KR101194204B1 - Method and apparatus for machining linear groove - Google Patents

Abstract

A reciprocating device composed of a slider equipped with a tool and a linear guide for guiding the slider, the linear grooving device comprising: positioning the reciprocating device and the table so that the reciprocating direction of the slider is in the same direction as the X axis direction And the linear groove longer than the stroke of a tool or a table is machined into the workpiece | work W by combining the reciprocating motion of a slider and the movement of the table in the X-axis direction.

Description

Straight Grooving Method & Straight Grooving Apparatus {METHOD AND APPARATUS FOR MACHINING LINEAR GROOVE}

TECHNICAL FIELD This invention relates to the processing apparatus which performs a linear groove processing, and especially relates to the processing apparatus for connecting-processing a long distance linear groove.

In a mold for molding a light guide plate of a diffraction grating or a liquid crystal display device, it is necessary to process hundreds to tens of thousands of linear grooves. In the processing of processing such a large amount of linear grooves, in order to shorten the processing time, a processing machine having a high speed feed shaft is required. In addition, in the diffraction grating and the light guide plate mold, even a very small processing error is not allowed, and smooth linear movement without causing vibration even at high speed driving is essential. As a transfer mechanism for realizing such high speed and high precision machining, a structure in which an air bearing and a linear motor are combined is known.

The reciprocating motion device disclosed in Unexamined-Japanese-Patent No. 2007-130712 which comprises a bearing between a guide member and a slide member, is provided with the mechanism which generate | occur | produces thrust between the guide member and a slide member, and is a straight line of a slide member. At both ends of the moving shaft stroke, a reversing permanent magnet is disposed on the slide member and the guide member so that a repulsive force is generated in the axial direction between the slide member and the guide member. By this structure, the technique of the reciprocating apparatus which reduces the force which a linear drive apparatus requires at the time of reversing the moving direction of a slide member is disclosed.

In addition, International Publication No. WO97 / 04940 discloses a technique for handling a large workpiece by manufacturing a plurality of identical workpieces and arranging them side by side when manufacturing a precision part such as a prism die.

It is necessary to prepare a metal mold | die which has a larger area for manufacture of the light guide plate which has a larger area like the light guide plate of a liquid crystal display device. However, in the case of machining a straight groove on a workpiece using a machine tool, it is basically impossible to cut a straight groove having a length exceeding the linear feed stroke amount of the linear axis on which the tool or the workpiece is mounted.

As shown in the above International Publication No. WO97 / 04940, in the case of manufacturing a precision part such as a prism mold, a plurality of identical workpieces are manufactured and placed side by side, so that they can be treated as large workpieces. In the case of groove processing, it is very difficult to connect the workpieces without shifting the groove pitch. In addition, in the case of the microgroove, in many cases, it is often impossible to precisely allow the existence of a slight seam, which occurs when the divided workpiece is placed side by side.

It is therefore an object of the present invention to provide a processing method and a processing apparatus for joining long distance straight grooves without dividing the workpiece or detaching the workpiece.

In order to achieve the above object, a machining method according to the present invention is to process a plurality of long straight grooves in a workpiece fixed to a table by a tool mounted on a slider reciprocating along a linear guide. Is a first step of cutting the tool into the workpiece during the movement of the slider and machining a straight groove; and withdrawing the tool from the workpiece during the double movement of the slider. The table or the straight guide in a direction orthogonal to the direction of extension of the straight groove until the tool retracts from the workpiece and the slider moves to the next swinging step. After repeating the third step and the first to third steps to process the straight groove, the table is moved a predetermined distance in the direction of the straight groove. And a fifth step of repeating the first to third steps so as to be connected to the straight grooves processed before the fourth step.

In the fifth step, the table may be moved to correct a seam error in the pitch direction of the linear groove.

In the first step, the motion trajectory of the blade tip of the tool may be curved.

