JPS63291878A - Production of aluminum nitride sintered material - Google Patents
Production of aluminum nitride sintered materialInfo
- Publication number
- JPS63291878A JPS63291878A JP62127204A JP12720487A JPS63291878A JP S63291878 A JPS63291878 A JP S63291878A JP 62127204 A JP62127204 A JP 62127204A JP 12720487 A JP12720487 A JP 12720487A JP S63291878 A JPS63291878 A JP S63291878A
- Authority
- JP
- Japan
- Prior art keywords
- earth metal
- powder
- solution
- hydroxide
- rare earth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title claims description 20
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000000463 material Substances 0.000 title abstract description 11
- 239000000843 powder Substances 0.000 claims abstract description 31
- 239000011259 mixed solution Substances 0.000 claims abstract description 12
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 11
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims abstract description 10
- 150000002910 rare earth metals Chemical class 0.000 claims abstract description 10
- 150000001342 alkaline earth metals Chemical class 0.000 claims abstract description 9
- 238000001035 drying Methods 0.000 claims abstract description 7
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 11
- 229910052782 aluminium Inorganic materials 0.000 claims description 9
- 238000010304 firing Methods 0.000 claims description 7
- 239000002244 precipitate Substances 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 2
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 2
- 238000002156 mixing Methods 0.000 abstract description 13
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 abstract description 11
- VSCWAEJMTAWNJL-UHFFFAOYSA-K aluminium trichloride Chemical compound Cl[Al](Cl)Cl VSCWAEJMTAWNJL-UHFFFAOYSA-K 0.000 abstract description 8
- 239000000243 solution Substances 0.000 abstract description 8
- 239000007864 aqueous solution Substances 0.000 abstract description 7
- 238000005121 nitriding Methods 0.000 abstract description 7
- 238000000465 moulding Methods 0.000 abstract description 6
- 239000012298 atmosphere Substances 0.000 abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 abstract description 5
- 230000017525 heat dissipation Effects 0.000 abstract description 4
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 3
- 150000004767 nitrides Chemical class 0.000 abstract description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 3
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 abstract description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 abstract description 2
- 229910002651 NO3 Inorganic materials 0.000 abstract description 2
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 abstract description 2
- 229910009253 Y(NO3)3 Inorganic materials 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- BXJPTTGFESFXJU-UHFFFAOYSA-N yttrium(3+);trinitrate Chemical compound [Y+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O BXJPTTGFESFXJU-UHFFFAOYSA-N 0.000 abstract 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 239000002245 particle Substances 0.000 description 10
- 238000005245 sintering Methods 0.000 description 9
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 8
- 239000002585 base Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 229910021529 ammonia Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- ZCCIPPOKBCJFDN-UHFFFAOYSA-N calcium nitrate Chemical compound [Ca+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ZCCIPPOKBCJFDN-UHFFFAOYSA-N 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- BNGXYYYYKUGPPF-UHFFFAOYSA-M (3-methylphenyl)methyl-triphenylphosphanium;chloride Chemical compound [Cl-].CC1=CC=CC(C[P+](C=2C=CC=CC=2)(C=2C=CC=CC=2)C=2C=CC=CC=2)=C1 BNGXYYYYKUGPPF-UHFFFAOYSA-M 0.000 description 1
- NGDQQLAVJWUYSF-UHFFFAOYSA-N 4-methyl-2-phenyl-1,3-thiazole-5-sulfonyl chloride Chemical compound S1C(S(Cl)(=O)=O)=C(C)N=C1C1=CC=CC=C1 NGDQQLAVJWUYSF-UHFFFAOYSA-N 0.000 description 1
- ATRRKUHOCOJYRX-UHFFFAOYSA-N Ammonium bicarbonate Chemical compound [NH4+].OC([O-])=O ATRRKUHOCOJYRX-UHFFFAOYSA-N 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910000287 alkaline earth metal oxide Inorganic materials 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 235000011114 ammonium hydroxide Nutrition 0.000 description 1
- VBIXEXWLHSRNKB-UHFFFAOYSA-N ammonium oxalate Chemical compound [NH4+].[NH4+].[O-]C(=O)C([O-])=O VBIXEXWLHSRNKB-UHFFFAOYSA-N 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 238000000975 co-precipitation Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000007970 homogeneous dispersion Substances 0.000 description 1
- 150000004679 hydroxides Chemical class 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- MCJGNVYPOGVAJF-UHFFFAOYSA-N quinolin-8-ol Chemical compound C1=CN=C2C(O)=CC=CC2=C1 MCJGNVYPOGVAJF-UHFFFAOYSA-N 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- VOITXYVAKOUIBA-UHFFFAOYSA-N triethylaluminium Chemical compound CC[Al](CC)CC VOITXYVAKOUIBA-UHFFFAOYSA-N 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は窒化アルミニウム焼結体の製造方法に係り、と
りわけ高放熱特性が要求されるセラミック回路基板に適
した窒化アルミニウム焼結体の製造方法に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for manufacturing an aluminum nitride sintered body, and in particular, a method for manufacturing an aluminum nitride sintered body suitable for ceramic circuit boards that require high heat dissipation characteristics. Regarding.
