KR20160125684A

KR20160125684A - Cleaning system for ozone generating system

Info

Publication number: KR20160125684A
Application number: KR1020150056428A
Authority: KR
Inventors: 심기천
Original assignee: (주)에코테크놀로지
Priority date: 2015-04-22
Filing date: 2015-04-22
Publication date: 2016-11-01

Abstract

The present invention relates to an ozone generator cleaning system comprising: an ozone generator for generating ozone using a cell and having an inlet and an outlet; And a plasma cleaning module for cleaning the cell by supplying a cleaning gas of a plasma type to the ozone generator, wherein the plasma cleaning module comprises: a cleaning gas supply part for supplying a cleaning gas; A remote plasma chamber that receives a cleaning gas from the cleaning gas supply and that excites the cleaning gas into a plasma state upon application of a radio frequency power from a power supply; A plasma supply pipe connecting the remote plasma chamber and the inlet port to supply a cleaning gas in a plasma form into the ozone generator; A scrubber for incinerating the polluted cleaning gas, which has been cleaned, and discharging the polluted cleaning gas to the outside; And a plasma discharge pipe connecting the discharge port and the scrubber.

Description

CLEANING SYSTEM FOR OZONE GENERATING SYSTEM [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone generator cleaning system, and more particularly, to an ozone generator cleaning system that allows a contaminated cell inside an ozone generator to be cleaned through a cleaning gas in a plasma state without being replaced.

Ozone Generator Generates ozone gas. The ozone generating apparatus generates ozone from a plurality of cells installed therein. The cell functions as a capacitor with two electrodes. Oxygen flowing between the electrodes is converted into ozone by electric discharge.

An example of a conventional ozone generating apparatus is disclosed in Japanese Patent No. 10-0416175 entitled " Method and apparatus for producing ozone ".

In the conventional ozone generating apparatus as described above, foreign matter may be adhered to or contaminated the surface of a cell provided therein for a long period of time. When foreign matter adheres to the cell surface, the ozone generation rate is lowered, and after a certain period of time, the cell has to be replaced. That is, even though the lifetime of the cell was not reached, the cell surface could not be cleaned and the cell had to be replaced.

Accordingly, there is a disadvantage that the management cost of the ozone generator is increased because it is necessary to replace with a new cell.

SUMMARY OF THE INVENTION An object of the present invention is to provide an ozone generator cleaning system capable of cleaning and using cells without replacing contaminated cells.

It is another object of the present invention to provide an ozone generator cleaning system capable of cleaning only foreign matter on the surface of a cell by supplying a cleaning gas in a plasma form.

The above objects and various advantages of the present invention will become more apparent from the preferred embodiments of the present invention by those skilled in the art.

The object of the present invention can be achieved by an ozone generator cleaning system. An ozone generator cleaning system of the present invention includes: an ozone generator that generates ozone using a cell and has an inlet and an outlet; And a plasma cleaning module for cleaning the cell by supplying a cleaning gas of a plasma type to the ozone generator, wherein the plasma cleaning module comprises: a cleaning gas supply part for supplying a cleaning gas; A remote plasma chamber that receives a cleaning gas from the cleaning gas supply and that excites the cleaning gas into a plasma state upon application of a radio frequency power from a power supply; A plasma supply pipe connecting the remote plasma chamber and the inlet port to supply a cleaning gas in a plasma form into the ozone generator; A scrubber for incinerating the polluted cleaning gas, which has been cleaned, and discharging the polluted cleaning gas to the outside; And a plasma discharge pipe connecting the discharge port and the scrubber.

According to one embodiment, the cell may be formed of a plate-like material in which stainless steel and aluminum are combined.

According to an embodiment of the present invention, the ozone generating device may be mounted on a support table, and the plasma cleaning module may be disposed above and below the supporting table to be spaced apart from the ozone generating device.

