KR19990001701A - Marking device for semiconductor package manufacturing - Google Patents

Abstract

The present invention relates to a marking device for manufacturing a semiconductor package, the marking device of the present invention for printing letters and symbols (material unique number, company name, date, etc.) on one side of the material of the unit unit unit is a material supply unit, boat Marking device for manufacturing semiconductor package consisting of sending part, suction conveying part, first rotating conveying part, marking part, inspecting part, second rotating conveying part and defective material discharging part, drying part and material discharging part. Prevents, improves productivity and improves quality.

Description

Marking device for semiconductor package manufacturing

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a marking apparatus for manufacturing a semiconductor package, and more particularly, to manufacturing a super ball grid array (SBGA) semiconductor package by using materials in units of units. During the marking process of printing letters and symbols (material identification number, company name, date, etc.), a series of tasks such as supply, transfer, marking, inspection and discharge of materials are automated to prevent marking defects and improve productivity. It is to improve the quality.

In general, the semiconductor package is shipped as a product of the semiconductor package through a multi-step process (material inspection, sawing process, die bonding process, wire bonding process, molding process, marking process, etc.).

In order to proceed with the various steps described above, the material of the semiconductor package is supplied and transported in units of scripts (multiple units are arranged in one frame), and each process is carried out. It has undergone the singulation process of cutting the unit into units.

However, the material of the semiconductor package is not supplied in units of strips, and it is very difficult to proceed with the above-described steps in the materials supplied in units of units.

In particular, the marking process is to mold the above-described material and then to precisely print on the surface. When supplying the material for the marking process, the material in the unit of strips is relatively easy to supply so that the material in the unit of the strip is used. Marking process could be carried out by fixing the pitch at the exact position, but the material of each unit was not easy to supply, and it was very difficult to transfer the supplied material to fix it at the correct position. There was a problem in that marking failure occurred because the marking pad (MARKING PAD) and the correct setting could not be made due to the flow of the material during the execution, and the position of the material is incorrect.

Therefore, in order to mark the materials in units of units, the above-mentioned materials were manually set at the marking pads and the correct positions, thereby increasing the worker's fatigue, and the disadvantage that the marking process could not be performed by a skilled worker. It was.

An object of the present invention is to invent such a problem, the molding, molding and molding of the material supplied in the unit of the unit, after the marking process of printing the characters and symbols on the surface of the material supply, transfer, marking, The present invention provides a marking apparatus for manufacturing a semiconductor package to automate a series of tasks such as inspection and discharging, thereby preventing marking defects and improving productivity by improving productivity.

1 is a front view of a marking apparatus for manufacturing a semiconductor package according to the present invention.

Figure 2 is a plan view showing the overall configuration of the marking device for manufacturing a semiconductor package according to the present invention

Figure 3 is a plan view showing the configuration of the material supply unit and the material discharge unit according to the present invention

Figure 4 is a side view showing the configuration of the material supply unit and the material discharge unit according to the present invention

5 is a plan view showing a loading push rod of the material supply unit according to the present invention;

Figure 6 is a plan view showing the configuration of the boat transfer unit and the drying unit according to the present invention

Figure 7 is a front view showing the configuration of the boat transport and drying unit according to the present invention

FIG. 8 is an enlarged view of part I of FIG. 6;

9 is a plan view showing the configuration of the adsorption transfer part according to the present invention;

10 is a side view showing the configuration of the adsorption transfer part according to the present invention;

11 is a cross-sectional view taken along the line II-II of FIG.

12 is a front view showing the configuration of the rotary feeder according to the present invention

Figure 13 is a front view showing the operating state of the rotary feeder according to the present invention

14 is a cross-sectional view taken along the line III-III of FIG.

15 is a plan view showing the configuration of a rotary table according to the present invention.

16 is a front view showing the configuration of a rotary table according to the present invention.

17 is a front view showing the configuration of the marking portion according to the present invention

18 is a plan view showing a configuration of a marking unit according to the present invention

19 is a front view showing the configuration of the inspection unit according to the present invention

20 is a cross-sectional view taken along the line IV-IV of FIG. 19.

21 is a plan view showing the configuration of the defective material discharging unit according to the present invention;

22 is a front view showing the configuration of the defective material discharging unit according to the present invention;

Figure 23 is a plan view showing the unloading push rod structure of the material discharge portion according to the present invention

24 is a front view showing the unloading push rod structure of the material discharge unit according to the present invention;

25 is a cross-sectional view taken along the line V-V in FIG.

Figure 26 is a plan view of a boat on which a plurality of materials are seated according to the present invention

27 is a cross-sectional view of a boat on which a plurality of materials are seated according to the present invention.

28A and 28B are front views showing the configuration of the support die according to the present invention.

