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KR102467151B1 - laser inspection device - Google Patents

laser inspection device Download PDF

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KR102467151B1
KR102467151B1 KR1020200137243A KR20200137243A KR102467151B1 KR 102467151 B1 KR102467151 B1 KR 102467151B1 KR 1020200137243 A KR1020200137243 A KR 1020200137243A KR 20200137243 A KR20200137243 A KR 20200137243A KR 102467151 B1 KR102467151 B1 KR 102467151B1
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laser
inspection device
passage
inspection target
supply passage
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KR20220053148A (en
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신문식
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(주)레이텍
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/34Sorting according to other particular properties
    • B07C5/342Sorting according to other particular properties according to optical properties, e.g. colour
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B07SEPARATING SOLIDS FROM SOLIDS; SORTING
    • B07CPOSTAL SORTING; SORTING INDIVIDUAL ARTICLES, OR BULK MATERIAL FIT TO BE SORTED PIECE-MEAL, e.g. BY PICKING
    • B07C5/00Sorting according to a characteristic or feature of the articles or material being sorted, e.g. by control effected by devices which detect or measure such characteristic or feature; Sorting by manually actuated devices, e.g. switches
    • B07C5/36Sorting apparatus characterised by the means used for distribution
    • B07C5/361Processing or control devices therefor, e.g. escort memory
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/85Investigating moving fluids or granular solids
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V8/00Prospecting or detecting by optical means
    • G01V8/10Detecting, e.g. by using light barriers
    • G01V8/20Detecting, e.g. by using light barriers using multiple transmitters or receivers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/392Measuring reradiation, e.g. fluorescence, backscatter
    • G01N2021/393Measuring reradiation, e.g. fluorescence, backscatter and using a spectral variation of the interaction of the laser beam and the sample

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
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  • Spectroscopy & Molecular Physics (AREA)
  • Geophysics (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

본 발명은 레이저 검사장치에 관한 것으로, 보다 상세하게는 레이저를 조사하여 수신되는 레이저의 파형을 분석하여 이물을 검출하기 위한 레이저 검사장치에 관한 것이다.
또한, 액상의 검사대상이 공급되는 공급유로와 상기 공급유로에 연결되어 검사대상의 이동 속도가 느려지도록 공급유로보다 넓은 단면적을 가지는 몸체부와 상기 몸체부의 상부에 배치되어 레이저를 라인형태로 조사하는 레이저 송신부와 상기 몸체부의 하부에 배치되어 라인형태의 레이저를 수신하는 레이저 수신부와 상기 레이저 수신부를 통해 수신된 레이저의 파형을 분석하여 검사대상의 이물을 검출하는 제어부를 포함하는 것을 특징으로 한다.
The present invention relates to a laser inspection device, and more particularly, to a laser inspection device for detecting a foreign material by irradiating a laser and analyzing a received laser waveform.
In addition, a supply passage through which a liquid test target is supplied and a body portion having a cross-sectional area wider than the supply passage connected to the supply passage to slow down the movement speed of the test target and disposed on the top of the body portion to irradiate a laser in a line form It is characterized in that it includes a laser transmitter, a laser receiver disposed below the body and receiving a line-shaped laser, and a control unit for detecting a foreign object to be inspected by analyzing the waveform of the laser received through the laser receiver.

Description

레이저 검사장치{laser inspection device}Laser inspection device {laser inspection device}

본 발명은 레이저 검사장치에 관한 것으로, 보다 상세하게는 레이저를 조사하여 수신되는 레이저의 파형을 분석하여 이물을 검출하기 위한 레이저 검사장치에 관한 것이다.The present invention relates to a laser inspection device, and more particularly, to a laser inspection device for detecting a foreign material by irradiating a laser and analyzing a received laser waveform.

