KR101384385B1 - Three demension semi-active mount system for reducing vibration from ground and semi-active control method - Google Patents

Abstract

Disclosed are a three-dimensional semi-active mount system for reducing vibration from the ground and a semi-active control method. The semi-active mount system may include a plate-shaped table, at least one mount which is formed at the lower part of the table and reduces the vibration of an object placed on the top of the table, a sensor which is formed at one side of the table and measures the response of the object, due to disturbance, and a controller which changes the rigidity of the mount based on the response measured by the sensor.

Description

THREE DEMENSION SEMI-ACTIVE MOUNT SYSTEM FOR REDUCING VIBRATION FROM GROUND AND SEMI--ACTIVE CONTROL METHOD}

Embodiments of the present invention relate to a semi-active mount system and a semi-active control method for reducing three-dimensional vibration.

Mount is for absorbing vibration or shock in a situation where high precision is required, such as semiconductor manufacturing, laser application, etc., and the vibration is interposed through an elastic body between the part subjected to the vibration or shock and the object to be supported. Or absorb shock.

For example, Korean Patent Laid-Open Publication No. 10-1996-0008745 (published April 30, 1998) includes an anti-vibration leveling mount that includes a synthetic resin bottom plate having protrusions inserted into an insertion recess, and an upper portion of the bottom plate. A shaft having an insertion groove in which the projection of the bottom plate is inserted and having a ball receiving portion and a groove, a shaft having an upper thread, a lock nut on the screw, and a ball formed at the lower portion thereof; A dustproof leveling mount is disclosed which consists of a cover that is secured to the foot by bolts to prevent the shaft from falling out.

However, such a mount is unable to absorb substantially all of the vibrations applied from the outside. In addition, the object supported by this mount has a natural vibration period. Therefore, when the period of vibration applied to the mount from the outside corresponds to the natural vibration period of the object supported by the mount, the object resonates with the vibration applied from the outside.

Therefore, there is a need for a method capable of more effectively reducing vibration of an object.

Disclosed are a three-dimensional semi-active mount system and a semi-active control method for reducing vibrations from the ground, which can more effectively reduce the vibration of an object.

Disclosed are a three-dimensional semi-active mount system and a semi-active control method for reducing vibration from the ground, which can prevent the object supported by the mount from resonating with vibrations applied from the outside.

The semi-active mount system includes a plate-shaped table, at least one mount provided at the lower side of the table to reduce vibration of an object located above the table, and provided at one side of the table to measure the response of the object due to disturbance. And a controller that changes the stiffness of the mount based on the sensor and the response measured by the sensor.

According to one side, the sensor may measure at least one of the vibration period and the acceleration of the object.

According to another aspect, the mount may include a magneto- rheological elastomer (MRE), which is a material whose stiffness is changed by a magnetic field as it includes a plurality of magnetic particles, and a plurality of plates stacked at predetermined intervals inside the MRE. .

According to another aspect, the plate may be an aluminum plate to be horizontally stacked in the MRE to increase the vertical stiffness while maintaining the horizontal rigidity of the MRE and to remove the convex phenomenon of the MRE.

According to another aspect of the present invention, if it is determined that the object resonates with the disturbance based on the measured response, the controller changes the stiffness of the mount to change the intrinsic vibration period of the object so that the vertical vibration and The three-dimensional vibration including the horizontal vibration can be reduced.

According to another aspect, the apparatus further comprises a generator coupled to the controller to generate a magnetic field input to the mount, the controller determines the magnitude of the magnetic field to be generated by the generator in accordance with the measured response and at the generator The generated magnetic field can be input to the mount.

The mount includes MRE (Magneto-Rheological Elastomer), which is a rubber including a plurality of magnetic particles, and a plurality of plates stacked at predetermined intervals inside the MRE, and the MRE has a rigidity that varies according to the size of a magnetic field input from the outside. As a result, three-dimensional vibration including vertical vibration and horizontal vibration of an object positioned on the mount may be reduced.

The method for the semi-active control system to perform the semi-active control to reduce the vibration of the object located on the top of the table by measuring the response of the object due to disturbance using a sensor, the response measured by the sensor The method may include generating a magnetic field as a base and inputting the generated magnetic field into a mount provided at a lower side of the table to reduce vibration of an object located at an upper portion of the table.

