KR102599407B1 - Scrubber apparatus for reducing energy with high efficiency and operating method thereof - Google Patents

Abstract

The high-efficiency energy-saving scrubber device includes a chamber, an inlet, a heat dissipation section, a plasma generation section, a heat absorption section, a cooling section, and a removal section.
The heat dissipation unit is installed around the inlet, and can increase the temperature of the harmful gas passing through the inlet from the first temperature to the second temperature using the liquefaction heat of the working fluid and transfer it to the chamber. The heat absorption unit is installed on the lower side of the chamber, and the working fluid can be vaporized using the heat of the thermally decomposed gas in the chamber to generate vaporization heat.

Description

High-efficiency energy-reducing scrubber device and its operating method {SCRUBBER APPARATUS FOR REDUCING ENERGY WITH HIGH EFFICIENCY AND OPERATING METHOD THEREOF}

The embodiment relates to a high-efficiency energy-saving scrubber device and a method of operating the same. Specifically, the embodiment is a high-efficiency energy-saving scrubber device using a phase change heat transfer system.

Harmful gases emitted from chemical processes, semiconductor or display manufacturing processes, etc. are not only harmful to the human body because they are highly fluid, explosive, and corrosive, but also cause environmental pollution when released into the atmosphere.

Therefore, these harmful gases necessarily require a purification process to reduce the content of harmful components to below the allowable concentration. It is legally mandatory that only harmless gases from which toxic substances have been removed through this purification process are discharged into the atmosphere.

Scrubber devices that treat these harmful gases include burning combustions and wet scrubbing. The burning combustion method mainly deals with harmful gases by decomposing, reacting, or burning flammable gases containing carbon or hydrogen groups in a chamber. The wet scrubbing method mainly treats harmful gases by dissolving water-soluble gases in water while passing them through water stored in a water tank.

On the other hand, the burning combustion method generates plasma and uses this plasma to decompose the gas. In order to generate plasma, tens of kW of power must be continuously supplied for a long period of time, that is, while a semiconductor or display manufacturing line is in operation, which poses a problem of requiring significant power consumption.

Additionally, one of the combustion methods for treating harmful gases is a plasma combustion method that generates plasma. In the plasma combustion method, gas can be decomposed using plasma. However, in order to generate plasma, tens of kW of energy must be continuously supplied for a long time while the semiconductor or display manufacturing line is in operation, so there is a problem that a significant amount of energy is used.

In addition, in semiconductor or display manufacturing facilities, harmful gas purification facilities are installed in many locations, and since the power used by these hazardous gas purification facilities is considerable, there is an urgent need for measures to further reduce power consumption.

In addition, in order for the harmful gas to be decomposed by plasma in the burning combustion method, the temperature of the harmful gas must be raised to, for example, at least 1000°C or higher. Normally, harmful gases at room temperature are supplied to the chamber, so the decomposition process does not proceed until the harmful gases rise from room temperature to 1000°C or higher in the chamber, so there is a problem that the harmful gas purification processing time is delayed. Therefore, there is a strong need for a method to shorten the harmful gas purification treatment time.

Normally, harmful gases at room temperature are composed of various types of toxic chemical substances, and each substance must be raised to a certain temperature at which decomposition is possible for the proper decomposition process to proceed. Therefore, the physical time required for the temperature to rise is required, and the harmful gas purification treatment time is required. There is a delay problem. Therefore, there is a strong demand for a method to reduce power consumption while shortening the harmful gas purification treatment time.

The embodiments aim to solve the above-described problems and other problems.

Another object of the embodiment is to provide a high-efficiency energy-saving scrubber device and a method of operating the same that can significantly reduce power consumption.

Another purpose of the embodiment is to provide a high-efficiency energy-saving scrubber device and a method of operating the same that can shorten the harmful gas purification processing time.

The technical problems of the embodiments are not limited to those described in this item and include those that can be understood through the description of the invention.

According to a first aspect of the embodiment to achieve the above or other objects, a high-efficiency energy-saving scrubber device includes a chamber; an inlet installed on the upper side of the chamber and introducing a harmful gas having a first temperature; a heat dissipation unit installed around the inlet and increasing the temperature of the harmful gas passing through the inlet from the first temperature to a second temperature using the liquefaction heat of the working fluid and transferring it to the chamber; a plasma generator installed on the upper side of the chamber, generating plasma in the chamber to increase the temperature of the harmful gas from the second temperature to the third temperature and thermally decompose the harmful gas; a heat absorption unit installed on the lower side of the chamber and vaporizing the working fluid using the heat of the thermal decomposition gas having the third temperature to generate vaporization heat from the working fluid; a cooling unit installed below the heat absorption unit and rapidly cooling the temperature of the pyrolysis gas that decreases while passing through the heat absorption unit from a fourth temperature to a fifth temperature; and a removal unit that removes the rapidly cooled thermal decomposition gas.

The heat dissipating unit includes a first tube wound around the inlet part, and the vaporized working fluid delivered from the heat absorbing part passes through the wound first tube and transfers heat to the harmful gas passing through the inlet part. It can be liquefied.

The heat absorbing unit includes a second tube wound along a lower circumference of the chamber, and the liquefied working fluid delivered from the heat dissipating unit undergoes thermal decomposition passing through the wound second tube and passing from the chamber to the cooling unit. It can be vaporized by receiving heat from the gas.

It includes a working oil flow path 190 installed between the heat dissipating part and the heat absorbing part, and the working fluid can be circulated by the heat dissipating part, the working oil flow path, and the heat absorbing part.

The cooling unit may be provided with a passage through which the thermally decomposed gas passes, and coolant may be sprayed onto the thermally decomposed gas passing through the passage to rapidly cool the thermally decomposed gas.

According to a second aspect of the embodiment to achieve the above or other objects, a method of operating a high-efficiency energy-saving scrubber device includes the steps of introducing a harmful gas having a first temperature through an inlet; Raising the temperature of the harmful gas passing through the inflow part from the first temperature to the second temperature by using the liquefaction heat of the working fluid by a heat dissipation unit and transferring it to the chamber; generating plasma in the chamber by a plasma generator to increase the temperature of the harmful gas from the second temperature to the third temperature and thermally decompose the harmful gas; vaporizing the working fluid using heat of the pyrolysis gas having the third temperature by a heat absorbing unit, so that the working fluid generates heat of vaporization; Rapidly cooling the temperature of the thermal decomposition gas, which has decreased while passing through the heat absorption unit, from a fourth temperature to a fifth temperature by a cooling unit; and removing the rapidly cooled thermal decomposition gas by a removal unit.

The embodiment can reduce power consumption in purifying and treating harmful gases.

