KR102390054B1 - Container storage facility - Google Patents

Abstract

The container has an opening in the side surface, and is comprised so that contents can be put in and out from the opening part. The container storage facility includes a regulating body for regulating the protrusion of contents from an opening of the container in a state in which the container is accommodated in the storage unit, and is depressed by the bottom of the container in a state in which the container is stored in the storage portion. A lower part to be pressed (被押下部) and an interlocking mechanism (機構) for interlocking the regulating body and the lower part to be pressed are provided. The regulating body is configured to be switchable between a regulating position for regulating the protrusion of contents and a retracted position spaced apart from the regulating position, and the interlocking mechanism places the regulating body at the regulating position in a state where the part to be pressed is pressed down on the container. It is configured to position the regulating body in the retracted position in a state where the part to be pressed is not depressed.

Description

Container storage facility {CONTAINER STORAGE FACILITY}

The present invention relates to a container storage facility provided with a container storage shelf having a storage portion for accommodating containers.

As a container storage facility provided with a container storage shelf for accommodating the containers as described above, there are, for example, those installed in semiconductor manufacturing plants that process and store semiconductor substrates as contents of containers. In a semiconductor manufacturing plant, processing (processing, inspection, etc.) of a semiconductor substrate divided into several process is performed. Then, the semiconductor substrate that has been processed in a certain process is transported by a transport device in a state accommodated in a container, and is supplied to a processing device in the next process, or is stored in a container storage facility such as a storage room equipped with a container storage shelf. In this way, the semiconductor substrate is accommodated in the container storage shelf in the state accommodated in the container.

Moreover, it is known that the container storage facility mentioned above has an opening part on the side surface, and accommodates the container comprised so that the content can be put in and out from the said opening part. For example, as a container for accommodating a semiconductor substrate, there is a facility for accommodating a container having an opening for loading and unloading the semiconductor substrate on a side surface and having slots for accommodating the substrate dispersedly arranged in a plurality of upper and lower layers.

Here, when the container is stored in the container storage shelf and mechanical vibration caused by the operation of the conveying device or vibration caused by an earthquake is transmitted to the container storage shelf, fluctuation occurs in the loading/unloading direction of the semiconductor substrate with respect to the container. , the semiconductor substrate in the container may protrude from the opening to the outside of the container, and the semiconductor substrate may be dropped or damaged. Accordingly, it may be considered to provide a regulating body for regulating the protrusion of the semiconductor substrate at a position close to the opening of the container in a state in which the container is accommodated on the container storage shelf. However, in the container storage shelf, if the regulating body is provided at a position close to the opening of the container in the state in which the container is accommodated, the possibility that the container interferes with the regulating body when the container is stored in the container storage shelf increases. . That is, the possibility that the regulating body becomes an obstacle when storing the container increases.

Regarding a regulator for regulating the protrusion of a semiconductor substrate from a container, for example, Japanese Patent Laid-Open No. 2003-237941 (Patent Document 1) discloses an automatic guidance vehicle for transporting a container in which a semiconductor substrate is accommodated, It is disclosed that a regulating member is provided for pressing the semiconductor substrate inward from the opening side of the container so that the semiconductor substrate does not protrude from the container.

In the automatic guidance vehicle of Patent Document 1, when conveying a semiconductor substrate, the regulating body is positioned at a position that presses the semiconductor substrate inward from the opening side of the cassette, and the semiconductor substrate is transported and mounted by single-wafer transfer and mounting equipment. It is comprised so that the regulating body may be located in the position which does not interfere with the semiconductor substrate which is transferred and mounted at the time of carrying out. In the automatic guidance vehicle of Patent Document 1, the position of the regulating body is switched by a driving means such as an air cylinder.

Japanese Laid-Open Patent Publication No. 2003-237941

Although it is conceivable to install a regulating body such as Patent Document 1 whose position is switched by means of a drive means on the container storage shelf, if the drive means is installed on the container storage shelf, it is necessary to install a driving source such as a motor or an air cylinder on the container storage shelf. Therefore, it is disadvantageous in terms of installation space. In addition, since wiring or piping for supplying driving electric power or air to the driving source is required, the structure becomes complicated.

Accordingly, there is a demand for realization of a container storage facility which is advantageous in terms of installation space and capable of regulating the protrusion of the contents from the container with a simple structure.

A container storage facility according to the present disclosure includes a container storage shelf having a storage portion for accommodating a container, the container having an opening on a side surface, and configured to be able to put contents in and out from the opening, the container storage facility comprising: , a regulating body for regulating the protrusion of the contents from the opening of the container in a state in which the container is accommodated in the accommodating part; a lower part to be pressed, and an interlocking mechanism for interlocking the regulating body and the lower part to be pressed, wherein the regulating body is disposed in the container in a state accommodated in the accommodating part. It is arranged outside the opening in the direction of loading and unloading of the contents and is configured to be switchable to a regulating position for regulating the protrusion of the contents and a retracted position spaced apart from the regulating position, wherein the interlocking mechanism includes: It is configured to position the regulating body in the regulating position in a state pressed down by the container, and to position the regulating body in the retracted position in a state in which the part to be pressed is not pressed down on the container.

According to this configuration, the regulating body and the under-pressured portion are interlocked by the interlocking mechanism. This interlocking mechanism can switch the position of the regulating body between the regulating position and the retracted position spaced apart from the regulating position according to the state in which the lower part to be pressed by the bottom of the container and the state in which the lower part is not depressed. . When the part to be pressed is not depressed by the bottom of the container, that is, when the container is not accommodated in the housing, the regulating body is located in the retracted position, and when the part to be pressed is depressed by the bottom of the container, that is, When the container is accommodated in the storage unit, the regulating body is positioned at the regulating position. Therefore, before the container is accommodated, the restraining body is in the retracted position, so that the restraining body does not interfere with the container being accommodated. On the other hand, when the container is accommodated, the lower part is pushed down by the bottom of the container, and the position of the regulating body is switched to the regulating position in association with the pushing down of the lower part. In this way, regardless of the driving means, the regulating body can be switched between the regulating position and the retracted position by the operation to accommodate the container and the operation to take it out.

