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JPS629518A - Magnetic recording medium and its production - Google Patents

Magnetic recording medium and its production

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Publication number
JPS629518A
JPS629518A JP14861385A JP14861385A JPS629518A JP S629518 A JPS629518 A JP S629518A JP 14861385 A JP14861385 A JP 14861385A JP 14861385 A JP14861385 A JP 14861385A JP S629518 A JPS629518 A JP S629518A
Authority
JP
Japan
Prior art keywords
film
magnetic
magnetic film
residual magnetization
soft magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14861385A
Other languages
Japanese (ja)
Other versions
JPH0766510B2 (en
Inventor
Masamichi Tagami
勝通 田上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP60148613A priority Critical patent/JPH0766510B2/en
Publication of JPS629518A publication Critical patent/JPS629518A/en
Publication of JPH0766510B2 publication Critical patent/JPH0766510B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Manufacturing Of Magnetic Record Carriers (AREA)

Abstract

PURPOSE:To prevent the decrease of S/N by noise by forming a soft magnetic film having the coercive force of a specific value or below in such a manner that the magnitude of the residual magnetization under data tracks is larger than the magnitude of the residual magnetization under guard band tracks. CONSTITUTION:A nickel phosphorus film 4 having <=50Oe coercive force is formed as the soft magnetic film on the surface of a substrate 6 and the magnetic film 3 having vertical magnetic anisotropy is formed on the film 4. Laser light is irradiated to the region corresponding to the data tracks 1 to heat said region after or prior to the formation of the film 3 by which the part of the film 4 under the data tracks is crystallized and a high residual magnetization region 5 having the increased residual magnetization and soft magnetization is provided. The output from the record to the guard band tracks 2 between the data tracks 1 is thus made substantially smaller than the output from the data tracks 1 by the deviation of tracking and the crosstalk from the recording region by the deviation of the tracking in the adjacent tracks is suppressed. The signal having large S/N is thereby obtd.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、データを磁気的に記録する磁気記録体に関し
、特に垂直磁気記録によりデータを記録する磁気記録体
に関し、詳しくは高トラツク密度で問題となるトラ、ク
キング精度に係わるオフトラック特性を改善した磁気記
録体及びその製造方法に関する。
Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a magnetic recording medium that magnetically records data, and in particular to a magnetic recording medium that records data by perpendicular magnetic recording. The present invention relates to a magnetic recording medium with improved off-track characteristics related to problematic tracking accuracy and a method for manufacturing the same.

(従来技術とその問題点) 磁気記録装置の記録密度の向上は斯界の変わらぬ趨勢で
ある。従来磁気記録装置で用いられる磁気記録体は一般
に記録媒体の長手方向に磁化し記録再生を行なうが、密
度の増大とともに反磁界の影替により記録密度に限界が
あり、より高密度化が可能となる記録媒体の媒体面に垂
直に磁化する′垂直磁気記録方式が提案され従来の記録
密度の1桁以上の値を達成している。
(Prior art and its problems) Improving the recording density of magnetic recording devices is a constant trend in the field. The magnetic recording bodies used in conventional magnetic recording devices generally perform recording and reproduction by magnetizing in the longitudinal direction of the recording medium, but as the density increases, there is a limit to the recording density due to the influence of the demagnetizing field, and higher density is possible. A perpendicular magnetic recording system has been proposed in which the recording medium is magnetized perpendicularly to the surface of the medium, and has achieved a recording density one order of magnitude higher than that of the conventional method.

ここで用いられる垂直磁気記録媒体としては、スパッタ
法、蒸着法によって形成したCoCr単層垂直媒体及び
パーマロイ(NiFe)を下地膜としたCoCr/Ni
Fe2層膜媒体がある。なかでも2層膜垂直媒体は、磁
束のリターンパスを具備した単磁極型の垂直ヘッドの組
み合せにより理想的な垂直記録が可能であり高密度記録
が達成されている。
The perpendicular magnetic recording medium used here is a CoCr single-layer perpendicular medium formed by sputtering or vapor deposition, and a CoCr/Ni permalloy (NiFe) base film.
There is a Fe two-layer film medium. Among these, double-layer perpendicular media enable ideal perpendicular recording and achieve high-density recording by combining a single-pole type perpendicular head equipped with a magnetic flux return path.