29 is a plan view showing the configuration of the support die according to the present invention.

Explanation of symbols on the main parts of the drawings

100: Material A: Material Supply Department

B: Boat transfer part C: Suction transfer part

D, E: 1st and 2nd rotation transfer part F: Marking part

G: Inspection part H: Drying part

I: Bad material discharge part J: Material discharge part

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

1 is a front view of a marking apparatus for manufacturing a semiconductor package according to the present invention, and FIG. 2 is a plan view showing the overall configuration of the marking apparatus for manufacturing a semiconductor package according to the present invention. As shown, the configuration according to the present invention, the material supply unit (A) for sequentially supplying the boat 80 by seating a plurality of mold-molded material 100 to the boat (80), the material The boat 80, which is supplied from the supply unit A, is transferred to the boat transfer unit B for transferring the material 100 seated on the boat 80 by one pitch p, and the boat transfer unit B. The adsorption conveying part C which adsorbs and conveys the upper surface of the material 100 conveyed one by one by pitch (p) sequentially, and marks on the back surface of the material 100 conveyed by the said adsorption conveying part C. The first rotary feed unit (D) and the first rotary feed unit (D) to be seated on the rotary table 40 is rotated by 180 ° to transfer the above-mentioned material to rotate the rotary table 40 Marking part (F) marking on the back of the material 100 seated on the), the inspection unit (G) for inspecting the state marked in the marking part (F), and The second rotation transfer unit E for transferring the completed material 100 inspected by the deadline inspection unit G 180 degrees to the boat 80 being transferred from the boat transfer unit B, and the second rotation described above. When the material 100 marked by the sending unit E is seated on the boat 80, the defective material discharging unit I for absorbing and discharging the defective material 100 from the seated material 100 by discharge, and A drying unit H for transferring the boat 80 on which the marked material 100 is seated to cure the marking part of the material 100, and a boat 80 passing through the drying unit H. ) Is made of a material discharge unit (J) for discharging the material 100 is completed by marking.

3 and 4 are a plan view and a side view showing the configuration of the material supply unit and the material discharge unit according to the present invention. As shown, the material supply unit (A) and the material discharge unit (J) according to the present invention, the magazine (MG) that can be stacked on the boat 80, a plurality of materials 100 are seated is seated, both sides An upper base plate 11 having a first belt 11a installed in the longitudinal direction and a lower base plate 12 disposed below the upper base plate 11 and having a second belt 12a provided at both sides in the longitudinal direction. ) And the upper and lower base plates 11 and 12 respectively positioned at the front and rear ends of the upper and lower base plates 11 and 12 to move up and down between the upper and lower base plates 11 and 12, respectively. ) And the fourth belt 14a, wherein the third belt 13a and the fourth belt 14a are positioned inward to the first and second belts 11a and 12a. It consists of a loading elevator 13 and an unloading elevator 14 extending to the front and rear ends of the belts 11a and 12a, respectively.

A stopper 15 is installed at the tip of the upper base plate 11 so that one magazine MG located at the top of the plurality of magazines MG seated on the upper plate 41 is loaded. When transported to the elevator (13) is to fix the magazine MG in the rear end no longer transported.

The first, second, third, and fourth belts 11a, 12a, 13a, and 14a are provided with step motors SM, respectively, and are driven by the step motors SM. ) Operates sequentially by sensing of a sensor (not shown).

In order to move the loading elevator 13 and the unloading elevator 14 up and down, a ball screw BS driven by a step motor SM is installed in a vertical direction, and the ball screw BS is mounted on the ball screw BS. One loading, unloading elevator 13, 14 is coupled to move up and down.

When such a configuration is installed in the material supply unit A, the loading push rod 16 is installed to be positioned at the rear end of the loading elevator 13 as shown in FIG. 5 to slide the loading push rod 16 to form a magazine (MG). ) And the rear end of the boat 80 stacked in order to supply sequentially, and when installed in the material discharge portion (J), the boat on which the finished work 100 as shown in Figs. The unloading push rod 70 is provided so as to push the rear end of 80 so that the boat 80 is sequentially stacked in the empty magazine MG by the unloading push rod 70. In this case, the magazine MG is loaded and unloaded sequentially while the loading elevator 13 is moved up and down while being seated on the loading elevator 13, respectively.

6 and 7 are a plan view and a front view showing the configuration of the boat transfer unit and the drying unit according to the present invention. As shown, the boat transfer portion B and the drying portion H are installed on the same line. The configuration of the boat transfer portion B includes two guide rails 21 for guiding the lateral side of the boat 80 to be supplied. And a conveyance belt 22 which is provided inside each of the guide rails 21 and is driven by a step motor SM to convey the boat 80, and by the conveyance belt 22. When the boat 80 to be transported is transported by one pitch p, the boat 80 which is installed in the ball screw BS driven by the step motor SM to stop it is transported by the transport belt 22. It is made of a stopper 24 that is fed by a pitch (p) before).