窒化アルミニウム焼結体は、高熱伝導性絶縁材料として
注目され、とりわけ高い放熱特性が要求される回路基板
材料としての応用が期待されている。Sintered aluminum nitride has attracted attention as a highly thermally conductive insulating material, and is expected to be used as a circuit board material that requires particularly high heat dissipation properties.
一般に窒化アルミニウム焼結体の製造方法としては、窒
化アルミニウム焼結体が難焼結性材料であるため、アル
カリ土類酸化物、希土類酸化物等の焼結助剤を混合、成
形した後、窒素雰囲気中で焼成する方法が行なわれてい
る。In general, the manufacturing method for aluminum nitride sintered bodies is that since aluminum nitride sintered bodies are difficult to sinter, after mixing and shaping sintering aids such as alkaline earth oxides and rare earth oxides, nitrogen A method of firing in an atmosphere is used.
しかしながら、上記の製造方法においては、焼結体の母
材たる窒化アルミニウム粉末中に母材粉末に比して平均
粒径の小さい焼結助剤を均質に分散させることが望まし
いにもかかわらず、母材粉末に比して十分粒径の小さい
助剤粉末が得られない、また、得られたとしても、極め
て凝集しやすく、母材粉末中の均質な分散が得られず、
従ってその焼結体の特性が十分でなく、かつ再現性に劣
るという問題が生じていた。However, in the above manufacturing method, although it is desirable to homogeneously disperse a sintering aid having a smaller average particle size than the base material powder in the aluminum nitride powder that is the base material of the sintered body, It is not possible to obtain an auxiliary powder with a sufficiently small particle size compared to the base material powder, and even if it is obtained, it is extremely prone to agglomeration and homogeneous dispersion in the base material powder cannot be obtained.
Therefore, there have been problems in that the characteristics of the sintered body are not sufficient and the reproducibility is poor.
本発明者らは、上記問題点を解決するために鋭意検討し
た結果、窒化アルミニウム焼結体の主成分たるアルミニ
ウムと、焼結助剤の成分として希土類元素又はアルカリ
土類金属元素から選ばれた少なくとも一種を含有する混
合溶液を作り、該混合溶液と沈澱形成剤とを混合して共
沈体を形成し、乾燥後、１２００℃〜１７００℃にて窒
化処理を行なうと、極めて良好に分散したアルミニウム
と焼結助剤成分のサブミクロン級の複合酸窒化物（又は
窒化物）粉末が得られる。この粉末と窒化アルミニウム
粉末とを混合した後、成形、焼成すれば、極めて優れた
熱伝導性を持つ窒化アルミニウム焼結体を得られること
を究明し、本発明を完成した。As a result of intensive studies to solve the above-mentioned problems, the present inventors found that aluminum, which is the main component of the aluminum nitride sintered body, and rare earth elements or alkaline earth metal elements were selected as the components of the sintering aid. A mixed solution containing at least one type of precipitate was prepared, the mixed solution and a precipitant were mixed to form a coprecipitate, and after drying, a nitriding treatment was performed at 1200°C to 1700°C. A submicron-grade composite oxynitride (or nitride) powder of aluminum and a sintering aid component is obtained. The inventors have discovered that by mixing this powder with aluminum nitride powder, molding and firing, it is possible to obtain an aluminum nitride sintered body with extremely excellent thermal conductivity, and have completed the present invention.
