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KR20120091534A - Substrate transfer system with horizontal multi-joint type arm - Google Patents

Substrate transfer system with horizontal multi-joint type arm Download PDF

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Publication number
KR20120091534A
KR20120091534A KR1020110011344A KR20110011344A KR20120091534A KR 20120091534 A KR20120091534 A KR 20120091534A KR 1020110011344 A KR1020110011344 A KR 1020110011344A KR 20110011344 A KR20110011344 A KR 20110011344A KR 20120091534 A KR20120091534 A KR 20120091534A
Authority
KR
South Korea
Prior art keywords
arm
substrate transfer
lower link
drive shaft
link
Prior art date
Application number
KR1020110011344A
Other languages
Korean (ko)
Inventor
전인택
Original Assignee
주식회사 사이보그-랩
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 사이보그-랩 filed Critical 주식회사 사이보그-랩
Priority to KR1020110011344A priority Critical patent/KR20120091534A/en
Publication of KR20120091534A publication Critical patent/KR20120091534A/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B25J9/0021—All motors in base
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/141—Associated with semiconductor wafer handling includes means for gripping wafer

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

PURPOSE: A substrate transfer device including a horizontal multi-joint arm is provided to reduce the size of a load applied to one arm driving motor by decreasing the number of joints driven by each arm driving motor. CONSTITUTION: A bottom link(300) includes an arm driving unit(100) with a first arm driving motor(111) and a second arm driving motor(121). A first arm(400) is combined with one end of the bottom link by a rotary joint. A second arm(500) is combined with the other end of the bottom link by the rotary joint. A bottom link rotation motor rotates the bottom link. Two arm driving motors implement a linear movement by synchronizing with the bottom link rotation motor.

Description

Substrate Transfer System with Horizontal Multi-Joint Type Arm}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer apparatus having a horizontal articulated arm, and more particularly, to a substrate transfer apparatus, in which two joints of each arm are mechanically rotated by each arm drive motor, respectively. By synchronizing the arm drive motors with each other, the rotation radius of the two arms is reduced, so that the rigidity of the horizontal articulated robot can be increased and the efficiency of the installation space can be maximized. will be.

Substrate transfer devices, which are industrial robots with multiple revolute joints arranged horizontally, are generally used to transport workpieces, such as semiconductor wafers, in semiconductor device manufacturing facilities. The configuration of a conventional substrate transfer apparatus having a plurality of joints is shown in Figs. 1A and 1B.

The conventional substrate transfer apparatus includes one motor 11 and a reducer 11a installed inside one base 10, a center link 20 at an upper portion of the base, and first joints 31 and 41 at both sides of the upper portion of the center link. It is composed of a first arm 30 and a second arm 40, which are each joined by. The first arm 30 comprises a first lower link 32 and a first upper link 34, which are joined by a second joint 33, at the end of the first upper link 34 a first end device. (end effector) mounting flange 35 may be installed to engage a robot hand that can pick up a workpiece such as a semiconductor wafer.

The second arm 40 includes a second lower link 42 and a second upper link 44 coupled by a second joint 43, the second end effector at the end of the second upper link 44. The mounting flange 45 may be installed to mount a workpiece such as a semiconductor wafer. Inside the center link 20, one arm driving motor 21 is installed together with the reducers 21a and 21b to be connected by the first joints 31 and 41 and the second joints 33 and 43. The arm 30 and the second arm 40 can be driven.

However, in this substrate transfer apparatus, one arm drive motor 21 installed inside the center link for the operation of each arm is shown in FIG. 2 of the first joints 31 and 41 and the second joints 33 and 43. As shown in Fig. 2, the load on the motor is excessive because the mechanical rotation is implemented, and the offset between the two arms is avoided to avoid the collision of the two arms 30 and 40 configured in the same horizontal plane. ), There is a problem that a large installation space is required.

The present invention has been made to solve the above problems, an object of the present invention, by integrating the two lower links of the conventional substrate transfer apparatus, there is no need for the separation between the arms can reduce the space occupied by the arms, It is to provide a substrate transfer device having a horizontal articulated arm that allows each arm drive motor to drive one arm, thereby reducing the amount of load applied to each arm drive motor and increasing the strength of the installation. .

Another object of the present invention is to provide a substrate transfer apparatus having a horizontal articulated arm which does not need to be spaced between the arms by installing two arms at different heights.

