KR101531100B1 - Microphone - Google Patents

Abstract

The microphone according to an embodiment of the present invention includes a membrane, a fixed electrode unit positioned outside the membrane, and an elastic member connecting the membrane and the fixed electrode unit to displace the membrane, The conductive parts are formed on one surface of each of the parts facing each other. .

Description

Microphone {Microphone}

The present invention relates to a microphone.

As the number of portable electronic products increases, electrostatic microphones made by MEMS process are widely used.

More specifically, prior art microphones, including prior art documents, comprise a membrane and a backplate, a packaging structure, an ASIC, and other portions that support the structure.

The back plate and the membrane are maintained at a constant distance, and when the voltage potential is applied, the charge is taken to have a capacitance.

Also, when the sound waves are transmitted to the membrane, the membrane is deformed by the pressure of the sound wave, and this deformation changes the distance between the membrane and the back plate, causing a change in the capacitance value ΔC. C is measured electrically to convert the sound wave into an electrical signal.

As described above, the conventional microphone is structurally complicated due to the fact that the distance between the membrane and the back plate is made? C and the sound waves are converted into electric signals, so that? C is not linearly changed and reliability is lowered It has a problem.

US 6535460

A first aspect of the present invention is to solve the above problems and to provide a membrane-electrode assembly in which a change in capacitance is obtained through a change in an overlapping area between a fixed electrode part positioned orthogonally to a displacement direction of a membrane and a membrane So that a sound wave can be more accurately converted into an electrical signal.

According to the second aspect of the present invention, since the backplate does not include the backplate, it is possible to reduce the production cost, obtain high sensitivity due to no air resistance or air damping due to the backplate, And to provide a microphone that is structurally simple and has improved productivity and product reliability.

The microphone according to the first embodiment of the present invention includes a membrane, a fixed electrode part positioned outside the membrane, and an elastic support part connecting the membrane and the fixed electrode part so that the membrane can be displaced, The electrode portions are each formed with a conductive portion on one surface facing each other.

Also, in the microphone according to the first embodiment of the present invention, the fixed electrode part may be positioned to be spaced apart from the membrane in a direction orthogonal to the displacement direction of the membrane.

In the microphone according to the first embodiment of the present invention, the membrane is provided with a side wall portion at an end in an orthogonal direction to the displacement direction, and a conductive portion is formed at the side wall portion so as to face the fixed electrode portion.

Further, in the microphone according to the first embodiment of the present invention, the membrane is formed of a thin film, and the side wall part is formed so as to protrude in the displacement direction of the membrane.

In addition, in the microphone according to the first embodiment of the present invention, the fixed electrode portion is formed to have a conductive portion facing the conductive portion formed on the side wall portion of the membrane.

In the microphone according to the first embodiment of the present invention, the end portion of the conductive portion formed on the side wall portion of the membrane with respect to the displacement direction of the membrane may be located at the center portion of the conductive portion of the fixed electrode portion.

In addition, in the microphone according to the first embodiment of the present invention, the elastic supporting portion may connect the membrane and the fixed electrode portion in a direction orthogonal to the displacement direction of the membrane.

In the microphone according to the first embodiment of the present invention, a plurality of elastic supporting portions connect the membrane and the fixed electrode portion at regular intervals.

In addition, the microphone according to the first embodiment of the present invention may further include a support portion coupled to the fixed electrode portion to support the fixed electrode portion with respect to the displacement direction of the membrane.

The microphone according to the second embodiment of the present invention includes a membrane, a fixed electrode part spaced apart from the membrane so as to be orthogonal to a displacement direction of the membrane, and an elastic support part connecting the membrane and the fixed electrode part so that the membrane can be displaced And the membrane is formed with a conductive portion on one surface thereof facing each other, the membrane has a sidewall portion at an end in an orthogonal direction to the displacement direction, and a conductive portion is formed on the sidewall portion so as to face the fixed electrode portion A plurality of protrusions protruding toward the fixed electrode portion are formed on the side wall portion of the membrane, and a groove portion corresponding to the protrusion portion is formed on the fixed electrode portion.

