KR101669745B1 - Two-layered flexible wiring substrate, flexible wiring board, and methods for producing same - Google Patents

Abstract

A two-layer flexible wiring board and a flexible wiring board excellent in endurance, and a method of manufacturing the same are provided.
Layered flexible wiring board having a laminated structure in which a base metal layer made of a nickel alloy and a copper layer formed on the surface of the base metal layer are provided on the surface of the polyimide film without interposing an adhesive, Wherein the difference d [(200) / (111)] between the crystal orientation ratio [(200) / (111)] of the copper layer obtained before and after the performance test is 0.03 or more.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a two-layer flexible wiring board, a flexible wiring board, and a method of manufacturing the same. 2. Description of the Related Art TWO-LAYER FLEXIBLE WIRING SUBSTRATE, FLEXIBLE WIRING BOARD, AND METHODS FOR PRODUCING SAME

The present invention relates to a two-layer flexible wiring board and a flexible wiring board in which a part of the copper layer is deposited by a copper electroplating method to improve the endurance, a manufacturing method of the two-layer flexible wiring board and a manufacturing method of the flexible wiring board.

BACKGROUND OF THE INVENTION [0002] Flexible wiring boards are widely used in parts requiring refraction or bending of electronic equipment such as a recording and reading head of a hard disk, a printer head, or the like, and refractive wiring in a liquid crystal display, taking advantage of its flexibility.

In order to manufacture such a flexible wiring board, there is used a method in which a flexible wiring board (copper clad laminate, also referred to as FCCL: Flexible Copper Clad Lamination) in which a copper layer and a resin layer are laminated is subjected to wiring work using a subtractive method or the like.

The subtractive method is a method of chemically etching a copper layer of a flexible wiring board to remove unnecessary portions. That is, a resist is provided on the surface of a portion of the copper layer of the flexible wiring board to be left as a conductor wiring, chemical etching treatment with an etching solution corresponding to copper and washing with water to selectively remove unnecessary portions of the copper layer, Thereby forming a wiring.

The flexible wiring board (FCCL) can be classified into a three-layer FCCL board (hereinafter referred to as a three-layer FCCL board) and a two-layer FCCL board (referred to as a two-layer FCCL board).

The three-layer FCCL is a structure (copper foil / adhesive layer / resin film) in which an electrolytic copper foil or a rolled copper foil is adhered to a resin film of a base (insulating layer). On the other hand, the two-layer FCCL has a structure (copper layer or copper foil / resin film) in which a copper layer or a copper foil and a resin film base are laminated.

There are three types of two-layer FCCLs.

That is, an FCCL (commonly called a metallized substrate) formed by successively plating an undercoating metal layer and a copper layer on the surface of a resin film, an FCCL (a known cast substrate) having an insulating layer formed by varnishing a resin film on a copper foil, FCCL (a laminate substrate) which is laminated with a film.

Since the FCCL formed by successively plating the underlying metal layer and the copper layer on the surface of the metallized substrate, that is, the resin film, can thin the copper layer and has high smoothness of the interface between the polyimide film and the copper layer, Compared with a laminate substrate or a three-layer FCCL, it is suitable for fine patterning of wiring.

For example, the thickness of the copper layer of the metallized substrate can be freely controlled by the dry plating method and the electroplating method, while the thickness and the like of the cast substrate, the laminated substrate, or the three-layer FCCL are restricted depending on the copper foil used Throw away.

With regard to the copper foil used for the wiring of the flexible wiring board, for example, improvement of the bendability can be achieved by a method of subjecting a copper foil to heat treatment (see Patent Document 1) or a rolling process (see Patent Document 2) .

However, these methods relate to the processing of a rolled copper foil of three-layer FCCL, an electrolytic copper foil, and a copper foil used for a cast substrate and a laminate substrate in a two-layer FCCL.

In addition, the folding endurance test of MIT is standardized by JIS C-5016-1994 or the like in accordance with ASTM D2176.

In this test, the circuit pattern formed on the test piece is evaluated based on the number of times of refraction until breaking, and the greater the number of refractions is, the better the breakability is.

Patent Document 1: JP-A-8-283886 Patent Document 2: JP-A-6-269807

Since the two-layer flexible wiring board to which the present invention is applied is a plated substrate in which a seed layer formed on at least one surface of a resin film substrate and a metal layer composed of a copper plating layer are sequentially formed, It is difficult to improve the bending resistance by subjecting only a copper plating layer such as a copper plating layer to heat treatment or rolling to improve the bending resistance.