As shown in FIG. 1, harmful gases in the chamber 130 may be thermally decomposed by plasma at a high temperature, for example, at least 1000° C. or higher. Accordingly, the harmful gas supplied from the chamber 130 to the chamber 130 through the inlet 110 requires time to rise to the target temperature of 1000°C or more, that is, the third temperature (T3 in FIG. 6). In order to shorten this rise time, the power of the plasma generator 120 must be increased, so there is a problem of increased power consumption, and there is a limit to increasing the power due to the rated characteristics of the plasma generator 120.

According to the embodiment, a phase change heat transfer system may be configured by the heat dissipating part 170, the heat absorbing part 180, and the hydraulic fluid flow path 190 installed between the heat dissipating part 170 and the heat absorbing part 180.

For example, the heat radiating part 170 may be installed along the perimeter of the inlet 110, and the heat absorbing part 180 may be installed along the lower circumference of the chamber 130. In this case, the heat absorption unit 180 can phase convert the working fluid from a liquid phase to a gas phase using the heat of thermal decomposition gas or by-products thermally decomposed from harmful gases by plasma in the chamber 130. The working fluid vaporized in the heat absorption unit 180 may be transferred to the heat dissipation unit 170. The heat generated as the vaporized working fluid is liquefied in the heat dissipation unit 170, that is, the liquefaction heat, is transferred to the harmful gas passing through the inlet 110, so that the temperature of the harmful gas decreases from the first temperature (T1 in FIG. 6). It is raised to the second temperature T2, and harmful gas having the second temperature T2 may be supplied to the chamber 130. The second temperature T2 may be at least 200°C higher than the first temperature T1.

Therefore, since the temperature of the harmful gas in the chamber 130 increases from the second temperature (T2) to the third temperature (T3) instead of increasing from the first temperature (T1) to the third temperature (T3), the temperature increase range is increased. Because it is shortened, there is no need to increase power, so power consumption can be reduced.

The embodiment can shorten the harmful gas purification processing time.

Before being supplied to the chamber 130, the temperature of the harmful gas is raised to a temperature close to the temperature for thermal decomposition in the chamber 130, that is, the third temperature T3, that is, the second temperature T2, so that the chamber 130 ), the time taken to increase from the second temperature (T2) to the third temperature (T3) can be shortened, and due to this time reduction, the overall harmful gas purification of the high-efficiency energy-saving scrubber device 100 according to the embodiment Processing time can be shortened.

In particular, the embodiment does not require a separate additional heat source to increase the temperature of the harmful gas passing through the inlet 110. That is, by using a phase change heat transfer system, the working fluid is circulated between the heat dissipation part 170 and the heat absorber 180, and the vaporization of the working fluid continuously transferred from the heat absorber 180 to the heat dissipation part 170 is maintained. The temperature of the harmful gas passing through the inlet 110 can be increased using heat. Therefore, there is no need for an additional heat source, so there is no additional cost and the structure is compact.

Additional scope of applicability of the embodiments will become apparent from the detailed description that follows. However, since various changes and modifications within the spirit and scope of the embodiments may be clearly understood by those skilled in the art, the detailed description and specific embodiments, such as preferred embodiments, should be understood as being given by way of example only.

1 shows a high-efficiency, energy-saving scrubber device according to an embodiment.
2 shows an embodiment phase change heat transfer system.
Figure 3 shows a heat dissipation portion of an embodiment.
Figure 4 shows the heat absorption portion of the embodiment.
Figure 5 is a cross-sectional view showing the cooling unit of the embodiment.
Figure 6 shows the temperature change of gas or thermal decomposition gas.
Figure 7 is a flowchart explaining the operation method of a high-efficiency energy-saving scrubber device according to an embodiment.

Hereinafter, embodiments disclosed in the present specification will be described in detail with reference to the attached drawings. However, identical or similar components will be assigned the same reference numbers regardless of reference numerals, and duplicate descriptions thereof will be omitted. The suffixes 'module' and 'part' for components used in the following description are given or used interchangeably in consideration of ease of specification preparation, and do not have distinct meanings or roles in themselves. Additionally, the attached drawings are intended to facilitate easy understanding of the embodiments disclosed in this specification, and the technical idea disclosed in this specification is not limited by the attached drawings. Additionally, when an element such as a layer, region or substrate is referred to as being 'on' another component, this includes either directly on the other element or there may be other intermediate elements in between. do.

In general, the better the harmful gas is decomposed in the chamber, the easier it is to remove the decomposed gas. DRE (Destruction Removal Efficiency) is used to measure the degree to which harmful gases are decomposed in the chamber. For example, at least 95% of the DRE required in the semiconductor manufacturing process is required.

Typically, as the temperature of the harmful gas increases, the DRE increases, and in order to increase the DRE, the RF power must be increased. However, there is a limit to increasing RF power, and there is also a problem of increased power consumption when using high RF power.

For example, tens of kW of RF power is required to raise the temperature of a harmful gas of about 30°C to at least 1000°C or higher, resulting in significant power consumption. In order to solve this problem, the embodiment increases the temperature of the harmful gas or plasma supply gas at the inlet before the harmful gas such as carbon tetrafluoride (CF4) or the plasma supply gas flows into the chamber through the inlet, thereby increasing the temperature of the harmful gas or plasma supply gas. The difference between the specified temperature and the target temperature of the chamber can be reduced.

Therefore, the time it takes to raise the temperature of the harmful gas or plasma supply gas in the chamber to the target temperature can be shortened. In addition, by reducing the difference between the elevated temperature and the target temperature of the chamber, the technical effect is that the temperature of the harmful gas or plasma supply gas can be raised to the target temperature more quickly and power consumption can be reduced even if lower RF power is supplied. There is.

Meanwhile, the temperature of the gas delivered into the chamber and decomposed by plasma, that is, the thermal decomposition gas, is also quite high, and this thermal decomposition gas can be removed through a cooling process. At this time, the heat resulting from the high temperature of the thermal decomposition gas is discarded as is.

In the embodiment, a separate heat source is not used to increase the temperature of the harmful gas or plasma supply gas at the inlet, and a phase transformation heat transfer system based on the heat of the thermal decomposition gas generated in the chamber is used instead of discarding the heat. , it can have the unique advantage of a compact structure without increasing additional costs.

Hereinafter, a high-efficiency energy-saving scrubber device according to an embodiment will be described in detail with reference to the related drawings. The “high-efficiency energy-reduction type scrubber device using a phase change heat transfer system” according to the embodiment will hereinafter be briefly referred to as “high-efficiency energy-reduction type scrubber device.”

1 shows a high-efficiency energy-saving scrubber device according to an embodiment. In the following description, temperature is explained with reference to FIG. 6.

Referring to FIG. 1, a high-efficiency energy-saving scrubber device 100 according to an embodiment includes a chamber 130, an inlet 110, a plasma generator 120, a cooling unit 140, and a removal unit 160, It may include a heat dissipation unit 170 and a heat absorption unit 180. More components may be included.