In the microphone according to the second embodiment of the present invention, the protruding portion of the side wall portion and the groove portion of the fixed electrode portion are formed to face each other to form a conductive portion.

The microphone according to the third embodiment of the present invention includes a membrane, a fixed electrode unit positioned on the outer side of the membrane, and a support member coupled to the center of the membrane so that both sides of the membrane can be displaced, The electrode portions are each formed with a conductive portion on one surface facing each other.

In addition, in the microphone according to the third embodiment of the present invention, the fixed electrode part may be positioned so as to be spaced apart from the membrane in a direction orthogonal to the displacement direction of the membrane.

In addition, in the microphone according to the third embodiment of the present invention, the membrane includes a central portion to which the support member is coupled, and one side portion and another side portion formed to correspond to each other on both sides of the center portion.

In addition, in the microphone according to the third embodiment of the present invention, the one side portion and the other side portion may have a shape symmetrical to each other.

In the microphone according to the third embodiment of the present invention, the membrane is provided with a side wall portion at an end in an orthogonal direction to the displacement direction, and a conductive portion is formed at the side wall portion to face the fixed electrode portion.

Further, in the microphone according to the third embodiment of the present invention, the membrane is formed of a thin film, and the side wall part is formed so as to protrude in the displacement direction of the membrane.

In addition, in the microphone according to the third embodiment of the present invention, the fixed electrode part is formed to have a conductive part facing the conductive part formed on the side wall part of the membrane.

In the microphone according to the third embodiment of the present invention, the end portion of the sidewall of the membrane having the conductive portion with respect to the displacement direction of the membrane may be located at the center of the conductive portion of the fixed electrode portion.

Further, in the microphone according to the third embodiment of the present invention, the support member includes a center fixing part formed to correspond to the center of the membrane, and a frame part fixedly coupled to the fixed electrode part.

The microphone according to the third embodiment of the present invention may further include a support portion coupled to the fixed electrode portion to support the fixed electrode portion with respect to the displacement direction of the membrane.

The microphone according to the fourth embodiment of the present invention includes a membrane, a fixed electrode part spaced apart from the membrane so as to be orthogonal to a displacement direction of the membrane, and a supporting member coupled to a central part of the membrane so that both sides of the membrane can be displaced And the membrane is formed with a conductive portion on one surface thereof facing each other, the membrane has a sidewall portion at an end in an orthogonal direction to the displacement direction, and a conductive portion is formed on the sidewall portion so as to face the fixed electrode portion A plurality of protrusions protruding toward the fixed electrode portion are formed at equal intervals on the side wall portion of the membrane, and a groove portion corresponding to the protrusion portion is formed on the fixed electrode portion.

In the microphone according to the fourth embodiment of the present invention, the protruding portion of the side wall portion and the groove portion of the fixed electrode portion are opposed to each other to form a conductive portion.

The features and advantages of the present invention will become more apparent from the following detailed description based on the accompanying drawings.

Prior to this, terms and words used in the present specification and claims should not be construed in a conventional and dictionary sense, and the inventor may appropriately define the concept of a term in order to best describe its invention The present invention should be construed in accordance with the spirit and scope of the present invention.

The present invention can more accurately convert a sound wave into an electrical signal by detecting a change value of capacitance through a change in an overlapping area between a fixed electrode part positioned orthogonal to a displacement direction of the membrane and the membrane, As a result, it is possible to reduce the production cost and realize a high sensitivity due to no air resistance or air damping due to the back plate, to react linearly to the negative pressure and to be structurally simple, And a microphone with improved product reliability can be obtained.

1 is a perspective view schematically showing a microphone according to a first embodiment of the present invention;
2 is a schematic plan view of the microphone shown in Fig.
3 is a schematic AA sectional view of the microphone shown in Fig.
FIG. 4 is a schematic BB sectional view of the microphone shown in FIG. 1; FIG.
Fig. 5 is a schematic use state diagram of the microphone shown in Fig. 1. Fig.
6 is a plan view schematically showing a microphone according to a second embodiment of the present invention;
7 is a perspective view schematically showing a microphone according to a third embodiment of the present invention;
8 is a schematic plan view of the microphone shown in Fig.
9 is a schematic AA sectional view of the microphone shown in Fig.
10 is a schematic use state diagram of the microphone shown in Fig.
11 is a plan view schematically showing a microphone according to a fourth embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The objectives, specific advantages and novel features of the present invention will become more apparent from the following detailed description taken in conjunction with the accompanying drawings, in which: FIG. It should be noted that, in the present specification, the reference numerals are added to the constituent elements of the drawings, and the same constituent elements are assigned the same number as much as possible even if they are displayed on different drawings. In the following description, well-known functions or constructions are not described in detail since they would obscure the invention in unnecessary detail.