In view of the above circumstances, the present invention provides a two-layer flexible wiring board and a flexible wiring board excellent in endurance, and a method of manufacturing the same.

DISCLOSURE OF THE INVENTION In order to solve the above problems, the inventors of the present invention conducted intensive studies on the endurance of a copper layer formed on a polyimide resin layer by a plating method. As a result, it was found that the influence of a change in crystal orientation before / Confirming the present invention.

A first invention of the present invention is a two-layer flexible wiring substrate having a laminated structure in which a base metal layer made of a nickel alloy and a copper layer provided on the surface of the base metal layer are provided without interposing an adhesive on the surface of the polyimide film, (200) / (111)] of the crystal orientation ratio [(200) / (111)] of the copper layer obtained before and after the execution of the endurance test specified in -5016-1994 is 0.03 or more .

The copper layer has a film thickness of 5 占 퐉 to 12 占 퐉, a crystal orientation index of the (111) plane of the copper layer of 1.2 or more, and a surface roughness of 0.2 占 퐉 or less in terms of arithmetic mean roughness (Ra) , And the copper layer is composed of a copper thin film layer formed on the surface of the underlying metal layer and a copper electroplating layer formed on the surface of the copper thin film layer.

The copper electroplating layer is formed by copper electroplating by a periodic reverse current periodically performing a short period of potential inversion within a thickness range of 10% or more of the film thickness from the surface toward the polyimide film .

A second aspect of the present invention is a flexible wiring board comprising a polyimide film having a base metal layer made of a nickel alloy and a copper layer on the surface of the base metal layer without interposing an adhesive on the surface of the polyimide film, The difference d [(200) / (111)] between the crystal orientation ratio [(200) / (111)] of the copper layer obtained before and after the execution of the abrasion resistance test specified in JIS-P- .

The copper layer is characterized in that the copper layer has a crystal orientation index of 1.2 or more on the (111) plane and a surface roughness of 0.2 mu m or less in terms of arithmetic mean roughness (Ra) And a copper electroplating layer formed on the surface of the copper thin film layer.

The copper electroplating layer is formed by copper electroplating by a periodic reverse current which periodically performs a short period of potential reversal in a thickness range of 10% or more of the copper electroplating layer film thickness from the surface thereof toward the polyimide film .

A third invention of the present invention is the method of manufacturing the two-layer flexible wiring board of the first invention, wherein a base metal layer made of a nickel alloy formed on the surface of the polyimide film by a dry plating method without an adhesive interposed therebetween, A copper foil layer formed by dry plating on the surface of the copper foil layer and a copper electroplating layer formed by electroplating on the surface of the copper foil layer to form a copper foil layer and a copper electroplating layer, The electroplating layer is formed by a copper electroplating method using a periodic reverse current which periodically performs potential inversion in a short period of time in a thickness range of 10% or more of the thickness of the copper electroplating layer from the surface of the copper electroplating layer toward the polyimide film .

A fourth invention of the present invention is the method for producing a flexible wiring board according to the second invention, which comprises the steps of: forming a base metal layer made of a nickel alloy film formed by a dry plating method without an adhesive on the surface of a polyimide film; Layer flexible wiring board having a laminated structure of a copper foil layer and a copper electroplating layer formed by forming a copper foil layer by a dry plating method and depositing a copper electroplating layer by electroplating on the surface of the copper foil layer The copper electroplating layer is formed so as to have a thickness of 10 to 10 times the film thickness of the copper electroplating layer from the surface of the copper electroplating layer in the direction of the polyimide film %, The periodic short-time potential reversal And is formed by a copper electroplating method using periodic reverse current.

As a method of obtaining the metallized polyimide film, a metal layer such as Ni, Cr, Cu and an alloy layer are formed on the surface of the polyimide film by a vapor deposition method or a sputtering method as in the present invention, and thereafter electroplating, electroless plating, (200) / (111) obtained before and after the MIT insertability test (JIS C-5016-1994) is 0.03 or more in the step of laminating copper by a combination of a polyimide By laminating the film on the surface of the film, a two-layer flexible wiring substrate having improved breakability can be obtained.