Moreover, in order to achieve the said objective, the processing apparatus which concerns on this invention has the reciprocating apparatus comprised of the slider with a tool, and the linear guide which guides the slider, and makes the slider reciprocate along a linear guide, By processing a linear groove on the fixed workpiece by the tool, the processing apparatus further includes tool infeed driving means for injecting and driving the tool in a direction orthogonal to the reciprocating direction of the slider, and the table. First drive means for moving in the direction, second drive means for moving the table in a second direction orthogonal to the first direction, and the reciprocating device in a direction orthogonal to the first and second directions. And third driving means for moving. And positioning the reciprocating device and the table so that the reciprocating direction of the slider and the first direction are the same direction, and combining the reciprocating motion of the slider and the movement of the table in the first direction. Or straight grooves longer than the stroke of the table are machined into the workpiece.

By moving the table in the second direction, a seam error in the pitch direction of the linear groove generated by the mounting error of the reciprocating device in the first direction may be corrected.

The motion trajectory of the blade tip of the tool may be curved at the time of grooving the workpiece.

The slider may have a linear motor structure axially supported by an air bearing on the linear guide.

The present invention provides a processing apparatus capable of connecting and machining a straight groove longer than a stroke of a table on which a workpiece is mounted and a stroke of a reciprocating motion device without dividing the workpiece or deviating from a machine tool by having the above configuration. can do.

1A is a schematic configuration diagram (front view) of a processing apparatus according to the present invention, and FIG. 1B is a side view thereof.
2 is a schematic block diagram of a control device for controlling a processing device.
FIG. 3: is a figure explaining the schematic structure of the slider and linear guide which comprise the reciprocating apparatus shown in FIG. 1A.
4A and 4B are views showing a tool cutting mechanism of the reciprocating device shown in FIG. 1A.
FIG. 5: is a figure explaining the shaft structure of the linear groove processing apparatus shown in FIG. 1A. FIG.
FIG. 6 is a diagram for describing the machining of a work piece by a tool mounted on a slider. FIG.
7A and 7B are views for explaining the relationship between the length of the workpiece, the stroke amount in the X axis direction of the table, and the stroke amount of the slider (stroke amount of the tool mounted on the slider).
8A and 8B are diagrams illustrating the combination of the X axis and the stroke of the slider.
9A and 9B illustrate the cutting operation on the workpiece by the tool.
10A, 10B, and 10C are diagrams for explaining a tool cutting operation in which burrs are not generated in the joints of the straight groove and the straight groove.
11A and 11B are views for explaining the positional relationship between the work piece and the slider.
It is a figure explaining the relationship between the joint position, the axial direction of a processing apparatus, and the groove pitch direction at the time of connecting and processing a linear groove.
FIG. 13 is an enlarged view of a joint of a groove illustrated in FIG. 12.
14A, 14B and 14C are diagrams for explaining correction of a seam error in the depth direction of the groove.

1A and 1B are schematic configuration diagrams of a processing apparatus of one embodiment of the present invention.

The linear grooving apparatus 20 includes a bed 21 and a column 22 standing upright from the bed 21, and a head 23 formed on the column 22 and moving up and down. And a reciprocating device 24 attached to the head 23 and supported by the jig or the like so as to be movable in two horizontal directions (X-axis direction, Y-axis direction) orthogonal to the bed 21. A plurality of feed shaft drive motors (not shown) which respectively drive the table 4 for fixing the water W on the plate surface and the head 23 in the vertical direction (Z axis direction) and the horizontal direction (XY 2 axis direction). Equipped with. With this configuration, the slider 1 repeats a simple reciprocating motion in the X axis direction by the linear guide 2. In addition, the table 4 is movable by the two sets of transfer mechanisms in the X-Y axis biaxial direction perpendicular to each other in the horizontal plane.

Moreover, the linear groove processing apparatus 20 is controlled by the control apparatus 30 which controls each conveyance axis of an X axis | shaft, a Y axis | shaft, and a Z axis | shaft, and also controls the reciprocating motion device 24 further. As shown in FIG. 2, the control device 30 includes a processor (CPU), a ROM, a RAM, a manual input device (display device / MDI unit) with a display device, and the like, and a linear grooving device according to a machining program. The 20 is controlled and the workpiece W is machined with a straight groove. The reciprocating apparatus 24 is provided with the slider 1 and the linear guide 2, and the tool 3 is attached to the slider 1. As shown in FIG.