1 is a perspective view schematically showing a microphone according to a first embodiment of the present invention. The microphone 100 includes a membrane 110, a fixed electrode unit 120, a resilient supporting unit 130, and a supporting unit 140.

When the sound wave is applied from the outside, the microphone 100 is displaced in a state where the membrane 110 is elastically supported by the elastic supporting part 130, and the displacement of the fixed electrode part 120 and the membrane 110 to detect the change in capacitance with respect to the overlapping surface to convert the sound wave into an electrical signal.

Hereinafter, the detailed description of the microphone according to the present invention and the organic coupling between the components will be described in detail with reference to FIGS.

FIG. 2 is a schematic plan view of the microphone shown in FIG. 1, FIG. 3 is a schematic A-A cross-sectional view of the microphone shown in FIG. 1, and FIG. 4 is a schematic B-B cross-sectional view of the microphone shown in FIG.

More specifically, the membrane 110 is for generating a positional displacement by a sound wave, and may be a disk-shaped thin film.

In addition, the membrane 110 may be made conductive, and at least a portion of the conductive portion may be formed. That is, the membrane 110 may have a conductive portion formed on one surface thereof facing the fixed electrode portion 120 to detect a change in capacitance generated on the surface facing the fixed electrode portion 120.

To this end, the membrane 110 is formed with a side wall part 111 facing the fixed electrode part at the end in the direction orthogonal to the displacement direction.

As the membrane is formed in a disk shape, a side wall portion 111 may be formed in a circumferential direction at a radial end portion, and a conductive portion 111a may be formed in the side wall portion 111. As a result, the side wall portion 111 is for securing a forming region of the conductive portion 111a for detecting displacement of the membrane.

Also, since the membrane 110 is formed of a thin film, the side wall part 111 is formed at the end of the membrane 110 so as to stand or protrude in the displacement direction of the membrane 110.

A conductive portion 111a is formed on the side wall portion 111 so as to face the fixed electrode portion 120.

Next, the fixed electrode unit 120 is disposed at the outer periphery of the membrane 110 to form ΔC through a difference in area overlapping the membrane 110. In addition, the fixed electrode unit 120 may be spaced apart from the membrane 110 in a direction perpendicular to the displacement direction of the membrane 110.

The fixed electrode unit 120 is spaced apart from the membrane 110 by a predetermined gap g. This prevents strong wind or low frequency flow from escaping through the gap between the membrane 120 and the fixed electrode part 120 to prevent deformation of the membrane, So that the displacement is generated vertically.

In addition, the fixed electrode part 120 is provided with a conductive part 121 facing the conductive part 111a of the membrane.

4, an end portion of the conductive portion 111a of the membrane 110 with respect to a vibration direction of the membrane 110 is positioned at a center of the conductive portion 121 of the fixed electrode portion 120, As shown in FIG.

That is, when the length of the conductive portion 111a of the membrane 110 is defined as Lm and the length of the conductive portion 121 formed on the fixed electrode portion 120 is defined as Lb with respect to the displacement direction of the membrane 110, , The end portion of the conductive portion 111a is positioned at Lb 占 중심 2 which is the center of the conductive portion 121 and the distance that the membrane 110 can move maximum by the negative pressure is Lb 占 1/2.

The elastic supporter 130 connects the membrane 110 and the fixed electrode unit 120 and resiliently supports the membrane 110 to the fixed electrode unit 120. Further, the elastic supporter 130 may have a groove-like structure in the diaphragm plate.

The elastic supporting part 130 connects the membrane 11 and the fixed electrode part 120 in a direction perpendicular to the displacement direction of the membrane 110.