The stopper 24 is installed symmetrically on both sides with respect to the center line of the boat 80 to be supplied so that the continuous process can proceed, if one stopper 24 operates, the other stopper 24 Is waiting. In addition, the sensor 25 is installed at the tip of the boat transfer part (B) to detect the traveling direction of the boat 80 supplied by the sensor 25 to prevent defects in advance.

The conveying belts 22 respectively installed inside the guide rails 21 are coupled to the spline shaft 23 to be driven at the same time. The two guide rails 21 are provided at the width of the boat 80 to be supplied. Ball screw (BS) is installed so that the width can be adjusted accordingly, the handle 21a is formed at the end of the ball screw (BS).

The drying unit (H) installed on the same line as the boat transfer unit (B) shown in FIGS. 6 and 7 is to cure the material 100 on which the marking is completed, and the construction of the material 100 on the marking is completed. The transport chains 26 are respectively installed to be seated on both sides of the boat 80 so that the boat 80 that is seated can be transported and driven by the step motor SM, and the boat 80 The UV is transported to the lower portion of the lower 27 is installed on the boat 80 to cure the marking portion of the material 100 to be transported. Here, the transfer chain 26 is coupled to the spline shaft 23 is driven at the same time.

9 and 10 are a plan view and a side view showing the configuration of the adsorption transfer unit according to the present invention. As shown in the figure, the configuration of the adsorption transfer part C includes an adsorption rubber 31 which adsorbs the upper surface of the material 100 seated on the boat 80 by the backing, and the adsorption rubber 31 described above. Material adsorbed by the cylinder 32 to be operated by the air, the ball screw BS and the step motor SM to move the cylinder 32 and the suction rubber 31 to the left and right, and the suction rubber 31 described above. It consists of a seating die 33 for seating (100).

The two adsorption rubber 31 and the cylinder 32 are installed at regular intervals, which is to improve the process of adsorbing and transporting the material 100.

12 is a front view showing the configuration of the rotational transfer unit according to the present invention, Figure 13 is a front view showing the operating state of the rotational transfer unit according to the present invention, Figure 14 is a cross-sectional view taken along line III-III of FIG. The rotary feeder is divided into a first rotary feeder D and a second rotary feeder having the same configuration. As shown, the configuration of the first and second rotary feed units (D) (E), which absorbs the upper surface of the material 100 and rotates it by 180 °, is a suction that adsorbs the upper surface of the material 100 by backing. It consists of the rubber 31, the rotating arm 34 which rotates the said adsorption | suction rubber 31 by 180 degrees, and the step motor SM which rotates the said rotating arm 34 by 180 degrees.

The first rotary transfer unit (D) is to rotate the material 100 by 180 ° to the rotary table 40 to perform the marking process, and the second rotary transfer unit (E) is the material for which the marking process is completed. The 100 is rotated 180 ° to be seated on the boat 80.

15 and 16 are a plan view and a front view showing the configuration of a rotary table according to the present invention. As shown in the configuration of the rotary table 40 of the present invention, the plate 41 is formed in each of the seating grooves 42 in which the material 100 can be seated are divided into four quarters in the circumferential direction, and the plate described above. Step motor SM for dividing and rotating the 41, gear box 44 for transmitting the rotation of the step motor SM to the plate 41, and at the time of the divided rotation of the plate 41 It consists of an error correction device 45 for correcting the error.

The error compensator 45 is formed with holes 43 at positions circumferentially divided into the bottom surface of the plate 41, and holders 46 inserted into the holes 43 are installed below. The holder 46 is operated up and down by the cylinder 47. The hole 43 is formed of data whose diameter is narrowed from the bottom of the plate 41 to the top thereof, and the holder 46 inserted into the hole 43 corresponds to the taper formed in the hole 43. The taper is formed.

17 and 18 are a front view and a plan view showing the configuration of the marking portion according to the present invention. As shown, the configuration of the marking part F installed so as to be positioned at one of the four circumferential positions of the rotary table 40 divided and rotated to mark the material 100 may include A marking pad 51 for marking the back surface, a cleaning tape 52 for cleaning the marking pad 51, a bobbin 53 wound around both sides of the cleaning tape 52, and the It consists of a motor 54 which rotates each bobbin 53.

The marking part F is positioned when the material seated in the seating groove 42 of the rotary table 40 is sequentially positioned at the bottom of the marking pad 51 by the divided rotation of the rotary table 40. Marking is to be carried out.