The regulating position is a position that is disposed outside the container opening in the state accommodated in the storage unit in the loading/unloading direction (for example, close to the opening in the loading/unloading direction) to regulate the protrusion of the contents. After being accommodated in the storage unit, the movement of the contents of the container in the withdrawing and unloading direction is regulated by the regulating body at the regulating position. Therefore, even when vibration occurs in the container, it is possible to suppress the contents from jumping out of the container.

It is advantageous in terms of installation space because it is not necessary to provide a driving source such as a motor or an air cylinder as much as the driving means is not employed. Further, since wiring or piping for supplying driving electric power or air to the driving source is unnecessary, the configuration can be simplified.

Thus, according to this structure, it is advantageous in the point of installation space, and can obtain the container storage facility which can regulate the protrusion of the content from a container with a simple structure.

The new features and advantages of the technology according to the present disclosure will become clearer by the following description of exemplary and non-limiting embodiments described with reference to the drawings.

BRIEF DESCRIPTION OF THE DRAWINGS It is the figure which looked at the container storage shelf and the conveyance apparatus from the loading/unloading direction.
It is the figure which looked at the container storage shelf and the conveyance apparatus from the direction orthogonal to the putting-out direction in the horizontal plane.
3 is a perspective view of a container;
4 is a perspective view of a container storage shelf and a container.
5 is a view showing the operation of the interlocking mechanism when the container is accommodated in the receiving unit.
FIG. 6 is a plan view in the state of FIG. 5 .
FIG. 7 is a diagram illustrating a subsequent operation of FIG. 5 .
FIG. 8 is a plan view in the state of FIG. 7 .
Fig. 9 is a perspective view of a container storage shelf and a container according to a second embodiment;
It is a figure which showed the restrictor in the retracted position in 2nd Embodiment.
11 is a view showing a regulating body in a regulating position in the second embodiment.

[First embodiment]

The container storage facility 1 which concerns on this embodiment is demonstrated based on drawing. As shown in FIGS. 1 and 2 , the container storage facility 1 includes a container storage shelf 2 having a storage part 21 for accommodating the container W and the container W in the storage part 21 . A conveying device 3 for conveying is provided.

In this embodiment, the container W accommodates the semiconductor tray T as a content, as shown in FIG. The semiconductor tray T is accommodated in the container W in a state in which a plurality of layers are overlapped in the vertical direction (see also FIG. 1 ). The container W has an opening Wa on the side surface, and is comprised so that the semiconductor tray T can be put in and out from the said opening part Wa. In addition, a pair of opening part Wa is formed in the state mutually opposing in the loading/unloading direction in the container W. As shown in FIG. And in the following description, let the direction orthogonal to a X direction be a Y direction, making the putting-in/out direction of the semiconductor tray T with respect to the container W a X direction, and following a horizontal plane. For convenience of explanation, one of the X directions is referred to as the first X direction (X1), and the other is referred to as the second X direction (X2). Moreover, let one of the Y directions be a 1st Y direction Y1, and let the other be a 2nd Y direction Y2.

The container W has a pair of side walls Wc which face each other at intervals in the Y direction. The upper and lower portions of the container W are closed. Moreover, the upper part and the bottom part of the container W are formed shorter than the side wall Wc in the X direction. Thereby, the container W is formed in the H-shape by which the edge part of the X direction was cut out in planar view. Since the container W has such a shape, the inside of the container W can be visually visually recognized easily, and the putting in and taking out of the semiconductor tray T from the container W is made easy. A top flange (Wb) is provided on the upper portion of the container (W). When the conveying apparatus 3 grips the top flange Wb, conveyance of the container W by the conveying apparatus 3 is attained.

1 and 2 , the conveying device 3 is configured to be able to travel on the traveling rail 90 fixed to the ceiling by the suspension port 91 . The traveling rail 90 is provided along the X direction at least at a location corresponding to the container storage shelf 2 . For this reason, the conveying apparatus 3 can convey the container W along the X direction.

The conveying device 3 includes a traveling driving unit 3R traveling on the traveling rail 90 , and a container supporting unit 3S suspended and supported by the traveling driving unit 3R so as to be located below the traveling rail 90 , there is.

The travel drive unit 3R includes a travel wheel 3Ra that is rotationally driven by a drive motor 3Rc and a guide wheel 3Rb that guides the travel drive unit 3R along the travel rail 90 . The traveling wheel 3Ra has a horizontal rotation shaft and rolls the upper surface of the traveling rail 90 . The guide wheel 3Rb has a vertical rotation shaft, and rolls a vertical surface formed in the vertical direction on the traveling rail 90 . Accordingly, the traveling driving unit 3R can move along the traveling rail 90 by the traveling wheel 3Ra driven by the driving motor 3Rc while being guided along the traveling rail 90 by the guide wheel 3Rb. there is.

The container holding part 3S has the holding part 31S which can grip the top flange Wb of the container W. The container holding part 3S has the cover 32S which covers the upper side of the holding part 31S, the 1st X direction X1, and the 2nd X direction X2. In other words, the cover 32S has a shape in which the downward direction, the first Y direction Y1, and the second Y direction Y2 are opened. Thereby, even in the state in which the holding|gripping tool 31S is covered with the cover 32S, the holding|gripping tool 31S is able to move in the downward direction and the Y direction.

The container holding part 3S has the raising/lowering operation mechanism 34S which raises/lowers the grip part 31S, and the slide operation mechanism 33S which slides the grip part 31S in a Y direction.

The holding portion 31S includes a holding claw 31Sa that can be switched between a holding posture for holding the container W and a release posture for releasing the holding, and a gripping claw 31Sa for switching operation between the holding posture and the releasing posture. It has a motor (not shown). In the present embodiment, the gripping claw 31Sa grips the top flange Wb of the container W, so that the gripping part 31S can grip the container W.

The raising/lowering operation mechanism 34S is equipped with the drum 34Sa which can unwind and wind up the raising/lowering belt 34Sb. The raising/lowering operation mechanism 34S can raise and lower the holding part 31S and the container W gripped by it by rotationally driving the drum 34Sa with the raising/lowering motor 34Sc.