The schematic structure of the slider 1 and the linear guide 2 is demonstrated using FIG.

The slider 1 is axially supported by the linear guide 2 so that the slider 1 can move to the axial direction of the linear guide 2. This bearing uses an air bearing structure. In addition, a linear motor is used for the thrust generating means of the slider 1. A coil 27 is disposed on the slider 1, and an iron core 29 and a driving permanent magnet 28 are disposed on the straight guide 2. These coils 27, the iron core 29, and the drive permanent magnet 28 constitute a linear motor. The coil 27 is disposed on the slider 1 so as to face the opposite surface of the straight guide 2 at the center of the slider 1. Moreover, the drive permanent magnet 28 is arrange | positioned at the position of the linear guide 2 corresponding to the both ends of the stroke which the slider 1 reciprocates with respect to the linear guide 2, and the permanent magnet 28 for them is driven. The iron core 29 is disposed between the drive permanent magnet 28. A leaf spring 25 is fixed to the slider 1, and as shown in FIGS. 4A and 4B, the leaf spring 25 is provided with a tool 3 which grooves the workpiece W. As shown in FIG. It is installed.

The linear motor is driven by passing a current through the coil 27 mounted on the slider 1 to move the slider 1 in one direction of the linear guide 2. Then, when the stroke end of the reciprocating motion of the slider 1 is reached, the direction of the current flowing through the coil 27 is changed to reverse the moving direction of the slider 1. Since the drive permanent magnet 28 constituting the linear motor is arranged at the stroke end of the slider 1, thrust ripple or cogging is not generated, and the linear motion with high accuracy is achieved, resulting in high precision. Straight groove machining is possible.

4A and 4B are views showing a tool cutting mechanism of the reciprocating device 24 provided in the processing machine of the present invention. As mentioned above, the leaf spring 25 is fixed to the slider 1, and the leaf spring 25 is attached with the tool 3 which grooves the workpiece | work W. As shown in FIG. And the piezoelectric element 26 is attached between the leaf spring 25 and the slider 1 so that the leaf spring 25 may expand and contract.

When a voltage is applied to this piezoelectric element 26, the piezoelectric element 26 is extended as shown in FIG. 4B according to the magnitude | size of the voltage from the state of FIG. 4A, the plate spring 25 is pressed, and the tool 3 is pressed. The workpiece W is moved in the cutting direction (Z axis direction), the workpiece W is cut in, and the slider 1 is moved. The piezoelectric element 26 is driven and stretched by a control means (not shown) to allow the tool 3 to enter and exit the plate spring 25 and change the amount of cuts to be grooved into the workpiece W. FIG. I'm trying to. That is, the piezoelectric element 26 comprises the means which adjusts the amount of cuts of the tool 3.

Since the tool 3 is attached to the leaf spring 25 and is not directly attached to the piezo element 26, the force applied to the tool 3 is not directly transmitted to the piezo element 26. For this reason, the piezoelectric element 26 which is weak to an external force other than the direction compressed with respect to an expansion-contraction direction is protected by the leaf spring 25. As shown in FIG.

As described above, the slider 1 is reciprocated by changing the direction of the current flowing through the coil 27 formed on the slider 1. In addition, by the control means for controlling the drive of the piezo element 26 during the reciprocating motion of the slider 1, the tool 3 is extended by passing a predetermined current to the piezo element 26 when the slider 1 is moved. ), A predetermined amount of cutting amount is applied, and cutting of the workpiece W is performed. At the time of double acting, the piezo element 26 is reduced, and the tool 3 is retracted and returned to a position where the tool 3 does not interfere with the workpiece W. FIG.

The amount of cuts to the workpiece W by the tool 3 is adjusted by controlling the magnitude of the voltage applied to the piezo element 26. Therefore, by controlling the voltage applied to the piezoelectric element 26, as shown in FIG. 10, the cutting groove process which has a predetermined curvature can be performed.