Chamber 130 may be called a plasma chamber, combustion tank, combustion chamber, etc. The plasma generator 120 may be called a plasma torch, an arc generator, or an arc discharge portion. The removal unit 160 may be referred to as a tower. The removal unit 160 of the embodiment removes foreign substances, that is, harmful gases, thermal decomposition gases, by-products, etc., using cooling water, so it may be called a wet tower, but this is not limited.

Chamber 130 may be a space where plasma is generated. The chamber 130 may perform a thermal decomposition process using plasma. That is, harmful gases may react with radicals in the plasma and be thermally decomposed. To generate plasma, a plasma supply gas may flow into the chamber 130 through the inlet 110. The plasma supply gas may be an inert gas such as argon (Ar) and/or nitrogen (N ₂ ). Harmful gases include, for example, carbon dioxide (CO ₂ ), carbon tetrafluoride (CF ₄ ), hydrocarbons (CH ₄ ), monosilane (SiH ₄ ), hydrogen fluoride (HF), hydrogen sulfide (H ₂ S), carbon tetrachloride (CCl ₄ ), etc. However, this is not limited to this.

Various types of harmful gases may flow into the chamber 130. The target temperature in the chamber can be set considering various harmful gases. For example, a temperature that can thermally decompose a harmful gas that is most difficult to thermally decompose among various harmful gases may be set as the target temperature, but this is not limited.

The target temperature of the chamber 130 may be, for example, at least 1000°C or higher. In order to maintain the target temperature within the chamber 130, an insulating material (not shown) may be installed along the circumference of the chamber 130. The insulation material minimizes heat loss within the chamber 130, so the chamber 130 can be maintained at the target temperature. Since the chamber 130 is maintained at the target temperature, the harmful gases introduced into the chamber 130 are raised to the target temperature, and various types of harmful gases can be thermally decomposed at or near the raised target temperature. .

The inlet 110 may be installed on the upper side of the chamber 130. For example, the inlet 110 may include a plurality of inlet pipes 111. A plurality of inlet pipes 111 may be installed along the circumference of the plasma generator 120, but this is not limited. For example, a plurality of inlet pipes 111 may be installed at the upper edge of the chamber 130.

Each of the plurality of inlet pipes 111 may be a passage through which different types of harmful gases and plasma supply gases flow. For example, plasma supply gas may flow in through the first inlet pipe, carbon tetrafluoride (CF4) may flow in through the second inlet pipe, and carbon dioxide (CO2) may flow in through the third inlet pipe. Accordingly, plasma supply gas or different types of harmful gases may flow in through the plurality of inlet pipes 111.

Although a plurality of inlet pipes 111 are shown in the drawing, a single inlet pipe 111 with a plurality of passages may be provided. Different types of harmful gases or plasma supply gases may flow through a plurality of passages of the single inlet pipe 111.

The plasma generator 120 may be installed on the upper side of the chamber 130. The plasma generator 120 may generate plasma in the chamber 130. That is, the plasma generator 120 may be an RF power source. Predetermined RF power may be supplied to the chamber 130 by the plasma generator 120 to generate plasma in the chamber 130.

To generate plasma, the chamber 130 may be vacuum formed at a predetermined pressure. As described above, plasma supply gas may be supplied to the chamber 130 through the inlet 110. Plasma may be formed in the chamber 130 by ionizing the plasma supply gas by the power supplied from the plasma generator 120 to the plasma advanced gas in the chamber 130.

Meanwhile, harmful gas may be supplied to the chamber 130 through the inlet 110. The temperature of the harmful gas supplied to the chamber 130 may be increased by plasma. For example, the temperature of the harmful gas may be increased from the first temperature T1 to the third temperature T3 by plasma. For example, the first temperature T1 may be room temperature, and the third temperature T3 may be at least 1000°C. For example, the third temperature T3 may be a target temperature and may be a temperature at which harmful gases are thermally decomposed by plasma.

Accordingly, the harmful gas supplied to the chamber 130 may not be thermally decomposed immediately and may be thermally decomposed after rising from the first temperature T1 to the third temperature T3. In order to more quickly increase the temperature of the harmful gas, the power of the plasma generator 120 must be further increased, but there is a limit to further increasing the power, and there is a problem that power consumption increases when the power is further increased.

To solve this problem, the embodiment may raise the harmful gas to an appropriate temperature, for example, the second temperature T2, before being supplied to the chamber 130. The second temperature T2 may be closer to the third temperature T3 of the chamber 130. In this way, by supplying the harmful gas to the chamber 130 in a state in which the temperature of the harmful gas is raised to the second temperature (T2), the temperature of the harmful gas in the chamber 130 changes from the second temperature (T2) to the third temperature (T3). It can be raised more quickly, which not only reduces power consumption by lowering the power, but also allows rapid thermal decomposition of harmful gases, which has the unique advantage of dramatically shortening the time for purifying harmful gases.

When the temperature of the harmful gas supplied to the chamber 130 reaches the target temperature of the chamber 130, that is, the third temperature T3, thermal decomposition may occur and thermal decomposition gas or by-products may be generated.

For example, when there is no oxygen in the chamber 130, SiH ₄ may be thermally decomposed into Si and H 2 . For example, when oxygen is present in the chamber 130, SiH ₄ may be oxidized into SiO ₂ and H ₂ O, and N ₂ may be oxidized into 2NO.

The third temperature (T3) of the thermal decomposition gas may be at least 1000°C or higher. Due to this very high temperature, it is not easy to cool the thermal decomposition gas or by-products in the removal unit 160, and even if the thermal decomposition gas or by-products are cooled in the removal unit 160, more cooling water is required, which requires water resources. It can lead to waste. In addition, when pyrolysis gas with a very high temperature is cooled in a post-treatment process, that is, a process to remove pyrolysis gas or by-products, another harmful gas is generated due to the high temperature of the pyrolysis gas or by-products through contact with the cooling water. It can occur in large quantities. A large amount of harmful gas generated in this way may be discharged to the outside without being removed in the post-treatment process. Therefore, it is very important to rapidly cool the high-temperature thermal decomposition gas or by-products before the post-treatment process.

The cooling unit 140 of the embodiment can rapidly cool high-temperature thermal decomposition gas or by-products.

The cooling unit 140 may be installed on the lower side of the chamber 130. The cooling unit 140 can rapidly cool the thermal decomposition gas or by-products moving downward in the chamber 130 to lower them from the third temperature T3 to the fifth temperature T5. For example, the fifth temperature T5 may be room temperature or a temperature greater than this, for example, 20°C to 50°C.