As shown in Fig. 1, the slide operation mechanism 33S includes a pair of pulleys 33Sa (only one pulley is described in the drawing) arranged at intervals in the Y direction, and the pair of pulleys 33Sa. It has the slide belt 33Sb which spanned, and the motor (not shown) for slides which rotationally drives the pulley 33Sa. The slide operation mechanism 33S drives the slide belt 33Sb by rotating the pulley 33Sa with the motor for slide, and moves the grip part 31S and the container W gripped by it in the 2nd Y direction Y2. ) can be slid on. Moreover, the slide operation mechanism 33S can slide the grip part 31S and the container W gripped by it in the 1st Y direction Y1 by rotating the motor for slides opposite to the above case. That is, by the slide operation mechanism 33S, the protruding position, which is a position where the container W and the container storage shelf 2 overlap in the Y direction, and the retracted position, where the container W is accommodated inside the cover 32S. The vessel (W) can be slid.

According to the structure demonstrated above, the conveyance apparatus 3 can accommodate the container W in the accommodating part 21 of the container storage shelf 2 . That is, in the state which gripped the container W by the holding|gripping tool 31Sa of the holding|gripping tool 31S, the conveyance apparatus 3 shows, as shown in FIG. 2, the traveling rail 90 by the traveling drive part 3R. ) is moved in the X direction. And the conveying apparatus 3 stops at the position overlapping with the storage part 21 of the container storage shelf 2 in the X direction. As shown in FIG. 1, the conveying apparatus 3 slides the holding part 31S and the container W held by it by the slide operation mechanism 33S in the 2nd Y direction Y2, and the holding part (31S) and the container (W) are placed in the protruding position. And the conveyance apparatus 3 can accommodate the container W in the accommodating part 21 by lowering|falling the container W by the raising/lowering operation mechanism 34S.

In this embodiment, the conveying apparatus 3 conveys the container W in the attitude|position which the X direction of the container W follows a running direction, and the slide operation mechanism 33S moves the Y direction of the container W. Slide the container (W) accordingly. That is, the sliding direction of the container W in the case of storing the container W with respect to the storage part 21 of the container storage shelf 2 is the 2nd Y direction Y2. And the sliding direction of the container W in the case of taking out the container W from the said accommodation part 21 is the 1st Y direction Y1. That is, the second Y direction (Y2) is a shelf inside longitudinal direction with respect to the container storage shelf (2), and the first Y direction (Y1) is a front direction with respect to the container storage shelf (2).

By the way, the semiconductor tray T moves in the X direction relative to the container W by the speed change during conveyance of the container W, and may protrude from the opening part Wa of the container W. In order to prevent this, the conveying apparatus 3 according to the present embodiment is adjacent to the opening Wa of the container W in the X direction (in/out direction) at the time of conveying the container W, and the semiconductor tray ( It has the fall prevention body 35S which prevents the fall of T) (refer FIG. 1 and FIG. 2). That is, the fall prevention body 35S is arrange|positioned with respect to the opening part Wa of the container W, and is arrange|positioned on the outer side of the X-direction (withdrawal direction). Here, the outer side of the X direction means a side spaced apart from the center of the X direction of the container (W). Since the fall prevention body 35S adjoins the opening part Wa of the container W, it prevents the semiconductor tray T from moving in the X direction relative to the container W. Therefore, the conveyance apparatus 3 can prevent that the semiconductor tray T falls from the container W with the fall prevention body 35S. In addition, the separation distance in the X direction between the fall prevention body 35S and the opening Wa of the container W can be set based on the length in the X direction of the contents (in this embodiment, the semiconductor tray T). and, for example, the separation distance can be set to a value of 1/2 or less, a value of 1/3 or less, a value of 1/5 or less, or a value of 1/10 or less of the length of the content in the X direction. there is.

In this embodiment, as shown in FIG. 1, in the state in which the holding part 31S is holding the container W, the distance from the center part in the Y direction of the container W to the 1st Y direction Y1 is The fall prevention body 35S is provided in the holding part 31S so that it may be located in the placed position. Moreover, the fall prevention body 35S is arrange|positioned so that it may overlap with all the areas of the up-down direction in the container W. In other words, the fall prevention body 35S is comprised so that the length of the up-down direction may become longer than the length of the up-down direction of the container W at least.

In the present embodiment, as shown in Fig. 2 , the fall prevention body 35S is a rod-shaped body extending downward at both ends of the cylinder arranged along the X direction, and the cylinder is expanded and contracted. (伸縮) is configured so that the position can be changed in the X direction. Thereby, the separation distance in the X direction of the pair of fall arresters 35S is extended, so that the fall arrester 35S does not interfere with the container W when the gripper 31S grips the container W. can prevent it And, after the holding part 31S grips the container W, the separation distance in the X direction of the pair of fall arresters 35S is reduced, and the fall arrester 35S is attached to the container W of the container W. It may be brought close to the opening Wa (eg, close enough to contact the semiconductor tray T).

2 and 4 , the container storage shelf 2 has a mounting table 99 arranged with the X direction as the longitudinal direction. The mounting table 99 is configured to be suspended from the ceiling. The container storage shelf 2 has a plurality of storage portions 21 arranged side by side in the X direction. In this embodiment, with respect to one container storage shelf 2, the two storage parts 21 are arrange|positioned side by side in the X direction. The mounting table 99 is provided with a guide 98 responsible for positioning the container W when the container W is accommodated in the storage unit 21 . The guide 98 is provided at the bottom of the container W on the mounting table 99 to support the four corners of the bottom part of the container W in a state where the container W is accommodated in the storage part 21 . They are installed in positions corresponding to the four corners, respectively. That is, in total, four guides 98 are provided in one accommodating part 21 . In addition, the guide 98 has a shape in which a part of a rectangular parallelepiped is cut out. Then, the guide 98 supports the container W in a state in which it is floated upward from the mounting table 99 while regulating the movement along the horizontal plane of the container W accommodated in the accommodating part 21 (FIG. see also 7). That is, the plurality of guides 98 hold the container W in a state where a space is formed between the bottom surface of the container W and the upper surface of the mounting table 99 and the container W is positioned. support

By the way, as mentioned above, at the time of conveyance of the container W by the conveyance apparatus 3, the semiconductor tray T falls from the opening part Wa of the container W by the fall prevention body 35S. is preventing However, after the conveying apparatus 3 finishes conveying the container W, that is, after the container W is accommodated in the storage part 21 of the container storage shelf 2, the conveying apparatus 3 is next In order to perform work and the like, the holding of the container W is released to be spaced apart from the receiving unit 21 . For this reason, the fall prevention body 35S is spaced apart from the position adjacent to the opening part Wa of the container W, and when the container storage shelf 2 swings for some reason, the opening part of the container W. There is a possibility that the semiconductor tray T may protrude from (Wa).

