KR100984333B1 - 전기 기계 변환기 및 그 제작방법 - Google Patents
전기 기계 변환기 및 그 제작방법 Download PDFInfo
- Publication number
- KR100984333B1 KR100984333B1 KR1020080070084A KR20080070084A KR100984333B1 KR 100984333 B1 KR100984333 B1 KR 100984333B1 KR 1020080070084 A KR1020080070084 A KR 1020080070084A KR 20080070084 A KR20080070084 A KR 20080070084A KR 100984333 B1 KR100984333 B1 KR 100984333B1
- Authority
- KR
- South Korea
- Prior art keywords
- base structure
- electromechanical transducer
- material layer
- electro
- piezoelectric
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
- 239000000463 material Substances 0.000 claims abstract description 63
- 239000000853 adhesive Substances 0.000 claims abstract description 11
- 230000001070 adhesive effect Effects 0.000 claims abstract description 11
- 239000008207 working material Substances 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims description 11
- 239000000919 ceramic Substances 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002131 composite material Substances 0.000 claims description 7
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims description 6
- 239000000835 fiber Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 3
- 239000004033 plastic Substances 0.000 claims description 3
- 229920000642 polymer Polymers 0.000 claims description 3
- 238000012360 testing method Methods 0.000 claims description 3
- 239000012530 fluid Substances 0.000 abstract description 3
- 238000006073 displacement reaction Methods 0.000 description 20
- 230000008569 process Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000003733 fiber-reinforced composite Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002336 repolarization Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
- H10N30/073—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies by fusion of metals or by adhesives
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
- Micromachines (AREA)
Abstract
Description
Claims (9)
- 기계적 움직임을 전기적 신호로 변환하거나 전기적 신호를 기계적 움직임으로 변환시키는 전기 기계 변환기(10)에 있어서,기계적인 힘에 의해 초기 응력이 가해진 기저 구조물(12)과;상기 기저 구조물(12)에 부착되는 전기작동 재료층(11)과;상기 전기작동 재료층(11)이 구동될 수 있도록 하는 전극(11a)(11b);을 포함하여 이루어지고,상기 기저 구조물(12)에 가해진 초기 응력을 제거하였을 때 상기 기저 구조물(12) 및 전기작동 재료층(11)이 변형되어 곡률을 갖는 것을 특징으로 하는 전기 기계 변환기.
- 제1항에 있어서,상기 기저 구조물(12)은, 금속, 유리, 플라스틱, 복합재료, 세라믹, 압전재료 또는 형상기억합금 중 어느 하나로 형성되는 것을 특징으로 하는 전기 기계 변환기.
- 제1항에 있어서,상기 전기작동 재료층(11)은, 압전 세라믹, 압전 필름, 압전 파이버, 전기작동 폴리머, 강유전체, 형상기억합금 또는 전왜재료 중 어느 하나로 형성되는 것을 특징으로 하는 전기 기계 변환기.
- 삭제
- 삭제
- 제1항 내지 제4항 중 어느 한 항에 기재된 전기 기계 변환기(10)를 제작하는 방법에 있어서,장비를 이용하여 기계적인 힘으로 기저 구조물(12)에 응력을 가하는 단계;전극(11a)(11b)을 포함한 전기작동 재료층(11)을 상기 기저 구조물(12)에 접착제로 부착하는 단계;상기 접착제가 완전 경화될 때까지 대기하는 단계;상기 전기작동 재료층(11)이 접착된 상기 기저 구조물(12)을 장비로부터 분리하여 전기 기계 변환기(10)를 완성하는 단계;를 포함하는 것을 특징으로 하는 전기 기계 변환기 제작방법.
