JPS62238537A - Two-dimensional optical deflecting device - Google Patents

Abstract

PURPOSE:To obtain the title device which is excellent in its durability and vibration resistance, and also, is miniaturized, and for which an optical adjustment is not required, by constituting a conveying optical system to that a waveguide light which is emitted to the outside of an optical waveguide by a collinear diffraction is converged to the space of the outside of the optical waveguide. CONSTITUTION:The title device is provided with an optical waveguide 11, a light source 18, an optical system 19 for converting a waveguide light to parallel rays, a surface acoustic wave generating means 12, a driving circuit 17, and also, the second surface acoustic wave generating means 29, and the second driving circuit 20 which is driven so as to generate a surface acoustic wave. Also, a condensing optical system is provided so that the waveguide light 13 which is deflected by a collinear diffraction and emitted to the outside of the optical waveguide 11 is converged in the space of the outside of the optical waveguide 11. In this way, an optical deflection is executed by a simple element which is not provided with a mechanical operating part, therefore, the device becomes that which is excellent in its durability and vibration resistance, and also, the element for deflecting a light beam two-dimensionally can be formed in an accumulated shape on one substrate 16, therefore, the device is miniaturized, and also, its optical adjustment is not required.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of the Invention) The present invention relates to a two-dimensional optical deflection device, and more specifically, to a two-dimensional optical deflection device, which generates surface acoustic waves in an optical waveguide, and uses the surface acoustic waves to two-dimensionally deflect guided light. This invention relates to an optical deflection device.

(Prior art) As is well known, in the past, a photoreceptor was scanned with light. ,5.
2. Description of the Related Art Various optical scanning recording apparatuses are available that record continuous-tone images and black-and-white binary images on photoreceptors. Various optical scanning reading devices are also available that scan a document with light and photoelectrically detect transmitted light, reflected light, or emitted light from the document to read images recorded on the document. ing. In such optical scanning recording devices and optical scanning reading devices, it is necessary to deflect and scan recording light or reading light two-dimensionally. Conventionally, for this purpose, mechanical optical deflectors such as galvanometer mirrors and polygon mirrors (rotating polygon mirrors), or optical deflection elements such as EOD (electro-optic optical deflector) and AOD (acousto-optical optical deflector) have been used. Two optical deflectors were combined, and each optical deflector deflected and scanned the light beam in the Y direction and in the Y direction substantially perpendicular thereto.

However, the mechanical optical deflector described above has disadvantages in that it is susceptible to vibrations, has low mechanical durability, and is troublesome to adjust. There is also the problem that the optical system becomes large in order to take and deflect the light beam roughly, which increases the size of the recording device or reading device.

Further, when using an EOD or AOD, there is a problem that the device tends to be large because the light beam is captured and deflected in the same way as described above. In particular, since the EOD and AOD cannot have a large optical deflection angle, the optical system tends to be larger than when using a mechanical optical deflector.

In general, when combining two optical deflectors, whether using a mechanical optical deflector, EOD, AOD, etc., the relative positions of both optical deflectors must be precisely adjusted. There was also the inconvenience that this adjustment work was extremely troublesome.

Therefore, the guided light traveling inside the optical waveguide is converted into a surface acoustic wave (3A W
: S LlrfaCe A C0uSt
An optical deflection device that uses BraQQ (iCWave) to perform BraQQ diffraction and thereby deflects light has been considered. This optical deflection device includes an optical waveguide formed from a material that allows surface acoustic waves to propagate, a light source that inputs light into the optical waveguide, and an optical system that converts the guided light traveling within the optical waveguide into parallel light. , a means for generating a surface acoustic wave in the optical waveguide that propagates in a direction intersecting the optical path of the guided light and black-diffracts the guided light, and a surface acoustic wave whose frequency continuously changes. It consists of a drive circuit that drives to generate a , it has excellent vibration resistance, is easy to adjust, has high light utilization efficiency, allows precision scanning, and can be formed in a relatively small size.

However, even if the above-mentioned optical deflector is used, two optical deflectors are required to deflect the light beam in two-dimensional directions, which solves the problem of requiring the troublesome adjustment work described above. do not have.

