KR101203965B1 - 인쇄회로기판 및 그 제조방법 - Google Patents
인쇄회로기판 및 그 제조방법 Download PDFInfo
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- KR101203965B1 KR101203965B1 KR1020090114286A KR20090114286A KR101203965B1 KR 101203965 B1 KR101203965 B1 KR 101203965B1 KR 1020090114286 A KR1020090114286 A KR 1020090114286A KR 20090114286 A KR20090114286 A KR 20090114286A KR 101203965 B1 KR101203965 B1 KR 101203965B1
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- circuit board
- printed circuit
- seed layer
- insulating layer
- circuit pattern
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 claims abstract description 80
- 238000005530 etching Methods 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims description 25
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 24
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 24
- 239000010949 copper Substances 0.000 claims description 19
- 239000010931 gold Substances 0.000 claims description 16
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 10
- 229910052802 copper Inorganic materials 0.000 claims description 10
- 239000007769 metal material Substances 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 150000002500 ions Chemical class 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- PAYRUJLWNCNPSJ-UHFFFAOYSA-N Aniline Chemical compound NC1=CC=CC=C1 PAYRUJLWNCNPSJ-UHFFFAOYSA-N 0.000 claims description 8
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 claims description 8
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical compound C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 claims description 8
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 8
- 229910052737 gold Inorganic materials 0.000 claims description 8
- 229910052738 indium Inorganic materials 0.000 claims description 8
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 8
- 229910052759 nickel Inorganic materials 0.000 claims description 8
- 229910052763 palladium Inorganic materials 0.000 claims description 8
- 239000010936 titanium Substances 0.000 claims description 8
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 4
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 150000001336 alkenes Chemical class 0.000 claims description 4
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 4
- 239000006229 carbon black Substances 0.000 claims description 4
- 229910021393 carbon nanotube Inorganic materials 0.000 claims description 4
- 239000002041 carbon nanotube Substances 0.000 claims description 4
- 239000002131 composite material Substances 0.000 claims description 4
- 229920001940 conductive polymer Polymers 0.000 claims description 4
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims description 4
- 229910002804 graphite Inorganic materials 0.000 claims description 4
- 239000010439 graphite Substances 0.000 claims description 4
- 229910010272 inorganic material Inorganic materials 0.000 claims description 4
- 239000011147 inorganic material Substances 0.000 claims description 4
- 239000013528 metallic particle Substances 0.000 claims description 4
- 239000000178 monomer Substances 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 4
- 229910052709 silver Inorganic materials 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- 229930192474 thiophene Natural products 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 239000003575 carbonaceous material Substances 0.000 claims description 3
- 238000007772 electroless plating Methods 0.000 claims description 3
- 238000009713 electroplating Methods 0.000 claims description 3
- 238000000059 patterning Methods 0.000 claims description 3
- 238000007650 screen-printing Methods 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 3
- 238000011161 development Methods 0.000 claims description 2
- 238000007639 printing Methods 0.000 claims description 2
- -1 indium (In) Chemical compound 0.000 claims 2
- 230000008569 process Effects 0.000 abstract description 23
- 230000000694 effects Effects 0.000 abstract description 5
- 230000005012 migration Effects 0.000 abstract description 5
- 238000013508 migration Methods 0.000 abstract description 5
- 239000000758 substrate Substances 0.000 description 11
- 239000000654 additive Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/101—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by casting or moulding of conductive material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/0353—Organic insulating material consisting of two or more materials, e.g. two or more polymers, polymer + filler, + reinforcement
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
- H05K1/092—Dispersed materials, e.g. conductive pastes or inks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/20—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by affixing prefabricated conductor pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0364—Conductor shape
- H05K2201/0376—Flush conductors, i.e. flush with the surface of the printed circuit
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
- H05K2203/0278—Flat pressure, e.g. for connecting terminals with anisotropic conductive adhesive
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/108—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern by semi-additive methods; masks therefor
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Abstract
Description
Claims (18)
- (a) 절연층 상에 형성된 시드층 상에 상기 시드층과 상이한 물질로 회로패턴을 형성하는 단계;(b) 상기 회로패턴을 프레스 방식을 통해 절연층 내부로 매립하는 단계;(c) 상기 시드층을 제거하는 단계; 및(d) 상기 매립된 회로의 높이가 절연층의 표면보다 낮게 형성되도록 상기 회로패턴의 표면을 오버에칭하는 단계;를 포함하는 것을 특징으로 하는 인쇄회로기판의 제조방법.
