JPWO2022004006A1 - - Google Patents
Info
- Publication number
- JPWO2022004006A1 JPWO2022004006A1 JP2022533033A JP2022533033A JPWO2022004006A1 JP WO2022004006 A1 JPWO2022004006 A1 JP WO2022004006A1 JP 2022533033 A JP2022533033 A JP 2022533033A JP 2022533033 A JP2022533033 A JP 2022533033A JP WO2022004006 A1 JPWO2022004006 A1 JP WO2022004006A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2020113348 | 2020-06-30 | ||
| PCT/JP2020/047971 WO2022004006A1 (en) | 2020-06-30 | 2020-12-22 | Tilt measuring device and tilt measuring method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPWO2022004006A1 true JPWO2022004006A1 (en) | 2022-01-06 |
Family
ID=79315854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022533033A Pending JPWO2022004006A1 (en) | 2020-06-30 | 2020-12-22 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPWO2022004006A1 (en) |
| CN (1) | CN115917247A (en) |
| WO (1) | WO2022004006A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114719784B (en) * | 2022-04-11 | 2023-08-18 | 沈阳理工大学 | Device and method for detecting inclination angle of cylindrical weighing sensor |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8023106B2 (en) * | 2007-08-24 | 2011-09-20 | Nikon Corporation | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method |
| JP6783533B2 (en) * | 2016-03-17 | 2020-11-11 | コマツＮｔｃ株式会社 | Machining line with measuring device and measuring device |
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2020
- 2020-12-22 JP JP2022533033A patent/JPWO2022004006A1/ja active Pending
- 2020-12-22 CN CN202080102462.8A patent/CN115917247A/en active Pending
- 2020-12-22 WO PCT/JP2020/047971 patent/WO2022004006A1/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2022004006A1 (en) | 2022-01-06 |
| CN115917247A (en) | 2023-04-04 |