すなわち、本発明は、少なくとも１種の希土類金属また
はアルカリ土類金属とアルミニウムとを含む混合溶液と
沈澱形成剤とを混合して共沈体を形成し、それを乾燥後
、窒化処理して得られる粉末に窒化アルミニウム粉末を
混合し、成形し、窒素雰囲気中で焼成することを特徴と
する窒化アルミニウム焼結体の製造方法にある。That is, the present invention provides a method of forming a coprecipitate by mixing a mixed solution containing at least one kind of rare earth metal or alkaline earth metal and aluminum with a precipitate, and then drying the co-precipitate and then nitriding the co-precipitate. The present invention provides a method for producing an aluminum nitride sintered body, comprising mixing aluminum nitride powder with the powder, molding, and firing in a nitrogen atmosphere.
希土類金属またはアルカリ土類金属を含む溶液を作成す
るには、これらの金属の硝酸塩、塩化物などを水あるい
はアルコールに溶解するほか、これらの金属を酸の溶液
に直接に溶解させてもよい。To prepare a solution containing rare earth metals or alkaline earth metals, nitrates, chlorides, etc. of these metals may be dissolved in water or alcohol, or these metals may be directly dissolved in an acid solution.
アルミニウムを含む溶液を作成するにも、同様に、塩化
アルミニウム、硝酸アルミニウム、トリエチルアルミニ
ウム等を水あるいはアルコールに溶解させるほか、金属
アルミニウムを塩酸などの酸に溶解させて水溶液として
もよい、混合溶液中の希土類金属あるいはアルカリ土類
金属（焼結助剤成分）とアルミニウム（母材成分）の比
率は、特に限定されない、共沈体を仮焼してサブミクロ
ン級の焼結助剤成分と母材成分の良く分散した粉末を得
、それを窒化アルミニウム粉末と混合することによって
、窒化アルミニウム粉末と焼結助剤とを単純に混合した
場合よりもより均一に焼結助剤を母材中に分散させるこ
とができ、その結果、高密度で高熱伝導性の窒化アルミ
ニウムが得られるというところに本発明の特徴がある。Similarly, to create a solution containing aluminum, in addition to dissolving aluminum chloride, aluminum nitrate, triethylaluminum, etc. in water or alcohol, metallic aluminum can also be dissolved in an acid such as hydrochloric acid to create an aqueous solution, or in a mixed solution. The ratio of rare earth metal or alkaline earth metal (sintering aid component) to aluminum (base material component) is not particularly limited. By obtaining a powder with well-dispersed components and mixing it with aluminum nitride powder, the sintering aid is more uniformly dispersed in the base material than when simply mixing the aluminum nitride powder and the sintering aid. The present invention is characterized in that aluminum nitride with high density and high thermal conductivity can be obtained as a result.
従って、混合溶液あるいは共沈体中の希土類金属あるい
はアルカリ土類金属成分に対するアルミニウム成分の混
合比にかかわらず、基本的に本発明の効果は奏せられる
ものである。一般的には、希土類金属あるいはアルカリ
土類金属の合計モル数に対して２．０倍〜６倍のアルミ
ニウムを用いることが好ましい。Therefore, the effects of the present invention can basically be achieved regardless of the mixing ratio of the aluminum component to the rare earth metal or alkaline earth metal component in the mixed solution or coprecipitate. Generally, it is preferable to use aluminum in an amount of 2.0 to 6 times the total number of moles of rare earth metals or alkaline earth metals.
２、０より小ないと効果が十分でなく、６倍より多くし
ても効果の向上は見込めない。If it is less than 2.0, the effect will not be sufficient, and if it is more than 6 times, no improvement in the effect can be expected.
沈澱形成剤としては、例えば、アンモニア、炭酸アンモ
ニア、苛性アルカリ、しゆう酸、しゆう酸アンモニウム
、アミン、オキシン等の存機試薬が用いられる。As the precipitant, for example, a conventional reagent such as ammonia, ammonia carbonate, caustic alkali, oxalic acid, ammonium oxalate, amine, oxine, etc. is used.
