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KR20140028991A - Overlay type inertial sensor and control methode thereof - Google Patents

Overlay type inertial sensor and control methode thereof Download PDF

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Publication number
KR20140028991A
KR20140028991A KR1020120096507A KR20120096507A KR20140028991A KR 20140028991 A KR20140028991 A KR 20140028991A KR 1020120096507 A KR1020120096507 A KR 1020120096507A KR 20120096507 A KR20120096507 A KR 20120096507A KR 20140028991 A KR20140028991 A KR 20140028991A
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KR
South Korea
Prior art keywords
insulating layer
diaphragm
driving
piezoelectric body
inertial sensor
Prior art date
Application number
KR1020120096507A
Other languages
Korean (ko)
Inventor
양정승
임창현
한승훈
이정원
이성준
Original Assignee
삼성전기주식회사
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Application filed by 삼성전기주식회사 filed Critical 삼성전기주식회사
Priority to KR1020120096507A priority Critical patent/KR20140028991A/en
Publication of KR20140028991A publication Critical patent/KR20140028991A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58—Turn-sensitive devices without moving masses
    • G01C19/64—Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
    • G01C19/66—Ring laser gyrometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/093—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by photoelectric pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/133—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with piezoelectric counterbalancing means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

The superposition type inertial sensor according to the present invention includes a diaphragm, a mass body formed in the lower center region of the diaphragm, a fixing part formed in the lower edge region of the diaphragm, an insulation layer provided on an upper surface of the diaphragm, and the mass body. A sensing structure provided on an upper side of the diaphragm corresponding to an edge portion, and a driving structure provided on an upper surface of the insulating layer corresponding to the fixing part, wherein the sensing structure includes a piezoelectric body based on the insulating layer And a piezoresistor are provided overlapping.

Description

Overlay type inertial sensor and control methode

The present invention relates to a superposition inertial sensor and a control method thereof.

Inertial sensors are widely used for various applications such as air bag, ESC (Electronic Stability Control), vehicle black box, anti-shake camcorder, mobile phone, game machine motion sensing, navigation for satellite, missile and unmanned aircraft. .

The inertial sensor is divided into an acceleration sensor capable of measuring linear motion and an angular velocity sensor capable of measuring rotational motion.

The acceleration can be obtained by Newton's law of motion "F = ma", where "m" is the mass of the moving object and "a" is the acceleration to be measured. The angular velocity can be obtained by the formula "F = 2m? V" for the Coriolis Force where "m" is the mass of the moving object, "?" Is the angular velocity to be measured, "v" Mass is the speed of motion. Further, the direction of the Coriolis force is determined by the rotation axis of the velocity (v) axis and the angular velocity (?).

Such an inertial sensor can be divided into a ceramic sensor and a MEMS (Microelectromechanical Systems) sensor according to the manufacturing process. Dual MEMS sensors are classified into capacitive type, piezoresistive type, and piezoelectric type according to the sensing principle.

Particularly, since the MEMS sensor is easily manufactured in a small size and light weight by using the MEMS technology as described in Korean Patent Laid-Open Publication No. 2011-0072229 (published on June 29, 2011), the function of the inertial sensor is also continuously It is developing.

For example, in the case of a single axis sensor in which an inertial sensor can detect inertial force for only one axis by a single sensor, a multi-axis sensor capable of detecting an inertial force with respect to two or more axes with one sensor, This trend is improving.

In addition, conventional inertial sensors are required to be miniaturized in size and high in performance in order to be applied to various fields.

However, the conventional inertial sensor has the structure for the acceleration sensor and the structure for the angular velocity sensor separately, and thus it is difficult to miniaturize the scale and realize high performance.

An aspect of the present invention is to provide a superposition type inertial sensor that achieves miniaturization and high performance in order to solve the above problems.

Another aspect of the present invention is to provide a control method of time-division control for the superposition type inertial sensor to solve the above problem.

