KR102069134B1 - Dust processing device - Google Patents

Abstract

The present invention discloses a scrubber dust removal apparatus which can prevent foreign matters such as dust contained in exhaust gas from being attached to the inside of a heat exchanger automatically while the equipment is in operation.
The present invention is inserted into the inner tube (11) of the heat exchanger (10) through which the exhaust gas and the inner tube (11) to be movable in the longitudinal direction and at least one side of the inner tube (11) The dust removal means 20 provided with the dust removal part 21 which contacts the side surface, the movable plate 30 which fixes the one end of the said dust removal means 20, and the said dust removal means 20 length By vibrating means 50 for generating vibration in the movable plate 30 to move along the direction, the dust removing means 20 can automatically remove the foreign matter attached to the inner tube (11). .

Description

Scrubber Dust Removal Device {DUST PROCESSING DEVICE}

The present invention relates to a scrubber dust removing apparatus, and more particularly, to a scrubber dust removing apparatus that prevents powder generated in a semiconductor manufacturing process or a display process from blocking a flow path.

In general, semiconductor manufacturing processes are carried out at high temperatures using noxious gases in the process chamber. At this time, only about 30% of the noxious gas is deposited on the surface of the wafer, and some unreacted gas is discharged. In addition, during the process, a large amount of various ignitable gases, corrosive foreign substances, and gases containing a flow component are generated in the process chamber.

For the treatment of such exhaust gas, a scrubber is installed to purify the gas discharged from the process chamber and discharge it to the atmosphere. The gas passing through the scrubber is discharged as exhaust gas of about 30 degrees through a heat exchanger.

At this time, the solid by-product of the exhaust gas is fixed to the internal flow path of the heat exchanger to increase the exhaust pressure as the inner diameter of the flow path becomes narrower. To prevent this, the operator is inconvenient to regularly shut down the equipment and remove the fixed impurities. The scrubber is a structure in which the powder is sucked at a negative pressure, and when the pressure difference between the upper and lower ends of the passage is blocked, the operation of the scrubber is stopped, and the operation of the entire manufacturing line is stopped.

Document 1. Korean Patent Office, Publication No. 10-2007-0069319, “Second Burn-Wet Gas Scrubber in Semiconductor Manufacturing Process”

An object of the present invention devised in view of the above point is to provide a scrubber dust removal apparatus that can automatically remove foreign substances such as dust contained in the exhaust gas without interruption of the installation.

Still another object of the present invention is to provide a scrubber dust removal device that can improve the operation performance of the facility by preventing foreign matters such as dust from being stacked inside the exhaust gas movement pipeline of the heat exchanger.

Still another object of the present invention is to provide a scrubber dust removing apparatus capable of automatically removing dust stacked in a pipeline through which exhaust gas is moved.

Scrubber dust removal apparatus for achieving the object of the present invention as described above is the inner tube of the heat exchanger 10 through which the exhaust gas; A dust removal means inserted into the inside of the inner tube so as to be movable along the length direction and having a dust removing unit provided on at least one side in contact with the inner surface of the inner tube; A movable plate for fixing one end of the dust removing means; Vibration generating means for generating vibration in the movable plate such that the dust removing means moves along the longitudinal direction; It includes.

In addition, more preferably, the dust removing means includes an insertion portion formed in a coil shape provided with at least one side of the dust removing portion and inserted into the inner tube; And a fixing part provided at one end of the insertion part and having an extended cross section to be fixed to the movable plate.

In addition, more preferably, the movable plate is configured by combining the upper plate and the lower plate provided with a plurality of through holes communicating with the inner tube, and the fixing part is fixed between the upper plate and the lower plate.

In addition, more preferably, a guide member for fixing the movable plate to be movable along the longitudinal direction of the inner tube is further included.

In addition, more preferably, the guide member is integrally formed with the outer tube of the heat exchanger.

In addition, more preferably, the guide member is detachably mounted to one side of the outer tube of the heat exchanger, the coupling plate having a communication port communicating with the inner tube; A guide shaft for guiding the movable plate 30; And an elastic member mounted to the guide shaft to elastically support the movable plate.

In addition, more preferably, the vibration generating means is a drive motor for generating a rotational force; A rotating shaft that receives the rotational force of the drive motor to rotate; And a movable cam mounted to the rotating shaft to be in contact with the movable plate and operating the movable plate.