1 is a schematic cross-sectional view of a two-layer flexible wiring board manufactured by the metalizing method.
Fig. 2 is a schematic view showing a roll-to-roll sputtering apparatus for forming a base metal layer and a copper foil layer of a two-layer flexible wiring board.
Fig. 3 is a schematic view showing a continuous plating apparatus of a roll-to-roll system for performing electroplating in the production of a substrate for two-layer flexible wiring.
4 is a diagram schematically showing the time and the current density of the PR current in the present invention.

(1) Two-layer flexible wiring board

First, the two-layer flexible wiring board of the present invention will be described.

The two-layer flexible wiring board of the present invention employs a laminated structure in which a base metal layer and a copper layer are sequentially stacked on at least one side of a polyimide film without an adhesive interposed therebetween. The copper layer is a copper- .

1 is a schematic view showing a cross section of a two-layer flexible wiring board 6 manufactured by a metalizing method.

A polyimide film is used for the resin film substrate 1 and the order of the underlying metal layer 2, the copper foil layer 3 and the copper electroplating layer 4 from at least one of the polyimide film side As shown in Fig. The copper foil layer 3 and the copper electroplating layer 4 constitute the copper layer 5. [

As the resin film substrate to be used, in addition to the polyimide film, a polyamide film, a polyester film, a polytetrafluoroethylene film, a polyphenylene sulfide film, a polyethylene naphthalate film, a liquid crystal polymer film and the like can be used.

Particularly, from the viewpoints of mechanical strength, heat resistance and electric insulation, a polyimide film is preferable.

The above resin film substrate having a film thickness of 12.5 탆 to 75 탆 can be preferably used.

The underlying metal layer 2 secures reliability such as adhesion between the resin film substrate and a metal layer such as copper and heat resistance. Therefore, the base metal layer is made of any one material selected from the group consisting of nickel, chromium, and alloys thereof, but nickel-chromium alloys are suitable in view of adhesion strength and ease of etching during wiring production.

The composition of the nickel-chromium alloy is preferably at least 15% by weight and not more than 22% by weight of chromium, and improvement in corrosion resistance and migration resistance can be expected.

Among them, the nickel-chromium alloy of 20 wt% chromium is distributed as a nichrome alloy, and is readily available as a sputtering target of the magnetron sputtering method. Further, chromium, vanadium, titanium, molybdenum, cobalt and the like may be added to the alloy containing nickel.

Further, a plurality of nickel-chromium alloy thin films having different chromium concentrations may be laminated to form a base metal layer having a concentration gradient of nickel-chromium alloy.

The film thickness of the underlying metal layer is preferably from 3 nm to 50 nm.

When the film thickness of the underlying metal layer is less than 3 nm, adhesion between the polyimide film and the copper layer can not be maintained, and the film is inferior in corrosion resistance and migration resistance. On the other hand, if the film thickness of the underlying metal layer exceeds 50 nm, it may be difficult to sufficiently remove the underlying metal layer when the wiring is processed by the subtractive process. If the removal of the underlying metal layer is insufficient, problems such as migration between wirings may occur.

The copper thin film layer 3 is mainly composed of copper, and its thickness is preferably 10 nm to 1 占 퐉.

When the film thickness of the copper thin film layer is less than 10 nm, the copper electroplating layer can not secure conductivity at the time of electroplating, leading to poor appearance at the time of electroplating. Even if the film thickness of the copper thin film layer exceeds 1 占 퐉, there is no problem of the quality of the two-layer flexible wiring board, but the productivity is poor.

(2) Deposition method of underlying metal layer and copper thin film layer

The underlying metal layer and the copper thin film layer are preferably formed by a dry plating method.

The dry plating method includes a sputtering method, an ion plating method, a cluster ion beam method, a vacuum vapor deposition method, a CVD method, and the like, but from the viewpoint of control of the composition of the seed layer and the like, the sputtering method is preferable.

In order to form a sputtering film on a resin film substrate, a known sputtering apparatus can be used. In order to form a film on a long resin film substrate, a known roll-to-roll sputtering apparatus can be used. By using this roll-to-roll sputtering apparatus, a base metal layer and a copper thin film layer can be continuously formed on the surface of a long polyimide film.

2 is an example of a roll-to-roll sputtering apparatus.

The roll-to-roll sputtering apparatus 10 is provided with a case 12 having a rectangular parallelepiped shape in which most of the constituent parts are housed.