One end of the elastic support part 130 is coupled to the side wall part 111 of the membrane 110 and the other end of the elastic support part 130 is coupled to one side of the fixed electrode part facing the side wall part 111.

In addition, FIG. 2 illustrates that four elastic supports 130 are provided as one embodiment, and a plurality of elastic supports 130 may be formed at equal intervals.

Next, the support part 130 supports the fixed electrode part 120. [ The support portion 130 may be coupled to the lower portion of the fixed electrode portion 120 in the displacement direction of the membrane. In addition, the support 130 may be formed of a silicon substrate.

5 is a schematic use state diagram of the microphone shown in Fig. As shown in the drawing, the membrane 110 is displaced when a sound wave (SW) is applied from the outside.

That is, the membrane 110 is displaced by the sound wave SW and elastically supported by the elastic supporting part 130, so that the vibration characteristic is improved and the restoring force is provided.

When the displacement of the membrane 110 is generated, the overlapping area between the conductive part 111a of the membrane 110 and the conductive part 121 of the fixed electrode part 120 changes, And ΔC is generated.

That is, the capacitance C is defined as follows.

C =? R? E / g

(Where εr = permittivity, ε = electric constance, A = overlapping area, g = distance between membrane and fixed electrode)

As described above, the capacitance C varies according to the change of the area A between the conductive part 111a of the membrane 110 and the conductive part 121 of the fixed electrode part 120, And the sound wave can be converted into an electric signal through the above-mentioned? C.

On the other hand, when ΔC is calculated through the change in the distance g between the membrane 110 and the fixed electrode unit 120, ΔC does not change linearly, and ΔC linearly changes according to the change of A Change.

Therefore, the microphone 100 according to an embodiment of the present invention can reduce ΔC (ΔC) by changing the area overlapping between the conductive part 111a of the membrane 110 and the conductive part 121 of the fixed electrode part 120, It is possible to more accurately convert a sound wave into an electrical signal.

6 is a plan view schematically showing a microphone according to a second embodiment of the present invention. As shown in the figure, the microphone 200 differs from the microphone 100 according to the first embodiment shown in FIG. 2 only in the shape of the membrane and the fixed electrode.

More specifically, the microphone 200 includes a membrane 210, a fixed electrode 220, an elastic support 230, and a support (not shown).

The membrane 210 has a sidewall 211 at an end thereof in an orthogonal direction to the displacement direction. In addition, since the membrane 210 is formed in a disk shape, the side wall portion 211 is formed in the circumferential direction at the radial end portion.

A plurality of protrusions 211a protruding toward the fixed electrode portion are formed at equal intervals in the side wall portion 211 and a plurality of protrusions 211b protruding toward the fixed electrode portion 220 are formed on the side wall portion 211 including the protrusions 211a. The conductive portion 211b may be formed on one side of the conductive portion 211b.

In addition, the projecting portion 211a maximizes the change in capacitance by maximizing the overlapping area of the conductive portion and the conductive portion of the opposing fixed electrode portion. 6 shows a rectangular protrusion as an example of this, but the present invention is not limited thereto and may be variously implemented in a semicircular shape or the like.

In addition, since the membrane 210 is formed of a thin film, the side wall portion 211 is formed at the end of the membrane so as to protrude in the displacement direction of the membrane 210.

Next, the fixed electrode unit 220 is positioned at the outer periphery of the membrane 210. In addition, the fixed electrode unit 220 may be positioned at an outer peripheral portion of the membrane 210 in a direction orthogonal to the displacement direction of the membrane 210.

The fixed electrode unit 220 is spaced apart from the side wall 211 of the membrane 210 by a predetermined gap g.

The fixed electrode unit 220 corresponds to the protrusion 211a of the membrane 210 and has a groove 221a.

6, the conductive part 221b of the fixed electrode part 220 is formed to be opposed to the conductive part 211b formed in the side wall part 211 of the membrane 210. As shown in FIG.