Accordingly, in the container storage facility 1 according to the present embodiment, as shown in FIG. 4 , a semiconductor tray from the opening Wa of the container W in a state in which the container W is accommodated in the storage part 21 . A regulating body 4a for regulating the protrusion of (T), a lower part to be pressed 4b pressed down by the bottom of the container W in a state where the container W is accommodated in the accommodating part 21; An interlocking mechanism 4 for interlocking the sieve 4a and the lower part 4b is provided. In the present embodiment, the regulating body 4a and the lower portion 4b constitute a part of the interlocking mechanism 4 . As mentioned above, in this embodiment, the opening part Wa which puts in and out the semiconductor tray T is formed in the state mutually opposing in the X direction in the container W, and a pair is formed. Accordingly, a pair of regulating bodies 4a are provided corresponding to the pair of openings Wa. Moreover, the regulating body 4a is formed in the elongate shape, and it is comprised so that the length of an up-down direction may become longer than the length of the up-down direction of the container W at least. In addition, in this embodiment, since the container storage shelf 2 has the several (two) accommodating part 21, with respect to each of these several accommodating part 21, the restraining body 4a and the lower part to be pressed. (4b) and the interlocking mechanism 4 are respectively provided separately. And in this embodiment, the linkage mechanism 4 is a link mechanism, and has the upper link body 4c, the lower link body 4d, and the fixed link body 4e. Each of these, the upper link body 4c, the lower link body 4d, and the fixed link body 4e is provided as a pair at regular intervals in the X direction.

The ends of the fixed link body 4e and the lower link body 4d are supported by a bracket 97 attached to the upper surface of the mounting table 99 . In detail, the fixed link body 4e is supported in the state fixed with respect to the bracket 97. As shown in FIG. On the other hand, the lower link body 4d is rotatably supported with respect to the bracket 97, and is pressed upward by a pressing member constituted by a spring (not shown) or the like.

The portion to be pressed 4b is disposed along the X direction. Each of the opposite ends in the X-direction of the lower portion 4b to be pressed is supported by a pair of end portions of the lower link body 4d. The lower part 4b to be pressed is constituted by a long roller whose longitudinal direction is in the direction of the axis of rotation. Accordingly, the lower part 4b to be pressed moves around the axis of movement along the X direction (the axis of rotation) located at the end of the lower link body 4d (the end opposite to the end supported by the bracket 97). It is configured to rotate. That is, the lower part 4b to be pressed is comprised so that it may rotate with rotation of the lower link body 4d. When the container W is not accommodated in the accommodating portion 21 and the lower portion 4b is not pressed down by the bottom of the container W, the lower link body 4d is urged upward by the spring. Therefore, an upward inclined posture is maintained with the end supported by the bracket 97 as the lower end. Accordingly, the lower portion 4b supported at the other end of the lower link body 4d (the end opposite to the end supported by the bracket 97) is pushed down by the bottom of the container W. When it is not, it will be in the state arrange|positioned at the position spaced upward from the mounting table 99.

The end of the upper link body 4c is rotatably supported at the end opposite to the end supported by the bracket 97 in the fixed link body 4e. The upper link body 4c is comprised so that it may become always the same inclination as the lower link body 4d when seen from the X direction. The upper link body 4c is formed shorter than the lower link body 4d (see also FIG. 5 and the like). Further, the upper link body 4c rotatably supports the end of the regulating body 4a at an end opposite to the end supported by the fixed link body 4e. The other end of the regulating body 4a is rotatably supported at a central distance from the end of the lower link body 4d. In this embodiment, the fixed link body 4e and the regulating body 4a are comprised so that it may become a standing posture along an up-down direction at all times. That is, the link mechanism as the interlocking mechanism in this embodiment is a parallel link. In addition, the "standing posture along the vertical direction" is a concept including a posture slightly inclined with respect to the vertical direction in addition to the posture along the vertical direction.

As shown in FIGS. 5 to 8 , the regulating body 4a is in the loading/unloading direction (X direction) of the semiconductor tray T with respect to the opening Wa of the container W in the state accommodated in the accommodating part 21 . ) adjacent to the regulating position RP that regulates the protrusion of the semiconductor tray T, and the regulating position RP is configured to be switchable to a retracted position SP separated from the position. That is, the regulating position RP is located on the outside of the X-direction (in/out direction of the semiconductor tray T) with respect to the opening Wa of the container W in the state accommodated in the accommodating part 21, the regulating body ( 4a) is the location where it is placed. The separation distance in the X direction between the regulating body 4a and the opening Wa of the container W in a state where the regulating body 4a is positioned at the regulating position RP is the content (in this embodiment, the semiconductor tray). (T)) can be set based on the length in the X direction, for example, the separation distance is less than 1/2 the length of the content in the X direction, 1/3 or less, 1/5 or less value, or a value of 1/10 or less.

Here, the regulating position RP and the retracted position SP will be described in detail.

First, the opening Wa will be described. 5 to 8 , the opening Wa is formed between a pair of sidewalls Wc arranged in the Y direction, and the area occupied by the opening Wa in the Y direction is Y It is a region between the inner surfaces of a pair of side walls Wc arranged in the direction.

The regulating position RP is a position closer to the opening Wa than the position of the end of the side wall Wc in the X direction, and refers to a position overlapping with the opening Wa in the Y direction.

In the present embodiment, the retracted position SP refers to a position that does not overlap with the opening Wa in the Y direction.

A broken line in FIGS. 5-8 is a line extending along the surface of the 1st Y-direction Y1 of the side wall Wc arrange|positioned in the 2nd Y-direction Y2 of the container W. As shown in FIG. In the present embodiment, this broken line is a boundary line indicating a boundary between a region occupied by the opening Wa in the Y direction and a region adjacent to this region in the second Y direction Y2. From this boundary line, the area|region of 1st Y direction Y1 is an area|region including the regulation position RP. And the area|region of the 2nd Y-direction Y2 from this boundary line is the area|region including the evacuation position SP.