The case 12 may be cylindrical, and its shape is not limited, but it is sufficient that the case 12 can maintain a reduced pressure in the range of 10 ^-4 Pa to 1 Pa.

In this case 12, a roll 13, a can roll 14, sputtering cathodes 15a, 15b, 15c and 15d for feeding a polyimide film F, which is a long resin film substrate, A roll 16a, a rear feed roll 16b, a tension roll 17a, a tension roll 17b, and a winding roll 18.

The take-up roll 13, the can roll 14, the front feed roll 16a, and the take-up roll 18 are provided with power by a servo motor. The tension of the polyimide film F is maintained in the unwinding roll 13 and the winding roll 18 by torque control by a powder clutch or the like.

The surface of the tension rolls 17a and 17b is finished with hard chrome plating and equipped with a tension sensor.

The sputtering cathodes 15a to 15d are arranged facing the can roll 14 in a magnetron cathode fashion. The dimension in the width direction of the polyimide film F of the sputtering cathodes 15a to 15d may be larger than the width of the polyimide film F. [

The polyimide film F is transported in a roll-to-roll sputtering apparatus 10 as a roll-to-roll vacuum film forming apparatus and is formed by sputtering cathodes 15a to 15d opposed to the can roll 14 , And a polyimide film (F2) having a copper thin film layer.

The surface of the can roll 14 is finished by hard chrome plating, and the refrigerant or hot water supplied from the outside of the case 12 is circulated in the can roll 14 and adjusted to a substantially constant temperature.

When a base metal layer and a copper foil layer are formed using the roll-to-roll sputtering apparatus 10, a target having a composition of a base metal layer is attached to the sputtering cathode 15a and a copper target is attached to the sputtering cathodes 15b to 15d And the inside of the apparatus in which the polyimide film is set on the unwinding roll 13 is evacuated and then sputtering gas such as argon is introduced to maintain the inside of the apparatus at about 1.3 Pa.

Alternatively, after the underlying metal layer is formed by sputtering, a copper thin film layer may be formed by a vapor deposition method.

(3) Copper electroplating layer and its deposition method

The copper electroplating layer is formed by electroplating. The film thickness of the copper electroplating layer is preferably 1 m to 20 m.

Here, the electroplating method used is to conduct electroplating using an insoluble anode in a plating bath of copper sulfate. The composition of the copper plating bath to be used may be a high-throughput copper sulfate plating bath for a commonly used printed wiring board.

3 is an example of a roll-to-roll continuous electroplating apparatus (hereinafter referred to as a plating apparatus 20) which can be used for manufacturing a two-layer flexible wiring board according to the present invention.

The polyimide film F2 having the copper thin film layer obtained by forming the underlying metal layer and the copper thin film layer is continuously fed while being withdrawn from the unwinding roll 22 and repeatedly immersed in the plating liquid 28 in the electroplating bath 21 . Reference numeral 28a denotes the liquid level of the plating liquid.

The copper foil having the copper thin film layer is formed by electroplating a copper layer on the surface of the metal foil while the copper foil having the copper foil layer is immersed in the plating liquid 28, Layer flexible wiring board (S), which is a film substrate, on the take-up roll (29). The transporting speed of the polyimide film F2 having the copper thin film layer is preferably in the range of several m / minute to several tens m / min.

More specifically, the polyimide film F2 having the copper thin film layer is unwound from the unwinding roll 22 and is immersed in the plating liquid 28 in the electroplating bath 21 via the feed roll 26a. The polyimide film F2 having the copper thin film layer entered into the electroplating tank 21 is reversed in the transport direction via the reversing roll 23 and drawn out of the electroplating tank 21 by the feed roll 26b .

Thus, while the polyimide film F2 having the copper foil layer is repeatedly immersed in the plating liquid a plurality of times (10 times in Fig. 3), the copper foil is formed on the metal foil of the polyimide film F2 having the copper foil layer, .

A power source (not shown) is connected between the feed roll 26a and the anode 24a.

An electroplating circuit is constituted by a power supply roll 26a, an anode 24a, a plating liquid, a polyimide film F2 having a copper foil layer, and a power source. The insoluble anode may be a well-known anode coated with a conductive ceramic without any particular need. Further, a mechanism for supplying copper ions to the plating liquid 28 is provided outside the electroplating tank 21.