このように垂直磁気記録方式においては、媒体に垂直磁
気異方性を持たせることにより記録媒体面上トラック方
向の線密度を大幅に向上させることが可能であるが、こ
れをさらに光ディスク並に密度を向上させるためには、
トラ、り密度を1桁以上増大させる必要がある。トラッ
ク密度の増大にともなって十分なトラ、キング精度が得
られないことにより消去残りによるノイズの発生、また
隣接トラックのトラ、キングづれによるクロストークの
ノイズによる87N比(S:信号、N:雑音)の低下の
問題が生じてくる。
In this way, in the perpendicular magnetic recording method, it is possible to significantly improve the linear density in the track direction on the recording medium surface by giving the medium perpendicular magnetic anisotropy. In order to improve
It is necessary to increase the density by more than an order of magnitude. As the track density increases, it is not possible to obtain sufficient tracking and king accuracy, which causes noise due to unerased parts, and 87N ratio (S: signal, N: noise ) arises.

(発明の目的) 本発明の目的は、上記問題点を解決し、基板上形成され
た軟磁性膜の表面に垂直に磁気異方性を有する磁性膜を
形成し、データトラック下の軟磁性膜の残留磁化の大き
さをガートバンドトラック下の軟磁性膜の残留磁化の値
よりも大きくすることにより、ノイズが防止され、S/
N比が向上する磁気記録媒体およびその製造方法を提供
することにある。
(Object of the Invention) An object of the present invention is to solve the above-mentioned problems, form a magnetic film having magnetic anisotropy perpendicularly to the surface of a soft magnetic film formed on a substrate, and form a magnetic film with magnetic anisotropy under the data track. By making the magnitude of the residual magnetization larger than the value of the residual magnetization of the soft magnetic film under the guard band track, noise is prevented and the S/
An object of the present invention is to provide a magnetic recording medium with improved N ratio and a method for manufacturing the same.

(発明の構成) 本発明は、基体上に50Oe以下の保磁力の軟磁性膜が
形成され、該軟磁性膜上に膜面に垂直に磁気異方性を有
する磁性膜が形成された磁気記録体において、前記軟磁
性膜のデータトラック下の部分の残留磁化の大きさが前
記データトラック間のガートバンドトラック下の部分の
残留磁化の大きさよりも大きいことt%徴とする。
(Structure of the Invention) The present invention provides magnetic recording in which a soft magnetic film with a coercive force of 50 Oe or less is formed on a substrate, and a magnetic film having magnetic anisotropy perpendicular to the film surface is formed on the soft magnetic film. In the magnetic field, it is assumed that the magnitude of residual magnetization in a portion of the soft magnetic film under the data track is larger than the magnitude of residual magnetization in a portion under the guard band track between the data tracks.

本発明の磁気記録体の製造方法は、基体上に軟磁性膜を
形成する軟磁性膜形成手段と、該軟磁性膜上に膜面に垂
直に磁気異方性を有する磁性膜を形成する磁性膜形成手
段と、少くとも前記軟磁性膜が形成された前記基体のデ
ータトラックに相当する領域に光を照射して加熱する加
熱手段とを含んで構成される。
The method for manufacturing a magnetic recording body of the present invention includes a soft magnetic film forming means for forming a soft magnetic film on a substrate, and a magnetic film forming means for forming a magnetic film having magnetic anisotropy perpendicular to the film surface on the soft magnetic film. The apparatus includes a film forming means, and a heating means for irradiating light to heat at least a region corresponding to a data track of the base body on which the soft magnetic film is formed.

(実施例) 次に本発明について図面を用いて説明する。(Example) Next, the present invention will be explained using the drawings.

第1図、第2図はそれぞれ本発明の一実施例の磁気ディ
スクの一部を切断して模式的に示す斜視図とその製造方
法を示す斜視図である。
1 and 2 are a perspective view schematically showing a partially cut away magnetic disk according to an embodiment of the present invention, and a perspective view showing a manufacturing method thereof, respectively.

無電解または電解メッキによりアルミ合金等の基体6の
表面に比較的低温(150〜200℃)のアニールで磁
性が出現もしくは大きくなる二。
By electroless or electrolytic plating, magnetism appears or increases on the surface of the substrate 6 made of aluminum alloy or the like by annealing at a relatively low temperature (150 to 200° C.).

ケルリン膜4を軟磁性膜として形成し、二、ケルリン膜
4上に垂直に磁気異方性を有する磁性膜°3を形成した
のち、もしくは磁性膜3の形成に先立ち、データトラッ
クIK相当する領域に第2図に示すようにレーザー光を
照射し加熱することにより、ニッケルリン膜4のデータ
トラック1の下の部分を結晶させ、残留磁化を増大させ
かつ軟磁化させた高残留磁化領域5を設ける。
After forming the Kellin film 4 as a soft magnetic film, and forming a magnetic film 3 having magnetic anisotropy perpendicularly on the Kellin film 4, or prior to forming the magnetic film 3, an area corresponding to the data track IK is formed. By irradiating and heating the nickel phosphorus film 4 with laser light as shown in FIG. establish.