(Objective of the Invention) Therefore, an object of the present invention is to provide a two-dimensional optical deflection device that can solve the various problems described above all at once.

(Structure of the Invention) The two-dimensional optical deflection device of the present invention includes, in addition to the above-described optical waveguide, a light source, an optical system that converts the guided light into parallel light, a surface acoustic wave generation means, and a drive circuit. Roughly speaking, it has a wavefront in a direction that intersects the optical path of the guided light deflected by the Bragg diffraction, so that the guided light is colinear (Collinear).
l i near) a second surface acoustic wave generating means for generating a surface acoustic wave to be diffracted in the optical waveguide and emitting the guided light to the outside of the optical waveguide by the collinear diffraction; , and a second drive circuit that drives the surface acoustic wave to generate a surface acoustic wave whose frequency changes continuously, and the condensing optical system is deflected by collinear diffraction to generate guided light that is outputted from the optical waveguide. , which are arranged so as to be focused in a space outside the optical waveguide.

(Embodiments) Hereinafter, the present invention will be described in detail based on embodiments shown in the drawings.

Figures 1.2 and 3 show the 2
A dimensional light deflection device 10 is shown. The device of this embodiment is applied to an optical scanning recording device as an example, and the recording light is
It is used for dimensionally deflection scanning. This optical scanning recording device includes the two-dimensional optical deflection device 10, a platen 30, and a modulation circuit 40.

The two-dimensional optical deflection device 10 will now be described in detail. This two-dimensional optical deflection device 110 includes an optical waveguide 11 formed on an elongated substrate 16 and a first pair of intersecting comb-shaped electrodes (inter
15, a first drive circuit 17 that applies an alternating voltage to the first IDT 15, and the optical waveguide 1.
A semiconductor laser 18 directly coupled to one end surface 11a (an end surface opposite to the platen 3o) of the semiconductor laser 1;
8. A waveguide lens 19 is formed in the optical waveguide 11 at a position close to the one end surface 11a, and a waveguide lens 19 is formed in the optical waveguide 11 at a position close to the one end surface 11a.
(at a position near the end surface 11b opposite to the optical waveguide 11
A second IDT 25 having an arc shape is formed on the surface of the second IDT 25 . This second IDT 25 includes a second drive circuit 26.
An alternating voltage is applied by. In the optical waveguide 11, a first surface acoustic wave absorber 27 is provided at a position facing the first IDT 15, and a second surface acoustic wave absorber 28 is provided at a position facing the second IDT 25. It is being

In Mr. M's case, as an example, L! Ne
)03 wafer is used, and the optical waveguide 11 is formed by providing a T"1 diffusion film on the surface of this wafer. Note that even if a crystalline substrate made of sapphire, Si, etc. is used as the substrate 16, Also, the optical waveguide 11 is not limited to the Ti diffusion described above, but can also be formed by sputtering or vapor depositing other materials on the substrate 16.
m1 r) Duck 1-inch graded optics (
InteQrated optrcs>: <Tobitkusin Applied Physics (Topics)
ln At) l) tied Physics>7th
Volume) Spr'i ng
er-yer l a(j) (1975); Nishihara, Haruna, and Suhara co-authored 1-Optical integrated circuits'' published by Ohmsha (1985)
There are detailed descriptions in the works of et al., and in the present invention, the optical waveguide 11
Any of these known optical waveguides can be used.

However, this optical waveguide 11 must be formed of a material such as the above-mentioned T1 diffusion material that can propagate surface acoustic waves, which will be described later. Further, the optical waveguide may have a structure of 21 or more products.