As will be explained later, the thermal decomposition gas or by-products moved downward in the chamber 130 by the heat absorption portion 180 installed on the lower side of the chamber 130 will be lowered from the third temperature T3 to the fourth temperature T4. You can. For example, the fourth temperature T4 may be 600°C to 800°C. The heat of the thermal decomposition gas or by-product moving from the chamber 130 to the cooling unit 140 is transferred to the working fluid of the heat absorption unit 180, so that the thermal decomposition gas or by-product changes from the third temperature T3 to the fourth temperature (T3). It can be lowered to T4). Accordingly, the cooling unit 140 can rapidly cool the fourth temperature T4 of the decomposed gas or by-product passing through the heat absorption unit 180 to the fifth temperature T5.

As shown in FIG. 5, the cooling unit 140 may have a cylindrical shape. The cooling unit 140 may have a first area 140a and a second area 140b surrounding the first area 140a. The first area 140a may be a passage 145 through which thermal decomposition gas or by-products of the chamber 130 pass.

The second area 140b may include a receiving space 143 that can accommodate cooling water. The receiving space 143 may be surrounded by a body 141 provided along the perimeter of the first area 140a. That is, a receiving space 143 may be formed within the body 141.

The receiving space 143 and the passage 145 may communicate with each other through a plurality of openings 142. Here, communication may mean that the receiving space 143 and the passage 145 are spatially connected. Cooling water accommodated in the receiving space 143 may be sprayed toward the center of the passage 145.

In FIG. 5, arrow 300 may indicate the direction in which the thermal decomposition gas progresses. As indicated by the corresponding arrow 300, thermal decomposition gas or by-products can be rapidly cooled by the cooling water accommodated in the receiving space 143. That is, as the thermal decomposition gas or by-product passes from the chamber 130 along the passage 145 of the cooling unit 140, the passage 145 passes through the opening 142 in the receiving space 140 of the cooling unit 140. It can be rapidly cooled by coolant sprayed toward the center.

For example, the thermal decomposition gas or by-product passes along the passage 145 in the direction of the arrow 300, that is, from the top to the bottom of the cooling unit 140, and is continuously sprayed in the receiving space 140 of the cooling unit 140. By receiving coolant, the temperature of the thermal decomposition gas or by-product can be rapidly cooled from the fourth temperature (T4) to the fifth temperature (T5). For example, the fifth temperature T5 may be rapidly cooled to at least 550°C lower than the fourth temperature T4.

The removal unit 160 may remove thermal decomposition gas or by-products. When thermal decomposition gas or by-products pass inside the removal unit 160, coolant may be sprayed toward the thermal decomposition gas or by-products. Accordingly, the thermal decomposition gas or by-products are immersed in the lower side of the removal unit 160 by the cooling water, and the immersed thermal decomposition gas or by-products can be removed through a separate process.

Meanwhile, an outlet (not shown) is provided above the removal unit 160, and purified gas, that is, clean gas, can be discharged into the atmosphere through this outlet. For example, the removal unit 160 of the embodiment may manage NOx emissions to 50 ppm or less and powder emissions to 100 mg/cm ³ , but this is not limited.

Meanwhile, the high-efficiency energy-saving scrubber device 100 according to the embodiment may include a water tank 150 that accommodates cooling water.

The water tank 150 is connected to the cooling unit 140 so that the thermal decomposition gas or by-products passing through the cooling unit 140 come into contact with water, thereby removing water-soluble harmful gases contained in the thermal decomposition gas or by-products. there is.

Cooling water in the water tank 150 may be used in the cooling unit 140 and/or the removal unit 160. For example, the coolant sprayed from the cooling unit 140 to the thermal decomposition gas or by-product may be the coolant of the water tank 150. For example, the coolant sprayed from the removal unit 160 to the thermal decomposition gas or by-product may be the coolant of the water tank 150. In order to use the cooling water used to remove the water-soluble harmful gas as the cooling water of the cooling unit 140 or the removal unit 160, the cooling water in the water tank 150 may be filtered at least once.

The high-efficiency energy-saving scrubber device 100 according to the embodiment may include a second water tank (not shown) containing cooling water. In this case, the coolant in the water tank 150 may be used as the coolant for the cooling unit 140 and the removal unit 160, and the coolant in the second water tank may be used to remove water-soluble harmful gases.

Meanwhile, in the embodiment, as shown in FIG. 2, phase conversion heat is transferred by the heat dissipating part 170, the heat absorbing part 180, and the hydraulic fluid flow path 190 installed between the heat dissipating part 170 and the heat absorbing part 180. A system can be configured. Accordingly, the working fluid can be continuously circulated between the heat dissipation unit 170 and the heat absorption unit 180 by the phase change heat transfer system. That is, while the harmful gas is thermally decomposed by plasma in the chamber 130 and thermal decomposition gas or by-products with high temperature heat are generated, the heat of the thermal decomposition gas or by-products is used as an energy source to heat the heat absorption unit 180. ) The vaporization process and the liquefaction process of the heat dissipation unit 170 may be repeatedly performed.

For example, the working fluid of the heat absorption unit 180 may be phase converted from a liquid phase to a gas phase by the heat of thermal decomposition gas or by-products thermally decomposed by plasma in the chamber 130. The working fluid vaporized in the heat absorbing part 180 may be transferred to the heat dissipating part 170 through the working oil flow path 190. The heat generated as the working fluid changes from the gas phase to the liquid phase in the heat dissipation unit 170, that is, the liquefaction heat, is transferred to the harmful gas passing through the inlet 110, and the temperature of the harmful gas changes from the first temperature T1 to the second temperature. It can be raised to temperature (T2). The working fluid liquefied in the heat dissipation unit 170 may be transferred to the heat absorption unit 180 through the working oil passage 190.

In the embodiment, the temperature of the harmful gas passing through the inlet 110 is set to the target temperature of the chamber 130, that is, the third temperature, using the heat of thermal decomposition gas or by-products generated by plasma as an energy source and the working fluid as a medium. By raising the temperature close to (T3), that is, to the second temperature (T2), the temperature of the harmful gas in the chamber 130 changes from the second temperature (T2) to the third temperature (T3) instead of the first temperature (T1). Since the increase is sufficient, power consumption can be reduced by lowering the power of the plasma generator 120. In addition, if the power of the plasma generator 120 is further increased within the available range, the temperature of the harmful gas can be raised more quickly from the second temperature (T2) to the third temperature (T3), thereby shortening the harmful gas purification processing time. can do. In addition, even if the power of the plasma generator 120 is not further increased, the temperature of the harmful gas is maintained at the second temperature (T2) higher than the first temperature (T1) rather than the first temperature (T1) in the chamber (130). ), the time it takes to raise the temperature of the harmful gas in the chamber 130 to the third temperature (T3) can be reduced, and the time for purifying the harmful gas can be dramatically shortened compared to before.