Substrate transfer apparatus having a horizontal articulated arm according to the present invention,

A lower link 300 having an arm driver 100 including a first arm drive motor 111 and a second arm drive motor 121 installed therein;

A first arm 400 coupled by a rotatable joint on one end of the lower link 300;

A second arm 500 coupled by a rotary joint on the other end of the lower link 300;

It includes a lower link rotary motor 211 for driving the lower link 300,

The two arm drive motors 111 and 121 are configured to implement linear motion by synchronizing with the lower link rotation motor 211, respectively.

Substrate transfer apparatus having a horizontal articulated arm according to the present invention as described above can reduce the number of joints driven by each arm drive motor, thereby reducing the size of the load applied to one arm drive motor. .

Substrate transfer device having a horizontal articulated arm according to the present invention can be installed at two different heights to reduce the rotation radius of the arm without the need for separation between the arms, it is possible to reduce the installation space of the equipment The wafer pass line can be lowered.

The substrate transfer device with the horizontal articulated arm according to the present invention can integrate the lower link of the arm to increase the strength of the equipment and reduce the number of parts, thereby reducing the cost.

1A is an outline view of a conventional substrate transfer apparatus having a plurality of joints.
Fig. 1B is a diagram schematically showing the configuration of a drive unit of a conventional substrate transfer apparatus having a plurality of joints.
2 is a view showing a rotation radius of an arm of a conventional substrate transfer apparatus.
3A is an outline view of a substrate transfer device with a horizontal articulated arm in accordance with the present invention.
3B is a view schematically showing the configuration of a drive unit of the substrate transfer apparatus with a horizontal articulated arm according to the present invention.
4 is an exploded perspective view of a substrate transfer apparatus with a horizontal articulated arm according to the present invention.
5 is a view showing the radius of rotation of the arm of the substrate transfer apparatus with a horizontal articulated arm according to the present invention.
6 to 16 are diagrams schematically showing the sequential rotation of the arms of the substrate transfer apparatus with the horizontal articulated arm according to the present invention.
FIG. 17 is a view comparing wafer pass lines of a substrate transfer apparatus with a horizontal articulated arm according to the present invention and a conventional substrate transfer apparatus. FIG.

The substrate transfer device with the horizontal articulated arm according to the present invention drives each arm by a different arm drive motor, and drives a lower link on which two arm drive motors are installed by a lower link rotary motor. In addition, the arm drive motor and the lower link rotation motor can be synchronized with each other to implement linear motion.The two arms are configured at different heights to maximize space efficiency, and the two lower links of the arms are integrally applied to the motor. It is possible to reduce the size of the loads and increase the stiffness of the installation itself.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a substrate transfer apparatus having a horizontal articulated arm according to the present invention will be described with reference to the drawings.

FIG. 3A is an outline view of a substrate transfer apparatus with a horizontal articulated arm according to the present invention, and FIG. 3B schematically shows a configuration of a drive unit of the substrate transfer apparatus with a horizontal articulated arm according to the present invention. 4 is an exploded perspective view of the substrate transfer apparatus according to the present invention.

Substrate transfer apparatus having a horizontal articulated arm according to the present invention,

A lower link 300 having an arm driver 100 including a first arm drive motor 111 and a second arm drive motor 121 installed therein;

A first arm 400 coupled by a rotatable joint on one end of the lower link 300;

A second arm 500 coupled by a rotary joint on the other end of the lower link 300;

It includes a lower link rotary motor 211 for driving the lower link 300,

The two arm drive motors 111 and 121 are configured to implement linear motion by synchronizing with the lower link rotation motor 211, respectively.

As shown in Fig. 3 and Fig. 3b, the arm driving unit 100 of the substrate transfer apparatus according to the present invention is configured in the lower link 300, and the first arm driving motor 111 and the second arm driving motor 121 are shown. ).

The lower link rotating motor 211 is installed inside the base 600 under the arm driving unit 100 to rotate the entire arm driving unit 100. Therefore, the first arm and the second arm are connected to both ends. The lower link 300 may be rotated.

As shown in FIG. 3B, a belt or the like is connected between the drive shaft of the first arm drive motor 111 and the first arm drive shaft 420 and between the first arm drive shaft 420 and the first end drive shaft 430. Connected by the member, the rotational force generated by the first arm drive motor 111 can be transmitted to the first end device mounting portion 440.

Similarly, between the drive shaft of the second arm drive motor 121 and the second arm drive shaft 520 and between the second arm drive shaft 520 and the second end device drive shaft 530 are connected by a connecting member such as a belt, The rotational force generated by the second arm drive motor 121 may be transmitted to the first end device mounting portion 440.