- 삭제
- 제7항에 있어서,상기 전기 기계 변환기(10)가 완성된 후, 상기 전기작동 재료층(11)의 전극(11a)(11b)에 전기 신호를 입력하여 상기 전기 기계 변환기(10)를 변형시키거나 상기 기저 구조물(12)에 변형을 가하여 상기 전기작동 재료층(11)에서 발생하는 전기신호를 취득하여, 상기 전기 기계 변환기(10)의 작동 상태를 테스트하는 단계를 더 포함하는 것을 특징으로 하는 전기 기계 변환기 제작방법.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080070084A KR100984333B1 (ko) | 2008-07-18 | 2008-07-18 | 전기 기계 변환기 및 그 제작방법 |
CN2009801278628A CN102099939A (zh) | 2008-07-18 | 2009-04-27 | 机电变换器及其制造方法 |
PCT/KR2009/002182 WO2010008133A1 (en) | 2008-07-18 | 2009-04-27 | Electromechanical transducer and method for manufacturing the same |
US13/054,106 US8810113B2 (en) | 2008-07-18 | 2009-04-27 | Electromechanical transducer and method for manufacturing the same |
JP2011518634A JP5369182B2 (ja) | 2008-07-18 | 2009-04-27 | 電気機械変換器及びその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080070084A KR100984333B1 (ko) | 2008-07-18 | 2008-07-18 | 전기 기계 변환기 및 그 제작방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20100009266A KR20100009266A (ko) | 2010-01-27 |
KR100984333B1 true KR100984333B1 (ko) | 2010-09-30 |
Family
ID=41550522
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020080070084A KR100984333B1 (ko) | 2008-07-18 | 2008-07-18 | 전기 기계 변환기 및 그 제작방법 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8810113B2 (ko) |
JP (1) | JP5369182B2 (ko) |
KR (1) | KR100984333B1 (ko) |
CN (1) | CN102099939A (ko) |
WO (1) | WO2010008133A1 (ko) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9963223B2 (en) * | 2011-01-14 | 2018-05-08 | Lockheed Martin Corporation | Aerodynamic force sensing apparatus |
US11205449B2 (en) | 2013-03-18 | 2021-12-21 | Magnecomp Corporation | Multi-layer PZT microacuator with active PZT constraining layers for a DSA suspension |
US10607642B2 (en) | 2013-03-18 | 2020-03-31 | Magnecomp Corporation | Multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension |
US9330698B1 (en) | 2013-03-18 | 2016-05-03 | Magnecomp Corporation | DSA suspension having multi-layer PZT microactuator with active PZT constraining layers |
US9330694B1 (en) | 2013-03-18 | 2016-05-03 | Magnecomp Corporation | HDD microactuator having reverse poling and active restraining layer |
US9741376B1 (en) | 2013-03-18 | 2017-08-22 | Magnecomp Corporation | Multi-layer PZT microactuator having a poled but inactive PZT constraining layer |
US9117468B1 (en) | 2013-03-18 | 2015-08-25 | Magnecomp Corporation | Hard drive suspension microactuator with restraining layer for control of bending |
US9070394B1 (en) | 2013-03-18 | 2015-06-30 | Magnecomp Corporation | Suspension microactuator with wrap-around electrode on inactive constraining layer |
EP3253967B1 (en) | 2015-02-06 | 2018-11-07 | Koninklijke Philips N.V. | Bi-directional actuator |
KR101793225B1 (ko) | 2015-06-10 | 2017-11-03 | 한국과학기술연구원 | 곡면형 압전장치 |
US10128431B1 (en) | 2015-06-20 | 2018-11-13 | Magnecomp Corporation | Method of manufacturing a multi-layer PZT microactuator using wafer-level processing |
JP2017024379A (ja) * | 2015-07-28 | 2017-02-02 | セイコーエプソン株式会社 | 液体吐出装置 |
KR101722876B1 (ko) | 2016-04-25 | 2017-04-03 | 서울대학교산학협력단 | 루프로 연결되어 지능적으로 변형하는 구동기 |
WO2018114637A1 (en) * | 2016-12-19 | 2018-06-28 | Koninklijke Philips N.V. | Breast pump apparatus |
KR102565644B1 (ko) | 2017-05-05 | 2023-08-10 | 허친슨 테크놀로지 인코포레이티드 | 형상 기억 합금 액추에이터 및 그 방법 |
CN113589544B (zh) * | 2017-05-05 | 2023-06-16 | 哈钦森技术股份有限公司 | 形状记忆合金致动器及其方法 |
US11333134B2 (en) | 2017-05-05 | 2022-05-17 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
US11105319B2 (en) | 2017-05-05 | 2021-08-31 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
US11815794B2 (en) | 2017-05-05 | 2023-11-14 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