In particular, the embodiment does not discard the heat of the thermal decomposition gas generated in the chamber 130, but uses a phase change heat transfer system based on the heat to allow the harmful gas to pass through the inlet 110 before being supplied to the chamber 130. By increasing the temperature of the harmful gas, there is no need to provide a separate heat source, such as a heater, so it can have the advantage of having a compact structure without increasing additional costs.

The heat dissipation part 170 may be installed around the inlet part 110. The heat dissipation unit 170 may be a member that transfers heat to the inlet 110 to increase the temperature of the harmful gas or plasma supply gas passing through the inlet 110. For example, the heat dissipation unit 170 may increase the temperature of the plasma supply gas and harmful gas passing through the inlet 110 from the first temperature T1 to the second temperature T2 using the latent heat of vaporization of the working fluid. there is. The second temperature T2 may be a target temperature of the chamber 130, that is, a temperature close to the third temperature T3. For example, the first temperature T1 may be room temperature, and the second temperature T2 may be at least 250° C., but this is not limited. For example, the second temperature T2 may be at least 200°C higher than the first temperature T1.

The working fluid is a volatile liquid, and may include, for example, a liquid such as water or ethanol, or a mixed working fluid, but is not limited thereto.

Meanwhile, the working fluid of the heat sink 170 is transferred from the heat absorber 180, and after the working fluid is vaporized in the heat absorber 180, it may be transferred to the heat sink 170 in a state containing latent heat. The heat generated as the working fluid transferred to the heat dissipation unit 170 changes from the gas phase to the liquid phase, that is, the liquefaction heat, is transferred to the harmful gas or plasma supply gas passing through the inlet 110, thereby increasing the temperature of the harmful gas or plasma supply gas. may be increased from the first temperature (T1) to the second temperature (T2).

However, as the harmful gas passes through the inlet 110 in an instant, there was an internal technical issue regarding increasing the temperature of the harmful gas.

Accordingly, the inventors of this application exposed the liquefied heat of the working fluid to the harmful gases passing through the inlet 110 for a long time in order to efficiently heat the harmful gases in the vaporized working fluid, including latent heat, thereby preventing the harmful gases passing through the inlet 110. There is a technical effect that can increase the temperature increase of the plasma supply gas.

Understanding this, the heat dissipation part 170 may include a first tube 173 wound along the circumference of the inlet part 110, as shown in FIG. 3. For example, the first tube 173 may have a spiral structure, but this is not limited.

As the first tube 173 has a spiral wound shape, the length of the first tube 173 is maximized, so that the liquefaction heat of the working fluid passing through the first tube 173 is maintained in the inlet 110 for a long time. Since it is exposed to harmful gases passing through, the temperature of the harmful gases can be raised higher.

For example, the working fluid vaporized and delivered from the heat absorbing part 180 passes through the first tube 173 of the heat dissipating part 170 wound along the circumference of the inlet part 110 and is exposed to harmful gases passing through the inlet part 110. By transferring heat, the working fluid can undergo a phase transformation from a gas phase to a liquid phase.

Accordingly, the first heat exchanger 171 may be formed by the heat dissipation unit 170 and the inlet unit 110 (or the inlet pipe 111 of the inlet unit 110, respectively).

The first tube 173 may be in contact with the internal passage of the inlet 110 along a spiral direction. That is, when the first tube 173 is installed around each of the plurality of inlet pipes 111 of the inlet 110, each of the plurality of inlet pipes 111 of the inlet 110 is a first tube ( An opening (not shown) may be formed to correspond to the helical structure of 173). By installing the first tubes 173 according to this number, the first tubes 173 may be exposed to the internal passages of each of the plurality of inlet pipes 111 of the inlet portion 110. At the opening, the first tube 173 is sealed with each of the plurality of inlet pipes 111 of the inlet 110, so that harmful gases or plasma supply gas passing through each of the plurality of inlet pipes 111 of the inlet 110 are prevented. It can be prevented from leaking to the outside through the opening. In this way, since the first tube 173 and the plurality of inflow pipes 111 of the inlet 110 are in contact with each internal passage, the working fluid passing along the first tube 173 changes from a gaseous phase to a liquid phase. The heat generated, that is, the heat of liquefaction, can be transferred directly to the harmful gas, leading to a rapid increase in the temperature of the harmful gas.

Next, referring to FIG. 4, the heat absorption unit 180 may be a member that receives heat from thermal decomposition gas or by-products generated in the chamber 130 and moved downward, thereby converting the working fluid from a liquid phase to a gas phase. there is.

The chamber 130 and the cooling unit 140 are coupled, so that the thermal decomposition gas or by-products generated in the chamber 130 are moved to the cooling unit 140, and the thermal decomposition gas or by-products are rapidly cooled by the cooling unit 140. It can be.

The heat absorption unit 180 may be installed on the lower side of the chamber 130. The heat absorption unit 180 may be installed in the boundary area between the lower side of the chamber 130 and the upper side of the cooling unit 140, but this is not limited. For example, part of the heat absorption unit 180 may be installed on the lower side of the chamber 130 and another part of the heat absorption unit 180 may be installed on the upper side of the cooling unit 140. The lower side of the chamber 130 and the upper side of the cooling unit 140 may be sealed.

Phase conversion of the working fluid into the gas phase in the heat absorption unit 180 is possible because the thermal decomposition gas or by-product has high temperature heat. For example, the temperature of the thermal decomposition gas or by-product may be at least 1000° C. as the third temperature T3. Significant heat can be released by thermal decomposition gases or by-products with temperatures above 1000°C. Therefore, the thermal decomposition gas or by-products generated in the chamber 130 and moved to the cooling unit 140 are used as a heat source, and the working fluid in the heat absorption unit 180 is converted from the liquid phase to the gas phase by the heat of the thermal decomposition gas or by-products. It can be phase transformed.

The working fluid phase-converted to the gas phase in this way can generate very high heat of vaporization, and the working fluid with the heat of vaporization can be transferred from the heat absorption unit 180 to the heat dissipation unit 170.

Meanwhile, the working fluid of the heat absorbing unit 180 is delivered from the heat dissipating part 170. The working fluid may be liquefied in the heat dissipating part 170 and then transferred to the heat absorbing part 180. The working fluid in the heat absorption unit 180 may be vaporized by the heat of thermal decomposition gas or by-products generated in the chamber 130.

Meanwhile, there were internal technical issues regarding completely converting the working fluid from liquid to gas phase by using thermal decomposition gas or by-products as a heat source.

Accordingly, the inventors of this application designed the movement path of the working fluid passing through the heat absorbing part 180 to be as long as possible in order for the working fluid to be completely vaporized.

Understanding this, the heat absorbing part 180 may include a second tube 183 wound along the lower circumference of the chamber 130, as shown in FIG. 4. For example, the second tube 183 may have a spiral structure, but this is not limited.