최근 삶의 질이 향상되면서, 식품의 품질에 대한 관심이 증가하고 있으며, 특히 이물질의 검출에 매우 민감한 소비자가 크게 증가되고 있다.As the quality of life has recently improved, interest in food quality has increased, and in particular, consumers who are very sensitive to the detection of foreign substances are greatly increasing.

이에 따라, 식품을 생산하는 과정에서 이물의 유입을 차단하기 위해 다방면으로 노력하고 있으며, 식품 제조 과정 및 제조 후 식품 내의 이물을 검출하기 위한 장치가 사용되고 있다.Accordingly, efforts are being made in various ways to block the inflow of foreign substances in the process of producing food, and a device for detecting foreign substances in food during and after food production is being used.

식품의 이물 검사 방법 중 하나로 방사선을 이용하는 방법이 있으며, 방사선을 이용한 이물 검출은 방사선에 의해 식품이 손상되거나 방사선이 잔류하는 문제점이 있었다.There is a method using radiation as one of the methods for inspecting foreign substances in food, and detection of foreign substances using radiation has a problem in that the food is damaged by the radiation or the radiation remains.

다른 방법으로써 자기장을 이용하는 방법이 있으며, 자기장을 이용하는 방법은 구조가 간단하고, 식품의 손상 및 안전에 영향을 미치지 않음에 따라, 많이 사용되고 있으나, 금속 이외의 유기물이나, 플라스틱과 같은 이물의 검출이 어려운 문제점이 있었다.As another method, there is a method using a magnetic field. The method using a magnetic field is widely used because it has a simple structure and does not affect food damage or safety, but it is difficult to detect foreign substances such as organic substances other than metal or plastic. There was a difficult problem.

유기물이나, 플라스틱과 같은 이물을 종합적으로 검출할 수 있는 방법의 필요성에 따라, 한국공개특허 제10-2013-0077221호 "테라파를 이용한 물체 검사 장치"와 같은 기술이 개발되었다.In accordance with the need for a method capable of comprehensively detecting foreign substances such as organic substances or plastics, a technology such as Korean Patent Publication No. 10-2013-0077221 "object inspection device using Terapa" has been developed.

하지만, 테라파를 이용한 기술은 그 구조가 복잡하고, 빠른 속도로 공급되는 유체의 이물을 분석하기에는 어려움이 있음에 따라, 보다 빠르고 간단한 구조로 저렴한 검사방법의 필요성이 지속적으로 제기되고 있다.However, the technology using Terrapha has a complicated structure, and it is difficult to analyze foreign substances in a fluid supplied at a high speed. Therefore, the need for a faster and cheaper inspection method with a simpler structure has been continuously raised.

한국공개특허 제10-2013-0077221호 "테라파를 이용한 물체 검사 장치"Korean Patent Publication No. 10-2013-0077221 "Object Inspection Device Using Terapa"

본 발명의 목적은 상술한 바와 같은 문제점을 해결하기 위해 안출된 것으로서, 간단한 구조로 빠른속도로 공급되는 유체 내의 이물을 검출하기 위한 레이저 검사장치를 제공하는 것이다.An object of the present invention has been made to solve the above-mentioned problems, and to provide a laser inspection device for detecting foreign matter in a fluid supplied at high speed with a simple structure.

상기 목적을 달성하기 위해 본 발명에 따른 레이저 검사장치는 액상의 검사대상이 공급되는 공급유로와 상기 공급유로에 연결되어 검사대상의 이동 속도가 느려지도록 공급유로보다 넓은 단면적을 가지는 몸체부와 상기 몸체부의 상부에 배치되어 레이저를 라인형태로 조사하는 레이저 송신부와 상기 몸체부의 하부에 배치되어 라인형태의 레이저를 수신하는 레이저 수신부와 상기 레이저 수신부를 통해 수신된 레이저의 파형을 분석하여 검사대상의 이물을 검출하는 제어부를 포함하는 것을 특징으로 한다.In order to achieve the above object, the laser inspection device according to the present invention is connected to a supply passage through which a liquid test target is supplied, and a body portion having a cross-sectional area wider than that of the supply passage so that the moving speed of the test target is slowed down, and the body A laser transmitter disposed on the upper part of the body to irradiate a laser in a line form, and a laser receiver disposed on the lower part of the body to receive a line-shaped laser and analyzing the waveform of the laser received through the laser receiver to detect a foreign object to be inspected. It is characterized in that it includes a control unit for detecting.