19 is a front view showing the configuration of the inspection unit according to the invention, Figure 20 is a cross-sectional view taken along the line IV-IV of FIG. As shown, the rotary table 40 is located at one of the four circumferential positions in the circumferential direction, and the rotary table 40 is divided and rotated to mark the marking part F, and then rotary The configuration of the inspection unit G installed at the position where the table 40 is divided and rotated to inspect the marking state of the material 100 is an upper portion where the material 100 marked by the rotary table 40 which is divided and rotated is located. Light 61 installed in the support, the camera 62 installed on the upper portion of the light 61, the support 63 is provided with a ball screw (BS) so that the light 61 and the camera 62 is moved vertically And first and second connecting bars 64 and 65 for connecting the light 61 to the support 63, and the first and second connecting bars 64 to rotate the light 61. When the light 61 is rotated by the central axis 66 coupling the central axis 66 and the central axis 66 is fixed. It is made of a fixing means (67).

The fixing means 67 has a plurality of hemispherical grooves 64a formed in the first connecting bar 64, and the springs 65b are formed at the positions corresponding to the grooves 64a in the second connecting bar 64. The ball 65a is elastically installed, and the ball 65a is coupled to the groove 64a to be fixed after the first connection bar 64 and the second connection bar 65 are rotated. Here, the groove 64a and the ball 65a are positioned on a circle drawn around the central axis 66 that couples the first and second connection bars 64 and 65.

21 and 2 are a plan view and a front view showing the configuration of the defective material discharging unit according to the present invention. As shown, the configuration of the defective material discharging unit I to discharge the material 100 having the marking failure from the marked material 100 separately is a boat on which the material 100 on which the marking is completed is seated ( 80, an adsorption rubber 31 for adsorbing the upper surface of the material 100 in which the marking failure has occurred by the backing, a vertical cylinder 35 for operating the adsorption rubber 31 up and down, and the aforementioned vertical cylinder (35) and the horizontal cylinder (36) for moving the suction rubber (31) left and right, the boat (80) for seating the poor marking material (100) adsorbed by the suction rubber (31), and the boat A boat seating block 37 on which 80 is seated, and a ball screw BS and a step motor SM that slide the boat seating block 37 from side to side.

23 and 24 are a plan view and a front view showing the unloading push rod structure of the material discharge unit according to the present invention, Figure 25 is a cross-sectional view taken along the line V-V of FIG. As shown, the configuration of the unloading push rod 70 which pushes the rear end of the boat 80 on which the marked material 100 is seated and sequentially stacks it in the magazine MG, in which the material 100 is seated A conveying means for conveying the boat 80, a push bar 71 for sequentially stacking the rear end of the boat 80 conveyed by the conveying means and laminating it in the magazine MG, and conveying by the conveying means When the boat 80 is transported to the lower portion of the push bar 71 and the fixed shaft 75 to rotate the lower end of the push bar 71 to the upper so as not to be caught by the lower end of the push bar 71 and In order to rotate the lower end of the push bar 71 to the upper portion of the push bar 71, the connecting bar 72 is coupled to the shaft 74, the connecting bar 72 is operated left and right The push bar 71 is composed of a linear motor 73 to push the rear end of the boat (80).

The transfer means may be installed to transfer the transfer chain 26 driven by a motor so as to be located on the lower side of both sides of the boat 80, a transfer belt or the like may be used instead of the transfer chain 26.

26 and 27 are a plan view and a cross-sectional view of a boat on which a plurality of materials are seated according to the present invention. As shown, the configuration of the boat 80 for supplying and transporting the material 100 is placed while maintaining the pitch (p) of the same material in order to mark the material 100 provided in units of units as shown in FIG. , A plurality of seating holes 82 to maintain the same pitch (p) on a straight line of the body 81 is formed, the seating holes 82 are seated holes 82 so as to seat the material 100, respectively The locking jaw (83) is formed inward at each corner of the corner, and the seating hole (82) to prevent the material (100) seated by the locking jaw (83) of the seating hole (82) is separated. Each corner of the protrusion is formed by forming a projection (84).

The leading edge portion of the body 81 is to be distinguished from the rear edge by the chamfer 81a, the boat by the sensor 25 for detecting the chamfer 81a when the boat 80 is supplied The supply direction of 80) can be confirmed.