The two arm drive motors may include a reducer as shown in FIG. That is, the first arm drive motor 111 may include a first arm drive motor reducer 112, and the second arm drive motor 121 includes a second arm drive motor reducer 122.

In addition, the lower link rotary motor 211 may include a reducer 212.

Preferably, the first arm driving motor 111, the second arm driving motor 121, and the lower link rotating motor 211 are each capable of forward / reverse operation using a servo motor and can perform smooth low speed operation. In this case, rapid acceleration or rapid deceleration may be performed, but is not limited thereto.

In addition, each of the first arm drive motor 111 and the second arm drive motor 121 has a sensor, that is, an encoder for detecting a speed corresponding to the rotation angle of the drive shaft of the motor, that is, the rotation angle of each motor drive shaft. It is connected to the arm drive motor of can control the driving speed of each arm driven by each arm drive motor.

Similarly, an encoder may be mounted on the lower link rotation motor 211 to control the driving speed of the lower link 300.

A control unit for controlling the operation of each of the arm drive motors 111 and 121 and the lower link rotating motor 211 is configured in the base 600 to receive a detection signal of the encoder.

The first arm 400 has a first arm upper link 410 coupled to the upper end of the lower link 300 by a rotary joint, one end of the first arm upper link 400 and the lower link 300. ) Between the first arm drive shaft 420, the first end device mounting portion 430 configured under the other end of the first arm upper link 410, and the other end of the first arm upper link 410. And a first end device drive shaft 440 configured between the first end device mounting portion 430.

Similarly, the second arm 500 has a second arm upper link 510 coupled by a rotatable joint over the other end of the lower link 300, one end of the second arm upper link 510 and the lower link. The second arm drive shaft 520 formed between one end of the 300, the second end device mounting portion 530 formed on the other end of the second arm upper link 510, and the second arm upper link ( And a second end device drive shaft 540 configured between the other end of the 510 and the second end device mounting part 530.

Preferably, each end device mounting portion (430, 530) may be configured with a sensor for detecting the position of the arm and delivers to the control unit inside the base 600.

At this time, the length of the first arm drive shaft 420 of the first arm 400 is configured to be longer than the length of the second arm drive shaft 520 of the second arm 500, the first arm upper link of the first arm ( The length of the 410 is the same as the length of the second arm upper link 510 of the second arm, and the first end is formed at the lower end of one end of the first arm upper link 410 of the first arm 400 The device mounting portion 430 and the second end device mounting portion 530 configured on the top of one end of the second arm upper link 510 of the second arm 500 may be configured to face each other at a corresponding position.

Thus, the second end device mounting portion 530 of the second arm 500 is present under the first end device mounting portion 430 of the first arm 400, as shown in FIG. The pass line of the same workpiece is lower than the workpiece transfer line of the conventional substrate transfer apparatus.

In addition, the second end device mounting portion 530 of the second arm 500 is present in the lower portion of the first end device mounting portion 430 of the first arm 400, the two arms 400 shown in FIG. , The radius of rotation of 500 is reduced than that of the conventional substrate transfer apparatus shown in FIG. Specifically, while the rotation radius of the conventional substrate transfer apparatus of FIG. 1 is 242 mm, the rotation radius of the substrate transfer apparatus according to the present invention is reduced to 190 mm.

In addition, since the lower link 300 is commonly connected to the first arm 400 and the second arm 500, even if each arm is composed of only one link, an arm having the same length as a conventional arm can be realized. Rather, as shown in Fig. 1, the rigidity is increased than the arm constituted by the two links 32, 34.

6 to 16 are diagrams schematically showing the sequential rotation of the arms of the substrate transfer apparatus according to the present invention.

The first arm drive motor 111 with respect to the rotational direction of the lower link 300 by the drive of the lower link rotary motor 211 to change the swing movement of each arm of the substrate transfer device according to the invention in a linear motion. Or synchronize the second arm drive motor 121 to rotate in the opposite direction.

The above description is merely illustrative of the technical details of the present invention, and those skilled in the art to which the present invention pertains may various modifications and changes without departing from the essential characteristics of the present invention. Therefore, the embodiments disclosed in the present invention are not intended to limit the technical idea of the present invention but to describe the present invention, and the scope of the technical idea of the present invention is not limited by these embodiments. The scope of protection of the present invention should be construed according to the following claims, and all technical ideas within the scope of equivalents should be construed as falling within the scope of the present invention.

