adjust the width g of the guide portion 115. In this case, the positions of both the first and second lower blocks 101b and 102b may be adjusted, or only one of them may be adjusted.

7 is a cross-sectional view showing an injection nozzle according to a fourth embodiment of the present invention.

The adjusting gap 108b formed between the first adjusting block 101-1a and the second adjusting block 101-1b of the first block 101-1 is adjusted by the adjusting screw 161 To control the width (g) of the guide portion (115).

The adjusting screw 161 is threaded on the outer peripheral surface of the fastening body 161b. In order to fasten the adjusting screw 161, the first adjusting block 101-1a is formed with a through hole 108a penetrating from the outside to the inside of the first block 101-1, In the adjustment block portion 101-1b, a coupling groove 108c is formed at a position corresponding to the through hole 108a. A step portion 162 protruding into the inner space is formed in the through hole 108a. The fastening body 161b of the adjusting screw 161 is screwed into the fastening groove 108c through the through hole 108a and the head portion 161a of the adjusting screw 161 is fastened to the fastening portion 162 ).

Therefore, when the adjusting screw 161 is rotated, the second adjusting block 101-1b is positioned in the range allowed by the adjusting gap 108b while the first adjusting block 101-1a is fixed in position Lt; / RTI > In this case, the second adjusting block 101-1b is connected to the first adjusting block 101-1a at one side (upper side), so that the connected portion is elastically deformed, The width g of the guide portion 115 is adjusted.

According to the above configuration, the solid particle size of the carbon dioxide can be adjusted to a size suitable for cleaning the object to be cleaned M, thereby preventing the substrate from being damaged by the impact force on the surface of the object to be cleaned M, The cleaning efficiency can be improved.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments, but, on the contrary, And this also belongs to the present invention.

100: injection nozzle 101: first block
101a: first upper block 101b: first lower block
101c: first adjustment block 102: second block
102a: second upper block 102b: second lower block
102c: second adjusting block 108a: through hole
108b: adjustment gap 108c: fastening groove
110: discharge port 115:
120: discharge space part 130-1:
130-2: channel block 131-2: channel hole
140: Carbon dioxide inlet 150: Cavity
161: adjusting screw 200: stage
300: chamber 400:

Claims (11)

A discharge port formed in a slit shape for spraying carbon dioxide which has passed through the connection passage on the object to be cleaned and a space formed between the connection passage and the discharge port to generate solid particles of carbon dioxide A first block and a second block provided opposite to each other to form an induction portion;
Wherein a length or a width of the guide portion is adjusted by adjusting a position of a lower end of the first block or a lower end of the second block, The method according to claim 1,
The first block includes a first upper block provided at one side of the connection passage and a first lower block positioned below the first upper block to form the guide portion and the discharge port;
The second block includes a second upper block provided on the other side of the connection passage and a second lower block positioned below the second upper block to form the guide portion and the discharge port;
Wherein a length or a width of the guide portion is adjusted by adjusting the positions of the first and second lower blocks. 3. The method of claim 2,
Wherein a first adjusting block and a second adjusting block are provided between the first upper block and the first lower block and between the second upper block and the second lower block to adjust the length of the guide portion, Nozzle The method of claim 3,
Wherein the length of the guide portion is adjusted by changing the number or the thickness of the first adjustment block and the second adjustment block. 3. The method of claim 2,
Wherein a width of the guide portion is adjusted by moving the first lower block and the second lower block in a width direction of the guide portion. The method according to claim 1,
The lower end of the first block may include a first adjusting block having a through hole penetrating from the outside to the inside of the first block, an adjusting gap between the first adjusting block and the first adjusting block, And a second adjusting block portion provided on the discharge port side so that one side is connected to the second adjusting block portion;
And an adjustment screw threaded through the through hole of the first adjustment block part and threadedly coupled to the second adjustment block part. When the adjustment screw is rotated, the first adjustment block part is elastically deformed to adjust the adjustment gap Carbon dioxide injection nozzle The method according to claim 1,
Wherein the connection passage is formed of a tube having a micro-tube shape, and the plurality of tubes are spaced apart from each other by a predetermined distance, The method according to claim 1,
Wherein the connection passage is formed of a flow passage hole formed in a flow path block provided between the first block and the second block, the flow passage hole is a plurality of microtubular shapes spaced vertically through the flow passage block, And carbon dioxide passing through the passage hole of the carbon dioxide injection nozzle is collected and injected to the object to be cleaned through the discharge port by phase change to carbon dioxide in the snow state. The method according to claim 1,
Wherein the inner diameter of the connecting passage is 100 to 300 mu m. The method according to claim 1,
Characterized in that the particle size of the carbon dioxide phase-changed into solid after spraying from the discharge port is 0.1 to 100 mu m. The method according to claim 1,
Wherein a cavity portion having a larger cross-sectional area than a discharge space portion connected to the carbon dioxide inlet is formed between the carbon dioxide inlet through which the carbon dioxide flows and the connection passage.

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