Using the linear groove processing apparatus 20 described above, the linear groove longer than the stroke of the tool 3 mounted on the slider 1 of the X axis direction of the table 4 and the slider 1 of the reciprocating motion device 24 is cut. The method of the present invention that can be processed into the work W will be described.

First, the shaft structure of the linear grooving apparatus 20 (refer FIG. 1) is demonstrated using FIG. As shown in FIG. 5, the linear groove processing apparatus 20 has a means for moving the table 4 in the two axis directions of the X axis and the Y axis, and moving the slider 1 in the Z axis direction. In FIG. 5, the workpiece W is mounted on the table 4 so that its longitudinal direction is parallel to the X axis direction of the table 4. Moreover, the linear guide 2 of the reciprocating apparatus 24 is also arrange | positioned so that the axial longitudinal direction may become parallel to the X axis of the table 4. In addition, when the table 4 is rotated and the drive direction of the slider 1 is not parallel to the X-axis direction, the table 4 and the slider 1 are parallel to each other. Rotational driving may be performed.

Since the slider 1 can move in the axial length direction of the linear guide 2, the movement direction of the slider 1 of the reciprocating apparatus 24 and the X-axis direction of the table 4 are the same. The Y axis is orthogonal to the X axis. The Z axis is orthogonal to the X axis and the Y axis. In addition, the movement in the Y-axis direction may be configured to move the reciprocating device 24 in the Y-axis direction instead of moving the table 4. In addition, although the table 4 of FIG. 5 is shown as a circular member, the table 4 is not limited to a circular shape.

Next, processing of the linear groove in the workpiece | work W mounted on the table 4 is demonstrated. FIG. 6 is a diagram for describing the machining of a work piece by a tool mounted on a slider. FIG. As shown in FIG. 6, the right end of the workpiece | work W is represented by R and the left end is represented by L. FIG. The slider 1 axially supported by the linear guide 2 reciprocates along the linear guide 2. The slider 1 is synchronized with the reciprocating motion along the linear guide 2, and the tool 3 follows the trajectory indicated by the motion trajectories tr1-> tr2-> tr3-> tr4. The operation of the tool 3 is as described above with reference to FIGS. 3 and 4.

The tool 3 in the motion trajectory tr3 (braking) can execute linear grooving on the workpiece W. FIG. The extension direction of the linear groove formed in the workpiece | work W is the same as the drive direction of the slider 1. And since the X-axis direction of the table 4 and the moving direction of the slider 1 of the reciprocating apparatus 24 are the same as demonstrated in FIG. 5, the extension direction of the linear groove processed to the workpiece | work W is X Parallel to the axis.

However, as is apparent with reference to FIG. 6, since the stroke to which the slider 1 can move is shorter than the length of the workpiece W in the longitudinal direction, from the right end R to the workpiece W in the end. Straight groove processing continued over the left end L cannot be performed only by the reciprocating motion of the slider 1. More precisely, this is because the stroke of the operation trajectory tr3 of the tool 3 does not reach the length of the workpiece W (the distance from the right end R to the left end L of the workpiece W).

Thus, in the present invention, a long straight groove is formed in the workpiece W by using the movement of the table on which the workpiece W is mounted. First, the length 6 of the workpiece W, the stroke amount 7 in the X-axis direction of the table 4, and the stroke amount 5 of the slider 1 (slider 1) using FIG. 7A and FIG. 7B. ), The relationship between the stroke amount of the tool 3 attached to the tool). FIG. 7A shows that the stroke amount 7 in the X-axis direction of the table 4 is short with respect to the length 6 of the workpiece W. FIG. Moreover, since the stroke amount 5 of the slider 1 is also shorter than the length 6 of the workpiece | work W, FIG. 7B can groove | groove the length 6 of the workpiece | work W at once. It is not shown. Reference numeral 8 denotes the stroke amount of the tool 3 attached to the slider 1.