この第1図に示す実施例に主磁極励磁型の垂直ヘッドを
用いた場合、データトラックlにおいてはニッケルリン
膜4の高残留磁化領域5の軟磁性化により、記録、再生
感度が大幅に増大し高出力が得られ、かつ高密度記録が
可能となる。
When a main pole excitation type perpendicular head is used in the embodiment shown in FIG. 1, the recording and reproducing sensitivity is greatly increased in the data track L by making the high residual magnetization region 5 of the nickel phosphorus film 4 soft magnetic. This makes it possible to obtain high output and perform high-density recording.

これによりトラッキング偏倚によりデータトラック1間
のガートバンドトラック2への記録からの出力はデータ
トラック1からの出力に較べて十分小さくでき、隣接ト
ラックでのトラッキング偏倚による記録領域からのクロ
ストーク等も抑制することができ、S/Nの大きい信号
が得られる。
As a result, the output from recording on guard band track 2 between data tracks 1 can be made sufficiently smaller than the output from data track 1 due to tracking deviation, and crosstalk from the recording area due to tracking deviation in adjacent tracks can also be suppressed. A signal with a large S/N ratio can be obtained.

第1図に示す実施例では、アルミ合金の基板6上に無電
解メッキ法によりニッケルリン膜4を10μm形成した
。形成したニッケルリン膜4の残留磁化は3 Q em
u/ccであった。ニッケルリン膜4を核種した基板は
、研磨により通常磁気ディスク基板として使用される表
面粗さに加工仕上げを行ったO 研磨仕上けを行った基板上にCoCrをターゲットとし
てスパッタにより膜厚0.2μmの磁性膜3を形成した
。この磁性膜3の残留磁化Msは30Oemu/CC*
垂直の保磁力HCLは500Oeでありた。
In the example shown in FIG. 1, a 10 μm thick nickel phosphorous film 4 was formed on an aluminum alloy substrate 6 by electroless plating. The residual magnetization of the formed nickel phosphorus film 4 is 3 Q em
It was u/cc. The substrate containing the nickel phosphorus film 4 was polished to a surface roughness normally used as a magnetic disk substrate. On the polished substrate, a CoCr target was sputtered to a thickness of 0.2 μm. A magnetic film 3 was formed. The residual magnetization Ms of this magnetic film 3 is 30 Oemu/CC*
The vertical coercive force HCL was 500 Oe.

次に第2図に示すように基板を回転させ、予め決められ
たトラック密度に対応するデータトラック1上にCO:
レーザー照射装置8からのレーザー光7をレンズ9によ
り集光して照射し、加熱した。
Next, as shown in FIG. 2, the substrate is rotated, and CO:
Laser light 7 from a laser irradiation device 8 was focused by a lens 9 and irradiated to heat it.

同一条件のレーザー光で加熱した領域のニッケルリン膜
の残留磁化は200 emu/eeに増加し、保磁力は
10Oeであった◎ 効果を確認するために、第1図に示す実施例のデータト
ラック1とガートバンドトラック2の記録再生特性を主
磁極から媒体への磁束のリターンパス構造を有した主憔
極励磁屋の垂直磁気ヘッドを用いて測定した。主磁極膜
には膜厚0.3μmのCoZrNb膜を用いた。その結
果は、第3図(曲線10がデータトラック19曲線11
がガートバンドトラック2の特性を示す)に示すように
データトラック1上では孤立波出力のl/2となる出力
の記録密度Dsoは5oKFRPIであり、一方ガード
バンドトラック2上では弧立波出力の1/2となる出力
の記録密度I)ioは50KF几PIであった。また出
力はデータトラック1上ではガートバンドトラック2上
より2.3倍大きかった。
The residual magnetization of the nickel phosphorus film in the area heated by laser light under the same conditions increased to 200 emu/ee, and the coercive force was 10 Oe.◎ To confirm the effect, the data track of the example shown in Figure 1 was used. The recording and reproducing characteristics of Sample No. 1 and Gartband Track 2 were measured using a main pole excitation perpendicular magnetic head having a return path structure for magnetic flux from the main pole to the medium. A CoZrNb film with a thickness of 0.3 μm was used as the main pole film. The results are shown in Figure 3 (curve 10 is the data track 19 curve 11).
shows the characteristics of the guard band track 2), on the data track 1, the recording density Dso of the output that is 1/2 of the solitary wave output is 5oKFRPI, while on the guard band track 2, the recording density Dso is 1/2 of the solitary wave output. The recording density I)io at an output of /2 was 50 KF PI. Also, the output was 2.3 times greater on data track 1 than on gartband track 2.