Thus, the scrubber dust removal apparatus according to the present invention can automatically remove the foreign matter adhering to the exhaust gas flow path even when the equipment is in operation, thereby improving productivity.

In addition, the scrubber dust removing apparatus according to the present invention can prevent foreign matters such as dust from adhering to the inner surface of the inner tube of the heat exchanger through which the exhaust gas is introduced, thereby improving heat exchange performance, thereby preventing environmental pollution. Is improved.

In addition, the scrubber dust removal apparatus according to the present invention is made of a dust removal means for removing the dust attached to the heat exchanger inner tube in the form of a coil, the exhaust gas can be smoothly moved even during the dust removal is improved work performance.

In addition, the scrubber dust removal apparatus according to the present invention has an effect that the work convenience is improved because the foreign matter contained in the exhaust gas is automatically removed to be attached to the inside of the tube.

1 is a perspective view showing a scrubber dust removal device is an embodiment of the present invention,
Figure 2 is a perspective view showing a cross-sectional view of the dust removal means mounting portion shown in FIG.
3 is a cross-sectional view showing the scrubber dust removal apparatus shown in FIG.
4 is a cross-sectional view showing a state in which dust removal means is operated;
Figure 5 is a cross-sectional view showing a scrubber dust removal device according to another embodiment of the present invention.

DETAILED DESCRIPTION Hereinafter, the present invention will be described in detail with reference to the preferred embodiments of the present invention and the accompanying drawings, in which like reference numerals refer to like elements.

Herein, 1) shapes, sizes, ratios, angles, numbers, and the like shown in the accompanying drawings may be changed to be rough. 2) Since the drawings are shown with the eyes of the observer, the direction or position for describing the drawings may be variously changed according to the positions of the observers. 3) The same reference numerals may be used for the same parts even if the reference numbers are different. 4) When 'includes, has, is made', etc., other parts may be added unless 'only' is used. 5) When described in the singular, the plural can also be interpreted. 6) Even if the shape, size comparison, positional relationship, etc. are not described as 'about, substantial', etc., they are interpreted to include a normal error range. 7) Although terms such as 'after, before, and after, and then at this time' are used, they are not used to limit the temporal position. 8) Terms such as 'first', 'second', and 'third' are merely used selectively, interchangeably or repeatedly for convenience of division and are not to be interpreted in a limiting sense. 9) When the positional relationship of two parts is described as: on, on, on, under, beside, on the side, etc., one or more other parts between the two parts, unless "baro" is used. This may be located. 10) When parts are electrically connected by 'or', they are interpreted to include not only parts but also combinations, but only when parts are electrically connected by 'or'.

Hereinafter, an example of a scrubber dust removing device will be described with reference to a specific embodiment.

1 is a perspective view showing a scrubber dust removal apparatus is a preferred embodiment of the present invention, Figure 2 is a perspective view showing a cross-sectional view of the dust removal means mounting portion shown in Figure 1, Figure 3 is a scrubber dust shown in Figure 1 4 is a cross-sectional view showing a removing device, and FIG. 4 is a cross-sectional view showing a state in which dust removing means is operated.

1 to 4, the scrubber dust removal apparatus according to the preferred embodiment of the present invention is connected to the scrubber 1 of the heat exchanger 10, the heat exchanger 10 receives the exhaust gas to perform heat exchange Dust removal means 20, which is attached to the end to remove the dust, the movable plate 30 on which the dust removal means 20 is mounted, the guide member 40 supporting the movable plate 30, the movable plate 30 Vibration generating means 50 for applying vibration to the.

The heat exchanger 10 is composed of an outer tube 12 into which an external material for conducting heat exchange is introduced, and a plurality of inner tubes 11 inserted into the outer tube 12.

The outer tube 12 is provided with an inlet and a discharge port through which heat exchange material is introduced, and the inside of the inner tube 11 maintains a sealed state with the inside of the outer tube 12. That is, the exhaust gas flowing inside the inner tube 11 is heat-exchanged through the surface of the inner tube 11 without mixing heat exchange material introduced into the outer tube 12.