8A and 8B are diagrams illustrating the combination of the X axis and the stroke of the slider. As shown to FIG. 8A and 8B, groove cutting itself is performed by the reciprocating drive of the slider 1, and the X axis of the workpiece | work W and the linear guide 2 is moved by moving the table 4 to an X-axis direction. Move the relative position of the direction. By combining the movement of the table 4 in the X-axis direction and the reciprocating drive of the slider 1, the stroke of the tool 3 attached to the substantial slider 1 can be lengthened.

FIG. 8A shows that the table 4 is moved in the -X axis direction to enable machining of the right side of the workpiece W. In FIG. 8B, the table 4 is moved in the + X axis direction. It shows that the process of the left part of the workpiece | work W is enabled. Thereby, the process which connects a linear groove to the workpiece | work W of the length which cannot be processed only by the stroke of the stroke of the table 4 and the stroke of the slider 1 can be performed.

Next, the cutting operation | movement with respect to the workpiece | work by a tool is demonstrated using FIG. 9A and 9B. FIG. 9A illustrates reciprocating driving along the linear guide 2 of the slider 1 as described in FIG. 6. By the combination of the reciprocating drive of the outgoing direction 9 of the tool 3 and the reciprocating drive of the slider 1, the tool 3 performs the movement of the locus represented by the operation locus tr1 → tr2 → tr3 → tr4.

And as shown to FIG. 9B, the slider 1 and the linear guide 2 are moved to -Z-axis direction so that it may become a position which the tool 3 can cut with respect to the workpiece | work W. As shown to FIG. In doing so, the tool 3 can straight groove the workpiece W at the motion trajectory tr3.

In addition, when the table 4 is moved in the -X axis direction in FIGS. 8A and 8B, the slider 1 moves the reciprocating device 24 in the Z axis direction while continuing the reciprocating motion. Next, the table 4 is moved in the -X axis direction. By doing in this way, when the table 4 is moving, the tool 3 does not unnecessarily groove into a workpiece | work.

In order to process several long straight grooves in the workpiece | work W fixed to the table 4 using the tool 3 attached to the slider 1 which reciprocates along the linear guide 2, it is as follows. do.

The tool 3 is cut into the workpiece | work W at the time of the sliding of the slider 1, and a straight groove is machined into the workpiece | work W. FIG. Then, at the time of double acting of the slider 1, the tool 3 is retracted from the workpiece W to double act. The reciprocating device 24 with the table 4 or the straight guide 2 is provided until the tool 3 is retracted from the workpiece W and the slider 1 moves to the next swing stage. It moves to the direction orthogonal to the extension direction of a linear groove (2nd direction).

And as mentioned above, the tool 3 is cut into the workpiece | work W at the time of the sliding of the slider 1, and a straight groove is processed into the workpiece | work W. As shown in FIG. Then, at the time of double acting of the slider 1, the tool 3 is retracted from the workpiece W to double act. The reciprocating device 24 with the table 4 or the straight guide 2 is provided until the tool 3 is retracted from the workpiece W and the slider 1 moves to the next swing stage. It moves in the direction orthogonal to the extension direction of a linear groove. By repeating this operation, a plurality of straight grooves can be processed.

And when the required number of linear grooves is finished, the table 4 is moved in the extending direction (first direction) of the linear grooves by a predetermined distance. After the predetermined distance movement, as described above, the plurality of linear grooves can be processed by moving the table 4 in the direction orthogonal to the extending direction of the linear grooves.

A plurality of long straight grooves are formed by connecting a plurality of straight grooves processed before moving the table 4 in the first direction and a plurality of straight grooves processed after moving the table 4 in the first direction. It can process to (W).

Here, as shown in FIG. 9B, when the tool 3 is cut in a straight line with respect to the depth direction of the groove (refer to the broken circle 10R), or when the tool 3 is taken out (the broken line is The circle | round | yen 10L), and the tool 3 moves up and down abruptly. At this time, a large burr may generate | occur | produce in the part used as the joint of the linear groove of the workpiece | work W. When such a burr arises in the workpiece | work W, this burr adversely affects the external appearance of the joint of a linear groove, or the precision of the workpiece | work W.