According to an embodiment, the control unit may further include a control unit for controlling the supply timing and supply amount of the cleaning gas in the plasma supply unit, the supply timing and supply amount of the cleaning gas in the plasma state of the remote plasma chamber, and the burning temperature and the exhaust timing of the scrubber. have.

The ozone generator cleaning system according to the present invention forms a cleaning gas in a plasma state in a remote plasma chamber, and then supplies the cleaning gas into the ozone generator. The cleaning gas containing fluorine is used to dry foreign substances on the cell surface by a dry method. Therefore, contaminated cells can be used up to the end of their life without replacing them with new ones.

Therefore, it is possible to reduce the replacement cost of the cells and to reduce the management cost of the ozone generator in the long term.

1 is a front view showing a configuration of an ozone generator cleaning system according to the present invention;
2 is a schematic view schematically illustrating a cleaning process of the ozone generator cleaning system according to the present invention.

For a better understanding of the present invention, a preferred embodiment of the present invention will be described with reference to the accompanying drawings. The embodiments of the present invention may be modified into various forms, and the scope of the present invention should not be construed as being limited to the embodiments described in detail below. The present embodiments are provided to enable those skilled in the art to more fully understand the present invention. Therefore, the shapes and the like of the elements in the drawings can be exaggeratedly expressed to emphasize a clearer description. It should be noted that in the drawings, the same members are denoted by the same reference numerals. Detailed descriptions of well-known functions and constructions which may be unnecessarily obscured by the gist of the present invention are omitted.

FIG. 1 is a front view showing the construction of the ozone generator cleaning system 1 according to the present invention, and FIG. 2 is a schematic view schematically showing the cleaning process of the ozone generator cleaning system 1.

As shown, the ozone generator cleaning system 1 according to the present invention includes an ozone generator 100 for generating ozone, a plasma cleaning module 100 for cleaning the cells 120 in the ozone generator 100 using plasma, (200).

The ozone cleaning apparatus includes an outer casing 110 and a plurality of cells 120 provided inside the outer casing 110 to generate ozone. (Not shown) for supplying oxygen to the cell 120, power supply means (not shown) for applying power to the cell 120, heat generated inside the cell 120 for generating ozone (Not shown) for cooling the cooling water.

An inlet 111 for supplying the plasma cleaning gas P from the plasma cleaning module 200 is provided on the upper part of the outer casing 110. Further, a discharge port 113 for exhausting the cleaning gas P having washed the cell 120 inside the outer casing 110 to the outside is provided.

The cell 120 is disposed in a direction perpendicular to the inside of the outer casing 110. The cell 120 is provided in the form of a metal plate such as stainless steel and aluminum. The cell 120 acts as a capacitor formed by two electrodes. At least one of the electrodes forming the cell 120 is covered with a thin dielectric.

When oxygen supplied from the oxygen supply unit (not shown) flows between the electrodes, an electric discharge occurs between the electrodes, and ions are formed due to photochemical and electronic effects. Then, ozone is generated as a result of diffusion of electric discharge.

An input panel 130 is provided outside the ozone generator 100. The user can control the amount of ozone and intensity generated by operating the ozone generator 100 through the input panel 130.

The plasma cleaning module 200 dry-cleanes the cell 120 using a cleaning gas in the form of a plasma. As a result, the cells 120 contaminated by the use for a long period of time can be cleaned and replaced without being replaced, thereby reducing the replacement cost.

The plasma cleaning module 200 includes a cleaning gas supply unit 210 for supplying a cleaning gas, a remote plasma chamber 220 for converting the cleaning gas P into a plasma state, a plasma state generated in the remote plasma chamber 220, And a plasma cleaning gas P in which the cell 120 is cleaned in the ozone generator 100 are burned to remove contaminants and then discharged And a scrubber 250.

The plasma generation method includes a method of generating a plasma directly in a space to be cleaned and a remote plasma generation method of exciting a cleaning gas into a plasma state at a position apart from a space to be cleaned and then supplying a cleaning gas.