At one end of the heat exchanger 10, the guide member 40 is detachably mounted. One end of the heat exchanger 10 is provided with a flange (13). The guide member 40 is also provided with a coupling plate 42 in contact with the flange 13. The fastening means is fastened in a state in which the flange 13 and the coupling plate 42 are coupled to each other. Fastening means may be applied to a variety of fastening members that can temporarily fix the flange 13 and the coupling plate 42. Preferably, the configuration of the bolt 15 and the nut 14 is described as an example, but various clamps and the like may also be applied. The flange 13 and the coupling plate 42 are provided with fasteners 13a and 14a into which the bolts 15 can be inserted, respectively. When a female screw is processed on the inner surface of any one of the fasteners, a structure capable of fastening the bolt 15 without using the nut 14 may be applied. When the coupling groove is provided along the upper surface of the coupling plate 42 and the lower surface of the flange 13, the coupling plate 42 and the flange are clamped by using a clamp that closely couples the coupling plate 42 and the flange 13. (13) can be fixed, and the fastener for fastening the bolt 15 and the nut 14 can be omitted.

As described above, in addition to the structure in which the guide member 40 is detachably mounted at one end of the heat exchanger 10, as illustrated in FIG. 5, the guide member 40 has one side of the outer tube 12 of the heat exchanger 10. It is also possible to structure integrally with the. As shown in FIG. 5, the coupling plate 42 and the flange 13 do not have the same structure as the preferred embodiment of the present invention, and are detachably mounted to one side of the outer tube 12 of the heat exchanger 10. When the coupling plate 42 of the guide member 40 is integrally formed inside the outer tube 12, a separate fastening means for fixing the guide member 40 to the outer tube 12 is not necessary.

One side of the heat exchanger 10 inner tube 11 is connected to communicate with the scrubber 1, the other side is formed so that the exhaust gas is discharged to the outside. The other side of the inner tube 11 is located of the dust removal means 20.

The guide member 40 is formed in a tubular shape so that the inner tube 11 of the heat exchanger 10 is located inside. As shown in the figure, it is preferable to be formed to have the same shape as the outer tube 12 of the heat exchanger 10, but if the inner tube 11 is a tubular shape accommodated therein, It is also possible.

Guide member 40 is provided with a coupling plate 42 coupled to the outer tube 12 on one side. The coupling plate 42 may be further formed to improve the sealing performance. It is possible to set a step or add a sealing member to prevent the outflow of exhaust gas.

In the middle region of the guide member 40 is provided with a through hole so that the rotary shaft 52 to be described later is inserted. The rotating shaft 52 is inserted into the through hole, and the bush 54 is attached to the contact surface between the rotating shaft 52 and the through hole, thereby reducing the loss of friction and improving the sealing degree.

Although not shown, the guide member 40 is connected to a discharge line for discharging the exhaust gas to the outside.

A guide shaft 43 protruding to a predetermined height is formed at an inner portion of the coupling plate 42 of the guide member 40. The elastic member 44 is fitted to the guide shaft 43. The elastic member 44 elastically supports the movable plate 30.

The dust removing means 20 is a coil consisting of an inserting portion 22 inserted into the inner tube 11 of the heat exchanger 10 and a fixing portion 23 having an extended cross section to be fixed to the movable plate 30. It is composed of shapes. Insertion portion 22 is provided with a portion of the dust removal portion 21 is a radius adjusted to contact the inner surface of the inner tube (11). The dust removal unit 21 serves to remove dust attached to the inner surface of the inner tube 11 while reciprocating along the longitudinal direction while being in contact with the inner surface of the inner tube 11. 21 is preferably provided in the entire length of the insertion portion 22, but may be formed only in a predetermined section, or may be formed in a plurality of sections repeatedly at a predetermined interval according to the designer's request. Dust removal means 20 is described as an example provided in the form of a coil, but may be configured in a tubular shape provided with protrusions along the outer circumferential surface. That is, the dust removing means 20 is made of a tubular shape having an outer diameter close to the inner surface of the inner tube 11, and by moving a plurality of projections in the tubular outer peripheral surface along the longitudinal direction by vibrating the inner It may also be configured to remove dust adhering to the inner side of the tube 11.

The movable plate 30 is configured in a plate shape having an outer diameter corresponding to the inner side surface of the guide member 40. The movable plate 30 is installed to be movable in the longitudinal direction along the inner surface of the guide member 40. The movable plate 30 is composed of an assembly of an upper plate 32 and a lower plate 33 provided with a plurality of through holes 31 located on the same line as the inner tube 11. The dust removing means 20 is inserted into the through hole 31 of the lower plate 33, and the fixing part 23 is inserted and fixed between the upper plate 32 and the lower plate 33. The upper plate 32 and the lower plate 33 may be of a structure that is fastened or joined by a separate fastening means. Alternatively, the upper plate 32 may be formed on the lower plate 33 without a separate fastening means.