또한, 상기 몸체부로부터 연장되어 검사가 실시된 검사대상이 이동되는 이동유로와 상기 이동유로에 연결되어 제어부를 통해 이물이 검출되면, 기 설정된 시간동안 검사대상을 배출시키는 배출부를 더 포함하는 것을 특징으로 한다.In addition, it is characterized in that it further comprises a moving passage extending from the body and moving the inspection target, and a discharge unit that is connected to the moving passage and discharges the inspection target for a predetermined time when a foreign material is detected through the control unit. to be

또한, 상기 배출부는 이물이 검출되지 않은 검사대상을 배출시키기 위한 배출유로와 이물이 검출된 검사대상을 배출시키기 위한 폐기유로와 상기 배출유로 및 폐기유로를 개폐시키기 위한 적어도 하나 이상의 개폐부를 포함하여 구성되는 것을 특징으로 한다.In addition, the discharge unit includes a discharge passage for discharging an inspection target in which foreign substances are not detected, a waste passage for discharging an examination target in which foreign substances are detected, and at least one opening/closing part for opening and closing the discharge passage and the waste passage. characterized by being

또한, 상기 몸체부에 설치되는 레이저 송신부 및 레이저 수신부는 한쌍씩 셋트로 설치되되, 앞열에 배치된 셋트 사이에 다음열의 셋트가 배치되는 형태로 앞열보다 다음열의 셋트가 1개 많거나, 1개 적게 설치된 것을 특징으로 한다.In addition, the laser transmitter and the laser receiver installed in the body are installed as a pair, but the set of the next row is arranged between the sets disposed in the front row, so that the set in the next row is one more or one less than the front row characterized by being installed.

상술한 바와 같이, 본 발명에 따른 레이저 검사장치에 의하면, 레이저를 조사하여 수신되는 레이저의 파형을 분석하여 이물을 검출함으로써, 간단한 구조로 빠른속도로 공급되는 유체 내의 이물을 검출할 수 있는 효과가 있다.As described above, according to the laser inspection device according to the present invention, by irradiating a laser and analyzing the received laser waveform to detect a foreign material, the effect of detecting a foreign material in a fluid supplied at high speed with a simple structure is achieved. have.

도 1은 본 발명에 따른 레이저 검사장치를 도시한 개념도.
도 2는 본 발명에 따른 레이저 검사장치의 레이저 송신부의 배치구조를 도시한 도면.
도 3은 본 발명에 따른 레이저 검사장치의 이물 검출을 도시한 도면.
1 is a conceptual diagram showing a laser inspection device according to the present invention.
Figure 2 is a view showing the arrangement structure of the laser transmission unit of the laser inspection device according to the present invention.
3 is a view showing foreign material detection of the laser inspection device according to the present invention.

본 명세서에 개시되어 있는 본 발명의 개념에 따른 실시 예들에 대해서 특정한 구조적 또는 기능적 설명은 단지 본 발명의 개념에 따른 실시 예들을 설명하기 위한 목적으로 예시된 것으로서, 본 발명의 개념에 따른 실시 예들은 다양한 형태들로 실시될 수 있으며 본 명세서에 설명된 실시 예들에 한정되지 않는다.Specific structural or functional descriptions of the embodiments according to the concept of the present invention disclosed in this specification are only illustrated for the purpose of explaining the embodiments according to the concept of the present invention, and the embodiments according to the concept of the present invention It can be embodied in various forms and is not limited to the embodiments described herein.