The waveguide lens 19 in this embodiment is, for example, a proton exchange type waveguide lens, and such a waveguide lens 19 has a surface of the optical waveguide 11 with a surface of 5lxQ! was deposited, a positive electron beam resist was applied to its surface, a conductive Au thin film was roughly deposited on top of it, a lens pattern was drawn with an electron beam, and AIJMil! A resist pattern obtained by development after peeling is transferred to a 5tNx hood by ion etching, and after the resist is peeled, a known proton exchange is performed to form the resist pattern. Also, the first and second IDT
In step 15.25, for example, a positive electron beam resist is applied to the surface of the optical waveguide 11, an AL+ conductive thin film is roughly deposited thereon, an electrode pattern is drawn with an electron beam, and the AU pattern is peeled off and then developed. , then Cr bookkeeping, A! It can be formed by performing lift-off in an organic solvent after vapor depositing the book pattern.

Note that when the substrate 16 and the optical waveguide 11 are made of a piezoelectric material, the IDT 15.25 can directly connect the optical waveguide 11.
Surface acoustic waves 12.2
9 can be generated, but if this is not the case or if the piezoelectricity is weak, the substrate 16 or the optical waveguide 11
A piezoelectric thin hood made of, for example, ZnO or the like may be formed on a part of the hood by vapor deposition, sputtering, etc., and the IDT 15.25 may be installed there.

The aforementioned semiconductor laser 18 emits a laser beam (@pair beam) 13' from one end surface (light incident end surface) 11a of the optical waveguide 11 into the optical waveguide 11. This radiation beam 13' is converted into a parallel beam 13 by a waveguide lens 19, and this beam 13 travels in the direction of the arrow in the waveguide mode within the optical waveguide 11. Note that the beam 13' is made to enter the optical waveguide 11 via a lens, coupler prism, diffraction grating (grating coupler), etc., instead of directly coupling the semiconductor laser 18 to the light incident end face 11a as described above. Good too. In particular, when a diffraction grating is used here, if it is a condensing diffraction grating formed on the surface of the waveguide, the beam 13' entering the optical waveguide 11 can be made into a parallel beam, and the waveguide lens 19 It can be replaced by However, as in this embodiment, the semiconductor laser 18 is directly coupled to the light incident end face 11a, and the waveguide lens 19 is used to convert the radiation beam 13' into a parallel beam.
If this is used, the two-dimensional optical deflection device 10 can become extremely compact and highly reliable. Further, the light source that generates the scanning light is not limited to the semiconductor laser 18 described above, but other sources such as a gas laser or a solid-state laser may also be used.

When recording an image using the optical scanning recording device having the above structure, the photoreceptor 31 is set on the platen 30.

Then, the semiconductor laser 18 is driven by the laser drive circuit 20.
The first and second IDTs 15.25 are driven to emit the laser beam 13', and at the same time, alternating voltages whose frequencies change continuously are applied from the first and second drive circuits 17.26, respectively. be done.

The laser drive circuit 20 is controlled by a modulation circuit 40 so as to change the optical output according to the image signal S (i.e., the intensity of the beam 13', the number of pulses and the pulse width when emitting the beam 13' in a pulsed manner). ) the semiconductor laser 18 is driven so as to change the

By applying the above-mentioned voltage to the first IDT 15, the surface acoustic wave 12 is transmitted to the surface of the optical waveguide 11 in the first
Proceed in the direction of arrow B in the figure. The first IDT 15 is arranged so that the surface acoustic wave 12 travels in a direction intersecting the optical path of the guided light (parallel beam) 13. Therefore, the guided light 13 travels across the surface acoustic wave 12, and at this time, the guided light 13 undergoes Bragg (8raC1) diffraction by the surface acoustic wave 12.

Bragg diffraction of guided light by surface acoustic waves has been known for some time, but will be briefly explained here. The traveling direction of the surface acoustic wave 12 propagating through the optical waveguide 11 and the guided light 1
3 and the traveling direction (Bragq angle) is θ, the guided light 1 due to the acousto-optic interaction of the surface acoustic wave 12
The deflection angle (diffraction angle) δ of No. 3 is δ=2θ. If the wavelength and effective refractive index of the guided light 13 are λ and Ne, and the wavelength, frequency, and velocity of the surface acoustic wave 12 are A, f, and v, respectively, then 2θ=25 in-t (λ/2Ne- △) 翫λ,
/le·△=λ·f, /N e·■, and 20, that is, δ is approximately proportional to the frequency f of the surface acoustic wave 12. Since the first drive circuit 17 applies an alternating voltage whose frequency changes continuously to the first IDT 15,
The frequency f of the surface acoustic wave 12 changes continuously, and the deflection angle δ changes continuously.