混合溶液と沈澱形成剤を混合して共沈を行なわせるには
、沈澱形成剤を溶解した溶液を攪拌しながらそれに前記
混合溶液を徐々に添加して沈澱させる方法が一般的に採
用されるが、これに限定されない。共沈体は、−ａ的に
、水酸化物の複合体である。In order to perform coprecipitation by mixing a mixed solution and a precipitate-forming agent, a method is generally adopted in which the mixed solution is gradually added to a solution in which the precipitate-forming agent is dissolved while stirring to cause precipitation. , but not limited to. A coprecipitate is a complex of hydroxides.
得られた共沈体は、分離し、洗浄し、乾燥後、１２００
℃〜１７００℃で窒化処理を行なう。この窒化処理は典
型的には窒素あるいはアンモニア雰囲気中で行なう、こ
の窒化処理によって共沈体はサブミクロン級の良く分散
された複合酸窒化物ないしは窒化物に変化する。The obtained coprecipitate was separated, washed, and dried at 1200 °C.
Nitriding treatment is performed at a temperature of 1700°C to 1700°C. This nitriding treatment is typically carried out in a nitrogen or ammonia atmosphere, and the coprecipitate is transformed into a submicron-sized, well-dispersed composite oxynitride or nitride.
次いで、窒化処理した粉末と、窒化アルミニウム粉末と
を混合した後、常法に従って窒素含有雰囲気中１５００
〜２１００℃で焼結すると所望の窒化アルミニウム焼結
体が得られる。Next, after mixing the nitrided powder and aluminum nitride powder, the mixture was heated in a nitrogen-containing atmosphere for 1500 min according to a conventional method.
Sintering at ~2100°C yields the desired aluminum nitride sintered body.
くスＪ［ｌ＞
希土類金属のイツトリウムの硝酸塩溶液である硝酸イツ
トリウム水溶液（１，０１／ｓａ１濃度）８８．５６ｃ
ｃと、アルミニウムの塩化物である塩化アルミニウム水
溶液（１，０１／ｍｏｌ濃度） ７３１．７１ｃｃとを
混合した溶液を、６Ｎ−アンモニア水５１中に徐々に添
加して、Ｙ２ＯとＡ１３゛の水酸化物共沈体を得た。Kusu J [l> Yttrium nitrate aqueous solution (1,01/sa1 concentration), which is a nitrate solution of the rare earth metal yttrium, 88.56c
A mixed solution of 731.71 cc of aluminum chloride aqueous solution (1,01/mol concentration), which is a chloride of aluminum, was gradually added to 6N-ammonia water 51 to hydroxylate Y2O and A13'. A coprecipitate was obtained.
この粉末をアンモニア気流中（１０Ｉｔ ／ｍ１ｎ）に
て１５００℃にて４ｈｒ加熱し、窒化処理を行なった。This powder was heated at 1500° C. for 4 hours in an ammonia stream (10 It/m1n) to perform nitriding treatment.
得られた粉末の平均粒径は、０．３５μｍであった。The average particle size of the obtained powder was 0.35 μm.
この粉末２０ｇと市販のＡＩＮ粉末（平均粒径１．３−
ａｍ） ８５ ｇをポリポット中にてエタノール２０
０ｃｃと共に４ｈｒ混合し、乾燥させた後、２．０００
ｋｇ ／ ｃｓ ”の圧力にて成形し、窒素１ａｔｅ下
にて１７００℃、２ｈｒの条件で焼成を行なった。20g of this powder and commercially available AIN powder (average particle size 1.3-
am) 85 g in a polypot with 20% ethanol
After mixing with 0cc for 4 hours and drying, 2.000
The molding was carried out under a pressure of "kg/cs" and fired at 1700° C. for 2 hours under 1ate of nitrogen.
得られた焼結体は、室温にて、相対密度９９％、熱伝導
率２１０Ｗの特性を有していた。The obtained sintered body had a relative density of 99% and a thermal conductivity of 210 W at room temperature.
