KR100937477B1 - A Coordinate Measuring Machine Using A Reference Plate - Google Patents

Abstract

The present invention relates to a coordinate measuring device using a reference plate of the structure that can accurately measure the surface coordinates of the object while correcting the mechanical error for the object in real time, for this purpose, and It is provided, and comprises a measuring unit coupled to the X-axis stage axis to be moved left / right and a reference plate fixed to the upper portion of the measuring unit, the measuring unit and the distance between the measuring unit and the reference plate, The distance between the object and the object in real time by measuring the mechanical error of the X-axis stage characterized in that the precise measurement.

Measuring instrument, object, receiver, reference plate, calibration, mechanical error

Description

Coordinate Measuring Machine Using A Reference Plate

The present invention relates to a coordinate measuring device using a reference plate of a structure that can accurately measure the surface coordinates of the object while correcting the mechanical error of the object in real time, and more specifically, the X-axis stage or The longer the X / Y axis stage is, the larger the error due to the deflection of the machine is.The distance between the reference plate and the measuring part and the distance between the measuring part and the object are measured in real time to compare and determine the error due to the deflection of the machine. The present invention relates to a coordinate measuring device using a reference plate having a structure capable of accurately measuring surface coordinates of an object while correcting coordinates.

In general, a coordinate measuring device capable of acquiring surface coordinates is essential for measuring an unspecified surface object.

Such a coordinate measuring instrument is a representative instrument capable of precisely measuring surface coordinates ranging from a few cm to several m.

The coordinate measuring device adopts a method of measuring the height information of the shape while the probe rod sweeps through the surface of the object to be measured along the height direction (Z-axis) in a contact or non-contact manner.

After all, the performance of the coordinate measuring machine depends on how accurately the coordinates in the height direction (Z axis) can be measured in a large area.

However, in order to measure the surface of the object, the conventional coordinate measuring machine has to be moved left / right on the X-axis stage or forward / backward / left / right on the X / Y-axis stage. The longer each stage is, the longer each stage is. There was a problem that caused a mechanical error due to deflection.

This error is a situation that a mechanical error of 3 ~ 5㎛ is reported when the length of each axis stage is 1m.

The present invention has been made in view of the above problems, and an object of the present invention is a coordinate measuring device using a reference plate of the structure that can accurately measure the surface coordinates of the object while correcting the mechanical error for the object in real time To provide.

Furthermore, an object of the present invention comprises an object, a measurement unit coupled to the X-axis stage axis is provided on the upper portion of the object, and coupled to the X-axis stage axis to be moved to the left / right, and fixed to the upper portion of the measurement unit Wherein, the measurement unit by measuring the distance between the measurement unit and the reference plate, the distance between the measurement unit and the object in real time to correct the mechanical error of the X-axis stage coordinates using the reference plate, characterized in that To provide a meter.

Coordinate measuring apparatus using a reference plate according to the present invention is the X-axis stage or X / Y-axis stage that the measuring unit is installed, the longer the error due to the deflection of the machine, the distance between the reference plate and the measuring unit and the measuring unit and By measuring the distance of the object in real time, it is possible to accurately measure the surface coordinates of the object while compensating the coordinates by comparing and judging an error due to the deflection of the machine.

Hereinafter, with reference to the accompanying drawings with respect to the coordinate measuring machine using a reference plate according to the present invention will be described in detail.

FIG. 1A is a configuration diagram of a coordinate measuring apparatus using a reference plate according to a first embodiment of the present invention, and FIG. 1B is a conceptual diagram of a measuring unit extracted from FIG. 1A.

First, as shown in FIG. 1A, the present invention provides a coordinate measuring apparatus using a reference plate having a structure capable of accurately measuring surface coordinates of an object 200 while correcting a mechanical error with respect to an object 200 in real time ( 100).

The coordinate measuring device 100 is composed of two parts, which is composed of a measuring unit 20 for measuring the object 200, and a reference plate 10 which is a reference of the measuring unit 20.

Here, the measuring unit 20 is provided on the upper part of the object 200 and is coupled to the structure on the X-axis stage 30 to be moved to the left / right.

 And the X-axis stage 30 is a length that the measuring unit 20 can be moved left / right over the entire object 200, the combination of the guide screw and the measuring screw 20 or the combination of the measuring screw ( 20) may be configured as a mounted linear motor.