Therefore, this guided light 13 is deflected one-dimensionally as shown by arrow C.

The arc-shaped second IDT 25 is arranged in such a direction that the wavefront of the surface acoustic wave 29 generated therefrom intersects the optical path of the guided light 13 deflected by the Bragg diffraction.

Particularly in this case, the second IDT 25 is shaped to form part of a concentric circle centered on the Bragg diffraction center O (see FIG. 2). Therefore, the surface acoustic wave 29 emitted from this second IDT 25 is
Regardless of the deflection angle δ of the guided light 13 by the surface acoustic wave 12,
The wavefront always travels in a direction perpendicular to the guided light 13.

When an alternating voltage is applied from the second drive circuit 26 to the second IDT 25 and the surface acoustic wave 29 as described above is emitted from the second IDT 25, the guided light 13 is acousto-optical with the surface acoustic wave 29. Due to the interaction, the substrate 16 side t: Co-+
) near diffracts and exits from the substrate end surface 16a. This diffraction is also conventionally known, but will be briefly explained below.

The wavelength of the guided light 13 and the effective refractive index are λ and Ne, and the substrate 1
The optical refractive index of 6 is n2. Wavelength and frequency of surface acoustic waves 29,
If the velocities are Δl, ill, and vl, respectively, the deflection angle of the guided light 13 due to the collinear diffraction is the diffraction angle)
φ is =cos −1(U e−λ/A′)/nz)=cos
-'(Ue-f'-λ/v')/nz). That is, by changing the frequency @f' of the surface acoustic wave 29, the diffraction angle Φ of the guided light 13 can be changed. For example, if the frequency f' is increased, the diffraction angle Φ
also increases.

Since the second drive circuit 26 applies an alternating voltage whose frequency changes continuously to the second 1DT 25, surface acoustic waves? 9 changes continuously, and the above (deflection angle) changes continuously. Therefore, the end face 16G
The light 13 emitted to the outside of the substrate 16 is deflected as shown by the arrow in FIG. 3, and is eventually deflected two-dimensionally together with the deflection caused by the surface acoustic wave 12.

A focusing lens 65 is located at a position facing the substrate end surface 16c.
The light 13 emitted from the blocking plate 16 is focused by the focusing lens 65 onto a small spot P in the space outside the optical waveguide 11. As described above, since the deflection angle of the guided light 13 in the direction of arrow C changes continuously, this beam spot P scans (main scans) in the direction of arrow X in FIG. As mentioned earlier, the guided light 13, that is, the laser beam 13' focused on the spot P is modulated by the image signal @Sk:I; As a result, the continuous tone image carried by the image signal S is recorded for one main scanning line. At the same time, the guided light 13 is deflected in the direction of the arrow as described above, and the beam spot P is scanned in the direction of the arrow Y in FIG.
Because of this, a two-dimensional image carried by the image signal S is recorded on the photoreceptor 31.

In order to synchronize the image signal S for one main scanning line with the main scanning of the beam spot P, the blanking signal 3b included in the image signal S is used as a trigger signal to control the voltage applied to the first IDT 15. The application timing may be controlled. Also, this blanking signal Sb causes the second IDT to
By controlling the drive timing of step 5), the main scanning and sub-scanning can be synchronized.

Note that in this embodiment, the semiconductor laser 18 is directly modulated according to the image signal S;
A laser beam of a constant intensity is emitted from the semiconductor laser 18 and the optical waveguide 11 is emitted, and an external modulator such as an AOM (acousto-optic modulator) or an EOM (electro-optic modulator) is inserted between the semiconductor laser 18 and the optical waveguide 11. The beam may also be modulated. In other words, by changing the magnitude of the voltage applied to the IDT 15 or 25, the intensity of the light diffracted by the surface acoustic waves 12 or 29 can be changed. The guided light 13 can also be intensity-modulated by controlling it accordingly. Further, the modulation method is not limited to the intensity modulation of the laser beam, and the laser beam may be emitted in a pulsed manner, and the width or number of pulses may be modulated in accordance with the image signal S. Roughly speaking, in this embodiment, a continuous tone image is recorded on the photoreceptor 31, but a black and white binary image can be recorded by controlling the semiconductor laser 18 on and off according to the image signal. Of course it is also possible.