MRE (Magneto-Rheological Elastomer) included in the mount changes the stiffness according to the size of the magnetic field input from the outside, it is possible to more effectively reduce the three-dimensional vibration including the vertical vibration and horizontal vibration of the object located on the mount .

By measuring the response according to the disturbance input to the mount and thereby changing the rigidity of the mount to change the natural vibration period of the object it can prevent the object from resonating with the disturbance.

1 is a block diagram showing a semi-active mount system for reducing three-dimensional vibration in one embodiment of the present invention.
2 and 3 is a view showing a magnet-Rheological Elastomer (MRE) and a mount including the same according to an embodiment of the present invention.
4 is an exemplary view showing a semi-active mount system for reducing three-dimensional vibration in an embodiment of the present invention.
5 is a flowchart illustrating a semi-active control method for reducing three-dimensional vibration in an embodiment of the present invention.
FIG. 6 is a diagram illustrating an environment for performance testing of a semi-active mount system according to one embodiment of the present invention. FIG.
7 is a diagram showing the disturbance used in the experiment in one embodiment of the present invention.
8 and 9 are diagrams showing experimental results using the disturbance of FIG. 7 according to one embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a block diagram showing a semi-active mount system for reducing three-dimensional vibration in one embodiment of the present invention.

The semi-active mount system according to the present invention is a table (110), mount (120), sensor (130), controller (Controller) (to reduce the three-dimensional vibration of the object to the semi-active) 140 and a generator 150.

Table 110 is for supporting an object to reduce the three-dimensional vibration, it may be formed in a plate shape so that the stability of the object can be maintained. As an example, the table 110 may be implemented in the form of a circle, a triangle, a rectangle, or the like, or may be implemented in the form of a dish as necessary.

The mount 120 is provided below the table 110 to reduce vibration of an object located above the table 110. In FIG. 1, for example, one mount supports the center of the table 110. However, in the semi-active mount system according to the present invention, a plurality of mounts may be used as needed, and the table 110 may have a rectangular shape. Each mount may support each edge of the table when formed as.

The mount 120 may include a magneto-rheological elastomer (MRE) including a plurality of magnetic particles and a plurality of plates stacked at predetermined intervals inside the MRE. At this time, the plate is horizontally stacked inside the MRE to increase the vertical rigidity while maintaining the horizontal rigidity of the MRE, it is possible to eliminate the convex phenomenon of the MRE. For example, the plate may be implemented as an aluminum plate. MRE is a rubber material including a plurality of magnetic particles, the rigidity is changed by the influence of the magnetic particles in accordance with the size of the magnetic field applied. Thus, the mount 120 may vary in rigidity depending on the strength of the magnetic field applied to the mount.

The sensor 130 is provided at one side of the table 110 to measure the response of the object located on the table 110 in disturbance. In this case, the sensor 130 may measure at least one of the vibration period and the acceleration of the object located on the table.

The controller 140 controls the stiffness of the mount 140 to be changed based on the response measured by the sensor 130. For example, the controller 140 may determine whether an object resonates with the disturbance based on the response measured by the sensor 130. When it is determined to resonate, the controller 140 determines the magnitude of the magnetic field to be input to the mount 120 using a predetermined control algorithm according to the measured response, and uses the control command to determine the magnitude of the magnetic field. While controlling to generate this, the rigidity of the mount 120 is changed by controlling the generated magnetic field to be input to the mount (120). When the rigidity of the mount 120 is changed, the natural vibration period of the object located on the table 110 is also changed, and thus three-dimensional vibration including vertical vibration and horizontal vibration of the object may be reduced.

The generator 150 is connected to the controller 140 and generates a magnetic field to be input to the mount 120 according to a control command transmitted from the controller 140. As the generator 150, various apparatuses capable of generating a magnetic field may be used, and thus, the generator used in the semi-active mount system according to the present invention is not limited to the apparatus capable of generating only magnetic fields.