Superposition inertial sensor according to an embodiment of the present invention comprises a diaphragm; A mass formed in a lower central region of the diaphragm; A fixing part formed in the lower edge area of the diaphragm; An insulation layer provided on an upper surface of the diaphragm; A sensing structure provided on an upper side of the diaphragm corresponding to an edge of the mass; And a driving structure provided on an upper surface of the insulating layer corresponding to the fixing part, wherein the sensing structure includes a piezoelectric body and a piezo resistor overlapping the insulating layer.

In the superposition type inertial sensor according to the exemplary embodiment of the present invention, the piezoresistor is provided under the insulating layer, and the piezoelectric body is interposed between the lower electrode and the upper electrode at the top of the insulating layer.

An overlapped inertial sensor according to an embodiment of the present invention includes a first via penetrating the insulating layer to connect the lower electrode and the piezoresistor; And a second via connecting the common connecting electrode and the piezoresistor to the upper center of the insulating layer to correspond to the mass.

In the superposed type inertial sensor according to the exemplary embodiment of the present invention, the driving structure includes a driving lower electrode, a driving piezoelectric body, and a driving upper electrode sequentially in the upper direction of the insulating layer.

In the superposition type inertial sensor according to the exemplary embodiment of the present disclosure, the driving lower electrode extends outward from the upper surface of the insulating layer.

In addition, the control method of the superposed inertial sensor according to another embodiment of the present invention includes the steps of (A) driving by applying a driving voltage to the drive structure; And (B) sensing the piezoelectric body and the piezoresistor in a time division manner with respect to each of the piezoelectric body and the piezoelectric body.

In the control method of the superposed type inertial sensor according to another embodiment of the present invention, the step (B) detects an angular velocity through the piezoelectric body or a acceleration through the piezoresistor with a time difference of 1 s to 2 ms.

The features and advantages of the present invention will become more apparent from the following detailed description based on the accompanying drawings.

Prior to this, terms and words used in the present specification and claims should not be construed in a conventional, dictionary sense, and should not be construed as defining the concept of a term appropriately in order to describe the inventor in his or her best way. It should be construed in accordance with the meaning and concept consistent with the technical idea of the present invention.

The superposition type inertial sensor according to an embodiment of the present invention is provided with a piezoelectric body and a piezoresistor without overlapping the structure for the acceleration sensor and the structure for the angular velocity sensor, thereby reducing the space for detecting the angular velocity and acceleration. There is.

The control method of the superposition type inertial sensor according to another embodiment of the present invention has an effect of easily detecting acceleration and angular velocity by using a sensing structure in which a piezo resistor and a piezoelectric body are superimposed in a time division manner.

1 is a cross-sectional view of the superposed inertial sensor according to an embodiment of the present invention.
FIG. 2 is an enlarged view of a portion “A” of FIG. 1.
Figure 3 is an exemplary view for explaining a control method of the superposed inertial sensor according to another embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The objects, particular advantages and novel features of the present invention will become more apparent from the following detailed description taken in conjunction with the accompanying drawings, in which: FIG. It should be noted that, in the present specification, the reference numerals are added to the constituent elements of the drawings, and the same constituent elements are assigned the same number as much as possible even if they are displayed on different drawings. Also, the terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. 1 is a cross-sectional view of a superposition type inertial sensor according to an exemplary embodiment of the present invention, and FIG. 2 is an enlarged view of a portion “A” of FIG. 1.

The superposition type inertial sensor according to the exemplary embodiment of the present invention includes a diaphragm 120, a mass body 130 formed in the lower center area of the diaphragm 120, and a fixing part 140 formed in the lower edge area of the diaphragm 120. ), The piezoelectric member 160 and the piezo resistor 150 are overlapped with each other based on the insulating layer 110 corresponding to the edge of the insulating layer 110 and the mass body 130 provided on the upper surface of the diaphragm 120. And a driving structure provided on the upper surface of the insulating layer 110 in correspondence with the fixed sensing unit 140.

Specifically, as illustrated in FIG. 2, the sensing structure is formed based on the insulating layer 110 corresponding to the edge portion of the mass body 130, and includes a piezoresistor 150 under the insulating layer 110. The lower electrode 180, the piezoelectric body 160, and the upper electrode 170 are sequentially provided in the upper direction of the insulating layer 110.