Note that a surface acoustic wave 29 obtained by collinear diffracting the guided light 13
is absorbed by the second surface acoustic wave absorber 28 so as not to interfere with the surface acoustic wave 12. Here, this surface acoustic wave absorber 28 is designed to have a refractive index lower than the refractive index of the waveguide helmet. In other words, it is desirable that the curvature index of the absorber 28 is sufficiently low so that the guided mode is preserved. On the other hand, the surface acoustic wave 12 obtained by Bragg diffracting the guided light 13 is absorbed by the first surface acoustic wave absorber 27 and is prevented from interfering with the surface acoustic wave 29. Specifically, as such surface acoustic wave absorbers 27 and 28, a polymer film or the like with high ultrasonic absorption rate can be used.

Note that as the second surface acoustic wave absorber 28, a material having a small optical refractive index is selectively used. Thereby, the guided light 13 can pass through this surface acoustic wave absorber 28 well.

In addition, the wavelength λ of the guided light 13 and the wavelength Δ′ of the surface acoustic wave 29
, and depending on the settings of the optical layer refractive index n2 of the substrate 16 and the effective refractive index Ne of the optical waveguide 11, the guided light 13 can be directed not only to the substrate 16 side but also to the side opposite to the substrate 16 (upper side in FIG. 1). It can be diffracted in both directions. Therefore, the optical waveguide 11
It is also possible to arrange a photoreceptor above the photoreceptor and perform optical scanning recording on the photoreceptor.

However, as in the embodiment described above, it is preferable to diffract the guided light 13 only toward the substrate 16 side, since this increases the utilization efficiency of the guided light 13 for optical scanning recording. The conditions under which the guided light 13 can be collinearly diffracted only toward the substrate 16 side will be described below. The optical refractive index of air is no, the effective diffraction index of the guided light 13 is Ne, the optical refractive index of the substrate 16 is n2, and the mode order of the diffracted light (only negative odd modes are actually efficiently diffracted) is q. Then, the conditions for diffraction toward the substrate 16 side are as follows: when no<n2, no<' Ne+q·λ/Δ1, and <n2. Generally, the order with the best diffraction efficiency is q=-1, so nO<n>Ne-[lambda]/, A'+<n2. Since it is not realistic for the wavelength of the surface acoustic wave 29 to become so short that (Ne-λ/△') The wave light 13 is diffracted only toward the substrate 16 side.

In the embodiment described above, the second IDT 25 for collinearly diffracting the guided light 13 is formed in an arc shape.
Similarly, it may be linear. However, if the second IDT 25 is made arc-shaped as described above and generates an arc-shaped surface acoustic wave 29 centered on the center O of Bragg diffraction of the guided light 13, the guided light 13 ((
Even if the q angle changes, the acousto-optic interaction between the guided light 13 and the surface acoustic wave 29 is kept constant, and the collinear diffraction conditions are kept constant, so that the light 13 extracted from the optical waveguide 11 This is preferable because there is no fluctuation in the amount of light.

Further, it is more preferable that the optical waveguide 11 is formed from an amorphous material such as As2S3. Then, the guided light 1
Both the acousto-optic interaction between the guided light 13 and the surface acoustic wave 29 and the acousto-optic interaction between the guided light 13 and the surface acoustic wave 29 are sufficiently enhanced, so that both Black diffraction and collinear diffraction are well performed, and the light 13 It can be deflected well in both the X and Y directions.