28A and 28B are front views showing an operating state of the support die according to the present invention, and FIG. 29 is a plan view showing the configuration of the support die according to the present invention. As shown, when the marking device is held while operating the material 100 or the ink is replaced in the marking part F, the supporting die 91 is installed so that the worker can be maintained at a high position. The configuration of the wheel 92 is installed on the bottom surface of the bottom plate 94 and sliding to the bottom of the marking device, and the guide plate 93 for guiding this when the bottom plate 94 is slid to the bottom of the marking device. And, the guide jaw (93) guided by the guide plate (93) when the bottom plate 94 is sliding to the outside of the marking device to prevent further sliding the locking step (95) formed at the rear end of the bottom plate 94, One side is hinged 98 is coupled to the bottom of the base plate 96 so that the base plate 96 is height-adjusted and installed on the top of the bottom plate 94, the base plate 96 is adjusted, the other side is the bottom An operation link 97 coupled to a hinge 98 at the top of the plate 94, and the operation described above. If by the network (97) receiving plate 96 is located at a predetermined height, it is composed of a fastener (99) securing the said actuating link (97).

Referring to the operating state of the present invention configured as described above are as follows.

In order to proceed with the process by supplying the material 100 supplied in a unit unit in a strip unit to the boat 80 that can be seated while maintaining the pitch (p) of the same interval It is to proceed with the marking process by seating the material (100).

The boat 80 on which the material 100 is seated is stacked in the magazine MG to supply the boat 80 sequentially, and the magazine MG in which the boat 80 is stacked is a material supply part. When seated on the upper base plate 11 of (A), the first belt 11a installed on both sides of the upper base plate 11 is driven so that one magazine located at the uppermost end is transferred to the loading elevator 13. . At this time, the sensor 15 'senses the magazine MG transferred to the loading elevator 13 and raises the stopper 15 so that the magazine MG located at the rear end thereof is stopped by the stopper 15 and is waiting. I'm doing it.

The magazine MG transferred to the loading elevator 13 is the loading push rod 16 which is moved while the loading elevator 13 is moved up and down by the step motor SM and the ball screw BS. The rear end of one boat 80 is pushed to supply the boat transfer part (B) sequentially.

When the boat 80 is all supplied from the magazine MG, the empty magazine MG is driven to the lower base plate 12 by driving the third belt 13a of the loading elevator 13. The conveyed magazine MG is conveyed to the unloading elevator 14 by driving the second belt 12a of the lower base plate 12. The magazine MG transferred to the unloading elevator 14 is transferred to the upper base plate 11 by the driving of the fourth belt 14a of the unloading elevator 14 and is waiting. If all the boats 80 stacked on the magazine MG are discharged and only the empty magazine MG is seated on the upper base plate 11, the boat 80 is replaced with the stacked magazine MG. .

The boat 80 to be supplied in this way is that the boat 80 is transported by a pitch (p) by the boat transfer unit (B), the body 81 of the boat 80 is the shape of the front end and the rear end respectively different As it is formed, that is, the chamfer (81a) in the leading edge of the body 81 is to detect the traveling direction of the boat 80 is supplied by the sensor 25 can be confirmed this.

As described above, both sides of the boat 80 supplied and transported to the boat transporting unit B are guided to the guide rails 21 and transported by the transport belt 22. At this time, the boat 80 conveyed by the conveying belt 22 is conveyed by one pitch p by the stopper 24. Thus, the boat 80 conveyed by one pitch p is conveyed. The stopper 24 is conveyed one pitch p earlier than the boat 80 conveyed by the belt 22, and the boat 80 conveyed is stopped by one pitch p.

Adsorption transfer unit for adsorbing and transporting the material 100 in this order by sequentially transporting the material 100 in the boat 80, which is transported by one pitch (p) by the boat transfer unit (B). C) is lowered by the cylinder 32 so that the adsorption rubber 31 is positioned to the upper surface of the material 100, and when the upper surface of the material 100 is adsorbed, the adsorption rubber 31 is again returned by the cylinder 32. In this state, the adsorption rubber 31 adsorbing the cylinder 32 and the material 100 is transferred to the mounting die 33 by the step motor SM and the ball screw BS. The material 100 adsorbed to the mounting die 33 is seated.

When the material 100 is seated on the seating die 33 as described above, the material 100 is rotated by 180 ° by the first rotational transfer part D to be seated in the seating groove 42 of the rotary table 40. By seating, in order to transport the material 100 by 180 ° rotation, if the upper surface of the material 100 is adsorbed by the adsorption rubber 31 of the first rotary feed unit (D), the rotary arm 34 is While rotating by 180 ° by the step motor SM, the back surface of the material 100 is seated in the seating groove 42 of the rotary table 40 so as to face upward.

When the material 100 is seated in the seating groove 42 of the rotary table 40 as described above, the rotary table 40 is divided and rotated to mark the material 100 seated in the seating groove 42. The marking is placed on the bottom of the), and after marking the back of the material 100, the rotary table 40 is divided and rotated again to inspect the marking state in the inspection unit G. The inspection unit G performs inspection by the vision system.