US11306706B2 (en) | 2017-05-05 | 2022-04-19 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
EP3544070A1 (en) * | 2018-03-21 | 2019-09-25 | Koninklijke Philips N.V. | Actuator device and actuation method |
CN108540008B (zh) * | 2018-05-10 | 2019-07-02 | 西安交通大学 | 基于逆挠曲电的柔性材料往复式多层结构作动器及方法 |
KR101942688B1 (ko) * | 2018-07-25 | 2019-01-25 | 중앙대학교 산학협력단 | 전기활성 물질을 이용한 다중 포인트 자극 타입 에너지 하베스팅 장치 |
JP7014246B2 (ja) * | 2020-03-06 | 2022-02-01 | セイコーエプソン株式会社 | 液体吐出装置 |
CN115298950A (zh) * | 2020-03-30 | 2022-11-04 | 松下知识产权经营株式会社 | 致动器以及光学反射元件 |
US11551986B2 (en) * | 2020-04-02 | 2023-01-10 | Texas Instruments Incorporated | Shape memory polymer for use in semiconductor device fabrication |
US11859598B2 (en) | 2021-06-10 | 2024-01-02 | Hutchinson Technology Incorporated | Shape memory alloy actuators and methods thereof |
WO2023154249A1 (en) * | 2022-02-11 | 2023-08-17 | W. L. Gore & Associates, Inc. | Structurally reinforced ferroelectric articles of manufacture and methods of making and using the same |
US11982263B1 (en) | 2023-05-02 | 2024-05-14 | Hutchinson Technology Incorporated | Shape metal alloy (SMA) bimorph actuators with reduced wire exit angle |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100401808B1 (ko) | 2001-11-28 | 2003-10-17 | 학교법인 건국대학교 | 전기작동 재료층과 섬유복합 재료층으로 구성된 곡면형 작동기 |
KR20040031713A (ko) * | 2001-07-03 | 2004-04-13 | 브래드베리 알. 페이스 | 자력발전 스위치 구동시스템 |
KR20040089530A (ko) * | 2003-04-10 | 2004-10-21 | 가부시키가이샤 무라타 세이사쿠쇼 | 압전형 전기 음향 변환기 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4829420A (ko) * | 1971-08-20 | 1973-04-19 | ||
JPS55115799A (en) * | 1979-02-28 | 1980-09-05 | Kureha Chem Ind Co Ltd | Macromolecular piezoelectric film transducer of multiplex constitution |
JPS6192099A (ja) * | 1984-10-11 | 1986-05-10 | Matsushita Electric Ind Co Ltd | 圧電振動子の製造方法 |
JPS61182400A (ja) * | 1985-02-07 | 1986-08-15 | Olympus Optical Co Ltd | 圧電型振動板の製造方法 |
JPS6271998U (ko) * | 1985-10-23 | 1987-05-08 | ||
JP3120260B2 (ja) * | 1992-12-26 | 2000-12-25 | 日本碍子株式会社 | 圧電/電歪膜型素子 |
JPH06233387A (ja) * | 1993-02-03 | 1994-08-19 | Nippon Chemicon Corp | 圧電発音体及びその製造方法 |
JP3471447B2 (ja) * | 1994-11-16 | 2003-12-02 | 日本碍子株式会社 | セラミックダイヤフラム構造体およびその製造方法 |
US5632841A (en) * | 1995-04-04 | 1997-05-27 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Thin layer composite unimorph ferroelectric driver and sensor |
US5831371A (en) * | 1996-11-22 | 1998-11-03 | Face International Corp. | Snap-action ferroelectric transducer |
WO1998058416A1 (en) * | 1997-06-19 | 1998-12-23 | Nct Group, Inc. | Loudspeaker assembly |
US6030480A (en) * | 1997-07-25 | 2000-02-29 | Face International Corp. | Method for manufacturing multi-layered high-deformation piezoelectric actuators and sensors |
JP2001008291A (ja) * | 1999-06-22 | 2001-01-12 | Taiyo Yuden Co Ltd | 圧電発音体 |
US6847155B2 (en) * | 2001-04-24 | 2005-01-25 | Clemson University | Electroactive apparatus and methods |
US6803700B2 (en) * | 2002-06-06 | 2004-10-12 | Caterpillar Inc. | Piezoelectric device |
JP3587519B2 (ja) * | 2002-12-26 | 2004-11-10 | 太平洋セメント株式会社 | 圧電トランスデューサ |
US6994762B2 (en) * | 2003-02-10 | 2006-02-07 | The Boeing Company | Single crystal piezo (SCP) apparatus and method of forming same |
JP4756309B2 (ja) * | 2004-08-20 | 2011-08-24 | 独立行政法人産業技術総合研究所 | 高感度圧電素子 |
JP5391395B2 (ja) * | 2007-10-15 | 2014-01-15 | 日立金属株式会社 | 圧電薄膜付き基板及び圧電素子 |
JP5471612B2 (ja) * | 2009-06-22 | 2014-04-16 | 日立金属株式会社 | 圧電性薄膜素子の製造方法及び圧電薄膜デバイスの製造方法 |
-
2008
- 2008-07-18 KR KR1020080070084A patent/KR100984333B1/ko active IP Right Grant
-
2009
- 2009-04-27 WO PCT/KR2009/002182 patent/WO2010008133A1/en active Application Filing
- 2009-04-27 CN CN2009801278628A patent/CN102099939A/zh active Pending