In addition, the reference plate 10 is spaced apart and fixed to the upper portion of the measuring unit 20, it is composed of the same size as the length of the X-axis stage 30 so that the measuring unit 20 can be detected while moving to the left / right.

Here, the reference plate 10 is a structure that is independently fixed to the measuring unit 20 and the X-axis stage 30.

The measuring unit 20 measures the distance between the reference plate 10 and the distance between the object 200 in real time to correct the mechanical error of the X-axis stage 30 to precisely measure the distance.

The measuring unit 20 includes a non-contact type measuring the surface coordinates of the object 200 with light, and a contact type measuring the surface coordinates while sweeping the surface of the object.

In the case of the non-contact measuring unit 20, as shown in FIG. 2, the light source 21 to which light is irradiated, the spectrometer 22 to spectroscopically go straight down and the bottom light emitted from the light source 21, and the spectrometer 22 A first mirror 23 reflecting the light spectroscopically downward through the (), and going straight, and a second mirror 24 reflecting the light straight from the spectrometer 22 and the first mirror 23 up and down; And a first interferometer 25a for receiving the light reflected upward from the second mirror 24 to measure the distance to the reference plate 10 in real time, and reflected downward from the second mirror 24. The central processing unit 28 receives the indirect signals of the second interferometer 25b and the first interferometer 25a and the second interferometer 25b to receive light and measure the surface distance of the object 200 in real time. It consists of a receiver 26 connected with.

In the above, the first interferometer 25a and the second interferometer 25b divide the light from one light source 21 into two or more in an appropriate manner so as to have an optical path difference to overlap the wavefront again. It is a device for observing interference generated when That is, it is a device that separates the light from one light source 21 into two, one light passes through the interior of the interferometer, one light is irradiated to the measurement target and observed using two optical path differences.

1C is an operation diagram illustrating mechanical error correction of a coordinate measuring apparatus using a reference plate according to the first embodiment.

First, referring to FIG. 1B, the measuring unit 20 separates the light emitted from one light source 21 into two light through the spectrometer 22 and the first mirror 23 to form a second mirror. (2), the second mirror 24 reflects the two light beams to the first interferometer 25a and the second interferometer 25b, and the first interferometer 25a and the second interferometer 25b, respectively. Light is irradiated to the reference plate 10 and the object 200 to observe the distance.

The indirect signal observed by the first interferometer 25a and the second interferometer 25b is sent to each receiver 26 connected to the central processing unit 28 through the second mirror 24. Then, the central processing unit 28 is to correct the mechanical error of the X-axis stage 30 to precisely measure the surface coordinates of the object 200.

In addition, as shown in Figure 1c, looking at the operation of the coordinate measuring machine 100 using a reference plate,

First, the distance D1 between the first interferometer 25a and the reference plate 10 is measured and memorized through the central processing unit 28 in section ① where the X-axis stage 30 does not cause sag, and the second interferometer 25b. ) And the surface coordinates D2 of the object 200 are displayed through the receiver 26 and the central processing unit 28 and output in real time.

In addition, since the measuring unit 20 in the section ② where the measuring unit 20 moves and the X-axis stage 30 sag occurs, a change amount of + ㅿ d is generated, the reference measured by the first interferometer 25a. The value between the plate 10 and the measuring unit 20 is D1 + ㅿ d added up to the amount of change. This value is compared with the D1 value measured in section ① through the central processing unit 28 to calculate + ㅿ d.

At the same time, the value between the object 200 and the measurement unit 20 measured by the second interferometer 25b is D2, but the value is measured together with the amount of change, so the measured value D2-ㅿ d is calculated.

Therefore, the coordinate values of the measurement unit 20 and the object 200 displayed through the central processing unit 28 finally become D2 − ㅿ d + ㅿ d, which are displayed and output in real time.

As such, the present invention is a structure that can be precisely measured by correcting the mechanical error ㅿ d value.

Figure 1d is a block diagram showing a contact measurement unit extracted in 1a.