The interlocking mechanism 4 places the regulating body 4a at the regulating position RP in a state in which the lower portion 4b is pressed down on the container W, and the lower portion 4b is pushed down on the container W. It is comprised so that the regulating body 4a may be located in the retracted position SP in the state where it is not. In addition, the regulating body 4a is comprised so that the longitudinal direction may become a standing posture along the up-down direction in the regulating position RP and the retracted position SP. And the interlocking mechanism 4 is comprised so that the restraining body 4a and the to-be-pressed part 4b may be interlocked, maintaining the standing posture with the restricting body 4a.

Next, operation|movement of the interlocking mechanism 4 when the container W is accommodated in the accommodating part 21 is demonstrated based on FIGS.

After the container W is positioned at the protruding position by the slide operation mechanism 33S of the conveying device 3 , the container W is lowered toward the accommodating portion 21 by the lifting operation mechanism 34S. As shown in Fig. 5, until the container W is accommodated, the lower portion 4b is not pressed down by the bottom portion of the container W, so the lower link body 4d is the lower link body. It is in the attitude|position inclined upward together with the upper link body 4c by the spring (not shown) which presses (4d) upward. Accordingly, at this point in time, the regulating body 4a is positioned at the retracted position SP (see Fig. 6 also). Therefore, the regulating body 4a does not interfere with the storage of the container W. When the container W is lowered, the bottom part of the container W comes into contact with the lower part 4b from above.

From the state of Fig. 5, when the container W is further lowered, the bottom of the container W further lowers the lower part 4b to be pressed, and the state shown in Figs. 7 and 8 is obtained. While the container W descends along the up-down direction by the raising/lowering operation mechanism 34S, the lower link body 4d uses the edge part supported by the bracket 97 as a fulcrum, and rotates downward. Accordingly, by this operation, the regulating body 4a supported by the lower link body 4d is displaced downward and displaced in the first Y direction Y1. Thereby, the regulating body 4a is switched from the retracted position SP to the regulating position RP. Moreover, while the container W descends along the up-down direction, the to-be-pressed part 4b pushed down by this is displaced downward and 1st Y-direction Y1 by rotational motion. However, as described above, the under-pressure portion 4b is constituted by a roller and is rotatable about the X-direction axis. Accordingly, even if the part under pressure 4b moves relative to the bottom of the container W (displaces in the first Y direction Y1), the part under pressure 4b rotates around the axis of rotation along the X direction, Friction between them can be reduced. Therefore, it is rare that particles are generated due to the bottom part of the container W being rubbed by the under-pressure part 4b or the like. 6 and 8, in the present embodiment, the region occupied by the regulating body 4a positioned at the regulating position RP and the regulating body 4a positioned at the retracted position SP are occupied. It is comprised so that the area|region to carry out may have overlapping parts in the X direction (out-and-out direction). With this configuration, the length in the X direction with respect to the passage region of the regulating body 4a when the regulating body 4a moves between the retracted position SP and the regulating position RP can be suppressed to be small. Thereby, since the space to be ensured in order to install the regulating body 4a may be small, it becomes advantageous in the point of installation space.

In this way, in a series of operations shown in FIGS. 5 to 8 , the fall prevention body 35S provided in the conveying device 3 is disposed until the container W is completely accommodated in the storage unit 21 until the container ( It is located in the position adjacent to the opening part Wa of W). Thereby, during the time of conveyance by the conveying apparatus 3 and the period until the container W is completely accommodated, the semiconductor tray T is prevented from falling from the container W by the fall prevention body 35S. can be prevented And after the container W is completely accommodated in the accommodating part 21, protrusion of the semiconductor tray T from the container W can be controlled by the regulating body 4a. As shown in FIG. 8, in this embodiment, when the conveying apparatus 3 accommodates the container W in the accommodating part 21, the position of the fall prevention body 35S is located in the regulating position RP It is comprised so that it may become the position which has the part which overlaps in the X direction with the restricting body 4a which is said. With such a configuration, the area in the X direction occupied by the fall prevention body 35S and the regulating body 4a in the storage part 21 when the container W is stored in the storage part 21 is can be made small As a result, space saving can be achieved in the X direction.

[Second embodiment]

Next, the container storage facility which concerns on 2nd Embodiment is demonstrated. In 2nd Embodiment, compared with 1st Embodiment, the structure of an interlocking mechanism is different, and the other structure is the same as 1st Embodiment. Below, it demonstrates centering around the point different from 1st Embodiment. The points not specifically described are the same as in the first embodiment.

As shown in FIG. 9 , in the container storage facility according to the second embodiment, the semiconductor tray T from the opening Wa of the container W in the state where the container W is accommodated in the storage part 21 . A regulating part 5a for regulating the protrusion, a lower part 5b pressed down by the bottom of the container W in a state where the container W is accommodated in the accommodating part 21, and a regulating part 5a and an interlocking mechanism 5 for interlocking the lower part 5b with the lower part 5b. In the second embodiment, the interlocking mechanism 5 is constituted by a mechanism using the principle of a lever (hereinafter referred to as a lever mechanism).

The interlocking mechanism 5 includes a connecting portion 5d connecting the regulating portion 5a and the under-pressured portion 5b, and the regulating portion 5a, the under-pressured portion 5b, and the connecting portion 5d serving as a rotation center. It has a fulcrum axis 5c. The part to be pressed 5b and the fulcrum axis 5c are arranged along the X direction. And the control part 5a and the connection part 5d are arrange|positioned at the X-direction edge part of these to-be-pressed part 5b and the fulcrum axis 5c.

In the second embodiment, as shown in FIGS. 10 and 11 , the interlocking mechanism 5 is configured such that the regulating portion 5a and the connecting portion 5d form an L-shape when viewed from the X direction. Moreover, in 2nd Embodiment, the restriction|regulation part 5a is formed long enough compared with the connection part 5d. Accordingly, as shown in FIGS. 10 and 11 , with respect to a moment around the fulcrum axis 5c due to the weight of the interlocking mechanism 5 , in the direction along the first X direction X1 When viewed (hereinafter, the same applies to the rotational direction), the clockwise moment by the regulating portion 5a becomes larger than the counterclockwise moment by the connecting portion 5d. Therefore, when the lower part 5b is not pushed down by the container W, the interlocking mechanism 5 tends to rotate clockwise as a whole. In the second embodiment, a first spring (not shown) is provided around the fulcrum shaft 5c to press the regulating portion 5a counterclockwise, so that the lower portion 5b is pressed down by the container W. In the non-existent state, the entire interlocking mechanism 5 is configured to maintain an inclined posture (refer to FIG. 10 ). And the fulcrum axis 5c is arrange|positioned at the position which set the distance in the 1st Y direction Y1 from the boundary line shown by the broken line in the figure.