- 2009-04-27 JP JP2011518634A patent/JP5369182B2/ja active Active
- 2009-04-27 US US13/054,106 patent/US8810113B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20040031713A (ko) * | 2001-07-03 | 2004-04-13 | 브래드베리 알. 페이스 | 자력발전 스위치 구동시스템 |
KR100401808B1 (ko) | 2001-11-28 | 2003-10-17 | 학교법인 건국대학교 | 전기작동 재료층과 섬유복합 재료층으로 구성된 곡면형 작동기 |
KR20040089530A (ko) * | 2003-04-10 | 2004-10-21 | 가부시키가이샤 무라타 세이사쿠쇼 | 압전형 전기 음향 변환기 |
Non-Patent Citations (1)
Title |
---|
논문:한국소음진동공학회(2008)* |
Also Published As
Publication number | Publication date |
---|---|
JP2011528546A (ja) | 2011-11-17 |
WO2010008133A1 (en) | 2010-01-21 |
US20110109199A1 (en) | 2011-05-12 |
US8810113B2 (en) | 2014-08-19 |
JP5369182B2 (ja) | 2013-12-18 |
KR20100009266A (ko) | 2010-01-27 |
CN102099939A (zh) | 2011-06-15 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100984333B1 (ko) | 전기 기계 변환기 및 그 제작방법 | |
Wang et al. | Constitutive equations of symmetrical triple layer piezoelectric benders | |
Wood et al. | Optimal energy density piezoelectric bending actuators | |
US20020063496A1 (en) | Actuator device | |
Kruusing | Analysis and optimization of loaded cantilever beam microactuators | |
CN1120874A (zh) | 单片预应力陶瓷器件及其制法 | |
Choi et al. | A compliant parallel mechanism with flexure-based joint chains for two translations | |
Yagnamurthy et al. | Mechanical and ferroelectric behavior of PZT-based thin films | |
Ivan et al. | Comparative material study between PZT ceramic and newer crystalline PMN-PT and PZN-PT mateirals for composite bimorph actuators. | |
Dong et al. | Piezoelectric ring-morph actuators for valve application | |
Zhou et al. | Review on piezoelectric actuators: materials, classifications, applications, and recent trends | |
US20080211353A1 (en) | High temperature bimorph actuator | |
Shi et al. | Exact analysis of multi-layer piezoelectric/composite cantilevers | |
York et al. | A geometrically-amplified in-plane piezoelectric actuator for mesoscale robotic systems | |
Jang et al. | Design, fabrication, and characterization of piezoelectric single crystal stack actuators based on PMN-PT | |
Peng et al. | Piezoelectric micromachined ultrasonic transducer based on dome-shaped piezoelectric single layer | |
Ma et al. | Displacement improvement of piezoelectric membrane microactuator by controllable in-plane stress | |
Badr et al. | Applications of piezoelectric materials | |
Park et al. | Experimental performance evaluation of lightweight piezo-composite curved actuators | |
Ma et al. | Investigation on actuation performance of continuous fiber reinforced piezoelectric composite actuator | |
JP4231925B2 (ja) | 金属コア入り圧電ファイバが埋め込まれたスマートボードのアクティブ振動制御方法。 | |
Polla | Application of PZT thin films in microelectromechanical systems | |
US20220246834A1 (en) | Method of manufacturing a curved ceramic structure | |
Cheeseman et al. | Design and analysis of piezoelectric actuators produced by solid freeform fabrication | |
Sikora et al. | Numerical Analysis of Preload Effect in a Piezoelectric Cantilever Energy Harvester on Energy Harvesting Performance |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20130729 Year of fee payment: 4 |
|
FPAY | Annual fee payment |
Payment date: 20140901 Year of fee payment: 5 |
|
FPAY | Annual fee payment |
Payment date: 20150901 Year of fee payment: 6 |
|
FPAY | Annual fee payment |
Payment date: 20160901 Year of fee payment: 7 |
|
FPAY | Annual fee payment |
Payment date: 20170904 Year of fee payment: 8 |
|
FPAY | Annual fee payment |
Payment date: 20180904 Year of fee payment: 9 |
|
FPAY | Annual fee payment |
Payment date: 20190903 Year of fee payment: 10 |