As shown in FIG. 1D, in the case of the contact type measuring unit 20, a light source 21 to which light is irradiated, a spectrometer 22 to spectroscopicly go down and irradiated from the light source 21, and A first mirror 23 reflecting the light spectroscopically downward through the spectroscope 22 and going straight, and a second mirror reflecting light going straight from the spectrometer 22 and the first mirror 23 up and down ( 24), a probe rod 27 in close contact with the surface of the object 200, being elevated according to the surface shape of the object 200, and having a third mirror 27a attached to an upper end thereof, and the second mirror. A first interferometer 25a for receiving the light reflected upward from the upper part 24 to measure the distance to the reference plate 10 in real time, and receiving the light reflected downward from the second mirror 24 to receive the probe rod A second interferometer 25b for measuring the lifting distance of the 27 in real time and an indirect signal of the first interferometer 25a and the second interferometer 25b are respectively received. To handle consists of a receiver 26 to the central processing unit 28.

This structure has a second interferometer (25b) by mounting a third mirror (27a) on the upper end of the probe rod (27) to detect the lifting change of the probe rod (27) to be elevated according to the surface shape of the object 200 It is a structure configured to measure this.

2 is a block diagram of a coordinate measuring machine using a reference plate according to a second embodiment of the present invention.

As shown in FIG. 2, in the second embodiment, unlike the first embodiment, the X-axis stage 30 and the Y-axis stage 40 in which the measuring unit 20 moves forward / backward / left / right cross each other. It is a structure coupled on the axis.

The coordinate measuring apparatus 100 is provided on the object 200 and the object 200, and the X-axis stage 30 and the Y-axis stage (crossed so as to be moved to the front / rear / left / right ( 40) comprising a measuring unit 20 coupled to the axis and the reference plate 10 fixed to the upper portion of the measuring unit 20, the measuring unit 20 is the measuring unit 20 and the reference plate ( 10) the distance between the measurement unit 20 and the object 200 is measured in real time to correct the mechanical error on the X-axis stage 30 and the Y-axis stage 40 to accurately measure the structure to be.

The configuration and operation of the coordinate measuring apparatus 100 of the second embodiment have been described in detail in the first embodiment and will be omitted.

In addition, the above-mentioned example is only an example to demonstrate this invention. Therefore, it is obvious that the ordinary skilled in the art to which the present invention pertains uses the partial change with reference to the detailed description.

Figure 1a is a block diagram of a coordinate measuring machine using a reference plate according to a first embodiment of the present invention,

1B is a conceptual diagram of the measuring unit extracted from FIG. 1A,

1c is an operation diagram showing the mechanical error correction of the coordinate measuring machine using a reference plate according to the first embodiment,

Figure 1d is a block diagram showing a contact measuring unit extracted from 1a,

2 is a block diagram of a coordinate measuring machine using a reference plate according to a second embodiment of the present invention.

<Description of the symbols for the main parts of the drawings>

10: reference plate

20: measuring unit

21: light source 22: spectrometer

23: first mirror 24: second mirror

25a: first interferometer 25b: second interferometer

26: receiver 27: probe rod

27a: third mirror 28: central processing unit

30: X axis stage

40: Y axis stage

100: coordinate measuring machine using a reference plate according to the present invention

200: object

D1: distance between the first interferometer and the reference plate

D2: Distance between the second interferometer and the object

Claims (4)