Therefore, as shown in FIG. 10A, the tool 3 is cut in the curved shape with respect to the workpiece | work W. As shown to FIG. FIG. 10A has shown the state which performs linear grooving of the tool 3 to the workpiece | work W. FIG. In the broken circle 10R, the tool 3 can be cut in a curved shape with respect to the work W by connecting the motion trajectories tr2 and tr3 of the tool in a curved shape. Moreover, the tool 3 can be taken out from the workpiece | work W in a curved shape by connecting the motion traces tr3 and tr4 of a tool in the broken line circle | round | yen 10L. Such driving of the tool 3 can be realized by controlling the voltage applied to the piezo element 26.

In the case where the tool 3 is connected to the workpiece W with a straight groove cut in a curved shape, it is necessary to prevent the unevenness from occurring at the joint portion of the straight groove. FIG. 10B shows an example in which the groove processing is performed so as to overlap the joints 11R and 11L of the linear grooves so that irregularities do not occur in the joints of these linear grooves. 10C illustrates an example in which the curvature radius of the curved shape of the linear groove is increased to reduce the seam error (protrusion) in the depth direction of the linear groove.

As shown in FIG. 10C, when the tool 3 is cut in a curved shape with respect to the work W, as shown in FIG. 9B, when the tool 3 is cut in a straight line with respect to the work W, and In comparison, the occurrence of burrs in the seam of the straight grooves can be reduced. Thereby, the external shape of a linear groove and the precision of the workpiece | work W can be improved.

When one linear groove is processed by connecting linear grooves, it is necessary to match the direction in which the linear grooves connected to each other extend. 11A is a view of the positional relationship between the workpiece W and the slider 1 as viewed from the top. The tool 3 mounted on the slider 1 cuts straight grooves along the straight guide 2. As shown in FIG. 11A, when the conveyance direction of the X-axis of the table 4 and the mounting angle of the linear guide 2 are not parallel, the error 12 will generate | occur | produce in the pitch direction 16 of a linear groove. In this case, the linear groove can be connected by moving the table 4 in the Y axis direction orthogonal to the X axis.

An example of the connection of the 1st partial linear groove 13 and the 2nd partial linear groove 14 in the case where the feed direction of the X-axis of the table 4 and the mounting angle of the linear guide 2 exist in the relationship shown to FIG. 11A. Will be described using Fig. 11B.

First, after processing the 1st partial linear groove 13, the table 4 is moved to -X axis direction. And when the 2nd partial linear groove 14 is processed next in this state, the partial linear groove 14 'as shown by a broken line will be processed, and the seam error 12 of a pitch direction will generate | occur | produce. do.

Therefore, the table 4 is moved by a distance (arrow 15) to solve the seam error 12 in the pitch direction in the -Y axis direction. After moving the table 4 in this -Y direction, the 2nd partial linear groove 14 is processed. Then, as shown in FIG. 11B, the 1st partial linear groove 13 and the 2nd partial linear groove 14 are connected, without generating the seam error 12 of a pitch direction. In addition, since the seam error 12 of a pitch direction is minute, you may handle the distance (arrow 15) which eliminates the seam error 12 of a pitch direction as an absolute value of an error.

Next, the correction method of the pitch direction 16 of a linear groove is demonstrated using FIG. 12 and FIG. It is a figure explaining the relationship between the joint position, the axial direction of a processing apparatus, and the groove pitch direction at the time of connecting and processing a groove | channel. The workpiece | work W is provided with the continuous groove | channel 17 which is V shape in the Y-axis direction. As explained using FIG. 11A and FIG. 11B, the groove pitch direction 16 shift | deviates to the seam 18 of a groove according to the error of the mounting angle of the linear guide 2.

FIG. 13 is an enlarged view of the joint 18 of the groove shown in FIG. 12. When a measuring instrument such as a microscope or an electron microscope is used, as shown in FIG. 13, the joint 18 in the groove can check the error amount in the groove pitch direction from the deviation amount of the vertices of the grooves to be connected. The error amount obtained by confirmation is stored in memory (refer FIG. 2), such as RAM of the control apparatus 30 of the linear grooving apparatus 20. FIG.