When the container W is accommodated in the accommodating part 21, as shown in FIG. 10, the bottom part of the descending container W contacts the to-be-pressed part 5b located in the retracted position SP. At this time, the part located above the lower end of the container W in the regulating part 5a is located in the 2nd Y direction Y2 rather than a boundary line. In 2nd Embodiment, this state is a state in which the regulating part 5a is located in the retracted position SP.

When the bottom part of the container W further presses down the to-be-pressed part 5b, the linkage mechanism 5 will be in the state of FIG. When the container W presses down the part to be pressed 5b, a counterclockwise moment about the fulcrum axis 5c is applied, and the linkage mechanism 5 rotates counterclockwise around the fulcrum axis 5c. rotate to Thereby, the regulating part 5a turns into the standing posture along the up-down direction from the inclination posture. The connecting portion 5d is in a horizontal posture along the upper surface of the mounting table 99 . At this time, the whole of the regulating part 5a is located at a position overlapping in the Y direction with the fulcrum axis 5c arranged at a position in the first Y direction Y1 rather than the boundary line. Therefore, when the container W presses down the to-be-pressed part 5b, the regulating part 5a will change the position from the retracted position SP to the regulating position RP. The regulating part 5a located in the regulating position RP approaches in the X direction with respect to the opening part Wa, and regulates that the semiconductor tray T protrudes from the opening part Wa of the container W. And, around the fulcrum axis 5c, in addition to the first spring for biasing the regulating part 5a in a counterclockwise direction, a second spring (not shown) for biasing the connecting part 5d in a clockwise direction is also provided. Accordingly, after the container W is accommodated in the storage part 21, when the lower part 5b is not pushed down by the container W, the interlocking mechanism 5 is activated by the second spring. rotate clockwise. Therefore, the regulating part 5a becomes an attitude|position inclined in the 2nd Y direction Y2 from a standing posture. That is, the clockwise moment by the regulating part 5a, the counterclockwise moment by the connecting part 5d, the counterclockwise moment by the first spring, and the clockwise moment by the second spring act with each other. Thus, the balance is maintained, and the interlocking mechanism 5 is maintained in the inclined posture shown in FIG. 10 . And, instead of the configuration in which the interlocking mechanism 5 is held in the inclined posture by the first spring, a rotation regulating part for regulating the clockwise rotation of the interlocking mechanism 5 in the inclined posture by its own weight is attached to the fulcrum shaft 5c. It is installed and it is good also as a structure which hold|maintains the interlocking mechanism 5 in an inclination attitude|position. In addition, instead of the configuration in which the second spring urges the interlocking mechanism 5 from the standing posture to the inclined posture in the second Y direction Y2, the interlocking mechanism 5 is raised by the weight of the interlocking mechanism 5 . It is good also as a structure which presses so that it may become an attitude|position inclined to the 2nd Y direction Y2 from an attitude|position. In this case, the angle connecting the regulating part 5a and the connecting part 5d is adjusted so that the regulating part 5a is inclined in the second Y direction Y2 in a state where it is positioned at the regulating position RP. do.

[Other embodiment]

(1) In the above-described embodiment, the retracted position SP is a position spaced apart in the second Y direction Y2 from the area occupied by the opening Wa in the Y direction, and is a position that does not overlap the area. An example has been described. However, the evacuation position is not limited to this example. That is, the retracted position should just be a position separated from the regulating position. For example, while overlapping with the area|region occupied by the opening part Wa in the Y direction, the retraction position may be spaced apart in the X direction (outside the X direction) with respect to the regulation position RP.

(2) In the above-described embodiment, the region occupied by the regulating body 4a positioned at the regulating position RP and the region occupied by the regulating body 4a positioned at the retracted position SP are in the X direction (in and out) direction), an example configured to have overlapping portions has been described. Moreover, when the conveying apparatus 3 accommodates the container W in the accommodating part 21, the position of the fall prevention body 35S is in the X direction with the regulating body 4a located in the regulating position RP. The example comprised so that it might become a position which has overlapping parts in this was demonstrated. "Duplicate" as used herein includes the case where all of the target elements overlap, as well as the case where they partially overlap. However, it is more preferable that all of the regulating positions RP and all of the retracted positions SP are constituted so as to overlap positions in the X-direction (in/out direction). That is, the arrangement area in the X direction of the regulating body 4a positioned at the regulating position RP and the arrangement area in the X direction of the regulating body 4a positioned at the retracted position SP are configured to completely overlap. more preferably. In this case, the area in the X direction occupied by the target element can be suppressed to be small, which is more advantageous in terms of installation space. Similarly, the position of the fall prevention body 35S when the conveying apparatus 3 accommodates the container W in the accommodating part 21 and the regulating body 4a located at the regulating position RP are in the X direction. Therefore, it is preferable that all of them are overlapped. That is, when the conveying apparatus 3 accommodates the container W in the accommodating part 21, the arrangement area|region of the X direction of the fall prevention body 35S, and the restrictor 4a located at the restriction position RP. It is preferable that the arrangement region in the X direction is configured so as to completely overlap.

(3) In the above-described embodiment, an example in which the regulating bodies 4a and 5a positioned at the regulating position RP are configured to be in a standing posture along the vertical direction has been described. However, the posture of the regulating body does not need to be a standing posture. That is, the regulating body positioned at the regulating position may overlap all of the vertical regions in the opening of the container. Even in this case, it is possible to regulate by the regulating body so that all of the contents accommodated in the container do not protrude out of the container.

(4) In the above embodiment, the example in which the two storage parts 21 are arrange|positioned side by side in the X direction with respect to the one container storage shelf 2 was demonstrated. However, it is not limited to this, Three or more storage parts 21 may be arrange|positioned side by side in the X direction with respect to one container storage shelf 2 . According to the technique according to the present disclosure, the space to be secured for installing the regulating body can be made small, whereby space saving can be achieved. Thereby, since the effect of space saving is exhibited with respect to each of a plurality of accommodating parts, the more the container storage shelf has many accommodating parts, the storage efficiency as a whole facility can be improved significantly.