본 발명의 개념에 따른 실시 예들은 다양한 변경들을 가할 수 있고 여러 가지 형태들을 가질 수 있으므로 실시 예들을 도면에 예시하고 본 명세서에서 상세하게 설명하고자 한다. 그러나, 이는 본 발명의 개념에 따른 실시 예들을 특정한 개시 형태들에 대해 한정하려는 것이 아니며, 본 발명의 사상 및 기술 범위에 포함되는 모든 변경, 균등물, 또는 대체물을 포함한다.Embodiments according to the concept of the present invention can apply various changes and have various forms, so the embodiments are illustrated in the drawings and described in detail in this specification. However, this is not intended to limit the embodiments according to the concept of the present invention to specific disclosure forms, and includes all changes, equivalents, or substitutes included in the spirit and technical scope of the present invention.

이하, 본 발명의 바람직한 실시예를 첨부된 도면을 참조하여 설명하면 다음과 같다.Hereinafter, a preferred embodiment of the present invention will be described with reference to the accompanying drawings.

도 1은 본 발명에 따른 레이저 검사장치를 도시한 개념도이며, 도 2는 본 발명에 따른 레이저 검사장치의 레이저 송신부의 배치구조를 도시한 도면이고, 도 3은 본 발명에 따른 레이저 검사장치의 이물 검출을 도시한 도면이다.1 is a conceptual diagram showing a laser inspection device according to the present invention, FIG. 2 is a view showing the arrangement structure of a laser transmitter of the laser inspection device according to the present invention, and FIG. 3 is a foreign matter of the laser inspection device according to the present invention. It is a drawing showing the detection.

도 1에 도시된 바와 같이, 본 발명에 따른 레이저 검사장치는 액상의 검사대상이 공급되는 공급유로(1)와 상기 공급유로(1)에 연결되어 검사대상의 정밀한 검사를 위해 검사대상의 이동 속도가 느려지도록 공급유로(1)보다 넓은 단면적을 가지는 몸체부(5)와 상기 몸체부(5)의 상부에 배치되어 레이저를 라인형태로 조사하는 적어도 하나 이상의 레이저 송신부(6)와 상기 몸체부(5)의 하부에 레이저 송신부(6)에 대응하도록 배치되어 라인형태의 레이저를 수신하는 레이저 수신부(7)와 상기 레이저 수신부(7)를 통해 수신된 레이저의 파형을 분석하여 검사대상의 이물을 검출하여 이물이 포함되었는지 여부를 판단하는 제어부(미도시)를 포함하여 구성된다.As shown in FIG. 1, the laser inspection device according to the present invention is connected to a supply passage 1 through which a liquid inspection target is supplied and the moving speed of the inspection target for precise inspection of the inspection target. A body portion 5 having a larger cross-sectional area than the supply passage 1 so that the ? 5), a laser receiving unit 7 disposed to correspond to the laser transmitting unit 6 and receiving a line-shaped laser, and analyzing the waveform of the laser received through the laser receiving unit 7 to detect a foreign object to be inspected It is configured to include a control unit (not shown) that determines whether or not a foreign material is included.

또한, 상기 몸체부(5)로부터 연장되어 검사가 실시된 검사대상이 이동되는 이동유로(2)와 상기 이동유로(2)에 연결되어 제어부를 통해 이물이 검출되면, 기 설정된 시간동안 검사대상을 배출시키는 배출부(8)를 더 포함하도록 구성됨이 바람직하다.In addition, when a foreign object is detected through the moving passage 2 connected to the moving passage 2 and the moving passage 2 through which the inspection subject is moved extending from the body part 5, the inspection subject is moved for a predetermined time. It is preferable to be configured to further include a discharge unit 8 for discharging.