く此！＞
市販のＡＩＮ粉末（平均粒径１．３ ｐ ｍ） １００
ｇと市販のＹ！０．粉末（平均粒径１．Ｏｕｍ）５ｇを
ポリポット中にてエタノール２００ｃｃと共に４ｈｒ混
合し、乾燥させた後、２０００ ｋｇ ／ ｃｍ ”の
圧力にて成形し、窒素１ａｔ−下にて、１７００℃、２
ｈｒの条件で焼成を行なった。Kukoko! > Commercially available AIN powder (average particle size 1.3 pm) 100
g and commercially available Y! 0. 5 g of powder (average particle size 1.0m) was mixed with 200 cc of ethanol in a polypot for 4 hours, dried, molded at a pressure of 2000 kg/cm'', and heated at 1700°C under 1 atm of nitrogen for 2 hours.
Firing was performed under conditions of hr.
得られた焼結体は、室温にて相対密度９８％熱伝導率１
７０ Ｗの特性を有していた。The obtained sintered body has a relative density of 98% and a thermal conductivity of 1 at room temperature.
It had a characteristic of 70W.
く去ｍ影〉
アルカリ土類金属のカルシウムの硝酸塩溶液である硝酸
カルシウム水溶液（１，０１／ａ＋ｏｊ！濃度１７８．
３１ｃｃと塩化アルミニウム水溶液（１，０１／１ｌｏ
ｌ濃度） ７３１．７１ｃｃとを混合した溶液を、６Ｎ
−アンモニア水５Ｎ中に徐々に添加して、Ｃａ（１とＡ
Ｉ”の水酸化物共沈体を得た。Calcium nitrate aqueous solution (1,01/a+oj! concentration 178.
31cc and aluminum chloride aqueous solution (1,01/1lo
l concentration) 731.71cc mixed solution with 6N
- Gradually add Ca(1 and A) to 5N ammonia water.
A hydroxide coprecipitate of I'' was obtained.
この粉末をアンモニア気流中（１０１／ｗｉｎ）にて１
５００℃にて４ｈｒ加熱し、窒化処理を行なった。This powder was mixed in an ammonia stream (101/win) for 1
Nitriding treatment was performed by heating at 500° C. for 4 hours.
得られた粉末の平均粒径は、０．３２μｍであった。The average particle size of the obtained powder was 0.32 μm.
この粉末４．０ｇと市販のＡＪＮ粉末（平均粒径１．３
μｍ）９７ｇをポリポット中にてエタノール２００ｃｃ
と共に４ｈｒ混合し、乾燥させた後、２．０００ｋｇ
／ ＞ ”の圧力にて成形し、窒素１ａｔｌｌ下にて１
７００℃、２ｈｒの条件で焼成を行なった。4.0 g of this powder and commercially available AJN powder (average particle size 1.3)
μm) 97g in a polypot with 200cc of ethanol
After mixing for 4 hours and drying, 2.000 kg
Molding at a pressure of / > ” and 1 atll under nitrogen
Firing was performed at 700°C for 2 hours.
得られた焼結体は、室温にて、相対密度９９％、熱伝導
率１９０Ｗの特性を有していた。The obtained sintered body had a relative density of 99% and a thermal conductivity of 190 W at room temperature.
〈比較ＩＬ＞
市販のＡｊｌＮ粉末（平均粒径１．３ μｍ） １００
ｇと市販のＣａＯ粉末１．０ｇ（平均粒径３．０μｍ
）をポリポット中にてエタノール２００ｃｃと共に４ｈ
ｒ混合し、乾燥させた後、２０００ ｋｓｒ ／ ｃｓ
”の圧力にて成形し、窒素１ａｔｅ下にて、１７００
℃、２ｈｒの条件で焼成を行なった。<Comparative IL> Commercially available AjlN powder (average particle size 1.3 μm) 100
g and 1.0 g of commercially available CaO powder (average particle size 3.0 μm
) in a polypot with 200cc of ethanol for 4 hours.
2000 ksr/cs after mixing and drying
Molding at a pressure of 1,700 yen under nitrogen 1ate
Firing was performed at ℃ for 2 hours.
得られた焼結体は、室温にて相対密度９８％、熱伝導率
１６０Ｗの特性を有していた。The obtained sintered body had a relative density of 98% and a thermal conductivity of 160 W at room temperature.