2 and 3 is a view showing a magnet-Rheological Elastomer (MRE) and a mount including the same according to an embodiment of the present invention. Hereinafter, the mount according to the present invention will be described in more detail with reference to FIGS. 2 and 3.

First, referring to FIG. 2, the mount according to the present invention may include a magneto- rheological elastomer (MRE) including a plurality of magnetic particles and a plurality of plates stacked at predetermined intervals inside the MRE.

MRE 210 is a rubber containing a plurality of magnetic particles 220, as shown in Figure 2 (a), the rigidity is changed by the magnetic particles 220 according to the size of the magnetic field input from the outside. Therefore, when an object is placed on the mount, the object may be isolated from the ground to reduce three-dimensional vibration including vertical vibration as well as horizontal vibration of the object.

The plate 230 may be, for example, an aluminum plate. As shown in FIG. 2 (b), the plate 230 is horizontally stacked inside the MRE 210 to increase vertical stiffness while maintaining the horizontal stiffness of the MRE 210. The convexization phenomenon of 210 can be eliminated.

On the other hand, MRE 210 may be implemented in a horizontal 25mm, vertical 25mm, height 19mm, as shown in Figure 3 (a), each plate 230 is horizontal in the MRE 210 with a space of 3mm Can be stacked. 3 (b) and 3 (c) show, for example, mounts implemented in accordance with the present invention.

4 is an exemplary view showing a semi-active mount system for reducing three-dimensional vibration in an embodiment of the present invention.

For example, the semi-active mount system according to the present invention may be installed on the ground as shown in FIG.

The table 410 is shown to be formed in a plate shape in order to stably support the object to reduce the three-dimensional vibration, the mount 420 is provided on the lower side of the table 410 to the top of the table 410 Vibration of the object 430 positioned at is reduced. 4 illustrates an example in which a plurality of mounts are provided at each corner of the table 410.

The mount 420 may include an MRE including a plurality of magnetic particles and a plurality of plates stacked at predetermined intervals inside the MRE, as described above with reference to FIGS. 2 and 3, wherein the plate is disposed inside the MRE. By stacking horizontally, vertical stiffness can be increased while maintaining horizontal stiffness of the MRE, and convexization of the MRE can be eliminated.

The mount 420 has a rigidity that varies depending on the magnitude of the magnetic field input by the MRE. Therefore, even if the three-dimensional vibration 450 is applied to the mount 420 from the ground, the vibration of the object 430 located on the table 410 can be reduced.

On the other hand, the sensor 440 is provided on one side of the table 410, and measures the response (for example, vibration period, acceleration, etc.) of the object 430 located on the table 410. The response measured by the sensor 440 is transmitted to the controller, and thus, the controller may determine whether the object 430 resonates based on the information received from the sensor 440.

If it is determined that the object 430 resonates with the three-dimensional vibration 450, the controller uses a predetermined control algorithm to change the natural vibration period of the object 430, and the magnitude of the magnetic field to be input to the mount 420. Determine and control the generator to input the magnetic field of the determined size to the mount (420).

When the magnetic field is input to the mount 420, the stiffness of the mount 420 is changed, and thus the natural vibration period of the object 430 positioned on the table 410 is also changed. Therefore, the semi-active mount system according to the present invention can effectively reduce the resonance caused by the three-dimensional vibration of the object 430.

5 is a flowchart illustrating a semi-active control method for reducing three-dimensional vibration in an embodiment of the present invention. Hereinafter, referring to FIG. 5, a method of performing semi-active control in order to reduce vibration of an object located at an upper portion of the table according to the present invention will be described in more detail.

First, the semi-active mount system uses sensors to measure the response of objects placed on the table. Here, the sensor may be a sensor for measuring at least one of the vibration period and the acceleration of the object.

Based on the measured response, the vibration of the object is controlled to be equal to or less than the preset frequency or acceleration.

At this time, if it is determined that the response of the object due to the disturbance is measured through the change of the response measured by the sensor, etc. (510), the semi-active mount system determines whether the object resonates with the disturbance based on the measured response. May be (520)

If it is determined that the object resonates in disturbance, the semi-active mount system determines the magnitude of the magnetic field to be input to the mount provided under the table using the control algorithm according to the measured response (530). The control can be input to the mount (540).