10: base 11a: reducer
20: center link 21: arm drive motor
21a: Reducer 21b: Reducer
30: first arm 31: first joint
32: first lower link 33: second joint
34: first upper link 35: first end device mounting flange
40: second arm 41: first joint
42: second lower link 43: second joint
44: second upper link 45: second end device mounting flange
100: arm drive unit 111: first arm drive motor
112: first arm drive motor reducer 113: first drive shaft
200: second arm drive unit 121: second arm drive motor
122: second arm drive motor reducer 123: first drive shaft
211: lower link rotary motor 212: third reducer
300: lower link 400: first arm
410: first arm upper link 420: first arm drive shaft
430: first end device mounting portion 440: first end device drive shaft
500: second arm 510: second arm upper link
520: second arm drive shaft 530: second end device mounting portion
540: second end device drive shaft

Claims (6)

A lower link provided therein, the arm drive unit including a first arm drive motor and a second arm drive motor;
A first arm joined by a rotatable joint on one end of the lower link;
A second arm joined by a rotatable joint on the other end of the lower link;
A lower link rotary motor for rotationally driving the lower link,
Each of the two arm drive motors may be synchronized with the lower link rotation motor to implement linear motion.
Substrate transfer device with horizontal articulated arm.
The method of claim 1,
The first arm is,
A first arm upper link coupled by a rotatable joint over an end of the lower link;
A first arm drive shaft configured between one end of the first arm upper link and one end of the lower link;
A first end device mounting portion configured under the other end of the first arm upper link;
And a first end device drive shaft configured between the other end of the first arm upper link and the first end device mounting portion.
Substrate transfer device with horizontal articulated arm.
The method of claim 1,
The second arm is,
A second arm upper link coupled by a rotatable joint over the other end of the lower link;
A second arm drive shaft configured between one end of the second arm upper link and one end of the lower link;
A second end device mounting portion configured above the other end of the second arm upper link;
And a second end device drive shaft configured between the other end of the second arm upper link and the second end device mounting portion.
Substrate transfer device with horizontal articulated arm.
The method of claim 2,
A drive shaft of the first arm drive motor and a first arm drive shaft are connected by a connecting member;
Substrate transfer device with horizontal articulated arm.
The method of claim 3, wherein
A drive shaft and a second arm drive shaft of the second arm drive motor are connected by a connecting member.
Substrate transfer device with horizontal articulated arm.
The method of claim 4, wherein
The length of the first arm drive shaft is longer than the length of the second arm drive shaft
Substrate transfer device with horizontal articulated arm.
KR1020110011344A 2011-02-09 2011-02-09 Substrate transfer system with horizontal multi-joint type arm KR20120091534A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020110011344A KR20120091534A (en) 2011-02-09 2011-02-09 Substrate transfer system with horizontal multi-joint type arm

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020110011344A KR20120091534A (en) 2011-02-09 2011-02-09 Substrate transfer system with horizontal multi-joint type arm

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KR20120091534A true KR20120091534A (en) 2012-08-20

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101246362B1 (en) * 2012-10-11 2013-03-25 주식회사 티이에스 Apparatus for transferring substrate
KR102348259B1 (en) * 2021-05-31 2022-01-10 (주) 티로보틱스 Travel robot for driving substrate transfer robot in vaccum chamber
KR102348261B1 (en) * 2021-05-31 2022-01-10 (주) 티로보틱스 Transfer robot for transferring substrate in vaccum chamber
WO2024219580A1 (en) * 2023-04-21 2024-10-24 주식회사 라온테크 Alignment work performance robot apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101246362B1 (en) * 2012-10-11 2013-03-25 주식회사 티이에스 Apparatus for transferring substrate
KR102348259B1 (en) * 2021-05-31 2022-01-10 (주) 티로보틱스 Travel robot for driving substrate transfer robot in vaccum chamber
KR102348261B1 (en) * 2021-05-31 2022-01-10 (주) 티로보틱스 Transfer robot for transferring substrate in vaccum chamber
TWI799252B (en) * 2021-05-31 2023-04-11 南韓商Ｔ Ｒｏｂｏｔｉｃｓ 股份有限公司 Transfer robot for transferring substrate in vacuum chamber
WO2024219580A1 (en) * 2023-04-21 2024-10-24 주식회사 라온테크 Alignment work performance robot apparatus

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