The through holes 31 provided in the upper plate 32 and the lower plate 33 constituting the movable plate 30 preferably have the same or expanded inner diameter as the inner tube 11, and the inner tube 11 and Located on the same line.

The upper plate 32 and the lower plate 33 is formed with a through hole through which the guide shaft 43 is inserted. The guide shaft 43 is inserted into the through hole so that the through hole 31 and the inner tube 11 are always positioned on the same line. An elastic member 44 is inserted between the lower plate 33 and the coupling plate 42.

Vibration generating means 50 is a drive motor 51 for generating a rotational force, a rotating shaft 52 that is rotated by receiving the rotational force of the drive motor 51, and is installed on the rotating shaft 52 and in contact with the movable plate 30 It consists of a movable cam 53. The movable cam 53 is composed of a cam structure to move the position of the movable plate 30. The power transmission member 55 may be mounted between the drive shaft and the rotation shaft 52 of the drive motor 51. At this time, the power transmission member 55 may be composed of a coupling structure or a reducer to simply transmit the rotational force. It may be mounted on the outer circumferential surface of the guide member 40 by using the bracket of the drive motor 51 and the power transmission member 55.

The drive motor 51 is not limited to an electric motor that generates power by receiving power, and refers to all driving means for generating kinetic energy (including rotational power) as well as a hydraulic motor using hydraulic pressure and a pneumatic motor using pneumatic pressure.

The process of operating the scrubber dust removal device is an embodiment of the present invention configured as described above are as follows.

Exhaust gas, which has passed through a scrubber installed to purify the gas discharged from the process chamber and is discharged into the atmosphere, is introduced into the inner tube 11 of the heat exchanger 10.

Exhaust gas passing through the inner tube 11 is heat-exchanged with the heat exchange material flowing into the outer tube 12 and is discharged in a state of being lowered to a temperature of about 30 degrees. At this time, the phenomenon that the dust is a foreign matter contained in the exhaust gas is fixed to the inside of the inner tube (11).

The process of operating the scrubber dust removal device which is operated to remove such dust is as follows.

As shown in FIG. 3, the rotation shaft 52 is rotated by the rotational force generated by the driving motor 51.

As the movable cam 53 attached to the rotary shaft 52 is rotated, the movable plate 30 performs a reciprocating motion to track top dead center and bottom dead center.

As shown in FIG. 3, when the short shaft portion of the movable cam 53 contacts the movable plate 30, the force applied to the movable plate 30 is released while the movable plate 30 is moved by the elastic force of the elastic member 40. ) Is converted to an elevated state. As the rotary shaft 52 rotates, as shown in FIG. 4, when the long shaft portion of the movable cam 53 contacts the movable plate 30, the elastic member 40 is compressed while a force is applied to the movable plate 30. The movable plate 30 is switched to the lowered state.

First, as shown in FIG. 3, when the movable plate 30 is located at the top dead center, the dust removing means 20 fixed to the movable plate 30 is raised. As the dust removing unit 20 is moved to the top dead center position, the dust removing unit 21 moves while scratching the inner circumferential surface of the inner tube 11. Accordingly, the dust attached to the inner circumferential surface of the inner tube 11 is removed, and the removed dust falls.

When the movable plate 30 located at the top dead center moves to the bottom dead center, the dust removing means 20 fixed to the movable plate 30 is lowered as shown in FIG. 4. As the dust removing unit 20 is moved to the bottom dead center position, the dust removing unit 21 moves while scratching the inner circumferential surface of the inner tube 11. At this time, it is preferable to move the end of the dust removal portion 21 to the extent exposed to the outside of the inner tube (11). This is because dust is the most inflowing and growing site.

Accordingly, the dust attached to the inner circumferential surface of the inner tube 11 is once more removed, and the removed dust falls. Dust removed and dropped from the inner wall 11 inner wall by the movement and vibration of the dust removing means 20 can be easily removed by the operator through the outlet (not shown).