- 청구항 1에 있어서,상기 (a)단계는,(a-1) 절연층상에 시드층을 형성하는 단계;(a-2) 상기 시드층상에 감광물질을 도포하여 노광, 현상을 통해 패터닝하는 단계;(a-3) 상기 패터닝된 감광물질층에 금속물질을 충진하여 회로패턴을 형성하는 단계;(a-4) 상기 패터닝된 감광물질을 제거하는 단계;를 포함하는 것을 특징으로 하는 인쇄회로기판의 제조방법.
- 청구항 2에 있어서,상기 (a-1)단계의 시드층은,구리(Cu), 금(Au), 니켈(Ni), 팔라듐(Pd), 인듐(In), 티타늄(Ti), 주석(Sn) 중 적어도 1 이상을 포함하는 금속층인 것을 특징으로 하는 인쇄회로기판의 제조방법.
- 청구항 2에 있어서,상기 (a-1)단계의 시드층은,아닐린, 피롤, 싸이오펜 및 아세틸렌을 포함하는 알켄 및 그 유도체를 단량체로 사용되어 지는 전도성 고분자인 것을 특징으로 하는 인쇄회로기판의 제조방법.
- 청구항 2에 있어서,상기 (a-1)단계의 시드층은,금속성 입자 및 이온을 포함하는 고분자복합체인 것을 특징으로 하는 인쇄회로기판의 제조방법.
- 청구항 2에 있어서,상기 (a-1)단계의 시드층은,그라파이트, 카본나노튜브 및 카본블랙을 포함하는 카본계와 인듐(In), 주석(Sn) 및 이산화티타늄(TiO2)을 포함하는 무기물질 중 적어도 1 이상을 포함하는 것을 특징으로 하는 인쇄회로기판의 제조방법.
- 청구항 2에 있어서,상기 (a-3)단계는,상기 금속물질을 충진하는 방법으로서 무전해 도금, 전해 도금, 스크린 프린팅, 디스펜싱, 잉크 분사법, 드라이 방식 중 적어도 어느 하나인 것을 특징으로 하는 인쇄회로기판의 제조방법.
- 청구항 2에 있어서,상기 (a-3)단계의 금속물질은,구리(Cu), 은(Ag), 주석(Sn), 금(Au), 니켈(Ni), 팔라듐(Pd) 중 적어도 1 이상을 포함하는 것을 특징으로 하는 인쇄회로기판의 제조방법.
- 청구항 2에 있어서,상기 (b)단계의 프레스 방식은,열과 압력을 동시에 가하는 프레스 방식, 초음파를 이용한 프레스 방식, 또는 써멀 레이저(Thermal Lazer)를 이용한 프레스 방식 중 어느 하나인 것을 특징으로 하는 인쇄회로기판의 제조방법.
- 삭제
- 절연층;상기 절연층 내부로 프레스 방식을 통해 매립되는 회로패턴; 및상기 회로패턴과 상이한 물질층으로 이루어지며, 상기 절연층 상에 형성되고, 그 위에 회로패턴이 형성되는 박막의 시드층;을 구비하되,상기 절연층 상의 시드층이 제거된 후 상기 회로패턴의 표면은 오버에칭에 의해 상기 절연층의 표면 이하의 높이에 노출되는 구조로 형성하는, 청구항 1의 인쇄회로기판의 제조방법에 의해 제조되는 인쇄회로기판.
- 청구항 11에 있어서,상기 회로패턴은,상부면에서 하부면으로 테이퍼진 형상으로 구현되는 인쇄회로기판.
- 청구항 12에 있어서,상기 회로패턴은,구리(Cu), 은(Ag), 주석(Sn), 금(Au), 니켈(Ni), 팔라듐(Pd) 중 어느 하나 또는 적어도 2이상의 물질로 이루어지는 인쇄회로기판.