本発明の方法によれば、窒化アルミニウム母材粉末中に
サブミクロン級の焼結助剤がより均一に分散されるため
、緻密で高熱伝導性の窒化アルミニウム焼結体が得られ
、放熱特性に優れた回路基板を提供する。According to the method of the present invention, the submicron-level sintering aid is more uniformly dispersed in the aluminum nitride base material powder, so a dense and highly thermally conductive aluminum nitride sintered body can be obtained, and the heat dissipation properties are improved. Provide superior circuit boards.
Claims (1)
属とアルミニウムとを含む混合溶液と沈澱形成剤とを混
合して共沈体を形成し、それを乾燥後、窒化処理して得
られる粉末に窒化アルミニウム粉末を混合し、成形し、
窒素雰囲気中で焼成することを特徴とする窒化アルミニ
ウム焼結体の製造方法。1. A mixed solution containing at least one kind of rare earth metal or alkaline earth metal and aluminum is mixed with a precipitate forming agent to form a coprecipitate, and after drying, the resulting powder is nitrided. Mix aluminum powder, form it,
A method for producing an aluminum nitride sintered body, which comprises firing in a nitrogen atmosphere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62127204A JP2548192B2 (en) | 1987-05-26 | 1987-05-26 | Method for manufacturing aluminum nitride sintered body |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62127204A JP2548192B2 (en) | 1987-05-26 | 1987-05-26 | Method for manufacturing aluminum nitride sintered body |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63291878A true JPS63291878A (en) | 1988-11-29 |
| JP2548192B2 JP2548192B2 (en) | 1996-10-30 |
Family
ID=14954292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62127204A Expired - Lifetime JP2548192B2 (en) | 1987-05-26 | 1987-05-26 | Method for manufacturing aluminum nitride sintered body |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2548192B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012053595A1 (en) * | 2010-10-20 | 2012-04-26 | 三菱化学株式会社 | Method for producing nitride fluophor by using coprecipitated material, nitride fluophor, and material therefor |
| CN114804887A (en) * | 2022-03-22 | 2022-07-29 | 武汉科技大学 | (CoCrFeMnNi) N high-entropy ceramic powder and preparation method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54138899A (en) * | 1978-04-21 | 1979-10-27 | Toshiba Corp | Production of silicon nitridg base powder |
| JPS6221764A (en) * | 1985-07-18 | 1987-01-30 | 住友電気工業株式会社 | Manufacture of aluminum nitride |
| JPS6270209A (en) * | 1985-09-24 | 1987-03-31 | Natl Inst For Res In Inorg Mater | Production of readily sintered beta-sialon based fine powder |
| JPS6270210A (en) * | 1985-09-24 | 1987-03-31 | Natl Inst For Res In Inorg Mater | Production of aluminum nitride-silicon carbide composite fine powder |
| JPS62252373A (en) * | 1986-04-24 | 1987-11-04 | 株式会社村田製作所 | Manufacture of aluminum nitride sintered body |
-
1987
- 1987-05-26 JP JP62127204A patent/JP2548192B2/en not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54138899A (en) * | 1978-04-21 | 1979-10-27 | Toshiba Corp | Production of silicon nitridg base powder |
| JPS6221764A (en) * | 1985-07-18 | 1987-01-30 | 住友電気工業株式会社 | Manufacture of aluminum nitride |
| JPS6270209A (en) * | 1985-09-24 | 1987-03-31 | Natl Inst For Res In Inorg Mater | Production of readily sintered beta-sialon based fine powder |
| JPS6270210A (en) * | 1985-09-24 | 1987-03-31 | Natl Inst For Res In Inorg Mater | Production of aluminum nitride-silicon carbide composite fine powder |
| JPS62252373A (en) * | 1986-04-24 | 1987-11-04 | 株式会社村田製作所 | Manufacture of aluminum nitride sintered body |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012053595A1 (en) * | 2010-10-20 | 2012-04-26 | 三菱化学株式会社 | Method for producing nitride fluophor by using coprecipitated material, nitride fluophor, and material therefor |
| CN114804887A (en) * | 2022-03-22 | 2022-07-29 | 武汉科技大学 | (CoCrFeMnNi) N high-entropy ceramic powder and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2548192B2 (en) | 1996-10-30 |
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