The supply of copper ions to the plating liquid 28 is carried out by using an aqueous solution of copper oxide, an aqueous solution of copper hydroxide, an aqueous solution of copper carbonate, or the like. Alternatively, a small amount of iron ions may be added to the plating solution to dissolve the oxygen-free copper balls to supply the copper ions. The copper may be supplied by any one of the above methods.

The current density during plating progressively increases the current density as it proceeds from the anode 24a in the downstream in the transport direction so as to obtain the maximum current density at the anode 24o to 24t.

By increasing the current density in this way, discoloration of the copper layer can be prevented. Particularly, when the thickness of the copper layer is small, discoloration of the copper layer is liable to occur when the current density is high. Therefore, the current density during plating is in the range of 0.1 A / dm ^{2 to} 8 A / dm ² except for the reversed current of the periodic reverse current to be described later. dm < ² > is preferred. If the current density is increased, the appearance of the copper electroplating layer is defective.

In order to manufacture the two-layer flexible wiring board according to the present invention, a PR current is used in a range of 10% or more from the surface of the film thickness of the copper electroplating layer.

When a periodic reverse current (hereinafter, sometimes referred to as a PR current) is used, the reverse current may be a current of 1 to 9 times the constant current.

The reverse current time ratio is preferably about 1% to 10%.

In addition, the cycle in which the next reverse current of the PR current flows is preferably 10 m seconds or more, and more preferably 20 m to 300 m seconds.

Fig. 4 schematically shows the time and current density of the PR current.

The plating voltage may be appropriately adjusted so that the above-described current density can be realized.

In order to manufacture the two-layer flexible wiring substrate according to the present invention by a roll-to-roll continuous electroplating apparatus (hereinafter referred to as a plating apparatus 20), a PR current is caused to flow from one or more anodes The number of the anode that allows the PR current to flow is determined depending on how the ratio of the film forming range from the surface of the copper electroplating layer to the film on the polyimide film side is determined. That is, a PR current flows through at least the anode 24t, and a PR current flows through the anode 24s, the anode 24r, and the anode 24q, if necessary.

Further, the PR current may flow through the entire anode, but since the rectifier for the PR current is expensive, the manufacturing cost increases. Therefore, in the two-layer flexible wiring board according to the present invention, when 10% of the film thickness from the surface of the copper electroplating layer in the polyimide direction is formed at a PR current, before and after the endurance test (JIS C-5016-1994) , The difference d [(200) / (111)] between the crystal orientation ratio [(200) / (111)] of the copper layer can be set to 0.03 or more. As a result, do.

The reason why the copper electroplating using the PR current is preferable is that if the current is reversed, the crystal grain diameter of the copper of the copper electroplating layer can be set to about 200 nm or more and the grain boundary can be reduced, This is because it can reduce it.

Generally, in the electroplating method, copper to be deposited by plating is affected by the surface of the substrate to be plated with copper. However, when the film is formed with a PR current of 10% or more of the film thickness from the surface of the copper electroplating layer, the grain boundaries can be controlled, When 10% or more of the film thickness from the surface of the copper electroplating layer of the substrate for two-layer flexible wiring is in conformity with the bending resistance, an effect on the endurance of the copper electroplating layer can be obtained and the object of the present invention can be achieved have.

When the thickness of the copper layer of the resulting two-layer flexible wiring board is adjusted by chemical polishing or the like, if a layer formed by a PR current of 10% or more of the film thickness on the surface of the polished copper layer remains, .

(4) Characteristics of copper electroplating layer

The copper layer in the flexible wiring board of the present invention is characterized by exhibiting a (111) crystal orientation degree index of copper of 1.2 or more. In such a state, the crystal tends to slip in the MIT endurance test. In addition, the copper layer of the flexible wiring board of the present invention may contain (200), (220), and (311) orientations in addition to the (111) Or more.

A further feature is that the difference between the orientation ratio of crystals [(200) / (111)] before and after the MIT endurance test (JIS C-5016-1994) is 0.03 or more. In this state, it is considered that the crystal slips by the MIT endurance test and recrystallization occurs.

The gloss of the surface is preferably a glossy film so that unevenness of the surface is not a cause of cutting.

The larger the average crystal grain diameter is, the better, but it is necessary to pay attention to the etching of the copper layer when wiring the flexible wiring board to the flexible wiring board by the subtractive method.