したがってデータトラック1上で5oKFRPI以上の
記録密度ではガートバンドトラック2からの再生出力は
データトラックlの出力に較べて十分小さくでき、デー
タトラックlを媒体面で規定することにより良好なオフ
トラック特性を得ることが出来た。
Therefore, at a recording density of 5oKFRPI or higher on data track 1, the playback output from guard band track 2 can be made sufficiently smaller than the output of data track 1, and by defining data track 1 on the media surface, good off-track characteristics can be achieved. I was able to get it.

また第1図に示す実施例の記録再生出力は、軟磁性膜4
の保磁力にも依存し、第4図に示すように軟磁性膜4の
保磁力が50Oe以下で増大した。
Furthermore, the recording/reproducing output of the embodiment shown in FIG.
As shown in FIG. 4, the coercive force of the soft magnetic film 4 increased below 50 Oe.

なお第1図に示す実施例の製造方法では、基板上ニッケ
ルリン膜4に続いて磁性@3を形成した後レーサー光7
によシ加熱してもよいし、基板6上にニッケル・リン膜
4を形成してレーサー光7により加熱した後に磁性膜3
を形成しても良い。
In addition, in the manufacturing method of the embodiment shown in FIG.
Alternatively, the nickel-phosphorous film 4 may be formed on the substrate 6 and heated by the laser beam 7, and then the magnetic film 3 may be heated.
may be formed.

(発明の効果) 本発明は以上説明したように、軟磁性膜の上に膜面に垂
直に磁気異方性を有する磁性膜を形成し、軟磁性膜のデ
ータトラック下の部分の残留磁化の大きさをガートバン
ドトラック下の部分の残留磁化の大きさよりも大きくす
ることにより、ガードバンドトラックからの再生出力を
十分小さくでき、隣接トラックからのクロストークを抑
制できる効果がある。
(Effects of the Invention) As explained above, the present invention forms a magnetic film having magnetic anisotropy perpendicular to the film surface on a soft magnetic film, and reduces the residual magnetization of the portion of the soft magnetic film below the data track. By making the size larger than the residual magnetization of the portion under the guard band track, the reproduction output from the guard band track can be sufficiently reduced, and crosstalk from adjacent tracks can be suppressed.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図および第2図はそれぞれ本発明の一実施例の一部
を示す斜視図およびその製造方法を示す斜視図、第3図
および第4図はそれぞれ第1図に示す実施例の記録再生
出力の記録密度との関係を示すグラフおよびニッケルリ
ン膜の保磁力との関係を示すグラフである。 1・・・・・・データトラック、2・・・・・・ガート
バンドトラック、3・・・・・・磁性膜、4・・・・・
・ニッケルリン膜、5・・・・・・高残留磁化領域、6
・・・・・・基板、7・・・・・・レーザ光、8・・・
・・・レーザ照射装置、9・・・・・・レンズ。 !: データトラック    2:f)”−トノVラド
トラ・ソフ3 ; 掴ヒ直、6岐、り($方4ケf4i
J−4:41にダ久゛留瑳I乙ニッケIムI))β更5
:關溜纜伽、b:1+ 笛  l  区 ! l : デ°−タトラック 乙 : 基イ苓 7:p−tr一応 6 S  し−ず°′−照身寸装L 82図 紀銖′1g度(KFRPI )
1 and 2 are a perspective view showing a part of an embodiment of the present invention and a perspective view showing a manufacturing method thereof, and FIGS. 3 and 4 are respectively recording and reproducing of the embodiment shown in FIG. 1. 2 is a graph showing the relationship between output and recording density, and a graph showing the relationship between output and coercive force of a nickel phosphorus film. 1... Data track, 2... Guard band track, 3... Magnetic film, 4...
・Nickel phosphorus film, 5... High remanent magnetization region, 6
...Substrate, 7...Laser light, 8...
... Laser irradiation device, 9... Lens. ! : Data Track 2:f)”-Tono V Ladotra Sof3
J-4: At 41, the date is 5.
: 關田纜佽, b:1+ lute l ward! l: data track otsu: base 7: p-tr 6 S shizu°'-terumi size L 82-zu Kiku'1g degree (KFRPI)

Claims (2)