In this way, the error of the rotary table 40 which is divided and rotated to mark and inspect the back surface of the material 100 is corrected by the error step device 45, and the holder 46 rising by the cylinder 47. Is inserted into the groove 64a formed in the plate 41 to correct the error. At this time, since the taper corresponding to each other is formed in the holder 46 and the groove 64a, the error can be corrected accurately.

In addition, the marking pad 51 of the marking portion F is cleaned with the cleaning tape 52. The cleaning tape 52 is wound around the bobbin 53 provided on both sides, and the bobbin 53 is By rotating by the motor 54, the cleaning tape 52 wound around the bobbin 53 is wound around the other bobbin 53, and the marking pad 51 is cleaned. The cleaning tape 52 is wound by one bobbin 53 and wound by the other bobbin 53, so that the cleaning tape 52 can be recycled and the tension of the cleaning tape 52 can be adjusted.

When the ink 61, the marking pad 51 or the cleaning tape 52, etc. are replaced with the marking part F, the light 61 of the inspection part G can be rotated so that the operation is easy. In order to rotate the light 61 as described above, the first connecting bar 64 to which the light 61 is connected is rotated at the second connecting bar 65 with the central axis 66 as a point. It is fixed by the groove (64a) formed in the first connecting bar 64 rotated in this way and the ball (65a) installed in the second connecting bar (65).

As described above, the rotary table 40 is divided and rotated to mark the marking unit F, and the material 100 inspected by the audit unit G to check the marking state is transferred to the boat by the second rotary transfer unit E. Since the operation of the second rotary feeder is the same as the operation of the first rotary feeder D, the description thereof will be omitted.

As such, when the material 100 that is marked and inspected by the second rotational transfer part E is seated on the boat 80, the material in which the marking failure occurs among the material 100 seated on the boat 80 is completed. 100, the adsorption rubber 31 of the defective material discharging unit I is adsorbed on the upper surface and seated on the empty boat 80 seated on the boat seating block 37, the above-mentioned marking material 100 is seated. It is to let. At this time, in order to adsorb the material 100 having poor marking with the adsorption rubber 31 or to seat the empty boat 80, it is operated up and down by the vertical cylinder 35, and the adsorption with the adsorption rubber 31 described above. Transferring a material 100 from side to side is operated by the horizontal cylinder 36. In addition, the empty boat 80 for seating the material 100 of marking failure is seated on the boat seating block 37 so that the boat seating block 37 is transported by the ball screw BS and the step motor SM. will be.

As described above, the boat 80 in which the material 100 of the marking failure is discharged and only the material 100 correctly marked is seated is transferred to the drying unit H to cure the drying unit H. The boat 80 is transported by the transport chain 26 for transporting the boat 80, and is cured by the UV lamp 27 located under the boat 80 being transported.

When the cure is completed in this way to discharge to the material discharge unit (J), the material discharge unit (J) is the same as the operation of the material supply unit (A), but the magazine (MG) seated on the loading elevator (13) By using an empty magazine, the rear end of the boat 80 is pushed by the unloading push rod 70 to stack the boat 80 on the empty magazine MG.

As such, when the boat 80 passes through the lower portion of the push bar 71 and is positioned at the front end of the boat 80 to push the rear end of the boat 80 to the unloading push rod 70, the push bar 71 Sliding by the connecting bar 72 while pushing the rear end of the boat 80 is laminated to the empty magazine (MG). As such, the push bar 71 stacked on the empty magazine MG by pushing the rear end of the boat 80 slides back to its original position. At this time, the lower end of the push bar 71 is caught by the fixed shaft 75 and the lower end thereof. The boat 80 to be transported by maintaining the rotated state to the upper side may be transferred to the lower portion of the push bar 71 and positioned at the tip of the push bar 71.

Marking device that proceeds in the above operation requires the maintenance of the material 100, or replacing the ink in the marking portion (F) during operation, such that the operator at a high position to facilitate maintenance A support die 91 which is slid to the bottom of the marking device can be installed to be able to. The support die 91 is usually slid to the bottom of the marking device, and the support die 91 is slid to the front of the marking device when maintenance is required.

In order to use the support die 91 as described above, the wheels 92 installed on the bottom surface of the bottom plate 94 are slid to the front of the marking apparatus. In this case, both sides of the bottom plate 94 are guide rails 93. If the guide plate is completely sliding toward the front of the marking apparatus, the bottom plate 94 is no longer pulled out by the locking jaw 95. As such, when the bottom plate 94 is slid to the front of the marking device, the support plate 96 coupled to the operation link 97 by the hinge 98 is raised to maintain a predetermined height. ) Is lifted to the upper side, the operation link 97 is no longer rotated by the fastener 99, and the support plate 96 is fixed and supported.