상기 배출부(8)는 이물이 검출되지 않은 검사대상을 배출시키기 위한 배출유로(3)와 이물이 검출된 검사대상을 배출시키기 위한 폐기유로(4)와 상기 배출유로(3) 및 폐기유로(4)를 개폐시키기 위한 적어도 하나 이상의 개폐부를 포함하여 구성되어, 상기 제어부의 제어에 따라 이물이 검출되지 않을 때는 검사대상이 배출유로(3)로 배출되도록 개폐부가 동작하게 된다.The discharge unit 8 includes a discharge passage 3 for discharging an inspection target in which foreign substances are not detected, a waste passage 4 for discharging an examination target in which foreign substances are detected, the discharge passage 3, and a waste passage ( 4) is configured to include at least one opening/closing unit for opening and closing, and the opening/closing unit operates so that the object to be inspected is discharged to the discharge passage 3 when no foreign matter is detected under the control of the control unit.

또한, 이물이 검출되었을 때에는 기 설정된 시간동안 검사대상을 폐기유로(4)로 배출되도록 개폐부가 동작하여 이물과 함께 검사대상을 기 설정된 시간동안 일부 배출시킨 다음 개폐부가 다시 동작하여 검사대상이 다시 배출유로(3)로 배출되도록 제어된다.In addition, when a foreign material is detected, the opening and closing part operates so that the inspection subject is discharged to the waste passage 4 for a predetermined time, and the inspection subject is partially discharged along with the foreign material for a predetermined time, and then the opening and closing part operates again to discharge the inspection subject again. It is controlled to be discharged to the flow path (3).

또한, 도 2 또는 도 3에 도시된 바와 같이, 상기 몸체부(5)에 설치되는 레이저 송신부(6) 및 레이저 수신부(7)는 한쌍씩 셋트로 설치되어 레이저 송신부(6)에서 조사되는 레이저 중 일부만 레이저 수신부(7)에 수신되거나, 수신된 레이저의 파장을 바탕으로 검사대상에 이물(100)이 포함되어 있는지 여부를 검사하게 된다.In addition, as shown in FIG. 2 or 3, the laser transmitter 6 and the laser receiver 7 installed in the body 5 are installed as a pair, and among the lasers irradiated by the laser transmitter 6 Only a part is received by the laser receiving unit 7, or whether or not the foreign material 100 is included in the inspection target is inspected based on the wavelength of the received laser.

또한, 상기 몸체부(5)에 설치되는 레이저 송신부(6) 및 레이저 수신부(7)는 복수 개의 열로 배열되도록 구성되되, 앞열의 레이저 송신부(6a) 사이로 통과하는 검사대상의 이물을 다음열의 레이저 송신부(6b)가 감출할 수 있도록 몸체부(5)에 배치되는 레이저 송신부(6) 및 레이저 수신부(7) 셋트는 앞열에 배치된 셋트 사이에 다음열의 셋트가 배치되는 형태로 앞열보다 다음열의 셋트가 1개 많거나, 1개 적게 설치됨이 바람직하다.In addition, the laser transmitter 6 and the laser receiver 7 installed on the body 5 are configured to be arranged in a plurality of rows, and the foreign matter passing between the laser transmitters 6a in the front row is transferred to the laser transmitter in the next row. The set of the laser transmitter 6 and the laser receiver 7 disposed on the body 5 so that (6b) can be hidden is that the set in the next row is arranged between the sets in the front row, so that the set in the next row is more than the set in the front row. It is preferable to install one more or one less.

이상과 같이 본 발명은 첨부된 도면을 참조하여 바람직한 실시예를 중심으로 기술되었지만 당업자라면 이러한 기재로부터 본 발명의 범주를 벗어남이 없이 많은 다양한 자명한 변형이 가능하다는 것은 명백하다. 따라서 본 발명의 범주는 이러한 많은 변형의 예들을 포함하도록 기술된 청구범위에 의해서 해석되어져야 한다.As described above, the present invention has been described with reference to the preferred embodiments with reference to the accompanying drawings, but it is clear that many and various obvious modifications are possible to those skilled in the art from this description without departing from the scope of the present invention. Accordingly, the scope of the present invention should be construed by the claims described to include examples of these many variations.