When the grooves are connected in the same manner in the subsequent machining of the same configuration, when the table on which the workpiece W is mounted is moved in the X-axis direction to form a seam of the grooves, the table is Y-axis so as to eliminate the error amount. Move to the position offset in the direction. Thereafter, the error can be corrected by starting the groove processing. Since the error amount is small, it is enough to move the absolute value of the error amount in the table in the Y axis direction (or -Y axis direction).

Next, correction of a seam error in the depth direction of the groove will be described with reference to FIGS. 14A to 14C. Fig. 14A shows the case where the radius of curvature is small in the cutting trajectory (operation trajectory) of the tool, and Fig. 14B shows the case where the radius of curvature is large in the cutting trajectory (operation trajectory) of the tool. If it is set as the seam error dep1 of the groove depth direction in FIG. 14A, and it is set as the seam error dep2 of the groove depth direction in FIG. 14B, it is dep1> dep2. In this way, the larger the curvature radius of curvature of the cutting operation with respect to the workpiece W by the tool 3, the smaller the seam error (protrusion) in the groove depth direction in the groove machining stroke of the tool 3 can be. . By carrying out the plunging operation with a tool having a larger radius of curvature, the seam error in the depth direction is further corrected.

14C shows that the linear grooves are divided and processed at a distance shorter than the stroke of the slider 1. In this way, by dividing and processing the groove at a short distance, the seam error dep3 in the groove depth direction can be reduced. As the number of times for dividing the groove is increased, the error in the depth direction is corrected.

Claims (7)

In a machining method for processing a plurality of straight grooves longer than the stroke of the tool or the table to the workpiece fixed to the table by a tool mounted on a slider reciprocating along the straight guide,
A first step of cutting the tool into the workpiece at the time of the sliding of the slider and machining a straight groove;
A second step of evacuating and retracting the tool from the workpiece during double acting of the slider;
A third step of moving the table or the straight guide in a direction orthogonal to the direction of extension of the straight groove until the tool withdraws from the workpiece and the slider moves to the next swing step;
A fourth step of repeating the first to third steps to process the straight groove, and then moving the table a predetermined distance in the linear groove direction;
Machining a plurality of linear grooves longer than the stroke of the tool or the table comprising a fifth step of machining the linear groove by repeating the first to third steps so as to be connected to the linear groove processed before the fourth step. Processing method. The method of claim 1,
And machining the plurality of linear grooves longer than the stroke of the tool or the table, comprising moving the table to correct a seam error in the pitch direction of the linear grooves in the fifth step. The method according to claim 1 or 2,
A processing method for processing a plurality of straight grooves longer than the stroke of the tool or the table in which the motion trajectory of the blade edge of the tool is curved in the first step. A reciprocating device composed of a slider equipped with a tool and a linear guide for guiding the slider, the processing device for reciprocating the slider along a linear guide to form a straight groove by the tool on a workpiece fixed to a table. as,
Tool plunging driving means for plunging and driving the tool in a direction orthogonal to the reciprocating direction of the slider;
First driving means for moving the table in a first direction;
Second driving means for moving the table in a second direction orthogonal to the first direction;
Third driving means for moving the reciprocating device in a direction orthogonal to the first and second directions,
Positioning the reciprocating device and the table such that the reciprocating direction of the slider is in the same direction as the first direction, and the tool or the combination of the reciprocating motion of the slider and the movement of the first direction of the table; The said linear groove processing apparatus characterized by processing the said linear groove longer than the stroke of the said table | surface in the said workpiece | work. The method of claim 4, wherein
And moving the table in the second direction to correct a seam error in the pitch direction of the linear groove generated by the mounting error of the reciprocating device in the first direction. The method of claim 4, wherein
The linear motion processing apparatus of the said tool tip was made into the curved shape at the time of the groove processing with respect to the said workpiece | work. 7. The method according to any one of claims 4 to 6,
The slider is a linear groove processing apparatus, characterized in that the linear motor structure axially supported by an air bearing on the linear guide.

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