(5) In the above-described embodiment, an example in which the interlocking mechanism includes a link mechanism or a lever mechanism has been described. However, it is not limited to such a configuration, and the interlocking mechanism may be configured such that the regulating body and the part to be pressed are interlocked, and the regulating body can be switched between the regulating position and the retracted position.

(6) In the above-mentioned embodiment, the example comprised so that the container W might be conveyed by the conveyance apparatus 3 and it might be accommodated in the storage part 21 of the container storage shelf 2 was demonstrated. However, it is not limited to this configuration, and the container storage shelf may be a container in which containers are accommodated by a transport vehicle traveling on the floor. In addition, the container storage shelf may be a container in which a container is artificially accommodated by a human hand.

(7) In the above-described embodiment, the example in which the container storage shelf 2 was suspended and supported from the ceiling was demonstrated. However, it is not limited to such a structure, The container storage shelf may be provided on a floor surface.

(8) The above-described embodiment is merely an illustration. This disclosure is not limited to each of the above embodiments, and various modifications can be made without departing from the gist thereof. The above embodiments can be combined within a range that does not cause contradiction.

(9) In the second embodiment, in order to maintain the inclined posture of the interlocking mechanism 5, the first and second springs are provided in the regulating part 5a, and the clockwise moment by the regulating part 5a is , the counterclockwise moment by the connecting portion 5d, the counterclockwise moment by the first spring, and the clockwise moment by the second spring act with each other to maintain the balance. However, it is not limited to such a structure, You may be comprised so that the balance may be maintained by one spring, and the inclined attitude|position of the linkage mechanism may be maintained. That is, the spring applies a force in a direction in which the regulating part stands up (a direction in which the regulating part is positioned at the regulating position) in a state in which the regulating part is located in the retracted position, and in a state in which the regulating part is positioned in the regulating position, the regulating part is placed in the regulating position. ) may be configured to apply a force in the direction (direction positioned at the retracted position).

[Summary of the above embodiment]

Hereinafter, the outline|summary of the container storage facility demonstrated in the above is demonstrated.

The container storage facility includes a container storage shelf having a storage unit for accommodating the container, the container has an opening on a side surface, and is configured to be able to put contents in and out of the opening, wherein the container storage facility includes the storage unit a regulating body for regulating the protrusion of the contents from the opening of the container when the container is stored in the container; and an interlocking mechanism for interlocking the regulating body and the under-pressured part, wherein the regulating body is disposed outside the opening of the container in a state of being accommodated in the accommodating part, in a direction in which the contents are put in and out, and the contents a regulating position for regulating the protrusion of the regulating unit and a retractable position spaced apart from the regulating position so that the position can be switched, wherein the interlocking mechanism moves the regulating body to the regulating position in a state in which the under-pressured part is pressed down to the container. It is configured to position the regulating body in the retracted position in a state in which the under-pressed portion is not pressed down on the container.

According to this configuration, the regulating body and the under-pressured portion are interlocked by the interlocking mechanism. This interlocking mechanism can switch the position of the regulating body between the regulating position and the retracted position spaced apart from the regulating position according to the state in which the lower part to be pressed by the bottom of the container and the state in which the lower part is not depressed. . When the part to be pressed is not depressed by the bottom of the container, that is, when the container is not accommodated in the housing, the regulating body is located in the retracted position, and when the part to be pressed is depressed by the bottom of the container, that is, When the container is accommodated in the storage unit, the regulating body is positioned at the regulating position. Therefore, before the container is accommodated, the restraining body is in the retracted position, so that the restraining body does not interfere with the container being accommodated. On the other hand, when the container is accommodated, the lower part is pushed down by the bottom of the container, and the regulating body is moved to the regulating position in association with the pushing down of the lower part. In this way, regardless of the driving means, the regulating body can be switched between the regulating position and the retracted position by the operation to accommodate the container and the operation to take it out.

The regulating position is a position that is disposed outside the container opening in the state accommodated in the storage unit in the loading/unloading direction (for example, close to the opening in the loading/unloading direction) to regulate the protrusion of the contents. After being accommodated in the storage unit, the movement of the contents of the container in the withdrawing and unloading direction is regulated by the regulating body at the regulating position. Therefore, even when vibration occurs in the container, it is possible to suppress the contents from jumping out of the container.

It is advantageous in terms of installation space because it is not necessary to provide a driving source such as a motor or an air cylinder as much as the driving means is not employed. Further, since wiring or piping for supplying driving electric power or air to the driving source is unnecessary, the configuration can be simplified.

Thus, according to this structure, it is advantageous in the point of installation space, and the container storage facility which can regulate the protrusion of the content from a container with a simple structure can be obtained.

Moreover, it is preferable that the area|region occupied by the said regulating body located in the said regulating position and the area|region occupied by the said restrictor located at the said retracted position may be comprised so that it may have an overlapping part in the said withdrawing-in-and-out direction.

According to this configuration, the length of the regulating body in the passage region of the regulating body in the case of moving between the retracted position and the regulating position can be suppressed to be small. Thereby, since the space to be secured for installing the regulating body may be small, it is advantageous in terms of the installation space.

Further, there is provided a conveying device for conveying the container to the accommodating unit, wherein, when the container is conveyed, the conveying device is disposed outside the opening in the container with respect to the opening in the container to prevent the contents from falling. It is preferable to have a fall prevention body to prevent.

According to this configuration, since the conveying device has a drop preventing member disposed outside the opening in the container in the loading/unloading direction (for example, close to the opening in the loading/unloading direction), the conveying device is Even in the case of vibration, it is possible to prevent the contents from jumping out of the container and falling. Further, after the container is transported to the accommodating unit by the conveying device and the container is accommodated in the accommodating unit, the protrusion of the contents from the container is regulated by the regulating body provided in the container accommodating shelf. Accordingly, according to this configuration, it is possible to prevent the contents from jumping out of the container during transport of the container and after storage of the container.