For example, if the response of the object due to disturbance is measured excessively or the resonance shape of the object due to disturbance is measured, the controller of the semi-active mount system determines the magnitude of the magnetic field to be generated by the generator and then transmits a control command to the generator. The generator can be controlled to generate a magnetic field of a determined size and input it to the mount. In this case, the mount may include an MRE including a plurality of magnetic particles and a plurality of plates stacked at predetermined intervals within the MRE, so that the mount may be changed in rigidity by a magnetic field input from the generator ( 550). Here, the plates included in the MRE are horizontally stacked inside the MRE, thereby increasing vertical stiffness while maintaining the horizontal stiffness of the MRE, and eliminating convexity of the MRE.

When the rigidity of the mount is changed by the magnetic field input from the generator, the natural vibration period of the object located at the top of the table is changed accordingly. Then, the object no longer resonates with the disturbance, so that the three-dimensional vibration including the vertical vibration and the horizontal vibration of the object can be effectively reduced.

FIG. 6 is a diagram illustrating an environment for performance testing of a semi-active mount system according to one embodiment of the present invention. FIG.

In order to compare the performance between the existing mount and the semi-active mount according to the present invention, as shown in the experimental part, a conventional mount (Base Isolator) is installed on the ground, and the semi-active mount according to the present invention (Smart Base) on the upper side thereof. After the isolator is installed, the vibration and acceleration of the existing mount, the vibration and acceleration of the object supported by the existing mount, the vibration and acceleration of the semi-active mount according to the present invention, and the object of the object supported by the semi-active mount according to the present invention. Vibration and acceleration were measured respectively.

In addition, the variables shown in the Numerical Part were used in this experiment. m _b and m _s respectively represent objects supported by the existing mounts and objects supported by the semi-active mounts according to the present invention, and x _b , x _s and x _g respectively represent vibrations and accelerations of objects supported by the existing mounts. , Vibration, acceleration, and disturbance of an object supported by the semi-active mount according to the present invention. In addition, c _b , c _s represents the dashpot of the existing mount, the desipot of the semi-active mount according to the present invention, respectively, k _b , k _s represents the elastic modulus of the existing mount, the semi-active according to the present invention, respectively The elastic modulus of the mount is shown.

7 is a view showing the disturbance used in the experiment in one embodiment of the present invention, Figures 8 and 9 is a view showing the results of the experiment using the disturbance of Figure 7 in one embodiment of the present invention.

As shown in FIG. 7, initially, a disturbance of 1.3 Hz far from the natural frequency of the object was input, and after 20 seconds, a disturbance of 0.97 Hz corresponding to the natural frequency of the object was input.

Accordingly, the data shown in Table 1 below were obtained from the experimental results as shown in FIGS. 8 and 9.

Base drift Structure drift Accel . base floor Accel . top floor maximum value Base Isolation 0.930mm 0.039mm 40.457 mm / s ² 42.391 mm / s ² Smart Base Isolation 0.901mm
(2.92%) 0.028mm
(28.36%) 31.493 mm / s ²
(22.16%) 32.632 mm / s ²
(23.02%) RMS value Base Isolation 0.436 mm 0.018mm 19.001 mm / s ² 19.792 mm / s ² Smart Base Isolation 0.321mm
(26.29%) 0.011 mm
(38.48%) 13.568mm / s ²
(28.59%) 14.148mm / s ²
(28.52%)

First, referring to FIG. 8 (a), the frequency of the existing mount is similar to the frequency of the semi-active mount according to the present invention, but after 20 seconds, the frequency of the existing mount increases greatly, but the semi-active according to the present invention is increased. It can be seen that the frequency of the mount is significantly reduced compared to the frequency of the existing mount.

Similarly, referring to FIG. 8 (b), the frequency of the object supported by the existing mount and the frequency of the object supported by the semi-active mount according to the present invention are similar to each other initially, but after 20 seconds, While the frequency is greatly increased, it can be seen that the frequency of the object supported by the semi-active mount according to the present invention is reduced.