When the ferric chloride aqueous solution is used for etching the copper layer by the subtractive method, the crystal grain diameter of the copper layer may not be affected. However, when etching the grain boundaries of the crystal grains of the copper layer, The diameter also affects the shape of the wiring. The average crystal grain diameter is preferably about 200 nm to 400 nm. When the thickness is 200 nm or less, a large number of crystal grains are present, cracks serving as starting points of fracture tend to enter, and a thickness of 400 nm or less is to maintain the smoothness of the metal surface.

The copper layer of the flexible wiring board of the present invention is obtained by the above-described method of forming a copper layer and has a characteristic that a difference in crystal orientation ratio [(200) / (111)] before and after the MIT insertion test is not less than 0.03 And the like. In addition, the crystal orientation of the copper electroplating layer can be found from the Wilson orientation index of the X-ray diffraction.

Further, the copper crystals of the copper layer obtained by the above method have an effect of dynamic recrystallization under room temperature at the time of refraction. The average crystal grain diameter after the endurance test tends to be about 100 nm to 200 nm by recrystallization.

In general, it has been considered that the electroplated film of copper is not subjected to dynamic recrystallization at room temperature. However, since the flexible wiring board of the present invention is subjected to dynamic recrystallization at room temperature, consequently, it is difficult to break the sample by performing a refraction test similar to that of the MIT test. The dynamic crystal recrystallization under the average crystal grain diameter and the room temperature of the copper layer can be observed on a single-sided SIM.

Then, the arithmetic surface roughness (Ra) is preferably 0.2 μm or less.

When the surface roughness (Ra) exceeds 0.2 m, even when the difference of the crystal orientation ratio [(200) / (111)] before and after the MIT endurance test is 0.03 or more, the effect of improving the endurance is small. Therefore, the difference between the crystal orientation ratio [(200) / (111)] before and after the MIT insertion test is 0.03 or more and the arithmetic surface roughness (Ra) is 0.2 μm or less.

Naturally, when the surface of the copper layer is polished by chemical polishing or the like, the arithmetic surface roughness (Ra) of the surface of the copper layer after chemical polishing may be 0.2 탆 or less.

(5) Flexible wiring board

A flexible wiring board according to the present invention is produced by subjecting a two-layer flexible wiring board according to the present invention to wiring processing by the subtractive method.

The etching solution used for etching the copper electroplating layer or the like into the wiring is not limited to an aqueous solution containing a special combination of ferric chloride, cupric chloride and copper sulfate or a special chemical solution, and may be a chlorinating agent having a general specific gravity of 1.30 to 1.45 Iron solution or a commercially available etching solution containing a cupric chloride aqueous solution having a specific gravity of 1.30 to 1.45 can be used.

On the surface of the wiring, tin plating, nickel plating, gold plating, and the like are carried out on necessary parts as needed and the surface is covered with a known solder resist or the like. Then, an electronic component such as a semiconductor element is mounted to form an electronic device.

Example

Hereinafter, the present invention will be further described with reference to Examples.

A polyimide film having a copper thin film layer was produced using a roll-to-roll sputtering apparatus (10).

A nickel-20 wt% chromium alloy target for forming the underlying metal layer was attached to the sputtering cathode 15a and a copper target was attached to each of the sputtering cathodes 15b to 15d to form a polyimide film Manufactured by DuPont) was evacuated, and then argon gas was introduced, and the inside of the apparatus was maintained at 1.3 Pa to prepare a polyimide film having a copper thin film layer. The underlying metal layer (nickel-chromium alloy) had a thickness of 20 nm, and the copper thin-film layer had a thickness of 200 nm.

The resulting polyimide film having a copper foil layer was subjected to copper electroplating using a plating apparatus 20 to form a copper electroplating layer. The plating solution used is an aqueous solution of copper sulfate having a pH of not more than 1, and the anode (24 to 24t) has a maximum current density (excluding the reversing current of the PR current) unless otherwise specified, The current density was adjusted so that the thickness was 8.5 mu m.

In the abrasion resistance test, a test pattern of JIS-C-5016-1994 was formed by the subtractive method using ferric chloride as an etchant and evaluated according to this standard.

The crystal orientation of the copper electroplating layer before and after the endurance test was measured by X-ray diffraction using Wilson's orientation index.