In the three-dimensional coordinate measuring device capable of measuring the surface area of the object 200, The measurement unit 20 and the upper portion of the measurement unit 20, which is provided on the object 200, the upper portion of the object 200, and coupled to the X-axis stage 30 to be moved to the left / right Including the reference plate 10 is fixed to, The measuring unit 20 includes a light source 21 to which light is irradiated; A spectrometer (22) for spectroscopy straight and downward irradiated from the light source (21); A first mirror (23) for reflecting the light spectroscopically downward through the spectroscope (22) and going straight; A second mirror 24 for reflecting light, which is straight from the spectrometer 22 and the first mirror 23, up and down; A first interferometer (25a) for receiving the light reflected upward from the second mirror (24) to measure the distance to the reference plate (10) in real time; A second interferometer (25b) for receiving the light reflected downward from the second mirror (24) to measure the surface distance of the object (200) in real time; And a receiver 26 which receives the indirect signals of the first interferometer 25a and the second interferometer 25b and is connected to the central processing unit 28, respectively. Precision measurement by correcting the mechanical error of the X-axis stage 30 by measuring the distance between the measuring unit 20 and the reference plate 10 and the distance between the measuring unit 20 and the object 200 in real time. Coordinate measuring machine using a reference plate, characterized in that. In the three-dimensional coordinate measuring device capable of measuring the surface area of the object 200, Measurements coupled to the object 200 and the X-axis stage 30 and the Y-axis stage 40 that are provided on the object 200, and to be moved forward / backward / left / right Comprising the portion 20 and the reference plate 10 is fixed to the upper portion of the measuring unit 20, The measuring unit 20 includes a light source 21 to which light is irradiated; A spectrometer (22) for spectroscopy straight and downward irradiated from the light source (21); A first mirror (23) for reflecting the light spectroscopically downward through the spectroscope (22) and going straight; A second mirror 24 for reflecting light, which is straight from the spectrometer 22 and the first mirror 23, up and down; A first interferometer (25a) for receiving the light reflected upward from the second mirror (24) to measure the distance to the reference plate (10) in real time; A second interferometer (25b) for receiving the light reflected downward from the second mirror (24) to measure the surface distance of the object (200) in real time; And a receiver 26 which receives the indirect signals of the first interferometer 25a and the second interferometer 25b and is connected to the central processing unit 28, respectively. The distance between the measuring unit 20 and the reference plate 10 and the distance between the measuring unit 20 and the object 200 are measured in real time, and thus, on the X-axis stage 30 and the Y-axis stage 40. Measuring instrument using a reference plate, characterized in that the precise measurement by correcting the mechanical error. In the three-dimensional coordinate measuring device capable of measuring the surface area of the object 200, The measurement unit 20 and the upper portion of the measurement unit 20, which is provided on the object 200, the upper portion of the object 200, and coupled to the X-axis stage 30 to be moved to the left / right Including the reference plate 10 is fixed to, The measuring unit 20 includes a light source 21 to which light is irradiated; A spectrometer (22) for spectroscopy straight and downward irradiated from the light source (21); A first mirror (23) for reflecting the light spectroscopically downward through the spectroscope (22) and going straight; A second mirror 24 for reflecting light, which is straight from the spectrometer 22 and the first mirror 23, up and down; A probe rod 27 in close contact with the surface of the object 200, being elevated according to the surface shape of the object 200, and having a third mirror 27a attached to an upper end thereof; A first interferometer (25a) for receiving the light reflected upward from the second mirror (24) to measure the distance to the reference plate (10) in real time; A second interferometer (25b) for receiving the light reflected from the second mirror (24) downward to measure the lifting distance of the probe rod (27) in real time; And a receiver 26 connected to the central processing unit 28 to receive and compare the indirect signals of the first interferometer 25a and the second interferometer 25b, respectively. Precision measurement by correcting the mechanical error of the X-axis stage 30 by measuring the distance between the measuring unit 20 and the reference plate 10 and the distance between the measuring unit 20 and the object 200 in real time. Coordinate measuring machine using a reference plate, characterized in that. In the three-dimensional coordinate measuring device capable of measuring the surface area of the object 200, Measurements coupled to the object 200 and the X-axis stage 30 and the Y-axis stage 40 that are provided on the object 200, and to be moved forward / backward / left / right Comprising the portion 20 and the reference plate 10 is fixed to the upper portion of the measuring unit 20, The measuring unit 20 includes a light source 21 to which light is irradiated; A spectrometer (22) for spectroscopy straight and downward irradiated from the light source (21); A first mirror (23) for reflecting the light spectroscopically downward through the spectroscope (22) and going straight; A second mirror 24 for reflecting light, which is straight from the spectrometer 22 and the first mirror 23, up and down; A probe rod 27 in close contact with the surface of the object 200, being elevated according to the surface shape of the object 200, and having a third mirror 27a attached to an upper end thereof; A first interferometer (25a) for receiving the light reflected upward from the second mirror (24) to measure the distance to the reference plate (10) in real time; A second interferometer (25b) for receiving the light reflected from the second mirror (24) downward to measure the lifting distance of the probe rod (27) in real time; And a receiver 26 connected to the central processing unit 28 to receive and compare the indirect signals of the first interferometer 25a and the second interferometer 25b, respectively. The distance between the measuring unit 20 and the reference plate 10 and the distance between the measuring unit 20 and the object 200 are measured in real time, and thus, on the X-axis stage 30 and the Y-axis stage 40. Measuring instrument using a reference plate, characterized in that the precise measurement by correcting the mechanical error.

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