As can be seen from the above description, according to the marking apparatus for manufacturing a semiconductor package of the present invention, after molding and molding a material supplied in units of units, the material is supplied, transported, and marked during the marking process of printing letters and symbols on the surface thereof. By automating a series of tasks such as inspection, inspection and discharging, it is possible to prevent marking defects and improve productivity and quality.

Claims (26)

A material supply unit for supplying the boats sequentially by seating a plurality of mold-formed materials on a boat, and a boat transport unit for transporting the boats supplied by the material supply unit by one pitch. And 180 ° of the above-mentioned material to mark the back surface of the material conveyed by the adsorption conveying unit, and the adsorption conveying unit which sequentially adsorbs the upper surface of the material conveyed one pitch by the boat conveying unit. A first rotational transfer part that is rotated and seated on a rotary table that is divided and rotated, a marking part that is marked on the back surface of the material conveyed by the first rotational transfer part and seated on the rotary table, and marked at the marking part Inspection unit for inspecting the state of the state, and the material that is inspected by the above-mentioned inspection unit to rotate the 180 ° to seat the boat transported from the boat transfer unit When the second rotation transfer unit and the material marked by the second rotation transfer unit are seated on the boat, the defective material discharging unit for absorbing and discharging the defective marking material from the seated material and the finished material are seated. Marking for manufacturing a semiconductor package, characterized in that it consists of a drying unit for quenching the marking part of the material by transporting the boat, and a material discharging part for discharging the finished material by transferring the boat passing through the drying part. Device. The upper base plate according to claim 1, wherein the material supplying part and the material discharging part are mounted with a magazine capable of stacking a boat on which a plurality of materials are seated, and an upper base plate provided with a first belt in a longitudinal direction on both sides thereof, and the upper base. Located at the lower part of the plate, and on both sides, the lower base plate provided with the second belt in the longitudinal direction, and the upper and lower base plates respectively located at the front and rear ends of the upper and lower base plates, and move up and down between the upper and lower base plates. Respectively, a third belt and a fourth belt, wherein the third belt and the fourth belt are positioned inside the first and second belts and extend to the front and rear ends of the first and second belts, respectively. Marking device for manufacturing a semiconductor package comprising an unloading elevator. The marking device for manufacturing a semiconductor package according to claim 2, wherein a stopper is provided at the tip of the upper base plate. The marking device for manufacturing a semiconductor package according to claim 1 or 2, wherein the material supply unit is provided with a loading push rod sliding in a rear end of the loading elevator. The method according to claim 1, Said boat transfer part comprises two guide rails for guiding the lateral side of the boat to be supplied, a conveyance belt which is installed inside the guide rail, respectively, and driven by a step motor to transfer the boat, and the transfer described above. When the boat transported by the belt is transported by one pitch, it is installed on the ball screw driven by the step motor to stop it, characterized in that consisting of a stopper that is transported by one pitch before the boat transported by the transport belt Marking device for semiconductor package manufacturing. The marking apparatus for manufacturing a semiconductor package according to claim 5, wherein a sensor is installed at the tip of the boat abnormality part to detect a traveling direction of the boat supplied by the sensor. The marking apparatus for manufacturing a semiconductor package according to claim 5, wherein the conveying belts respectively installed inside the guide rails are driven at the same time by being coupled to a spline shaft. The marking device according to claim 5, wherein the two guide rails are provided with ball screws to adjust their widths, and handles are formed at ends of the ball screws. The method according to claim 1, wherein the drying unit is provided with a transfer chain is installed by each of the transport chain so that the lower surface of both sides of the boat to be transported so that the boat on which the marking material is seated is driven by a step motor, the boat Marking device for manufacturing a semiconductor package, characterized in that the UV lamp is installed on the lower portion to be transferred. The method of claim 1, wherein the adsorption conveying unit is a suction rubber that sucks the upper surface of the material seated on the boat by the back, a cylinder for operating the suction rubber up and down, the cylinder and the suction rubber from side to side A marking device for manufacturing a semiconductor package, comprising a ball screw and a step motor for moving, and a seating die for seating the material adsorbed with the adsorption rubber. The marking apparatus for manufacturing a semiconductor package according to claim 10, wherein two adsorption rubbers and cylinders are installed at regular intervals. The said 1st, 2nd rotation conveyance part is an adsorption rubber which adsorb | sucks the upper surface of a material by backing, the rotation arm which rotates and conveys the said adsorption | suction rubber 180 degrees, and said rotation arm rotates 180 degrees. Marking device for manufacturing a semiconductor package, characterized in that consisting of a step motor. The method of claim 1, wherein the rotary table is a plate formed in the position where the seating groove in which the material can be seated is divided into four quarters in the circumferential direction, the step motor for rotating and rotating the plate, and the rotation of the step motor Marking device for manufacturing a semiconductor package, characterized in that consisting of a gear box for transmitting to the plate, and an error correction device for correcting the error during the divided rotation of the plate. The semiconductor package according to claim 13, wherein the error dividing apparatus forms holes in the circumferentially divided positions on the bottom surface of the plate, and a holder is installed in the lower portion of the hole to operate up and down by a cylinder. Marking equipment for manufacturing. 