As the second tube 183 has a spiral wound shape, the length of the second tube 183 is maximized, so that the working fluid moves through the lower side of the chamber 130 while passing through the second tube 183 for a long period of time. Because it is exposed to passing thermal decomposition gas or by-products, the time for the heat of the thermal decomposition gas or by-product to be transferred to the working fluid passing through the second tube 183 increases, allowing the working fluid to completely change phase from liquid to gas phase.

For example, the working fluid liquefied and delivered from the heat dissipating part 170 passes through the second tube 183 of the heat absorbing part 180 wound along the circumference of the lower side of the chamber 130 and passes through the internal passage on the lower side of the chamber 130. You can pass by. Thermal decomposition gas or by-products generated in the chamber 130 may be moved to the cooling unit 140 through the lower side of the chamber 130 for cooling. When the thermal decomposition gas or by-product passes through the inner passage on the lower side of the chamber 130, the heat of the thermal decomposition gas or by-product is transferred to the working fluid passing through the second spirally wound tube 183, so that the working fluid changes from a liquid phase to a gas phase. It can be phase converted to .

Accordingly, the second heat exchanger 181 may be formed by the heat absorption unit 180 and the chamber 130.

The second tube 183 may be in contact with the inner passage on the lower side of the chamber 130 along the spiral direction. That is, when the second tube 183 is installed along the circumference of the lower side of the chamber 130, an opening (not shown) will be formed on the lower side of the chamber 130 to correspond to the spiral structure of the second tube 183. You can. By installing the second tube 183 along this opening, the second tube 183 may be exposed to the internal passage on the lower side of the chamber 130. The second tube 183 is sealed with the chamber 130 at the opening, thereby preventing harmful gas or plasma supply gas passing through the inner passage on the lower side of the chamber 130 from leaking to the outside through the opening. In this way, since the second tube 183 is in contact with the inner passage on the lower side of the chamber 130, the heat of the thermal decomposition gas or by-product passing through the inner passage on the lower side of the chamber 130 is transmitted through the second tube 183 having a spiral structure. ) is directly transferred to the working fluid passing through the second tube 183, so that the working fluid passing through the second tube 183 can be quickly converted from the liquid phase to the gas phase.

The working fluid flow path 190 may be a member that transfers the working fluid from the heat dissipating part 170 to the heat absorbing part 180 or from the heat absorbing part 180 to the heat dissipating part 170. The hydraulic oil passage 190 may include a first passage 191 and a second passage 192. The first passage 191 may be disposed at the center, and the second passage 192 may be disposed to surround the first passage 191, but this is not limited.

For example, the first passage 191 transfers the vaporized working fluid from the heat absorbing part 180 to the heat dissipating part 170, and the second passage 192 transfers the liquefied working fluid from the heat dissipating part 170. It can be delivered to the heat absorption unit 180.

Meanwhile, the heat radiating part 170, the heat absorbing part 180, and/or the hydraulic fluid flow path 190 may be made of a material with excellent heat transfer efficiency, such as copper, stainless steel, ceramics, tungsten, etc.

Figure 7 is a flowchart explaining the operation method of a high-efficiency energy-saving scrubber device according to an embodiment.

Referring to FIGS. 1 and 7 , harmful gas having a first temperature T1 may be introduced through the inlet 110 (S210). The inlet 110 may include a plurality of inlet pipes 111. Different types of harmful gases or plasma supply gases may flow in through the plurality of inlet pipes 111.

The temperature of the harmful gas passing through the inlet 110 is changed from the first temperature T1 to the second temperature T2 by using the heat generated as the working fluid changes from the gas phase to the liquid phase by the heat dissipation unit 170, that is, the liquefaction heat. ) can be raised to the level and delivered to the chamber 130 (S220).

The heat radiating unit 170 constitutes a phase change heat transfer system together with the heat absorbing unit 180. The working fluid of the heat radiating unit 170 is phase converted from a gas phase to a liquid phase, and the working fluid of the heat absorbing unit 180 is converted into a liquid phase. It can be phase transformed into the gas phase. The working fluid liquefied in the heat sink 170 may be transferred to the heat absorber 180, and the working fluid vaporized in the heat absorber 180 may be delivered to the heat absorber 170.

The heat generated as the working fluid of the heat dissipation unit 170 changes from the gas phase to the liquid phase, that is, the liquefaction heat, is transferred to the harmful gas passing through the inlet 110, so that the temperature of the harmful gas changes from the first temperature T1 to the second temperature. It can be raised to temperature (T2).

In this way, before the harmful gas is supplied to the chamber 130, it is raised to the second temperature (T2), which is close to the target temperature of the chamber 130, that is, the third temperature (T3), thereby preventing the harmful gas from being supplied to the chamber 130. Power consumption can be reduced as there is no need to increase power to raise the temperature to the target temperature. In addition, it is faster to increase the temperature of the harmful gas in the chamber 130 from the second temperature (T2) to the third temperature (T3) than to increase the temperature of the harmful gas from the first temperature (T1) to the third temperature (T3). , the overall harmful gas purification processing time in the high-efficiency energy-saving scrubber device 100 of the embodiment can be shortened. In particular, the temperature of the harmful gas passing through the inlet 110 can be increased using a phase change heat transfer system, so there is no need to provide a separate heat source, that is, a heater, so it does not increase additional costs and has a simple structure. You can.

Plasma may be generated in the chamber 130 by the plasma generator 120 to increase the temperature of the harmful gas from the second temperature T2 to the third temperature T3 and thermally decompose the harmful gas (S(230) ).

Harmful gases may be thermally decomposed by the plasma generated by the plasma generator 120, thereby generating thermal decomposition gas and by-products. As described above, the harmful gas supplied to the chamber 130 has previously been raised to the second temperature (T2) by the inlet 110, and thus changes from the second temperature (T2) to the third temperature in the chamber (130). (T3) can be raised quickly.

Thermal decomposition gas or by-products generated in the chamber 130 may be moved to the cooling unit 140.

A heat absorption unit 180 may be installed on the lower side of the chamber 130. Accordingly, the temperature of the thermal decomposition gas or by-product moved from the chamber 130 to the cooling unit 140 by the heat absorption unit 180 may be lowered from the third temperature T3 to the fourth temperature T4. That is, the heat of the thermal decomposition gas or by-product having the third temperature T3 is transferred to the working fluid of the heat absorbing part 180, so that the working fluid of the heat absorbing part 180 can be phase converted from the liquid phase to the gas phase (S240) ). In order to phase convert the working fluid of the heat absorption unit 180 into a gas phase, the heat of the thermal decomposition gas or by-product is transferred, and the heat loss of the thermal decomposition gas or by-product causes the thermal decomposition gas or by-product just before flowing into the cooling unit 140. The temperature of the by-product may be lowered from the third temperature (T3) to the fourth temperature (T4).

The working fluid vaporized in the heat absorbing part 180 is moved to the heat dissipating part 170 and can be used to increase the temperature of the harmful gas passing through the inlet part 110.