Thus, the scrubber dust removal apparatus according to the present invention is fixed by the fixing portion 23 of the dust removal means 20 made of a T-shape is fitted to the movable plate 30, the dust removal means 20 is an inner tube ( The flow path of 11) penetrates straight along the longitudinal direction. The movable plate 30 is moved along the guide shaft 43. The guide shaft 43 is formed to be parallel to the inner tube 11 so that the linear motion of the movable plate 30 coincides with the linear motion of the dust removing means 20. That is, it is preferable that the linear reciprocating motion of the axis of the guide shaft 43, the linear reciprocating motion of the fixed plate 30, and the linear reciprocating motion of the dust removing means 20 are formed on the same straight line. At this time, even if the shaking of the shaft portion of the movable shaft is made of dust removal means 20 can be carried out without any reciprocating motion.

In addition, when the movable cam 53 is raised and lowered while the movable cam 53 rotates along the top dead center and the bottom dead center, the vibration generated at this time is transmitted to the dust removing means 20 and is provided on the inner surface of the inner tube 11. The dust attached is scraped off.

By continuous rotation of the movable cam 53, the dust removal means 20 is continuously transferred to the vibration and the dust is separated from the dust or foreign matter is not attached to the inner surface of the inner tube (11).

The technical spirit of the present invention has been described through several embodiments.

It will be apparent to those skilled in the art that various modifications or variations can be made to the embodiments described above from the description of the invention. In addition, even if not explicitly shown or described, those skilled in the art to which the present invention pertains various forms of modification including the spirit of the present invention from the description of the present invention. Is obvious and still belongs to the scope of the present invention. The above embodiments described with reference to the accompanying drawings are described for the purpose of illustrating the present invention, and the scope of the present invention is not limited to these embodiments.

10: heat exchanger
11: inner tube
20: dust removal means
21: Dust removal part
22: insertion part
23: fixing part
30: movable plate
31: through hole
32: tops
33: bottom plate
40: guide member
41: communication port
42: binding plate
43: guide shaft
50: vibration generating means
51: drive motor
52: axis of rotation
53: movable cam

Claims (7)

An inner tube 11 of the heat exchanger 10 through which exhaust gas passes;
A dust removal means (20) having a dust removal portion (21) inserted into the inner tube (11) to be movable along the longitudinal direction and contacting the inner surface of the inner tube (11) at least on one side;
A movable plate 30 for fixing one end of the dust removing means 20; And
Vibration generating means (50) for generating vibration in the movable plate (30) such that the dust removing means (20) moves along the longitudinal direction; Including;
The dust removal means 20 is
An insertion part 22 having a coil shape in which the dust removing part 21 is provided on at least one side and inserted into the inner tube 11; And
And a fixing part 23 provided at one end of the insertion part 22 and having an expanded cross section so as to be fixed to the movable plate 30.
The movable plate 30 is configured by combining the upper plate 32 and the lower plate 33 having a plurality of through holes 31 communicating with the inner tube 11, and the upper plate 32 and the Scrubber dust removal device that the fixing part 23 is fixed between the lower plate (33). delete delete An inner tube 11 of the heat exchanger 10 through which exhaust gas passes;
A dust removal means (20) having a dust removal portion (21) inserted into the inner tube (11) to be movable along the longitudinal direction and contacting the inner surface of the inner tube (11) at least on one side;
A movable plate 30 for fixing one end of the dust removing means 20;
A guide member (40) for fixing the movable plate (30) to be movable along the longitudinal direction of the inner tube (11); And
Vibration generating means (50) for generating vibration in the movable plate (30) such that the dust removing means (20) moves along the longitudinal direction; Including;
The guide member 40 is
A coupling plate 42 mounted detachably on one side of the outer tube 12 of the heat exchanger 10 and having a communication port 41 communicating with the inner tube 11;
A guide shaft 43 for guiding the movable plate 30; And
And a resilient member (44) mounted on the guide shaft (43) to elastically support the movable plate (30). The coupling plate 42 of the guide member 40 detachably mounted to one side of the outer tube 12 of the heat exchanger 10 is integrally formed inside the outer tube 12. Scrubber dust removal device. delete The vibration generating means (50) according to any one of claims 1, 4 and 5,
A drive motor 51 generating a rotational force;
A rotating shaft 52 that receives the rotational force of the driving motor 51 and rotates the rotational shaft 52; And
And a movable cam (53) mounted on the rotating shaft (52) to be in contact with the movable plate (30) to move the movable plate (30).

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