1 : 공급유로
2 : 이송유로
3 : 배출유로
4 : 폐기유로
5 : 몸체부
6 : 레이저 송신부
7 : 레이저 수신부
8 : 배출부
1: Supply flow
2: transfer path
3: discharge path
4: waste oil
5: body part
6: laser transmitter
7: laser receiver
8: discharge part

Claims (4)

액상의 검사대상이 공급되는 공급유로와;
상기 공급유로에 연결되어 검사대상의 이동 속도가 느려지도록 공급유로보다 넓은 단면적을 가지는 몸체부와;
상기 몸체부의 상부에 배치되어 레이저를 라인형태로 조사하는 레이저 송신부와;
상기 몸체부의 하부에 배치되어 라인형태의 레이저를 수신하는 레이저 수신부와;
상기 레이저 수신부를 통해 수신된 레이저의 파형을 분석하여 검사대상의 이물을 검출하는 제어부를 포함하며,
상기 몸체부의 상부와 하부에 설치되는 레이저 송신부 및 레이저 수신부는 한쌍씩 셋트를 이루어 복수 개의 열로 배열되도록 설치되되,
앞열의 셋트 사이로 통과하는 검사대상의 이물을 다음열의 셋트가 검출할 수 있도록 앞열에 배치된 셋트 사이에 다음열의 셋트가 배치되는 형태로 앞열보다 다음열의 셋트가 1개 많거나, 1개 적게 설치되어 앞열의 셋트와 다음열의 셋트가 일부 중첩되도록 구성된 것을 특징으로 하는
레이저 검사장치.
a supply passage through which a liquid test target is supplied;
a body portion connected to the supply passage and having a larger cross-sectional area than the supply passage so as to slow down the moving speed of the inspection target;
a laser transmission unit disposed above the body to irradiate a laser in a line shape;
a laser receiver disposed under the body to receive a line-shaped laser;
And a control unit for detecting a foreign material of the inspection target by analyzing the waveform of the laser received through the laser receiving unit,
The laser transmitter and the laser receiver installed on the upper and lower parts of the body are installed as a set and arranged in a plurality of rows,
The set in the next row is arranged between the sets in the front row so that the set in the next row can detect foreign substances passing between the sets in the front row. Characterized in that the set in the front row and the set in the next row are configured to partially overlap
laser inspection device.
제 1항에 있어서,
상기 몸체부로부터 연장되어 검사가 실시된 검사대상이 이동되는 이동유로와;
상기 이동유로에 연결되어 제어부를 통해 이물이 검출되면, 기 설정된 시간동안 검사대상을 배출시키는 배출부를 더 포함하는 것을 특징으로 하는
레이저 검사장치.
According to claim 1,
a moving path extending from the body and moving the inspection target;
Characterized in that it further comprises a discharge unit connected to the moving passage and discharging the inspection target for a predetermined time when a foreign material is detected through the control unit.
laser inspection device.
제 2항에 있어서,
상기 배출부는
이물이 검출되지 않은 검사대상을 배출시키기 위한 배출유로와;
이물이 검출된 검사대상을 배출시키기 위한 폐기유로와;
상기 배출유로 및 폐기유로를 개폐시키기 위한 적어도 하나 이상의 개폐부를 포함하여 구성되는 것을 특징으로 하는
레이저 검사장치.
According to claim 2,
the discharge part
a discharge passage for discharging an inspection target in which foreign matter is not detected;
A waste flow path for discharging the inspection target in which foreign matter is detected;
Characterized in that it comprises at least one opening and closing part for opening and closing the discharge passage and the waste passage
laser inspection device.
삭제delete
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JP2011152109A (en) 2010-01-28 2011-08-11 Hitachi High-Technologies Corp Method and apparatus for inspecting virus
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