4, the conductive part 211b formed on the side wall part 211 of the membrane 210 with respect to the vibrating direction of the membrane 110 may be formed in the same manner as the microphone according to the first embodiment, May be positioned at the center of the conductive portion 221b of the fixed electrode portion 220

The microphone 200 according to the second embodiment of the present invention is superimposed between the conductive part 211b of the membrane 210 and the conductive part 221b of the fixed electrode part 220, The area to be detected is maximized, and as the ΔC is detected, the sound wave can be more accurately converted into an electrical signal.

FIG. 7 is a perspective view schematically showing a microphone according to a third embodiment of the present invention, FIG. 8 is a schematic plan view of the microphone shown in FIG. 7, and FIG. 9 is a schematic AA sectional view of the microphone shown in FIG. to be. 3, the microphone 300 includes a membrane 310, a fixed electrode 320, a support 330, and a support 340.

In the microphone 300 according to the third embodiment of the present invention, when a sound wave is applied from the outside, the membrane 310 is displaced on both sides with the center portion fixed by the support member 330, A change in capacitance of the fixed electrode portion 320 with respect to the overlapping surface of the membrane 310 is detected to convert the sound wave into an electrical signal.

More specifically, the membrane 310 is for generating positional displacement by a sound wave, and may be formed as a disc-shaped thin film. As described above, the membrane 310 has a symmetrical shape in which the center portion is fixed and symmetric displacement is generated from the both sides in the state where the center portion is fixed. To this end, the membrane 310 includes a central portion 310a, a side portion 310b, and an opposite side portion 310c.

In addition, the membrane 310 may be made conductive, and at least a portion of the conductive portion may be formed. That is, in order to detect the capacitance change occurring on the opposing surface of the fixed electrode part 320 and the membrane 310, a conductive part is formed on one surface of the membrane 310 opposite to the fixed electrode part 320 .

The membrane 310 has a side wall 311 formed at an end of the membrane 310 in the direction orthogonal to the displacement direction of the membrane 310. The side wall 311 is opposed to the fixed electrode 320, A portion 311a is formed.

Also, since the membrane 310 is formed of a thin film, the side wall part 311 is formed at the end of the membrane so as to protrude in the displacement direction of the membrane 310.

Next, the fixed electrode unit 320 is disposed on the outer periphery of the membrane 310 to form ΔC through a difference in area overlapping the membrane 310.

In addition, the fixed electrode part 320 may be located on the outer side in a direction orthogonal to the displacement direction of the membrane 310.

The fixed electrode part 320 is spaced apart from the membrane 310 by a predetermined gap g. This prevents a strong wind or low frequency flow from escaping through the gap between the membrane 310 and the fixed electrode part 320 to prevent deformation of the membrane, So that the displacement is generated vertically.

The conductive part 321 is formed on the fixed electrode part 320 so as to face the conductive part 311a formed on the side wall part of the membrane 310.

9, the end portion of the conductive portion 311a of the membrane with respect to the displacement direction of the membrane 310 is positioned at the center of the conductive portion 321 of the fixed electrode portion 320 .

That is, when the length of the conductive part 311a of the membrane 310 is defined as Lm and the length of the conductive part 321 formed on the fixed electrode part 320 is defined as Lb with respect to the displacement direction of the membrane 310, , The end of the conductive part 311a is located at Lb 占 중심 2 which is the center of the conductive part 321 and the distance that the membrane 310 can be moved maximum by the negative pressure is Lb 占 1/2.

Next, the support member 330 connects the membrane 310 and the fixed electrode unit 320. In addition, the support member (330) As a result, . In addition, symmetric displacement may occur on both sides of the membrane 310 with respect to the center.

To this end, the support member 330 includes a center fixing portion 331 and a frame portion 332. The center fixing portion 331 is formed to correspond to the center portion 310a of the membrane 310.

The frame portion 332 may correspond to the fixed electrode portion 320 and may be fixedly coupled to the fixed electrode portion 320.

10 is a schematic use state diagram of the microphone shown in Fig. As shown in the drawing, the membrane 310 is displaced when a sound wave SW is applied from the outside. That is, the membrane 310 is fixed to the one side 310b of the membrane 310 with the center portion 310a fixed to the center fixing portion 331 of the support member 330 by the sound wave SW, The side portion 310c is displaced. At this time, the one side 310b and the other side 310c may be symmetrically displaced according to seesaw motion.