The temperature of the thermally decomposed gas that has fallen while passing through the heat absorption unit 180 can be rapidly cooled by the cooling unit 140 from the fourth temperature T4 to the fifth temperature T5 (S250).

As described above, the thermal decomposition gas or by-product is generated in the chamber 130 and passes through the internal passage on the lower side of the chamber 130 corresponding to the heat absorption unit 180, and the heat of the thermal decomposition gas or by-product is transmitted to the heat absorption unit (180). By being transferred to the working fluid of 180), the temperature of the thermal decomposition gas or by-product can be lowered from the third temperature (T3) to the fourth temperature (T4).

Even if it is lowered like this, the fourth temperature T4 is still very high and needs to be lowered further. Accordingly, the cooling unit 140 can rapidly cool the temperature of the thermal decomposition gas or by-product from the fourth temperature T4 to the fifth temperature T5. The thermal decomposition gas or by-products rapidly cooled by the cooling unit 140 can be removed by the removal unit 160 (S260).

By performing the operation method of the high-efficiency energy-saving scrubber device 100 according to the embodiment as described above, power consumption can be reduced and harmful gas purification processing time can be shortened.

The above detailed description should not be construed as restrictive in any respect and should be considered illustrative. The scope of the embodiments should be determined by reasonable interpretation of the appended claims, and all changes within the equivalent scope of the embodiments are included in the scope of the embodiments.

100: High-efficiency energy-saving scrubber device
110: inlet
111: Inlet pipe
120: Plasma generator
130: chamber
140: Cooling unit
140a: first area
140b: second area
141: body
142: opening
143: Accommodation space
145: Passage
150: water tank
160: removal unit
170: Heat dissipation unit
171: first heat exchanger
173: first tube
180: heat absorption part
181: second heat exchanger
183: second tube
190: Hydraulic oil flow path
191: 1st passage
192: Second passage
300: Direction of thermal decomposition gas
T1 to T5: Temperature

Claims (19)