- 삭제
- 청구항 11에 있어서,상기 시드층은, 구리(Cu), 금(Au), 니켈(Ni), 팔라듐(Pd), 인듐(In), 티타늄(Ti), 주석(Sn) 중 적어도 1 이상을 포함하는 금속층인 인쇄회로기판.
- 청구항 11에 있어서,상기 시드층은, 아닐린, 피롤, 싸이오펜 및 아세틸렌을 포함하는 알켄 및 그 유도체를 단량체로 사용되어 지는 전도성 고분자인 인쇄회로기판.
- 청구항 11에 있어서,상기 시드층은, 금속성 입자 및 이온을 포함하는 고분자복합체인 인쇄회로기판.
- 청구항 11에 있어서,상기 시드층은, 그라파이트, 카본나노튜브 및 카본블랙을 포함하는 카본계와 인듐(In), 주석(Sn) 및 이산화티타늄(TiO2)을 포함하는 무기물질 중 적어도 1 이상을 포함하는 물질로 구현되는 인쇄회로기판.
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020090114286A KR101203965B1 (ko) | 2009-11-25 | 2009-11-25 | 인쇄회로기판 및 그 제조방법 |
TW099140549A TWI415535B (zh) | 2009-11-25 | 2010-11-24 | 印刷電路板及其製造方法 |
JP2012541018A JP6096512B2 (ja) | 2009-11-25 | 2010-11-25 | プリント回路基板及びその製造方法 |
PCT/KR2010/008372 WO2011065757A2 (en) | 2009-11-25 | 2010-11-25 | Printed circuit board and manufacturing method thereof |
US13/512,271 US9532462B2 (en) | 2009-11-25 | 2010-11-25 | Printed circuit board and manufacturing method thereof |
CN201080053333.0A CN102640577B (zh) | 2009-11-25 | 2010-11-25 | 印刷电路板及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020090114286A KR101203965B1 (ko) | 2009-11-25 | 2009-11-25 | 인쇄회로기판 및 그 제조방법 |
Publications (2)
Publication Number | Publication Date |
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KR20110057746A KR20110057746A (ko) | 2011-06-01 |
KR101203965B1 true KR101203965B1 (ko) | 2012-11-26 |
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KR1020090114286A KR101203965B1 (ko) | 2009-11-25 | 2009-11-25 | 인쇄회로기판 및 그 제조방법 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9532462B2 (ko) |
JP (1) | JP6096512B2 (ko) |
KR (1) | KR101203965B1 (ko) |
CN (1) | CN102640577B (ko) |
TW (1) | TWI415535B (ko) |
WO (1) | WO2011065757A2 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20180128766A (ko) * | 2017-05-24 | 2018-12-04 | 삼성전기주식회사 | 전자부품 내장 인쇄회로기판 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201422856A (zh) * | 2012-12-10 | 2014-06-16 | Allied Circuit Co Ltd | 電鍍方法 |
CN103917054B (zh) * | 2014-04-23 | 2017-02-15 | 中物院成都科学技术发展中心 | 一种电子器件或者电路图的制备方法 |
JP6484133B2 (ja) * | 2015-07-09 | 2019-03-13 | 日東電工株式会社 | 配線回路基板の製造方法 |
JP6953279B2 (ja) | 2016-12-07 | 2021-10-27 | 日東電工株式会社 | モジュールの製造方法 |
WO2018147678A1 (ko) * | 2017-02-09 | 2018-08-16 | (주)잉크테크 | 시드층을 이용한 회로형성방법 및 시드층의 선택적 에칭을 위한 에칭액 조성물 |
US20210165511A1 (en) * | 2018-01-11 | 2021-06-03 | Mitsubishi Paper Mills Limited | Conductive material and treatment method |
WO2020042141A1 (zh) * | 2018-08-31 | 2020-03-05 | 深圳大学 | 一种银纳米带透明导电薄膜及制备方法 |
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US20130112463A1 (en) | 2013-05-09 |
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US9532462B2 (en) | 2016-12-27 |
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