JPS63252271A - Semiconductor inspector - Google Patents

Abstract

PURPOSE:To specify an troubled relay simply, by diagnosing a trouble of a relay matrix circuit which controls the supply of a program power source to a specified terminal of a semiconductor device to be inspected to perform a display corresponding to the troubled relay. CONSTITUTION:When diagnosing a trouble of a relay matrix circuit 11, all inputs and outputs of a program/measuring power source 10 are set for OV with an internal relay 15. At this point, an IC side relay circuit 12 is turned OFF and instead, a relay circuit 16 for diagnosis turned ON. With such an arrangement, a signal from the relay matrix circuit 11 is introduced into a diagnosis circuit 17. A diagnosis of a trouble of a relay 14 within the circuit 11 is performed by simultaneously turning ON relays 14 arranged sideways in one row within the circuit 11 with a control circuit not illustrated. Thus, it is judged that the relay involved in a terminal in which an input of the circuit 17 is not OV fails.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a semiconductor testing device in which a measured voltage and current are switched and supplied to a semiconductor integrated circuit to be tested using a relay matrix circuit.

(Prior Art) A DC test and a function test of a semiconductor integrated circuit (IC) to be tested are performed using a semiconductor testing device, a so-called IC tester. As shown in the second factor, in conventional IC testers, the voltage or current generated by the program/measurement quantity 130 is transferred to the relay matrix circuit 3.
1 and IC side relay circuit 32 to a predetermined terminal of 1c33, and the output voltage or N current from IC33 is again supplied to the relay 34 in the relay matrix circuit 31.
This is done by feeding back the program/measurement m source 30 via the program/measure m source 30.

By the way, in such an IC tester, if the Berry matrix circuit 31 fails, there is a possibility that it will be determined to be defective even if the IC 33 is normal. Therefore, in such a tC tester, the relay matrix circuit 31
It is necessary to periodically diagnose and replace failed relays. Conventionally, in order to perform such a fault diagnosis, a resistor group 35 consisting of a plurality of w1 dense resistors is provided as a load of the program/measurement power supply 30, and an IC! ! The resistor group 35 is switched by the 11Q diagnostic relay circuit 36 with all the 1 relay circuits 32 turned off. At this time, a Go/No-Go determination is made based on the signal input via the relay matrix circuit 31, and a failure diagnosis is performed.

By the way, failure diagnosis of the relay matrix circuit 31 in the conventional IC tester is performed by simply turning off the IC side relay circuit 32 and turning on the failure diagnosis relay circuit 36, and the diagnosis result is stored in the program 7. /Measurement" can only be obtained by analyzing various data obtained from the power supply 30. In other words, it is not possible to directly identify a faulty relay from the data obtained from the program/measurement power supply 30. It requires an engineer with a certain degree of electrical knowledge.

(Problems to be Solved by the Invention) As described above, the conventional semiconductor inspection apparatus having a relay matrix circuit fault diagnosis function has a drawback in that a faulty relay in the relay matrix circuit cannot be easily identified.

SUMMARY OF THE INVENTION An object of the present invention is to provide a semiconductor inspection device that can easily identify a faulty relay in a relay matrix circuit.

[Structure of the Invention] (Means for Solving the Problems) The semiconductor testing device of the present invention outputs a predetermined voltage and current to be supplied to the terminals of a semiconductor device to be tested, and also sets all inputs and outputs to specific voltages. a relay matrix circuit having a programmable power supply, a plurality of relays for supplying and controlling the output voltage and current of the program power supply to predetermined terminals of the semiconductor device to be tested, and a fault relay for performing fault diagnosis of the relay matrix circuit; It is composed of a diagnostic circuit that performs a display corresponding to the

(Function) In the semiconductor inspection device of the present invention, all outputs of the program power supply are set to a reference voltage, a signal passing through the relay matrix circuit is detected by the diagnostic circuit, and a failure diagnosis is performed based on this detection signal. If a faulty relay has occurred, a display corresponding to that relay is displayed, so that even a person without electrical knowledge can identify the faulty relay.

(Example) Hereinafter, one embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a circuit diagram showing the configuration of a semiconductor inspection apparatus according to the present invention. In this circuit, a normal test is performed by selectively supplying the voltage or current generated by the program/measurement power supply 10 to a predetermined terminal of the ICl3 via the relay matrix circuit 11 and the IC side relay circuit 12, and outputting the output from the ICl3. Voltage or current again relay matrix circuit 1
This is done by feeding back the program/measurement power supply 10 via the relay 14 in the program/measurement power supply 10.

When diagnosing a failure of the relay matrix circuit 11, all inputs and outputs of the program/measurement type [10] are set to OV by the internal relay 15. At this time, the IC side relay circuit 12 is turned off, and the diagnostic relay circuit 1G is turned on instead. As a result, the signal from the relay matrix circuit 11 is guided to the diagnostic circuit 17. A load resistor group 18 pulled up to 5V is connected to the input terminal of this diagnostic circuit 17. A failure diagnosis of the relays 14 in the relay matrix circuit 11 in the diagnostic circuit 17 is performed by simultaneously turning on the relays 14 arranged in a horizontal line in the relay matrix circuit 11 by a control circuit (not shown).

For example, when relays arranged in a certain column are turned on at the same time, all input terminals of the diagnostic circuit 11 should become OV if these relays operate normally. At this time,
It can be determined that the relay associated with the terminal that does not become OV but becomes 5■ is faulty, and the diagnostic circuit 17 displays the number of this faulty relay on a display (not shown). A similar operation is performed for each relay 14 arranged in a different column within the relay matrix circuit 11, thereby sequentially performing failure diagnosis.

Note that the resistor group 19 and Zener diode group 2 in the circuit
0 is for signal control.

According to the semiconductor inspection device having such a configuration, the number of the faulty relay is displayed on the display, so even a person without electrical knowledge can easily identify the faulty relay in the relay matrix circuit 11. As a result, workers can quickly find out which relay is malfunctioning and can quickly replace it with a normal one, reducing the downtime of semiconductor inspection equipment. .

Note that a CPU or a dedicated IC can be used as the diagnostic circuit 11, and the diagnostic circuit 17 can also be used to control the operations of the relay matrix circuit 11 and the relay 15 during the self-diagnosis operation.

[Effects of the Invention] As explained above, according to the present invention, it is possible to provide a semiconductor inspection device that can easily identify a faulty relay in a relay matrix circuit.

[Brief explanation of the drawing]

FIG. 1 is a circuit diagram showing the configuration of a device according to an embodiment of the present invention;
FIG. 2 is a circuit diagram showing the configuration of a conventional device. 10... Program/measurement power supply, 11... Relay matrix circuit, 12... IC side relay circuit, 13...
・IC114...Relay, 15...Relay, 16.
...Diagnostic relay circuit, 11...Diagnostic circuit, 18...
・Load resistance group.

Claims (1)

[Claims] A program power supply that outputs a predetermined voltage and current to be supplied to the terminals of the semiconductor device under test and can set all inputs and outputs to a specific voltage; A semiconductor inspection device comprising: a relay matrix circuit having a plurality of relays for controlling supply to terminals; and a diagnostic circuit for diagnosing failures of the relay matrix circuit and displaying a display corresponding to a failed relay.