9 (a), the acceleration of the existing mount is similar to the acceleration of the semi-active mount according to the present invention, but after 20 seconds, the frequency of the existing mount greatly increases, but the semi-active according to the present invention. It can be seen that the frequency of the mount is significantly reduced compared to the frequency of the existing mount. Referring to FIG. 8 (b), the acceleration of the object supported by the existing mount and the acceleration of the object supported by the semi-active mount according to the present invention are initial. Although similar to each other, after 20 seconds, the acceleration of the object supported by the existing mount is greatly increased, while the acceleration of the object supported by the semi-active mount according to the present invention can be seen to be reduced.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. For example, it is to be understood that the techniques described may be performed in a different order than the described methods, and / or that components of the described systems, structures, devices, circuits, Lt; / RTI > or equivalents, even if it is replaced or replaced.

Therefore, other implementations, other embodiments, and equivalents to the claims are also within the scope of the following claims.

110: table
120: mount
130: sensor
140: controller
150: generator

Claims (15)

Plate-shaped table;
At least one mount provided at a lower side of the table to reduce vibration of an object located above the table;
A sensor provided at one side of the table to measure a response of the object due to disturbance; And
A controller for changing the stiffness of the mount based on the response measured by the sensor,
The mount,
Magneto-Rheological Elastomers (MRE) including a plurality of magnetic particles; And
It includes a plurality of plates stacked in a predetermined interval inside the MRE,
The plate may comprise:
Semi-active mounting system, characterized in that the aluminum plate to increase the vertical stiffness while removing the convex phenomenon of the MRE while maintaining the horizontal rigidity of the MRE by being stacked horizontally inside the MRE. The method of claim 1,
The sensor includes:
And at least one of the vibration period and the acceleration of the object. delete delete The method of claim 1,
The controller comprising:
When it is determined that the object resonates with the disturbance based on the measured response, the three-dimensional vibration including the vertical vibration and the horizontal vibration of the object is changed by changing the stiffness of the mount to change the natural vibration period of the object. Semi-active mount system, characterized in that to reduce. The method of claim 1,
A generator coupled to the controller for generating a magnetic field input to the mount,
The controller comprising:
And determining the magnitude of the magnetic field to be generated by the generator according to the measured response and inputting the magnetic field generated by the generator to the mount. Magneto-Rheological Elastomer (MRE), which is a rubber comprising a plurality of magnetic particles; And
A plurality of plates stacked at predetermined intervals in the MRE;
Lt; / RTI >
The MRE,
It includes reducing the three-dimensional vibration including the vertical vibration and the horizontal vibration of the object located on the mount by changing the stiffness according to the magnitude of the magnetic field input from the outside,
The plate may comprise:
Mounting horizontally inside the MRE, the mount is characterized in that the aluminum plate to increase the vertical stiffness while maintaining the horizontal stiffness and to eliminate the convex phenomenon of the MRE. delete 8. The method of claim 7,
The mount,
And the object is isolated from the ground. In the method for the semi-active mounting system to perform the semi-active control to reduce the vibration of the object located on the top of the table,
Measuring a response of the object due to disturbance using a sensor;
Generating a magnetic field based on the response measured by the sensor; And
Inputting the generated magnetic field into a mount provided at a lower side of the table to reduce vibration of an object located above the table;
The mount,
MRE (Magneto-Rheological Elastomer) including a plurality of magnetic particles and a plurality of plates stacked in a predetermined interval inside the MRE, characterized in that the rigidity is changed by the input magnetic field,
The plate may comprise:
Semi-active control method characterized in that the aluminum plate to be horizontally stacked inside the MRE to increase the vertical stiffness while maintaining the horizontal stiffness of the MRE and to remove the convex phenomenon of the MRE. 11. The method of claim 10,
After the measuring step,
Determining whether the object resonates with the disturbance based on the measured response;
Determining the magnitude of the magnetic field according to the measured response when it is determined that the object resonates in the disturbance.
Semi-active control method further comprising. 11. The method of claim 10,
The sensor includes:
Semi-active control method, characterized in that for measuring at least one of the vibration period and the acceleration of the object. delete delete 11. The method of claim 10,
After the input step,
And reducing the three-dimensional vibration including the vertical vibration and the horizontal vibration of the object by changing the natural vibration period of the object using the mount.

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