【特許請求の範囲】[Claims] (1)基体上に50Oe以下の保磁力の軟磁性膜が形成
され、該軟磁性膜上に膜面に垂直に磁気異方性を有する
磁性膜が形成された磁気記録体において、前記軟磁性膜
のデータトラック下の部分の残留磁化の大きさが前記デ
ータトラック間のガードバンドトラック下の部分の残留
磁化の大きさよりも大きいことを特徴とする磁気記録体
(1) In a magnetic recording body in which a soft magnetic film having a coercive force of 50 Oe or less is formed on a substrate, and a magnetic film having magnetic anisotropy perpendicular to the film surface is formed on the soft magnetic film, the soft magnetic A magnetic recording body characterized in that the magnitude of residual magnetization in a portion of the film under the data track is larger than the magnitude of residual magnetization in the portion under the guard band track between the data tracks.
(2)基体上に軟磁性膜を形成する軟磁性膜形成手段と
、該軟磁性膜上に膜面に垂直に磁気異方性を有する磁性
膜を形成する磁性膜形成手段と、少くとも前記軟磁性膜
が形成された前記基体のデータトラックに相当する領域
に光を照射して加熱する加熱手段とを含むことを特徴と
する磁気記録体の製造方法。
(2) a soft magnetic film forming means for forming a soft magnetic film on a substrate; a magnetic film forming means for forming a magnetic film having magnetic anisotropy perpendicular to the film surface on the soft magnetic film; A method for manufacturing a magnetic recording body, comprising: heating means for heating an area corresponding to a data track of the base on which a soft magnetic film is formed by irradiating light.
JP60148613A 1985-07-05 1985-07-05 Magnetic recording body and manufacturing method thereof Expired - Lifetime JPH0766510B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60148613A JPH0766510B2 (en) 1985-07-05 1985-07-05 Magnetic recording body and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60148613A JPH0766510B2 (en) 1985-07-05 1985-07-05 Magnetic recording body and manufacturing method thereof

Publications (2)

Publication Number Publication Date
JPS629518A true JPS629518A (en) 1987-01-17
JPH0766510B2 JPH0766510B2 (en) 1995-07-19

Family

ID=15456697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60148613A Expired - Lifetime JPH0766510B2 (en) 1985-07-05 1985-07-05 Magnetic recording body and manufacturing method thereof

Country Status (1)

Country Link
JP (1) JPH0766510B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02257427A (en) * 1989-03-29 1990-10-18 Nippon Telegr & Teleph Corp <Ntt> Perpendicular magnetic recording medium
JPH02257426A (en) * 1989-03-29 1990-10-18 Nippon Telegr & Teleph Corp <Ntt> Perpendicular magnetic recording medium
US7361419B2 (en) 2003-02-04 2008-04-22 Fuji Electric Device Technology Co., Ltd. Substrate for a perpendicular magnetic recording medium, perpendicular magnetic recording medium, and manufacturing methods thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS523340A (en) * 1975-06-24 1977-01-11 Nec Corp Indication plate driving system
JPS57133487A (en) * 1981-02-12 1982-08-18 Nippon Electric Co Voltage level output circuit
JPS58118029A (en) * 1982-01-05 1983-07-13 Fuji Xerox Co Ltd Double-sided recording medium for vertical magnetic recording
JPS58122595A (en) * 1982-01-14 1983-07-21 日本電気株式会社 Circuit for driving liquid crystal display
JPS61237231A (en) * 1985-04-12 1986-10-22 Nec Corp Magnetic recording body and its production

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS523340A (en) * 1975-06-24 1977-01-11 Nec Corp Indication plate driving system
JPS57133487A (en) * 1981-02-12 1982-08-18 Nippon Electric Co Voltage level output circuit
JPS58118029A (en) * 1982-01-05 1983-07-13 Fuji Xerox Co Ltd Double-sided recording medium for vertical magnetic recording
JPS58122595A (en) * 1982-01-14 1983-07-21 日本電気株式会社 Circuit for driving liquid crystal display
JPS61237231A (en) * 1985-04-12 1986-10-22 Nec Corp Magnetic recording body and its production

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02257427A (en) * 1989-03-29 1990-10-18 Nippon Telegr & Teleph Corp <Ntt> Perpendicular magnetic recording medium
JPH02257426A (en) * 1989-03-29 1990-10-18 Nippon Telegr & Teleph Corp <Ntt> Perpendicular magnetic recording medium
US7361419B2 (en) 2003-02-04 2008-04-22 Fuji Electric Device Technology Co., Ltd. Substrate for a perpendicular magnetic recording medium, perpendicular magnetic recording medium, and manufacturing methods thereof

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