Example 1

In order to perform electroplating from the surface of the copper electroplating layer to a film thickness range of 10% using a PR current, a PR current was caused to flow through the anode 24t to prepare a substrate for two-layer flexible wiring of Example 1.

(111) crystal orientation degree index of the copper electroplating layer before the MIT insertability test was 1.31, and the difference of the crystal orientation ratio [(200) / (111)] indicated by the X-ray orientation degree index before and after the MIT insertability test was 0.04, (Ra) of 0.06 占 퐉 obtained a good result of 536 times in the MIT bending test.

Example 2

The (111) crystal orientation degree index of the copper electroplating layer before the MIT insertability test was 1.35 and the electroplating was performed using the PR current from the surface of the copper electroplating layer to the film thickness range of 30% Layer substrate for flexible wiring in Example 2 was fabricated in the same manner as in Example 1 except that a PR current was allowed to flow through the substrate.

The sample of Example 2 in which the difference of the crystal orientation ratio [(200) / (111)] indicated by the X-ray orientation index before and after the MIT resistance test was 0.09 and the arithmetic surface roughness (Ra) 736 times.

Example 3

(111) crystal orientation degree index of 1.42, and electroplating is performed using a PR current from the surface of the copper electroplating layer to the film thickness range of 40% from the surface of the copper electroplating layer, Layer flexible wiring board of Example 3 was fabricated in the same manner as in Example 1 except that a PR current was allowed to flow through the openings 24r to 24t.

The sample of Example 3 in which the difference in the crystal orientation ratio [(200) / (111)] represented by the X-ray orientation index before and after the MIT resistance test was 0.10 and the arithmetic surface roughness (Ra) Good results of 608 times were obtained.

(Comparative Example 1)

(111) crystal orientation degree index of 0.98, and the electroplating was performed using a PR current from the surface of the copper electroplating layer to a film thickness range of 8%, the anode ( Layered flexible wiring board of Comparative Example 1 was fabricated in the same manner as in Example 1 except that a PR current was caused to flow through the anode and the anode at 24 t and the current density of the anode was 80%

The sample of Comparative Example 1 in which the difference in the crystal orientation ratio [(200) / (111)] represented by the X-ray orientation index before and after the MIT resistance test was 0.02 and the arithmetic surface roughness (Ra) It was a result that the improvement effect called 135 times was not seen.

(Comparative Example 2)

The (111) crystal orientation degree index of the copper electroplating layer before the MIT insertability test was 0.85, and the electroplating was performed with the PR current from the surface of the copper electroplating layer to the film thickness range of 5% Layer flexible wiring board of Comparative Example 2 was fabricated in the same manner as in Example 1 except that a PR current was caused to flow in the anode and the current density of the anode was set to 50%

The sample of Comparative Example 2 in which the difference of the crystal orientation ratio [(200) / (111)] represented by the X-ray orientation index before and after the MIT resistance test was 0.01 and the arithmetic surface roughness (Ra) It was the result that the improvement effect called 83 times was not seen.

(Comparative Example 3)

The (111) crystal orientation degree index of the copper electroplating layer before the MIT impact resistance test was 1.06, and the electroplating was performed using the PR current from the surface of the copper electroplating layer to the film thickness range of 9% 24 t), and the current density of the anode was set to 90% of that in Example 1, a double-layer flexible wiring board of Comparative Example 3 was fabricated.

The sample of Comparative Example 3 in which the difference in crystal orientation ratio [(200) / (111)] indicated by the X-ray orientation index before and after the MIT resistance test was 0.02 and the arithmetic surface roughness (Ra) It was the result that the improvement effect called 141 times was not seen.

Example 4

Example 1 was the same as Example 1 except that a plating apparatus having a different electroplating depth was used and the conveying speed was adjusted so that the thickness of the electroplated copper layer became 8.5 탆, A flexible wiring board was produced.

(111) crystal orientation degree index of 1.22 and the difference in crystal orientation ratio [(200) / (111)] indicated by the X-ray orientation degree index before and after the MIT endurance test was 0.04 , And the sample of Example 4 having an arithmetic surface roughness (Ra) of 0.22 gave a result of 197 times in the MIT bendability test. Although the MIT insertability test was improved over Comparative Examples 1, 2, and 3, the results were inferior to Examples 1, 2, and 3.