The plasma cleaning module 200 of the present invention supplies a plasma cleaning gas into the ozone generator 100 using a remote plasma generation method.

The cleaning gas supply unit 210 supplies the cleaning gas to the remote plasma chamber 220. The cleaning gas may be one of fluorine (F) -containing gases such as NF ₃ , F ₂ , COF ₂ , C ₃ F ₈ , and C ₄ F ₈ . The cleaning gas supply unit 210 supplies the cleaning gas to the remote plasma chamber 220 through the cleaning gas supply pipe 211. The cleaning gas supply pipe 211 is provided with a cleaning gas supply valve 213 to control the supply of the cleaning gas to the control unit 400.

The remote plasma chamber 220 applies a radio frequency to the cleaning gas supplied from the cleaning gas supply pipe 211 to excite the cleaning gas into a plasma state. A power supply 223 is connected to the remote plasma chamber 220 to supply radio frequency power.

Here, a display window 221 is provided on the surface of the remote plasma chamber 220 so that the user can visually confirm whether plasma is generated from the outside.

The remote plasma chamber 220 is connected to the ozone generator 100 and the plasma supply pipe 240. A plasma supply valve 241 is provided on the path of the plasma supply pipe 240. The plasma supply valve 241 is opened and closed under the control of the control unit 400. A supply pump 230 is connected to the remote plasma chamber 220 to supply a cleaning gas in a plasma state to the plasma supply pipe 240.

Meanwhile, a scrubber 250 is provided below the ozone generator 100. The scrubber 250 cleans the cell 120 in the ozone generator 100 and then burns the contaminated plasma gas, and then exhausts the cleaning gas in which the contaminants are incinerated.

An exhaust pump 260 is provided at one side of the scrubber 250 to allow the contaminated plasma gas in the ozone generator 100 to be moved to the plasma discharge pipe 251 through the discharge port 113.

The scrubber 250 burns a plasma gas contaminated at a high temperature of 800 to 1000 ° C to incinerate harmful substances contained in the contaminated plasma gas.

The support table 300 stably supports the ozone generator 100 and the plasma cleaning module 200. The ozone generator 100 is mounted on the upper surface of the support table 300 and the plasma cleaning module 200 is disposed across the upper and lower portions of the support table 300. A cleaning gas supply pipe 211 connects the remote plasma chamber 220 and the ozone generator 100 through a lower portion of the support table 300.

The controller 400 controls the plasma cleaning module 200 to clean the ozone generator 100. The controller 400 controls the cleaning cycle and cleaning amount of the plasma cleaning module 200. The control unit 400 adjusts the opening and closing of the cleaning gas supply valve 213 so that the cleaning gas supply unit 210 adjusts timing and supply amount of the cleaning gas to the remote plasma chamber 220.

In addition, the controller 400 controls the supply timing and supply amount of the plasma gas in the plasma state generated in the remote plasma chamber 220 to the ozone generator 100. To this end, the control unit 400 controls the radio frequency of the power supply unit 223 and controls the opening and closing of the plasma supply valve 241.

The control unit 400 also controls the exhaust pump 260 to contact the cell 120 in the ozone generator 100 to exhaust the polluted plasma cleaning gas to the outside. Then, the combustion temperature of the scrubber 250 is adjusted to burn the harmful substances.

Here, the control unit 400 may be provided as a device such as a notebook computer or a tablet PC.

The operation of the ozone generator cleaning system 1 according to the present invention having such a configuration will be described with reference to Figs. 1 and 2. Fig.

The operator joins the plasma cleaning module 200 to the ozone generator 100 for cleaning. A plasma supply pipe 240 is coupled to the inlet 111 of the outer casing 110 and a plasma discharge pipe 251 is connected to the discharge port 113. In the region of the inlet 111 and the outlet 113, a sealing member is combined to maintain airtightness.