That is, when the one side portion 310b is downward, the other side portion 310c is upward, and when the one side portion 310b is upward, the other side portion 310c may be downward.

When the displacement of the membrane 310 is generated, an overlapping area between the conductive part 311a of the membrane 310 and the conductive part 321 of the fixed electrode part 320 changes, C is generated, and the sound wave can be converted into an electric signal through the above-mentioned [Delta] C.

11 is a plan view schematically showing a microphone according to a fourth embodiment of the present invention. As shown in the figure, the microphone 400 differs from the microphone 300 according to the third embodiment shown in FIG. 8 only in the shape of the membrane and the fixed electrode.

More specifically, the microphone 400 includes a membrane 410, a fixed electrode part 420, a supporting member 430, and a supporting part.

Also, in the microphone 400 according to the fourth embodiment of the present invention, when the sound waves are introduced from the outside, the membrane 410 is displaced on both sides in a state where the center portion is fixed by the support member 430, The change in capacitance with respect to the overlapping surface of the fixed electrode part 420 and the membrane 410 is detected by the displacement to convert the sound wave into an electrical signal.

More specifically, the membrane 410 is displaced by a sound wave, and may be a disk-shaped thin film. The membrane 410 has a rectangular shape symmetrical with respect to a central portion of the membrane 410 so as to be displaced on both sides in a state where the center portion is fixed as described above. To this end, the membrane 410 includes a central portion 410a, a side portion 410b and an opposite side portion 410c.

A side wall 411 is formed at an end of the membrane 410 orthogonal to the displacement direction and a plurality of protrusions 411a protruding toward the fixed electrode are formed at the side wall 411 at equal intervals And a conductive portion 411b may be formed on one side of the side wall portion 411 including the protruding portion 411a opposite to the fixed electrode portion 420. [

In addition, the protrusion 411a maximizes the change in capacitance by maximizing the overlapping area of the conductive part and the conductive part of the opposing fixed electrode part. 11 shows a square protrusion as an example of this, but the present invention is not limited thereto, and can be variously implemented in a semicircular shape or the like.

In addition, since the membrane 410 is formed of a thin film, the side wall part 411 is formed at the end of the membrane so as to protrude in the displacement direction of the membrane 410.

Next, the fixed electrode unit 420 is positioned on the outer periphery of the membrane 410. Also, the fixed electrode part 420 may be positioned at an outer circumferential part of the membrane 410 in a direction orthogonal to the displacement direction of the membrane 410.

The fixed electrode unit 420 is spaced apart from the side wall 411 of the membrane 410 by a predetermined gap g.

The fixed electrode part 420 corresponds to the protruding part 411a of the membrane 410 and has a groove part 421a.

In addition, a conductive portion 421b is formed on the surface of the fixed electrode portion 420 opposite to the membrane 410. 11, the conductive portion 421b of the fixed electrode portion 420 is formed to be opposed to the conductive portion 411b formed in the side wall portion 411 of the membrane 410. As shown in FIG.

4, the conductive part 411b formed on the side wall part 411 of the membrane 410 with respect to the displacement direction of the membrane 410 may be formed in the same manner as the microphone according to the first embodiment, May be positioned at the center of the conductive portion 421b of the fixed electrode portion 420

The microphone 400 according to the fourth embodiment of the present invention is superimposed between the conductive part 411b of the membrane 410 and the conductive part 421b of the fixed electrode part 420, The area to be detected is maximized, and as ΔC is detected, the sound wave can be more accurately converted into an electrical signal.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the same is by way of illustration and example only and is not to be construed as limiting the present invention. It is obvious that the modification and the modification are possible.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

100: microphone 110: membrane
111: side wall portion 111a: conductive portion
120: fixed electrode part 121: conductive part
130: Elastic support part 140: Support part
200: microphone 210: membrane
211: side wall portion 211a:
211b: Conductive part
220: fixed electrode part
221a: groove portion 221b: conductive portion
230: elastic support
300: microphone 310: membrane
310a: center portion 310b: one side portion
310c: the other side 311:
311a: Conductive part
320: fixed electrode part 321: conductive part
330: support member 331:
332:
340:
400: microphone 410: membrane
411: side wall part 411a:
411b: Conductive part
420: fixed electrode part 421a:
421b: Conductive part
430: support member
430: support member 440:

Claims (23)

Membrane;
A fixed electrode positioned to face the membrane and positioned externally with respect to a displacement direction of the membrane; And
And an elastic support portion connecting the membrane and the fixed electrode portion so that the membrane can be displaced,
Wherein the membrane is formed with a conductive portion on one surface thereof facing each other, the membrane has a sidewall portion at an end in an orthogonal direction to the displacement direction, and the sidewall portion has a conductive portion facing the fixed electrode portion.
The method according to claim 1,
Wherein the fixed electrode portion is spaced apart from the membrane in a direction orthogonal to a displacement direction of the membrane,
delete The method according to claim 1,
Wherein the membrane is formed of a thin film, and the side wall portion is formed to protrude in a displacement direction of the membrane.
The method according to claim 1,
Wherein the fixed electrode portion is formed to have a conductive portion facing the conductive portion formed on the side wall portion of the membrane.
The method of claim 5,
And a lower end portion of the conductive portion formed on the side wall portion of the membrane with respect to the displacement direction of the membrane is positioned at the center portion of the conductive portion of the fixed electrode portion.
The method according to claim 1,
And the elastic support portion connects the membrane and the fixed electrode portion in a direction orthogonal to the displacement direction of the membrane.
The method of claim 7,
Wherein the elastic supporting portions connect the membrane and the fixed electrode portion at equal intervals.
The method according to claim 1,
And a support portion coupled to the fixed electrode portion to support the fixed electrode portion with respect to the displacement direction of the membrane,
The method according to claim 1,
A plurality of protrusions protruding toward the fixed electrode part are formed on the side wall of the membrane, and a groove corresponding to the protrusion is formed on the fixed electrode part.
The method of claim 10,
Wherein the protruding portion of the side wall portion and the groove portion of the fixed electrode portion are opposed to each other to have a conductive portion.
Membrane;
A fixed electrode part positioned opposite to the membrane and positioned externally with respect to a displacement direction of the membrane; And
And a support member coupled to a central portion of the membrane such that both sides of the membrane are displaceable,
The membrane and the fixed electrode portion are each formed with a conductive portion on one surface thereof facing each other,
Wherein the membrane includes a central portion to which the support member is coupled, and one side portion and the other side portion formed to correspond to each other on both sides of the center portion.
The method of claim 12,
Wherein the fixed electrode portion is spaced apart from the membrane in a direction orthogonal to the displacement direction of the membrane.
delete The method of claim 12,
Wherein the one side portion and the other side portion are symmetrical with respect to each other.
The method of claim 12,
Wherein the membrane has a sidewall portion formed at an end of the membrane in an orthogonal direction with respect to a displacement direction, and a conductive portion facing the fixed electrode portion is formed at the sidewall portion.
18. The method of claim 16,
Wherein the membrane is formed of a thin film, and the side wall portion is formed to protrude in a displacement direction of the membrane.
18. The method of claim 16,
Wherein the fixed electrode portion is formed to have a conductive portion facing the conductive portion formed on the side wall portion of the membrane.
19. The method of claim 18,
And a lower portion of a sidewall portion of the membrane having the conductive portion with respect to a displacement direction of the membrane is positioned at a center portion of the conductive portion of the fixed electrode portion.
The method of claim 12,
The support member
A center fixing part formed to correspond to a center part of the membrane; And
And a frame portion fixedly coupled to the fixed electrode portion.
The method of claim 12,
And a support portion coupled to the fixed electrode portion to support the fixed electrode portion with respect to the displacement direction of the membrane,
18. The method of claim 16,
A plurality of protrusions protruding toward the fixed electrode part are formed on the side wall of the membrane, and a groove corresponding to the protrusion is formed on the fixed electrode part.
23. The method of claim 22,
Wherein the protruding portion of the side wall portion and the groove portion of the fixed electrode portion are opposed to each other to have a conductive portion.

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