Further, when the conveying device accommodates the container in the storage unit, the position of the fall prevention body is configured to be a position having a portion overlapping with the control body located at the control position in the loading/unloading direction, It is preferable to have

According to this structure, since the fall prevention body when the conveying apparatus accommodates the container in the accommodating part has a portion overlapping with the regulating body located at the regulating position in the loading/unloading direction, when storing the container in the accommodating part, The area in the loading/unloading direction occupied by the fall prevention body and the regulating body can be made small in the loading/unloading direction, so that the space utilization efficiency is good.

In addition, the regulating body is formed in a long shape, and is configured such that its longitudinal direction is in a standing posture along an up-down direction in the regulating position and the retracted position, and the interlocking mechanism is configured to be in the standing posture to the regulating body. It is preferable that the regulating body and the lower part to be pressed are configured to interlock while maintaining the .

According to this structure, since the regulating body maintains the standing posture at both the regulating position and the retracted position, the area occupied by the regulating body on the container storage shelf in a plan view can be made small. Therefore, according to this structure, space utilization efficiency can be made further more favorable.

Moreover, it is preferable that a pair of the said opening part is formed in the state mutually opposing in the said input/removal direction in the said container, and it is preferable that a pair of the said regulating body is provided corresponding to the said opening part.

According to this configuration, even in the case of using a container for accommodating the contents, which has a pair of openings facing each other in the loading/unloading direction, which is convenient for use, since a restrictor is provided corresponding to each opening, which opening It is also possible to regulate the protrusion of the contents from the

In addition, the container storage shelf has a plurality of the accommodating parts arranged side by side in the withdrawing and withdrawing direction, and in each of the plurality of accommodating parts, the regulating body, the under-pressed part, and the interlocking mechanism are separately provided. desirable.

According to this configuration, it is possible to provide a regulating body for regulating the protrusion of the contents from the container with a simple structure that does not use a driving means for each of the plurality of accommodating portions. Thereby, compared with the structure which switches the positions of each regulating body with respect to a some accommodating part by a drive means, it can be set as the structure simple as a whole facility. Moreover, since the effect of space saving by not providing a drive means is exhibited with respect to each of a some accommodating part, the space utilization efficiency as a whole installation can be improved significantly.

1: Container storage facility
2: container storage shelf
3: conveying device
3R: drive drive
4: peristaltic mechanism
4a: Regulatory bodies
4b: under pressure
21: storage unit
35S: fall prevention body
90: running rail
RP: Regulatory Position
SP: Evacuation position
T: semiconductor tray (contents)
W: courage
Wa: opening
X: X direction (in/out direction)

Claims (8)

A container storage facility comprising:
It includes a container storage shelf having a storage unit for accommodating the container,
The container has an opening on the side, and is configured to be able to put the contents in and out from the opening,
The container storage facility,
a regulating body for regulating the protrusion of the contents from the opening of the container in a state in which the container is accommodated in the accommodating part;
a lower part to be pressed by the bottom part of the container in a state in which the container is accommodated in the receiving part; and
Interlocking mechanism for interlocking the regulating body and the under-pressured part
further comprising,
The regulating body moves in a direction orthogonal to the loading/unloading direction of the contents in a plan view, and is disposed outside the opening of the container in the state accommodated in the storage unit in the loading/unloading direction of the contents. A regulating position regulating the protrusion of the contents, and a position switchable from the regulating position to a evacuation position spaced apart,
The interlocking mechanism places the regulating body in the regulating position in a state in which the under-pressured part is pressed down on the container, and places the regulating body in the retracted position in a state in which the under-pressured part is not pressed down on the container. consisting of a list,
container storage equipment. According to claim 1,
The storage unit is configured to receive the container in a state facing the opening of the container in a direction orthogonal in plan view in a shelf inner longitudinal direction that is a storage direction of the container with respect to the storage unit, . According to claim 1,
The container storage facility is configured such that a region occupied by the regulating body positioned in the regulating position and an region occupied by the regulating body positioned in the retracted position have overlapping portions in the withdrawing and receiving direction. 3. The method of claim 1 or 2,
Containing a conveying device for conveying the container to the accommodating unit,
Container storage equipment, wherein the conveying device includes a drop preventing member disposed outside the opening in the container in the loading/unloading direction to prevent the contents from falling when the container is conveyed. A container storage facility comprising:
a container storage shelf having a storage unit for accommodating the container; and
a conveying device conveying the container to the accommodating unit;
including,
The container has an opening on the side, and is configured to be able to put the contents in and out from the opening,
The container storage facility,
a regulating body for regulating the protrusion of the contents from the opening of the container in a state in which the container is accommodated in the accommodating part;
a lower part to be pressed by the bottom part of the container in a state in which the container is accommodated in the receiving part; and
Interlocking mechanism for interlocking the regulating body and the under-pressured part
further comprising,
The regulating body includes a regulating position disposed outside the opening in the container in a state of being accommodated in the accommodating portion in a direction in which the contents are put in and out and regulating the protrusion of the contents, and a retraction spaced apart from the regulating position. It is configured so that the position can be switched by position,
The interlocking mechanism places the regulating body in the regulating position in a state in which the under-pressured part is pressed down on the container, and places the regulating body in the retracted position in a state in which the under-pressured part is not pressed down on the container. is composed of
The conveying device includes a drop preventing member disposed outside the opening of the container in the loading/unloading direction to prevent the contents from falling when the container is transported,
When the transport device accommodates the container in the accommodating unit, the position of the fall prevention body is configured to overlap with the regulating body positioned at the regulating position in the loading/unloading direction,
container storage equipment. 3. The method of claim 1 or 2,
The regulating body is formed in a long shape, and is configured such that the longitudinal direction of the regulating body becomes a standing posture along the vertical direction in the regulating position and the retracted position,
and the interlocking mechanism is configured to interlock the regulating body and the under-pressured part with the regulating body maintaining the standing posture. 3. The method of claim 1 or 2,
A pair of the openings are formed in a state opposite to each other in the loading/unloading direction in the container,
A container storage facility in which a pair of the regulating body is provided corresponding to the opening. 3. The method of claim 1 or 2,
The container storage shelf includes a plurality of the storage units arranged side by side in the loading and unloading direction,
The container storage facility in which the said regulating body, the said under-pressured part, and the said interlocking mechanism are respectively provided separately for each of the said several storage part.

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