1 polyimide film (resin film substrate)
2 underlying metal layer
3 copper thin film layer
4 Copper electroplating layer
5 copper layer
6 Two-layer flexible wiring board
10 Roll-to-roll sputtering system
12 cases
13 Release Roll
14 can rolls
15a, 15b, 15c, 15d Sputtering cathodes
16a front feed roll
16b rear feed roll
17a, 17b tension roll
18 winding roll
20 Continuous plating equipment of roll-to-roll type
21 Electroplating tank
22 unwinding roll
23 Reverse roll
24a to 24t anode
26a to 26k feed roll
28 plating solution
28a Liquid level of plating solution
29 Winding Roll
F polyimide film (resin film substrate)
A polyimide film (resin film substrate having a copper thin film layer) having an F2 copper thin film layer,
S 2-layer flexible wiring board

Claims (13)

Layered flexible wiring board having a laminated structure in which a base metal layer made of a nickel alloy and a copper layer provided on the surface of the base metal layer are provided on the surface of the polyimide film,
Wherein the copper layer is composed of a copper thin film layer formed on the surface of the underlying metal layer and a copper electroplating layer formed on the surface of the copper thin film layer, wherein the copper layer has a crystal orientation index of at least 1.2 on the (111) And the surface roughness of the copper layer is 0.2 탆 or less in terms of arithmetic mean roughness (Ra)
Wherein the copper electroplating layer is a copper electroplating film formed by periodically reversing a periodic electric potential in a range of 10% or more and 40% or less of the film thickness in the direction of the polyimide film from the surface thereof, Lt; / RTI >
(200) / (111)] of the crystal orientation ratio [(200) / (111)] of the copper layer obtained before and after the execution of the folding endurance test specified in JIS C-5016-1994, ] Is 0.03 or more. The two-layer flexible wiring substrate according to claim 1, wherein the copper layer has a thickness of 5 탆 to 12 탆. delete The two-layer flexible wiring board according to claim 1, wherein the crystal orientation index of the (111) face of the copper layer is 1.20 or more and 1.42 or less. delete delete A flexible wiring board comprising a polyimide film having a base metal layer made of a nickel alloy and a copper layer on a surface of the base metal layer,
Wherein the copper layer comprises a copper thin film layer formed on the surface of the underlying metal layer and a copper electroplating layer formed on the surface of the copper thin film layer,
(111) plane of the copper layer is 1.20 or more, and the surface roughness of the copper layer is 0.2 mu m or less in terms of arithmetic mean roughness (Ra)
Wherein the copper electroplating layer is a copper electroplating film formed by periodically reversing a periodic electric potential in a range of 10% or more and 40% or less of the film thickness in the direction of the polyimide film from the surface thereof, Lt; / RTI >
(200) / (111)] of the crystal orientation ratio [(200) / (111)] of the copper layer obtained before and after the execution of the disintegration test specified in JIS-P-8115 is not less than 0.03 . delete delete delete delete 8. A method of manufacturing a two-layer flexible wiring board as set forth in any one of claims 1, 2, and 4,
A base metal layer made of a nickel alloy formed by a dry plating method without interposing an adhesive on the surface of the polyimide film; a copper film layer formed on the surface of the base metal layer by a dry plating method and an electroplating method on the surface of the copper foil layer And a copper layer formed of the copper foil layer and the copper electroplating layer formed by performing the deposition of the copper electroplating layer,
Wherein the copper electroplating layer has a periodic reverse current which periodically performs a short period of potential reversal in a thickness range of 10% to 40% of the thickness of the copper electroplating layer in the direction of the polyimide film from the surface of the copper electroplating layer Wherein the copper foil is formed by a copper electroplating method. A method for manufacturing a flexible wiring board according to claim 7,
A base metal layer made of a nickel alloy formed on the surface of the polyimide film by a dry plating method without an adhesive,
A lamination structure of the copper layer formed of the copper foil layer and the copper electroplating layer formed by forming the copper foil layer on the surface of the underlying metal layer by the dry plating method and forming the copper electroplating layer by electroplating on the surface of the copper foil layer, Layered flexible wiring board having the base metal layer and the copper layer is formed on the wiring by the subtractive method,
Wherein the copper electroplating layer is formed by a periodic reverse current which periodically performs a short period of potential inversion in a thickness range of 10% to 40% of the film thickness of the copper electroplating layer in the direction of the polyimide film from the surface of the copper electroplating layer Wherein the copper foil is formed by a copper electroplating method.

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