Next, a second embodiment of the present invention will be described with reference to FIG. 4.5. In addition, in this Figure 4.5, the first
．． Elements that are equivalent to those in Figures 2 and 3 are given the same numbers, and explanations thereof will be omitted unless particularly necessary. In the two-dimensional optical deflection device 50 of this second embodiment,
A glass block 60 is bonded to the bottom surface 16a of the substrate 16. This glass block 60 has light reflecting layers 61a and 61b on a surface 60a on the side to be joined to the substrate 16 and on a surface 60b opposite to this surface 60a, respectively. These light reflecting layers 61a and 61b are made of, for example, vapor-deposited mirrors. And an end surface 16c of the substrate 16 opposite to the end surface 16b on the side where the semiconductor laser 18 is attached.
is formed on a diagonal flat surface facing upward in the figure. Therefore, the light 13 collinearly diffracted by the surface acoustic wave 29 is totally reflected at the end face 16c and enters the glass block 60. Naturally, the oblique cut angle of the end face 16C is set to an angle that causes the above-mentioned total reflection, and the light reflecting layer 61a is formed in the range where the light 13 is incident on the surface 60a of the glass block 60. Not yet.

Light 1 entering the glass block 60 as described above
3 is two opposing light amounts of 9A! 161a and 61b, and is emitted to the outside of the glass block 60 from the surface 60b from which the light reflection layer 61b is partially removed. Therefore, in this case as well, if the photoreceptor 31 is placed at a position irradiated by the focused spot P of the light 13 emitted from the glass block 60, this photoreceptor 31 will be located at the spot P.
The image carried by the image signal S is two-dimensionally scanned by the photoreceptor 31 and recorded on the photoreceptor 31. In this two-dimensional optical deflection device 50, since the optical path of the scanning light is folded within the glass block 60 as described above, even if the deflector device 50 including the glass block 60 is formed in a small size,
Photoreceptor 31 from the part deflected by surface acoustic wave 29
It is possible to set a sufficiently long optical path length to ensure a long scanning width.

Note that in this second embodiment device, as shown in FIG. 4, the arrangement relationship between the second IDT 25 and the second surface acoustic wave absorber 28 is opposite to that in the first embodiment device. It has become. In other words, in the device of the first embodiment, the surface acoustic waves 29 travel in the direction opposite to the traveling direction of the guided light 13, whereas in the device of the second embodiment, the surface acoustic waves 29 travel in the direction opposite to the traveling direction of the guided light 13. It is set to proceed in the same direction. Even in this case, the guided light 13 can be extracted out of the optical waveguide 11 by collinear diffraction. Further, in this second embodiment device 6, a focusing lens 65 is provided below the glass block 60, and the light emitted from the glass block 60 is directed to the focusing lens 65.
5 to focus on a spot P.

Note that in order to make the length of the reflected optical path within the glass block 60 longer, and the light 1 reflected at the end surface 16c.
In order to make the light 13 enter the glass block 60 more efficiently, it is of course preferable to set the oblique cut angle of the end face 16C so that the light 13 enters the glass block 60 at as small an incident angle as possible.

Referring now to FIG. 6, 2 according to a third embodiment of the invention.
The dimensional light deflection device 70 will be explained. This fruit TF! In the embodiment device, the end surface 1f51C of the substrate 16 is
．． A diagonal cut is made in the opposite direction to that in the apparatus shown in FIG. 5, and a glass block 60 is bonded thereto. In this case, the oblique cut angle of the end face 16G is set so that the light 13 enters the glass block 60 at as small an incident angle as possible. In this way, the surface acoustic wave 2
The guided light 13 collinearly diffracted by 9 can efficiently enter the glass block 60, and the optical path length of the folded optical path within the glass block 60 can be set to be sufficiently long.

Also in the two-dimensional light deflection device 70 configured as described above, a folded optical path is formed within the glass block 60, and the same effect as in the device shown in FIG. 4.5 can be obtained. Since this third embodiment device 70 or the second embodiment device 50 forms a folded optical path in the glass block 60, it can be placed close to the photoreceptor 31 even if the scanning width is relatively long. This makes it possible, especially for small-sized structures.