15. The method of claim 14, wherein the hole is formed of a taper that narrows in diameter from the bottom of the plate, the holder is inserted into the hole for the semiconductor package manufacturing, characterized in that the taper corresponding to the taper formed in the hole is formed Marking device. The said marking part is a marking pad which performs marking on the back surface of a material, the cleaning tape which cleans said marking pad, the bobbin by which the said cleaning tape was wound on both sides, and each said bobbin, Marking device for manufacturing a semiconductor package, characterized in that consisting of a motor for rotating the. 17. The marking apparatus according to claim 1 or 16, wherein the marking part is installed to be located at one position of the seating groove formed at a position circumferentially divided in the circumferential direction of the rotary table. The method according to claim 1, wherein the inspection unit is a light screw installed on the upper portion where the material marked by the rotary table is rotated dividedly, the camera installed on the upper portion of the light, the ball screw so that the light and the camera is moved vertically Installed support, the first and second connecting bar for connecting the light to the support, the central axis for coupling the first and second connecting bar to rotate the light, and the light is rotated from the center axis Marking device for manufacturing a semiconductor package, characterized in that consisting of a fixing means for fixing it. The method according to claim 18, wherein the fixing means is provided with a plurality of hemispherical grooves in the first connection bar, the second connection bar is provided with a ball elastically by a spring at a position corresponding to the groove, said ball Marking device for manufacturing a semiconductor package, characterized in that the first connection bar and the second connection bar is fixed after being coupled to the groove. 20. The marking apparatus of claim 19, wherein the groove and the ball are located on a circle drawn around a central axis that couples the first and second connection bars. The marking apparatus according to claim 1 or 18, wherein the inspection unit is installed at a position where the rotary table is divided and rotated after the rotary table is divided and rotated to mark the marking unit. The method according to claim 1, wherein the bad material discharge unit is a suction rubber to suck the upper surface of the material in which the marking failure occurs in the boat on which the marking material is seated, and a vertical cylinder for operating the suction rubber up and down A horizontal cylinder for moving the vertical cylinder and the adsorption rubber from side to side, a boat for seating poor marking material adsorbed with the adsorption rubber, a boat seating block on which the boat is seated, and the boat seating Marking device for manufacturing a semiconductor package comprising a ball screw and a step motor for sliding the block to the left and right. The method of claim 1, wherein the material discharging unit is a transfer chain for transporting the boat on which the material is seated, a push bar for sequentially stacking on the magazine by pushing the rear end of the boat transported by the transfer chain, and the transfer chain A fixed shaft which pivots the lower end of the push bar upward so as not to be caught by the lower end of the push bar when the boat is transported to the lower part of the push bar, and the lower end of the push bar pivots upward Marking device for manufacturing a semiconductor package, characterized in that the upper part of the push bar is coupled to the coupling bar, and a linear motor to operate the connecting bar to the left and right to push the rear end of the boat with the push bar. The method of claim 1, wherein the boat is formed with a plurality of seating holes to maintain the same pitch on a straight line of the body, the seating hole in each of the corners of the seating hole so as to seat the material, respectively Marking device for manufacturing a semiconductor package, characterized in that forming a protruding jaw in each corner portion of the seating hole to prevent the material seated by the locking step of the seating hole is separated . The marking apparatus for manufacturing a semiconductor package according to claim 24, wherein the edge of the body of the boat is chamfered so as to be distinguished from the edge of the rear end. The bottom plate of claim 1, wherein a wheel is installed on the bottom surface and slides to the bottom surface of the marking apparatus, a guide rail which guides the bottom plate when the bottom plate slides to the bottom surface of the marking apparatus, and the bottom plate is guided to the guide rail. The locking jaw formed at the rear end of the bottom plate to prevent any further sliding when sliding to the outside of the marking device, a support plate installed on the top of the bottom plate and height-adjusted, and a bottom surface of the support plate to adjust the height of the support plate. One side is hinged to the other side, and the other side hinged to the upper link of the bottom plate, and when the support plate is positioned at a certain height by the operation link, further comprising a support die made of a fixture for fixing the operation link Marking device for manufacturing a semiconductor package, characterized in that configured.