KR100984333B1 - 전기 기계 변환기 및 그 제작방법 - Google Patents
전기 기계 변환기 및 그 제작방법 Download PDFInfo
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- KR100984333B1 KR100984333B1 KR1020080070084A KR20080070084A KR100984333B1 KR 100984333 B1 KR100984333 B1 KR 100984333B1 KR 1020080070084 A KR1020080070084 A KR 1020080070084A KR 20080070084 A KR20080070084 A KR 20080070084A KR 100984333 B1 KR100984333 B1 KR 100984333B1
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 25
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
- H10N30/073—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies by fusion of metals or by adhesives
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
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Abstract
Description
Claims (9)
- 기계적 움직임을 전기적 신호로 변환하거나 전기적 신호를 기계적 움직임으로 변환시키는 전기 기계 변환기(10)에 있어서,기계적인 힘에 의해 초기 응력이 가해진 기저 구조물(12)과;상기 기저 구조물(12)에 부착되는 전기작동 재료층(11)과;상기 전기작동 재료층(11)이 구동될 수 있도록 하는 전극(11a)(11b);을 포함하여 이루어지고,상기 기저 구조물(12)에 가해진 초기 응력을 제거하였을 때 상기 기저 구조물(12) 및 전기작동 재료층(11)이 변형되어 곡률을 갖는 것을 특징으로 하는 전기 기계 변환기.
- 제1항에 있어서,상기 기저 구조물(12)은, 금속, 유리, 플라스틱, 복합재료, 세라믹, 압전재료 또는 형상기억합금 중 어느 하나로 형성되는 것을 특징으로 하는 전기 기계 변환기.
- 제1항에 있어서,상기 전기작동 재료층(11)은, 압전 세라믹, 압전 필름, 압전 파이버, 전기작동 폴리머, 강유전체, 형상기억합금 또는 전왜재료 중 어느 하나로 형성되는 것을 특징으로 하는 전기 기계 변환기.
- 삭제
- 삭제
- 제1항 내지 제4항 중 어느 한 항에 기재된 전기 기계 변환기(10)를 제작하는 방법에 있어서,장비를 이용하여 기계적인 힘으로 기저 구조물(12)에 응력을 가하는 단계;전극(11a)(11b)을 포함한 전기작동 재료층(11)을 상기 기저 구조물(12)에 접착제로 부착하는 단계;상기 접착제가 완전 경화될 때까지 대기하는 단계;상기 전기작동 재료층(11)이 접착된 상기 기저 구조물(12)을 장비로부터 분리하여 전기 기계 변환기(10)를 완성하는 단계;를 포함하는 것을 특징으로 하는 전기 기계 변환기 제작방법.
- 삭제
- 제7항에 있어서,상기 전기 기계 변환기(10)가 완성된 후, 상기 전기작동 재료층(11)의 전극(11a)(11b)에 전기 신호를 입력하여 상기 전기 기계 변환기(10)를 변형시키거나 상기 기저 구조물(12)에 변형을 가하여 상기 전기작동 재료층(11)에서 발생하는 전기신호를 취득하여, 상기 전기 기계 변환기(10)의 작동 상태를 테스트하는 단계를 더 포함하는 것을 특징으로 하는 전기 기계 변환기 제작방법.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
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KR1020080070084A KR100984333B1 (ko) | 2008-07-18 | 2008-07-18 | 전기 기계 변환기 및 그 제작방법 |
JP2011518634A JP5369182B2 (ja) | 2008-07-18 | 2009-04-27 | 電気機械変換器及びその製造方法 |
PCT/KR2009/002182 WO2010008133A1 (en) | 2008-07-18 | 2009-04-27 | Electromechanical transducer and method for manufacturing the same |
CN2009801278628A CN102099939A (zh) | 2008-07-18 | 2009-04-27 | 机电变换器及其制造方法 |
US13/054,106 US8810113B2 (en) | 2008-07-18 | 2009-04-27 | Electromechanical transducer and method for manufacturing the same |
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KR1020080070084A KR100984333B1 (ko) | 2008-07-18 | 2008-07-18 | 전기 기계 변환기 및 그 제작방법 |
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KR20100009266A KR20100009266A (ko) | 2010-01-27 |
KR100984333B1 true KR100984333B1 (ko) | 2010-09-30 |
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KR1020080070084A KR100984333B1 (ko) | 2008-07-18 | 2008-07-18 | 전기 기계 변환기 및 그 제작방법 |
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US (1) | US8810113B2 (ko) |
JP (1) | JP5369182B2 (ko) |
KR (1) | KR100984333B1 (ko) |
CN (1) | CN102099939A (ko) |
WO (1) | WO2010008133A1 (ko) |
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US9117468B1 (en) | 2013-03-18 | 2015-08-25 | Magnecomp Corporation | Hard drive suspension microactuator with restraining layer for control of bending |
US10607642B2 (en) | 2013-03-18 | 2020-03-31 | Magnecomp Corporation | Multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension |
US9330698B1 (en) | 2013-03-18 | 2016-05-03 | Magnecomp Corporation | DSA suspension having multi-layer PZT microactuator with active PZT constraining layers |
US11205449B2 (en) | 2013-03-18 | 2021-12-21 | Magnecomp Corporation | Multi-layer PZT microacuator with active PZT constraining layers for a DSA suspension |
TR201900489T4 (tr) | 2015-02-06 | 2019-02-21 | Koninklijke Philips Nv | İki-yönlü aktüatör. |
KR101793225B1 (ko) | 2015-06-10 | 2017-11-03 | 한국과학기술연구원 | 곡면형 압전장치 |
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CN110087706B (zh) * | 2016-12-19 | 2022-07-26 | 皇家飞利浦有限公司 | 吸乳器装置 |
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CN108540008B (zh) * | 2018-05-10 | 2019-07-02 | 西安交通大学 | 基于逆挠曲电的柔性材料往复式多层结构作动器及方法 |
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Publication number | Publication date |
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CN102099939A (zh) | 2011-06-15 |
JP5369182B2 (ja) | 2013-12-18 |
WO2010008133A1 (en) | 2010-01-21 |
KR20100009266A (ko) | 2010-01-27 |
JP2011528546A (ja) | 2011-11-17 |
US8810113B2 (en) | 2014-08-19 |
US20110109199A1 (en) | 2011-05-12 |
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