In particular, the sensing structure includes the piezoelectric body 160 and the piezo resistor 150 overlapping with the insulating layer 110 to detect the angular velocity through the piezoelectric body 160 in a time division manner, and to accelerate the acceleration through the piezo resistor 150. Can be detected.

In this case, in order to detect the acceleration through the piezoresistor 150, the insulating layer 110 includes a first via 191 connected to the lower electrode 180 and a second via 192 connected to the common connection electrode 190. Equipped.

The piezoresistor 150 has a resistance change according to the elastic deformation of the diaphragm 120, and the resistance change degree is represented by the lower electrode 180, the first via 191, the second via 192, and the common connection. Detection may be performed using the electrode 190.

In addition, the information about the degree of change in resistance of the piezo resistor 150 may be transmitted to the outside through a wire connected to the common connection electrode 190.

The piezoelectric body 160 is provided between the upper electrode 170 and the lower electrode 180 to generate an electrical signal according to the elastic deformation of the diaphragm 120. The electrical signal of the piezoelectric body 160 may be detected by the upper electrode 170 and the lower electrode 180.

The driving structure is provided on the upper surface of the insulating layer 110 in correspondence with the fixing part 140, and specifically, the driving lower electrode 181, the driving piezoelectric body 161, and the driving upper part in the upper direction of the insulating layer 110. An electrode 171 is provided.

As shown in FIG. 1, a portion of the driving lower electrode 181 is exposed to the outside from the upper surface of the insulating layer 110 so that an external wire or the like may be connected to the exposed region of the driving lower electrode 181. have.

Accordingly, a driving voltage is applied to the driving lower electrode 181 through an external wire to drive the driving structure.

The diaphragm 120 serves as a spring that elastically deforms according to the movement of the mass body 130 formed in the central region, and is supported by the fixing unit 140 formed in the edge region. Here, the material of the diaphragm 120 is not particularly limited, but is preferably formed using a silicon or silicon on insulator (SOI) substrate.

The mass body 130 serves to elastically deform the diaphragm 120 by causing displacement according to the acceleration, and is formed in the lower central region of the diaphragm 120. The mass body 130 and the fixing part 140 may be connected to the diaphragm 120 through the dummy insulating pattern 170.

Of course, the mass body 130 and the fixing part 140 are integrally formed with the diaphragm 120 without the dummy insulating pattern 170, thereby forming the dummy insulating pattern 170 or the mass body 130. The bonding process of bonding to 120 may be omitted.

The fixing part 140 serves to secure a space in which the mass body 130 may cause displacement by supporting the diaphragm 120. The fixing part 140 may be formed at an edge region of the lower surface of the diaphragm 120.

At this time, the material of the fixing part 140 is not particularly limited, but is preferably formed using silicon as in the mass body 130.

Such a superposition type inertial sensor according to an embodiment of the present invention implements a sensing structure in which the piezoelectric body 160 and the piezo resistor 150 are provided based on the insulating layer 110, and the piezoelectric body 160 in a time division manner. The angular velocity can be easily detected through and the acceleration can be easily detected through the piezoresistor 150.

Therefore, the superposition type inertial sensor according to an embodiment of the present invention includes a piezoelectric body 160 and a piezo resistor 150 without overlapping the structure for the acceleration sensor and the structure for the angular velocity sensor, thereby providing angular velocity and acceleration. The space to detect can be reduced.

Hereinafter, a control method of a superposition type inertial sensor according to another exemplary embodiment of the present invention will be described with reference to FIG. 3. 3 is an exemplary view for explaining a control method of a superposed inertial sensor according to another embodiment of the present invention.

In the control method of the superposition type inertial sensor according to another embodiment of the present invention, for example, the control unit (not shown) connected to the superposition type inertial sensor detects the angular velocity through the piezoelectric body 160 in a time division manner, and then the piezo resistor 150. ) Can detect the acceleration. Of course, in the control method of the superposed inertial sensor according to another embodiment of the present invention, the control unit may detect the acceleration through the piezo resistor 150 and then detect the angular velocity through the piezoelectric body 160.