In the embodiment described above, the light emitted from the substrate 16 is focused by the focusing lens 65, but instead of using such a focusing lens 69, a 12-dimensional optical deflection device 90 shown in FIGS. 7 and 8 is used. As shown in FIG. 2, the end face 16c of the closing plate may have a spherical shape, and the emitted light may be focused by the action of the end face 16c.

The embodiment device applied to an optical scanning recording device has been described above, but the two-dimensional optical deflection device of the present invention is not limited to such an optical scanning recording device, but can also be used in an optical scanning reading device as described above. Of course, it is also possible to use the light beam for two-dimensional deflection scanning. Furthermore, the two-dimensional optical deflection device of the present invention is useful not only for scanning a light beam as described above, but also for directing the optical axis from X to X in various optical systems.
It can also be used for fine adjustment in the Y direction.

Roughly speaking, the two-dimensional light deflection device of the present invention can also be applied to display devices by irradiating a fluorescent surface with a deflected beam after sufficiently increasing the velocity of light in the X and Y directions (q). It is.

(Effects of the Invention) As explained in detail above, the two-dimensional optical deflection device of the present invention has the following features:
Since light deflection is performed by a simple element that does not include mechanically operating parts, it has excellent durability and photographic resistance. Moreover, since the device of the present invention is formed in the form of an element that two-dimensionally deflects the light beam integrated on a single substrate, it is miserable, small, and requires no optical adjustment, making it inexpensive. .

[Brief explanation of drawings]

1.2 and 3 respectively show a schematic perspective view, a top view and a side view of a first embodiment device of the invention; FIGS. 4 and 5 respectively show a second embodiment device of the invention A schematic perspective view and a side view, FIG. 6 is the third embodiment of the present invention.
7 and 8 are a plan view and a side view, respectively, showing a fourth embodiment device of the present invention. 10, 50.70.90... Two-dimensional light deflection device 11.
...Optical waveguide 12.29...Surface acoustic wave 1
3... Waveguide light 15... First intersecting comb-shaped electrode pair 16... Substrate 16a... Bottom surface 16b, c of substrate... End surface of substrate 17... First drive circuit 1B. ...Semiconductor laser 19...Waveguide lens 20...Laser drive circuit 25...Second interdigitated electrode pair? 6...Second drive circuit 27.28...Surface acoustic wave absorber 31...Photoreceptor 40...Modulation circuit 60...Glass blocks 60a, b...Glass block surface 61a, t:+
...Light reflection jl 65...Focusing lens P...
Beam spot S...Image signal sb...Blanking signal Fig. 2 Fig. 3 Fig. 5 Fig. 6 Crystal

Claims (3)

[Claims] (1) An optical waveguide formed of a material through which surface acoustic waves can propagate; a light source that allows light to enter the optical waveguide; an optical system that converts guided light traveling within the optical waveguide into parallel light; and the optical waveguide. a first surface acoustic wave generating means for generating in the optical waveguide a surface acoustic wave that propagates in a direction intersecting the optical path of the wave light and causes Bragg diffraction of the guided light; a first drive circuit that drives the surface acoustic wave to generate a surface acoustic wave whose frequency changes; and a surface elastic circuit that has a wavefront in a direction that intersects the optical path of the guided light deflected by the Bragg diffraction and causes the guided light to collinearly diffract. a second surface acoustic wave generating means for generating a wave in the optical waveguide and emitting the guided light out of the optical waveguide by the collinear diffraction; and a frequency of the second surface acoustic wave generating means is continuously changed. a second drive circuit that is driven to generate a surface acoustic wave, and a condensing optical system that focuses the guided light that is deflected by the collinear diffraction and exits out of the optical waveguide in a space outside the optical waveguide. A two-dimensional optical deflection device consisting of. (2) Claims characterized in that the second surface acoustic wave generating means is configured to generate a surface acoustic wave having an arcuate wavefront centered at the center of the Bragg diffraction. 2. The two-dimensional optical deflection device according to item 1. (3) The optical waveguide is provided with a surface acoustic wave absorber that absorbs a surface acoustic wave obtained by collinearly diffracting the guided light. Dimensional light deflection device.