When ozone is generated using the ozone generator 100, the plasma cleaning module 200 is not operated and is stopped. When the ozone generator 100 generates ozone for a predetermined period of time and thus foreign matter accumulates on the surface of the cell 120 provided in the outer casing 110, the controller 400 operates the plasma cleaning module 200 .

The cleaning gas supply valve 213 is opened and the cleaning gas is supplied from the cleaning gas supply unit 210 to the remote plasma chamber 220. A radio frequency is applied by the power supply unit 223, and the cleaning gas is excited in the form of a radical in the remote plasma chamber 220 and plasmaized.

The plasma cleaning gas containing fluorine (F) such as NF ₃ , F ₂ , COF ₂ , C ₃ F ₈ and C ₄ F ₈ is supplied to the supply pressure of the supply pump 230 by opening of the plasma supply valve 241 And is supplied to the inside of the ozone generator 100.

The cleaning gas in the plasma condition cleans impurities attached to the surface of the cell 120. The contaminated plasma cleaning gas is exhausted to the scrubber 250 through the exhaust port 113 by the exhaust pressure of the exhaust pump 260.

The scrubber 250 collects the plasma cleaning gas and then burns it at a high temperature of 900 ° C to remove harmful substances contained in the contaminated plasma cleaning gas. The exhaust gas from which harmful substances have been removed is discharged to the outside.

When the cleaning of the cell 120 is completed, the plasma cleaning module 200 stops operating, and the ozone generator 100 again generates ozone.

As described above, in the ozone generator cleaning system according to the present invention, a cleaning gas is formed in a plasma state in a remote plasma chamber, and then supplied into the ozone generator. The cleaning gas containing fluorine is used to dry foreign substances on the cell surface by a dry method. Therefore, contaminated cells can be used up to the end of their life without replacing them with new ones.

The embodiments of the ozone generator cleaning system of the present invention described above are merely illustrative, and those skilled in the art will appreciate that various modifications and equivalent embodiments are possible without departing from the scope of the present invention. You will know very well. Therefore, it is to be understood that the present invention is not limited to the above-described embodiments. Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims. It is also to be understood that the invention includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims.

1: ozone generator cleaning system 100: ozone generator
110: outer casing 111: inlet
113: outlet 120: cell
130: Input panel 200: Plasma cleaning module
210: cleaning gas supply unit 211: cleaning gas supply pipe
213: Cleaning gas supply valve 220: Remote plasma chamber
221: display window 223: power supply unit
230: Feed pump 240: Plasma feed pipe
241: Plasma supply valve 250: Scrubber
251: Plasma exhaust pipe 260: Exhaust pump
300: Support table 400:

Claims

An ozone generating device which generates ozone by using the cell and has an inlet and an outlet respectively;
And a plasma cleaning module for cleaning the cells by supplying a plasma cleaning gas to the ozone generator,
The plasma cleaning module includes:
A cleaning gas supply unit for supplying a cleaning gas;
A remote plasma chamber that receives a cleaning gas from the cleaning gas supply and that excites the cleaning gas into a plasma state upon application of a radio frequency power from a power supply;
A plasma supply pipe connecting the remote plasma chamber and the inlet port to supply a cleaning gas in a plasma form into the ozone generator;
A scrubber for incinerating the polluted cleaning gas, which has been cleaned, and discharging the polluted cleaning gas to the outside;
And a plasma discharge pipe connecting the discharge port and the scrubber.

The method according to claim 1,
Wherein the cell is made of a plate-like material in which stainless steel and aluminum are combined.

3. The method of claim 2,
The ozone generating device is seated on the upper portion of the support table,
Wherein the plasma cleaning module is disposed above and below the supporting table so as to be spaced apart from the ozone generating device.

The method of claim 3,
Further comprising a control unit for controlling the supply timing and supply amount of the cleaning gas in the plasma supply unit, the supplying timing and supply amount of the cleaning gas in the plasma state of the remote plasma chamber, and the burning temperature and exhaust timing of the scrubber. Cleaning system.