Specifically, in the control method of the superposed inertial sensor according to another embodiment of the present invention, after the control unit applies the driving voltage to the drive structure shown in FIG. 1 to drive the superposed inertial sensor, the graph shown in FIG. Similarly, for example, the angular velocities of the X, Y, and Z axes can be detected according to the angular velocity detection request signals for the X, Y, and Z axes.

That is, the angular velocity detection request signal X on the X axis, the angular velocity detection request signal Y on the Y axis, and the angular velocity detection request signal Z on the Z axis in the graph shown in FIG. The angular velocity with respect to each of the X, Y, and Z axes may be detected by applying the piezoelectric body 160.

Thereafter, the acceleration of the X-axis, the Y-axis, and the Z-axis may be detected through the piezoresistor 150 with a time difference of 1 s to 2 ms. Of course, the angular velocity with respect to the X-axis, Y-axis, and Z-axis through the piezoelectric body 160 with a time difference of 1 s to 2ms after detecting the acceleration for each of the X-axis, the Y-axis, and the Z-axis through the piezoresistor 150. Can be detected.

Accordingly, the control method of the superposition type inertial sensor according to another embodiment of the present invention can easily detect the acceleration and the angular velocity by using a sensing structure in which the piezoresistor 150 and the piezoelectric body 160 are overlapped in a time division manner. have.

Although the technical idea of the present invention has been specifically described according to the above preferred embodiments, it is to be noted that the above-described embodiments are intended to be illustrative and not restrictive.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention.

110: insulating layer 120: diaphragm
130: mass 140: fixed part
150: piezo resistor 160: piezoelectric body
170: upper electrode 180: lower electrode
161: driving piezoelectric 171: driving upper electrode
181: driving lower electrode 190: common connection electrode
191: first via 192: second via

Claims (7)

Diaphragm;
A mass formed in a lower central region of the diaphragm;
A fixing part formed in the lower edge area of the diaphragm;
An insulation layer provided on an upper surface of the diaphragm;
A sensing structure provided on an upper side of the diaphragm corresponding to an edge of the mass; And
A driving structure provided on an upper surface of the insulating layer corresponding to the fixing part;
Lt; / RTI >
The sensing structure is a superposition type inertial sensor having a piezoelectric body and a piezoresistor overlapped with respect to the insulating layer.
The method according to claim 1,
The piezoresistor is provided under the insulating layer, the piezoelectric body is disposed between the lower electrode and the upper electrode in the upper portion of the insulating layer superimposed inertial sensor.
The method according to claim 2,
A first via penetrating the insulating layer to connect the lower electrode and the piezoresistor; And
A second via connecting the piezo resistor and the common connection electrode provided at the center of the insulating layer to correspond to the mass;
Nested inertial sensor comprising a.
The method according to claim 1,
The driving structure may include a driving lower electrode, a driving piezoelectric body, and a driving upper electrode sequentially in the upper direction of the insulating layer.
The method of claim 4,
The driving lower electrode extends in an outward direction from the top surface of the insulating layer.
(A) driving by applying a driving voltage to the driving structure; And
(B) sensing the piezoelectric body and the piezoresistor in a time division manner with respect to each of the piezoelectric body and the piezoelectric body;
Control method of the superposition type inertial sensor comprising a.
The method of claim 6,
In the step (B), the angular velocity is detected through the piezoelectric body with a time difference of 1 s to 2 ms, or the acceleration is detected through the piezo resistor.
KR1020120096507A 2012-08-31 2012-08-31 Overlay type inertial sensor and control methode thereof KR20140028991A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020120096507A KR20140028991A (en) 2012-08-31 2012-08-31 Overlay type inertial sensor and control methode thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120096507A KR20140028991A (en) 2012-08-31 2012-08-31 Overlay type inertial sensor and control methode thereof

Publications (1)

Publication Number Publication Date
KR20140028991A true KR20140028991A (en) 2014-03-10

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