chamber;
an inlet installed on the upper side of the chamber and introducing a harmful gas having a first temperature;
a heat dissipation unit installed around the inlet and increasing the temperature of the harmful gas passing through the inlet from the first temperature to a second temperature using the liquefaction heat of the working fluid and transferring it to the chamber;
a plasma generator installed on the upper side of the chamber, generating plasma in the chamber to increase the temperature of the harmful gas from the second temperature to the third temperature and thermally decompose the harmful gas;
a heat absorption unit installed on the lower side of the chamber and vaporizing the working fluid using the heat of the thermal decomposition gas having the third temperature to generate vaporization heat from the working fluid;
a cooling unit installed below the heat absorption unit and cooling the temperature of the pyrolysis gas that decreases while passing through the heat absorption unit from a fourth temperature to a fifth temperature; and
It includes a removal unit that removes the thermal decomposition gas cooled to the fifth temperature,
The heat dissipation unit includes a first tube wound around the inlet portion,
The vaporized working fluid delivered from the heat absorption unit is liquefied by transferring heat to the harmful gas passing the inlet while passing through the wound first tube,
High-efficiency energy-saving scrubber device. delete According to paragraph 1,
A high-efficiency energy-saving scrubber device in which a first heat exchanger is formed by the heat dissipation portion and the inlet portion. chamber;
an inlet installed on the upper side of the chamber and introducing a harmful gas having a first temperature;
a heat dissipation unit installed around the inlet and increasing the temperature of the harmful gas passing through the inlet from the first temperature to a second temperature using the liquefaction heat of the working fluid and transferring it to the chamber;
a plasma generator installed on the upper side of the chamber, generating plasma in the chamber to increase the temperature of the harmful gas from the second temperature to the third temperature and thermally decompose the harmful gas;
a heat absorption unit installed on the lower side of the chamber and vaporizing the working fluid using heat of the thermal decomposition gas having the third temperature to generate vaporization heat from the working fluid;
a cooling unit installed below the heat absorption unit and cooling the temperature of the thermal decomposition gas that decreases while passing through the heat absorption unit from a fourth temperature to a fifth temperature; and
It includes a removal unit that removes the thermal decomposition gas cooled to the fifth temperature,
The heat absorbing portion includes a second tube wound along a lower circumference of the chamber,
The liquefied working fluid delivered from the heat dissipation unit is vaporized by receiving heat from the pyrolysis gas passing from the chamber to the cooling unit while passing through the wound second tube.
High-efficiency energy-saving scrubber device. According to paragraph 4,
A high-efficiency, energy-saving scrubber device in which a second heat exchanger is formed by the heat absorption unit and the chamber. chamber;
an inlet installed on the upper side of the chamber and introducing a harmful gas having a first temperature;
a heat dissipation unit installed around the inlet and increasing the temperature of the harmful gas passing through the inlet from the first temperature to a second temperature using the liquefaction heat of the working fluid and transferring it to the chamber;
a plasma generator installed on the upper side of the chamber, generating plasma in the chamber to increase the temperature of the harmful gas from the second temperature to the third temperature and thermally decompose the harmful gas;
a heat absorption unit installed on the lower side of the chamber and vaporizing the working fluid using the heat of the thermal decomposition gas having the third temperature to generate vaporization heat from the working fluid;
a cooling unit installed below the heat absorption unit and cooling the temperature of the pyrolysis gas that decreases while passing through the heat absorption unit from a fourth temperature to a fifth temperature; and
It includes a removal unit that removes the thermal decomposition gas cooled to the fifth temperature,
Comprising a hydraulic fluid flow path installed between the heat dissipation portion and the heat absorption portion,
High-efficiency energy-saving scrubber device. According to clause 6,
A high-efficiency energy-saving scrubber device in which the working fluid is circulated by the heat dissipation unit, the working oil flow path, and the heat absorbing unit. In clause 7,
The working fluid liquefied in the heat dissipating part is delivered to the heat absorbing part through the working oil passage,
A high-efficiency, energy-saving scrubber device in which the working fluid vaporized in the heat absorption unit is transferred to the heat dissipation unit through the hydraulic fluid passage. chamber;
an inlet installed on the upper side of the chamber and introducing a harmful gas having a first temperature;
a heat dissipation unit installed around the inlet and increasing the temperature of the harmful gas passing through the inlet from the first temperature to a second temperature using the liquefaction heat of the working fluid and transferring it to the chamber;
a plasma generator installed on the upper side of the chamber, generating plasma in the chamber to increase the temperature of the harmful gas from the second temperature to the third temperature and thermally decompose the harmful gas;
a heat absorption unit installed on the lower side of the chamber and vaporizing the working fluid using the heat of the thermal decomposition gas having the third temperature to generate vaporization heat from the working fluid;
a cooling unit installed below the heat absorption unit and cooling the temperature of the pyrolysis gas that decreases while passing through the heat absorption unit from a fourth temperature to a fifth temperature; and
It includes a removal unit that removes the thermal decomposition gas cooled to the fifth temperature,
The second temperature is at least 200°C higher than the first temperature. chamber;
an inlet installed on the upper side of the chamber and introducing a harmful gas having a first temperature;
a heat dissipation unit installed around the inlet and increasing the temperature of the harmful gas passing through the inlet from the first temperature to a second temperature using the liquefaction heat of the working fluid and transferring it to the chamber;
a plasma generator installed on the upper side of the chamber, generating plasma in the chamber to increase the temperature of the harmful gas from the second temperature to the third temperature and thermally decompose the harmful gas;
a heat absorption unit installed on the lower side of the chamber and vaporizing the working fluid using the heat of the thermal decomposition gas having the third temperature to generate vaporization heat from the working fluid;
a cooling unit installed below the heat absorption unit and cooling the temperature of the pyrolysis gas that decreases while passing through the heat absorption unit from a fourth temperature to a fifth temperature; and
It includes a removal unit that removes the thermal decomposition gas cooled to the fifth temperature,
The fifth temperature is a high-efficiency energy-saving scrubber device that is rapidly cooled to at least 550°C lower than the fourth temperature. chamber;
an inlet installed on the upper side of the chamber and introducing a harmful gas having a first temperature;
a heat dissipation unit installed around the inlet and increasing the temperature of the harmful gas passing through the inlet from the first temperature to a second temperature using the liquefaction heat of the working fluid and transferring it to the chamber;
a plasma generator installed on the upper side of the chamber, generating plasma in the chamber to increase the temperature of the harmful gas from the second temperature to the third temperature and thermally decompose the harmful gas;
a heat absorption unit installed on the lower side of the chamber and vaporizing the working fluid using the heat of the thermal decomposition gas having the third temperature to generate vaporization heat from the working fluid;
a cooling unit installed below the heat absorption unit and cooling the temperature of the pyrolysis gas that decreases while passing through the heat absorption unit from a fourth temperature to a fifth temperature; and
It includes a removal unit that removes the thermal decomposition gas cooled to the fifth temperature,
The inlet portion is a high-efficiency energy-saving scrubber device including a plurality of inlet pipes installed along the circumference of the plasma generator. According to clause 11,
The heat dissipation unit,
A high-efficiency energy-saving scrubber device installed along the circumference of each of the plurality of inlet pipes. chamber;
an inlet installed on the upper side of the chamber and introducing a harmful gas having a first temperature;
a heat dissipation unit installed around the inlet and increasing the temperature of the harmful gas passing through the inlet from the first temperature to a second temperature using the liquefaction heat of the working fluid and transferring it to the chamber;
a plasma generator installed on the upper side of the chamber, generating plasma in the chamber to increase the temperature of the harmful gas from the second temperature to the third temperature and thermally decompose the harmful gas;
a heat absorption unit installed on the lower side of the chamber and vaporizing the working fluid using the heat of the thermal decomposition gas having the third temperature to generate vaporization heat from the working fluid;
a cooling unit installed below the heat absorption unit and cooling the temperature of the pyrolysis gas that decreases while passing through the heat absorption unit from a fourth temperature to a fifth temperature; and
It includes a removal unit that removes the thermal decomposition gas cooled to the fifth temperature,
The cooling unit,
Provided with a passage through which the thermal decomposition gas passes,
A high-efficiency, energy-saving scrubber device that sprays cooling water onto the thermally decomposed gas passing through the passage in order to rapidly cool the thermally decomposed gas. According to clause 13,
A water tank containing coolant,
A high-efficiency energy-saving scrubber device in which the coolant sprayed into the thermal decomposition gas is the coolant of the water tank. Introducing noxious gas having a first temperature through an inlet;
Raising the temperature of the harmful gas passing through the inflow part from the first temperature to the second temperature by using the liquefaction heat of the working fluid by a heat dissipation unit and transferring it to the chamber;
generating plasma in the chamber by a plasma generator to increase the temperature of the harmful gas from the second temperature to the third temperature and thermally decompose the harmful gas;
vaporizing the working fluid using heat of the pyrolysis gas having the third temperature by a heat absorbing unit, so that the working fluid generates heat of vaporization;
Cooling the temperature of the thermal decomposition gas, which has decreased while passing through the heat absorption unit, from a fourth temperature to a fifth temperature by a cooling unit; and
It includes: removing the rapidly cooled thermal decomposition gas by a removal unit,
The working fluid is circulated by the heat dissipating part, the heat absorbing part, and a working oil flow path installed between the heat dissipating part and the heat absorbing part,
How a high-efficiency, energy-saving scrubber device operates. delete According to clause 15,
Transferring the working fluid liquefied in the heat dissipating part to the heat absorbing part through the working oil passage; and
Transferring the working fluid vaporized in the heat absorbing part to the heat dissipating part through the working oil flow path.
A method of operating a high-efficiency energy-saving scrubber device comprising a. Introducing noxious gas having a first temperature through an inlet;
Raising the temperature of the harmful gas passing through the inflow part from the first temperature to the second temperature by using the liquefaction heat of the working fluid by a heat dissipation unit and transferring it to the chamber;
generating plasma in the chamber by a plasma generator to increase the temperature of the harmful gas from the second temperature to the third temperature and thermally decompose the harmful gas;
vaporizing the working fluid using heat of the pyrolysis gas having the third temperature by a heat absorbing unit, so that the working fluid generates heat of vaporization;
Cooling the temperature of the thermal decomposition gas, which has decreased while passing through the heat absorption unit, from a fourth temperature to a fifth temperature by a cooling unit; and
It includes: removing the rapidly cooled thermal decomposition gas by a removal unit,
The second temperature is at least 80°C higher than the first temperature. A method of operating a high-efficiency energy-saving scrubber device. Introducing noxious gas having a first temperature through an inlet;
Raising the temperature of the harmful gas passing through the inflow part from the first temperature to the second temperature by using the liquefaction heat of the working fluid by a heat dissipation unit and transferring it to the chamber;
generating plasma in the chamber by a plasma generator to increase the temperature of the harmful gas from the second temperature to the third temperature and thermally decompose the harmful gas;
vaporizing the working fluid using heat of the pyrolysis gas having the third temperature by a heat absorbing unit, so that the working fluid generates heat of vaporization;
Cooling the temperature of the thermal decomposition gas, which has decreased while passing through the heat absorption unit, from a fourth temperature to a fifth temperature by a cooling unit; and
It includes: removing the rapidly cooled thermal decomposition gas by a removal unit,
The fifth temperature is a method of operating a high-efficiency energy-saving scrubber device in which the fifth temperature is rapidly cooled to at least 550° C. lower than the fourth temperature.

Images